Hand barrow
Technical field
The utility model relates to a kind of transportation means, particularly a kind of hand barrow in order to transportation photoresistance bottle.
Background technology
Photoresistance is mainly used in the trickle course of processing of integrated circuit and semi-conductor discrete device in the electronics industry, it utilizes the photochemical reaction principle, through exposure, development needed Micropicture is transferred on the substrate to be processed from the mask version, carries out technologies such as etching, diffusion, ion injection, metallization then.Therefore, photoresistance is a key basic chemical industry material in the electronics industry.In the quartz conductor manufacturing shop, need consume a large amount of photoresistances every day.Photoresistance is as a kind of light-sensitive compound of costliness, need be stored between the stock of low-temperature dark in, when process apparatus need be changed photoresistance, use the process apparatus place of hand barrow in being transported to photoresistance between photoetching, carry out more changing jobs of photoresistance.
The hand barrow that is used to transport the photoresistance bottle of prior art, it comprises ringent holding part and is fixedly arranged on shelf on the described holding part, described shelf is provided with the opening that is complementary with described photoresistance bottle shape, the photoresistance bottle of filling photoresistance can be placed in the described holding part by described opening, re-use existing hand barrow photoresistance is transported to process apparatus place interior between photoetching.For prevent that photoresistance from splashing down on the floor in the process of changing, not easy to clean, and then influence cleanliness between photoetching, therefore often be used a pallet, the photoresistance bottle is placed on carries out replacing work on the pallet, change cleaning trays behind the photoresistance at every turn, again pallet is put back into the pallet storage location.When therefore changing photoresistance, operating personal need pick and place pallet in addition, has wasted the time, is unfavorable for enhancing productivity at every turn.And, also need to be provided with in addition the space of storage tray.
The utility model content
In view of this, the utility model provides a kind of hand barrow, can only transport photoresistance to solve existing hand barrow, carrying out photoresistance when more changing jobs, needs other spended time pick and place pallet, and the problem of the storage tray that also need take up room in addition.
For addressing the above problem, the utility model provides a kind of hand barrow, is used to transport the photoresistance bottle, comprising: pallet, and movable is positioned in the described holding part; And bottle stand, movable is positioned in the described holding part, and is positioned on the described pallet.
Optionally, described bottle stand comprises: go up shelf, shelf and connect the pillar of shelf up and down down.
Optionally, the described shelf of going up has opening, is used for fixing described photoresistance bottle, the bottle form fit of described opening shape and described photoresistance bottle.
Optionally, described bottle stand also comprises handle, is arranged at described two ends of going up shelf.
Optionally, described pallet comprises handle, is arranged at described pallet two ends.
Optionally, described hand barrow has two holding parts.
Optionally, described holding part is surrounded by sidewall and bottom.
The hand barrow that the utility model provides comprises holding part, pallet and bottle stand.When changing photoresistance at every turn, described bottle stand is taken out in described holding part, again described pallet is taken out, described pallet can prevent that photoresistance from splashing to contaminated environment on the floor, and need not takes time in addition picks and places pallet, can improve the replacing efficient of photoresistance, and can be after the photoresistance replacing finishes, described pallet is put back in the holding part of described hand barrow, need not the pallet storing place is set in addition, saved the space.
Description of drawings
The scheme drawing of the hand barrow that Fig. 1 is proposed for the utility model one embodiment.
The specific embodiment
Below in conjunction with the drawings and specific embodiments the hand barrow that the utility model one embodiment is proposed is described in further detail.
Referring to Fig. 1, the scheme drawing of the hand barrow that it is proposed for the utility model one embodiment, described hand barrow 100 is used to transport the photoresistance bottle, and it comprises holding part 110, push-plate 120 and bottle stand 130.
Wherein, holding part 110, for having the container of an opening, it is made of sidewall 111 and bottom 112, pallet 120 mobilizable being positioned in the holding part 110, and pallet 120 also comprises arc shape handle 121 in one embodiment, is arranged at described pallet 120 two ends, and the personnel of being convenient to operation pick and place pallet 120.Bottle stand 130, mobilizable being placed in the holding part 110, and be positioned on the pallet 120, described bottle stand 130 comprises: go up shelf 131, following shelf 132 and pillar 133, described pillar 133 is used to connect shelf 131 and reaches shelf 132 down, the described shelf 131 of going up has opening 134, its quantity is two, described opening 134 is complementary with the bottle shape of described photoresistance bottle, is circle, and described photoresistance bottle can be inserted in the bottle stand 130 via opening 134, be placed on down on the shelf 132, bottle stand 130 also comprises arc shape handle 135, is arranged at the two ends of shelf 131, and the personnel of being convenient to operation pick and place bottle stand 130.
In an embodiment of the present utility model, hand barrow 100 also comprises pushing hands 140 and wheel 150.Pushing hands 140 is arranged on the upper strata holding part 110, is used to promote described hand barrow 100.The quantity of wheel 150 is 4, for the universal band castor of stopping, turns to brake in the process that makes things convenient for hand barrow 100 to move.
In the semiconductor production manufacturing process, when need changing photoresistance, described hand barrow 100 can be pushed between the storage that stores photoresistance, the photoresistance bottle of the filling photoresistance opening 134 by last shelf 131 is inserted in the bottle stand 130.Because the opening 134 of bottle stand 130 is circular, its size bottle shape proper and the photoresistance bottle is complementary, and therefore the photoresistance bottle can be fixed in the bottle stand 130, guarantees that in the moving process of hand barrow 100, the photoresistance bottle can not rock, and guarantees transporting safely of photoresistance bottle.After being transported to the photoresistance bottle between photoetching, can carry out more changing jobs of photoresistance.At this moment, can hold handle 135 takes out bottle stand 130 in holding part 110.Hold the pallet 120 that handle 121 will be positioned at bottom again and take out, be positioned on the floor, at this moment, the photoresistance bottle can be taken out in bottle stand 130, be positioned on the pallet 120, begin to carry out more changing jobs of photoresistance from holding part 110.Pallet 120 can prevent that photoresistance splashes on the floor, and is not easy to clean in the process that photoresistance is changed, and influences cleanliness interior between photoetching.After the photoresistance replacing finishes, pallet 120 can be cleaned up, put back in the holding part 110 of go-cart 100, again bottle stand 130 is placed on the pallet 120, empty photoresistance bottle is transported to the corresponding location.Because pallet 120 is that hand barrow 100 carries, so need not to get in addition pallet, can save time again.And pallet 120 is placed in the hand barrow 100, and need not takes up room in addition deposits and use pallet.
In an embodiment of the present utility model, described hand barrow 100 comprises two-layer holding part up and down, can place two bottle stands, and each bottle stand is provided with two openings, and hand barrow 100 can once transport four bottles of photoresistances like this.In other embodiment of the present utility model, also can increase the quantity of holding part in conjunction with needs, expand the storage area of holding part, or increase the open amount of each bottle stand, to improve the transport capacity of hand barrow.
In sum, hand barrow provided by the utility model is used to transport the photoresistance bottle, comprises holding part, pallet and bottle stand.When changing photoresistance at every turn, described bottle stand is taken out in described holding part, again described pallet is taken out, be placed on and prevent on the floor that photoresistance from splashing to contaminated environment on the floor, need not to pick and place in addition pallet, can save time, enhance productivity, and can after the photoresistance replacing finishes, described pallet be put back in the holding part of described hand barrow, need not to take up room in addition storage trays.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.