CN201319371Y - Silicon chip box platform with tilt function - Google Patents
Silicon chip box platform with tilt function Download PDFInfo
- Publication number
- CN201319371Y CN201319371Y CNU2008201232330U CN200820123233U CN201319371Y CN 201319371 Y CN201319371 Y CN 201319371Y CN U2008201232330 U CNU2008201232330 U CN U2008201232330U CN 200820123233 U CN200820123233 U CN 200820123233U CN 201319371 Y CN201319371 Y CN 201319371Y
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- CN
- China
- Prior art keywords
- silicon chip
- rotating shaft
- face plate
- returning face
- contiguous block
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Abstract
The utility model relates to a silicon chip box platform with tilt function, which is characterized in that the silicon chip box platform comprises two positioning shafts, wherein, a guard plate frame is connected on the two positioning shafts, the guard plate frame is connected with the front end of the bottom of an overturn plate through a shaft rotating mechanism, a fixing plate is connected on the two positioning shafts inside the guard plate frame, a crankshaft link mechanism connected with an actuating device is connected on the fixing plate, the output end of the crankshaft link mechanism is connected with the rear end of the bottom of the overturn plate through a rotary block, and a silicon chip box is connected with the top part of the overturn plate. As the crankshaft of the crankshaft link mechanism performs intermittent oscillation in a reciprocating manner with the angle range of 0-180 degrees, the silicon chip box conducts oscillation in a tilting manner. The utility model is characterized by the simple and reasonable arrangement of the core mechanisms, namely, the crankshaft link mechanism and the shaft rotating mechanism, and realizes steady automatic tilting, thereby solving the difficult problems in the prior art.
Description
Technical field
The utility model relates to a kind of support platform, particularly about a kind of silicon chip kit platform with pitching function.
Background technology
The silicon chip that is used for semiconductor fabrication process equipment at present all must be placed in a kind of special silicon box, each silicon box can be placed 25 silicon chips (international standard), silicon box is placed on the platform of process equipment, picks and places silicon chip by the manipulator of special use from the silicon box of platform.At present in the world fixing silicon chip kit platform being arranged and having the silicon chip kit platform etc. of pitching function of using more.Silicon chip kit platform with pitching function just occurs in recent years, it has following advantage: 1, silicon chip kit platform can be fixed angle of altitude placement, more stable when the operator picks and places silicon box, silicon chip is difficult for skidding off in the box, can guarantee the accurate position of silicon chip in silicon box.When 2, the operator carries out loading or unloading operation on the silicon chip kit platform with a fixed angle of altitude, also be pleasant work posture, also much safe simultaneously.3, when 30～45 ° of platform pitching silicon chip slowly slippage to the silicon box bottom, the circular shape consistent with the silicon chip diameter (international standard) arranged at the bottom, (annotates: the center of circle that will know silicon chip in the manufacturing process of chip all the time) thereby reach the self centering effect of silicon chip.But the silicon chip kit platform complex structure of present band pitching function, and when pitch attitude changes, shaking easily, and then drive silicon chip and shake together, this phenomenon is that the user is unacceptable.
Summary of the invention
At the problems referred to above, but the purpose of this utility model is the silicon chip kit platform that proposes a kind of simple in structure, stable action automatic pitching swing.
For achieving the above object, the utility model is taked following technical scheme: a kind of silicon chip kit platform with pitching function, it comprises two locating shafts, is connected with a casing frame on described two locating shafts, and described casing frame connects the bottom front of a returning face plate by a rotating shaft mechanism; Connect a fixed head on two locating shafts in the described casing frame, on described fixed head, connect a toggle by the power set connection, the output of described toggle is connected to the rear end, bottom of described returning face plate by a switch block, the top of described returning face plate connects silicon box, when the crank of described toggle in 0～180 ° of scope during the intermittent reciprocating swing, the returning face plate that connects described silicon box is faced upward the swing of bowing.
Described rotating shaft mechanism can comprise that one is rotatably connected on rotating shaft and in the described casing frame and is fixedly connected on contiguous block in the described rotating shaft, and the other end of described contiguous block is fixed on the bottom front of described returning face plate.
Described rotating shaft mechanism can also comprise that one is fixedly connected on rotating shaft and in the described casing frame and is rotatably connected on contiguous block in the described rotating shaft, and the other end of described contiguous block is fixed on the bottom front of described returning face plate.
The position of crank is provided with 0 ° of position beam position transducer that a described returning face plate is horizontal relatively on described fixed head, output shaft with power set is the center, with the position of 180 ° of described 0 ° of phasic differences another beam position transducer is set, and one bumping post is set in 0 ° of position of described crank.
Described contiguous block one side is provided with a support spring, and the other end of described support spring is fixed on the locating shaft of described front end by a link.
Described crank is provided with the slotted hole of the described connecting rod that is used to be rotationally connected.
Described power set can be rotary cylinder, also can be stepping motor.
The utility model is owing to take above technical scheme, it has the following advantages: 1, the utility model is owing to be provided with the toggle that a cover drives by power set, and the movement velocity of toggle, just meet complete dextrorotation curvilinear motion rule, promptly the speed in the motion of 0 ° and 180 ° two start and stop point positions gradually becomes zero, therefore drive in the process of returning face plate motion of silicon chip kit platform very steady in crank-bar linkage mechanism, particularly can not cause any vibrations, realize utility model purpose of the present utility model at place, two start and stop working points.2, the utility model is provided with a contiguous block in silicon chip kit platform returning face plate bottom, and contiguous block is connected in the rotating shaft of below, makes returning face plate can drive the motion of contiguous block or the relative contiguous block of rotating shaft by rotating shaft, and forming with the rotating shaft is the elevating movement in axle center.3, the utility model also is provided with a support spring on contiguous block, therefore can be to the firm supplemental support of the anterior formation of silicon chip kit platform, even beyond thought situation occurred, also can guarantee the accident that silicon chip kit platform can not turn forward, guarantee that effectively silicon chip can not damage in landing.4, on the crank on the toggle of the present utility model circular slotted hole is set, therefore can realizes regulating the adjustment of silicon chip kit platform luffing angle by regulating the link position between crank and the connecting rod.5, the setting of core institution of the present utility model-crank-bar linkage mechanism and rotating shaft mechanism has simple and reasonablely, can realize automatic pitching, can realize steady pitching again, has solved a difficult problem that exists in the prior art.
Description of drawings
Fig. 1 is the utility model structural upright schematic diagram
Fig. 2 is the perspective view that the utility model structure is observed from another angle
Fig. 3 is the utility model side schematic view
Embodiment
Below in conjunction with drawings and Examples the utility model is described in detail.
Shown in Fig. 1～3, the utility model comprises that an end of two locating shafts, 1, two locating shaft 1 is used for being located by connecting with other device, and two locating shafts 1 can be equally long, also can the length difference.Be fixedly connected with a casing frame 2 on two locating shafts 1, connect a rotating shaft 3 on casing frame 2 tops by bearing, rotating shaft 3 and two locating shafts 1 are in the space parallel setting.The bottom front that in rotating shaft 3, connects a returning face plate 5 by a contiguous block 4 fixed thereon, the silicon box 6 of the fixedly connected standard in the top of returning face plate 5.Side at contiguous block 4 is provided with a support spring 7, and the other end of support spring 7 is by on a link 8 fixedly connected locating shafts 1 therein.
On two locating shafts 1, go back fixed support one fixed head 9, fixedly connected power set 10 on the fixed head 9, power set 10 can be rotary cylinders, also can be the devices of stepping motor or other exportable rotary power.The output of power set 10 connects a crank 11, and crank 11 is away from an end of the motor center connecting rod 12 that is rotationally connected, and the other end of connecting rod 12 is by a bearing pin 13 switch block 14 that is rotationally connected, and switch block 14 tops connect the rear end, bottom of returning face plate 5.
In the foregoing description, the rotating shaft mechanism by rotating shaft 3, contiguous block 4 are formed also can adopt other version, such as: rotating shaft is fixedly connected on the casing frame 2, and the contiguous block 4 that connects on the returning face plate 5 is to be connected rotationally in the rotating shaft 3.In addition, casing frame 2 can be surrounded by the four sides backplate, also can be by three (open-front), or five (bottom surface also is provided with) backplates surround.
In the foregoing description, make the silicon chip landing in order to prevent silicon box 6 from too tilting forward, the utility model is provided with two beam position transducers corresponding with crank 11 turned positions 15,16 on fixed head 9,15, the 16 relative 180 ° of settings of two beam position transducers, the horizontal level of one of them beam position transducer 15 induction returning face plate 5, the maximum inclining position of another beam position transducer 15 induction returning face plates 5.In addition, crank 11 places when being horizontal (generally being referred to as 0) at returning face plate 5 are provided with a bumping post 17, change to prevent that crank 11 from crossing, and block 17 and also are fixed on the fixed head 9.
In the foregoing description, on the crank 11 slotted hole can be set, the eccentric degree when being used for 12 rotations of conversion connecting rod, and then the limit angle of inclination of change silicon box 6 changes between 30～45 °.
When the utility model uses, need regulate the horizontal level that is connected silicon box 6 on the returning face plate 5, at this moment, crank 11 and connecting rod 12 are in (as shown in Figure 3) on the same straight line, form interlocking.When power set 10 drive cranks 11 turn clockwise, crank 11 drivening rods 12 moving power output eccentric swings, it is to overturn downwards (as shown in Figure 1) in the axle center with rotating shaft 3 that connecting rod 12 drives returning face plate 5 by bearing pin 13 and switch block 14, and then is upwards steeved in silicon box 6 front portions.When crank 11 is rocked to 180 °, crank 11 and connecting rod 12 are in same straight line again, this moment, power set 10 were through the function meeting stall that sets in advance or power set self have, crank 11 stops swinging, simultaneously the beam position transducer 16 of 180 ° of positions sends signal, manipulator or manually can begin fetching and delivering silicon chip.When end of operation, power set 10 are counter-rotation again, crank 11 drivening rods 12, connecting rod 12 passes through bearing pin 13 and switch block 14 drive returning face plates 5 and silicon box 6 Reversion Level position gradually, at this moment, the beam position transducer 15 of 0 ° of position sends signal, and manipulator begins the operation of fetching and delivering silicon chip.In said process, be connected the effect that the support spring 7 between contiguous block 4 and the link 8 can play supplemental support and reset gently.
Should be noted that above execution mode is only unrestricted in order to the explanation the technical solution of the utility model; those skilled in the art is to be understood that; the technical solution of the utility model is made amendment or is equal to replacement, all should not should get rid of outside the utility model protection range.
Claims (10)
1, a kind of silicon chip kit platform with pitching function, it is characterized in that: it comprises two locating shafts, is connected with a casing frame on described two locating shafts, described casing frame connects the bottom front of a returning face plate by a rotating shaft mechanism; Connect a fixed head on two locating shafts in the described casing frame, on described fixed head, connect a toggle by the power set connection, the output of described toggle is connected to the rear end, bottom of described returning face plate by a switch block, the top of described returning face plate connects a silicon box, when the crank of described toggle during the intermittent reciprocating swing, drives described silicon box and faces upward the swing of bowing in 0～180 ° of scope.
2, a kind of silicon chip kit platform as claimed in claim 1 with pitching function, it is characterized in that: described rotating shaft mechanism comprises that one is rotatably connected on rotating shaft and in the described casing frame and is fixedly connected on contiguous block in the described rotating shaft, and the other end of described contiguous block is fixed on the bottom front of described returning face plate.
3, a kind of silicon chip kit platform as claimed in claim 1 with pitching function, it is characterized in that: described rotating shaft mechanism comprises that one is fixedly connected on rotating shaft and in the described casing frame and is rotatably connected on contiguous block in the described rotating shaft, and the other end of described contiguous block is fixed on the bottom front of described returning face plate.
4, as claim 1 or 2 or 3 described a kind of silicon chip kit platforms with pitching function, it is characterized in that: the position of crank is provided with 0 ° of position beam position transducer that a described returning face plate is horizontal relatively on described fixed head, output shaft with power set is the center, with the position of 180 ° of described 0 ° of phasic differences another beam position transducer is set, and one bumping post is set in 0 ° of position of described crank.
5, as claim 1 or 2 or 3 described a kind of silicon chip kit platforms with pitching function, it is characterized in that: described rotating shaft mechanism is connected to the bottom front of described returning face plate by a contiguous block, described contiguous block one side is provided with a support spring, and the other end of described support spring is fixed on the locating shaft of described front end by a link.
6, a kind of silicon chip kit platform as claimed in claim 4 with pitching function, it is characterized in that: described rotating shaft mechanism is connected to the bottom front of described returning face plate by a contiguous block, described contiguous block one side is provided with a support spring, and the other end of described support spring is fixed on the locating shaft of described front end by a link.
7, as claim 1 or 2 or 3 or 6 described a kind of silicon chip kit platforms with pitching function, it is characterized in that: described crank is provided with the slotted hole of the described connecting rod that is used to be rotationally connected.
8, a kind of silicon chip kit platform with pitching function as claimed in claim 4 is characterized in that: described crank is provided with the slotted hole of the described connecting rod that is used to be rotationally connected.
9, a kind of silicon chip kit platform with pitching function as claimed in claim 5 is characterized in that: described crank is provided with the slotted hole of the described connecting rod that is used to be rotationally connected.
10, as claim 1 or 2 or 3 or 6 or 8 or 9 described a kind of silicon chip kit platforms with pitching function, it is characterized in that: described power set are one of rotary cylinder and stepping motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201232330U CN201319371Y (en) | 2008-10-24 | 2008-10-24 | Silicon chip box platform with tilt function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201232330U CN201319371Y (en) | 2008-10-24 | 2008-10-24 | Silicon chip box platform with tilt function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201319371Y true CN201319371Y (en) | 2009-09-30 |
Family
ID=41198133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201232330U Expired - Fee Related CN201319371Y (en) | 2008-10-24 | 2008-10-24 | Silicon chip box platform with tilt function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201319371Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102785993A (en) * | 2012-08-11 | 2012-11-21 | 山西亚乐士环保技术股份有限公司 | Quick lifting appliance replacer |
| CN109962029A (en) * | 2017-12-14 | 2019-07-02 | 北京北方华创微电子装备有限公司 | Film magazine rotating mechanism and loading chamber |
| CN114413143A (en) * | 2022-03-07 | 2022-04-29 | 杭州讯意迪科技有限公司 | Hidden display screen with manual-automatic integrated mechanism lifting and angle adjusting functions |
-
2008
- 2008-10-24 CN CNU2008201232330U patent/CN201319371Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102785993A (en) * | 2012-08-11 | 2012-11-21 | 山西亚乐士环保技术股份有限公司 | Quick lifting appliance replacer |
| CN102785993B (en) * | 2012-08-11 | 2014-04-30 | 山西亚乐士环保技术股份有限公司 | Quick lifting appliance replacer |
| CN109962029A (en) * | 2017-12-14 | 2019-07-02 | 北京北方华创微电子装备有限公司 | Film magazine rotating mechanism and loading chamber |
| CN114413143A (en) * | 2022-03-07 | 2022-04-29 | 杭州讯意迪科技有限公司 | Hidden display screen with manual-automatic integrated mechanism lifting and angle adjusting functions |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090930 Termination date: 20121024 |