CN201285280Y - Equipment for measuring six-dimension pose of moving object - Google Patents

Abstract

The utility model relates to a device for measuring six-dimensional poses of a moving object, which comprises one or more theodolites, one or more receivers and a computing and processing unit, wherein a horizontal rotation angle and an inclination rotation angle of each theodolite are controllable; a laser emitter is mounted on each theodolite and can emit one or more laser structure beams to be projected on each receiver which comprises a projecting panel and an imaging unit; and the computing and processing unit utilizes the rotation angles of the theodolites and laser facula image data obtained by the receivers to establish an equations set which can be solved to obtain the six-dimensional poses of the moving object. The utility model can continuously measure objects moving in a large space, has the advantages of high precision, low cost, convenient arrangement, and the like and can replace costly pose measuring devices, such as a laser tracking instrument, a coordinate measuring machine, an indoor GPS, and the like.

Description

A kind of equipment of measuring six-dimensional pose of moving object

Technical field

The utility model relates to the equipment of measuring moving object six-dimensional pose in than large space, specifically a kind of based on laser beam linear characteristic and parallel institution pose measurement principle, adopt image processing techniques to realize equipment and method that the motion platform six-dimensional pose is measured.This can be widely used in the occasion that needs are realized translation motion, can substitute expensive laser tracker and coordinate measuring machine.

Background technology

To the three-dimensional position of moving object (x, y, z) and 3 d pose (α, beta, gamma) carry out high-precision measurement and demand widely arranged in industry member.

In a lot of the application, adopt the mechanical type measurement mechanism just can deal with problems, for example utilize the joint encoders of equipment self to carry out forward kinematics solution, if it is lower that equipment itself does not have the precision of scrambler or scrambler and mechanical hook-up, then can adopt traditional three coordinate measuring machine and portable articulated type coordinate measuring machine to measure.But the measurement range of coordinate measuring machine is generally very limited, and is difficult to on-line measurement moving object.

In order to measure six-dimensional pose, adopt overall positioning system usually at the object of grand movement.According to the height of measuring accuracy, overall positioning system can be divided into laser tracker, indoor GPS, based on the equipment of laser navigation method, based on the equipment of laser beacon method with based on the equipment of visual processes.

Laser tracker adopts the orientation of transit survey receiver, and adopts the distance between laser interference principle measurement receiver and the transit, have the high and high remarkable advantage of measuring accuracy of sample frequency, but equipment is very expensive.

The indoor GPS technology has multiple, the scheme of most typical a kind of scheme U.S. Arc Second company, and at least two generating lasers of floor mounted, each transmitter produces two laser planes that become fixed angles.Transmitter does not stop to horizontally rotate at a high speed, gyro frequency is greatly about about 3000 rev/mins, sensor on the receiver can obtain the correct time of laser plane process, and receiver calculates the position and the angle of receiver loca according to the next light time characteristic parameters of transmitter projection.The precision of indoor GPS is higher, and can measure the position of a large amount of receivers simultaneously, and the positional accuracy measurement of all receivers in 100m * 100m measurement space can reach the 0.1mm magnitude.But because this technology adopts the intermittent scanning mode, the time of the inswept same sensor of different laser planes is poor if having time, therefore be more suitable for stationary body or the slowly measurement of mobile object, if be used for the measurement of high-speed moving object, must increase the quantity of laser plane, or adopt the generating laser of hypervelocity rotation.

Be mainly used in the location of the automatic travelling car of factory based on the equipment of laser navigation method with based on the equipment of laser beacon method, be mainly used in planimetric position and orientation location at present.The exemplary of laser navigation method is that the laser station that can horizontally rotate is installed on travelling car, and laser station is launched laser beam, and the catoptron more than three is installed on the ground, and the catoptron installation site is known.Ground catoptron is made up of several corner prisms usually, and the laser that projects on the catoptron can return along incident direction, but with the incident laser segment distance that staggers.Laser station does not stop rotation sweep on the travelling car, if having laser to return three angles, then can calculate the position and the orientation of travelling car.The laser beacon method is opposite with the laser navigation method, at the sensor of installing on the dolly more than three, and the sensor more than three, can calculate the position and the orientation of travelling car if can receive laser at a plurality of laser stations that can horizontally rotate of floor mounted.In order to realize continuous coverage, the level angle of laser station is followed the motion of dolly usually automatically.Laser navigation method and laser beacon method price are relatively cheap, and its principle can be extended to the six-dimensional space pose measurement, but have not yet to see report.In these class methods, sensor is the switching mode sensor, i.e. having or not of a detection signal, and the accurate position of the drop point of measuring laser beam on sensor not, so measuring accuracy is lower.On the other hand, adopt the transit that to launch laser and can judge the photoelectric receiving target whether laser hits the bull's eye in the building operation industry transit commonly used method that crosses, can be used for accurately measuring the position and the attitude of fixed object, but this measuring system lacks the function of pursuit movement object, therefore can't measure the pose of moving object.

Overall location technology based on visual processes has multiple, most typical is the PosEye technology of Sweden MEEQ company, by in measurement environment, arranging the luminous sign thing of a plurality of location awares, and in moving object, settle camera, calculate the pose of moving object according to the coordinate of luminous sign thing in the image that camera is taken.When measuring distance during greater than 10 meters, the luminous sign thing adopts the lasing fluorescence diode of power greater than 100mW usually, and the laser beam divergence of lasing fluorescence diode is generally greater than 30 °, to guarantee that camera can receive enough light.But the resolution of this technical requirement image-generating unit is very high, also is difficult to obtain higher measuring accuracy at present.Another kind of common technique is a binocular vision technology, highlighted label promptly is installed on mobile object,, is further calculated the pose of moving object by the position that the binocular vision principle is calculated label, this technology is subject to the resolution of image-generating unit equally, and the precision of measurement is lower.

Cost high precision overall situation positioning equipment lower, that do not need the high resolving power camera system does not also appear in the newspapers at present.

The utility model content

In order to overcome cost height in the prior art, to need the deficiency of the overall positioning equipment of high resolving power camera system, the purpose of this utility model is to propose the measurement six-dimensional pose of moving object that a kind of cost is lower, do not need the high resolving power camera system, thereby realize the equipment of overall situation location, adopt the utility model can substitute expensive equipment such as laser tracker, coordinate measuring machine and indoor GPS.

Technical solutions of the utility model are: be made up of calculation processing unit, at least one receiver and at least one transit, calculation processing unit and transit are installed on the fixed bottom boundary; Receiver is installed in the moving object to be measured; Transit and receiver are by the communications cable or communication and calculation processing unit communication, and transit links to each other by laser optical path with receiver;

Wherein: described transit has at least one and horizontally rotates degree of freedom and at least one pitch rotation degree of freedom; Transit comprises drive unit, in order to control its level angle and pitching corner; Also comprise corner measuring apparatus, in order to measure corner; At least one generating laser is installed on each transit; Described transit number is 1 o'clock, and the generating laser number of installing on the transit is at least 2; Described each generating laser is launched laser structure light, this laser structure is the laser spots bundle of at least one light only, or the laser wire harness at least one strip light plane, or the laser wire harness at least one sectored light plane, or the laser circular beam at least one light face of cylinder, or the beam combination of above-mentioned multiple different laser structure light;

In addition, the pitching degree of freedom of described transit can be fixed or be disassembled, obtain having a simplified structure that horizontally rotates degree of freedom, at least one generating laser is installed above, each generating laser is launched the laser wire harness on a sectored light plane;

Described receiver comprises at least one projection panel and at least one image-generating unit, and the corresponding at least image-generating unit of each projection panel; The distance of the size of projection panel and image-generating unit and projection panel all is in one of the percentage of the maximum measurement range of described equipment magnitude～per mille order magnitude range; Suppose that the device measuring scope is 10m, then the projection panel size is not more than 100mm * 100mm, and the distance of image-generating unit and projection panel is within 100mm; Wherein projection panel is smooth reflective mirror, or shaggy scattering reflector, or the scattering light-passing board; The shape of projection panel is selected from the plane, or curved surface, or a plurality of planar combination, or the combination of a plurality of curved surfaces;

Described receiver is made up of projection panel and image-generating unit, and described image-generating unit is in below, top or the inside of projection panel; Image-generating unit comprises image-forming electron device and the imaging lens between image-forming electron device and projection panel; Wherein the image-forming electron device is selected from Position-Sensitive Detector, charge-coupled image sensor, charge injection device or based on the optical imaging device of complementary metal oxide semiconductor (CMOS);

Described receiver is made up of projection panel and image-generating unit, described image-generating unit is directly installed on the projection panel surface, comprise at least one sensitometry device, the sensitometry device is selected from Position-Sensitive Detector, charge-coupled image sensor, charge injection device or based on the optical imaging device of complementary metal oxide semiconductor (CMOS).

The utlity model has following characteristics:

1. the low and measuring accuracy height of the utility model equipment cost.The laser structure light of the utility model by more than two realizes adopting in parallel the measurement, compares with adopting the single laser structured light laser tracker of measuring of connecting, and do not need high-precision laser interferometer, so cost reduces greatly; The utility model adopts synchro measure mode or poll metering system, compares with the indoor GPS system that adopts the intermittent scanning metering system, can measure the higher object of movement velocity; The utility model adopts short-range vision capture and processing, distance between projection panel and the image-generating unit has only one of percentage of maximum measurement range or per mille, compare with the PosEye technology of handling with the seizure of employing long distance vision, do not need high-resolution vision sensor, and bearing accuracy is higher.

2. the utility model can carry out self-calibration fast in the erecting stage, therefore can increase transit and receiver easily, also can remove redundant transit easily.

3. the utility model can enlarge the accuracy and the robustness of measurement range and raising measurement result by the quantity that increases transit and receiver.For example three transits are arranged in around the moving object to be measured according to triangle, moving object is being reduced than the pose measurement accuracy fluctuating range in the large space.

4. with the measurement grid of three transits, can realize the large scale and high accuracy measurement by the transition between the coordinate handover mechanism realization different measuring grid as a similar honeycomb.

5. the utility model can be installed measuring staff or three-dimensional laser scanner on receiver, thereby can the unapproachable place of surveyor's transit emission laser beam.

6. the utility model laser instrument emitted laser drops on the receiver all the time, and the probability that drops into human eye is very low.Even enter human eye once in a while, because laser can select infrared band, and power is very low, to human eye without any injury.

Description of drawings

Fig. 1 is the synoptic diagram of first example of six-dimensional pose measuring equipment;

Workflow synoptic diagram when Fig. 2 carries out actual measurement for the six-dimensional pose measuring equipment;

Fig. 3 is the synoptic diagram of second example of six-dimensional pose measuring equipment;

Fig. 4 is the synoptic diagram of the 3rd example of six-dimensional pose measuring equipment;

Fig. 5 is the synoptic diagram of the 4th example of six-dimensional pose measuring equipment;

Fig. 6 is the synoptic diagram of the 5th example of six-dimensional pose measuring equipment;

Fig. 7 is the synoptic diagram of the 6th example of six-dimensional pose measuring equipment;

Fig. 8 is the synoptic diagram of the 7th example of six-dimensional pose measuring equipment;

Fig. 9 is the synoptic diagram of the 8th example of six-dimensional pose measuring equipment.

Embodiment

The utility model is described in further detail below in conjunction with accompanying drawing.

Be illustrated in figure 1 as first example of the six-dimensional pose measuring equipment that the utility model proposes, this equipment is made up of a calculation processing unit 1, a receiver 2 and three transits 3,4,5.Three transit 3,4,5 fixed installations are arranged to triangle on the ground usually.Receiver 2 is by web member 7 or be directly installed in the six-dimensional pose moving object to be measured 8.Receiver coordinate system 20 is O '-X ' Y ' Z ' among the figure, be fixed on the receiver, and global coordinate system 10 is O-XYZ, fixes on the ground, and moving object coordinate system 80 is Om-XmYmZm, is fixed in the moving object 8.Because receiver coordinate system 20 is fixing all the time with respect to the pose of moving object coordinate system 80, and can obtain by scaling method, the six-dimensional pose of therefore measuring moving object 8 can be by measuring the six-dimensional pose acquisition of receiver coordinate system 20 with respect to global coordinate system 10.

Transit 3,4,5 all has and horizontally rotates and two rotational freedoms of pitch rotation, and the level angle of each transit and pitching corner are controlled by drive unit, and the corner value can be measured fast.Drive unit adopts servomotor usually, also can adopt the higher piezoelectric ceramic motor of precision, and corner measuring apparatus is installed on the transit, adopts high-precision encoder usually, and encoder resolution and measurement repeatable accuracy all reach 1 " magnitude.Be separately installed with a generating laser 30,40,50 on the transit 3,4,5.Generating laser 30,40,50 is all launched at least one laser beam, is respectively 31,41,51.In actual applications, have better accuracy and robustness, the laser beam that can allow each two of generating laser emission or more be parallel to each other for making measurement result.Laser instrument is installed on the transit, adopts semiconductor laser usually, and wavelength is selected the wave band of red visible light or infrared light usually, and as 635nm, the output power of laser instrument is generally less than 5mW.

Receiver 2 mainly comprises a projection panel 21 and an image-generating unit 22.The distance of the size of projection panel and image-generating unit and projection panel all is one of the percentage of the maximum measurement range of described equipment magnitude～per mille magnitudes; Present embodiment device measuring scope is 10m, and then the projection panel size is not more than 100mm * 100mm, and the distance of image-generating unit and projection panel is within 100mm.Projection panel 21 in this example adopts the hyperboloid reflective mirror in the similar 360 degree panorama cameras.Image-generating unit 22 is in the below of projection panel 21 usually, is connected mutually with projection panel 21 by structural member 29.Structural member 29 can adopt transparent material, perhaps the opaque material of hollow out.Image-generating unit 22 comprises an imaging lens 221 and an image-forming electron device 222.The image-forming electron device can be an optical imaging device arbitrarily such as PSD, CCD, CMOS.When the imaging electronic installation adopts PSD, because single PSD corresponding two or more luminous points simultaneously can adopt a plurality of PSD to form arrays.

The lens center of imaging lens 221 is placed on the bi-curved downside focus usually, is reflected to down focus from the light of entire environment directive hyperboloid upside focus, i.e. the lens center of imaging camera lens 221.Though the corner of transit can be controlled, but the very difficult last focus that guarantees the laser beam energy directive hyperboloidal mirror that transit sends all the time, therefore the reflective mirror scattering reflector that normally has certain roughness is as typical bright shellfish reflector (Lambertian reflector).Projection panel 21 can obtain by demarcating accurately with the position and the attitude of image-generating unit 22 with respect to receiver coordinate system 20.

The shape of projection panel 21 also can be plane or other curved surfaces, and when projection panel 21 adopted flat shape, image-generating unit 22 recommended to adopt the layout based on the Scheimpflug principle, can obtain distinct image on a large scale.Generally include the logical filter glass of band in the imaging lens 221, only allow the laser of the laser wavelength that adopts to pass through, reduce ambient light effects, thereby improve image.

Calculation processing unit 1 links to each other with transit 3,4,5 with receiver 12 by the communications cable 12,13,14,15.

The groundwork process of the utility model equipment is as follows:

Position angle by automatic tracking Control step control transit, make the generating laser of transit point to the projection panel of receiver all the time, generating laser emission laser lines or laser plane are incident upon on the projection panel, produce laser facula or laser stripe.As shown in Figure 1, on the projection panel that generating laser 30,40, the 50 emitted laser bundles 31,41,51 on the transit 3,4,5 drop on the receiver, form corresponding laser facula 32,42,52.According to present small semiconductor laser technical merit, in the 10m distance, the diameter of laser facula is usually less than 0.5mm, and in the 100m distance, the diameter of laser facula is usually less than 5mm.

Demarcation by pair warp and weft instrument pose obtains the pose of transit with respect to the global coordinate system that fixes on the ground again, and further the rotational transform matrix by transit obtains generating laser emitted laser lines or the math equation of laser plane in global coordinate system.On the one hand, transit 3,4,5 can adopt external unit to measure in advance with respect to the pose of absolute coordinate system 10, and the self-calibration method that also can adopt this patent to introduce later obtains.Measured value in conjunction with transit level angle and pitching corner just can obtain the equation of three laser spots bundles 31,41,51 in global coordinate system 10 again, every corresponding two equations of laser beam.The algebraic equation of supposing three laser spots bundle 31,41,51 correspondences is respectively:

$\left\{\begin{array}{c}{a}_{31}x+b_{31}y+c_{31}z+{\mathrm{<figure-callout\; id="31"\; label="d"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">d</figure-callout>}}_{31}=0\\ e_{31}x+f_{31}y+g_{31}z+{\mathrm{<figure-callout\; id="31"\; label="h"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">h</figure-callout>}}_{31}=0\end{array}\right.$

$\left\{\begin{array}{c}{a}_{41}x+b_{41}y+c_{41}z+{\mathrm{<figure-callout\; id="41"\; label="d"\; filenames="Y200820219188E00161.png,Y200820219188E00182.png"\; state="\{\{state\}\}">d</figure-callout>}}_{41}=0\\ e_{41}x+f_{41}y+g_{41}z+{\mathrm{<figure-callout\; id="41"\; label="h"\; filenames="Y200820219188E00161.png,Y200820219188E00182.png"\; state="\{\{state\}\}">h</figure-callout>}}_{41}=0\end{array}\right.$

$\left\{\begin{array}{c}{a}_{51}x+b_{51}y+c_{51}z+{\mathrm{<figure-callout\; id="51"\; label="d"\; filenames="Y200820219188E00161.png"\; state="\{\{state\}\}">d</figure-callout>}}_{51}=0\\ e_{51}x+f_{51}y+g_{51}z+{\mathrm{<figure-callout\; id="51"\; label="h"\; filenames="Y200820219188E00161.png"\; state="\{\{state\}\}">h</figure-callout>}}_{51}=0\end{array}\right.$

The coefficient of above-mentioned equation only depends on the pose of transit 3,4,5 in global coordinate system 10 and the outer corner measurement value of transit 3,4,5.

On the other hand, to the laser facula on the projection panel or laser stripe is taken and Flame Image Process, obtain the pixel coordinate of laser facula or the reflection of laser stripe in image-generating unit by image-generating unit; By the demarcation of image-generating unit being obtained on the image-generating unit in the pixel coordinate each pixel, utilize the one-to-one relationship acquisition laser facula of pixel and receiver coordinate system or laser stripe local coordinate value with respect to the receiver coordinate system with respect to the position of receiver coordinate system.As shown in Figure 1, handle, can obtain the coordinate of laser facula on image-forming electron device 222 by the image that image-forming electron device 222 is taken.According to the pinhole imaging system principle, laser facula and its line between the reflection on the image-forming electron device 222 must be through the lens centers of imaging lens 221.Because projection panel 21, imaging lens 221 and image-forming electron device 222 are fixed with respect to the position of receiver coordinate system 20, therefore can obtain the three-dimensional position of these laser faculas by the pinhole imaging system mathematical model with respect to receiver coordinate system 20; Perhaps adopt direct calibration method,, directly demarcate and note it at the coordinate of corresponding point in receiver coordinate system 20 on the projection panel 21 promptly for each pixel on the image-forming electron device 222.The size of supposing projection panel 21 is 100mm * 100mm, the pel array of image-forming electron device 222 is 1024 pixels * 1024 pixels, the visual field size of image-generating unit 22 equates substantially that with the projection panel size then the vision addressability of image-forming electron device 222 is less than 0.1mm.

Obtain image-generating unit by hypothesis receiver coordinate system with respect to the six-dimensional pose of global coordinate system again and demarcate the laser facula that obtains or laser stripe with respect to the world coordinates value in the global coordinate system.Because receiver coordinate system 20 is six known variables (x with respect to the pose of global coordinate system 10, y, z, α, β, γ), if the relative coordinate of a known laser facula in receiver coordinate system 20 (X ', Y ', Z '), can according to following homogeneous coordinate transformation obtain the three-dimensional world coordinates of this laser facula in global coordinate system 10 (X, Y, Z):

$\left[\begin{array}{c}\mathrm{<figure-callout\; id="1"\; label="X\; Y\; Z"\; filenames="Y200820219188E00161.png"\; state="\{\{state\}\}">X</figure-callout>}& \\ Y\\ Z\\ 1\end{array}\right]=\mathrm{Trans}(x,y,z)\mathrm{Rot}(Z,\mathrm{\&gamma;})\mathrm{Rot}(X,\mathrm{\&beta;})\mathrm{Rot}(Z,\mathrm{\&alpha;})\left[\begin{array}{c}X\&prime;\\ Y\&prime;\\ Z\&prime;\\ 1\end{array}\right]$

Wherein Rot (Z, γ) Rot (X, β) Rot (Z, α) expression then rotate the β angle around X-axis earlier around the Z of global coordinate system axle rotation alpha angle, rotates the γ angle around the Z axle again, (x, y z) represent along vector [x, y, z] translation Trans.Therefore can obtain

$\left[\begin{array}{c}\mathrm{<figure-callout\; id="1"\; label="X\; Y\; Z"\; filenames="Y200820219188E00161.png"\; state="\{\{state\}\}">X</figure-callout>}& \\ Y\\ Z\\ 1\end{array}\right]=\left[\begin{array}{cccc}{r}_{11}& r_{12}& r_{13}& x\\ r_{21}& r_{22}& r_{23}& y\\ r_{31}& r_{32}& r_{33}& z\\ 0& 0& 0& 1\end{array}\right]\left[\begin{array}{c}X\&prime;\\ Y\&prime;\\ Z\&prime;\\ 1\end{array}\right]$

Wherein,

r ₁₁＝cosγ?cos?α-cosβ?sinα?sinγ

r ₁₂＝cosγ?sin?α+cosβ?cosα?sinγ

r ₁₃＝sinγ?sinβ

r ₂₁＝-sinγ?cosα-cosβ?sinα?cosγ

r ₂₂＝-sinγ?sinα+cosβ?cosα?cosγ

r ₂₃＝cosγ?sinβ

r ₃₁＝sinβ?sinα

r ₃₂＝-sinβ?cosα

r ₃₃＝cosβ

The relative coordinate of an as seen given laser facula in receiver coordinate system 20 (X ', Y ', Z '), world coordinates (X, the Y of this laser facula in global coordinate system 10, Z) respectively corresponding three six-dimensional pose (x with receiver coordinate system 20, y, z, α, beta, gamma) is the function expression of variable.

Set up the straight line of laser structure photogenerated or plane math equation and the image-generating unit in global coordinate system by the synchronous triggering measuring process at last and demarcate the laser facula that obtains or laser stripe, find the solution restriction relation and draw the pose of receiver coordinate system with respect to global coordinate system with respect to the restriction relation between the world coordinates value of global coordinate system.Because three hot spots 32,42,52 must lay respectively on the straight line of three laser beam correspondences, with the function expression of the three-dimensional world coordinates correspondence of three hot spots two equations of the corresponding laser beam of substitution respectively, can obtain to have six equations of six variablees,

$\left\{\begin{array}{c}{a}_{31}{x}_{32}+b_{31}{\mathrm{<figure-callout\; id="32"\; label="y"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">y</figure-callout>}}_{32}+c_{31}{\mathrm{<figure-callout\; id="32"\; label="z"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">z</figure-callout>}}_{32}+{\mathrm{<figure-callout\; id="31"\; label="d"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">d</figure-callout>}}_{31}=R(x,y,z,\mathrm{\&alpha;},\mathrm{\&beta;},\mathrm{\&gamma;})=0\\ e_{31}{x}_{32}+f_{31}{\mathrm{<figure-callout\; id="32"\; label="y"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">y</figure-callout>}}_{32}+g_{31}{\mathrm{<figure-callout\; id="32"\; label="z"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">z</figure-callout>}}_{32}+{\mathrm{<figure-callout\; id="31"\; label="h"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">h</figure-callout>}}_{31}=S(x,y,z,\mathrm{\&alpha;},\mathrm{\&beta;},\mathrm{\&gamma;})=0\end{array}\right.$

$\left\{\begin{array}{c}{a}_{41}{x}_{42}+b_{41}{\mathrm{<figure-callout\; id="42"\; label="y"\; filenames="Y200820219188E00161.png,Y200820219188E00182.png"\; state="\{\{state\}\}">y</figure-callout>}}_{42}+c_{41}{\mathrm{<figure-callout\; id="42"\; label="z"\; filenames="Y200820219188E00161.png,Y200820219188E00182.png"\; state="\{\{state\}\}">z</figure-callout>}}_{42}+{\mathrm{<figure-callout\; id="41"\; label="d"\; filenames="Y200820219188E00161.png,Y200820219188E00182.png"\; state="\{\{state\}\}">d</figure-callout>}}_{41}=T(x,y,z,\mathrm{\&alpha;},\mathrm{\&beta;},\mathrm{\&gamma;})=0\\ e_{41}{x}_{42}+f_{41}{\mathrm{<figure-callout\; id="42"\; label="y"\; filenames="Y200820219188E00161.png,Y200820219188E00182.png"\; state="\{\{state\}\}">y</figure-callout>}}_{42}+g_{41}{\mathrm{<figure-callout\; id="42"\; label="z"\; filenames="Y200820219188E00161.png,Y200820219188E00182.png"\; state="\{\{state\}\}">z</figure-callout>}}_{42}+{\mathrm{<figure-callout\; id="41"\; label="h"\; filenames="Y200820219188E00161.png,Y200820219188E00182.png"\; state="\{\{state\}\}">h</figure-callout>}}_{41}=O(x,y,z,\mathrm{\&alpha;},\mathrm{\&beta;},\mathrm{\&gamma;})=0\end{array}\right.$

$\left\{\begin{array}{c}{a}_{51}{x}_{52}+b_{51}{\mathrm{<figure-callout\; id="52"\; label="y"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">y</figure-callout>}}_{52}+c_{51}{\mathrm{<figure-callout\; id="52"\; label="z"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">z</figure-callout>}}_{52}+{\mathrm{<figure-callout\; id="51"\; label="d"\; filenames="Y200820219188E00161.png"\; state="\{\{state\}\}">d</figure-callout>}}_{51}=P(x,y,z,\mathrm{\&alpha;},\mathrm{\&beta;},\mathrm{\&gamma;})=0\\ e_{51}{x}_{52}+f_{51}{\mathrm{<figure-callout\; id="52"\; label="y"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">y</figure-callout>}}_{52}+g_{51}{\mathrm{<figure-callout\; id="52"\; label="z"\; filenames="Y200820219188E00161.png,Y200820219188E00211.png"\; state="\{\{state\}\}">z</figure-callout>}}_{52}+{\mathrm{<figure-callout\; id="51"\; label="h"\; filenames="Y200820219188E00161.png"\; state="\{\{state\}\}">h</figure-callout>}}_{51}=Q(x,y,z,\mathrm{\&alpha;},\mathrm{\&beta;},\mathrm{\&gamma;})=0\end{array}\right.$

In above six equations, the world coordinates of supposing laser facula 32 is (x ₃₂, y ₃₂, z ₃₂), the world coordinates of laser facula 42 is (x ₄₂, y ₄₂, z ₄₂), the world coordinates of laser facula 52 is (x ₅₂, y ₅₂, z ₅₂), obviously they all are that six-dimensional pose (x, y, z, α, beta, gamma) with receiver coordinate system 20 is the function expression of variable.

Find the solution the system of equations that above six equations form and to obtain the six-dimensional pose (x, y, z, α, beta, gamma) of receiver coordinate system 20 with respect to global coordinate system 10.The algorithm of solving equation group can be the classical inferior method of newton-pressgang, various best practice, Homotopy Method and interval analysis method or the like.

In fact, the restriction relation that above-mentioned laser facula must lay respectively on the straight line of laser beam correspondence can adopt other expressions, and for example the distance of 32,42,52 and three laser beam of three hot spots equals zero, and obtains different math equations.Receiver coordinate system 20 also can adopt other equivalently represented methods to represent with respect to the six-dimensional pose of global coordinate system 10, for example three-dimensional position adopts (x, y, z) expression, and 3 d pose (α, beta, gamma) adopt hypercomplex number to represent, perhaps the unified biquaternion that adopts of three-dimensional position and 3 d pose is represented.

Workflow synoptic diagram when Fig. 2 carries out actual measurement for the six-dimensional pose measuring equipment comprises the step of transit pose self-calibration and the step that synchronous triggering is measured.This workflow makes an explanation at first example, is used for other examples described later but can promote.Suppose that receiver 2 can be placed on an initial position, when this initial position, receiver coordinate system 20 overlaps with global coordinate system 10.At first need to demarcate the six-dimensional pose of three transits 3,4,5, have 18 known variables, therefore need to make up at least ten eight equations and just can obtain a determinacy system of equations, thereby solve this 18 variablees.Concrete workflow is as follows:

At first carry out the step of transit pose self-calibration method.In step 101, three transits 3,4,5 are fixed on ground.Step 102 moves to initial position with receiver 2, and receiver coordinate system 20 is overlapped with global coordinate system 10.In step 103, level angle and the pitching corner of regulating transit 3,4,5 drop on the projection panel 21 of receiver 2 laser beam.In step 104, calculation processing unit 1 sends trigger pip respectively to transit 3,4,5 and receiver 2.In step 105, transit 3,4,5 will trigger level angle and pitch angle data constantly and send to calculation processing unit 1, meanwhile the image-generating unit 22 of receiver 2 triggers high-speed shutter, catch the light spot image on the projection panel 21, and will calculate the laser facula that obtains and send to calculation processing unit 1 with respect to the local coordinate value of receiver coordinate system 10.Be positioned at restriction relation on the laser straight line according to laser facula at step 106 calculation processing unit 1, with laser facula in global coordinate system function expression substitution laser lines or the math equation on structured light plane, 18 pose parameters setting up with three transits are 1-6 equation of known variables.Execution in step 103 is for the second time regulated the level angle of transit 3,4,5 and pitching corner to second group of numerical value, but still laser beam is dropped on the projection panel of receiver.Execution in step 104,105 and 106 successively obtains 7-12 equation then.Carry out repeating step 103 for the third time, regulate level angle and three groups of numerical value of pitching corner to the of transit 3,4,5, but still laser beam is dropped on the projection panel of receiver.Execution in step 104,105 and 106 successively obtains 13-18 equation then.In step 107, find the solution system of equations with 18 variablees and 18 equations, draw the pose parameter of three transits with respect to global coordinate system 10, finish transit pose self-calibration.

Carry out the step that synchronous triggering is measured then.In step 108, receiver 2 is fixedly mounted on the mobile object to be measured.In step 109, start automatic tracking control algorithm, the level angle of control transit 3,4,5 and the motion that the pitching corner comes tracking receiver 2 drop on the projection panel 21 of receiver 2 laser beam.Repeating step 104, step 105 and step 106 in step 110, are found the solution six equations that obtain in step 106 then, obtain the six-dimensional pose of receiver coordinate system 20 in global coordinate system 10.After this execution in step that circulates 109, step 104, step 105, step 106 and step 110 can obtain the six-dimensional pose of receiver coordinate system 20 in global coordinate system 10 continuously.

The flow process brief introduction of the above-mentioned automatic tracking control algorithm that makes 2 motions of the automatic tracking receiver of transit is as follows, when each the measurement, calculate the current pose of receiver 2 by calculation processing unit 1, current pose and receiver 2 are drawn the movement velocity of receiver 2 in the difference of last pose when once measuring divided by sampling interval, further infer receiver 2 pose with arrival when next time measuring according to the movement velocity of receiver 2, calculate all transits 3,4,5 need the new angle position of arrival, to guarantee laser facula 32,42,52 still drop on the projection panel 21 of receiver 2, and the corner instruction is sent to corresponding transit 32,42,52.Find the solution the movement velocity of receiver 2 and can also utilize receiver 2 movement locus before, obtain by filtering and Forecasting Methodology.

The method that above-mentioned synchronous triggering measuring method also can adopt continuous coverage and measured value interpolation to combine replaces, be that calculation processing unit 1 needn't send trigger pip to transit 3,4,5 and receiver 2, and transit 3,4,5 sends to calculation processing unit 1 with the latest datas of the level angle and the angle of pitch continuously, and receiver 2 also will calculate the laser facula of acquisition continuously and send to calculation processing unit 1 with respect to the up-to-date local coordinate value of receiver coordinate system 10.Numerical value that calculation processing unit 1 basis receives and the time interpolator that receives numerical value go out the numerical value of corresponding certain fixed time, and further the numerical value that goes out according to interpolation is set up system of equations and solved the six-dimensional pose of receiver coordinate system 20 in global coordinate system 10.

Positional accuracy measurement of this equipment and attitude measurement accuracy can reach following index: when adopting the high precision angular encoder, the corner dynamic measurement precision of plain transit can reach 2 " below, corner static measurement precision can reach 1 " below.The corner accuracy of supposing the transit that adopted is 2 ", the distance of transit and Measuring Object is 10m, transit emitted laser bundle at the fiducial interval radius of 10m distance less than 0.1mm.And adopt the image resolution ratio of image-generating unit to reach easily below the 0.1mm, for example adopting the image-forming electron device shooting area of 1024 pixels * 1024 pixels is the projection panel of 50mm * 50mm, can obtain the resolution of 0.05mm.Adopt the utility model scheme, the shutter time shutter of the transmission delay of trigger pip and image-generating unit can reach 10 μ s magnitudes, and when moving object speed was 1m/s, the measured deviation of image-generating unit was the 0.01mm magnitude.Because the utility model adopts many set of equations to find the solution, and has the advantages that similar parallel institution kinematics is inverted and separated, the error in pointing of a plurality of laser beam is not accumulated, so the positional accuracy measurement of the utility model equipment can reach the 0.1mm magnitude.The projection panel of known receiver is of a size of 50mm * 50mm, suppose that laser facula is irregular and drop on the projection panel, wherein the minor increment between the geometric center of gravity of all laser faculas and whole laser faculas is 5mm, then in the 10m distance, attitude measurement accuracy can reach (0.1/5) * (180 °/π)=1.14 °, i.e. 1 ° of magnitude.In the 8th example described later, three receivers to be installed in the moving object and to be made the distance between the receiver reach 50mm, the attitude measurement accuracy of the utility model equipment can reach 0.1 ° of magnitude.The projection panel 21 of this example can only receive from laser beam all around, and can not receive the laser beam from the above and below, and therefore the moving object attitude range that can measure is less, generally about 100 °.In the aftermentioned example, will introduce the bigger receiver of some attitude measurement scopes.

The tracking performance of the automatic tracking Control step of this equipment can reach following index: the control cycle of supposing automatic tracking control algorithm is 100Hz, the distance of moving object and transit is 10m, when the moving object movement velocity is 1m/s, at each control cycle, the prediction accuracy of moving object displacement is 10 ± 2mm.Level angle and the pitching corner of supposing transit adopt position closed loop control, and when adopting servomotor and mechanical drive mode, the control accuracy of corner is ± 0.05 °, so the accuracy of laser facula drop point on projection panel is 9mm.The projection panel of supposing receiver is of a size of 50mm * 50mm, each control cycle can be controlled laser facula, and to drop on the projection panel center be the center of circle and radius is in the circle of 19mm, be that laser facula drops on the projection panel all the time, thus this equipment can tracking range outside 10 meters, movement velocity is in the moving object of 1m/s.When measuring distance is the moving object of 100m, can adopt piezoelectric ceramic motor or direct drive motor to improve transit corner control accuracy, the corner control accuracy can reach ± below 0.005 °, can also guarantee to follow the tracks of accurately with measures such as increasing the projection panel size by the control cycle of shortening tracking Control simultaneously.

Figure 3 shows that second example of the six-dimensional pose measuring equipment that the utility model proposes, this equipment is made up of a calculation processing unit 1, a receiver 2 and three transits 3,4,5.Different with first example is, generating laser 30,40,50 emissions in this equipment on three transits 3,4,5 be the laser wire harness 33,43,53 that generates the strip light plane.Receiver 2 in this equipment has adopted hexahedral shape, image-generating unit in the receiver 2 also adopts another kind of mode, promptly do not adopt image-forming electron device based on lens imaging, but sensitometry device 23,24,25 etc. directly is installed on projection panel 21, the sensitometry device can comprise photosensitive sensors such as one or more PSD, CCD, CMOS.The common cover tape of sensitometry apparatus surface is led to filter glass, only allows the laser of the laser wavelength that adopts to pass through, and reduces ambient light effects, thereby improves image.The thickness requirement of filter glass is thinner, avoids because the refractive effect measuring accuracy.

The principle of work of this example and first example are basic identical: laser wire harness 33,43,53 generates three optical planes, just can obtain the equation of optical plane in global coordinate system 10 of three laser wire harness 33,43,53 correspondences according to the measured value of transit level angle and pitching corner, the corresponding equation of the optical plane that each laser wire harness generates, suppose that the algebraic equation of optical plane 33,43,53 correspondences is respectively:

a ₃₃x+b ₃₃y+c ₃₃z+d ₃₃＝0

a ₄₃x+b ₄₃y+c ₄₃z+d ₄₃＝0

a ₅₃x+b ₅₃y+c ₅₃z+d ₅₃＝0

The coefficient of above-mentioned equation only depends on the pose of transit 3,4,5 in global coordinate system 10 and the outer corner measurement value of transit 3,4,5.

Laser wire harness 33,43,53 drops on and forms at least three laser stripes 26,27,28 on the sensitometry device 23,24,25. Sensitometry device 23,24,25 etc. can obtain laser stripe 26,27,28 pixel coordinates with respect to sensitometry device benchmark, because sensitometry device 23,24,25 positions with respect to receiver coordinate system 20 are to immobilize and can obtain by scaling method, therefore can obtain the three-dimensional position of these laser stripes with respect to receiver coordinate system 20.The world coordinates of each point in global coordinate system 10 on the laser stripe all is to be the function representation formula of variable with receiver coordinate system 20 six-dimensional poses.On laser stripe 26,27,28, choose two points respectively, altogether six points.These six points lay respectively on the optical plane 33,43,53, therefore can obtain to have six equations of six variablees.The system of equations of finding the solution this equation composition can obtain the six-dimensional pose of receiver coordinate system 20 with respect to global coordinate system 10.Adopting the benefit of laser wire harness is to choose plural point on every laser stripe, thereby obtains more equation of constraint, improves accuracy and reliability that system of equations is found the solution.

Figure 4 shows that the 3rd example of the six-dimensional pose measuring equipment that the utility model proposes, this equipment is made up of a calculation processing unit 1, a receiver 2 and two transits 3,4.Wherein the laser wire harness 33 that generates optical plane is launched in the emission of the generating laser on the transit 3 30, and at least two laser beam 41,42 of the emission of the generating laser on the transit 4 40 emissions.Be not difficult to obtain having six equations of six variablees according to the analytical approach of two examples in front, so can obtain the six-dimensional pose of receiver coordinate system 20 with respect to global coordinate system 10.

Figure 5 shows that the 4th example of the six-dimensional pose measuring equipment that the utility model proposes, this example has the less characteristics of number of components.This equipment is made up of a calculation processing unit 1, a receiver 2 and a transit 6.Transit 6 is to have increased a pitch rotation degree of freedom with the difference of aforementioned transit 3,4,5, is separately installed with generating laser 60,61 on two pitch rotation degree of freedom.Generating laser 60 is launched two laser beam 62,63, and generating laser 61 is launched two laser beam 64,65. Laser beam 62,63,64,65 drops on and forms four hot spots on the projection plate 21 of receiver 2.Be not difficult to obtain having eight equations of six variablees according to the analytical approach of first example, so can obtain the six-dimensional pose of receiver coordinate system 20 with respect to global coordinate system 10.Point out at this,, adopt four laser beam to help improving the accuracy and the robustness of measuring results though three laser beam can obtain having six equations of six variablees.Radio communication 12 ' replacements communications cable 12 is adopted in communicating by letter between receiver 2 and the calculation processing unit 1, thereby avoids the movement interference of the moving object 8 and the communications cable 12.

Figure 6 shows that the 5th example of the six-dimensional pose measuring equipment that the utility model proposes, the difference of this example and the 4th example is that the projection panel 21 on the receiver 2 is the dome shape curved surface, adopts thin scattering light transmissive material.The laser facula that image-generating unit 22 occurs from projection panel 21 inside photographing projection panel 21.The imaging lens 221 of image-generating unit 22 adopts the wide-angle close-up lenses, and for example casual labourer makes the wide-angle close-up lens of distance about 10～200mm.Be not difficult to obtain having eight equations of six variablees according to the analytical approach of first example, so can obtain the six-dimensional pose of receiver coordinate system 20 with respect to global coordinate system 10.Compare with first example, the projection panel of this example can receive from wider laser, and the moving object attitude range that can measure can reach more than 270 °.

Figure 7 shows that the 6th example of the six-dimensional pose measuring equipment that the utility model proposes, the difference of this example and the 4th example is, have on the receiver 2 two projection panel 21 and 21 ', and two image-generating units 22 and 22 '.Projection panel 21 and projection panel 21 ' all be the curved surface shell, wherein projection panel 21 adopts thin scattering light transmissive material, and the relative thicker scattering light transmissive material of projection panel 21 ' employing, all some laser is reflected on two projection panel, and another part laser passes through.Generating laser 60,61 on the transit 6 is launched two laser spots bundles 62,64.Laser spots bundle 62 projection panel 21 and 21 ' on form two laser faculas 66,67 respectively, laser spots bundle 64 projection panel 21 and 21 ' on form two laser faculas 68,69 respectively.Image-generating unit 22 is taken the laser facula on the projection panel 21, and imaging unit 22 ' shooting projection panel 21 ' on laser facula.Be not difficult to obtain having eight equations of six variablees according to the analytical approach of first example, so can obtain the six-dimensional pose of receiver coordinate system 20 with respect to global coordinate system 10.In fact, because projection panel 21 is thin scattering light transmissive materials, projection panel 21 ' on hot spot also may see through projection panel 21 imaging in image-generating unit 22, so image-generating unit 22 ' can omit, in this case, require the image processing algorithm of image-generating unit 22 can get rid of because the interference hot spot that multipath reflection forms.

Figure 8 shows that the 7th example of the six-dimensional pose measuring equipment that the utility model proposes, this equipment is made up of through the transit of simplifying 9,11 calculation processing unit 1, a receiver 2 and two structures.The pitching degree of freedom of the transit 9,11 in this equipment is fixed or is removed, and receiver 2 has adopted hexahedral shape.9,11 in transit has one and horizontally rotates degree of freedom.Generating laser 91,111 is installed on the transit 9,11.Generating laser 91 is launched the laser wire harness 92 on a sectored light plane, and generating laser 111 is launched the laser wire harness 112 on a sectored light plane, and laser wire harness 92 and laser wire harness 112 are perpendicular to the ground usually.Laser wire harness 92 projects and generates two sections laser stripes 93,94 on the projection panel 21 on the receiver 2, and laser wire harness 92 projects and generates two sections laser stripes 113,114 on the projection panel 21.Be not difficult to obtain having eight equations of six variablees according to the analytical approach of second example, so can obtain the six-dimensional pose of receiver coordinate system 20 with respect to global coordinate system 10.

Figure 9 shows that the 8th example of the six-dimensional pose measuring equipment that the utility model proposes.Three transits 3,4,5 fix on the ground, are arranged to triangle usually.Three receivers placed apart 20,20a, 20b are installed on the mobile object 8, receiver 20 and calculation processing unit 1 be by radio communication 12 ' be connected, and is connected by wire communication or communication between receiver 20a, 20b and the receiver 20.Wherein the receiver coordinate system 20 of receiver 2 correspondences is O '-X ' Y ' Z ', and the receiver coordinate system 20a of receiver 2a correspondence is O ＂-X ＂ Y ＂ Z ＂, and the receiver coordinate system 20b of receiver 2b correspondence is O ＂ '-X ＂ ' Y ＂ ' Z ＂ '.Be separately installed with a generating laser 30,40,50 on the transit 3,4,5.Generating laser 30,40,50 is all launched at least one laser beam, is respectively 31,41,51.Laser beam 31,41,51 drops on respectively on the projection panel 21,21a, 21b of receiver 2,2a, 2b, generates three laser faculas 32,42,52.When actual measurement, each transit preferentially laser structure light is projected nearer apart from this transit and also the receiver that is not blocked on.Because the receiver 20 in this example, the distance between 20a, the 20b much larger than the size of receiver, therefore obtain attitude measurement result more accurately usually.

The principle of work of this example is as follows: at the relative pose of demarcating earlier before the actual measurement between each receiver.Choosing receiver 2 is main receiver, moving object 8 is maintained static, and measure all receiver coordinate systems 20,20a, 20b six-dimensional pose with respect to global coordinate system 10, can obtain receiver coordinate system 20a, 20b on other two receiver 2a, 2b with respect to the relative six-dimensional pose of the receiver coordinate system 20 of main receiver 2 by transformation matrix of coordinates.When actual measurement, moving object 8 setting in motions, receiver 2a will take and handle the coordinate figure of laser facula 42 on this receiver coordinate system 20a that obtains and send to receiver 20, receiver 2b will take and handle the coordinate figure of laser facula 52 on this receiver coordinate system 20b that obtains and send to receiver 20, receiver 20 is according to receiver coordinate system 20a, 20b is with respect to the position orientation relation of receiver coordinate system 20, obtain receiver 2a, laser facula 42 on the 2b, 52 local coordinates in receiver coordinate system 20 adopt the system of equations construction method of discussing in first example to calculate the six-dimensional pose of receiver coordinate 20 with respect to global coordinate system 10 then.

Though it is pointed out that eight examples that only provided the six-dimensional pose measuring equipment here, make up by parts and can obtain more example to above-mentioned example.In addition, in above-mentioned eight examples, transit is installed on the fixed bottom boundary, and receiver is installed in the moving object to be measured, but also can be with a kind of being installed in the moving object to be measured in transit and the receiver, and another kind is installed on the fixed bottom boundary.

Claims (9)

1. an equipment of measuring six-dimensional pose of moving object is characterized in that: be made up of calculation processing unit (1), at least one receiver and at least one transit; Calculation processing unit and transit are installed on the fixed bottom boundary; Receiver is installed in the moving object to be measured (8); Transit and receiver and calculation processing unit (1) communication, transit links to each other by laser optical path with receiver.

2. by the described equipment of claim 1, it is characterized in that: described transit has at least one and horizontally rotates degree of freedom and at least one pitch rotation degree of freedom; Transit comprises drive unit, in order to control its level angle and pitching corner; Also comprise corner measuring apparatus, in order to measure its level angle and pitching corner; At least one generating laser is installed on the transit.

3. by the described equipment of claim 1, it is characterized in that: described transit has one and horizontally rotates degree of freedom, also is furnished with the described drive unit that horizontally rotates degree of freedom of control and reaches in order to measure the corner measuring apparatus of level angle; At least one generating laser is installed on the transit.

4. by claim 2 or 3 described equipment, it is characterized in that: described transit number is 1 o'clock, and the generating laser number of installing on the transit is at least 2.

5. by the described equipment of claim 2, it is characterized in that: described each generating laser is launched laser structure light, this laser structure is the laser spots bundle of at least one light only, or the laser wire harness at least one strip light plane, or the laser wire harness at least one sectored light plane, or the laser circular beam at least one light face of cylinder, or the beam combination of above-mentioned multiple different laser structure light.

6. by the described equipment of claim 3, it is characterized in that: described each generating laser is launched the laser wire harness on a sectored light plane.

7. by the described equipment of claim 1, it is characterized in that: described receiver comprises at least one projection panel and at least one image-generating unit, and the corresponding at least image-generating unit of each projection panel; Wherein projection panel is smooth reflective mirror, or shaggy scattering reflector, or the scattering light-passing board; The shape of projection panel is selected from the plane, or curved surface, or a plurality of planar combination, or the combination of a plurality of curved surfaces.

8. by the described equipment of claim 7, it is characterized in that: described receiver is made up of projection panel and image-generating unit, described image-generating unit is in below, top or the inside of projection panel, comprises image-forming electron device and the imaging lens between image-forming electron device and projection panel; Wherein the image-forming electron device is selected from Position-Sensitive Detector, charge-coupled image sensor, charge injection device or based on the optical imaging device of complementary metal oxide semiconductor (CMOS).

9. by the described equipment of claim 7, it is characterized in that: described receiver is made up of projection panel and image-generating unit, described image-generating unit is directly installed on the projection panel surface, comprise at least one sensitometry device, the sensitometry device is selected from Position-Sensitive Detector, charge-coupled image sensor, charge injection device or based on the optical imaging device of complementary metal oxide semiconductor (CMOS).

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