CN201269997Y

CN201269997Y - Electric power automatic control apparatus for E type electronic gun

Info

Publication number: CN201269997Y
Application number: CNU2008201395342U
Authority: CN
Inventors: 王洪强; 高学林
Original assignee: Research Institute of Physical and Chemical Engineering of Nuclear Industry
Current assignee: Research Institute of Physical and Chemical Engineering of Nuclear Industry
Priority date: 2008-10-24
Filing date: 2008-10-24
Publication date: 2009-07-08
Anticipated expiration: 2018-10-24

Abstract

The utility model relates to an e-typed electron gun power-supply controller, aiming at providing a controller which can realize automatic control, deal with the abnormal state of the electron gun and lead the electron gun to return to the normal work state according to the feature that the e-type electron gun adopts a nonlinear time-delay system. A PLC mainframe is adopted as a control core and a local control box is connected with a power supply by a shielding line so as to effectively avoid high-voltage lighting short-circuit signal interruption and other electromagnetic interruption which occur when the e-type electron gun system is in work state, and the whole system has strong anti-interruption capability and reliable performance; the cutting-off function of the PLC is adopted to carry out emergency treatment to the abnormal state of the electron gun and lead the gun to return to the normal work state; a contact screen and a long-distance control computer are adopted to conveniently and flexibly control the power supply of the electron gun either at site or a long distance away so as to reduce the workload of personnel.

Description

E type electron gun power supply automaton

Technical field

The utility model belongs to a kind of automaton, is specifically related to a kind of electron gun power supply automaton.

Background technology

Electron gun is a kind of being operated under the vacuum state, by quickening the device that high pressure quickens to draw to electron cloud, present smelting and evaporation field widespread use at insoluble metal.E type electron gun system is a nonlinear systems with delay, under the high-power situation particularly when many electron guns are worked simultaneously running status very complicated, and for the electron gun power supply automaton of e type electron gun system, the effect that it should have is: carry out carrying out closed-loop control to the electron gun power supply in the insoluble metal evaporation process under high power at e type electron gun; When the electron gun high voltage short circuit is struck sparks, can effectively handle; Antijamming capability is strong, can make the operation of electron gun stability and safety.Use e type electron gun to be applied to the low-power evaporation coating more at present both at home and abroad, seldom be used for high power evaporation insoluble metal.The defective of prior art is: when e type electron gun high-power operation, when especially many electron guns are worked simultaneously, do not have shielding measure between high-voltage power supply and the PLC control device, thereby have the weak defective of antijamming capability; When high voltage short circuit is struck sparks, exist the power closed-loop control poor, shortcoming such as the big and security of unusual fluctuation is low.

Summary of the invention

The utility model proposes for the shortcoming that overcomes the prior art existence, at e type electron gun system is the characteristic of nonlinear systems with delay, provides a kind of and can carry out automatic control, can carry out emergency treatment and return to the control device of normal operating conditions in time the abnormal conditions of electron gun.

The technical solution of the utility model is as follows:

A kind of e type electron gun power supply automaton, comprise local control box, touch-screen and remote control computer, it is characterized in that: be provided with PLC main frame and the relay that is connected of PLC main frame respectively in the local control box, RS422 changes 232 communication modules and A/D, the D/A sampling module, casing is provided with the touch-screen port, the warning port, power supply signal transmits port, communication port between 2 PLC, power port, grounding ports, the electron gun power supply by power port respectively with relay A/D, the D/A sampling module is connected, touch-screen is connected with the PLC main frame by the touch-screen port, remote computer changes 232 communication modules by communication port between a PLC with RS422 and is connected, communication port is used for connecting other local control boxs between another PLC, power port connects power supply, be used for powering to the PLC main frame, grounding ports links to each other with ground by lead, makes the casing and ground equipotential of local control box.

In the above-mentioned e type electron gun power supply automaton, wherein said PLC main frame adopts FX _2N-32MT, touch-screen adopts POD UG330H-SS4.

The beneficial effects of the utility model: utilize the PLC main frame to be the control core, with PLC main frame, communication module, A/D, D/A module and relay package in local control box, and local control box ground connection, whole box body is equivalent to a screen layer, strong and weak electricity is separated, effectively protection casing internal components is not subjected to external high pressure sparking short-circuit signal to disturb and other electromagnetic interference (EMI) total system strong interference immunity, reliable operation when work; Utilize the PLC interrupt function, can carry out emergency treatment and in time return to normal condition the electron gun abnormal conditions; Utilize touch-screen and the remote control computer can be at the scene or the long-range electron gun power supply of controlling easily and flexibly, the workload that reduces a staff.

Description of drawings

Fig. 1 is the local control box Wiring port of a kind of e type electron gun power supply automaton panel synoptic diagram that the utility model provides;

Fig. 2 is the local control box schematic internal view of a kind of e type electron gun power supply automaton that the utility model provides;

Fig. 3 is a kind of e type electron gun power supply automaton one-piece construction synoptic diagram that the utility model provides.

Embodiment

Below in conjunction with drawings and Examples the utility model is elaborated.

As depicted in figs. 1 and 2, local control PLC carries out parameter sampling by control A/D module to e type electron gun power supply, obtains e type electron gun power supply parameters, and power supply is carried out closed-loop control.Closed-loop control with self-con-tained unit groundwork state power is an example, and the PLC main frame obtains electron gun high pressure and line parameter by control A/D module, calculates electron gun power, and compares with setting power, by negative feedback power is carried out closed-loop control.Parameters can show that setting value and operation control all can be set by local touch-screen or remote computer input by local touch-screen or remote computer.

When carrying out the power closed-loop control, the adjusting step-length of PLC and the adjusting time interval situation along with the current power value changes, this is constant different with general e type robot control system(RCS), the special circumstances that mainly are based on electron gun system are considered: because electron gun system is a time lag system, be retardation time _△T, the adjusting time interval T of robot control system(RCS) is greater than so in principle _△T, otherwise can become the anti-drag damping system, but because electron gun retardation time _△T is fixing, long under certain conditions, and then causes the adjusting time interval also long, and system regulated slow, shows that especially power needs big changes phase.

In order to remedy above-mentioned shortcoming, the robot control system(RCS) employing adjusting time interval is the method for respective settings along with the situation of current power value, concrete grammar is as follows: when current power value and set value of the power differed big, the adjusting time interval was made as a certain smaller value, and its value generally all is less than retardation time _△T, the adjusting step-length is also corresponding bigger, thereby makes current power fast near setting value; When current power value and set value of the power differ a certain smaller value, when promptly the current power value is very near set value of the power, regulate the time interval to be made as a certain higher value, regulate that step-length is also corresponding to be reduced, allow current power progressively near setting value, prevent overshoot; When current power value and set value of the power differ more among a small circle, its difference is little to automatic span of control limit of control (electron gun system allow power error scope) when interior, reduce to regulate the time interval on the contrary once more and regulate step-length, the purpose of doing like this is because robot control system(RCS) is not regulated when the difference of current power value and set value of the power is in automatic span of control limit of control, does not promptly change the control output valve.Robot control system(RCS) is only being monitored current power whether in span of control limit of control automatically fast, normally whether system operation, when in case current power exceeds outside the automatic span of control limit of control scope, robot control system(RCS) is regulated the control output valve with system's minimum radius at once, and power is got back in the automatic span of control limit of control with prestissimo.

In the electron gun operational process various abnormal conditions may take place, power supply high voltage short circuit sparking the most commonly.Power supply can be given high level signal of PLC at once when sparking, and PLC utilizes interrupt function to stop automatic control, and remembers to export controlling value this moment, simultaneously the control output valve is reduced to a certain particular value.Pick up counting when PLC receives look-at-me, the timing time reference power source recovers the high pressure time automatically to be set, and is slightly larger than power supply and recovers the high pressure time automatically, and timing is carried out power adjustments after finishing again.Timing finishes the back robot control system(RCS) output controlling value is returned to the output controlling value of sparking eve, and high pressure has also recovered normally this moment, and it is normal that power also recovers.

Claims

1. e type electron gun power supply automaton, comprise local control box, touch-screen and remote control computer, it is characterized in that: the relay that is provided with the PLC main frame in the local control box and is connected with the PLC main frame respectively, RS422 changes 232 communication modules and A/D, the D/A sampling module, casing is provided with touch-screen port (1), warning port (2), power supply signal transmits port (3), communication port between the PLC (4), power port (5), grounding ports (6), the electron gun power supply by power port (3) respectively with relay A/D, the D/A sampling module is connected, touch-screen is connected with the PLC main frame by touch-screen port (1), remote computer changes 232 communication modules by communication port (4) between a PLC with RS422 and is connected, communication port between another PLC (4) is used for connecting other local control boxs, power port (5) connects power supply, be used for powering to the PLC main frame, grounding ports (6) links to each other with ground by lead, makes the casing and ground equipotential of local control box.

2. a kind of e type electron gun power supply automaton as claimed in claim 1 is characterized in that: described PLC main frame adopts FX _2N-32MT, touch-screen adopts PODUG330H-SS4.