CN201262145Y - High-precision optical resist dispensing pump - Google Patents
High-precision optical resist dispensing pump Download PDFInfo
- Publication number
- CN201262145Y CN201262145Y CNU2008200153882U CN200820015388U CN201262145Y CN 201262145 Y CN201262145 Y CN 201262145Y CN U2008200153882 U CNU2008200153882 U CN U2008200153882U CN 200820015388 U CN200820015388 U CN 200820015388U CN 201262145 Y CN201262145 Y CN 201262145Y
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- China
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- pump
- pump housing
- bellows
- optical resist
- utricule
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Abstract
The utility model relates to a metering pump in a chemical supply system of a spin coating device, in particular to a high-precision photoresist distribution pump which can solve the problems that when in need of precise control of the amount of chemicals, the ordinary medicine liquid pump can not realize the precise control and the like. A pump body of the distribution pump is a circular cavity with openings at two ends, and the structure of the pump body is the structure with inner and outer cavities; a telescopic ripple pipe is arranged in the inner cavity of a bag body, one end of a connecting part of the ripple pipe is arranged at the inner wall of an opening end of the ripple pipe, the other end of the connecting part of the ripple pipe is connected with a dynamic part, and the inner cavity of the bag body is communicated with the outer cavity of the pump body. The use of the metering pump leads the scale reduction of the dynamic displacement during the conversion to the volume change to be very large, and each larger dynamic movement has very small volume change, so as to indirectly control the micro-output of the chemicals; the metering pump is applicable to the situation that the viscosity of the chemicals is below 100 cp, the amount of the chemicals is controlled to be 0.1 to 5.0 ml, the precision can be controlled to be plus or minus 0.02 ml, and the repeated precision is plus or minus 0.02 ml.
Description
Affiliated technical field
The utility model relates to the metering pump in the equipment for evenly dividing glue chemicals supply system, is specially a kind of highi degree of accuracy optical resist proportioning pump.
Background technique
At present, the technology pump in the chemicals supply system of using in the semiconductor equipment mainly adopts diaphragm pump, but diaphragm pump can't be realized high-accuracy control to the glue amount.Under the very high situation of optical resist cost, the glue amount that every wafer needs in gluing is certain, if each wafer waste 1ml just means that the semiconductor manufacturing factory merchant will increase huge input each year on optical resist.In this case, just need control accurately, reduce unnecessary waste, reduce cost the use amount of optical resist.
The model utility content
In order to reach the purpose that optical resist is accurately controlled, the utility model provides a kind of highi degree of accuracy optical resist proportioning pump, solves when needs are accurately controlled the amount of chemicals, and common spray pump can't be realized problems such as accurately control.
The technological scheme that its technical problem that solves the utility model adopts is:
A kind of highi degree of accuracy optical resist proportioning pump, this proportioning pump is provided with the pump housing, utricule and power section, the pump housing is the circular cavity of both ends open, pump body structure is the structure that inside and outside two chambeies are arranged, the pump housing is provided with pump housing outer wall and can be to the pump housing inwall of inside and outside distortion, pump housing inwall is the inner chamber of the pump housing with in, and the cavity between pump housing inwall and the pump housing outer wall is the exocoel of the pump housing, and pump housing both ends open place is provided with inlet one-way valve and outlet one-way valve; Be provided with telescopic bellows in the inner chamber of utricule, bellows is the structure of end sealing, an end opening, bellows attachment portion one end is installed on bellows opening end inwall, and the other end of bellows attachment portion connects power section, and the inner chamber of utricule communicates with the exocoel of the pump housing.
Described highi degree of accuracy optical resist proportioning pump, the thin walled structures of pump housing inwall for compressing and expand, pump housing outer wall is a rigid construction.
Described highi degree of accuracy optical resist proportioning pump, the inlet one-way valve and the outlet one-way valve that are arranged at pump housing import and outlet respectively are double-layer sealing structure.
Described highi degree of accuracy optical resist proportioning pump is equipped with in the inner chamber of utricule and transmits medium silicone oil, as the transmission medium of the Volume Changes between the bellows and the pump housing.
Described highi degree of accuracy optical resist proportioning pump is provided for detecting the pressure transducer of the chamber pressure of utricule on the utricule.
Described highi degree of accuracy optical resist proportioning pump, the bellows-shaped of bellows is an equilateral triangle.
Described highi degree of accuracy optical resist proportioning pump, power section are that the ball screw, stepper motor, synchronous pulley, the synchronous band that are installed in the housing constitute, and synchronous pulley is installed respectively on ball screw, the stepper motor, connect by being with synchronously between the synchronous pulley.
The beneficial effects of the utility model are:
1, the utility model highi degree of accuracy optical resist proportioning pump can accurately be controlled the discharge-amount of optical resist, reduces the especially waste of expensive optical resist of various optical resists, reduces the input of enterprise.
2, the utility model highi degree of accuracy optical resist proportioning pump has very strong decay resistance, and this just makes this pump can adapt to the accurately occasion of control chemicals consumption of a lot of needs.
3, the utility model highi degree of accuracy optical resist proportioning pump, volume is little, does not almost have noise and vibrations, can be used in the various automatic and semi-automatic equipment for evenly dividing glue.
4, the utility model highi degree of accuracy optical resist proportioning pump, adopt special bellows structure, in bellows compression and elongation, its peripheral Volume Changes along with compression or stretch apart from even variation, and under the situation of bigger displacement, need make that the variation of peripheral volume is as much as possible little.On the basis that guarantees bellows form, adjust structure, make the life-span of bellows long as much as possible.
5, the utility model highi degree of accuracy optical resist proportioning pump, can extract by Volume Changes accurately and the pump body structure of the optical resist that spues, adopting the thin walled tube of PFA is inner chamber, PTFE is the structure of exocoel, the PFA thin walled tube is welded on the PTFE outer-cavity structure spare, make that the change in shape of pump housing inner chamber is even, improve the working life of the pump housing and tell the glue precision.
6, the utility model highi degree of accuracy optical resist proportioning pump, medium that can the accurate transfer Volume Changes, medium need use good fluidity, and the little liquid of compression ratio, so just can make the Volume Changes of bellows exocoel be delivered to pump housing inner chamber with the ratio near 1:1 and get on.Because the compression ratio of silicone oil is low, thermal distortion is little, selects for use silicone oil as transmitting medium.
7, the utility model highi degree of accuracy optical resist proportioning pump, it is very big that dynamic displacement ratio when converting Volume Changes to is dwindled, bigger each time the moving of power, volume has only very little variation, thereby controls the trace output of chemicals indirectly.The utility model is applicable to the situation of chemicals viscosity below 100cp, can be controlled at the amount of chemicals between 0.1～5.0ml, precision can be controlled at ± 0.02ml within, the repeatability of discharge-amount is ± 0.02ml.
Description of drawings
Fig. 1 is a principle schematic of the present utility model.
Fig. 2 is a structural representation of the present utility model.
Among the figure, 1, inlet one-way valve; 2, pump housing outer wall; 3, the pump housing inwall after internal strain; 4, pump housing inwall; 5, the pump housing inwall after the outside distortion; 6, outlet one-way valve; 7, bellows; 8 utricules; 9, pressure transducer; 10, bellows attachment portion; 11, ball screw; 12, stepper motor; 13, synchronous pulley; 14, housing; 15, be with synchronously.
Embodiment
Below in conjunction with drawings and Examples the utility model is further specified.
As shown in Figure 1, the principle of the utility model highi degree of accuracy optical resist proportioning pump is as follows:
Fill with silicone oil in " the A chamber " of utricule 8 inboards, bellows 7 is stretched to the longest, guarantees that at this moment pump housing inwall 4 is in pump housing inwall 3 positions after internal strain.
Bellows 7 moves downward, be exaggerated in the outside of bellows 7 and " A chamber " space of utricule 8 inboards, transmission by silicone oil, pump housing inwall 5 positions after the pump housing inwall 3 after the internal strain is deformed to outside distortion, space in " the B chamber " of pump housing inwall 4 inboards also is exaggerated, and the volume of the volume of " B chamber " amplification and " A chamber " amplification equates simultaneously.So just form low pressure in " B chamber ", at this moment export one-way valve 6 and close, inlet one-way valve 1 is opened.Chemicals just enters into " B chamber " by inlet, until the space of filling up " B chamber " distortion, makes external and internal pressure reach consistent.
Bellows 7 moves upward, be compressed in the outside of bellows 7 and " A chamber " space of utricule 8 inboards, transmission by silicone oil, outwards the pump housing inwall 5 after the distortion is deformed to pump housing inwall 3 positions after internal strain, space in " the B chamber " of pump housing inwall 4 inboards also is compressed, and the volume of the volume of " B chamber " compression and " A chamber " compression equates simultaneously.So just form high pressure in " B chamber ", at this moment inlet one-way valve 1 is closed, and outlet one-way valve 6 is opened.Chemicals just spues by outlet, the Volume Changes in " B chamber " when pump housing inwall 5 positions that the amount of the chemicals that spues just is a pump housing inwall 4 after the outside distortion are deformed to pump housing inwall 3 positions after internal strain.The distortion size of pump housing inwall 4 is by the distance control that moves up and down of bellows 7.
As shown in Figure 2, it is as follows that the utility model highi degree of accuracy optical resist distributes pump structure:
The utility model highi degree of accuracy optical resist proportioning pump mainly comprises the pump housing, utricule and power part grade, the pump housing is one section circular cavity of both ends open, the pump housing is provided with pump housing outer wall 2 and can be inside, the pump housing inwall 4 (thin walled tube) of outer distortion, pump body structure is in having, the structure in outer two chambeies, pump housing inwall 4 is the inner chamber (B chamber) of the pump housing with in, the inner chamber of the pump housing is chemicals chamber (as optical resist etc.), cavity between pump housing inwall 4 and the pump housing outer wall 2 is the exocoel of the pump housing, the thin walled structures of pump housing inwall 4 for compressing and expand, pump housing outer wall 2 is a rigid construction, and pump housing both ends open place is provided with inlet one-way valve 1 and outlet one-way valve 6.The inner chamber of utricule 8 is provided with flexible bellows 7 in (A chamber), and bellows 7 is the structure of end sealing, an end opening, and bellows-shaped can be equilateral triangle, the flexible intracavity space compression and the release that can make utricule 8 of bellows 7.Bellows attachment portion 10 1 ends are installed on bellows 7 opening end inwalls, the other end of bellows attachment portion 10 connects power section, the inner chamber of utricule 8 communicates with the exocoel of the pump housing, be equipped with in the inner chamber of utricule 8 and transmit medium silicone oil, as the transmission medium of the Volume Changes between the bellows and the pump housing.Power section is to be installed on ball screw 11, stepper motor 12, synchronous pulley 13 in the housing 14, to be with 15 to constitute synchronously, on ball screw 11, the stepper motor 12 synchronous pulley 13 is installed respectively, between the synchronous pulley 13 by being with 15 to connect synchronously.Thereby power section can drive the flexible of bellows 7, adjusts Volume Changes between the exocoel of the utricule 8 and the pump housing by transmitting medium silicone oil, the cavity volume of the whole pump housing of the step of going forward side by side.
The stepper motor 12 of power section is by synchronous pulley 13 and be with 15 to be transferred to ball screw 11 synchronously, makes ball screw 11 rotations, between ball screw 11 deceleration is set at stepper motor 12.Ball screw 11 drives bellows attachment portion 10 and moves up and down, because bellows attachment portion 10 and bellows 7 link together, bellows 7 moves up and down, and the working principle of other parts is according to principle work shown in Figure 1.
Inlet one-way valve 1 and outlet one-way valve 6 can adopt double-layer sealing structure, improve reliability.On the utricule 8 pressure transducer 9 can be set, be used to detect the chamber pressure of utricule 8, prevent the leakage of silicone oil in the cavity, in case leak, pressure transducer 9 detects unusually, and pump promptly quits work, prevent because the pollution that the leakage of silicone oil causes optical resist also makes things convenient for fault to get rid of.
Embodiment shows, highi degree of accuracy optical resist proportioning pump of the present utility model, adopt the deformation behaviour of bellows, in the time of bellows contract, the space of the corrugated portion of bellows outside can discharge, utilize of the transmission of the minor variations in this space then, can make the pump housing partly suck the optical resist that respective volume changes by silicone oil.When bellows extended, the space of the corrugated portion of bellows outside can be compressed, and promoted can the spue optical resist of respective volume of the pump housing.The variation of bellows realizes by the step motor drive ball screw, the amount of the optical resist that need spue is accurately controlled by the amount of deformation of bellows.Then can control the amount of deformation of bellows accurately to the accurate control of stepper motor, thereby realize accurate control optical resist glue amount.
Claims (7)
1, a kind of highi degree of accuracy optical resist proportioning pump, it is characterized in that: this proportioning pump is provided with the pump housing, utricule and power section, the pump housing is the circular cavity of both ends open, pump body structure is the structure that inside and outside two chambeies are arranged, the pump housing is provided with pump housing outer wall and can be to the pump housing inwall of inside and outside distortion, pump housing inwall is the inner chamber of the pump housing with in, and the cavity between pump housing inwall and the pump housing outer wall is the exocoel of the pump housing, and pump housing both ends open place is provided with inlet one-way valve and outlet one-way valve; Be provided with telescopic bellows in the inner chamber of utricule, bellows is the structure of end sealing, an end opening, bellows attachment portion one end is installed on bellows opening end inwall, and the other end of bellows attachment portion connects power section, and the inner chamber of utricule communicates with the exocoel of the pump housing.
2, according to the described highi degree of accuracy optical resist of claim 1 proportioning pump, it is characterized in that: the thin walled structures of pump housing inwall for compressing and expand, pump housing outer wall is a rigid construction.
3, according to the described highi degree of accuracy optical resist of claim 1 proportioning pump, it is characterized in that: the inlet one-way valve and the outlet one-way valve that are arranged at pump housing import and outlet respectively are double-layer sealing structure.
4, according to the described highi degree of accuracy optical resist of claim 1 proportioning pump, it is characterized in that: be equipped with in the inner chamber of utricule and transmit medium silicone oil, as the transmission medium of the Volume Changes between the bellows and the pump housing.
5, according to the described highi degree of accuracy optical resist of claim 1 proportioning pump, it is characterized in that: the pressure transducer that is provided for detecting the chamber pressure of utricule on the utricule.
6, according to the described highi degree of accuracy optical resist of claim 1 proportioning pump, it is characterized in that: the bellows-shaped of bellows is an equilateral triangle.
7, according to the described highi degree of accuracy optical resist of claim 1 proportioning pump, it is characterized in that: power section is that the ball screw, stepper motor, synchronous pulley, the synchronous band that are installed in the housing constitute, synchronous pulley is installed respectively on ball screw, the stepper motor, is connected by being with synchronously between the synchronous pulley.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200153882U CN201262145Y (en) | 2008-09-03 | 2008-09-03 | High-precision optical resist dispensing pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200153882U CN201262145Y (en) | 2008-09-03 | 2008-09-03 | High-precision optical resist dispensing pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201262145Y true CN201262145Y (en) | 2009-06-24 |
Family
ID=40808619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200153882U Expired - Fee Related CN201262145Y (en) | 2008-09-03 | 2008-09-03 | High-precision optical resist dispensing pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201262145Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113417838A (en) * | 2021-06-23 | 2021-09-21 | 江苏大学 | Micropump |
-
2008
- 2008-09-03 CN CNU2008200153882U patent/CN201262145Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113417838A (en) * | 2021-06-23 | 2021-09-21 | 江苏大学 | Micropump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090624 Termination date: 20170903 |