CN201237696Y - Mask positioning affirmation apparatus - Google Patents
Mask positioning affirmation apparatus Download PDFInfo
- Publication number
- CN201237696Y CN201237696Y CNU2008202120065U CN200820212006U CN201237696Y CN 201237696 Y CN201237696 Y CN 201237696Y CN U2008202120065 U CNU2008202120065 U CN U2008202120065U CN 200820212006 U CN200820212006 U CN 200820212006U CN 201237696 Y CN201237696 Y CN 201237696Y
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- CN
- China
- Prior art keywords
- mask
- utility
- model
- vernier caliper
- orientation tool
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model is applied to the field of the part and component alignment confirming device, and provides an alignment confirming device of a mask plate, which comprises a positioning tool and a measuring tool. The positioning tool and the measuring tool are movably connected with each other. The utility model can accurately measure whether the position of the mask plate on the operating platform conforms to the design requirements, greatly reduce the quantity of waste products generated due to the deviation of the position of the mask plate, and be widely used in the filed of the mask plate positioning confirmation.
Description
Technical field
The utility model belongs to positioning confirmation device field, relates in particular to a kind of mask positioning confirmation device.
Background technology
In the process that mask is processed, need mask is contained on the workbench of litho machine, by litho machine mask is carried out follow-up lithography operations, but, there is not a kind of instrument at present aiming at affirmation when being contained in the mask of litho machine workbench, so that the position that its mask is placed adheres to specification.In practical operation, if the undesirable meeting in position that mask is placed makes litho machine not meet designing requirement in mask photoetching position, the inaccurate and mask that makes by lithography of contraposition can cause the generation of waste product or substandard products if proceed the processing of back segment operation.
The utility model content
The purpose of this utility model is to provide a kind of mask positioning confirmation device, and it is bigger to be intended to solve mask location randomness, locatees inaccurate problem.
The utility model is achieved in that a kind of mask contraposition affirmation device that is used for, and comprises orientation tool and survey instrument, and described orientation tool and survey instrument flexibly connect.
Technique effect of the present utility model is: it provides a kind of mask contraposition to confirm device, whether the survey instrument that this device is provided with can be measured mask accurately and meet the requirements in the position that workbench is placed, thereby the foundation of science is provided for the position of adjusting mask.
Description of drawings
Fig. 1 is the schematic top plan view of the positioning confirmation device that is used for mask that provides of the utility model embodiment.
Fig. 2 is that the master of the positioning confirmation device that is used for mask that provides of the utility model embodiment looks synoptic diagram.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer,, the utility model is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
See also Fig. 1 and Fig. 2, a kind of mask contraposition affirmation instrument that is used for comprises orientation tool 10 and survey instrument 20, and described orientation tool 10 and survey instrument 20 flexibly connect.The utility model is mainly used in the contraposition of mask confirms that the contraposition that also can be used for the part of other shapes and type is confirmed.In the present embodiment, the utility model is used for contraposition and the affirmation of mask on the MP80+ litho machine; The utility model and mask 4 all place on the worktable 30 of MP80+ litho machine.
See also Fig. 1 and Fig. 2, orientation tool 10 comprises an a positioning block 11 and a contiguous block 12, and described locating piece 11 and 12 vertical connections of contiguous block, described contiguous block 12 are provided with a stepped groove (not shown) that is used to the instrument of installing and measuring.The reference field 31 that the locating piece 11 of orientation tool 10 can be close to worktable 30 when measuring moves.
See also Fig. 1, the survey instrument that is provided with in the utility model can be common slide calliper rule, displacement transducer measurement mechanism or numeral and shows survey instruments such as vernier caliper.In the present embodiment, survey instrument adopts numeral to show vernier caliper 20, described numeral shows that vernier caliper 20 comprises a digital indicator 22 and vernier caliper 21, described digital indicator 22 places the junction of contiguous block 12 and vernier caliper 21, is used for displacement conversion with vernier caliper 21 and becomes digital signal and show; Described vernier caliper 21 is provided with a projection (not shown), and the size of projection is corresponding with groove with shape, and vernier caliper 21 places the groove of orientation tool 10 and can slide in groove.The projection groove fit that vernier caliper 21 and orientation tool are provided with contiguous block 12 is connected can make vernier caliper 21 tightr with cooperating of contiguous block 12, when vernier caliper 21 is mobile in contiguous block 12, be unlikely to produce and rock, thereby guarantee the accurate of measurement data.
When using the utility model to measure mask, the locating piece 12 of orientation tool 10 is close to the reference field 31 of worktable 30, move vernier caliper 21 with have gentle hands and make it gently support the edge of mask, write down the digital indicator data presented; Change different positions and measure, the result who measures is handled, draw the situation of mask actual shifts.Because survey instrument of the present utility model is to adopt numeral to show vernier caliper, its measuring accuracy can be accurate to 0.1mm, can satisfy the positioning confirmation needs of mask fully.
The above only is preferred embodiment of the present utility model; not in order to restriction the utility model; all any modifications of within spirit of the present utility model and principle, being done, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.
Claims (3)
1, device is confirmed in a kind of contraposition that is used for mask, and it is characterized in that: comprise orientation tool and survey instrument, described orientation tool and survey instrument flexibly connect.
2, instrument is confirmed in the contraposition that is used for mask as claimed in claim 1, it is characterized in that: described survey instrument shows vernier caliper for numeral, described numeral shows that vernier caliper comprises digital indicator and vernier caliper, described digital indicator places on the orientation tool, and described vernier caliper and orientation tool flexibly connect.
3, instrument is confirmed in the contraposition that is used for mask as claimed in claim 2, it is characterized in that: described orientation tool is provided with groove, described vernier caliper is corresponding with groove, and this vernier caliper places among the groove that orientation tool is provided with and slides in described groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202120065U CN201237696Y (en) | 2008-09-24 | 2008-09-24 | Mask positioning affirmation apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202120065U CN201237696Y (en) | 2008-09-24 | 2008-09-24 | Mask positioning affirmation apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201237696Y true CN201237696Y (en) | 2009-05-13 |
Family
ID=40650429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008202120065U Expired - Lifetime CN201237696Y (en) | 2008-09-24 | 2008-09-24 | Mask positioning affirmation apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201237696Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103115821A (en) * | 2013-01-16 | 2013-05-22 | 山东科技大学 | In-situ test system and method of lane filler bearing property |
-
2008
- 2008-09-24 CN CNU2008202120065U patent/CN201237696Y/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103115821A (en) * | 2013-01-16 | 2013-05-22 | 山东科技大学 | In-situ test system and method of lane filler bearing property |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: QINGYI PRECISION MASKMAKING (SHENZHEN) CO., LTD. Free format text: FORMER NAME: SHENZHEN QINGYI PRECISION MASKMAKING CO.,LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: Two road high tech Industrial Zone in Shenzhen city Guangdong province 518057 North Song Ping Lang mountain No. 8 Patentee after: Qingyi Precision Maskmaking (Shenzhen) Co., Ltd. Address before: Two road high tech Industrial Zone in Shenzhen city Guangdong province 518057 North Song Ping Lang mountain No. 8 Patentee before: Qingyi Precision Mask Making (Shenzhen) Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090513 |