CN201234216Y - Multi-layered piezoelectric micro displacement actuator having fatigue cracking resistant outer electrode - Google Patents
Multi-layered piezoelectric micro displacement actuator having fatigue cracking resistant outer electrode Download PDFInfo
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- CN201234216Y CN201234216Y CNU2008200406458U CN200820040645U CN201234216Y CN 201234216 Y CN201234216 Y CN 201234216Y CN U2008200406458 U CNU2008200406458 U CN U2008200406458U CN 200820040645 U CN200820040645 U CN 200820040645U CN 201234216 Y CN201234216 Y CN 201234216Y
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 25
- 238000005336 cracking Methods 0.000 title claims abstract description 16
- 230000002929 anti-fatigue Effects 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
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- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
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- 208000037656 Respiratory Sounds Diseases 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
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Abstract
A multi-layer piezoelectric type micro-displacement actuator with anti-fatigue and anti-tearing external electrodes comprises a piezoelectric material pile formed by stacking a plurality of layers of piezoelectric layers and internal electrodes arranged between every two adjacent piezoelectric layers; the external electrodes are two external electrodes which are not in mutual contact, and are respectively arranged on the two sides of the piezoelectric material pile and extended along the direction of stacking height of the piezoelectric material pile; the external electrodes comprise inner conducting layers stuck on the side surface of the piezoelectric material pile and metal elastic sheets stuck on the outer side surfaces of the inner conducting layers; the two adjacent internal electrodes are respectively and electrically connected with two different inner conducting layers; and a plurality of through-holes are formed on the metal elastic sheets. Due to the arrangement of the through-holes, the metal elastic sheets are not easy to cause fatigue and cracking under the action of alternate stress, and cannot be broken under the larger deformation; and the service life and the anti-impact ability of the multi-layer piezoelectric type micro-displacement actuator are respectively prolonged and enhanced.
Description
Technical field
The utility model relates to a kind of improvement of multiple layers piezoelectric type micro-displacement actuator.
Background technology
Multiple layers piezoelectric type micro-displacement actuator is a kind of known technology, it is stacked into the piezoelectric heap by multi-layer piezoelectric layer (1), and be provided with an interior electrode (2) between every adjacent two layers of described piezoelectric layer, the two sides of described piezoelectric heap are provided with two external electrodes (3) non-touching and that extend along the stacking height direction of this piezoelectric heap, two adjacent interior electrodes respectively with the connection that is conducted of different external electrode, referring to Fig. 1.
The manufacture method of above-described piezoelectric heap also is known, this manufacture method derives from the manufacture method of monolithic capacitor, at first pile up according to predetermined mode,, cut into required size back sintering then by waiting static pressure compacting by multi-layer piezoelectric layer base film and electrode size; Also can adopt and earlier piezoelectric layer base film be made the piezoelectric layer monolithic, electrode replaced bonding false monolithic capacitor manufacture method in the gluing method of viscosity that electrode produces when being heated into high temperature in utilizing again or use adhesive reached the piezoelectric layer monolithic.
In traditional multiple layers piezoelectric type micro-displacement actuator, electrode is by two non-touching metal coatings on the side that is coated in the piezoelectric heap in two groups---and external electrode connects draws, referring to Fig. 1, interior electrode between a plurality of piezoelectric layers alternately is connected with an external electrode, forms two groups of mutual disconnected electrode groups.Under the alive outside effect of actuator, constantly elongate or shorten, external electrode is subjected to the effect of bigger alternate stress, be easy to cause external electrode to crack (6), cause that electric arc, electric arc make the very fast fracture of external electrode greatly thereby this crackle easily causes the resistance of external electrode to become.External electrode fracture causes the blocking-up of electric current, thus whole actuator can not work normally, these all are the problems that traditional multiple layers piezoelectric type micro-displacement actuator exists.
Application number discloses a kind of multiple layers piezoelectric type micro-displacement actuator for the Chinese utility model patent of " CN200620126941.0 ", and the external electrode of this actuator comprises and pastes having the electrically conductive barrier that anti-conductive ion migrates and pasting the conductive elastic layer with anti-crack in this electrically conductive barrier outside in piezoelectric ceramic out-pile side.This conductive elastic layer can be resisted bigger extraneous alternate stress, even and electrically conductive barrier cracking external electrode can also have good conductive performance.
Above-mentioned utility model patent has obtained good application in actual production, yet the multiple layers piezoelectric type micro-displacement actuator of this kind structure still comes with some shortcomings.Whole multiple layers piezoelectric type micro-displacement actuator is a precision component, and conductive elastic layer can only be thin one deck, in use is easy to generate fatigue cracking or owing to moderate finite deformation ruptures, and then causes the inefficacy of whole actuator.
Summary of the invention
The technical problems to be solved in the utility model is to improve the fatigue strength of multiple layers piezoelectric type micro-displacement actuator and strengthen its elasticity.
The technical scheme that the utility model adopted is: a kind of multiple layers piezoelectric type micro-displacement actuator with antifatigue cracking external electrode, it comprises that is piled up a piezoelectric heap that forms by the multi-layer piezoelectric layer, be arranged on the interior electrode between the described piezoelectric layer of every adjacent two layers, very non-touching two of described dispatch from foreign news agency, article two, described external electrode is separately positioned on the both sides of described piezoelectric heap and extends along the stacking height direction of this piezoelectric heap, described external electrode comprises and pastes at the inner conducting layer of described piezoelectric heap side and paste metallic elastic sheet at the lateral surface of described inner conducting layer, different with two the respectively inner conducting layer of two adjacent interior electrodes is electrically connected, and also offers a plurality of through holes on the described metallic elastic sheet.
The material of described piezoelectric layer is an electrostriction material, a kind of in preferred piezoelectric ceramic, the piezoelectric crystal.
Described metallic elastic sheet welds mutually with described inner conducting layer or is bonding.
The material of described metallic elastic sheet is a kind of in conducting metal simple substance or the electrical conductivity alloy.
The thickness of described metallic elastic sheet is 0.02mm to 0.8mm scope.
Shapes such as the optional strip of described through hole, rhombus, ellipse, circle; Perhaps,, sheet metal can also be made into S shape or Z-shaped (Fig. 8), make sheet metal have elasticity preferably as the replacement scheme of offering through hole.
Because the employing of technique scheme, metallic elastic sheet are difficult for producing fatigue cracking under the effect of alternate stress, also can not rupture when producing moderate finite deformation, have prolonged the useful life of multiple layers piezoelectric type micro-displacement actuator and improved its impact resistance.
Description of drawings
Fig. 1 is the structural representation of known multiple layers piezoelectric type micro-displacement actuator;
Fig. 2 for the actuator of Fig. 1 owing to being subjected to the schematic diagram that bigger extraneous alternate stress cracks;
Fig. 3 is the structural representation of multiple layers piezoelectric type micro-displacement actuator of the present utility model, and wherein through hole is a strip;
Fig. 4 is the end view of the A direction of Fig. 3;
Fig. 5 is the deformation pattern of metallic elastic sheet when being subjected to external tensile force of Fig. 4;
Fig. 6 is the rhombus through hole embodiment of metallic elastic sheet;
Fig. 7 is the ellipse hole embodiment of metallic elastic sheet;
Fig. 8 is serpentine or " Z " shape shape embodiment of metallic elastic sheet;
Wherein 1, piezoelectric layer, 2, interior electrode, 3, external electrode, 4, inner conducting layer, 5, the metallic elastic sheet, 51, through hole, 6, crackle.
Embodiment
Below in conjunction with accompanying drawing and concrete execution mode the utility model is described in further detail:
Referring to Fig. 3, Fig. 4, a kind of multiple layers piezoelectric type micro-displacement actuator with antifatigue cracking external electrode, it comprises that is piled up a piezoelectric heap that forms by multi-layer piezoelectric layer 1, be arranged on the interior electrode 2 between the described piezoelectric layer 1 of every adjacent two layers, described external electrode 3 is non-touching two, article two, described external electrode 3 is separately positioned on the both sides of described piezoelectric heap and extends along the stacking height direction of this piezoelectric heap, described external electrode 3 comprises and pastes at the inner conducting layer 4 of described piezoelectric heap side and paste metallic elastic sheet 5 at the lateral surface of described inner conducting layer 4, two adjacent interior electrodes 2 are electrically connected with two different inner conducting layers 4 respectively, also offer a plurality of through holes 51 on the described metallic elastic sheet 5.
Referring to Fig. 4, as strip embodiment, described through hole 51 be shaped as strip; Referring to Fig. 6, as rhombus embodiment, described through hole 51 be shaped as rhombus; Referring to Fig. 7, as oval embodiment, described through hole 51 be shaped as ellipse, certainly as oval-shaped a kind of particular form, circular shape also is fine; Referring to Fig. 8, replace the structure of offering through hole, described metallic elastic sheet is a S shape or Z-shaped.More than each through hole 51 according to the certain rule sequence arrangement, between adjacent two row or proper alignment or be staggered.Certainly, the shape of through hole 51 of the present utility model and arrangement are not subjected to the restriction of embodiment smoothly, all should be accepted as long as satisfy the shape of the flexible through hole 51 that can strengthen metallic elastic sheet 5 and put in order.
Referring to Fig. 5, when the metallic elastic sheet 5 of Fig. 4 when being subjected to external tensile force, through hole 51 can deform, and has strengthened the elasticity of this metallic elastic sheet 5.The distortion of the metallic elastic sheet 5 that external force causes mainly is carried in the both sides of through hole 51, and the original relatively full wafer metallic elastic sheet width of through hole 51 two side areas is little, and then elasticity is better, thereby has protected this metallic elastic sheet 5 can not produce fatigue cracking or be torn.Adopt other shape through hole 51 structures also can reach similar effect.
Adopted the processing method of the multiple layers piezoelectric type micro-displacement actuator of this kind structure, it at first also is processing piezoelectric heap, the manufacture method that the optional only stone of piezoelectric heap processing method burns altogether, at first pile up according to predetermined mode by multi-layer piezoelectric layer base film and electrode size, by waiting static pressure compacting, cut into required size back sintering then; Also can adopt and earlier piezoelectric layer base film be made the piezoelectric layer monolithic, electrode 2 replaced the manufacture method of bonding false monolithic capacitor in the gluing method of viscosity that electrode produces when being heated into high temperature in utilizing again or use adhesive reached the piezoelectric layer monolithic.After having finished above processing, sintering or chemical plating inner conducting layer 4 on the piezoelectric heap, sintering or chemical plating described herein are traditional approach.Last again at the lateral surface welding or the bonded metal flexure strip 5 of inner conducting layer 4, promptly finish the processing of the utility model actuator.Above-described piezoelectric is an electrostriction material, is preferably a kind of in piezoelectric ceramic, the piezoelectric crystal usually, and the material of metallic elastic sheet 5 is a kind of in conducting metal simple substance or the electrical conductivity alloy, and its thickness is 0.02mm to 0.8mm scope.
Claims (7)
1, a kind of multiple layers piezoelectric type micro-displacement actuator with antifatigue cracking external electrode (3), it comprises that is piled up a piezoelectric heap that forms by multi-layer piezoelectric layer (1), be arranged on the interior electrode (2) between the described piezoelectric layer of every adjacent two layers (1), described external electrode (3) is non-touching two, article two, described external electrode (3) is separately positioned on the both sides of described piezoelectric heap and extends along the stacking height direction of this piezoelectric heap, it is characterized in that: described external electrode (3) comprises and pastes at the inner conducting layer (4) of described piezoelectric heap side and paste metallic elastic sheet (5) at the lateral surface of described inner conducting layer (4), adjacent two interior electrodes (2) are electrically connected with two different inner conducting layers (4) respectively, also offer a plurality of through holes (51) on the described metallic elastic sheet (5).
2, the multiple layers piezoelectric type micro-displacement actuator with antifatigue cracking external electrode according to claim 1 is characterized in that: the material of described piezoelectric layer (1) is a kind of in piezoelectric ceramic, the piezoelectric crystal.
3, the multiple layers piezoelectric type micro-displacement actuator with antifatigue cracking external electrode according to claim 2, it is characterized in that: described metallic elastic sheet (5) welds mutually with described inner conducting layer (4) or is bonding.
4, the multiple layers piezoelectric type micro-displacement actuator with antifatigue cracking external electrode according to claim 3 is characterized in that: the material of described metallic elastic sheet (5) is a kind of in conducting metal simple substance or the electrical conductivity alloy.
5, the multiple layers piezoelectric type micro-displacement actuator with antifatigue cracking external electrode according to claim 1, it is characterized in that: the thickness of described metallic elastic sheet (5) is 0.02mm to 0.8mm scope.
6, the multiple layers piezoelectric type micro-displacement actuator with antifatigue cracking external electrode according to claim 1 is characterized in that: a kind of in strip, rhombus, ellipse, the circle of described through hole (51).
7, a kind of multiple layers piezoelectric type micro-displacement actuator with antifatigue cracking external electrode, it comprises that is piled up a piezoelectric heap that forms by multi-layer piezoelectric layer (1), be arranged on the interior electrode (2) between the described piezoelectric layer of every adjacent two layers (1), described external electrode (3) is non-touching two, article two, described external electrode (3) is separately positioned on the both sides of described piezoelectric heap and extends along the stacking height direction of this piezoelectric heap, it is characterized in that: described external electrode (3) comprises and pastes at the inner conducting layer (4) of described piezoelectric heap side and paste metallic elastic sheet (5) at the lateral surface of described inner conducting layer (4), adjacent two interior electrodes (2) are electrically connected with two different inner conducting layers (4) respectively, and described metallic elastic sheet (5) is continuous serpentine or " Z " shape.
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| Application Number | Priority Date | Filing Date | Title |
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| CNU2008200406458U CN201234216Y (en) | 2008-07-03 | 2008-07-03 | Multi-layered piezoelectric micro displacement actuator having fatigue cracking resistant outer electrode |
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| CNU2008200406458U CN201234216Y (en) | 2008-07-03 | 2008-07-03 | Multi-layered piezoelectric micro displacement actuator having fatigue cracking resistant outer electrode |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2511968A1 (en) * | 2009-11-26 | 2012-10-17 | Kyocera Corporation | Stacked piezoelectric element, injection device using same, and fuel injection system |
| CN103380504A (en) * | 2011-02-24 | 2013-10-30 | 京瓷株式会社 | Laminated piezoelectric element, injection apparatus provided with same, and fuel injection system provided with same |
| CN109285943A (en) * | 2017-07-20 | 2019-01-29 | 太阳诱电株式会社 | Laminated piezoelectric element, piezoelectric vibrating device and electronic equipment |
| US10586912B2 (en) | 2013-12-11 | 2020-03-10 | Fujifilm Dimatix, Inc. | Method for fabricating flexible micromachined transducer device |
| CN111682103A (en) * | 2020-05-29 | 2020-09-18 | 深圳振华富电子有限公司 | Preparation method of piezoelectric driver stack with electrode plates |
| CN111908896A (en) * | 2020-06-29 | 2020-11-10 | 华南理工大学 | Field-induced strain micro-displacement actuator and preparation method and application thereof |
| CN112635648A (en) * | 2019-10-08 | 2021-04-09 | Tdk株式会社 | Laminated piezoelectric element |
-
2008
- 2008-07-03 CN CNU2008200406458U patent/CN201234216Y/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2511968A1 (en) * | 2009-11-26 | 2012-10-17 | Kyocera Corporation | Stacked piezoelectric element, injection device using same, and fuel injection system |
| EP2511968A4 (en) * | 2009-11-26 | 2014-01-08 | Kyocera Corp | Stacked piezoelectric element, injection device using same, and fuel injection system |
| CN103380504A (en) * | 2011-02-24 | 2013-10-30 | 京瓷株式会社 | Laminated piezoelectric element, injection apparatus provided with same, and fuel injection system provided with same |
| CN103380504B (en) * | 2011-02-24 | 2016-01-27 | 京瓷株式会社 | Piezoelektrisches mehrschichtelement and possess injection apparatus and the fuel injection system of this Piezoelektrisches mehrschichtelement |
| US10586912B2 (en) | 2013-12-11 | 2020-03-10 | Fujifilm Dimatix, Inc. | Method for fabricating flexible micromachined transducer device |
| CN109285943A (en) * | 2017-07-20 | 2019-01-29 | 太阳诱电株式会社 | Laminated piezoelectric element, piezoelectric vibrating device and electronic equipment |
| CN112635648A (en) * | 2019-10-08 | 2021-04-09 | Tdk株式会社 | Laminated piezoelectric element |
| CN111682103A (en) * | 2020-05-29 | 2020-09-18 | 深圳振华富电子有限公司 | Preparation method of piezoelectric driver stack with electrode plates |
| CN111908896A (en) * | 2020-06-29 | 2020-11-10 | 华南理工大学 | Field-induced strain micro-displacement actuator and preparation method and application thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SUZHOU PANT PIEZOELECTRIC TECH. CO., LTD. Free format text: FORMER NAME: KUNSHAN PANTE ELECTRIC POTTERY TECHNOLOGY CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: Kunshan City, Jiangsu Province Road 215300 No. 395 Patentee after: SUZHOU PANT PIEZOELECTRIC TECH CO., LTD. Address before: Kunshan City, Jiangsu Province Road 215300 No. 395 Patentee before: Kunshan Pante Eletronic Ceramic Technology Co., Ltd. |
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| CX01 | Expiry of patent term |
Granted publication date: 20090506 |