CN201219036Y - Piezoelectric ceramics scanner for scan probe microscope - Google Patents
Piezoelectric ceramics scanner for scan probe microscope Download PDFInfo
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- CN201219036Y CN201219036Y CNU2008200601982U CN200820060198U CN201219036Y CN 201219036 Y CN201219036 Y CN 201219036Y CN U2008200601982 U CNU2008200601982 U CN U2008200601982U CN 200820060198 U CN200820060198 U CN 200820060198U CN 201219036 Y CN201219036 Y CN 201219036Y
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- piezoelectric ceramic
- ceramic tube
- scanner
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- tube
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Abstract
The utility model relates to a piezoelectric ceramic scanner for scanning the probe microscope, mainly comprising a shell, a piezoelectric ceramic tube I, a piezoelectric ceramic tube II, a conduction base and a plastic conductor, wherein the piezoelectric ceramic tube I is used for controlling the XY direction and the corresponding four conducting layers are respectively coated on the inner and outer surfaces of the piezoelectric ceramic tube I, divided into four groups; the piezoelectric ceramic tube I is connected with the piezoelectric ceramic tube II by an insulation cover and the piezoelectric ceramic tube II is used for controlling the Z direction, and the conducting layers are respectively coated on the inner and outer surfaces of the piezoelectric ceramic tube II and the magnetic particles are set in the center of the conduction base and the plastic conductors are lead out from different conducting layers of the piezoelectric ceramic tubes. The piezoelectric ceramic scanner for scanning the probe microscope can conquer the problem of the prior products that the intercoupling due to the presence of the XY direction and Z direction parasitic capacitance reduces the control accuracy of the piezoelectric ceramic scanner.
Description
Technical field
The utility model relates to a kind of piezoelectric scanner that is used for scanning probe microscopy.
Background technology
The piezoelectric ceramics tube scanner is one of core ingredient of scanning probe microscopy.Nearly all scanning probe microscopy all uses piezoelectric scanner to carry out scanning imagery.Piezoelectric scanner mainly contains tripod type, single tube type and cross and cooperates single tube type etc.What be most widely used at present is single tube type piezoelectric scanner.The piezoelectric ceramics tube scanner that is used for SPM in the market is generally by the control of a single tube type piezoelectric ceramic tube realization to XY and Z direction, but every group of conductive layer institute making alive is opposite polarity voltage, so every group of conductive layer can form a stray capacitance, so when the motion of control Z direction, because the coupling of stray capacitance, the voltage waveform of XY direction can be interfered; The voltage of control Z direction is added on the conductive layer, and two groups of voltages of opposite polarity control XY direction can be formed centrally total null voltage in pipe, and as the total null voltage of controlling the Z direction.Because of the restriction of manufacture craft, total null voltage is not on the center line of pipe, thereby produces voltage disturbance when the motion of control Z direction.Therefore every group two electric interlayers exist distributed capacitance to disturb and voltage disturbance (not having the zero-bit point), thereby make XY direction and the motion of Z direction have coupling.
Scanning probe microscopy is an extremely sensitive and accurate system, and it can observe and measure the position and the distribution of an atom, and a minimum interference just can influence measurement result.Obviously the scanner that has the sixth of the twelve Earthly Branches can not meet the demands
The utility model content
The purpose of this utility model provides a kind of piezoelectric ceramics tube scanner that is used for scanning probe microscopy, has coupling to overcome the motion of existing product XY direction and Z direction, and influence is to the deficiency of the control of piezoelectric scanner, to improve measuring accuracy.
The purpose of this utility model is to be achieved through the following technical solutions:
A kind of piezoelectric ceramics tube scanner that is used for scanning probe microscopy, mainly comprise shell, piezoelectric ceramic tube I, piezoelectric ceramic tube II, conductive base and plastic wire, has the mounting platform that a flange forms on the described shell, the inboard fixed support of shell, described piezoelectric ceramic tube is arranged in the inner core of shell, piezoelectric ceramic tube I is fixed on the support, the surfaces externally and internally of piezoelectric ceramic tube I scribbles 4 conductive layers of mutual correspondence respectively, piezoelectric ceramic tube I is connected with piezoelectric ceramic tube II by the insulation block set, piezoelectric ceramic tube II surfaces externally and internally scribbles conductive layer respectively, piezoelectric ceramic tube II links to each other by insulation sleeve with conductive base, be fixed with the shock-absorbing ring between piezoelectric ceramic tube II and the shell, the inwall of the scanning end of described shell forms a boss, put the magnetic grain in the boss, conductive base is fixed in the scanning end of shell inner core central authorities, and plastic wire is drawn from the different conductive layers of piezoelectric ceramic tube.
This practical beneficial effect is: the piezoelectric ceramic tube of fixed length is divided into isometric two sections, one section is used for controlling the XY direction specially, one section special control Z direction, because X-Y direction and Z direction control electrode separate fully, therefore make original owing to being made in the mutual interference eliminated that a capacity effect between the ceramic pipe top electrode produces; In addition, the electrostriction of piezoelectric ceramic tube is directly proportional with the geometrical length of pipe and driving voltage, for separately X-Y and Z direction exciting electrode, and does not change the physical dimension of original scanning device, only is full-sized half length respectively so X-Y pipe and Z manage size.But owing to take to have increased number of electrodes, the voltage of each direction is doubled, therefore flexible length also doubles.
Description of drawings
Fig. 1 is the described structural representation that is used for the piezoelectric scanner of scanning probe microscopy of the utility model embodiment;
Fig. 2 is the described structural representation that is used for the piezoelectric ceramic tube-1 of the piezoelectric scanner of scanning probe microscopy of the utility model embodiment;
Fig. 3 is the described structural representation that is used for the piezoelectric ceramic tube-2 of the piezoelectric scanner of scanning probe microscopy of the utility model embodiment.
Fig. 4 is the described X-Y ceramic pipe displacement diagram that is used for the piezoelectric scanner of scanning probe microscopy of the utility model embodiment.
Among the figure:
1, shell; 2, piezoelectric ceramic tube I; 21, conductive layer; 22, conductive layer; 23, conductive layer; 24, conductive layer; 25, conductive layer; 26, conductive layer; 27, conductive layer; 28, conductive layer; 29, insulation course; 3, piezoelectric ceramic tube II; 31, insulation course; 32, conductive layer; 33, conductive layer; 4, conductive base; 41, conductive base displacement amplitude; 5, plastic wire; 6, mounting platform; 7, support; 8, insulation sleeve; 9, shock-absorbing ring; 10, scanning end; 11, magnetic grain; 12, the displacement amplitude of X-Y pipe; 13, the displacement of conductive base.
Embodiment
As Figure 1-3, the described piezoelectric ceramics tube scanner that is used for scanning probe microscopy of the utility model embodiment, comprise shell 1, piezoelectric ceramic tube I 2, piezoelectric ceramic tube II 3, conductive base 4 and plastic wire 5, has the mounting platform 6 that a flange forms on the described shell 1, shell 1 inboard fixed support 7; Piezoelectric ceramic tube I 2 is fixed on the support 7, piezoelectric ceramic tube I 2 length be full-sized half, be provided with insulation course 29 in the middle of the described piezoelectric ceramic tube I 2, the surfaces externally and internally of piezoelectric ceramic tube I 2 scribbles 4 conductive layers of mutual correspondence respectively, be divided into four groups, wherein conductive layer 21,25 is one group, and conductive layer 23,27 is one group, the motion of control directions X; Conductive layer 24,28 is one group, and conductive layer 22,26 is one group, the motion of control Y direction; Piezoelectric ceramic tube I 2 is connected with piezoelectric ceramic tube II 3 by insulation sleeve 8, piezoelectric ceramic tube II 3 length are half of raw footage, be provided with insulation course 31 in the middle of the described piezoelectric ceramic tube II 3, piezoelectric ceramic tube II 3 surfaces externally and internallies scribble respectively as the positive electrode conducting layer 32 of voltage with as the conductive layer 33 of zero potential, make the motion and the XY direction of Z direction not have influence, also eliminated simultaneously the influence of no-voltage zero-bit, be fixed with shock-absorbing ring 9 between described piezoelectric ceramic tube II 3 and the shell 1, piezoelectric ceramic tube II 3 links to each other by insulation sleeve 8 with conductive base 4, the inwall of the scanning end 10 of described shell 1 forms a boss, be placed with magnetic grain 11 in this boss, described conductive base 4 is fixed on scanning end 10; Plastic wire 5 is drawn from the different conductive layers of piezoelectric ceramic tube, moves in XYZ three dimensions by adding different Control of Voltage scanners.
As shown in Figure 4, the described piezoelectric ceramics tube scanner that is used for scanning probe microscopy of the utility model embodiment, described piezoelectric ceramic tube I 2 is under the excitation of X/Y direction voltage, the displacement amplitude 12 of X-Y pipe is if a, because its length equates that with Z pipe 3 then 13 of the displacements of conductive base are 2a.
Claims (1)
1, a kind of piezoelectric scanner that is used for scanning probe microscopy, mainly comprise shell (1), piezoelectric ceramic tube I (2), piezoelectric ceramic tube II (3), conductive base (4) and plastic wire (5), has the mounting platform (6) that a flange forms on the described shell (1), the inboard fixed support of shell (1) (7), described piezoelectric ceramic tube is arranged in the inner core of shell (1), the inwall of the scanning end (10) of described shell (1) forms a boss, put magnetic grain (11) in the boss, described conductive base (4) is fixed on scanning end (10); Described plastic wire (5) is drawn from the different conductive layers of piezoelectric ceramic tube, it is characterized in that: be provided with insulation course (29) in the middle of the described piezoelectric ceramic tube I (2), the surfaces externally and internally of piezoelectric ceramic tube I (2) scribbles 4 conductive layers of mutual correspondence respectively, be provided with insulation course (31) in the middle of the described piezoelectric ceramic tube II (3), piezoelectric ceramic tube II (3) surfaces externally and internally scribbles conductive layer (32), conductive layer (33) respectively; Described piezoelectric ceramic tube I (2) is connected with piezoelectric ceramic tube II (3) by insulation sleeve (8); Piezoelectric ceramic tube I (3) is fixed on the support (7), is fixed with shock-absorbing ring (9) between described piezoelectric ceramic tube II (3) and the shell (1), and piezoelectric ceramic tube II (3) links to each other by insulation sleeve (8) with conductive base (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200601982U CN201219036Y (en) | 2008-06-24 | 2008-06-24 | Piezoelectric ceramics scanner for scan probe microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200601982U CN201219036Y (en) | 2008-06-24 | 2008-06-24 | Piezoelectric ceramics scanner for scan probe microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201219036Y true CN201219036Y (en) | 2009-04-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200601982U Expired - Fee Related CN201219036Y (en) | 2008-06-24 | 2008-06-24 | Piezoelectric ceramics scanner for scan probe microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201219036Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102707094A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and device for detecting atomic force microscopic scanning of tri-scanner atomic |
| CN102707093A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and system for double-tube scanner linkage tracking type atomic force microscopic detection |
| CN102721833A (en) * | 2012-06-12 | 2012-10-10 | 浙江大学 | Atomic force microscope imaging method and device of microscopic monitoring type selectable region |
| CN107589276A (en) * | 2016-07-09 | 2018-01-16 | 苏州海兹思纳米科技有限公司 | A kind of High Precision Piezoelectric Ceramic scanner |
| CN110530942A (en) * | 2019-07-31 | 2019-12-03 | 西安交通大学 | A kind of clamping of electrochemistry experiment bench microprobe and fixed device |
-
2008
- 2008-06-24 CN CNU2008200601982U patent/CN201219036Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102707094A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and device for detecting atomic force microscopic scanning of tri-scanner atomic |
| CN102707093A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and system for double-tube scanner linkage tracking type atomic force microscopic detection |
| CN102721833A (en) * | 2012-06-12 | 2012-10-10 | 浙江大学 | Atomic force microscope imaging method and device of microscopic monitoring type selectable region |
| CN102707093B (en) * | 2012-06-12 | 2013-12-04 | 浙江大学 | Method and system for double-tube scanner linkage tracking type atomic force microscopic detection |
| CN102707094B (en) * | 2012-06-12 | 2014-05-21 | 浙江大学 | Method and device for detecting atomic force microscopic scanning of tri-scanner atomic |
| CN107589276A (en) * | 2016-07-09 | 2018-01-16 | 苏州海兹思纳米科技有限公司 | A kind of High Precision Piezoelectric Ceramic scanner |
| CN110530942A (en) * | 2019-07-31 | 2019-12-03 | 西安交通大学 | A kind of clamping of electrochemistry experiment bench microprobe and fixed device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: LUO XIANZHAO Free format text: FORMER OWNER: CHENG ZHUANDONG Effective date: 20090821 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20090821 Address after: Room 1402, 9 Lane 2000 Dong Lu, Pudong New Area, Shanghai. Zip code: 201206 Co-patentee after: Hu Zhiqiang Patentee after: Luo Xian Zhao Address before: No. 149, extension Road, Shanghai, Zhabei District: 200072 Co-patentee before: Hu Zhiqiang Patentee before: Cheng Tong Dong |
|
| ASS | Succession or assignment of patent right |
Owner name: SUZHOU HAZ SNAMY SCIENCE AND TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: LUO XIANZHAO Effective date: 20100108 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20100108 Address after: Xinghu street Suzhou Jiangsu Industrial Park, No. 218 building A4, room 105, zip code: 215125 Patentee after: Suzhou HZS-Nanosurf Nanotechnology Co., Ltd. Address before: Room 1402, 9 Lane 2000 Dong Lu, Pudong New Area, Shanghai. Zip code: 201206 Co-patentee before: Hu Zhiqiang Patentee before: Luo Xian Zhao |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090408 Termination date: 20140624 |
|
| EXPY | Termination of patent right or utility model |