CN201177501Y - X fluorescent thickness-measuring spectrometer - Google Patents

Abstract

The utility model provides an X-ray fluorescence thickness measuring spectrograph, comprising a machine body and a computer connected with the machine body. The spectrograph is characterized in that the machine body comprises a shell machine body and a sample cavity; the sample cavity comprises a transparent shield cover capable of moving up and down; the machine body is provided inside with the sample cavity, and the sample cavity comprises a lifting platform, a motor, a guide rail and a push key; and the lifting platform can be pulled by the motor to stably move up and down along the guide rail, and the moving distance and direction are controlled by the push key.

Description

X fluorescence thickness measuring spectrometer

Technical field

The utility model relates to a kind of trace element detector device, and the going up according to the formula design of especially a kind of uniqueness is convenient to carrying out the point-to-point measurement of thickness of coating and content on the bigger parts of range of size, and has the X fluorescence spectrophotometer of open sample cavity.

Background technology

The inventor has applied for that in 2006 name is called the patent of a kind of automatic location X fluorescent energy dispersive spectrometer, and number of patent application is 200620014536.X.As shown in Figure 1; this patent is a kind of vacuum detecting X fluorescent energy dispersive spectrometer; comprise fuselage and the computer that is attached thereto; wherein; in the described fuselage light-source system is installed; detector system and signal processing system; wherein; described light-source system comprises high voltage unit and X-ray pipe; light-source system is launched X ray; after X ray acts on the sample; each atom in the sample can be inspired feature X fluorescence; these X fluorescence are detected the device system and receive; analysis is converted into electric signal; electric signal is through the processing of MCA modular system; be transferred in the computer again; on the user interface of fuselage and the computer that is attached thereto, show; it is characterized in that: the fuselage of described vacuum detecting X fluorescent energy dispersive spectrometer comprises a metal framework and a shell; wherein; described light source radiation system; detector system; and signal processing system all is fixed on the described metal framework; described jacket shields outside described metal framework; the top of described metal framework also is provided with a sample stage, and described sample is positioned on this sample stage, described sample stage; the light source radiation system; detector system; and signal processing system constitutes a measuring unit.

But the inventor finds that through practice above-mentioned patent exists the shortcoming of the following aspects to need to improve:

One, this X fluorescence spectrophotometer, sample cavity is designed to enclosed sample cavity, and is very inconvenient when the measurement of large scale sample.

Two, this X fluorescence spectrophotometer does not have the such device of mobile platform, relies on manual operations when mobile example fully.When displacement is very little, be difficult to reach the effect of fine setting.

Three, this X fluorescence spectrophotometer, when adjusting collimating apparatus and optical filter at different samples, all be manual the operation, each so all must uncapping operated, may have dust and enter light path system, be the standard that relies on human eye during manual adjustment perhaps, has some deviations unavoidably, and these deviations are reacted on the specimen, will exert an influence to test result.

Summary of the invention

In order to overcome numerous shortcomings of above-mentioned X fluorescence spectrophotometer, the purpose of this utility model provides a kind of X fluorescence thickness measuring spectrometer, adopts unique upward shining the formula design and have the X fluorescence spectrophotometer of open sample cavity.

The technical scheme that the utility model adopted is: a kind of X fluorescence thickness measuring spectrometer, comprise fuselage and the computer that is attached thereto, described fuselage comprises shell (1), fuselage (2) and sample cavity (3), wherein, described shell (1) covers on described fuselage (2) outside, described sample cavity (3) is located in the described fuselage (2), it is characterized in that: described sample cavity (3) comprises transparent radome movable up and down (4).

Be provided with sample cavity (3) in the described fuselage, described sample cavity comprises hoistable platform (33), motor, guide rail (31) and button (32), hoistable platform (33) moves up and down reposefully along guide rail (31) under the motor pulling, and direction that moves and distance are by button (32) control.

Described fuselage is provided with the gentle support of support, and the left and right gas support on described transparent radome (4) and the fuselage support is connected, under the power effect that left and right gas supports, by handle, moves up and down along the guide rail that is fixed on the support.

Described X fluorescence thickness measuring spectrometer also is provided with mobile platform (5), described mobile platform (5) comprises arm-tie (53), otch (54) and guide rail (55), wherein, described mobile platform (5) is assemblied on two-layer 4 guide rails (55), and by the key control of pressing of the centre on the front panel, mobile platform (5) can all around move reposefully, arm-tie (53) is used for locating sample, which is provided with otch (54), when tested point with after vertically laser aligns, manually fasten the otch on it.

Described X fluorescence thickness measuring spectrometer is provided with collimating apparatus optical filter self-checking device (6), and this device comprises motor (63), collimating apparatus (61) and optical filter (62).Two motors (63) by two drive, one of them motor pulling collimating apparatus of turning left, and another motor pulling optical filter of turning right is accurately located collimating aperture and optical filter.

The beneficial effects of the utility model are:

The first, adopt unique going up according to the formula design, in conjunction with structure moving up and down, and mobile platform device accurately, accurately locate the sample measurement point by three-dimensional, convenient to carrying out the point-to-point measurement of thickness of coating and content on the bigger parts of range of size.

The second, be provided with automatic switchover collimating apparatus and optical filter regulating device, reduce the trouble and the inexactness of people's operation to greatest extent.

Three, mobile platform device is accurately arranged, accurately locate sample, provide convenience to the client by X and two axles of Y.

Four, be provided with open sample cavity, glass radome movable up and down had both avoided the X ray of test to leak, and was convenient for measuring again.

Description of drawings

Move figure on Fig. 1 the utility model translucent cover and the hoistable platform;

Fig. 2 the utility model overall schematic;

Fig. 3 the utility model inner structure synoptic diagram;

Fig. 4 the utility model translucent cover moves up and down synoptic diagram along the guide rail that is fixed on the support;

Fig. 5 the utility model mobile platform structural representation;

Fig. 6 the utility model collimating apparatus optical filter self-checking device structural representation.

Among the figure 1, shell; 2, fuselage; 3, sample cavity; 31, guide rail; 32, button; 33, hoistable platform; 4, transparent radome; 5, mobile platform; 53 arm-ties; 54, otch; 55, guide rail; 6, collimating apparatus optical filter self-checking device; 61, collimating apparatus; 62, optical filter; 63, motor.

Embodiment

As Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 and a kind of X fluorescence thickness measuring spectrometer shown in Figure 6, comprise fuselage and the computer that is attached thereto, described fuselage comprises shell (1) fuselage (2) and sample cavity (3), wherein, described shell (1) covers on described fuselage (2) outside, described sample cavity (3) is located in the described fuselage (2), and described sample cavity comprises transparent radome movable up and down (4).

Be provided with sample cavity (3) in the described fuselage, described sample cavity comprises hoistable platform (33), motor, guide rail (31) and button (32), hoistable platform (33) moves up and down reposefully along guide rail (31) under the motor pulling, and direction that moves and distance are by button (32) control.

Described fuselage is provided with the gentle support of support, and the left and right gas support on described transparent radome (4) and the fuselage support is connected, under the power effect that left and right gas supports, by handle, moves up and down along the guide rail that is fixed on the support.

Described X fluorescence thickness measuring spectrometer also is provided with mobile platform (5), described mobile platform (5) comprises arm-tie (53), otch (54) and guide rail (55), wherein, described mobile platform (5) is assemblied on two-layer 4 guide rails (55), and the key control of pressing by the centre on the front panel all around moves reposefully, arm-tie on the described mobile platform (53) is used for locating sample, which is provided with otch (54), when tested point with after vertically laser aligns, manually fasten the otch (54) on it.

Described X fluorescence thickness measuring spectrometer is provided with collimating apparatus optical filter self-checking device (6), and this device comprises motor (63), collimating apparatus (61) and optical filter (62).By two motors at two, one of them pulling collimating apparatus of turning left, another pulling optical filter of turning right is accurately located collimating aperture and optical filter.

In addition, the X fluorescence spectrophotometer of Tui Chuing in the market, some supporting Survey Software are that operation interface is very complicated, and is very high to operating personnel's requirement by other softwares reorganizations, buy to discuss to instrument and have caused no small trouble.

Therefore, the user oriented operational requirements of the utility model has been developed function software, makes things convenient for the user to test the operation of aspect, and its principle of work is as follows:

One, instrumental correction

Adjust the instrument enlargement factor, eliminate the influence that the peak floats, guarantee that testing sample is consistent with the mark sample condition.

Two, working curve

Composition per sample is different with base material, working curve is divided into six big classes: promptly survey the CrCl in the plastics; Survey the CrCdPbHg in the iron and steel, survey the Cr in the copper zinc, Cd, Pb, Hg surveys the CrCdPbHg in the scolding tin, and is self-defined.Each big class can be added many curves arbitrarily according to actual needs.

Three, intensity is calculated

Here adopt the method for peak back of the body ratio, peak area calculates with Gauss curve fitting.That is:

$I=\frac{I_p}{I_b};$ I _pBe the area at peak, I _bBe background area.

$I_p=\underset{L}{\overset{R}{\mathrm{\Σ}}}H*\mathrm{Exp}[-\frac{{(X-X_0)}^2}{\mathrm{\δ}}]$

R: the left margin at peak

L: the right margin at peak

H: the height at peak.

X: Feng Dao location

X ₀: the center trace location at peak

δ: the parameter relevant with the width at peak

Four, calculate content

Content by formula C=a*I+b calculates.

Coefficient a, b provides with least square method.

$a=(\underset{1}{\overset{n}{\mathrm{\Σ}}}{I}_i{C}_i-\underset{1}{\overset{n}{\mathrm{\Σ}}}{I}_i\underset{1}{\overset{n}{\mathrm{\Σ}}}{C}_i)/(\underset{1}{\overset{n}{\mathrm{\Σ}}}{I}_i{C}_i-\underset{1}{\overset{n}{\mathrm{\Σ}}}{I}_i\underset{1}{\overset{n}{\mathrm{\Σ}}}{I}_i)$

$b=(\underset{1}{\overset{n}{\mathrm{\Σ}}}{C}_i-a\underset{1}{\overset{n}{\mathrm{\Σ}}}{I}_i)$

C _iBe the concentration of standard model i.

I _iBe the intensity of standard model i.

Seven, report the result

Can be saved in needed file to the result who measures.

Claims (5)

1, a kind of X fluorescence thickness measuring spectrometer, comprise fuselage and the computer that is attached thereto, described fuselage comprises shell (1), fuselage (2) and sample cavity (3), wherein, described shell (1) covers on described fuselage (2) outside, described sample cavity (3) is located in the described fuselage (2), it is characterized in that: described sample cavity (3) comprises transparent radome movable up and down (4).

2, according to the described X fluorescence of claim 1 thickness measuring spectrometer, it is characterized in that: be provided with sample cavity (3) in the described fuselage, described sample cavity (3) comprises hoistable platform (33), motor, guide rail (31) and button (32), hoistable platform (33) is under the motor pulling, move reposefully up and down along guide rail (31), direction that moves and distance are by button (32) control.

3, according to claim 1 or 2 described X fluorescence thickness measuring spectrometers, it is characterized in that: described fuselage is provided with the gentle support of support, left and right gas support on described transparent radome (4) and the fuselage support is connected, under the power effect of left and right gas support, by handle, move up and down along the guide rail that is fixed on the support.

4, according to claim 1 or 2 described X fluorescence thickness measuring spectrometers, it is characterized in that: described X fluorescence thickness measuring spectrometer is provided with mobile platform (5), described mobile platform (5) comprises arm-tie (53), otch (54) and guide rail (55), wherein, described mobile platform (5) is assemblied on two-layer 4 guide rails (55), by the key control of pressing of the centre on the fuselage front panel.

5, according to the described X fluorescence of claim 4 thickness measuring spectrometer, it is characterized in that: described X fluorescence thickness measuring spectrometer is provided with accurate value device optical filter self-checking device (6), and this device comprises motor (63), collimating apparatus (61) and optical filter (62).

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