CN201158700Y - Heating mechanism of vacuum plants - Google Patents
Heating mechanism of vacuum plants Download PDFInfo
- Publication number
- CN201158700Y CN201158700Y CNU2008200018537U CN200820001853U CN201158700Y CN 201158700 Y CN201158700 Y CN 201158700Y CN U2008200018537 U CNU2008200018537 U CN U2008200018537U CN 200820001853 U CN200820001853 U CN 200820001853U CN 201158700 Y CN201158700 Y CN 201158700Y
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- CN
- China
- Prior art keywords
- pedestal
- heating element
- vacuum apparatus
- heat
- tortuous shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
A heating deice for a vacuum device is erectly arranged in a cavity of the vacuum device, which comprises a base, a supporting rack holder which is uprightly arranged on one surface of the base and a one-face coiling shape heating body which is relative to the surface of the base, and can be separately inserted on the supporting rack holder. The utility model has extremely excellent heating efficiency and convenient maintenance.
Description
Technical field
The utility model relates to a kind of heating unit, is meant a kind of heating unit of vacuum apparatus especially.
Background technology
At present, the method that is widely used for preparing film most surely belongs to vacuum coating technology.To belong to hot vapour deposition method, the sputtering method of physical vapor deposition (PVD) category in the vacuum coating technology, its principle of operation is exactly in a vacuum cavity, see through type of heating such as resistive heating, electron beam, ionic fluid, laser, thermal radiation, electricity slurry, electric arc, Coating Materials is gasificated into molecule or atom, and deposits, be attached on the target base-plates surface to form film.
No matter be to use any heating installation, can keep good heating efficiency for making it, and avoid giving birth to pollution because of long-pending attached impurity, upkeep operations such as heating installation must regularly be cleared up, maintenance, so, the utility model applicant will found the heating element of establishing in the formula heating installation and locate to insert the extension mode, and will be quite easy when dismounting, can promote and safeguard convenience.
Summary of the invention
The purpose of this utility model is to provide a kind of heating efficiency good and safeguard the heating unit of vacuum apparatus easily.
The heating unit of vacuum apparatus of the present utility model, it can uprightly be arranged at an inside cavity of this vacuum apparatus, and comprises a pedestal, a lip-deep support rack frame and the tortuous shape heating element of one side that is arranged at this pedestal with being vertical.This tortuous shape heating element is in the face of this surface of this pedestal, and slotting separatably the extension is positioned on this support rack frame.
Effect of the present utility model is, utilizes this tortuous shape heating element to have to insert separatably and hangs the design that is positioned on this support rack frame, and is quite simple and easy during dismounting, has good whole and safeguards convenience.
Description of drawings
Fig. 1 is a three-dimensional exploded view, and a preferred embodiment of the heating unit of the utility model vacuum apparatus is described, the one heat-conducting unit can collude the opening part that is hung on a pedestal, to cover a tortuous shape heating element in this pedestal;
Fig. 2 is a sectional perspective exploded view of the preferred embodiment;
Fig. 3 is an assembled sectional view of the preferred embodiment.
Embodiment
Below in conjunction with drawings and Examples the utility model is elaborated:
As Fig. 1～shown in Figure 3, the preferred embodiment of the heating unit 2 of the utility model vacuum apparatus, it uprightly is arranged at an inside cavity of a vacuum apparatus (as electricity slurry sputtering system) (not shown), be used for a target base plate (as wafer, glass etc.) is heated, to promote thin film deposition, adhesion effect; Certainly, this vacuum apparatus also can be hot deposition system, and the heating unit 2 of this vacuum apparatus just can be with so that a deposition material melted by heat, evaporation, equally also can be in order to heat a target base plate, to promote the thin film deposition effect.About principle of operation and other equipment of electricity slurry sputter or hot evaporation equal vacuum coating technique, be that to have the people of common knowledge in this technical field known, also non-pass technical characterictic of the present utility model will not describe in detail.
And the heating unit 2 of this vacuum apparatus comprise a pedestal 21, two that is vertical type flat square side cap shape erectly be placed at interval support rack frame 22, in this pedestal 21 be placed in this pedestal 21 and upright separatably insert to hang be positioned this and two support tortuous shape heating element 23, two on rack frame 22 and vertically run through this pedestal 21 respectively drawablely and place this two tightening latch 25 that supports in the sidepiece of rack frame 22, and one can collude the heat-conducting unit 24 of opening part to cover this tortuous shape heating element 23 closely that extension is combined in this pedestal 21.
This pedestal 21 has a rectangle wall 211 and a perisporium 212 from these wall 211 periphery horizontal expansions.This two supports rack frame 22 is welded on wall 211 internal surfaces of this pedestal 21 with paralleling, each support rack frame 22 have upright bar 221, an a plurality of longitudinal interval that is fixed in wall 211 internal surfaces of this pedestal 21 be arranged in this upright bar 221 away from the side of this wall 211 and its opening towards the horizontal U type latch 222 of this wall 211, and a plurality of and these a plurality of latches 222 are staggered draw-in groove 223, therefore, adjacent latch 222 inside are connected with draw-in groove 223.
This tortuous shape heating element 23 is to be coiled into the square plate shape in length and breadth, wall 211 internal surfaces that can utilize this pedestal 21 relatively near or away from translation mode, move up in this pedestal 21 and its each horizontal stripe is inserted accurately, reposefully be hung on this two to support in the draw-in groove 223 of rack frame 22, or, break away from this two draw-in groove 223 that supports rack frame 22 and (must detach earlier under the state of this two supports rack frame 22) in this two tightening latch 25 to shift out outside this pedestal 21.In the present embodiment, this tortuous shape heating element 23 is electrothermal tubes, and its two power end is located in top, the bottom side of this pedestal 21 position respectively.Hot mechanism principle is given birth in the energising of relevant electrothermal tube, knows usually that by having in this technical field the knowledgeable is known, and non-technical characterictic of the present utility model place, not elsewhere specified (NES).
This two tightening latch 25 is hung on this two supports rack frame 22 in order to guarantee that this tortuous shape heating element 23 can firmly more be inserted carefreely.Each tightening latch 25 has one can be inserted the top portion of the perisporium 212 of wearing this pedestal 21 and continue string down and insert straight-bar body 251 in these many latches 222 and these many draw-in grooves 223, and a consubstantiality is arranged at these straight-bar body 251 tops and colludes scratching part 252 on the top portion outside surface that is butted on this perisporium 212.Therefore, insert when this tortuous shape heating element 23 and to be hung on this two when supporting on rack frame 22, this two tightening latch 25 is penetrated this and two supports in rack frame 22 to insert down respectively from these pedestal 21 outsides, this two supports rack frame 22 to prevent these tortuous shape heating element 23 improper disengagings; When desire should tortuous shape heating element 23 shifts out, then grip scratching part 252 places of this two tightening latch 25 and give upwards pull, make the straight-bar body 251 of this two tightening latch 25 detach this two supports rack frame 22 fully, just be able to separate this two supports rack frame 22 by tortuous shape heating element 23 smoothly.
This heat-conducting unit 24 has one can press close to and cover the square heat-conducting plate 241 of the square of this tortuous shape heating element 23 all sidedly, four rows are fixedly welded on the lip-deep hook 242 of this heat-conducting plate 241 in the face of this tortuous shape heating element 23 with being square, and four rows are fixedly arranged on wall 211 internal surfaces of this pedestal 21 with being square and respectively to embedding hanging block 243 that should four hooks 242.The end face of each embedding hanging block 243 is arranged with a slot 244, an end of corresponding this hook 242 plant separatably in this slot 244, in order to, this heat-conducting plate 241 just can be hung the location reposefully and cover this tortuous shape heating element 23, or can easily separate so that this tortuous shape heating element 23 exposes.In the present embodiment, this heat-conducting plate 241 is the corrugated sheet structure that can bring into play splendid thermal conductance effect.
Therefore, when adding hot work, energising makes these tortuous shape heating element 23 work give birth to heat, under the perimeter barrier effect of this pedestal 21, can effectively suppress loss, the loss of this tortuous shape heating element 23 heat energy of giving birth to, allow heat energy effectively via approach such as thermal radiation, thermal convections and be passed to this heat-conducting plate 241, via this heat-conducting plate 241 heat energy is conducted to target base plate rapidly again or deposition material is heated, integral body can reach splendid heating efficiency.
On the other hand, when carrying out upkeep operation, earlier this heat-conducting plate 241 (together with hook 242) and this two tightening latch 25 are dismantled down, again should tortuous shape heating element 23 separate and support rack frame 22 and shift out outside this pedestal 21, just cleaning, the usefulness that can carry out each parts detect or eliminate service action such as changing renewal, afterwards, then in regular turn should tortuous shape heating element 23, this two tightening latch 25 and this heat-conducting plate 241 etc. organize back again just passable, integral body can reach dismounting simple and easy, safeguard effect such as facility.
Conclude above-mentioned, the heating unit 2 of vacuum apparatus of the present utility model, it is good and safeguard effects such as facility that integral body can reach heating efficiency, so can reach the purpose of this utility model really.
Claims (7)
1. the heating unit of a vacuum apparatus, it uprightly is arranged at an inside cavity of this vacuum apparatus, and comprises a pedestal and one side and be arranged at tortuous shape heating element on this pedestal, it is characterized in that:
Also comprise a lip-deep support rack frame that is arranged at this pedestal, this tortuous shape heating element is in the face of this surface of this pedestal, and slotting separatably the extension is positioned on this support rack frame with being vertical.
2. according to the heating unit of the described vacuum apparatus of claim 1, it is characterized in that: this pedestal has a wall, reaches the perisporium that a horizontal expansion is arranged at this wall periphery, this support rack frame is placed in this pedestal and uprightly is fixed on this wall internal surface, and this tortuous shape heating element is placed in this pedestal.
3. according to the heating unit of the described vacuum apparatus of claim 2, it is characterized in that: also comprise a vertically slotting tightening latch that places this support rack frame that wears in drawable ground, this support rack frame has a upright bar that is fixedly arranged on the wall internal surface of this pedestal, a plurality of longitudinal intervals arrange be arranged at this upright bar away from the side of this wall and its opening towards the horizontal U type latch of this wall, and a plurality of and these a plurality of latches are staggered draw-in groove, this tortuous shape heating element is inserted to hang and is positioned in described a plurality of draw-in groove, and the drawable ground of this tightening latch is vertically gone here and there to plug and placed latch and draw-in groove.
4. according to the heating unit of the described vacuum apparatus of claim 3, it is characterized in that: this tightening latch has one can insert the perisporium of wearing this pedestal placing the straight-bar body in latch and the draw-in groove down, and one is arranged at this straight-bar body top and colludes scratching part on the outside surface that is butted on this perisporium.
5. according to the heating unit of each described vacuum apparatus of claim 1 to 4, it is characterized in that: also comprise a heat-conducting unit, this heat-conducting unit have a heat-conducting plate that can comprehensively cover this tortuous shape heating element, one be arranged at this heat-conducting plate in the face of on a lip-deep hook of this tortuous shape heating element and this surface that is arranged at this pedestal and its end face be arranged with the embedding hanging block of a slot, plant in the slot of this embedding hanging block separatably in an end of this hook.
6. according to the heating unit of the described vacuum apparatus of claim 5, it is characterized in that: the heat-conducting plate of this heat-conducting unit is a unrestrained plate.
7. according to the heating unit of the described vacuum apparatus of claim 6, it is characterized in that: this tortuous shape heating element is an electrothermal tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200018537U CN201158700Y (en) | 2008-01-17 | 2008-01-17 | Heating mechanism of vacuum plants |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200018537U CN201158700Y (en) | 2008-01-17 | 2008-01-17 | Heating mechanism of vacuum plants |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201158700Y true CN201158700Y (en) | 2008-12-03 |
Family
ID=40109292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200018537U Expired - Fee Related CN201158700Y (en) | 2008-01-17 | 2008-01-17 | Heating mechanism of vacuum plants |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201158700Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103080366A (en) * | 2011-06-29 | 2013-05-01 | 松下电器产业株式会社 | Heating apparatus, vacuum-heating method and method for manufacturing thin film |
| CN105200374A (en) * | 2015-10-31 | 2015-12-30 | 东莞市华星镀膜科技有限公司 | Optical evaporation coating equipment capable of preventing secondary sputtering pollution |
-
2008
- 2008-01-17 CN CNU2008200018537U patent/CN201158700Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103080366A (en) * | 2011-06-29 | 2013-05-01 | 松下电器产业株式会社 | Heating apparatus, vacuum-heating method and method for manufacturing thin film |
| CN103080366B (en) * | 2011-06-29 | 2014-12-24 | 松下电器产业株式会社 | Heating apparatus, vacuum-heating method and method for manufacturing thin film |
| KR101489099B1 (en) | 2011-06-29 | 2015-02-02 | 파나소닉 주식회사 | Heating apparatus, vacuum-heating method and method for manufacturing thin film |
| CN105200374A (en) * | 2015-10-31 | 2015-12-30 | 东莞市华星镀膜科技有限公司 | Optical evaporation coating equipment capable of preventing secondary sputtering pollution |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081203 Termination date: 20140117 |