CN201127394Y - Planetary gear type cleaner - Google Patents

Planetary gear type cleaner Download PDF

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Publication number
CN201127394Y
CN201127394Y CNU2007202017638U CN200720201763U CN201127394Y CN 201127394 Y CN201127394 Y CN 201127394Y CN U2007202017638 U CNU2007202017638 U CN U2007202017638U CN 200720201763 U CN200720201763 U CN 200720201763U CN 201127394 Y CN201127394 Y CN 201127394Y
Authority
CN
China
Prior art keywords
shaft
brush
gear
small
belt wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNU2007202017638U
Other languages
Chinese (zh)
Inventor
衣忠波
王欣
徐旭光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Semiconductor Equipment Institute
Original Assignee
Beijing Semiconductor Equipment Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Semiconductor Equipment Institute filed Critical Beijing Semiconductor Equipment Institute
Priority to CNU2007202017638U priority Critical patent/CN201127394Y/en
Application granted granted Critical
Publication of CN201127394Y publication Critical patent/CN201127394Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a planetary-gear-typed washing device, wherein, an output shaft of a motor is fixed on a small belt wheel; the small belt wheel is connected with a large belt wheel through a transmission belt; the large belt wheel is fixedly connected with the upper end of a large shaft; the middle part of the large shaft is connected with a shaft sleeve through two large-shaft bearings; the shaft sleeve is firmly connected with a large gear; the large gear is engaged with a small gear; the small gear is firmly connected with one end of a small shaft; the other end of the large shaft is fixed with one side of a pair bracket; the middle part of the small shaft is supported at the inner part of the other side of the pair bracket through two small-shaft bearings; the other end of the small shaft is firmly connected with a brush. The brush revolves along with the large shaft continuously under the driving of the small shaft; at the same time, the brush also rotates along with the axes of the small shaft continuously; the structure of the device is compact; the stress effect of the gear is good; the efficiency is high, thereby uniformly washing a plate-supporting platform.

Description

The planetary gear type cleaning device
(1) technical field
The utility model relates to a kind of cleaning device, particularly a kind of wafer-supporting platform cleaning device that is applied on the semiconductor equipment.
(2) background technology
In the semiconductor equipment at home and abroad, what the cleaning of wafer-supporting platform was mainly adopted is linear slider formula cleaning device and roller type cleaning device.The shortcoming of linear slider formula cleaning device is low to the efficient of the cleaning of wafer-supporting platform, and structure takes up room bigger; And the shortcoming of roller type cleaning device is that the wafer-supporting platform cleaning is inhomogeneous, especially can not well clean the shortcoming and the problem that work together and have nothing in common with each other for the centre of wafer-supporting platform.
(3) summary of the invention
The purpose of this utility model is to provide a kind of compact conformation, steady, the uniform rotary cleaning structure of cleaning of running for semiconductor equipment.
For achieving the above object, solution of the present utility model is:
This planetary gear type cleaning device, comprise the motor that is linked in sequence, transmission mechanism and brush, it is characterized in that: transmission mechanism is belt wheel and gear two-axle gear, the output shaft of motor 1 and small pulley 2 are fixing, small pulley 2 is connected by driving-belt 17 with big belt wheel 4, big belt wheel 4 is fixedlyed connected with the upper end of macro-axis 5, the middle part of macro-axis 5 is connected with axle sleeve 6 by two big axle bearings 14, axle sleeve 6 is fixedlyed connected with gear wheel 7, gear wheel 7 and pinion 8 engagements, pinion is fixedlyed connected with an end of little axle 9, one side of the other end of macro-axis 5 and a doubly-linked frame 10 is fixed together, the middle part of little axle 9 is supported on the opposite side inside of doubly-linked frame 10 by two little axle bearings 13, and the other end of little axle is fixedlyed connected with brush 11.
Optimized technical scheme: between above-mentioned big belt wheel 2 and the macro-axis 5 can by swelling overlap 3 or spline fixedly connected.
The middle part of above-mentioned axle sleeve 6 can be provided with boss, and this boss is connected with guard shield 18.
The other end of above-mentioned little axle can be fixedlyed connected with brush 11 with bolt by brush holder.
Big belt wheel in this structure adopts the swelling cover to be connected with macro-axis, and is simple in structure, centralized positioning precision height.All adopt the duplex bearing design between the macro-axis of rotation and little axle and the axle sleeve, improved the structure rotational stiffness.
Adopt the cleaning structure of planetary gear type, because gear-driven selecting for use makes structure compact more, volume is little, can make full use of the space, so physical dimension is very compact.The planetary gear bearing load that distributes in the while train, the centrifugal intertia force that the planetary gear revolution produces and the radial load of flank profil engagement place balance each other, and make force-bearing situation better, and noise is lower, and efficient is higher, cleans evenly.
The design that brush adopts not only rotation but also revolves round the sun, brush is just under the drive of little axle, constantly around macro-axis revolution, brush itself is also constantly around the axis rotation of little axle simultaneously, thereby mechanism can be cleaned uniformly to wafer-supporting platform or other planar object of semiconductor device-specific.
(4) description of drawings
Fig. 1 is an internal structure schematic diagram of the present utility model.
Fig. 2 is a brush work principle schematic.
Fig. 3 is a contour structures schematic diagram of the present utility model.
Reference numeral: 1-motor, 2-small pulley, 3-swelling cover, the big belt wheel of 4-, 5-macro-axis, 6-axle sleeve, 7-gear wheel, 8-pinion, the little axle of 9-, 10-doubly-linked frame, 11-brush, 12-wafer-supporting platform, the little axle bearing of 13-, the big axle bearing of 14-, 15-brush holder, 16-bolt, 17-driving-belt, 18-guard shield.
(5) specific embodiment
Embodiment such as Fig. 1, shown in 3, this planetary gear type cleaning device, comprise the motor that is linked in sequence, transmission mechanism and brush, it is characterized in that: transmission mechanism is belt wheel and gear two-axle gear, the output shaft of motor 1 and small pulley 2 are fixing, small pulley 2 is connected by driving-belt 17 with big belt wheel 4, big belt wheel 4 overlaps 3 with the upper end of macro-axis 5 by swelling fixedlys connected, the middle part of macro-axis 5 is connected with axle sleeve 6 by two big axle bearings 14, axle sleeve 6 is fixedlyed connected with gear wheel 7, gear wheel 7 and pinion 8 engagements, pinion is fixedlyed connected with an end of little axle 9, one side of the other end of macro-axis 5 and a doubly-linked frame 10 is fixed together, and the middle part of little axle 9 is supported on the opposite side inside of doubly-linked frame 10 by two little axle bearings 13, and the other end of little axle is fixedlyed connected with brush 11 with bolt by brush holder.The middle part of axle sleeve 6 can be provided with boss, and this boss is connected with guard shield 18.
The cleaning device of this novel planetary gear structure, mainly form by several parts such as motor, belt wheel, axle, gear, doubly-linked frame, brushes, small pulley 2 is fixed on the output axle head of servomotor 1, small pulley drives big belt wheel motion by belt, big belt wheel is connected with macro-axis by the swelling cover, and macro-axis and doubly-linked frame are fixed together, and little axle is fixed together with pinion and doubly-linked frame simultaneously, gear wheel and axle sleeve are fixed together, and and pinion.Drive big belt wheel 4 rotations by synchronous band transmission, macro-axis 5, doubly-linked frame 10 have just been realized the coaxial line rotation with big belt wheel 4, simultaneously little axle 9 is just under the drive of doubly-linked frame 10, axis around macro-axis 5 is rotated, at the same time, gear wheel 7 fixing on pinion of fixing on the little axle 98 and the axle sleeve 6 meshes, so brush 11 has just been realized spinning.
In the course of work, the output shaft rotating speed of servomotor is n 1, then small pulley is fixed on the output shaft, and rotating speed also is n 1Small pulley drives big belt wheel rotation by synchronous band transmission, and big belt wheel has obtained rotation speed n 2, the macro-axis, the doubly-linked frame that are fixed together with big belt wheel have also had rotation speed n 2, simultaneously, the doubly-linked frame drive little axle and brush around macro-axis with rotation speed n 2Rotation, at this moment, little axle is gone up gear wheel fixing on fixing pinion and the axle sleeve and is meshed, and is n thereby make little axle self produce rotating speed 2Spinning.
By shown in Figure 2, the size of brush 11 surpasses the radius of wafer-supporting platform 12, and brush is just under the drive of little axle, with rotation speed n 2Rotate around macro-axis, brush itself is also constantly with rotation speed n simultaneously 3Axis rotation around little axle.So in the process of cleaning, brush is with rotation speed n 2When wafer-supporting platform was cleaned, in the centre of wafer-supporting platform, the linear velocity of brush was lower, but because the size of brush surpasses the wafer-supporting platform radius, this moment, brush still had a certain size linear velocity, and brush is with rotation speed n 3Spinning can produce bigger linear velocity, can remedy brush preferably with rotation speed n 2Produce the less deficiency of linear velocity, thereby can well clean the centre of wafer-supporting platform.

Claims (4)

1. planetary gear type cleaning device, comprise the motor that is linked in sequence, transmission mechanism and brush, it is characterized in that: transmission mechanism is belt wheel and gear two-axle gear, the output shaft of motor (1) and small pulley (2) are fixing, small pulley (2) is connected by driving-belt (17) with big belt wheel (4), big belt wheel (4) is fixedlyed connected with the upper end of macro-axis (5), the middle part of macro-axis (5) is connected with axle sleeve (6) by two big axle bearings (14), axle sleeve (6) is fixedlyed connected with gear wheel (7), gear wheel (7) and pinion (8) engagement, pinion is fixedlyed connected with an end of little axle (9), one side of the other end of macro-axis (5) and a doubly-linked frame (10) is fixed together, the middle part of little axle (9) is supported on the opposite side inside of doubly-linked frame (10) by two little axle bearings (13), and the other end of little axle is fixedlyed connected with brush (11).
2. planetary gear type cleaning device according to claim 1 is characterized in that: fixedlyed connected by swelling cover (3) or spline between above-mentioned big belt wheel (2) and the macro-axis (5).
3. planetary gear type cleaning device according to claim 1 and 2 is characterized in that: there is boss at the middle part of above-mentioned axle sleeve (6), and this boss is connected with guard shield (18).
4. want 1 or 2 described planetary gear type cleaning devices according to right, it is characterized in that: the other end of above-mentioned little axle is fixedlyed connected with brush (11) with bolt by brush holder.
CNU2007202017638U 2007-12-25 2007-12-25 Planetary gear type cleaner Expired - Fee Related CN201127394Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2007202017638U CN201127394Y (en) 2007-12-25 2007-12-25 Planetary gear type cleaner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2007202017638U CN201127394Y (en) 2007-12-25 2007-12-25 Planetary gear type cleaner

Publications (1)

Publication Number Publication Date
CN201127394Y true CN201127394Y (en) 2008-10-08

Family

ID=40015222

Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2007202017638U Expired - Fee Related CN201127394Y (en) 2007-12-25 2007-12-25 Planetary gear type cleaner

Country Status (1)

Country Link
CN (1) CN201127394Y (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103053238A (en) * 2012-12-06 2013-04-24 浙江乐客来机械有限公司 Over-torsion protection farm implement transmission mechanism
CN108338494A (en) * 2017-12-28 2018-07-31 南京康翱峰自动化科技有限公司 Electric roller brush device that is a kind of anti-skidding and being conveniently replaceable brush head
CN108724011A (en) * 2018-05-03 2018-11-02 芜湖凯德机械制造有限公司 A kind of meter of literal automatic cleaning apparatus of word part rice
CN108856001A (en) * 2018-05-03 2018-11-23 芜湖凯德机械制造有限公司 A kind of literal automatic cleaning machine of cross part ten

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103053238A (en) * 2012-12-06 2013-04-24 浙江乐客来机械有限公司 Over-torsion protection farm implement transmission mechanism
CN103053238B (en) * 2012-12-06 2015-06-03 浙江乐客来机械有限公司 Over-torsion protection farm implement transmission mechanism
CN108338494A (en) * 2017-12-28 2018-07-31 南京康翱峰自动化科技有限公司 Electric roller brush device that is a kind of anti-skidding and being conveniently replaceable brush head
CN108724011A (en) * 2018-05-03 2018-11-02 芜湖凯德机械制造有限公司 A kind of meter of literal automatic cleaning apparatus of word part rice
CN108856001A (en) * 2018-05-03 2018-11-23 芜湖凯德机械制造有限公司 A kind of literal automatic cleaning machine of cross part ten

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20081008

Termination date: 20131225