CN201107545Y - Elevating decelerator of LCD exposure machine adsorption platform - Google Patents
Elevating decelerator of LCD exposure machine adsorption platform Download PDFInfo
- Publication number
- CN201107545Y CN201107545Y CNU2007200597821U CN200720059782U CN201107545Y CN 201107545 Y CN201107545 Y CN 201107545Y CN U2007200597821 U CNU2007200597821 U CN U2007200597821U CN 200720059782 U CN200720059782 U CN 200720059782U CN 201107545 Y CN201107545 Y CN 201107545Y
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- Prior art keywords
- base plate
- cylinder
- bearing plate
- decelerator
- absorption
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses an absorption platform lifting decelerator for an LCD photo exposure machine which includes an absorption platform; a photomask glass is arranged on the absorption platform and a fixing bottom plate is arranged below the absorption platform. The utility model is characterized in that the decelerator also includes a cylinder base plate arranged below the fixing base plate; the fixing base plate is connected with the cylinder base plate through a plurality of shafts; a bearing bottom plate is arranged between the fixing base plate and the cylinder base plate; the bearing base plate is sleeved on the shafts; the bearing base plate is connected with the absorption platform through a connector; the cylinder base plate is fixedly provided with a balancing bounce cylinder and a lifting cylinder; the bearing base plate is actively connected with a pullback flange; the pullback flange is tightly matched with a piston rod of the lifting cylinder; the end of a balancing piston rod of the balancing bounce cylinder matched with the bearing base plate is provided with a spring; the spring and the bearing base plate are tightly matched; The decelerator has the advantages of simple structure, long service life and good exposal effect as adopting the structure.
Description
Technical field
The utility model relates to the exposure machine field, more particularly, relates to a kind of exposure machine absorption lifting platform decelerator.
Background technology
At present, traditional exposure machine in the course of the work, its absorption platform with the light shield glass contact after make light shield glass produce distortion easily, therefore can influence the exposure quality.How to address the above problem, become problem demanding prompt solution.
The utility model content
The utility model is to provide a kind of LCD exposure machine simple in structure, that exposure effect is good to adsorb the lifting platform decelerator.
For achieving the above object, the utility model has adopted following technical scheme:
A kind of LCD exposure machine absorption lifting platform decelerator, comprise the absorption platform, one light shield glass is arranged above described absorption platform, below described absorption platform, a fixed base plate is arranged, it is characterized in that: also comprise the cylinder seat board that is positioned at the fixed base plate below, this fixed base plate is connected with described cylinder seat board by a plurality of axles, between described fixed base plate and cylinder seat board, be provided with a bearing plate, this bearing plate is to be set on the described axle, this bearing plate is connected with described absorption platform by a connection piece, on described cylinder seat board, be fixed with equalizing and buffering cylinder and lift cylinder, described bearing plate and one retracts flange and flexibly connects, this retracts the piston rod close-fitting of flange and lift cylinder, and the end that the balance piston bar of described equalizing and buffering cylinder cooperates with bearing plate is provided with spring, this spring and described bearing plate close-fitting.
Described equalizing and buffering cylinder is connected with an exhaust box.
Described equalizing and buffering cylinder and lift cylinder all are provided with solenoid valve.
The utility model is owing to adopted said structure, between fixed base plate and cylinder seat board, be provided with a bearing plate, bearing plate is set on the axle, bearing plate is connected with the absorption platform by a connection piece, on the cylinder seat board, be fixed with equalizing and buffering cylinder and lift cylinder, bearing plate and one retracts flange and flexibly connects, retract the piston rod close-fitting of flange and lift cylinder, the end that the balance piston bar of equalizing and buffering cylinder cooperates with bearing plate is provided with spring, spring and described bearing plate close-fitting, so compare with conventional art, the utility model is by adopting the equalizing and buffering cylinder, the rising and the decline of lift cylinder and spring control absorption platform, the absorption platform is closely contacted with light shield glass, can prevent that again glass from deforming, so the utility model long service life, exposure effect is good; In addition, the utility model is simple in structure.
Description of drawings
Below in conjunction with accompanying drawing embodiment of the present utility model is described in further detail.
The structural representation of a kind of LCD exposure machine absorption of the utility model that Fig. 1 is lifting platform decelerator.
Embodiment
As shown in Figure 1, it is a structural representation of the present utility model.A kind of LCD exposure machine absorption lifting platform decelerator comprises absorption platform 2, and a light shield glass 1 is arranged above described absorption platform 2, and a fixed base plate 3 is arranged below described absorption platform 2.In the technical program, the utility model also comprises the cylinder seat board 5 that is positioned at fixed base plate 3 belows, this fixed base plate 3 is connected with described cylinder seat board 5 by a plurality of 11, between described fixed base plate 3 and cylinder seat board 5, be provided with a bearing plate 4, this bearing plate 4 is to be set on the described axle 11, therefore bearing plate 4 can be along axle 11 oscilaltion between fixed base plate 3 and cylinder seat board 5, be connected with described absorption platform 2 by a connection piece 12 at this bearing plate 4, on described cylinder seat board 5, be fixed with equalizing and buffering cylinder 6 and lift cylinder 8, described bearing plate 4 and one retracts flange 9 and flexibly connects, this retracts piston rod 81 close-fittings of flange 9 and lift cylinder 8, the end that the balance piston bar 61 of described equalizing and buffering cylinder 6 cooperates with bearing plate 4 is provided with spring 7, this spring 7 and described bearing plate 4 close-fittings.Described equalizing and buffering cylinder 6 is connected with an exhaust box 10, and exhaust box 10 is used for eliminating the noise that the equalizing and buffering cylinder operation produces.Equalizing and buffering cylinder 6 and lift cylinder 8 all are provided with solenoid valve 13, control the work of equalizing and buffering cylinder 6 and lift cylinder 8 by solenoid valve 13.
When the utility model uses, make lift cylinder 8 work by control electromagnetic valve 13 effects, make bearing plate 4 to rising this moment under the mating reaction that retracts flange 9 and piston rod 81, because bearing plate 4 links together with absorption platform 2, therefore adsorb platform 2 beginnings to rising, absorption platform 4 near light shield glass 1 the time, 6 work of equalizing and buffering cylinder, at this moment, equalizing and buffering cylinder 6 is by the buffer action of spring 7, absorption platform 4 is fitted tightly with light shield glass 1, prevented the distortion of light shield glass 1, best, the utility model passes through the effect of lift cylinder 8 again, absorption platform 2 is descended, leave light shield glass 1.
In a word,, should illustrate that obviously those skilled in the art can carry out various variations and remodeling though the utility model has exemplified above-mentioned preferred implementation.Therefore, unless such variation and remodeling have departed from scope of the present utility model, otherwise all should be included within the protection domain of the present utility model.
Claims (3)
1, a kind of LCD exposure machine absorption lifting platform decelerator, comprise absorption platform (2), in described absorption platform (2) top one light shield glass (1) is arranged, in described absorption platform (2) below one fixed base plate (3) is arranged, it is characterized in that: also comprise the cylinder seat board (5) that is positioned at fixed base plate (3) below, this fixed base plate (3) is connected with described cylinder seat board (5) by a plurality of axles (11), between described fixed base plate (3) and cylinder seat board (5), be provided with a bearing plate (4), this bearing plate (4) is to be set on the described axle (11), this bearing plate (4) is connected with described absorption platform (2) by a connection piece (12), on described cylinder seat board (5), be fixed with equalizing and buffering cylinder (6) and lift cylinder (8), described bearing plate (4) and one retracts flange (9) and flexibly connects, this retracts piston rod (81) close-fitting of flange (9) and lift cylinder (8), the end that the balance piston bar (61) of described equalizing and buffering cylinder (6) cooperates with bearing plate (4) is provided with spring (7), this spring (7) and described bearing plate (4) close-fitting.
2, absorption lifting platform decelerator according to claim 1 is characterized in that: described equalizing and buffering cylinder (6) is connected with an exhaust box (10).
3, absorption lifting platform decelerator according to claim 1 is characterized in that: described equalizing and buffering cylinder (6) and lift cylinder (8) all are provided with solenoid valve (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200597821U CN201107545Y (en) | 2007-11-20 | 2007-11-20 | Elevating decelerator of LCD exposure machine adsorption platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200597821U CN201107545Y (en) | 2007-11-20 | 2007-11-20 | Elevating decelerator of LCD exposure machine adsorption platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201107545Y true CN201107545Y (en) | 2008-08-27 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200597821U Expired - Fee Related CN201107545Y (en) | 2007-11-20 | 2007-11-20 | Elevating decelerator of LCD exposure machine adsorption platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201107545Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106564665A (en) * | 2016-10-19 | 2017-04-19 | 佛山市翠微自动化科技有限公司 | Packaging-box-bottom-lifting screw type knock-printing mechanism |
| CN106564655A (en) * | 2016-10-19 | 2017-04-19 | 佛山市翠微自动化科技有限公司 | Automatic conveying, lifting and knock-printing mechanism for packing boxes |
| CN106933045A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | A kind of auxiliary support apparatus and the photoetching machine equipment with Auxiliary support |
| CN107121896A (en) * | 2017-07-06 | 2017-09-01 | 京东方科技集团股份有限公司 | Expose base station and exposure sources |
-
2007
- 2007-11-20 CN CNU2007200597821U patent/CN201107545Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106933045A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | A kind of auxiliary support apparatus and the photoetching machine equipment with Auxiliary support |
| CN106933045B (en) * | 2015-12-30 | 2019-06-25 | 上海微电子装备（集团）股份有限公司 | A kind of auxiliary support apparatus and the photoetching machine equipment with Auxiliary support |
| CN106564665A (en) * | 2016-10-19 | 2017-04-19 | 佛山市翠微自动化科技有限公司 | Packaging-box-bottom-lifting screw type knock-printing mechanism |
| CN106564655A (en) * | 2016-10-19 | 2017-04-19 | 佛山市翠微自动化科技有限公司 | Automatic conveying, lifting and knock-printing mechanism for packing boxes |
| CN106564655B (en) * | 2016-10-19 | 2019-10-25 | 湖北银河彩印包装有限公司 | A kind of automatic conveying hoisting of packing case strikes printing mechanism |
| CN106564665B (en) * | 2016-10-19 | 2020-06-09 | 南通市多乾新材料科技有限公司 | Packing box bottom promotes screw mechanism of knocking print |
| CN107121896A (en) * | 2017-07-06 | 2017-09-01 | 京东方科技集团股份有限公司 | Expose base station and exposure sources |
| CN107121896B (en) * | 2017-07-06 | 2018-10-30 | 京东方科技集团股份有限公司 | Expose base station and exposure sources |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |