CN201106985Y - Exhaust air pipeline of alloy baking apparatus - Google Patents

Exhaust air pipeline of alloy baking apparatus Download PDF

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Publication number
CN201106985Y
CN201106985Y CNU2007200726818U CN200720072681U CN201106985Y CN 201106985 Y CN201106985 Y CN 201106985Y CN U2007200726818 U CNU2007200726818 U CN U2007200726818U CN 200720072681 U CN200720072681 U CN 200720072681U CN 201106985 Y CN201106985 Y CN 201106985Y
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CN
China
Prior art keywords
air draft
draft pipeline
line
baking device
alloy baking
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Expired - Lifetime
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CNU2007200726818U
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Chinese (zh)
Inventor
武颖
赵亮
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Semiconductor Manufacturing International Beijing Corp
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Semiconductor Manufacturing International Shanghai Corp
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Priority to CNU2007200726818U priority Critical patent/CN201106985Y/en
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Abstract

The utility model provides an air exhaust pipeline for an alloy baking device, and the air exhaust pipeline is used to connect a main air exhaust pipeline with the alloy baking device; the line formed at the center of the cross section of the air exhaust pipeline is composed of at least a line section, or at least an arc line, or the line section and the arc line; the angle formed between the two adjacent line sections, or the two adjacent arc lines, or the adjacent line section and the contact part of the arc line is an obtuse angle. As the air exhaust pipeline adopts a soft pipeline as the manufacturing material, the rebound force of the air flow after bumping into the inner wall of the pipeline has a greater drop than that of the hard pipeline; at the same time, an arc-shaped pipeline is adopted when the air flow turns, thereby avoiding the high pressure air flow to directly turn for 90 DEG, thus, an alarm can be prevented from happening, and the baking can be continuously carried out.

Description

A kind of air draft pipeline of alloy baking device
Technical field
The utility model belongs to the chip manufacturing apparatus field, relates to a kind of air draft pipeline, relates in particular to a kind of air draft pipeline of alloy baking device.
Background technology
The structure of the air draft pipeline of existing alloy baking device as shown in Figure 1, air draft pipeline 1 ' roughly is zigzag, is used to connect main exhaust duct 2 ' and alloy baking device 3 '.Alloy baking device 3 ' is made in low atmospheric pressure work based on it, and when alloy baking device 3 ' is worked under normal pressure, and the air-flow of per minute process is when surpassing 15 liters, and reporting to the police appears in the warning system of alloy baking device 3 ' easily.
Warning reason is as follows: because air draft pipeline 1 ' has two turnings 11 ', 12 ', and turning 11 ', 12 ' is 90 degree, and the air-flow in the air draft pipeline 1 ' can produce very big impulse force with doing 90 degree when turning to; Meanwhile, air draft pipeline 1 ' is made for the material of hard, and bounce was bigger after high pressure draught was run into the inwall of air draft pipeline 1 '.Based on above reason, the stream pressure in the air draft pipeline 1 ' increases, and has a strong impact on its air draft ability, thereby causes alloy baking device 3 ' internal pressure to increase, and triggers pressure and continues to report to the police.
The utility model content
The purpose of this utility model provides a kind of air draft pipeline that can avoid the improper warning of alloy baking device.
To achieve these goals, the utility model provides a kind of air draft pipeline of alloy baking device, in order to connect main exhaust duct and described alloy baking device; The line that cross-section center point became of described air draft pipeline is made up of end to end at least one line segment or at least one camber line or line segment and camber line; In described line segment or the camber line, the angle that the contact site branch of adjacent two line segments or adjacent two camber lines or adjacent line segment and camber line becomes in obtuse angle.
As a kind of preferred version of the present utility model, the material of described air draft pipeline is a soft material.
As a kind of preferred version of the present utility model, the line that cross-section center point became of described air draft pipeline is a camber line, and described air draft pipeline probably is camber line shape.
As a kind of preferred version of the present utility model, the line that cross-section center point became of described air draft pipeline is connected to form from beginning to end by some camber lines, and the angle that the contact site branch of two adjacent camber lines becomes in obtuse angle.
As a kind of preferred version of the present utility model, described exhaust duct route two arc pipelines are formed, S-type or C type.
As a kind of preferred version of the present utility model, described air draft pipeline is a straight tube, directly connects described main exhaust duct and described alloy baking device by this straight tube.
As a kind of preferred version of the present utility model, the line that cross-section center point became of described air draft pipeline is connected to form from beginning to end by some line segments, and the angle of two adjacent lines Duan Suocheng in obtuse angle.
As a kind of preferred version of the present utility model, 3 straight tubes of described exhaust duct route are formed, wherein two straight tubes connect described main exhaust duct and alloy baking device respectively, and the head and the tail of the 3rd straight tube connect above-mentioned two straight tubes respectively, with the angle of above-mentioned two straight tubes be 135 degree.
As a kind of preferred version of the present utility model, the line that cross-section center point became of described air draft pipeline is connected to form from beginning to end by at least one line segment and at least one camber line, and the angle that the contact site branch of adjacent line segment and camber line becomes in obtuse angle.
As a kind of preferred version of the present utility model, described air draft pipeline comprises two circular arc type pipes and a straight tube, and described two circular arc type pipes connect described main exhaust duct and alloy baking device respectively, and the head and the tail of described straight tube connect above-mentioned two circular arc type pipes respectively.
Compared with prior art, the air draft pipeline of the alloy baking device that the utility model discloses is selected soft pipeline because it makes material, and the elastic force that air-flow rebounds behind the collision pipeline inner wall has by a relatively large margin during than the hard pipeline and reduces; Simultaneously, the air draft pipeline adopts the arc pipeline, has avoided direct 90 degree of high pressure draught to turn, thereby can avoid the generation of reporting to the police, and baking work is proceeded.
Description of drawings
Fig. 1 is the structural representation of the air draft pipeline of existing alloy baking device;
Fig. 2 is the structural representation of the air draft pipeline of alloy baking device among the embodiment one;
Fig. 3 and Fig. 4 are the structural representations of the air draft pipeline of alloy baking device among the embodiment two;
Fig. 5 is the structural representation of the air draft pipeline of alloy baking device among the embodiment three;
Fig. 6 is the structural representation of the air draft pipeline of alloy baking device among the embodiment four;
Fig. 7 is the structural representation of the air draft pipeline of alloy baking device among the embodiment five;
The specific embodiment
Below in conjunction with drawings and Examples the utility model is elaborated.
Embodiment one
Please participate in Fig. 2, the utility model has disclosed a kind of air draft pipeline of alloy baking device, in order to connect main exhaust duct 3 and described alloy baking device 2.The line that cross-section center point became of described air draft pipeline 1 is made up of end to end at least one line segment or at least one camber line or line segment and camber line; In described line segment or the camber line, the angle that the contact site branch of adjacent two line segments or adjacent two camber lines or adjacent line segment and camber line becomes in obtuse angle.
In the present embodiment, the line that cross-section center point became 4 of described air draft pipeline 1 is a camber line, and described air draft pipeline 1 probably is camber line shape.The material of air draft pipeline 1 is a soft material.
Wherein, alloy baking device 2 can be the alloy baking device of TEL company manufacturing.
Because the making material of air draft pipeline 1 is selected soft pipeline, the elastic force that air-flow rebounds behind the collision pipeline inner wall has by a relatively large margin during than the hard pipeline and reduces; Simultaneously, when air-flow is turned, adopt the arc pipeline, avoided direct 90 degree of high pressure draught to turn, can avoid the generation of reporting to the police, alloy/baking work is proceeded.
Embodiment two
As shown in Figure 3, the difference of present embodiment and embodiment one is that in the present embodiment, the line that cross-section center point became 4 of air draft pipeline 1 is connected to form from beginning to end by some camber lines, and the angle that the contact site branch of two adjacent camber lines becomes in obtuse angle.In the present embodiment, the line that cross-section center point became 4 of air draft pipeline 1 is made up of the camber line that two head and the tail connect; And air draft pipeline 1 is made up of two arc pipelines 121,122, and is S-type.The material of air draft pipeline 1 is similarly soft material.
Fig. 4 has disclosed the structure chart of the another kind of embodiment of present embodiment, and as shown in the figure, air draft pipeline 12 roughly is the C type.
Embodiment three
As shown in Figure 5, the difference of present embodiment and embodiment one is that in the present embodiment, air draft pipeline 1 is a straight tube, directly connects described main exhaust duct 3 and described alloy baking device 2 by this straight tube; And because main exhaust duct 3 and alloy baking device 2 have the certain height difference, make air draft pipeline 1 with described main exhaust duct 3, reach 2 one-tenth obtuse angles of described alloy baking device.The material of air draft pipeline 1 is similarly soft material.Adopt this mode to avoid direct 90 degree of air draft pipeline to turn equally, thereby avoid the generation of reporting to the police.
Embodiment four
As shown in Figure 6, the difference of present embodiment and embodiment one is that in the present embodiment, the line that cross-section center point became of air draft pipeline 1 is connected to form from beginning to end by some line segments, and the angle of two adjacent lines Duan Suocheng in obtuse angle.
A kind of preferred version as embodiment, described air draft pipeline 1 is made up of three straight tubes 141,142,143, wherein two straight tubes 141,142 connect described main exhaust duct 3 and alloy baking device 2 respectively, article three, the head and the tail of straight tube 143 connect above-mentioned two straight tubes 141,142 respectively, are 135 degree with the angle of above-mentioned two straight tubes 141,142.
Embodiment five
As shown in Figure 7, the difference of present embodiment and embodiment one is, in the present embodiment, the line that cross-section center point became of described air draft pipeline 1 is connected to form from beginning to end by at least one line segment and at least one camber line, and the angle that the contact site branch of adjacent line segment and camber line becomes in obtuse angle.
A kind of preferred version as present embodiment, described air draft pipeline 1 comprises two circular arc type pipes 151,152 and a straight tube 153, described two circular arc type pipes 151,152 connect described main exhaust duct 3 and alloy baking device 2 respectively, and the head and the tail of described straight tube 153 connect above-mentioned two circular arc type pipes 151,152 respectively.
Above embodiment is the unrestricted the technical solution of the utility model in order to explanation only.As, the air draft pipeline can not adopt soft material to make.In addition, the structure of air draft pipeline also is not limited to above-mentioned concrete enforcement side

Claims (10)

1. the air draft pipeline of an alloy baking device is in order to connect main exhaust duct and described alloy baking device; It is characterized in that:
The line that cross-section center point became of described air draft pipeline is made up of end to end at least one line segment or at least one camber line or line segment and camber line;
In described line segment or the camber line, the angle that the contact site branch of adjacent two line segments or adjacent two camber lines or adjacent line segment and camber line becomes in obtuse angle.
2. the air draft pipeline of alloy baking device according to claim 1 is characterized in that the material of described air draft pipeline is a soft material.
3. the air draft pipeline of alloy baking device as claimed in claim 1 or 2 is characterized in that the line that cross-section center point became of described air draft pipeline is a camber line, and described air draft pipeline probably is camber line shape.
4. the air draft pipeline of alloy baking device as claimed in claim 1 or 2 is characterized in that the line that cross-section center point became of described air draft pipeline is connected to form from beginning to end by some camber lines, and the angle that the contact site branch of two adjacent camber lines becomes in obtuse angle.
5. as the air draft pipeline of alloy baking device as described in the claim 4, it is characterized in that described exhaust duct route two arc pipelines are formed, S-type or C type.
6. the air draft pipeline of alloy baking device as claimed in claim 1 or 2 is characterized in that described air draft pipeline is a straight tube, directly connects described main exhaust duct and described baking alloy/roasting board by this straight tube.
7. the air draft pipeline of alloy baking device as claimed in claim 1 or 2 is characterized in that the line that cross-section center point became of described air draft pipeline is connected to form from beginning to end by some line segments, and the angle of two adjacent lines Duan Suocheng in obtuse angle.
8. as the air draft pipeline of alloy baking device as described in the claim 7, it is characterized in that, 3 straight tubes of described exhaust duct route are formed, wherein two straight tubes connect described main exhaust duct and alloy baking device respectively, article three, the head and the tail of straight tube connect above-mentioned two straight tubes respectively, with the angle of above-mentioned two straight tubes be 135 degree.
9. the air draft pipeline of alloy baking device as claimed in claim 1 or 2, it is characterized in that, the line that cross-section center point became of described air draft pipeline is connected to form from beginning to end by at least one line segment and at least one camber line, and the angle that the contact site branch of adjacent line segment and camber line becomes in obtuse angle.
10. as the air draft pipeline of alloy baking device as described in the claim 9, it is characterized in that, described air draft pipeline comprises two circular arc type pipes and a straight tube, described two circular arc type pipes connect described main exhaust duct and alloy baking device respectively, and the head and the tail of described straight tube connect above-mentioned two circular arc type pipes respectively.
CNU2007200726818U 2007-07-20 2007-07-20 Exhaust air pipeline of alloy baking apparatus Expired - Lifetime CN201106985Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2007200726818U CN201106985Y (en) 2007-07-20 2007-07-20 Exhaust air pipeline of alloy baking apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2007200726818U CN201106985Y (en) 2007-07-20 2007-07-20 Exhaust air pipeline of alloy baking apparatus

Publications (1)

Publication Number Publication Date
CN201106985Y true CN201106985Y (en) 2008-08-27

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CNU2007200726818U Expired - Lifetime CN201106985Y (en) 2007-07-20 2007-07-20 Exhaust air pipeline of alloy baking apparatus

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102564103A (en) * 2012-01-18 2012-07-11 新乡市鼎鑫机械有限公司 Novel exhaust system
CN102641833A (en) * 2012-04-27 2012-08-22 昆山威茂电子科技有限公司 Improved structure of air hose of drying furnace

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102564103A (en) * 2012-01-18 2012-07-11 新乡市鼎鑫机械有限公司 Novel exhaust system
CN102564103B (en) * 2012-01-18 2015-11-04 新乡市鼎鑫机械有限公司 Novel exhaust system
CN102641833A (en) * 2012-04-27 2012-08-22 昆山威茂电子科技有限公司 Improved structure of air hose of drying furnace

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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING

Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION

Effective date: 20130204

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Effective date of registration: 20130204

Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone

Patentee after: Semiconductor Manufacturing International (Beijing) Corporation

Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18

Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation

CX01 Expiry of patent term

Granted publication date: 20080827

CX01 Expiry of patent term