CN201087841Y - Testing clamp seat with airtight seal ring, its sorting machine and test machine - Google Patents

Testing clamp seat with airtight seal ring, its sorting machine and test machine Download PDF

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Publication number
CN201087841Y
CN201087841Y CNU200720175316XU CN200720175316U CN201087841Y CN 201087841 Y CN201087841 Y CN 201087841Y CN U200720175316X U CNU200720175316X U CN U200720175316XU CN 200720175316 U CN200720175316 U CN 200720175316U CN 201087841 Y CN201087841 Y CN 201087841Y
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CN
China
Prior art keywords
test
holder
vacuum
protuberance
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNU200720175316XU
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Chinese (zh)
Inventor
温进光
郑虹余
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King Yuan Electronics Co Ltd
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King Yuan Electronics Co Ltd
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Application filed by King Yuan Electronics Co Ltd filed Critical King Yuan Electronics Co Ltd
Priority to CNU200720175316XU priority Critical patent/CN201087841Y/en
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Publication of CN201087841Y publication Critical patent/CN201087841Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a test holder provided with a gas ring, a sorter and a test machine, in particular relates to a test holder a sorter and a test machine which are used for testing an integrated circuit component. The test holder comprises a holder body, a lug which is arranged in the middle part of the holder body, and is provided with a plurality of test probes and at least one vacuum via holes, a floating cover plate which is coveredly arranged on the lug, and is provided with at least one perforative vacuum suction holes which are relative to the lug and a plurality of probe holes which permit that the test probes of the lug penetrate the probe holes for being communicated with a pin of the integrated circuit component to be tested, the gas ring and a locking component which limits the floating cover plate in the holder body, wherein, the gas ring is arranged at the outer side of the vacuum suction holes which are arranged between the lug and the floating cover plate. The upper half part of a cross section of the gas ring can be bended, and the width of the upper half part is smaller than the width of the lower half part. A transition part is formed between the upper half part and the lower half part.

Description

Test holder, its classifier and test machine thereof with gas-tight ring
Technical field
The utility model relates to a kind of test holder, classifier with gas-tight ring, with test machine, is meant a kind of test holder, classifier with gas-tight ring with increase absorption integrated circuit package especially, with test machine.
Background technology
Test clip holder structure with gas-tight ring is applied to existing many decades of industrial community, the test clip holder structure of prior art as shown in Figure 1, the test holder 10 that gas-tight ring is arranged is used for the integrated circuit package test, comprises holder body 11, test probe 12, floating cover 13 and O shape ring 14.Holder body 11 is mainly used in provides the connection of test suite main framework.Wear floating cover 13 to be communicated with the pin of an integrated circuit package to be measured via test probe 12, carry out the functional test of this to-be-measured integrated circuit assembly, whether function is normal to confirm integrated circuit package to be measured, with the reparation of carrying out the shipment front assembly and the assessment of shipment yield.By Fig. 1, O shape ring 14 is a gas-tight ring, mainly provides appropriate air tightness to adsorb integrated circuit package to be measured for this test holder 10.No. the 5101149th, the United States Patent (USP) of prior art, No. the 6104204th, United States Patent (USP), No. the 6313653rd, United States Patent (USP), No. the 20020011863rd, the open case of the U.S., No. the 20050056102nd, the open case of the U.S., and the open case of the U.S. all discloses for No. 20040077200 and the relevant basic structure of test holder.
O shape is encircled 14 structures, and generally to be the material relevant with rubber made, and its characteristic is able to elastic deformation when being stressed, and therefore the gap of floating cover 13 and holder body 11 in the salable test holder reaches airtight effect.Yet the shortcoming of elastomeric material is easily aging, after long-time the use, can lack flexibility to reply the ability of original shape, causes testing the air tightness of floating cover 13 and holder body 11 in the holder so influenced, and then loses its tight function.Tester table is changed this gas-tight ring except cost consideration, gently then influences testing progress slightly, also need vacuumize test because of having changed gas-tight ring; Heavy then influence testing producing lines shipment progress, because of having changed gas-tight ring, vacuum tightness can't satisfy test request.Provide appropriate air tightness to test the use of holder yet see through gas-tight ring, for indispensable in the semiconductor automated test device for this.So the gas-tight ring that how to provide a kind of air tightness can keep or reduce the burn-in effects factor is the urgent problem for industrial community.
The utility model content
Fundamental purpose of the present utility model is to provide a kind of test holder with gas-tight ring, can make when carrying out the integrated circuit package test, provides preferable impermeability to be connected compared to the traditional test holder and the connection status of chip to be measured.
In order to solve aforesaid problem, the utility model provides a kind of test holder with gas-tight ring, is used for the integrated circuit package test.
This gas-tight ring architectural feature of the present utility model is the protuberance and the outside, the suction of the vacuum between floating cover hole that it is arranged at the holder body, the first half of its xsect is a deflection, and width is less than the width of its Lower Half, and forms a V-arrangement turning point between this first half and Lower Half.Because of the first half of gas-tight ring because of deflection own, make this gas-tight ring gap of floating cover and holder body in the test holder of can more fitting, and reach better airtight effect.By this, the test holder that makes this kind have the more traditional O shape of the test holder gas-tight ring of V-arrangement gas-tight ring has more good air-tightness, and makes that the test operation performance of tester table is better.
Secondary objective of the present utility model is to provide a kind of classifier with test holder, and can make provides preferable impermeability to be connected compared to the traditional test holder and the connection status of chip to be measured when integrated circuit package is tested.
A purpose more of the present utility model is to provide a kind of test machine, and can make provides preferable impermeability to be connected compared to the traditional test holder and the connection status of chip to be measured when integrated circuit package is tested.
In view of the above, a kind of test holder with gas-tight ring is used for the integrated circuit package test, comprises: a holder body; One protuberance is arranged at the central part of this holder body, has a plurality of test probes and at least one vacuum through hole; One floating cover, be covered on this protuberance, have at least one vacuum that runs through and inhale hole and a plurality of probe aperture, wherein to inhale the hole be the vacuum through hole of corresponding protuberance to vacuum, and these probe aperture to be these test probes of allowing this protuberance penetrate to be communicated with the pin of an integrated circuit package to be measured; One gas-tight ring; And a lock-in component, this floating cover is limited to this holder body; It is characterized in that the vacuum that this gas-tight ring is arranged between this protuberance and the floating cover inhales the outside, hole, the first half of its xsect is a deflection, and width is less than the width of its Lower Half, and forms a turning point between this first half and Lower Half.
Then, the present invention provides a kind of classifier with test holder again, be used for the integrated circuit package test, consist predominantly of a vacuum line, a mobile platform and be clamped on this mobile platform at least one the test holder, can make this test holder draw an integrated circuit package via this vacuum line and test, it is characterized in that this test holder comprises: a holder body; One protuberance is arranged at the central part of this holder body, has a plurality of test probes and at least one vacuum through hole; One floating cover, be covered on this protuberance, have at least one vacuum that runs through and inhale hole and probe aperture, wherein to inhale the hole be the vacuum through hole of corresponding protuberance to vacuum, and probe aperture to be these test probes of allowing this protuberance penetrate to be communicated with the pin of an integrated circuit package to be measured; One gas-tight ring; And a lock-in component, this floating cover is limited to this holder body; Wherein, the vacuum that this gas-tight ring is arranged between this protuberance and the floating cover is inhaled the outside, hole, and the first half of its xsect is a deflection, and width is less than the width of its Lower Half, and is to form a turning point between this first half and the Lower Half.
Then, the present invention provides a kind of test machine again, consist predominantly of a classifier and a test board, this classifier comprises a vacuum line, a mobile platform at least and is clamped at least one test holder of this mobile platform, can make this test holder draw an integrated circuit package to this test board via this vacuum line tests, it is characterized in that this test holder comprises: a holder body; One protuberance is arranged at the central part of this holder body, has a plurality of test probes and at least one vacuum through hole; One floating cover, be covered on this protuberance, have at least one vacuum that runs through and inhale hole and probe aperture, wherein to inhale the hole be the vacuum through hole of corresponding protuberance to vacuum, and probe aperture to be these test probes of allowing this protuberance penetrate to be communicated with the pin of an integrated circuit package to be measured; One gas-tight ring; And a lock-in component, this floating cover is limited to this holder body; Wherein, the vacuum that this gas-tight ring is arranged between this protuberance and the floating cover is inhaled the outside, hole, and the first half of its xsect is a deflection, and width is less than the width of its Lower Half, and is to form a turning point between this first half and the Lower Half.
The beneficial effects of the utility model are to provide a kind of air tightness can keep or reduce the gas-tight ring of burn-in effects factor; A kind of classifier with test holder is provided, can makes when the body circuit unit is tested, provide preferable impermeability to be connected compared to the traditional test holder and the connection status of chip to be measured; A kind of test machine is provided, can makes when the body circuit unit is tested, provide preferable impermeability to be connected compared to the traditional test holder and the connection status of chip to be measured.
Description of drawings
Fig. 1 is a sectional view, is the test holder of prior art;
Fig. 2 is a stereographic map, is according to first preferred embodiment proposed by the invention, is a kind of local amplification of section of testing holder;
Fig. 3 is a sectional view, is according to first preferred embodiment proposed by the invention, is a kind of local amplification of section of testing holder;
Fig. 4 is a synoptic diagram, is according to second preferred embodiment proposed by the invention, is a kind of classifier;
Fig. 5 is a synoptic diagram, is according to the 3rd preferred embodiment proposed by the invention, is a kind of test machine.
[primary clustering symbol description]
10 test holders (prior art)
11 holder bodies (prior art)
12 test probes (prior art)
13 floating covers (prior art)
14 O shapes rings (prior art)
20 test holders
21 holder bodies
211 screws
212 depressed parts
22 protuberances
221 test probes
222 vacuum through holes
23 floating covers
231 vacuum are inhaled the hole
232 probe aperture
233 inner fovea parts
234 open-works
24 gas-tight rings
241 first halves
242 Lower Halves
243 turning points
25 lock-in components
251 bolts
252 springs
26 integrated circuit packages
30 classifiers
31 vacuum lines
32 mobile platforms
40 test machines
41 test boards
Embodiment
Because the utility model is to disclose a kind of improvement with test clip holder structure of gas-tight ring, the ultimate principle of the connected mode of some gas-tight rings that used and semiconductor component test wherein, in prior art, disclose in detail, so in the following explanation, no longer do complete description.And graphic in the literary composition in following, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the synoptic diagram relevant with the utility model feature.
Please refer to Fig. 2, is according to first preferred embodiment provided by the present invention, is a kind of test holder (clamp) 20 with gas-tight ring (sealing ring) 24.This test holder 20 is used for the integrated circuit package test, comprise a holder body 21, a protuberance 22, a floating cover (floating) 23, a gas-tight ring 24, a lock-in component 25, wherein form a depressed part 212, and protuberance 22 is that depressed part 212 outwards protrudes since then at holder body 21 contiguous its central parts.Depressed part 212 is the quadrilaterals that are approximate, also can be other shape, and protuberance 22 is the quadrilaterals that are approximate, also can be other shape, is arranged at the central part of holder body 21, has a plurality of test probes 221 and at least one vacuum through hole 222.
In the above-described embodiment, floating cover 23 is covered on the protuberance 22, and this floating cover 23 has at least one vacuum that runs through suction hole 231 and a plurality of probe aperture 232.Wherein to inhale hole 231 are vacuum through holes 222 of corresponding protuberance 22 to vacuum, and probe aperture 232 to be the test probes 221 of allowing protuberance 22 penetrate to be communicated with the pin (not graphic) of an integrated circuit package to be measured.In addition, floating cover 23 further is provided with an inner fovea part 233 to hold protuberance 22.In addition, floating cover 23 further comprises a plurality of open-works 234.In the present embodiment, the quantity that the vacuum of floating cover 23 is inhaled hole 231 is four, also can be other quantity, and the vacuum of floating cover 23 to inhale hole 231 be with annular arrangement, also can be other shape.
In the above-described embodiment, lock-in component 25 is to can be most group bolts 251 and spring 252 or be other locked assembly, its function be via wear open-work 234 with floating cover 23 elastic limit in holder body 21 pairing a plurality of screws 211.
In the above-described embodiment, as shown in Figure 2, the vacuum that gas-tight ring 24 is arranged between protuberance 22 and the floating cover 23 is inhaled 231 outsides, hole, simultaneously in Fig. 3, the first half 241 of these gas-tight ring 24 xsects has the deflection characteristic, and the width of the first half 241 less than or be equal to the width of its Lower Half 242, in addition, the first half 242 width of gas-tight ring 24 xsects also can be toward the form of terminal reduction.Form the turning point 243 of a gas-tight ring 24 between the first half 241 and Lower Half 242, this turning point 243 can be V-type, camber or square.If gas-tight ring 24 is V-arrangement turning point 243, then its angle can be between 30 ° and 60 °.The material of general gas-tight ring 24 is a rubber, is arranged at the outer rim (as shown in Figure 2) of protuberance 22, and the ring-type of this gas-tight ring 24 is to be approximate quadrilateral or to be annular, also can be other shape.
Please refer to Fig. 4, is according to second preferred embodiment provided by the present invention, is a kind of classifier 30 with test holder.The classifier 30 that this has the test holder is used for integrated circuit package test, consists predominantly of a vacuum line 31, a mobile platform 32 and is clamped at least one test holder 20 of this mobile platform 32.When carrying out integrated circuit package 26 tests, test holder 20 can be drawn integrated circuit package 26 via vacuum line 31.These mobile platform 32 removable integrated circuit package 26 to suitable positions are tested.And the structure and the feature of this test holder 20 are described as first embodiment.
Please refer to Fig. 5, is according to the 3rd preferred embodiment provided by the present invention, is a kind of test machine 40 with test holder.This test machine 40 consists predominantly of a classifier 30 and a test board 41, wherein this classifier 30 comprise a vacuum line 31, a mobile platform 32 at least and be clamped on this mobile platform 32 at least one the test holder 20.When carrying out integrated circuit package 26 tests, test holder 20 can be drawn integrated circuit package 26 via vacuum line 31.These mobile platform 32 removable integrated circuit packages 26 to test board 41 to test.And the structure and the feature of this test holder 20 are described as first embodiment.
The above is preferred embodiment of the present utility model only, is not in order to limit the right of applying for a patent of the present utility model; Simultaneously above description knows usually that for having of present technique field the knowledgeable should understand and implement, so other does not break away from the equivalence of being finished under the spirit that the utility model discloses and change or modification, all should be included in the following claim.

Claims (10)

1. the test holder with gas-tight ring is used for the integrated circuit package test, comprises:
One holder body;
One protuberance is arranged at the central part of this holder body, has a plurality of test probes and at least one vacuum through hole;
One floating cover, be covered on this protuberance, have at least one vacuum that runs through and inhale hole and a plurality of probe aperture, wherein to inhale the hole be the vacuum through hole of corresponding protuberance to vacuum, and these probe aperture to be these test probes of allowing this protuberance penetrate to be communicated with the pin of an integrated circuit package to be measured;
One gas-tight ring; And
One lock-in component is limited to this holder body with this floating cover;
It is characterized in that:
The vacuum that this gas-tight ring is arranged between this protuberance and the floating cover is inhaled the outside, hole, and the first half of its xsect is a deflection, and width is less than the width of its Lower Half, and is to form a turning point between this first half and Lower Half.
2. according to the described test holder of claim 1, it is characterized in that: the turning point of this gas-tight ring is V-type, camber or square.
3. according to the described test holder of claim 2, it is characterized in that: the angle of this gas-tight ring V-arrangement turning point is between 30 ° and 60 °.
4. according to the described test holder of claim 1, it is characterized in that: the first half width of this gas-tight ring xsect is identical or past terminal reduction.
5. according to the described test holder of claim 1, it is characterized in that: the material of this gas-tight ring is a rubber, and the ring-type of this gas-tight ring is quadrilateral or the annular that is approximate, and this gas-tight ring further is arranged at the outer rim of this protuberance simultaneously.
6. according to the described test holder of claim 1, it is characterized in that: this floating cover further is provided with an inner fovea part holding this protuberance, and this protuberance is the quadrilateral that is approximate.
7. according to the described test holder of claim 1, it is characterized in that: this floating cover further comprises a plurality of open-works, this lock-in component is most group bolts and spring, via wearing these open-works with a plurality of screws of this floating cover elastic limit in this holder body correspondence, and the quantity that the vacuum of this floating cover is inhaled the hole is four, and the hole of the vacuum of this floating cover suction simultaneously is with annular arrangement.
8. according to the described test holder of claim 1, it is characterized in that: this holder body adjacent central position forms a depressed part, and this protuberance is outwards to protrude from this depressed part, and this depressed part is the quadrilateral that is approximate.
9. one kind has the classifier of testing holder, be used for the integrated circuit package test, include a vacuum line, a mobile platform and be clamped on this mobile platform at least one the test holder, can make this test holder draw an integrated circuit package via this vacuum line and test, it is characterized in that this test holder comprises:
One holder body;
One protuberance is arranged at the central part of this holder body, has a plurality of test probes and at least one vacuum through hole;
One floating cover, be covered on this protuberance, have at least one vacuum that runs through and inhale hole and probe aperture, wherein to inhale the hole be the vacuum through hole of corresponding protuberance to vacuum, and probe aperture to be these test probes of allowing this protuberance penetrate to be communicated with the pin of an integrated circuit package to be measured;
One gas-tight ring; And
One lock-in component is limited to this holder body with this floating cover;
Wherein, the vacuum that this gas-tight ring is arranged between this protuberance and the floating cover is inhaled the outside, hole, and the first half of its xsect is a deflection, and width is less than the width of its Lower Half, and is to form a turning point between this first half and the Lower Half.
10. test machine, include a classifier and a test board, this classifier comprises a vacuum line, a mobile platform at least and is clamped at least one test holder of this mobile platform, can make this test holder draw an integrated circuit package to this test board via this vacuum line tests, it is characterized in that this test holder comprises:
One holder body;
One protuberance is arranged at the central part of this holder body, has a plurality of test probes and at least one vacuum through hole;
One floating cover, be covered on this protuberance, have at least one vacuum that runs through and inhale hole and probe aperture, wherein to inhale the hole be the vacuum through hole of corresponding protuberance to vacuum, and probe aperture to be these test probes of allowing this protuberance penetrate to be communicated with the pin of an integrated circuit package to be measured;
One gas-tight ring; And
One lock-in component is limited to this holder body with this floating cover;
Wherein, the vacuum that this gas-tight ring is arranged between this protuberance and the floating cover is inhaled the outside, hole, and the first half of its xsect is a deflection, and width is less than the width of its Lower Half, and is to form a turning point between this first half and the Lower Half.
CNU200720175316XU 2007-08-28 2007-08-28 Testing clamp seat with airtight seal ring, its sorting machine and test machine Expired - Fee Related CN201087841Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU200720175316XU CN201087841Y (en) 2007-08-28 2007-08-28 Testing clamp seat with airtight seal ring, its sorting machine and test machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU200720175316XU CN201087841Y (en) 2007-08-28 2007-08-28 Testing clamp seat with airtight seal ring, its sorting machine and test machine

Publications (1)

Publication Number Publication Date
CN201087841Y true CN201087841Y (en) 2008-07-16

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ID=39635431

Family Applications (1)

Application Number Title Priority Date Filing Date
CNU200720175316XU Expired - Fee Related CN201087841Y (en) 2007-08-28 2007-08-28 Testing clamp seat with airtight seal ring, its sorting machine and test machine

Country Status (1)

Country Link
CN (1) CN201087841Y (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103430031A (en) * 2011-03-14 2013-12-04 李诺工业有限公司 Apparatus for inspecting semiconductor device
CN105067847A (en) * 2015-08-10 2015-11-18 苏州赛腾精密电子股份有限公司 Flip-type probe module

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103430031A (en) * 2011-03-14 2013-12-04 李诺工业有限公司 Apparatus for inspecting semiconductor device
CN103430031B (en) * 2011-03-14 2015-07-15 李诺工业有限公司 Apparatus for inspecting semiconductor device
CN105067847A (en) * 2015-08-10 2015-11-18 苏州赛腾精密电子股份有限公司 Flip-type probe module

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080716

Termination date: 20120828