CN201063056Y - Probe for measuring weak magnetic field gradient using vibrating method - Google Patents
Probe for measuring weak magnetic field gradient using vibrating method Download PDFInfo
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- CN201063056Y CN201063056Y CNU2007200432886U CN200720043288U CN201063056Y CN 201063056 Y CN201063056 Y CN 201063056Y CN U2007200432886 U CNU2007200432886 U CN U2007200432886U CN 200720043288 U CN200720043288 U CN 200720043288U CN 201063056 Y CN201063056 Y CN 201063056Y
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Abstract
The utility model discloses a probe unit for measuring weak magnetic field gradient by a vibration method. The probe comprises a shell, a vibration component and a magnetic sensor, wherein the vibration component is a piezoelectric bimorph with a cantilever beam structure, the magnetic sensor is arranged at a free end of the piezoelectric bimorph; the sensor, which can be a coil, an integrated linear Hall element, a magneto resistive sensor or a giant magneto resistive sensor, is used for measuring the magnetic field intensity. After being provided with alternating voltage of constant frequency, the piezoelectric bimorph drives the sensor to vibrate, thereby measuring gradient of the low intensity magnetic field by a vibration method. The probe of the utility model has the advantages of simple structure, small volume, high measuring sensitivity, low cost, etc., and is applicable to any place for measuring gradient of low intensity magnetic fields.
Description
Technical field
The utility model relates to the measuring technique of magnetic field parameter, and more particularly, it relates to a kind of probe apparatus that adopts vibratory drilling method to measure the low-intensity magnetic field gradient.
Background technology
One of method of measuring magnetic field gradient is to adopt vibratory drilling method, with near the sensor of the measuring magnetic field continuous vibration back and forth measured point, sensor output signal is become AC signal by the magnetic field modulation of uneven distribution, and the peak-to-peak value of this output signal is proportional to the magnetic field gradient of this some place along direction of vibration.For the easier processing and amplifying of interchange feeble signal of fixed frequency, has advantage highly sensitive, that antijamming capability is subjected to the environment for use condition restriction by force and not so adopt vibratory drilling method to measure magnetic field gradient.
Chinese patent Granted publication CN 2630862Y, on August 4 2004 Granted publication day, the utility model name is called vibrator coil low-intensity magnetic field gradient measuring instrument, and this utility model discloses a kind of method that adopts vibratory drilling method to measure the low-intensity magnetic field gradient.Its weak point is to make the apparatus structure of coil vibration too complicated, and volume is big, and cost is also high.
Summary of the invention
The purpose of this utility model is to overcome weak point in the prior art, provide a kind of simple in structure, cheap, use flexible, the highly sensitive needed probe apparatus of portable magnetic field gradient, the magnetic field gradient measuring instrument overall price/performance ratio of being made up of this probe is higher.This probe apparatus can be applicable to any place of low-intensity magnetic field gradient measuring, and is especially when the metal magnetic memory detection range, owing to do not produce incremental noise, more accurate to the detection that defective or stress are concentrated.
Magnetic field gradient described in the utility model is such regulation: be located at that coordinate is that the adjacent increment of coordinate in x place is dx on the x axle at 2, the increment of corresponding magnetic induction density is dBn, and then the magnetic field gradient along the x direction is defined as Gx=dBn/dx at an x place.
The utility model is achieved through the following technical solutions: include vibrating mass and Magnetic Sensor in the nonferromugnetic material shell, vibrating mass adopts piezoelectric bimorph, and piezoelectric bimorph is a cantilever beam structure, at its free end Magnetic Sensor is installed.
Magnetic Sensor is used to measure magnetic field intensity, can be coil, integrated linear hall element, magnetic resistance or is giant magneto-resistance sensor.The electric signal that Magnetic Sensor produces is drawn shell by lead, is convenient to connect outside amplifying circuit.Simultaneously, piezoelectric bimorph is also drawn by lead and is connected in outside AC driving circuit.The stiff end of piezoelectric bimorph is fixing by backing plate 9, pressing plate 10, trip bolt 7 and nut 8, makes piezoelectric bimorph become cantilever beam structure.The butt joint lid formula structure that probing shell adopts transparent plastic to make, shell box 1 are docked the back internal cavities with shell lid 2 be rectangular parallelepiped.
When utilizing this probe apparatus to measure magnetic field gradient along the x direction, sensor is vibrated along the x direction, the magnetic induction density of institute's measuring magnetic field is at the component Bn of sensor face normal direction, then the increment of normal direction magnetic induction density component is dBn in sensor oscillating region dx, then along the magnetic field gradient Gx=dBn/dx of x direction.
The utility model compared with prior art has following good effect: simple in structure, be easy to make, with low cost; Volume is little, and is easy to use, can measure the magnetic field gradient of arbitrfary point, not limited by working environment; Can simplify the entire machine design of magnetic field gradient detector.During nondestructive test with metal magnetic memory that this probe is applied to measure based on magnetic field gradient, there is not incremental noise, accurate to defective and stress centralized detecting, the reliability height.
Description of drawings
Fig. 1 is the embodiment cut-open view of the utility model probe;
Fig. 2 is the embodiment vertical view of the utility model probe.
Among the figure: shell box 1, shell lid 2, piezoelectric bimorph 3, Magnetic Sensor 4, sensor face 5, sensor fixation plate 6, screw 7, nut 8, backing plate 9, pressing plate 10, sensor lead 11, signal extension line 12, piezoelectric bimorph extension line 13, extension line aperture 14.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described in detail.
Among the figure, shell box 1 docks cover with shell lid 2 inserts the back as probing shell, and inside becomes the rectangular parallelepiped cavity, and the probe remaining part is all worked in this cavity.The core component of probe is piezoelectric bimorph 3 and Magnetic Sensor 4, piezoelectric bimorph 3 is also referred to as the twin lamella piezoelectric actuator, it is a kind of PXE bender element, the dual stack cantilever design is simple form, and it is to be central electrode with the metallic elastic plate, the both sides layer of piezo-electric material of respectively fitting, behind the making alive, the elongation of one layer of piezo-electric material, another layer shrinks, and takes place and the corresponding flexural deformation of institute's making alive waveform.As vibrating mass, it is little to have a volume with piezoelectric bimorph, and control is convenient, to advantages such as sensor disturbance are little.The selected piezoelectric bimorph physical dimension of the utility model embodiment is 60 * 20 * 0.6mm
3, free end length 55mm, peak swing 1.5mm.
The stiff end of piezoelectric bimorph 3 fixes by screw 7, nut 8, backing plate 9 and pressing plate 10.Backing plate 9 and pressing plate 10 adopt nonmetal making, and have certain flexibility and elasticity, damage piezoelectric bimorph when preventing trip bolt, generally adopt wood chip or rubber strip.
Measuring along the magnetic field gradient and the magnetic direction of sensor direction of vibration if desired also is along direction of vibration, sensor installation then, with the normal direction of sensor face 5 along direction of vibration.Measure if desired along the magnetic field gradient of sensor direction of vibration and magnetic direction perpendicular to direction of vibration, sensor installation then, with the normal direction of sensor face 5 perpendicular to direction of vibration.The sensor face is meant when measuring the magnetic parameter, the plane that allows magnetic field vertically pass, and the detection faces of coil is exactly a coil plane, and is vertical with coil axis.
Coil is during as Magnetic Sensor 4, the fix continuous vibration of frequency of the shuttle belt moving winding of piezoelectric bimorph, if magnetic field is inhomogeneous, the magnetic flux that passes coil changes, produce induction electromotive force in the coil, the size of this electromotive force is proportional to magnetic field gradient, therefore available this electromotive force size expression magnetic field gradient.
When adopting integrated linear hall element or magnetoresistive transducer, the magnitude of field intensity that they are measured is vibrated residing position with sensor and is changed, if magnetic field is inhomogeneous, contain the alternating component that frequency equals the sensor vibration frequency in the sensor output signal, the peak-to-peak value of this alternating component is proportional to magnetic field gradient, therefore after this alternating component being amplified, the expression magnetic field gradient.
Though more than described embodiment of the present utility model, the those of skill in the art in the present technique field should be appreciated that these only illustrate, and can make change or modification to present embodiment, and not deviate from principle of the present utility model and essence.All employings are equal to the technical scheme that form obtained of replacement or equivalent transformation, all drop within the protection domain of the present utility model.
Claims (8)
1. the probe of a vibratory drilling method measurement low-intensity magnetic field gradient includes vibrating mass and Magnetic Sensor in the nonferromugnetic material shell, and it is characterized in that: vibrating mass is a piezoelectric bimorph, and piezoelectric bimorph is a cantilever beam structure, at its free end Magnetic Sensor is installed.
2. probe according to claim 1 is characterized in that described Magnetic Sensor is a coil.
3. probe according to claim 1 is characterized in that described Magnetic Sensor is integrated linear hall element.
4. probe according to claim 1 is characterized in that described Magnetic Sensor is magnetic resistance or giant magneto-resistance sensor.
5. according to each the described probe in the claim 1 to 4, it is characterized in that described Magnetic Sensor draws shell by lead, be convenient to connect outside amplifying circuit.
6. probe according to claim 1 is characterized in that described piezoelectric bimorph draws by lead, is convenient to connect outside AC driving circuit.
7. probe according to claim 1 is characterized in that the stiff end of described piezoelectric bimorph is fixing by backing plate (9), pressing plate (10), trip bolt (7) and nut (8), makes piezoelectric bimorph become cantilever beam structure.
8. probe according to claim 1 is characterized in that the butt joint lid formula structure that described shell adopts transparent plastic to make, and shell box (1) docks the back internal cavities with shell lid (2) be rectangular parallelepiped.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNU2007200432886U CN201063056Y (en) | 2007-08-20 | 2007-08-20 | Probe for measuring weak magnetic field gradient using vibrating method |
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CNU2007200432886U CN201063056Y (en) | 2007-08-20 | 2007-08-20 | Probe for measuring weak magnetic field gradient using vibrating method |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103389476A (en) * | 2013-06-09 | 2013-11-13 | 西北核技术研究所 | Magnetic gap magnetic induction intensity measuring method and device based on electromagnetic vibration principle |
CN103822966A (en) * | 2014-03-18 | 2014-05-28 | 江苏理工学院 | Metal stress concentration coil vibration flaw detection device |
CN110940907A (en) * | 2018-09-24 | 2020-03-31 | 台湾积体电路制造股份有限公司 | Semiconductor wafer test system |
CN115856725A (en) * | 2022-11-25 | 2023-03-28 | 南方电网数字电网研究院有限公司 | Magnetic sensor |
-
2007
- 2007-08-20 CN CNU2007200432886U patent/CN201063056Y/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103389476A (en) * | 2013-06-09 | 2013-11-13 | 西北核技术研究所 | Magnetic gap magnetic induction intensity measuring method and device based on electromagnetic vibration principle |
CN103389476B (en) * | 2013-06-09 | 2015-12-23 | 西北核技术研究所 | Based on measuring method and the device of the magnetic gap magnetic induction density of electric and magnetic oscillation principle |
CN103822966A (en) * | 2014-03-18 | 2014-05-28 | 江苏理工学院 | Metal stress concentration coil vibration flaw detection device |
CN110940907A (en) * | 2018-09-24 | 2020-03-31 | 台湾积体电路制造股份有限公司 | Semiconductor wafer test system |
CN115856725A (en) * | 2022-11-25 | 2023-03-28 | 南方电网数字电网研究院有限公司 | Magnetic sensor |
CN115856725B (en) * | 2022-11-25 | 2023-12-12 | 南方电网数字电网研究院有限公司 | magnetic sensor |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080521 Termination date: 20110820 |