CN200996027Y - Levelling device of vacuum chamber - Google Patents

Levelling device of vacuum chamber Download PDF

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Publication number
CN200996027Y
CN200996027Y CN 200620172800 CN200620172800U CN200996027Y CN 200996027 Y CN200996027 Y CN 200996027Y CN 200620172800 CN200620172800 CN 200620172800 CN 200620172800 U CN200620172800 U CN 200620172800U CN 200996027 Y CN200996027 Y CN 200996027Y
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CN
China
Prior art keywords
worm gear
casing
vacuum chamber
screw rod
worm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 200620172800
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Chinese (zh)
Inventor
盛正平
胡雪萍
孙毅
张愉
盛汉桥
张文
张钟蓓
许海虹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wisdri Engineering and Research Incorporation Ltd
Original Assignee
Wisdri Engineering and Research Incorporation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wisdri Engineering and Research Incorporation Ltd filed Critical Wisdri Engineering and Research Incorporation Ltd
Priority to CN 200620172800 priority Critical patent/CN200996027Y/en
Application granted granted Critical
Publication of CN200996027Y publication Critical patent/CN200996027Y/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

A leveling device of vacuum chamber is characterized in that the utility model consists of a box body (5), a thrust bearing (6), a worm gear (7), a guide cap (9), a screw prop (10) and a worm (13). The box body (5) is an empty cavity and the top of the box body (5) is an aperture. A pilot hole is arranged in the guide cap (9). The lower part of the screw prop (10) extends through the pilot hole in the guide cap (9) and into empty cavity of the box body (5). The thrust bearing (6) and the worm gear (7) are arranged separately in the empty cavity of the box body (5). The worm gear (7) is arranged on the thrust bearing (6) and the lower part of the worm gear (7) is connected fixedly to box body (5) by the thrust bearing (6). An outside thread is arranged on the screw prop (10) and an inside thread hole is arranged in the worm gear (7). The screw prop (10) is screwed into the inside thread hole in the worm gear (7) and the lower part of the screw prop (10) extends through the hole for screw prop in the thrust bearing (6). The worm (13) meshes with the worm gear (7). The two ends of the worm (13) are connected fixedly with the bearing and the box body (5) respectively. One end of the worm (13) is connected with a handwheel (16) or the output shaft of a decelerating motor. The guide cap (9) is arranged at the aperture of the box body (5) and is connected with the box body (5) by screws.

Description

Levelling equipment for vacuum chamber
Technical field
The utility model relates to adjustment vacuum chamber end face and the height of vacuum chamber alloy material actinal surface and the levelling device of planeness in a kind of RH vacuum-treat.
Background technology
In the vacuum treated engineering design of RH, often dispose 2~4 vacuum chamber chassis, 5~8 cover vacuum chambers, each vacuum chamber often is provided with 3~4 supporting legs.Vacuum chamber is seated on the vacuum chamber chassis by supporting leg, requires all vacuum chambers to exchange between all vacuum chamber chassis.For realize exchanging and solution equipment individuality between difference, and compensate scale error between the different supporting legs of same vacuum chamber, take between vacuum chamber supporting leg and vacuum chamber chassis, the adjustment shim pack to be set.Find in actual use, use shim pack can adjust the height and the planeness of vacuum chamber end face and vacuum chamber alloy material actinal surface, yet this processing mode of adjusting shim pack has caused very big and loaded down with trivial details adjustment workload.
In actual production,, need often vacuum chamber to be carried out the operation of leveling equally owing to the thermal distortion of equipment, the reasons such as creep of material also can cause the change in location of vacuum chamber.
When using shim pack to adjust, need crane that vacuum chamber is sling, to carry out spacer thickness selection and increase then or reduce pad, these operations all will take crane, very influence production scheduling.
Summary of the invention
The purpose of this utility model is to provide a kind of production efficiency height, can be with and carry a leveling, levelling equipment for vacuum chamber simple in structure.
To achieve these goals, the technical solution of the utility model: levelling equipment for vacuum chamber, it is characterized in that it comprises casing 5, thrust bearing 6, worm gear 7, guide cover 9, screw rod pillar 10, worm screw 13, in the casing 5 is cavity, the upper end of casing 5 is an opening, guide cover 9 is provided with pilot hole, the bottom of screw rod pillar 10 is passed the pilot hole on the guide cover 9 and is positioned at the cavity of casing 5, thrust bearing 6, worm gear 7 lays respectively in the cavity of casing 5, worm gear 7 is positioned at the top of thrust bearing 6, the bottom of worm gear 7 is fixedly connected by thrust bearing 6 and casing 5, screw rod pillar 10 is provided with outside screw, worm gear 7 is provided with internal thread hole, and screw rod pillar 10 screws in the internal thread hole of worm gear 7, and the screw rod pillar hole on the thrust bearing 6 is passed in the lower end of screw rod pillar 10; Worm screw 13 is meshed with worm gear 7, and the both ends of worm screw 13 are fixedly connected by bearing and casing 5 respectively, and the end of worm screw 13 and the output shaft of handwheel 16 or reducing motor link; Guide cover 9 is positioned at the opening part of casing 5 and is fixedlyed connected with casing 5 by bolt.
Levelling equipment for vacuum chamber of the present utility model is formed by worm and gear transmission pair and screw thread transmission pair overlapped in series, and whole transmission pair is arranged in the closed box 5, and transmission pair is fully lubricated.Its transmission principle is as follows: drive worm screw 13 by handwheel 16 (or reducing motor) and rotate, worm screw 13 promotes worm gear 7, the endoporus of worm gear 7 is provided with screw thread, and the motion of screw thread pair drives the translational motion that screw rod pillar 10 is done rising or descended, thereby has realized the adjusting to the vacuum chamber height of landing leg.
The beneficial effects of the utility model are: 1, simplify and adjust operation (need not to carry out loaded down with trivial details pad adjustment), accelerate the adjustment time, enhance productivity; 2, screw rod pillar 10 can be with and carry, and can be with and carry leveling, in the leveling process, does not need the cooperation of crane; 3, the minimum adjustment amount of adjustment shim pack is the thickness of minimum pad, and the utility model can be realized " stepless " leveling; 4, simple in structure, volume is little, in light weight, and is economical and practical.
The utility model is applied to the RH vacuum-treat, is installed between vacuum chamber supporting leg and vacuum chamber chassis, is used to adjust the height and the planeness of vacuum chamber end face and vacuum chamber alloy material actinal surface.
Description of drawings
Fig. 1 is a structural representation of the present utility model
Fig. 2 is the vertical view of Fig. 1
Installation front view when Fig. 3 is the utility model application
Fig. 4 is the vertical view of Fig. 3
Among the figure: 1-vacuum chamber, 2-vacuum chamber chassis, 3-supporting leg, the 4-guide holder, 5-casing, 6-thrust bearing, the 7-worm gear, 8-axle sleeve, 9-guide cover, 10-screw rod pillar, 11-limited block, 12-sliding surface bearing, the 13-worm screw, the 14-stifle, 15-covers thoroughly, the 16-handwheel, the end face of 17-vacuum chamber, 18-alloy material actinal surface.
Embodiment
As Fig. 1, shown in Figure 2, levelling equipment for vacuum chamber, it comprises casing 5, thrust bearing 6, worm gear 7, axle sleeve 8, guide cover 9, screw rod pillar 10, limited block 11, sliding surface bearing 12, worm screw 13, stifle 14, saturating lid 15, in the casing 5 is cavity, the upper end of casing 5 is an opening, guide cover 9 is provided with pilot hole, the bottom of screw rod pillar 10 is passed the pilot hole on the guide cover 9 and is positioned at the cavity of casing 5, thrust bearing 6, worm gear 7 lays respectively in the cavity of casing 5, worm gear 7 is positioned at the top of thrust bearing 6, the bottom of worm gear 7 is fixedly connected by thrust bearing 6 and casing 5, screw rod pillar 10 is provided with outside screw, worm gear 7 is provided with internal thread hole, and screw rod pillar 10 screws in the internal thread hole of worm gear 7, and the screw rod pillar hole on the thrust bearing 6 is passed in the lower end of screw rod pillar 10; Worm screw 13 is meshed with worm gear 7, and the both ends of worm screw 13 are fixedly connected by bearing and casing 5 respectively, and the end of worm screw 13 and the output shaft of handwheel 16 or reducing motor link; Guide cover 9 is positioned at the opening part of casing 5 and is fixedlyed connected with casing 5 by bolt.
Be with sliding surface bearing 12 on the screw rod pillar 10 at the pilot hole place of described guide cover 9, the assembling that is tightly fixed of sliding surface bearing 12 and guide cover 9, the top of worm gear 7 is with axle sleeve 8, and the upper end of axle sleeve 8 leans on the rib of sliding surface bearing 12.The assembling that is tightly fixed of sliding surface bearing 12 and guide cover 9 is assembled movingly with the screw rod pillar, and sliding surface bearing 12 limits 10 radial motions of screw rod pillars, and allows it to carry out the axial motion of lifting.Axle sleeve 8 lower ends tops is enclosed within on the worm gear 7, and the upper end leans on the rib of sliding surface bearing 12 and (stays the 1mm gap), and when worm gear 7 rotated, axle sleeve 8 rotated with worm gear, and the rib of the upper end of axle sleeve 8 and sliding surface bearing 12 relatively rotates.
Described guide cover 9 upper surfaces are provided with limited block 11, and the top of screw rod pillar 10 is square carrier heads, and the square carrier head of screw rod pillar 10 is positioned on the guide cover 9, and limited block 11 is near one side of screw rod pillar 10 top square spigots, and restriction screw rod pillar 10 rotates.
The bearings at both ends place of described worm screw 13 is provided with stifle 14 respectively, covers 15 thoroughly, stifle 14, covers 15 thoroughly and is fixedlyed connected with casing 5 by bolt respectively.
As Fig. 3, shown in Figure 4, levelling equipment for vacuum chamber of the present utility model is arranged between the guide holder 4 of the supporting leg 3 of vacuum chamber 1 and vacuum chamber chassis 2, the bottom of each vacuum chamber supporting leg 3 is provided with a levelling equipment for vacuum chamber, the supporting leg 3 of vacuum chamber is shelved on the square carrier head of screw rod pillar 10 of levelling equipment for vacuum chamber, the casing 5 of levelling equipment for vacuum chamber is fixedlyed connected with the guide holder 4 of vacuum chamber chassis 2, the end face of the screw rod pillar 10 by changing levelling equipment for vacuum chamber and the relative displacement of the bottom surface of casing 5 realize the adjustment to supporting leg 3 with the relative position of the guide holder 4 of vacuum chamber chassis 2 of vacuum chamber 1, thereby realization is to end face 17 and the height of alloy material actinal surface 18 and the adjustment of planeness of vacuum chamber.

Claims (5)

1. levelling equipment for vacuum chamber, it is characterized in that it comprises casing (5), thrust bearing (6), worm gear (7), guide cover (9), screw rod pillar (10), worm screw (13), in the casing (5) is cavity, the upper end of casing (5) is an opening, guide cover (9) is provided with pilot hole, the bottom of screw rod pillar (10) is passed the pilot hole on the guide cover (9) and is positioned at the cavity of casing (5), thrust bearing (6), worm gear (7) lays respectively in the cavity of casing (5), worm gear (7) is positioned at the top of thrust bearing (6), the bottom of worm gear (7) is fixedly connected by thrust bearing (6) and casing (5), screw rod pillar (10) is provided with outside screw, worm gear (7) is provided with internal thread hole, screw rod pillar (10) screws in the internal thread hole of worm gear (7), and the screw rod pillar hole on the thrust bearing (6) is passed in the lower end of screw rod pillar (10); Worm screw (13) is meshed with worm gear (7), and the both ends of worm screw (13) are fixedly connected by bearing and casing (5) respectively, and the output shaft of the end of worm screw (13) and handwheel (16) or reducing motor links; Guide cover (9) is positioned at the opening part of casing (5) and is fixedlyed connected with casing (5) by bolt.
2. levelling equipment for vacuum chamber according to claim 1, it is characterized in that: be with sliding surface bearing (12) on the screw rod pillar (10) at the pilot hole place of described guide cover (9), the assembling that is tightly fixed of sliding surface bearing (12) and guide cover (9), the top of worm gear (7) is with axle sleeve (8), and the upper end of axle sleeve (8) leans on the rib of sliding surface bearing (12).
3. levelling equipment for vacuum chamber according to claim 1 is characterized in that: described guide cover (9) upper surface is provided with limited block (11).
4. levelling equipment for vacuum chamber according to claim 1 is characterized in that: the top of described screw rod pillar (10) is square carrier head.
5. levelling equipment for vacuum chamber according to claim 1 is characterized in that: the bearings at both ends place of described worm screw (13) is provided with stifle (14), saturating lid (15) respectively, and stifle (14), saturating lid (15) are fixedlyed connected with casing (5) by bolt respectively.
CN 200620172800 2006-12-30 2006-12-30 Levelling device of vacuum chamber Expired - Lifetime CN200996027Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200620172800 CN200996027Y (en) 2006-12-30 2006-12-30 Levelling device of vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200620172800 CN200996027Y (en) 2006-12-30 2006-12-30 Levelling device of vacuum chamber

Publications (1)

Publication Number Publication Date
CN200996027Y true CN200996027Y (en) 2007-12-26

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ID=38994458

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200620172800 Expired - Lifetime CN200996027Y (en) 2006-12-30 2006-12-30 Levelling device of vacuum chamber

Country Status (1)

Country Link
CN (1) CN200996027Y (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100462447C (en) * 2006-12-30 2009-02-18 中冶南方工程技术有限公司 Levelling equipment for vacuum chamber
CN103062581A (en) * 2012-12-20 2013-04-24 苏州市职业大学 Supporting and leveling mechanism applicable to low frequency mechanical spectrometer
CN106956667A (en) * 2017-05-08 2017-07-18 苏州标杆知识产权运营有限公司 A kind of bridge inspection operation vehicle suspension device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100462447C (en) * 2006-12-30 2009-02-18 中冶南方工程技术有限公司 Levelling equipment for vacuum chamber
CN103062581A (en) * 2012-12-20 2013-04-24 苏州市职业大学 Supporting and leveling mechanism applicable to low frequency mechanical spectrometer
CN103062581B (en) * 2012-12-20 2014-10-01 苏州市职业大学 Supporting and leveling mechanism applicable to low frequency mechanical spectrometer
CN106956667A (en) * 2017-05-08 2017-07-18 苏州标杆知识产权运营有限公司 A kind of bridge inspection operation vehicle suspension device

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Effective date of abandoning: 20090218

C25 Abandonment of patent right or utility model to avoid double patenting