CN200986820Y - Fixing mechanism for radiation pipe - Google Patents

Fixing mechanism for radiation pipe Download PDF

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Publication number
CN200986820Y
CN200986820Y CN 200620049266 CN200620049266U CN200986820Y CN 200986820 Y CN200986820 Y CN 200986820Y CN 200620049266 CN200620049266 CN 200620049266 CN 200620049266 U CN200620049266 U CN 200620049266U CN 200986820 Y CN200986820 Y CN 200986820Y
Authority
CN
China
Prior art keywords
radiating tube
fixed mechanism
utility
model
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 200620049266
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Chinese (zh)
Inventor
胡文祥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Manufacturing International Beijing Corp
Original Assignee
Semiconductor Manufacturing International Shanghai Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Manufacturing International Shanghai Corp filed Critical Semiconductor Manufacturing International Shanghai Corp
Priority to CN 200620049266 priority Critical patent/CN200986820Y/en
Application granted granted Critical
Publication of CN200986820Y publication Critical patent/CN200986820Y/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to a fixing device for radiator pipe. The fixing structure without elastic protection is applied in the prior fixing device for radiator pipe, as a result, fracture and loosens often happens. The utility model comprises a screw head, a connection part and a fixed part with screws, a plurality of screw holes arranged on the machine matching the fixed part, a plurality of connection parts arranged on the radiator pipe with holes, wherein, an elastic element is provided for each connection part. The reliability of the radiator pipe can be improved by the application of the fixing device of the utility model; also the utility model can prevent the radiator pipe from fracturing.

Description

A kind of radiating tube fixed mechanism
Technical field
The utility model relates to field of semiconductor manufacture, and is particularly a kind of in order to the fixing radiating tube fixed mechanism of radiating tube.
Background technology
In manufacture of semiconductor, operations such as etching, chemistry or physical vapour deposition (PVD) all need be carried out at a certain temperature, just need this moment heating system to guarantee technological temperature to carry out above-mentioned operation, the normal operation and the cooperation heating system that also need cooling system to keep heating system are simultaneously kept technological temperature.Liquid circulation cooling with it efficiently, all even noiseless radiating effect becomes the type of cooling important in the above-mentioned processing procedure, liquid circulation cooling is to utilize the circulation of liquid endlessly the heat of heater to be taken out of board and by being arranged on the outer radiating tube of board heat dissipation is gone out, usually radiating tube with circular or word shape form arrange and be fixed on the board inside and outside, heat is fully absorbed and looses and select.
Referring to Fig. 1, the cut-open view that has shown existing radiating tube fixed mechanism 1, radiating tube fixed mechanism 1 comprises screw 10, be welded on the fixed block 11 on the radiating tube 2 and be opened in screw 12 on the board 3, screw 10 is passed the through hole 110 on the fixed block 11 and screw, and then radiating tube 2 is fixed on the board 3 with screw 12.But the fixed form of above-mentioned radiating tube 2 is when when radiating tube 2 expands with heat and contract with cold, and screw 10 with the stress that screw 12 can produce because of expanding with heat and contract with cold certain deformation takes place, and gets off for a long time, can cause getting loose of screw 10 and screw 12; Radiating tube 2 stress that is produced that expands with heat and contract with cold also can act on the fixed block 11 in addition, and fixed block 11 is stripped down from radiating tube 2, just may cause the radiating tube 2 inner liquid that breaks to flow out and pollute whole board 3.
The utility model content
The purpose of this utility model is to provide a kind of radiating tube fixed mechanism, can avoid radiating tube to get loose or breaks by described radiating tube fixed mechanism.
The purpose of this utility model is achieved in that a kind of radiating tube fixed mechanism, it comprise successively by spiral shell head, linking part and offer securing member that threaded fixed part is formed by connecting, be opened on the board and with screw and a plurality of contiguous block that is arranged on the radiating tube and offers through hole of this fixed part coupling, wherein, each linking part all encircles outward and establishes an elastic component.
In above-mentioned radiating tube fixed mechanism, the diameter of this fixed part is less than the diameter of this linking part.
In above-mentioned radiating tube fixed mechanism, this securing member is a bolt.
In above-mentioned radiating tube fixed mechanism, the slightly larger in diameter of this through hole is in the diameter of connecting portion.
In above-mentioned radiating tube fixed mechanism, this elastic component is spring or Elastic plastic-rubber.
Compare with the radiating tube fixed mechanism of existing nonelastic buffering, the utility model adopts elastic component to cushion the stress that radiating tube expands with heat and contract with cold and produced, and has avoided because radiating tube expands with heat and contract with cold the radiating tube that caused to break away from board or the radiating tube cooling liquid that breaks and has polluted board.
Description of drawings
Radiating tube fixed mechanism of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is existing radiating tube fixed mechanism cut-open view;
Fig. 2 is a radiating tube fixed mechanism cut-open view of the present utility model;
Fig. 3 is the fixedly mounting structure synoptic diagram of radiating tube of radiating tube fixed mechanism of the present utility model.
Embodiment
Below will be described in further detail radiating tube fixed mechanism of the present utility model.
Referring to Fig. 2 and Fig. 3, radiating tube fixed mechanism 4 of the present utility model comprises a plurality of securing members 40, elastic component 41, a plurality ofly is arranged on the radiating tube 2 and offers the contiguous block 42 of through hole 420 and be opened in screw 43 on the board 3.In the present embodiment, securing member 40, contiguous block 42 and the complete assembling of screw 43 threes.
Securing member 40 is connected and composed successively by spiral shell head 400, linking part 401 and fixed part 402, and wherein, the diameter of fixed part 402 is less than offering screw thread on the diameter of linking part 401 and the fixed part 402, and these linking part 401 outer shrouds are established elastic component 41.In preferred embodiment of the present invention, securing member 40 is bolts, and elastic component 41 is springs.
Below in conjunction with Fig. 2 and Fig. 3, fixedly radiating tube 2 of the present utility model is described in detail in detail is installed to process on the board 3, at first, radiating tube 2 is placed on the board 3 position of pre-installing radiating tube 2, and with corresponding screw 43 alignings on the through hole on the fixed block 42 420 and the board 3; Then, the fixed part 402 of securing member 40 and linking part 401 are passed through hole 420 on the fixed block 42 in succession, at last fixed part 402 is screwed on screw 43, so promptly finished installing and fixing of radiating tube 2.
When radiating tube 2 produces distortion because of being heated or catching a cold, the stress that is produced by distortion discharges by the buffering that ring is located at the elastic component 41 outside the linking part 401, avoid this stress on securing member 40 and screw 43 and make between the two to produce and get loose, avoided this stress on fixed block 42 and fixed block 42 is peeled off from radiating tube 2 cause radiating tube 2 to break in addition again.

Claims (6)

1, a kind of radiating tube fixed mechanism, it comprise a plurality of successively by spiral shell head, linking part and offer securing member that threaded fixed part is formed by connecting, a plurality of be opened on the board and with screw and a plurality of contiguous block that is arranged on the radiating tube and offers through hole of this fixed part coupling, it is characterized in that each linking part all encircles and establishes an elastic component outward.
2, radiating tube fixed mechanism as claimed in claim 1 is characterized in that, the diameter of this fixed part is less than the diameter of this linking part.
3, radiating tube fixed mechanism as claimed in claim 1 is characterized in that, this securing member is a bolt.
4, radiating tube fixed mechanism as claimed in claim 1 is characterized in that, the diameter of this through hole is greater than the diameter of this connecting portion.
5, radiating tube fixed mechanism as claimed in claim 1 is characterized in that, this elastic component is a spring.
6, radiating tube fixed mechanism as claimed in claim 1 is characterized in that, this elastic component is an Elastic plastic-rubber.
CN 200620049266 2006-12-20 2006-12-20 Fixing mechanism for radiation pipe Expired - Lifetime CN200986820Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200620049266 CN200986820Y (en) 2006-12-20 2006-12-20 Fixing mechanism for radiation pipe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200620049266 CN200986820Y (en) 2006-12-20 2006-12-20 Fixing mechanism for radiation pipe

Publications (1)

Publication Number Publication Date
CN200986820Y true CN200986820Y (en) 2007-12-05

Family

ID=38916278

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200620049266 Expired - Lifetime CN200986820Y (en) 2006-12-20 2006-12-20 Fixing mechanism for radiation pipe

Country Status (1)

Country Link
CN (1) CN200986820Y (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017075738A1 (en) * 2015-11-03 2017-05-11 徐海军 Three-support fixed radio frequency laser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017075738A1 (en) * 2015-11-03 2017-05-11 徐海军 Three-support fixed radio frequency laser

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING

Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION

Effective date: 20130115

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING

TR01 Transfer of patent right

Effective date of registration: 20130115

Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone

Patentee after: Semiconductor Manufacturing International (Beijing) Corporation

Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18

Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation

CX01 Expiry of patent term

Granted publication date: 20071205

EXPY Termination of patent right or utility model