CN200951336Y - Vacuum oscillation equipment for air-removing purification - Google Patents
Vacuum oscillation equipment for air-removing purification Download PDFInfo
- Publication number
- CN200951336Y CN200951336Y CN 200620133414 CN200620133414U CN200951336Y CN 200951336 Y CN200951336 Y CN 200951336Y CN 200620133414 CN200620133414 CN 200620133414 CN 200620133414 U CN200620133414 U CN 200620133414U CN 200951336 Y CN200951336 Y CN 200951336Y
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Abstract
The utility model relates to a device for purifying and deaerating air of the solution by the vacuum oscillation, which comprises a vacuum chamber with a solution storage tank, wherein the bottom side of the vacuum chamber is provided with a vacuumizing unit to draw out the air to form a vacuum space, and an oscillating unit used to remove the air in the solution and to filter the impurity by oscillating motion; in addition, an air filling unit and a pressure controlling unit are arranged at one side of the vacuum chamber to prevent the solution from splashing when oscillating; the pressure controlling unit senses the pressure in the vacuum chamber to judge whether the pressure in the vacuum chamber is a constant or not, so as to achieve the effect of the deaerating speed control.
Description
Technical field
The relevant a kind of degasification purification devices of the utility model, particularly a kind of solution degasification purification devices that utilizes vacuum oscillation that is applied on semiconductor, photoelectricity manufacture process and the Medical Devices.
Background technology
All solution expose in atmosphere, all can comprise the gas or the impurity that from air, adsorb, and when solution is applied on accurate manufacture process or the equipment, (manufacture of semiconductor, photoelectricity manufacture process or Medical Devices), these solution that have gas, impurity will influence the stability of manufacture process or increase noise, even cause functions of the equipments not normal; In addition, the gas in the solution can influence refractive index, can produce false analysis result on Photoelectric Detection, reduces the accuracy of analyzing.Known degasification purification process it, be to utilize pump that liquid is extracted to depassing unit from the solution storage bottle, utilize the special nature of film that gas is penetrated outside the film, but solution can not penetrated, therefore, the gas that exists in solution will be broken away from from liquid by the mode that vacuumizes.The other method of known degasification purifying is to utilize to vacuumize and the mode of supersonic oscillations is quickened the speed of solution degasification.Yet the mode that only simple dependence vacuumizes is carried out deaeration step, need expend considerable time and finish the action that vacuumizes, not only the big also life-span of easy loss getter of power consumption.
In view of this, the utility model proposes a kind of vacuum oscillation degasification purification devices at above-mentioned puzzlement, utilizes the pending solution of oscillating unit vibration, and the bubble and the impurity that exist in solution are got rid of.
Summary of the invention
The purpose of this utility model is to provide a kind of vacuum oscillation degasification purification devices, utilizes an inflation unit to inject an inert gas in vacuum chamber, splashes because of vibrating at a high speed to avoid solution.
Another purpose of the present utility model is to provide a kind of vacuum oscillation degasification purification devices, utilize the pressure in the pressure control unit detecting vacuum chamber, and judge whether to need the pressure of modulation internal vacuum chamber, to reach the effect of control outgassing rate, and the required purifying pressure of visual solution is adjusted the required pressure of vacuum chamber, can the amount of saving energy.
The purpose of this utility model is achieved in that a kind of vacuum oscillation degasification purification devices, comprises:
At least one solution accumulator tank, this solution accumulator tank device one solution;
One vacuum chamber is placed this solution accumulator tank, and has two openings;
One oscillating unit is arranged at the bottom of this vacuum chamber, coats and contact the bottom area of this solution accumulator tank;
One vacuum unit is connected with an opening of this vacuum chamber;
One inflation unit is connected with another opening of this vacuum chamber;
One pressure control unit, the one end is connected with this vacuum chamber, and the other end is connected with this vacuum unit.
This pressure control unit comprises a pressure and takes into account pressure back coupling controller.
This vacuum unit comprises a vavuum pump and a pressure control air bleeding valve.
This pressure control air bleeding valve is by this pressure back coupling controller control.
This inflation unit more comprises a charge valve and a mass flow controller.
One inert gas is continued to pour in this vacuum chamber by described inflation unit.
This vacuum chamber is the space of a sealing.
From the above mentioned, the utility model utilizes inflation unit to pour into an inert gas to this vacuum chamber, and the vibration of solution in the available buffer solution accumulator tank can not splashed solution because of expansion or the vibration of moment.And the utility model is feedback controller by pressure, judges whether the pressure of internal vacuum chamber reaches a predetermined constant, can be according to the flow of the solution properties adjustment inflation of desiring the degasification purifying.
Description of drawings
Fig. 1: be the configuration diagram of the utility model embodiment.
Drawing reference numeral:
1 vacuum oscillation degasification purification devices, 10 oscillating units
12 vacuum unit, 121 vavuum pumps
122 pressure control air bleeding valves, 16 pressure control units
161 pressure gauges, 162 pressure back coupling controller
18 inflation unit, 181 charge valves
182 mass flow controllers, 22 solution accumulator tanks
24 vacuum chambers
The specific embodiment
See also Fig. 1, be configuration diagram of the present utility model.Vacuum oscillation degasification purification devices 1 comprises that a solution accumulator tank 22 is in order to ccontaining solution; One vacuum chamber 24, in order to put solution accumulator tank 22, wherein, vacuum chamber 24 has two openings: one in order to be connected to inflation unit 18, one in order to link a vacuum unit 12, wherein, inflation unit 18 is to be combined by a mass flow controller 182 and a charge valve 181, in order to vacuum chamber 24 inert gas injectings; Vacuum unit 12 is to be combined by a vavuum pump 121 and a pressure control air bleeding valve 122, in order to the gas of vacuum chamber 24 is extracted out, forms the state of vacuum; The bottom side of vacuum chamber 24 is provided with an oscillating unit 10, coats the bottom area and the contact of this solution accumulator tank 22, and drives this solution accumulator tank 22 vibrations by this oscillating unit 10; The opposite side of vacuum chamber 24 more is provided with a pressure control unit 16, comprises a pressure gauge 161 and pressure back coupling controller 162, in order to the action of control vacuum unit 12, the internal pressure of this vacuum chamber 24 of modulation.
When solution carries out degasification, purifying, utilize vacuum unit 12 that air in the vacuum chamber 24 is detached, at this moment, gas in the solution can slowly float toward solution surface, provide an oscillation action (can be ultrasonic wave) by oscillating unit 10, force the solution vibration in the solution accumulator tank 22, quicken bubble and impurity emersion solution surface in the solution, reach the purpose of removing bubble, impurity in the solution; Yet it is too fast when the frequency of oscillation of oscillating unit, cause solution in the solution accumulator tank 22 to vibrate when excessive, the situation that causes solution to splash easily, therefore, the utility model utilizes inflation unit 18 to pour into an inert gas to this vacuum chamber 24, the vibration of solution can not splashed solution because of expansion or the vibration of moment in the mode cushioning liquid accumulator tank 22 that is applied to inflate in the vacuum chamber 24.Moreover, owing to the based on very high purity of inert gas, therefore can not increase the impurity of solution inside because of pouring into of inert gas, can not carry out chemical reaction with solution yet; Wherein, because inflation unit 18 is to continue inert gas is poured into to vacuum chamber 24, therefore, vacuum chamber 24 pressure inside can rise along with the increase of inert gas, so, utilize the pressure of a pressure gauge 161 detecting vacuum chambers 24, and pass through pressure back coupling controller 162, judge whether vacuum chamber 24 pressure inside reach a predetermined constant, whether need start the inert gas release of vacuum unit 12 vacuum chamber 24 inside; That is, can be according to the characteristic of solution in the solution accumulator tank 22, come the pressure in the modulation vacuum chamber 24, advance (by inflation unit 18) by gas one and go out (by vacuum unit 12) and come pressure in the modulation vacuum chamber 24.Understandable, must there be the purpose that just can reach modulation vacuum chamber 24 internal pressures simultaneously in inflation unit 18 and vacuum unit 12.In addition, the mass flow controller 182 of inflation unit 18 is in order to the flow that provides the user to control the inert gas inflation, can be according to the flow of the solution properties adjustment inflation of desiring the degasification purifying.
Though the utility model discloses with specific embodiment; but it is not in order to limit the utility model; any those skilled in the art; the displacement of the equivalent assemblies of under the prerequisite that does not break away from design of the present utility model and scope, having done; or, all should still belong to the category that this patent is contained according to equivalent variations and modification that the utility model scope of patent protection is done.
Claims (7)
1. vacuum oscillation degasification purification devices is characterized in that comprising:
At least one solution accumulator tank, this solution accumulator tank device one solution;
One vacuum chamber is placed this solution accumulator tank, and has two openings;
One oscillating unit is arranged at the bottom of this vacuum chamber, coats and contact the bottom area of this solution accumulator tank;
One vacuum unit is connected with an opening of this vacuum chamber;
One inflation unit is connected with another opening of this vacuum chamber;
One pressure control unit, the one end is connected with this vacuum chamber, and the other end is connected with this vacuum unit.
2. vacuum oscillation degasification purification devices as claimed in claim 1 is characterized in that: this pressure control unit comprises a pressure and takes into account pressure back coupling controller.
3. vacuum oscillation degasification purification devices as claimed in claim 1 is characterized in that: this vacuum unit comprises a vavuum pump and a pressure control air bleeding valve.
4. vacuum oscillation degasification purification devices as claimed in claim 3 is characterized in that: this pressure control air bleeding valve is by this pressure back coupling controller control.
5. vacuum oscillation degasification purification devices as claimed in claim 1 is characterized in that: this inflation unit more comprises a charge valve and a mass flow controller.
6. vacuum oscillation degasification purification devices as claimed in claim 5, it is characterized in that: an inert gas is continued to pour in this vacuum chamber by described inflation unit.
7. vacuum oscillation degasification purification devices as claimed in claim 1 is characterized in that: this vacuum chamber is the space of a sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620133414 CN200951336Y (en) | 2006-09-26 | 2006-09-26 | Vacuum oscillation equipment for air-removing purification |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620133414 CN200951336Y (en) | 2006-09-26 | 2006-09-26 | Vacuum oscillation equipment for air-removing purification |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200951336Y true CN200951336Y (en) | 2007-09-26 |
Family
ID=38809634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620133414 Expired - Fee Related CN200951336Y (en) | 2006-09-26 | 2006-09-26 | Vacuum oscillation equipment for air-removing purification |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200951336Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109854571A (en) * | 2019-04-10 | 2019-06-07 | 贵州电网有限责任公司 | A kind of parallel-connection type hydraulic press mechanism oil supply system and method |
| CN109915440A (en) * | 2019-04-09 | 2019-06-21 | 贵州电网有限责任公司 | A kind of the hydraulic oil off gas system and method for hydraulic mechanism |
-
2006
- 2006-09-26 CN CN 200620133414 patent/CN200951336Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109915440A (en) * | 2019-04-09 | 2019-06-21 | 贵州电网有限责任公司 | A kind of the hydraulic oil off gas system and method for hydraulic mechanism |
| CN109854571A (en) * | 2019-04-10 | 2019-06-07 | 贵州电网有限责任公司 | A kind of parallel-connection type hydraulic press mechanism oil supply system and method |
| CN109854571B (en) * | 2019-04-10 | 2024-02-23 | 贵州电网有限责任公司 | Parallel hydraulic mechanism oil supply system and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070926 Termination date: 20120926 |