CN200940159Y - Leading-out electrode sealing device for resistance chemical vapor deposition furnace - Google Patents
Leading-out electrode sealing device for resistance chemical vapor deposition furnace Download PDFInfo
- Publication number
- CN200940159Y CN200940159Y CN 200620079416 CN200620079416U CN200940159Y CN 200940159 Y CN200940159 Y CN 200940159Y CN 200620079416 CN200620079416 CN 200620079416 CN 200620079416 U CN200620079416 U CN 200620079416U CN 200940159 Y CN200940159 Y CN 200940159Y
- Authority
- CN
- China
- Prior art keywords
- electrode
- ring
- insulation covering
- vapor deposition
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a sealing device for resistor chemical gaseous deposition furnace electrode, which comprises a hearth tray positioned on the hearth, an electrode penetrating through the hearth tray, an upper insulation sheath and a lower insulation sheath which are positioned between the electrode and the hearth tray, and a locking nut which is under the lower insulation sheath and screwed up on the electrode, an insulation ring being arranged between the upper insulation sheath and the lower insulation sheath, a seal ring being arranged between the upper insulation sheath and the insulation ring as well as between the lower insulation sheath and the insulation ring. The utility model is simple in structure, reasonable in design, easy to install, excellent in airtightness, and long in service; in case the rubber seal ring over the insulation ring and the upper insulation sheath fails, the seal ring below the insulation ring can function.
Description
Technical field
The utility model relates to a kind of tightness system, and particularly a kind of resistance chemical vapor deposition stove draws the tightness system of electrode.
Background technology
At present, the electrode seals structure of drawing that is adopted on the resistance chemical vapor deposition stove is to place one deck rubber seal up and down between the insulation covering.Though this tightness system is installed simple, owing to have only one deck rubber seal to seal,, cause sealing gas leakage easily in case sealing-ring is aging, inefficacy, equipment in the stove and product slate are threatened.
The utility model content
The purpose of this utility model is the deficiency that exists at prior art, provides the resistance chemical vapor deposition stove of a kind of reasonable in design, simple in structure, good sealing effect and long service life to draw the tightness system of electrode.
The technical solution of the utility model is: a kind of resistance chemical vapor deposition stove draws the tightness system of electrode, comprise the furnace hearth plate 1 that is arranged on furnace bottom, pass drawing electrode 2 and being sleeved on last insulation covering 3 and the following insulation covering 5 that draws between electrode 2 and the furnace hearth plate 1 of furnace hearth plate 1, and be positioned at the below of following insulation covering 5 and be screwed in the set nut 6 that draws on the electrode 2, it is characterized in that: between last insulation covering 3 and following insulation covering 5, add dead ring 4, between last insulation covering 3 and dead ring 4, be provided with sealing-ring 7, also be provided with sealing-ring 7 between insulation covering 5 and the dead ring 4 down.
The utility model compared with prior art has the following advantages: the utility model is simple in structure, and is reasonable in design, is easy to good sealing effect, long service life are installed; After the rubber seal and the inefficacy of last insulation covering of dead ring top, the sealing-ring of dead ring below can be brought into play sealing function.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Embodiment
The utility model will be further described below in conjunction with accompanying drawing.
A kind of resistance chemical vapor deposition stove as shown in Figure 1 draws the tightness system of electrode, comprise the furnace hearth plate 1 that is arranged on furnace bottom, pass drawing electrode 2 and being sleeved on last insulation covering 3 and the following insulation covering 5 that draws between electrode 2 and the furnace hearth plate 1 of furnace hearth plate 1, and be positioned at the below of following insulation covering 5 and be screwed in the set nut 6 that draws on the electrode 2, set nut 6 is enclosed within to draw locks insulation covering 5 down on the electrode 2, last insulation covering 3 is by furnace hearth plate 1 and to draw electrode 2 chuckings fixing, between last insulation covering 3 and following insulation covering 5, add dead ring 4, between last insulation covering 3 and dead ring 4, be provided with sealing-ring 7, play the first resealing effect, also being provided with sealing-ring 7 between insulation covering 5 and the dead ring 4 down, play the second resealing effect.The described insulation covering 3 of going up is a textolite with following insulation covering 5 materials, and sealing-ring 7 materials are silicon rubber.
Claims (2)
1, a kind of resistance chemical vapor deposition stove draws the tightness system of electrode, comprise the furnace hearth plate (1) that is arranged on furnace bottom, pass drawing electrode (2) and being sleeved on last insulation covering (3) and the following insulation covering (5) that draws between electrode (2) and the furnace hearth plate (1) of furnace hearth plate (1), and be positioned at the below of following insulation covering (5) and be screwed in the set nut (6) that draws on the electrode (2), it is characterized in that: between last insulation covering (3) and following insulation covering (5), add dead ring (4), between last insulation covering (3) and dead ring (4), be provided with sealing-ring (7), also be provided with sealing-ring (7) between insulation covering (5) and the dead ring (4) down.
2, resistance chemical vapor deposition stove according to claim 1 draws the tightness system of electrode, it is characterized in that: described upward insulation covering (3) and following insulation covering (5) material are textolite, and sealing-ring (7) material is a silicon rubber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620079416 CN200940159Y (en) | 2006-07-20 | 2006-07-20 | Leading-out electrode sealing device for resistance chemical vapor deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620079416 CN200940159Y (en) | 2006-07-20 | 2006-07-20 | Leading-out electrode sealing device for resistance chemical vapor deposition furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200940159Y true CN200940159Y (en) | 2007-08-29 |
Family
ID=38746340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620079416 Expired - Lifetime CN200940159Y (en) | 2006-07-20 | 2006-07-20 | Leading-out electrode sealing device for resistance chemical vapor deposition furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200940159Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106332324A (en) * | 2016-08-30 | 2017-01-11 | 镇江裕太防爆电加热器有限公司 | High-temperature-resistant insulation connecting device |
| CN110397735A (en) * | 2015-08-10 | 2019-11-01 | 日本Itf株式会社 | Piston ring |
-
2006
- 2006-07-20 CN CN 200620079416 patent/CN200940159Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110397735A (en) * | 2015-08-10 | 2019-11-01 | 日本Itf株式会社 | Piston ring |
| CN110397735B (en) * | 2015-08-10 | 2020-12-22 | 日本Itf株式会社 | Piston ring |
| CN106332324A (en) * | 2016-08-30 | 2017-01-11 | 镇江裕太防爆电加热器有限公司 | High-temperature-resistant insulation connecting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20070829 |
|
| EXPY | Termination of patent right or utility model |