CN1994744A - Fluid jet apparatus - Google Patents
Fluid jet apparatus Download PDFInfo
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- CN1994744A CN1994744A CN 200610005728 CN200610005728A CN1994744A CN 1994744 A CN1994744 A CN 1994744A CN 200610005728 CN200610005728 CN 200610005728 CN 200610005728 A CN200610005728 A CN 200610005728A CN 1994744 A CN1994744 A CN 1994744A
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Abstract
The invention relates to a fluid ejector which comprises a base, a channel, an ejection hole and a deformer, wherein the channel extends along the first axle; the ejection hole is at the end of channel; the deformer comprises the first piezoelectric element the first elastic element; the first elastic element is above the base and connected to the first piezoelectric element; the channel is through the deformer to connect ejection hole; the first elastic element forms at least part of inner wall of channel; the fluid flows on the channel to be ejected via ejection hole; when the first piezoelectric element deforms via electric field, the first elastic element deforms along with the first piezoelectric element, to change the shape of inner wall of channel.
Description
Technical field
The present invention is about a kind of fluid ejection apparatus, especially in regard to a kind of fluid ejection apparatus of adjusting spray orifice size, fluid spray angle and speed.
Background technology
Because the progressing greatly day by day of micro-system (micro-machining) process technology, make the type of drive of micro-fluid ejecting device by thermal (thermal bubble) or piezoelectricity monotechnicses such as (piezoelectric), change into the mixed structure of Suresh Kumar.At first see also Fig. 1, disclose an inkjet-printing device 1 (Assisted drop-on demand inkjet printer) in preceding case EP 1116586 A1, it mainly comprises an oar shape member 2 (thermally-actuated paddle), a preceding base material 3 (front substrate), a back base material 4 (back substrate) and a heater 30 (heater).As shown in the figure, fluid flows through the manifold of 3,4 of forward and backward base materials, and via nozzle 3 ' (nozzle) ejection drop D, wherein oar shape member 2 sprays towards top spray orifice 3 ' in order to drive fluid, the heater 30 that is located at the nozzle 3 ' port of export (outlet) is the auxiliary usefulness of conduct then, so as to remedying the deficiency on oar shape member 2 powers.
In addition, another preceding case US 6536882 B1 (Inkjet printhead having substratefeedthroughs for accommodating conductors) also disclose similar fluid ejection apparatus, it mainly is to utilize heater to change the character of fluid, and then the direction side-play amount (deflection) that penetrates of controllable flow body.
Summary of the invention
The invention provides a kind of fluid ejection apparatus, comprise a base material, a runner, a spray orifice and a deformation mechanism.Described runner roughly extends axially towards one first, and described spray orifice is positioned at flow field end.Described deformation mechanism comprises one first piezoelectric member and one first elastic component, and first elastic component is arranged on the base material and connects first piezoelectric member, and described runner passes deformation mechanism and connects spray orifice.First elastic component forms at least a portion of described runner inner wall, and fluid is flowed through above-mentioned runner and penetrated by spray orifice.Wherein, when first piezoelectric member was subjected to an electric field action and is out of shape, first elastic component was out of shape with first piezoelectric member, and then changes the shape of described runner inner wall.
In a preferred embodiment, described first piezoelectric member has one first piezoelectrics and one second piezoelectrics, and described spray orifice is formed between first, second piezoelectrics, and when first, second piezoelectrics dilatancy, the aperture of described spray orifice dwindles; When first, second piezoelectrics contraction distortion, the aperture of described spray orifice increases.
In a preferred embodiment, described first elastic component has one first elastomer and one second elastomer, connect first, second piezoelectrics respectively, and first, second elastomer forms at least a portion of described runner inner wall, when expansion of first piezoelectrics and the contraction of second piezoelectrics, the described runner inner wall that is formed by first, second elastomer is with respect to the first axial deflection, so as to changing the injection direction of fluid.
In a preferred embodiment, it is one second axial that described first piezoelectric member is roughly parallel to, and above-mentioned second is axially perpendicular to first axially, and when described runner inner wall during with respect to the first axial deflection, described spray orifice is axially gone up in second and produced skew.
In a preferred embodiment, the described first piezoelectric member approximate vertical first is axial, and that described electric field is roughly parallel to is first axial.
In a preferred embodiment, it is one second axial that described first piezoelectric member and described electric field are roughly parallel to, wherein above-mentioned second be axially perpendicular to first axial.
In a preferred embodiment, described first piezoelectric member is embedded in first elastic component.
In a preferred embodiment, described first piezoelectric member is lead zirconate titanate (PZT) material.
In a preferred embodiment, described first elastic component is high molecular polymer (polymer) material.
In a preferred embodiment, described fluid ejection apparatus comprises a plurality of spray orifices and a plurality of runner, and first piezoelectric member also has one the 3rd piezoelectrics in addition, and first elastic component also has one the 3rd elastomer, and above-mentioned the 3rd elastomer connects the 3rd piezoelectrics.Wherein, described spray orifice is formed at respectively between first, second, third piezoelectrics, and described runner lays respectively between first, second, third elastomer, and described runner connects described spray orifice respectively.
The present invention also provides a kind of fluid ejection apparatus, comprises a base material, a runner, a spray orifice and a deformation mechanism.Described runner roughly extends axially towards one first, and described spray orifice is positioned at flow field end.Described deformation mechanism comprises one first elastic component, one first piezoelectric member, one second elastic component and one second piezoelectric member.Described first, second elastic component and first, second piezoelectric member are stacked on the described base material, and wherein first, second elastic component forms the part of described runner inner wall respectively, and fluid is flowed through described runner and penetrated by spray orifice.When first, second piezoelectric member at least wherein one be subjected to an electric field action and when being out of shape, described first, second elastic component at least wherein one produce distortion, and then change the shape of described runner.
In a preferred embodiment, described first elastic component is arranged on the base material and connects first piezoelectric member, and second elastic component is arranged on first piezoelectric member and connects second piezoelectric member.
In a preferred embodiment, described first piezoelectric member has one first piezoelectrics and one second piezoelectrics, first elastic component has one first elastomer and one second elastomer, above-mentioned first, second elastomer connects first, second piezoelectrics respectively, and first, second elastomer forms at least a portion of runner inner wall; When first, second piezoelectrics dilatancy, the aperture of described runner and spray orifice dwindles, and when expansion of first piezoelectrics and the contraction of second piezoelectrics, described runner is with respect to the first axial deflection, so as to changing the injection direction of fluid.
In a preferred embodiment, described second piezoelectric member has one the 3rd piezoelectrics and a four piezoelectrics, and described spray orifice is formed at the 3rd, between the four piezoelectrics, and when the 3rd, during the four piezoelectrics dilatancy, the aperture of described spray orifice dwindles; When the 3rd, during the four piezoelectrics contraction distortion, the aperture of described spray orifice increases.
In a preferred embodiment, described second elastic component has one the 3rd elastomer and one the 4th elastomer, above-mentioned the 3rd elastomer connects the first, the 3rd piezoelectrics, above-mentioned the 4th elastomer connection second, four piezoelectrics, when expansion of the 3rd piezoelectrics and four piezoelectrics contraction, described runner is with respect to the first axial deflection, so as to changing the injection direction of fluid.
In a preferred embodiment, it is one second axial that described first piezoelectric member is roughly parallel to, and above-mentioned second is axially perpendicular to first axially, and when runner during with respect to the first axial deflection, described spray orifice is axially gone up in second and produced skew.
In a preferred embodiment, the described first piezoelectric member approximate vertical first is axial, and that described electric field is roughly parallel to is first axial.
In a preferred embodiment, described first piezoelectric member is embedded in first elastic component.
In a preferred embodiment, described first piezoelectric member is lead zirconate titanate (PZT) material.
In a preferred embodiment, described first elastic component is high molecular polymer (polymer) material.
Description of drawings
Fig. 1 represents the schematic diagram of traditional inkjet-printing device;
Fig. 2 represents the top view of first embodiment among the present invention;
Fig. 3 represents the part sectioned view of first embodiment among the present invention;
Schematic diagram when Fig. 4 A, Fig. 4 B, Fig. 5 A, Fig. 5 B represent the distortion of first piezoelectric member among first embodiment;
Fig. 6 A, Fig. 6 B represent the schematic diagram of second embodiment among the present invention;
Fig. 7 A～Fig. 7 F represents the schematic diagram of the 3rd embodiment among the present invention;
Fig. 8 represents the schematic diagram of the 4th embodiment among the present invention;
Fig. 9 represents the schematic diagram of the 5th embodiment among the present invention; And
Figure 10 A, Figure 10 B represent the circular spray orifice top view be made up of first piezoelectric member and first elastic component.
The primary clustering symbol description
Inkjet-printing device～1
Oar shape member～2
Preceding base material～3
Nozzle～3 '
Back base material～4
Heater～30
Drop～D
Fluid ejection apparatus～5,6,8,9
First piezoelectric member～51P, 61P, 71P, 81P, 91P, 10P
First elastic component～51E, 61E, 71E, 81E, 91E, 10E
Outer surface～50
First piezoelectrics～51RP, 61RP, 711RP
Second piezoelectrics～51LP, 61LP, 711LP
The 3rd piezoelectrics～61CP, 712RP
The four piezoelectrics～712LP
Deformation mechanism～51,61,71
Base material～52,62,72
Spray orifice～53,63L, 63R, 73,83,103
Runner～54,64L, 64R, 74,84
Fluid～55,65,75,85
First elastomer～51RE, 61RE, 711RE
Second elastomer～51LE, 61LE, 712LE
The 3rd elastomer～61CE, 712RE
The 4th elastomer～712LE
The specific embodiment
At first see also Fig. 2, Fig. 3, this two figure represents top view and the part sectioned view of first embodiment among the present invention respectively.As shown in Figure 2, fluid ejection apparatus 5 in the present embodiment has one first piezoelectric member 51P, be arranged at an outer surface 50 of fluid ejection apparatus 5, the above-mentioned first piezoelectric member 51P comprises the first piezoelectrics 51RP and the second piezoelectrics 51LP of a pair of sheet, wherein between first, second piezoelectrics 51RP, 51LP, has a spray orifice 53, above-mentioned spray orifice 53 is L0 at the width of X-direction, fluid sprays to form liquid droplets via spray orifice 53 after can driving by a fluid jet actuator (not icon).
The detailed structure of relevant fluid ejection apparatus 5 sees also Fig. 3, described fluid ejection apparatus 5 mainly comprises a deformation mechanism 51 and a base material 52, wherein deformation mechanism 51 is arranged on the base material 52, comprises one first piezoelectric member 51P and one first elastic component 51E.As previously mentioned, the first piezoelectric member 51P comprises first, second piezoelectrics 51RP, 51LP, and it can adopt the piezoelectric of lead zirconate titanate (PZT) material; The first elastic component 51E then comprises one first elastomer 51RE and one second elastomer 51LE in addition, and it can adopt high molecular polymer (polymer) material.In particular, between first, second elastomer 51RE, 51LE, has a runner 54, above-mentioned runner 54 roughly extends towards one first axial (Z-direction), and pass base material 52 and be connected with the first elastic component 51E and then with spray orifice 53, wherein first, second elastomer 51RE, 51LE constitute the part inwall of above-mentioned runner 54, and fluid 55 can form liquid droplets via spray orifice 53 ejections of runner 54 ends.
In the present embodiment, the upper and lower surface of described first, second piezoelectrics 51RP, 51LP scribbles electrode layer (ELECTRODE), when first, second piezoelectrics 51RP, 51LP are subjected to the electric field action of vertical direction (Z-direction), can produce in horizontal direction (X-direction) and expand or contraction distortion, and can force first, second elastomer 51RE, the 51LE that are positioned at first, second piezoelectrics 51RP, 51LP below to produce distortion.Then see also Fig. 4 A, when first, second piezoelectrics 51RP, 51LP are subjected to an electric field action and when one second axial (X-direction) produces dilatancy, the aperture of spray orifice 53 is reduced into L1 by original width L0, and part runner 54 inwalls that are made of first, second elastomer 51RE, 51LE also can be along with first, second piezoelectrics 51RP, 51LP produce a linear deformation (shown in Fig. 4 A) simultaneously.In the case, because fluid 55 is subjected to the influence of spray orifice 53 and runner 54 reductions,, increase the flying speed after fluid 55 sprays simultaneously so can reduce injection flow effectively.
On the contrary, shown in Fig. 4 B, when first, second piezoelectrics 51RP, 51LP when X-direction produces contraction distortion, it is L2 that the aperture of spray orifice 53 is then increased by original width L0, part runner 54 inwalls that are made of first, second elastomer 51RE, 51LE are then expanded towards the outside simultaneously.In the case, because fluid 55 is subjected to the influence of spray orifice 53 and runner 54 increases,, can reduce the flying speed after fluid 55 sprays simultaneously so can increase injection flow effectively.
Then see also Fig. 5 A and Fig. 5 B, when the first piezoelectrics 51RP produced contraction distortion and the second piezoelectrics 51LP and produces dilatancy, part runner 54 inwalls that are made of first, second elastomer 51RE, 51LE were towards right-hand deflection (shown in Fig. 5 A); Otherwise when the first piezoelectrics 51RP produces dilatancy and the second piezoelectrics 51LP when producing contraction distortion, part runner 54 inwalls that are made of elastomer 51RE, 51LE are then towards left deflection (shown in Fig. 5 B).
As previously mentioned, when the suffered direction of an electric field of first, second piezoelectrics 51RP, 51LP produces the situation of an expansion one contraction mutually on the contrary, can change the direction and the shape of runner 54, spray orifice 53 positions then can produce the skew of appropriateness on X-direction simultaneously.Can be by above-mentioned principle in order to the spray angle of control and adjustment fluid 55, wherein when the deflection of first, second piezoelectrics 51RP, 51LP equated, the aperture of spray orifice 53 can roughly remain unchanged.
See also Fig. 6 A again, the figure shows the schematic diagram of second embodiment among the present invention.Fluid ejection apparatus 6 in the present embodiment comprises runner 64L, the 64R of a deformation mechanism 61, a base material 62, a plurality of spray orifice 63L, 63R and a plurality of correspondences, wherein deformation mechanism 61 is arranged on the base material 62, runner 64L, 64R pass base material 62 and deformation mechanism 61 in regular turn, and connect described spray orifice 63L, 63R respectively.As shown in the figure, above-mentioned deformation mechanism 61 comprises one first piezoelectric member 61P and one first elastic component 61E, wherein the first piezoelectric member 61P comprises first, second, third piezoelectrics 61RP, 61LP, the 61CP of sheet, and the first elastic component 61E then comprises first, second, third elastomer 61RE, 61LE, 61CE.
In Fig. 6 A, described first, second, third elastomer 61RE, 61LE, 61CE are arranged at first, second, third piezoelectrics 61RP, 61LP, 61CP below respectively, and wherein the upper and lower surface of first, second, third piezoelectrics 61RP, 61LP, 61CP scribbles electrode layer (ELECTRODE).In particular, when first, second, third piezoelectrics 61RP, 61LP, 61CP are subjected to the electric field action of vertical direction (Z-direction), (X-direction) produces and expands or contraction distortion in the horizontal direction, and then can change the shape of spray orifice 63L, 63R and runner 64L, 64R.
Then see also Fig. 6 B, when the 3rd piezoelectrics 61CP and the 3rd elastomer 61CE produce horizontal contraction distortion on X-direction, the first piezoelectrics 61RP and the first elastomer 61RE on right side produce horizontal contraction distortion accordingly, can make the aperture of spray orifice 63R increase to increase the injection flow of fluid 65 whereby; Simultaneously, the position can change the heading of fluid 65 by spray orifice 63L ejection whereby at the second piezoelectrics 61LP and the horizontal expansion distortion that the second elastomer 61LE produces identical deflection accordingly in left side.Based on above-mentioned principle, present embodiment can be according to plural different spray orifice demands in the middle of the fluid ejection apparatus, suitably adjust the profile of each spray orifice and runner, so as to controlling volume, flying speed and the heading that sprays fluid effectively, then repeat no more as for other similar variation effect.
Then see also Fig. 7 A, the figure shows the schematic diagram of the 3rd embodiment among the present invention.As shown in the figure, deformation mechanism 71 in the present embodiment is superimposed with each other and is formed by first, second piezoelectric member 711P, 712P and first, second elastic component 711E, 712E.Wherein, the first piezoelectric member 711P has first, second piezoelectrics 711RP, 711LP, the first elastic component 711E has first, second elastomer 711RE, 711LE, the second piezoelectric member 712P has the 3rd, four piezoelectrics 712RP, 712LP, and the second elastic component 712E has the 3rd, the 4th elastomer 712RE, 712LE.Wherein, scribble electrode layer (ELECTRODE) respectively, when being subjected to the electric field action of vertical direction (Z-direction), can producing in horizontal direction (X-direction) and expand or contraction distortion on the upper and lower surface of piezoelectrics 711RP, 711LP, 712RP, 712LP.
Shown in Fig. 7 B, when the first piezoelectrics 711RP produces contraction distortion and second piezoelectrics 711LP generation dilatancy, by formed part runner 74 inwalls of first, second elastomer 711RE, 711LE towards right-hand deflection, free-ended up the 3rd piezoelectrics 712RP in this moment position and the 3rd elastomer 712RE then along with the first piezoelectrics 711RP towards right-hand skew; In like manner, this moment the 4th elastomer 712LE and four piezoelectrics 712LP along with the first piezoelectrics 711RP towards right-hand skew, and make the position of spray orifice 73 equally towards right-hand skew.
Then see also Fig. 7 C, when first, second piezoelectrics 711RP, 711LP all produce dilatancy in X-direction, can reach the effect of dwindling runner 74 and spray orifice 73.In like manner, see also Fig. 7 D, Fig. 7 E, also can only act in the present embodiment that an electric field is free-ended the 3rd in the top, four piezoelectrics 712RP, 712LP, wherein when the 3rd piezoelectrics 712RP produces contraction distortion and four piezoelectrics 712LP and produces dilatancy, by formed part runner 74 inwalls of the 3rd, the 4th elastomer 712RE, 712LE towards right side deflection (shown in Fig. 7 D); Yet, also can make the 3rd simultaneously, four piezoelectrics 712RP, 712LP produce dilatancy in X-direction, so as to the width (shown in Fig. 7 E) that dwindles spray orifice 73.
Then see also Fig. 7 F again, also can apply electric field in the present embodiment simultaneously, and then side by side change the profile of runner 74 and spray orifice 73 in first, second piezoelectric member 711P, 712P.Shown in Fig. 7 F, by making the first piezoelectrics 711RP contraction distortion, and make the second piezoelectrics 711LP and the 3rd, four piezoelectrics 712RP, 712LP produce dilatancy simultaneously, not only can change the shape of runner 74 significantly, the purpose that more can reach skew spray orifice 73 positions and dwindle spray orifice 73 apertures.Main in the present embodiment system is by the deformation mechanism of two-layer, can optionally suitably adjust the aperture and the position of spray orifice, and can change the shape of runner, and then volume, flying speed and the heading of control injection fluid, similarly change kenel as for other and then repeat no more.
Then see also Fig. 8 again, the figure shows the schematic diagram of the 4th embodiment among the present invention.Fluid ejection apparatus 8 in the present embodiment is the two groups of above first piezoelectric member 81P and the first elastic component 81E that are superimposed with each other, so as to the deformation mechanism 81 that forms a lamination type, can be lifted at the variability on injection flow or the heading thus by the principle of distortion superposition.
See also Fig. 9 again, the figure shows the schematic diagram of the 5th embodiment among the present invention.Fluid ejection apparatus 9 in the present embodiment also can adopt driving electric field and mechanically deform to be the first piezoelectric member 91P of horizontal direction, the above-mentioned in particular first piezoelectric member 91P is embedded in the first elastic component 91E and forms an embedded composite construction (EMBEDDED COMPOSITE), can provide higher deflection whereby.Yet, spray orifice external form in the present invention is not limited in rectangle, for example Figure 10 A, Figure 10 B promptly show the top view after the first piezoelectric member 10P and the first elastic component 10E make up, and wherein form a deformation mechanism with circular spray orifice 103 outward appearances on the XY plane.
In sum, the invention provides a kind of fluid ejection apparatus, can cause the change of spray orifice profile, in fluid ejection process, can adjust with runner the spray orifice size, simultaneously to reach the purpose that changes injection flow, injection direction and speed by deformation mechanism.The present invention does not need to change fluid properties and can reach described effect by heater, so can be widely used among the systems such as general inkjet-printing device, micro-injection propulsion system and biomedical science and technology.
Though the present invention with described preferred embodiment openly as above; right its is not in order to qualification the present invention, any insider, without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (20)
1. fluid ejection apparatus comprises:
One base material;
One runner roughly extends axially towards one first;
One spray orifice is positioned at this flow field end; And
One deformation mechanism, comprise one first piezoelectric member and one first elastic component, this first elastic component is arranged on this base material and connects this first piezoelectric member, this runner passes this deformation mechanism and connects this spray orifice, and this first elastic component forms at least a portion of this runner inner wall, and this fluid is flowed through this runner and penetrated by this spray orifice;
Wherein, when this first piezoelectric member is subjected to an electric field action and when being out of shape, this first elastic component is with this first piezoelectric member distortion, and then changes the shape of this runner inner wall.
2. fluid ejection apparatus according to claim 1, it is characterized in that, this first piezoelectric member has one first piezoelectrics and one second piezoelectrics, this spray orifice is formed between these first, second piezoelectrics, when this first, second piezoelectrics dilatancy, the aperture of this spray orifice dwindles, and when this first, second piezoelectrics contraction distortion, the aperture of this spray orifice increases.
3. fluid ejection apparatus according to claim 2, it is characterized in that, this first elastic component has one first elastomer and one second elastomer, connect this first, second piezoelectrics respectively, and this first, second elastomer forms at least a portion of this runner inner wall, when this first piezoelectrics expand and this second piezoelectrics when shrinking, this runner inner wall that is formed by this first, second elastomer is with respect to this first axial deflection, so as to changing the injection direction of this fluid.
4. fluid ejection apparatus according to claim 1, it is characterized in that it is one second axial that this first piezoelectric member is roughly parallel to, this second is axially perpendicular to that this is first axial, when this runner inner wall during with respect to this first axial deflection, this spray orifice second is axially gone up and is produced skew in this.
5. fluid ejection apparatus according to claim 1 is characterized in that, this is first axial for this first piezoelectric member approximate vertical, and this electric field is roughly parallel to, and this is first axial.
6. fluid ejection apparatus according to claim 1 is characterized in that, it is one second axial that this first piezoelectric member and this electric field are roughly parallel to, and this second is axially perpendicular to that this is first axial.
7. fluid ejection apparatus according to claim 1 is characterized in that first piezoelectric member is embedded in first elastic component.
8. fluid ejection apparatus according to claim 1 is characterized in that, this first piezoelectric member is the lead zirconate titanate material.
9. fluid ejection apparatus according to claim 1 is characterized in that, this first elastic component is the high molecular polymer material.
10. fluid ejection apparatus according to claim 1, it is characterized in that, this fluid ejection apparatus comprises a plurality of spray orifices and a plurality of runner, this first piezoelectric member also has one the 3rd piezoelectrics, this first elastic component also has one the 3rd elastomer, the 3rd elastomer connects the 3rd piezoelectrics, described spray orifice is formed at respectively between these first, second, third piezoelectrics, described runner lays respectively between this first, second, third elastomer, and described runner connects described spray orifice respectively.
11. a fluid ejection apparatus comprises:
One base material;
One runner roughly extends axially towards one first;
One spray orifice is positioned at this flow field end; And
One deformation mechanism, comprise one first elastic component, one first piezoelectric member, one second elastic component and one second piezoelectric member, and this first, second elastic component and this first, second piezoelectric member are stacked on this base material, this first, second elastic component forms the part of this runner inner wall respectively, and this fluid is flowed through this runner and penetrated by this spray orifice;
Wherein, when this first, second piezoelectric member at least one of them person be subjected to an electric field action and when being out of shape, this first, second elastic component one of them person at least produces distortion, and then changes the shape of this runner.
12. fluid ejection apparatus according to claim 11 is characterized in that, this first elastic component is arranged on this base material and connects this first piezoelectric member, and this second elastic component is arranged on this first piezoelectric member and connects this second piezoelectric member.
13. fluid ejection apparatus according to claim 12, it is characterized in that, this first piezoelectric member has one first piezoelectrics and one second piezoelectrics, this first elastic component has one first elastomer and one second elastomer, connect respectively this first, second piezoelectrics, and this is first years old, second elastomer forms at least a portion of this runner inner wall, when this first, during the second piezoelectrics dilatancy, the aperture of this runner and this spray orifice dwindles, when this first piezoelectrics expansion and the contraction of this second piezoelectrics, this runner is with respect to this first axial deflection, so as to changing the injection direction of this fluid.
14. fluid ejection apparatus according to claim 13, it is characterized in that, this second piezoelectric member has one the 3rd piezoelectrics and a four piezoelectrics, this spray orifice is formed at the 3rd, between the four piezoelectrics, when the 3rd, during the four piezoelectrics dilatancy, the aperture of this spray orifice dwindles, and when the 3rd, during the four piezoelectrics contraction distortion, the aperture of this spray orifice increases.
15. fluid ejection apparatus according to claim 14, it is characterized in that, this second elastic component has one the 3rd elastomer and one the 4th elastomer, the 3rd elastomer connects this first, the 3rd piezoelectrics, the 4th elastomer connect this second, four piezoelectrics, when expansion of the 3rd piezoelectrics and the contraction of this four piezoelectrics, this runner is with respect to this first axial deflection, so as to changing the injection direction of this fluid.
16. fluid ejection apparatus according to claim 11, it is characterized in that it is one second axial that this first piezoelectric member is roughly parallel to, this second is axially perpendicular to that this is first axial, when this runner during with respect to this first axial deflection, this spray orifice second is axially gone up and is produced skew in this.
17. fluid ejection apparatus according to claim 11 is characterized in that, this is first axial for this first piezoelectric member approximate vertical, and this electric field is roughly parallel to, and this is first axial.
18. fluid ejection apparatus according to claim 11 is characterized in that, first piezoelectric member is embedded in first elastic component.
19. fluid ejection apparatus according to claim 11 is characterized in that, this first piezoelectric member is the lead zirconate titanate material.
20. fluid ejection apparatus according to claim 11 is characterized in that, this first elastic component is the high molecular polymer material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610005728 CN1994744A (en) | 2006-01-06 | 2006-01-06 | Fluid jet apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610005728 CN1994744A (en) | 2006-01-06 | 2006-01-06 | Fluid jet apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1994744A true CN1994744A (en) | 2007-07-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610005728 Pending CN1994744A (en) | 2006-01-06 | 2006-01-06 | Fluid jet apparatus |
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| CN (1) | CN1994744A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103640337A (en) * | 2013-12-11 | 2014-03-19 | 晏石英 | Inkjet printing head |
| CN108624971A (en) * | 2018-05-07 | 2018-10-09 | 京东方科技集团股份有限公司 | Micro fluidic device and preparation method thereof |
-
2006
- 2006-01-06 CN CN 200610005728 patent/CN1994744A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103640337A (en) * | 2013-12-11 | 2014-03-19 | 晏石英 | Inkjet printing head |
| CN108624971A (en) * | 2018-05-07 | 2018-10-09 | 京东方科技集团股份有限公司 | Micro fluidic device and preparation method thereof |
| CN108624971B (en) * | 2018-05-07 | 2020-04-24 | 京东方科技集团股份有限公司 | Microfluidic device and preparation method thereof |
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