CN1989389A - Speckle sizing and sensor dimensions in optical positioning device - Google Patents
Speckle sizing and sensor dimensions in optical positioning device Download PDFInfo
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- CN1989389A CN1989389A CN 200580024624 CN200580024624A CN1989389A CN 1989389 A CN1989389 A CN 1989389A CN 200580024624 CN200580024624 CN 200580024624 CN 200580024624 A CN200580024624 A CN 200580024624A CN 1989389 A CN1989389 A CN 1989389A
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Abstract
One embodiment relates to an optical displacement sensor for sensing transverse displacement of a data input device relative to a surface by determining displacement of optical features in a succession of frames. The sensor includes at least a coherent light source (306), illumination optics (308) to illuminate a portion of the surface (304), imaging optics (310), and a first array (302) of photosensitive elements having a periodic distance. The illuminator and the detector are configured to produce on the first array (302) of photosensitive elements an intensity pattern of light reflected from the illuminated portion of the surface. The intensity pattern comprises a plurality of speckles having an average speckle diameter which is between one half and two times the periodic distance of the array (302).
Description
The cross reference of related application
The claimed exercise question of the application is the U.S. Provisional Patent Application No.60/573062 (applying date: on May 21st, 2004 of " optical position detection device based on speckle with the speckle size of mating with size sensor "; Inventor: Clinton B.Carlisle, Jahja I.Trisnadi, Charles B.Roxlo and David A.LeHoty) rights and interests.Here with reference to the full text of having quoted the disclosure of above-mentioned U.S. Provisional Patent Application.
The also claimed exercise question of the application is the U.S. Provisional Patent Application No.60/573075 (applying date: on May 21st, 2004 of " having detector array and optical position detection device that use the various combination of sharing staggered light activated element "; Inventor: David A.LeHoty, Douglas A.Webb, Charles B.Roxlo, Clinton B.Carlisle and Jahja I.Trisnadi) rights and interests.Here with reference to the full text of having quoted the disclosure of above-mentioned U.S. Provisional Patent Application.
Technical field
The present invention relates generally to optical positioning device (OPD) and use optical positioning device to detect the method that moves.
Background technology
Can use indicating equipment, for example computer mouse or tracking ball, input data and be connected personal computer and workstation in personal computer and workstation.Such indicating equipment can relocate cursor apace on monitor, and is useful in many texts, database and graphic package.The user for example by rolling mouse on a surface so that cursor move and move and the proportional distance of mouse moving is controlled cursor along certain direction.In addition, can use static equipment left-hand seat mobile and reach identical purpose.
Computer mouse has two versions: optics version and mechanical version.Roating sphere of the general use of mechanical type mouse detects mobile, and a pair of shaft encoder that use contacts with ball produces computing machine for the used digital signal of moving cursor.The problem that the mechanical type mouse exists is, after the use that continues owing to the sum of errors fault appears in reasons such as dirt accumulation easily.In addition, the particularly motion of shaft encoder and the probable life that the final wearing and tearing that produce must limit equipment of mechanical elements.
A solution of the problem that exists for mechanical type mouse discussed above has been developed optical mouse.Because optical mouse comparison firm and durable and pointing accuracy preferably can be provided is popular so optical mouse has become.
The main routine techniques that is used for optical mouse relies on the light emitting diode (LED) on a surface of glancing incidence illumination, capture CMOS (complementary metal oxide semiconductor (CMOS)) detecting device of a two dimension of gained image and related consecutive image to determine the software of direction, distance and speed that mouse moves.This technology all can obtain good precision in the ordinary course of things, but runs into the problem that optical efficiency is low and the Flame Image Process requirement is quite high.
Another kind of disposal route is to use the one-dimensional array of optical sensor or detecting device such as photodiode.Capture surperficial consecutive image by imaging optical system, said consecutive image is converted on the photodiode, and compare to detect mouse moving.Can divide into groups directly to connect photodiode so that motion detection.Do the requirement that has just reduced photodiode like this, can carry out simulation process fast.The example of such mouse is disclosed in people's such as Dandliker U.S. Patent No. 5907152.
The difference of disclosed mouse of people such as Dandliker and standard technique is that also the former has used coherent source, as laser instrument.The random strength that the light that leaves rough surface from the scattering of coherent source produces the light be referred to as speckle distributes.Use has several advantages based on the pattern of speckle, comprising effectively based on the generation of the light of laser instrument and even the image of high-contrast under the illumination of vertical incidence.This just can obtain the higher system of efficient and can save current drain, and this is useful in wireless application, thus extending battery life.
Though compared tangible improvement with the optical mouse based on luminous electric diode of routine, yet these can not be entirely satisfactory owing to a series of reasons based on the equipment of speckle.Specifically, use the mouse of laser speckle also not reach the common permissible accuracy in current mouse field now, this precision wishes that usually the tracking error that reaches is less than about 0.5% or 0.5%.
Disclosure discussion of the present invention also provides solution for some problem of existing optical mouse and other similar optical pointing device.
Summary of the invention
An embodiment relates to optical displacement sensor, is used for by determining at the displacement detecting data input device of the continuous frame optical signature transversal displacement with respect to a surface.This sensor comprises: illumination optics device, the imaging optical device at least one coherent source, a part of said surface of illumination and have first array of photosensors of periodic distance.Luminaire is become the illumination section intensity of light reflected pattern that can on first array of light activated element, produce from the surface with detector configurations.Intensity pattern comprises a plurality of speckles, and the average speckle diameter of speckle is between 1/2nd and 2 times of the periodic distance of said array.
Another embodiment relates to the method that moves that data input device crosses a surface that detects.The throw light on part on said surface of the luminaire that use has a coherent source, and reflection is from the light of the illumination section on said surface.This light is mapped on the array of detector element, so that the light on the array comprises the speckle pattern with average speckle diameter.By this array detection speckle pattern.Said array is included in the periodicity between 1/2nd and 2 times of average speckle diameter.
Another embodiment relates to a kind of optical positioning device, and said optical positioning device comprises LASER Light Source and detecting device, and LASER Light Source is included in first array that first dimension has periodic distance with a zone on the optical illumination surface of a wavelength, detecting device.Said optical positioning device further comprises optical devices, and these optical devices comprise a numerical aperture in first dimension, thereby the speckle pattern that has an average speckle diameter in first dimension is mapped on the detecting device from illuminated zone.In the numerical aperture of first dimension at wavelength divided by between 1/2nd and 2 times of periodic distance of first dimension.
Other embodiment is also disclosed.
Description of drawings
From detailed description and accompanying drawing subsequently, can understand these and other each feature and advantage of the present invention more all sidedly, but on the specific embodiment shown in this should not be limited in appending claims, specific embodiment only is used for explanation and understands, here:
Figure 1A and 1B illustrate respectively from the diffraction of light figure of smooth flat reflection and the speckle from the interference of light figure of rough surface reflection;
The speckle of Fig. 1 explanation from the interference of light figure of rough surface reflection;
Fig. 2 is the mouse function calcspar based on speckle according to one embodiment of the present of invention;
Fig. 3 is the calcspar according to the photodiode array of one embodiment of the present of invention;
Fig. 4 describes array of detector elements and the width of element wherein and the synoptic diagram of length dimension;
Fig. 5 provides a curve, and expression is for average and the depth of modulation that do not average of length L of the sensor that disposes according to one embodiment of the present of invention.
Embodiment
The problem that speckle detects
The problem of existing OPD based on speckle is that the speckle in the imaging plane is sometimes too little, so that can not accurately detect.This has just reduced sensitivity and the accuracy of OPD.A Xiang Guan problem is therewith, and speckle size increases to such an extent that may obviously reduce final signal noise ratio too much.
Another problem of existing OPD based on speckle is that the graphical analysis of speckle pattern is very sensitive for the statistical fluctuation of speckle pattern.Produce because speckle is the phase randomization by the coherent light of scattering, thus actual observation to the local pattern that speckle showed may not have the average speckle size of expecting.In other words, though speckle has definite size and distribution on average, local pattern may not be inconsistent with this mean value.
As discussed in more detail below, one aspect of the present invention discloses the solution for two problems of the above-mentioned discussion of the statistical fluctuation of speckle detection and speckle pattern.
OPD embodiment disclosed herein
The disclosure relates generally to be used for the sensor of optical positioning device (OPD), and relates to basis from the said sensor of displacement detecting of the random strength distribution patterns (being referred to as speckle) of the light of a surface reflection and the method that relatively moves between the said surface.OPD includes, but is not limited to optical mouse or the tracking ball to personal computer input data.
So-called " embodiment " in instructions or " embodiment " refer to and comprise certain features, structure or the feature of describing in connection with the embodiment at least one embodiment of the present invention.The term " in one embodiment " that occurs everywhere at instructions might not all refer to same embodiment.
In the ordinary course of things, the sensor that is used for OPD comprises: have light source and illumination optics device so that the luminaire on illumination part surface; Detecting device with a series of light activated elements and imaging optical device; Combination from each signal of light activated element so that produce the signal Processing or the mixed-signal electronics of output signal by detecting device.
In one embodiment, detecting device and mixed-signal electronics are to use the CMOS process of standard and device fabrication to come out.Preferably, the simplification signal Processing configuration by using the structured illumination that can produce uniform phase front and heart speckle imaging far away and using the combination of analog-and digital-electronic equipment of sensor of the present invention and method provides optically effectively detection architecture.This architecture has reduced to be exclusively used in the amount of electrical power of the offset estimation of signal Processing and sensor.Have been found that use this speckle detection technique and according to the present invention suitably the sensor of configuration can satisfy or surpass usually all properties standard for the OPD expectation, comprising maximum displacement speed, accuracy and tracking error speed percentage.
Displacement transducer introduction based on speckle
That this part discusses that applicant understands and believe firmly principle of operation based on the displacement transducer of speckle.Though these principle of operation are useful for understanding, do not expect these former comprehend limited embodiment of the present disclosure with there is no need.
With reference to Figure 1A, the laser of indicated wavelength is described as first incident wave 102 and second incident wave 104 to a surface, each phase of wave produces an incident angle θ for normal to a surface.So the cycle that produced is the diffraction pattern 106 of λ/2sin θ.
In contrast, with reference to Figure 1B, have any common surface greater than the morphologic scrambling of the size of light wavelength (that is, approximately greater than 1 micron) and all trend towards light 114 is scattering into a complete semisphere with lambert's form roughly.If use coherent source such as laser, then the scattered light of spatial coherence will produce complicated interference figure 116 when detecting with the square law detecting device with finite aperture.The complex interference pattern 116 of this clear zone and dark space is referred to as speckle.The definite characteristic of speckle pattern 116 and contrast depend on the spatial coherence degree of surperficial degree of roughness, light wavelength and light and the optical devices of light gathering or imaging.Though speckle pattern 116 is normally very complicated, therefore but, when laterally moving past laser and optical devices and detector module, lip-deep certain position can come this position on the identified surface with speckle pattern 116 by certain part of any rough surface of optical devices imaging feature of always having any different.
For the spatial frequency of being set by the effective aperture of optical devices, the expectation speckle reaches all sizes, and the digital aperture with it defines traditionally, and NA=sin θ is shown in Figure 1B.Suggestion [the J.W.Goodman that abides by Goodman, " statistical property of laser speckle pattern " in " laser speckle and relevant existing picture " edited by J.C.Dainty, theme in applied physics the 9th volume, Springer-Verlag (1984), particularly referring to the 39-40 page or leaf], represent the statistical distribution of size with the auto-associating of speckle intensity." on average " speckle diameter can be defined as
Here, λ is relevant light wavelength.
What is interesting is it is also noted that the spectral density of the spatial frequency of speckle intensity according to Wiener Hopf technique (Wiener Khintchine) theory, is the Fourier transform of intensity auto-associating simply.The thinnest possible speckle α
Min=λ/2NA is set from this situation that can not occur of the destructive interference of light of " inside " from the terminal light 118 of Figure 1B (that is, ± θ light) and contribution by main contribution.Therefore, be f by spatial frequency
Co=1/ (λ/2NA) or 2NA/ λ.
Be noted that for can be different in the image with numerical aperture along the spatial frequency of orthogonal dimension (for example saying y) along the numerical aperture of the spatial frequency of one dimension (for example saying x).This for example may cause by optical aperture, perhaps causes that by the lens of distortion said optical aperture is grown (for example being an ellipse rather than circle) at one dimension than another dimension.In these cases, speckle pattern 116 also is anisotropic, and average speckle size will be different at bidimensional.
An advantage based on the displacement transducer of laser speckle is the illumination light operation that this sensor can arrive in order to the incident angle near normal.Use imaging optical device and use the sensor that arrives the incoherent light of rough surface with grazing angle also to can be used for transversal displacement and detect.Yet, owing to use the grazing angle of illumination in image, to produce the bright-dark shade in the surperficial area of suitable size, so the intrinsic optical efficiency of this system itself is low, because sizable part of light is left detecting device with reflection way and is reflected away, for the image that forms without any contribution.On the contrary, illumination light can be effectively utilized, the high displacement transducer of optical efficiency can be developed thus than great share from LASER Light Source based on the displacement transducer of speckle.
Be used for open design based on the displacement transducer of speckle
Following detailed description describe to be used the such architecture based on the displacement transducer of laser speckle of of CMOS photodiode, the digital signal processing circuit and the low power sources of simulating signal combinational circuit, suitable quantity have wherein been utilized, for example the vertical cavity surface emitting laser of 850 nanometers (VCSEL).Though the details of some enforcement has been discussed in the detailed description below, but those of ordinary skill in the art should be realized that, can utilize different light sources, detecting device or light activated element, and/or the different circuit of composite signal and do not depart from design of the present invention and scope.
Referring now to accompanying drawing 2 and 3 mouses of describing according to one embodiment of the present of invention based on speckle.
Fig. 2 is the functional schematic based on the system 200 of speckle according to one embodiment of the present of invention.System 200 comprises: LASER Light Source 202, illumination optics device 204, imaging optical device 208, a plurality of CMOS photodiode arrays 210 of at least two groups, front portion 212, signal processing circuit 214 and interface circuit 216.Can photodiode array 210 be provided can provide displacement measurement along two Z-axis x and y.In front portion 212, use passive electronic components to make up photo diode sets in each array so that the group signal to be provided.Method by signal processing circuit 214 usefulness algebraically can make up said group of signal subsequently, and (x, y) signal provide relevant OPD information along the size and Orientation of the displacement of x and y direction to produce one.Should (x, y) can convert to by interface circuit 218 can be by x, the y data 220 of OPD output for signal.Use the sensor of this detection technique to have to be referred to as the array of the staggered linear photodiode group of " differential comb arrays ".
Fig. 3 represents the overall arrangement of a kind of like this photodiode array 302 (along an axle), surface 304 wherein is by 308 illuminations of a coherent source (for example vertical cavity surface emitting laser (VCSEL) 306) and illumination optics device, and wherein in array 302 combination of interleaved set as the Periodic filter of the spatial frequency of the light-dark signal that produces by speckle pattern.
The speckle that is produced by rough surface 304 utilizes imaging optical device 310 to be mapped to detector plane.Preferably, imaging optical device 310 is the heart far away for optimum performance.
In one embodiment, in two independently orthogonal arrays, finish comb-array detection, to obtain the estimated value of displacement along x and y direction.In Fig. 3, express the smaller versions of such array 302.
Each array in sensor is that the individual photo diode sets of N is formed by quantity, and it is that the individual photodiode (PD) of N arranges to form a MN linear array that each group has quantity.In embodiment as shown in Figure 3, each group is made up of 4 photodiodes (4 PD) that are referred to as 1,2,3,4.Be electrically connected (being connected together) for PD1 from each group thus form a group, also have PD2, PD3, PD4 similarly, draw 4 wire size lines from array.Electric current of their correspondences or signal are I
1, I
2, I
3, I
4These signals (I
1, I
2, I
3, I
4) can be referred to as to organize signal.By using difference analogue circuit 312 to produce the differential current signal 314 (I of homophase
13)=I
1-I
3, and by using difference analogue circuit 316 to produce the differential current signal 318 (I of quadratures
24)=I
2-I
4, can realize that background suppresses (and signal attenuation).These homophases and signal quadrature can be referred to as the row signal.Compare I
13And I
24Phase place, can detect mobile direction.
Preferably, for the introducing of the phase error that suppresses to be directly changed into displacement error, sensor of the present invention has used a plurality of comb arrays.And, though what described here embodiment used is " 4N " scheme of each array, but the ultimate principle of this system design (through suitable change) can be applied to other array configurations or scheme fully, for example 3N, 5N, 6N, 7N, 8N, or the like.The detecting device every three that term " 4N " refers to wherein links together and resulting 4 detector arrays that photo-signal will be subtracted each other each other, as described in people's such as Dandliker U.S. Patent No. 5907152.Yet, being used to make up the suitable scheme of these signals, many other groupings also are possible.
Mate for the speckle size with respect to detector spacings
As discussed above, the problem of existing OPD based on speckle comprise be difficult to detect less speckle and when detecting bigger speckle signal dwindle.The application provides effective solution by the configuration optical devices for these problems, disposes these optical devices so that average speckle diameter α is the specific factor or near this specific factor, this factor is greater than the width w of element in the detecting device.In addition, can also configuration detector, so that the width w of detector element is the specific part of average speckle diameter α or near this specific part.
Consider to have a linear comb array of MN detector element, here N is the number of the group in the array, and M element arranged each group so that the spacing of array is Mw.In this case, according to the preferred embodiments of the present invention, optical devices are configured to produce average speckle diameter α=λ/NA, this is that provide according to following equation or approximate providing.
α=Mw (equation 2)
More usually, optical devices are configured to produce an average speckle diameter, this average speckle diameter multiply by in element width between 1/2nd and 2 times of M.From another viewpoint, preferably detector element is configured to have the width w that provides that can provide according to following equation or approximate:
W=α/M (equation 3)
More usually, the element width that can the configuration detector element makes this detector element in average speckle diameter divided by between 1/2nd and 2 times of M.
Use the 4N scheme (that is, the M=4 here among) the specific detectors embodiment as shown in Figure 3, be configured to make average speckle diameter α preferably to mate with detector element width w optical devices according to following equation:
α=Mw=4w (equation 4)
The coupling of this size is because following reason is the best or approaching best.If speckle is obviously bigger, average speckle will cover more than the whole cycle of array.In this case, the electric current that produces on each signal wire just faintly depends on the position of speckle, and this is because of several photodiodes that once throw light on from same speckle.On the other hand, if speckle ratio sensor element width w is much smaller, all many speckles can appear on each detector element.This will cause significantly and the bias light electric current of speckle location independent, and the performance of OPD is descended.Therefore according to one embodiment of the present of invention, for the configuration of a kind of like this " 4N ", average speckle diameter is between 1/2nd and 2 times of detector element width.
Disclosing the spatial frequency that exists in speckle image in the document of relevant speckle has a scope, and such pectination detecting device can be considered to extract a specific spatial frequency (corresponding to detector spacings) from this scope.The applicant thinks, when speckle size according to equation 2 during with detector array coupling or approximate match, the intensity maximum of movable signal, and will not expect that the background that occurs reduces to minimum.
Be noted that in numerical aperture average speckle diameter also is different under the different situation of different directions, and be different with the y matching condition for x.Be parallel to the array of x axle orientation for major axis, the average speckle diameter of x direction need with the pitch match in the x orientation measurement.
Be noted that also detector spacings is to be determined by detecting device equispaced axially.In certain embodiments, detecting device separates (periodically) regularly with fixing spacing, but for detector scheme described herein, does not need perfect periodicity.If detecting device is not to separate regularly with fixing spacing, but an average spacing p is arranged, so, equation 2 can be modified as following equation 5:
α=p (equation 5)
Therefore, according to a preferred embodiment of the present invention, average speckle diameter is approximately equal to half of detector spacings.More usually, according to one embodiment of the present of invention, average speckle diameter is between 1/4 times and 1 times of detector spacings.
The length of detector element
Fig. 4 is a synoptic diagram of describing the size of the width w of array of detector elements and element wherein and length L.Though above-mentioned discussion concentrates on the width dimensions of element, this part will the concentrated discussion length dimension.
According to one embodiment of the present of invention, in order to operate linear detector arrays reliably, the length L of detector element preferably is several double-lengths of speckle diameter at least, so that will can not produce unsettled signal perpendicular to the variation of the detection moving direction of expecting.The average contribution of this speckle is that depth of modulation is reduced to (α/L)
1/2/ one.For example, be about 4 times the detector element length L of average speckle diameter α, average, make depth of modulation be reduced to about 1/2nd for 4 to 5 speckles by use.
Fig. 5 has provided graphical examples of expression depth of modulation (speckle contrast), wherein represents (original) depth of modulation that does not average and the depth of modulation that averages for leement duration L.Referring now to accompanying drawing 5, the additional reason that is reduced to √ 1/2nd of depth of modulation is surperficial depolarization.After testing after the average and depolarization of the length of device element, depth of modulation γ is at speckle:
According to one embodiment of the present of invention, detecting device comprises a uniform substantially leement duration, be configured for leement duration and make it, thereby a metastable signal is arranged can maintain length (perpendicular to the width) motion that is parallel to element substantially the time greater than average speckle diameter.
Yet for Fig. 5, length is long more, and depth of modulation reduces manyly more.Therefore, as the compromise proposal of this situation,, leement duration can be configured between 2 times and 10 times of average speckle diameter according to an alternative embodiment of the invention.
In order to describe and describe the foregoing description that has provided specific embodiment of the present invention and example,, do not think that this is a limitation of the present invention though described and illustrated the present invention by some above example.Do not expect that these examples are detailed, perhaps do not expect to limit the invention to precise forms disclosed herein, and according to above-mentioned instruction, many modifications, improvement and variation within the scope of the present invention all is possible.Can think that scope of the present invention comprises the broad aspect of content disclosed herein, and determine by appending claims and equivalent thereof.
Claims (20)
1. optical displacement sensor is used for by determining that this sensor comprises at the displacement detecting data input device of the continuous frame optical signature transversal displacement with respect to a surface:
Luminaire with said surface of a coherent source and an illumination part;
Have imaging optical device and detecting device with at least one first photoarray of periodic distance;
Wherein, luminaire is become with detector configurations to produce on first photoarray from illuminated surface portion intensity of light reflected pattern,
Wherein, intensity pattern comprises a plurality of speckles, and the average speckle diameter of speckle is between 1/2nd and 2 times of the periodic distance of said array.
2. optical displacement sensor according to claim 1, wherein: the average speckle diameter that is provided is about the one-period distance of said array.
3. optical displacement sensor according to claim 1, wherein: first photoarray comprises a difference comb arrays, said comb arrays comprises the staggered element of M group.
4. optical displacement sensor according to claim 3, wherein: each light activated element comprises basically element width uniformly, and wherein: be configured for luminaire and detecting device, multiply by between 2 times of M so that the average speckle diameter that is provided multiply by 1/2nd times of M and element width in element width.
5. optical displacement sensor according to claim 4, wherein: the average speckle diameter that is provided is about an element width and multiply by M.
6. optical displacement sensor according to claim 1, wherein: for selecting, so that said average speckle diameter to be provided from the light wavelength of coherent source and the numerical aperture of imaging optical device (NA).
7. optical displacement sensor according to claim 1, wherein: each light activated element comprises the uniform basically leement duration greater than average speckle diameter.
8. optical displacement sensor according to claim 7, wherein: leement duration is between the twice of average speckle diameter and 10 times.
9. optical displacement sensor according to claim 1, further comprise second photoarray, second photoarray has along the light activated element of second arrangement, and first that arranges first photoarray is uneven with said second.
10. optical displacement sensor according to claim 9, wherein: by the configuration optical devices along second numerical aperture with inequality along first numerical aperture, make the average speckle diameter that provided along second be different along first.
11. one kind is detected the method that moves that data input device crosses a surface, said method comprises the steps:
The throw light on part on said surface of the luminaire that use has a coherent source;
Reflection is from the light of the part on said illuminated surface;
This light is mapped on the array of detector element, so that the light on the array comprises the speckle pattern with average speckle diameter;
By this array detection speckle pattern,
Wherein: said array is included in the periodicity between 1/2nd and 2 times of average speckle diameter.
12. the method for claim 11, wherein: periodically approximate average speckle diameter.
13. the method for claim 11, wherein: each element in the array comprises basically element width uniformly.
14. the method for claim 13, wherein: said array comprises a difference comb arrays, this difference comb arrays comprises the element that M group is staggered, and wherein: the average speckle diameter that mapping makes array multiply by 1/2nd times of M and element width in element width and multiply by between 2 times of M.
15. the method for claim 13, wherein: the average speckle diameter that mapping makes array multiply by between the M approximating element width.
16. the method for claim 13, wherein: each element in the array further comprises the uniform basically leement duration greater than average speckle diameter.
17. the method for claim 16, wherein: leement duration is the twice of average speckle diameter at least.
18. an optical positioning device, said optical positioning device comprises:
LASER Light Source, LASER Light Source is with a zone on the optical illumination surface of a wavelength;
Detecting device is included in first array that first dimension has periodic distance;
Optical devices, optical devices comprise a numerical aperture in first dimension, thereby the speckle pattern that has an average speckle diameter in first dimension is mapped on the detecting device from illuminated zone,
Wherein: in the numerical aperture of first dimension at wavelength divided by between 1/2nd and 2 times of periodic distance of first dimension.
19. the optical positioning device of claim 18, wherein: described numerical aperture approximates wavelength divided by said periodic distance.
20. the optical positioning device of claim 18, wherein: detecting device further comprises second array that has periodic distance in second dimension, wherein: optical devices further comprise a different numerical aperture in second dimension, so that will be mapped to detecting device from illuminated zone, and wherein in the speckle pattern that second dimension has different average speckle diameter: in the numerical aperture of second dimension at wavelength divided by between 1/2nd and 2 times of the periodic distance of second dimension.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US57306204P | 2004-05-21 | 2004-05-21 | |
| US60/573,062 | 2004-05-21 | ||
| US11/128,988 | 2005-05-13 |
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| Publication Number | Publication Date |
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| CN1989389A true CN1989389A (en) | 2007-06-27 |
| CN100501314C CN100501314C (en) | 2009-06-17 |
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| CNB2005800246246A Expired - Fee Related CN100501314C (en) | 2004-05-21 | 2005-05-19 | Measurement of speckle sizing and sensor dimensions in optical positioning device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104976956A (en) * | 2015-04-10 | 2015-10-14 | 李跃伟 | Displacement sensor based on photosensitive array |
| CN111587384A (en) * | 2017-11-17 | 2020-08-25 | 特里纳米克斯股份有限公司 | Detector for determining a position of at least one object |
| CN113566715A (en) * | 2021-08-04 | 2021-10-29 | 国网陕西省电力公司电力科学研究院 | Multi-row differential type photosensitive measuring rod, system and measuring rod method |
-
2005
- 2005-05-19 CN CNB2005800246246A patent/CN100501314C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104976956A (en) * | 2015-04-10 | 2015-10-14 | 李跃伟 | Displacement sensor based on photosensitive array |
| CN111587384A (en) * | 2017-11-17 | 2020-08-25 | 特里纳米克斯股份有限公司 | Detector for determining a position of at least one object |
| CN113566715A (en) * | 2021-08-04 | 2021-10-29 | 国网陕西省电力公司电力科学研究院 | Multi-row differential type photosensitive measuring rod, system and measuring rod method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100501314C (en) | 2009-06-17 |
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