CN1982731A - Method for mechanically connecting and fastening micro-element - Google Patents
Method for mechanically connecting and fastening micro-element Download PDFInfo
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- CN1982731A CN1982731A CN 200510047986 CN200510047986A CN1982731A CN 1982731 A CN1982731 A CN 1982731A CN 200510047986 CN200510047986 CN 200510047986 CN 200510047986 A CN200510047986 A CN 200510047986A CN 1982731 A CN1982731 A CN 1982731A
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- amorphous alloy
- connect
- secure component
- fastening
- groove
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Abstract
The invention includes the following steps: mounting and fixing the future jointing or fastening member and then starting to be heated; moving the amorphous alloy pin selected on the basis of the specific size of the future jointing or fastening member into the between of the future jointing or fastening members in the working region after the temperature in the working region is in a stable state and then going on heating; driving the future jointing or fastening member to contact with the amorphous alloy pin to make it deform and then be inserted in the clamping slot on the future jointing or fastening member and at last finishing jointing or fastening the members.
Description
Technical field
The present invention relates to the connection technique of micro-solid, specifically a kind of micro-element mechanical coupling or locking method are specially adapted to the connection of the meticulous parts of microelectromechanical systems (MEMS, Micro electro mechanical system) and fastening.
Technical background
Connect for two solids, traditional method comprises bolt connection, rivet connection, pin, key and splined, bonding and welding etc.Coupling device must have stronger ability to bear to working environment and physics contact (as pressure, heat transfer) etc., thereby guarantees the reliability of system.Under the prerequisite that guarantees reliability, cheap cost, simple implementation method, maintenance easily or replacement are the dreamboats of expection.
The working principle of traditional variety classes joining method, make all kinds of defectives occur inevitably: bolt connects, rivet connection and pin, key and splined will greatly change the original profile of coupled object and heavy damage its with the surface is arranged, linking intensity is low; The cemented in place time is long, because the chemical characteristics of binder will be subjected to the influence of external environment such as temperature, humidity, gas, liquid, light, what be difficult to guarantee to connect is stable and reliable; It is narrow that welding connects base material range, because the chemical metallurgy effect has changed the inherent quality of coupled solid, and requires the mating face to clear up.More crucial is that the conventional solid joining method is difficult to be applied to fine structure.
Because intensity, toughness and the wear resistance of amorphous alloy apparently higher than the plain carbon steel iron material, can be prepared into composite material with amorphous material and other material, also can make wear resistant appliance separately, this has caused people's very big concern.Even to this day, the amorphous material that can contact is a lot of in daily life, as high abrasion audio frequency and video magnetic head extensive use in top grade recording, video recorder of adopting the amorphous alloy preparation; And the anti-friction bearing body of using the amorphous alloy grinding also appears on the market.Yet, utilize the viscosity rheological behaviour of amorphous alloy in supercooling liquid phase region, realize that the meticulous parts connection of MEMS system does not appear in the newspapers as yet with fastening method.
Summary of the invention
Low in order to overcome in the existing solid mechanical coupling technology linking intensity, it is narrow to connect base material range, positioning time is long, the deficiency that the mating face need be cleared up, the purpose of this invention is to provide a kind of viscosity rheological behaviour of utilizing amorphous alloy in supercooling liquid phase region, application amorphous alloy pin realizes that the meticulous parts of MEMS system connect and tight method together.
Technical solution of the present invention is as follows:
A kind of micro-element mechanical coupling or locking method, according to the concrete size of waiting to connect (fastening) parts, choose the amorphous alloy pin of appropriate size, utilize the rheological behaviour of amorphous alloy in supercooling liquid phase region, alloy deformation is embedded wait to connect in the draw-in groove on (fastening) parts, finish the connection (together tight) between parts, comprise the steps:
(1) is installed and waits to connect (fastening) parts, and begin to heat, heating-up temperature is (glass transition temperature and crystallization that Tg and Tx are respectively selected amorphous alloy begin temperature) between Tg～Tx, realize the viscosity rheological molding to guarantee amorphous alloy in supercooling liquid phase region;
(2) in the working area behind the temperature stabilization, the amorphous alloy pin moved to wait in the working area to connect between (fastening) parts, continue to be heated to temperature fluctuation and disappear, be stabilized between Tg～Tx, and regulate the distance of waiting to connect (fastening) parts and amorphous alloy pin;
(3) driving waits to connect (fastening) parts contact amorphous alloy pin, and control shaping strain rate is 1 * 10
-2～1 * 10
-4s
-1Between, the distortion of amorphous alloy pin is embedded in the draw-in groove of waiting to connect on (fastening) parts, be filled in draw-in groove after the distortion of amorphous alloy pin, corresponding with the draw-in groove shape, finish the connection (fastening) between parts;
(4) after connection (fastening) finished, unloading was also taken out and is connected (fastening) structure natural cooling, avoids amorphous alloy pin crystallization.
Described amorphous alloy pin is cylindrical, and draw-in groove is the groove of truncated conical shape, and its upper bottom surface is positioned to be waited to connect or the secure component facing surfaces, and its bottom surface is positioned to be waited to connect or secure component inside.During assembling, the interstice coverage between amorphous alloy pin cross section and the upper bottom surface is 1～5 μ m.
Described amorphous alloy pin is prismatic, and draw-in groove is the groove of the terrace with edge shape that equates with amorphous alloy pin rib number, and its upper bottom surface is positioned to be waited to connect or the secure component facing surfaces, and its bottom surface is positioned to be waited to connect or secure component inside.During assembling, the interstice coverage between amorphous alloy pin cross section and the upper bottom surface is 1～5 μ m.
Described amorphous alloy refers to Mg base, La base, Nd base, Pr base or Ce base amorphous alloy.
Micro-element of the present invention is meant the meticulous parts of MEMS system, as meticulous component such as some beams in the MEMS system, axle, pedestals.
Compared with prior art, the present invention has the following advantages:
1, joining method of the present invention can realize that the meticulous parts of MEMS system connect with fastening, the linking intensity height, and it is extensive to connect base material range, and positioning time is short, and the mating face does not need special cleaning.
2, the present invention uses the viscosity rheological properties of amorphous alloy in supercooling liquid phase region, realizes that the meticulous parts of MEMS system connect with fastening, and control accuracy can reach submicron order.
3, the present invention uses amorphous alloy excellent abrasive energy, guarantees the stable and reliable of fine connection and fastening structure.
4, heating-up temperature of the present invention is between 180～210 ℃, and little to connecting the base material heat affecting, needed power is 5～20MPa only, treats connection (fastening) parts and does not destroy.
5, the present invention uses and waits to connect (fastening) part draw-in groove location, and does not need the mating face cleaning, and is simple to operate, efficient.
Description of drawings
Fig. 1 is the schematic diagram of joining method of the present invention.
Fig. 2 is structural representation that connects example of the present invention.
Fig. 3 is the structural representation of a fastening example of the present invention.
Among the figure, 1 waits to connect (fastening) parts; 2 amorphous alloy pins; 3 wait to connect (fastening) parts.
Embodiment
Specify present embodiment below in conjunction with Fig. 1, Fig. 2.
Joining method of the present invention comprises the steps (referring to Fig. 1);
(1) according to treating the draw-in groove size of coupling member 1 and 3, selects the Mg of Φ 0.05 * 0.08mm
60Cu
30Y
10 Amorphous alloy pin 2, draw-in groove are the groove of truncated conical shape, and its upper bottom surface is positioned to be treated that coupling member facing surfaces, its bottom surface are positioned at and treat coupling member inside; During assembling, the gap between amorphous alloy pin cross section and the upper bottom surface is 5 μ m.
(2) be installed and treat coupling member 1 and 3, and beginning heating work district, heating-up temperature is (present embodiment is an example with 200 ℃) between 190～210 ℃.
(3) in the working area behind the temperature stabilization, amorphous alloy pin 2 moved to treat in the working area between coupling member 1 and 3, continue to be heated to temperature fluctuation and disappear, be stabilized between 190～210 ℃, and regulate and treat coupling member 1 and 3 and the distance of amorphous alloy pin 2.
(4) driving treats that coupling member 1 contacts amorphous alloy pin 2 with 3, and control shaping strain rate is 1 * 10
-2～1 * 10
-3s
-1Between, 2 distortion of amorphous alloy pin are embedded in the draw-in groove for the treatment of on coupling member 1 and 3, finish the connection between parts.
(5) after connection finished, the connecting structure natural cooling was also taken out in unloading, avoids amorphous alloy pin 2 crystallization.
It connects the result: the amorphous alloy after the distortion is sold out full embedding and is treated in the draw-in groove of coupling member, connects reliably, and guarantees that this connecting structure has a rotary freedom, can rotate flexibly around the amorphous alloy pin axis.
Specify present embodiment below in conjunction with Fig. 1, Fig. 3.
Joining method of the present invention comprises the steps (referring to Fig. 1);
(1), selects the Mg of 0.05 (length) * 0.05 (wide) * 0.08 (height) mm according to the draw-in groove size of parts 1 to be tightened and 3
65Cu
25Y
10 Amorphous alloy pin 2, draw-in groove are the groove of the terrace with edge shape that equates with amorphous alloy pin rib number, and its upper bottom surface is positioned at parts facing surfaces to be tightened, and its bottom surface is positioned at components interior to be tightened; Gap between amorphous alloy pin cross section and the upper bottom surface is 1 μ m.
(2) be installed parts 1 to be tightened and 3, and beginning heating work district, heating-up temperature is (present embodiment is an example with 190 ℃) between 180～200 ℃.
(3) in the working area behind the temperature stabilization, amorphous alloy pin 2 is moved in the working area between the parts 1 to be tightened and 3, continue to be heated to temperature fluctuation and disappear, be stabilized between 180～200 ℃, and regulate parts 1 to be tightened and 3 and the distance of amorphous alloy pin 2.
(4) drive parts 1 to be tightened and contact amorphous alloy pin 2 with 3, control shaping strain rate is 1 * 10
-3～1 * 10
-4s
-1Between, amorphous alloy pin 2 distortion is embedded in the draw-in groove for the treatment of on coupling member 1 and 3, finish fastening between parts.
(5) after the fastening end, unloading is also taken out the fastening structure natural cooling, avoids amorphous alloy pin 2 crystallization.
Its fastening result: the amorphous alloy after the distortion is sold out in the draw-in groove of full embedding parts to be tightened, and is fastening reliable, and guarantees that this fastening structure does not have degrees of freedom.
Claims (6)
1, a kind of micro-element mechanical coupling or locking method, it is characterized in that according to waiting to connect or the concrete selection of dimension amorphous alloy pin of secure component, utilize the rheological behaviour of amorphous alloy in supercooling liquid phase region, alloy deformation is embedded wait connect or secure component on draw-in groove in, finish connection between parts or fastening, comprise the steps:
(1) be installed and wait to connect or secure component, and begin heating, heating-up temperature is between Tg～Tx, and glass transition temperature and crystallization that Tg and Tx are respectively selected amorphous alloy begin temperature, realizes the viscosity rheological molding to guarantee amorphous alloy in supercooling liquid phase region;
(2) in the working area behind the temperature stabilization, with the amorphous alloy pin move to wait in the working area to connect or secure component between, continue to be heated to temperature fluctuation and disappear, be stabilized between Tg～Tx, and regulate and wait to connect or the distance of secure component and amorphous alloy pin;
(3) driving is waited to connect or secure component contact amorphous alloy pin, and control shaping strain rate is 1 * 10
-2～1 * 10
-4s
-1Between, amorphous alloy pin distortion is embedded wait connect or secure component on draw-in groove in, finish connection between parts or fastening;
(4) after connection or the fastening end, unloading is also taken out and is connected or the fastening structure natural cooling.
2, according to described micro-element mechanical coupling of claim 1 or locking method, it is characterized in that: described amorphous alloy pin is cylindrical, draw-in groove is the groove of truncated conical shape, and its upper bottom surface is positioned to be waited to connect or the secure component facing surfaces, and its bottom surface is positioned to be waited to connect or secure component inside.
3, according to described micro-element mechanical coupling of claim 2 or locking method, it is characterized in that: during assembling, the interstice coverage between amorphous alloy pin cross section and the upper bottom surface is 1～5 μ m.
4, according to described micro-element mechanical coupling of claim 1 or locking method, it is characterized in that: described amorphous alloy pin is prismatic, draw-in groove is the groove of the terrace with edge shape that equates with amorphous alloy pin rib number, its upper bottom surface is positioned to be waited to connect or the secure component facing surfaces, and its bottom surface is positioned to be waited to connect or secure component inside.
5, according to described micro-element mechanical coupling of claim 4 or locking method, it is characterized in that: during assembling, the interstice coverage between amorphous alloy pin cross section and the upper bottom surface is 1～5 μ m.
6, according to described micro-element mechanical coupling of claim 1 or locking method, it is characterized in that: described amorphous alloy refers to Mg base, La base, Nd base, Pr base or Ce base amorphous alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100479869A CN100400899C (en) | 2005-12-14 | 2005-12-14 | Method for mechanically connecting and fastening micro-element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100479869A CN100400899C (en) | 2005-12-14 | 2005-12-14 | Method for mechanically connecting and fastening micro-element |
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| Publication Number | Publication Date |
|---|---|
| CN1982731A true CN1982731A (en) | 2007-06-20 |
| CN100400899C CN100400899C (en) | 2008-07-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100479869A Expired - Fee Related CN100400899C (en) | 2005-12-14 | 2005-12-14 | Method for mechanically connecting and fastening micro-element |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103635270A (en) * | 2011-07-01 | 2014-03-12 | 苹果公司 | Heat stake joining |
| CN110076300A (en) * | 2019-05-23 | 2019-08-02 | 保定维尔铸造机械股份有限公司 | Structure for being positioned between foundry machinery structural member |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2632375B2 (en) * | 1988-07-13 | 1997-07-23 | 川崎重工業株式会社 | Anchor bond joined body and method of manufacturing the same |
| US5680690A (en) * | 1996-02-06 | 1997-10-28 | Franklin S. Briles | Coated rivet and deformation thereof |
| JP4197774B2 (en) * | 1998-08-31 | 2008-12-17 | パナソニック電工株式会社 | Electrical contact |
| CN1199747C (en) * | 2003-06-23 | 2005-05-04 | 北京科技大学 | Amorphous alloy precision parts superplastic drop-forging shaper and method thereof |
-
2005
- 2005-12-14 CN CNB2005100479869A patent/CN100400899C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103635270A (en) * | 2011-07-01 | 2014-03-12 | 苹果公司 | Heat stake joining |
| CN103635270B (en) * | 2011-07-01 | 2016-09-28 | 苹果公司 | Hot melt engages method and device |
| CN110076300A (en) * | 2019-05-23 | 2019-08-02 | 保定维尔铸造机械股份有限公司 | Structure for being positioned between foundry machinery structural member |
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| Publication number | Publication date |
|---|---|
| CN100400899C (en) | 2008-07-09 |
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Granted publication date: 20080709 Termination date: 20100114 |