CN1979240A - Narrow-band heat-light adjustable Farbry-Boro filter with flat-top responding - Google Patents
Narrow-band heat-light adjustable Farbry-Boro filter with flat-top responding Download PDFInfo
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- CN1979240A CN1979240A CNA200510126326XA CN200510126326A CN1979240A CN 1979240 A CN1979240 A CN 1979240A CN A200510126326X A CNA200510126326X A CN A200510126326XA CN 200510126326 A CN200510126326 A CN 200510126326A CN 1979240 A CN1979240 A CN 1979240A
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Abstract
The invention is a narrow-band, thermooptic, tunable Fabry-Perot filter with flat top response, comprising: a substrate; a first Prague reflector, namely a lower reflector made on the substrate; a cavity made on the first Prague reflector to determine operating wavelength of the filter; a heater made on the cavity to heat the cavity to change the refractive index of the cavity so as to change the operating wavelength of the filter; a second Prague reflector made on the heater to be paired with the first one to form an Fabry-Perot cavity structure so as to have a wavelength selecting function.
Description
Technical field
The present invention relates to the wave filter that a kind of optical communication is used, relate to flat-top arrowband thermo-optical tunability Fabry-Perot (Fabry-Perot) wave filter that a kind of many steps of being convenient to optically-coupled constitute especially.
Background technology
In optical communication network, tunable optic filter is used for constituting various demodulation multiplexers, and multiplexing light is together made a distinction; This tunable filtering technology is applied to realizes important tunable optical source and receiver in dense wave division multipurpose (DWDM) system on laser instrument and the detector; The Primary Component light top and bottom path device of a new generation's all-optical network also can be made of this wave filter.This shows that tunable optic filter becomes indispensable important devices in all-optical network and the dwdm system.The application of wave filter in optical-fiber network comprise the difference of channel light detected, to wave filter except require the arrowband, tunable, wish that also it is flat-top response.Because channel light is a peaked wave, can drift about inevitably at the actual transmissions medium wavelength, because the Fabry-Perot wave filter is peak response, when channel light generation wave length shift, want very fast tuning and aim at channel light and be not easy to.If the Fabry-Perot wave filter has flat-top response, then the problems referred to above can solve, because all be effective as long as the spike of channel light falls in the flat-top scope.Therefore, the Fabry-Perot wave filter with flat-top response has improved rapidity and the accuracy that channel light is detected.
The name of submitting on May 15th, 2002 is called in " Narrow-bandtunable filter with multl-cavity structurr of flat-topand steep-edge frequency response " european patent application CN1349318 number and has proposed a kind of narrow-band tunable filter with flat-top and the response of precipitous band edge, the input and output side of this wave filter is formed by two GRIN Lens, three parallel cavity configurations are between input and output side, two walls in chamber are suitable reflectance coatings, both sides are dielectric cavity in three parallel cavity configurations, the centre is an air chamber, and the spacing of air chamber is adjustable.The wave filter of this invention can overcome the shortcoming of the narrow inadequately and tuber function difference of bandwidth in the conventional filter.But, because this wave filter comprises two GRIN Lens and parallel multi-cavity structure as input and output side, and at least one of parallel multi-cavity is air chamber, so Filter Structures and Tuning mechanism relative complex, the miniaturization that can not satisfy the practicability system applies can compatible integrated demand.
The name of submitting to Dec 19 calendar year 2001 is called in " OPTICALFILTER " european patent application CA2344003 number and has proposed a kind of optical filter with lens, wherein lens have two input ports and with two output ports of two input port optical communications, the end face optical coupled of part reflecting face and lens, another reflecting surface and part reflecting face standoff distance " d " are to form optical cavity between two reflectings surface.Converter is used to change two distance ' ' d ' ' between the reflecting surface.Two input ports are placed on from the different radial distance of lens axis, make that the light beam that separates is by the light path with different optical path lengths between the reflecting surface when light beam separately enters two input ports.The wave filter of this invention provides the arrowband output response of flat-top basically.Obviously, this wave filter need have the special lenses of two input ports and output port, and requirement light beam separately enters two input ports from the lens axis different radial distances respectively, so this Filter Structures relative complex, the miniaturization that can not satisfy the practicability system applies can compatible integrated demand.In addition, two input ports are not easy especially from the control of the radial distance of lens axis and the distance of using converter to change between the reflecting surface, thereby can only obtain the output response of flat-top basically.
At document Electronics Letters, Volume:26, Issue:14 has described a kind of have three catoptrons of flat-top and the response of precipitous band edge, full optical fiber Fabry-Perot wave filter among the Pages:1073-1074 (1990).This device is an III type structure, has three catoptrons of symmetry, and wherein the length in two outer reflectors and two and half chambeies is identical.Intermediate mirrors has reflectivity R0=99.0% ± 0.1%, and each end mirror has reflectivity R
1≈ 89%, approaches critical relation: R
0c=4R
1/ (1+R
1)
2Two and half chambeies drive in the piezoelectricity mode by synchronous ramp voltage.Use for WDM, this wave filter is better than two catoptron Fabry-Perot wave filters, has flat-top and precipitous band edge more.But this filter construction is complicated, requires to form respectively three catoptrons of symmetry, and wherein the reflectivity of two outer reflectors is identical and satisfy critical relation with the reflectivity of intermediate mirrors.In addition, the suppression ratio at place is bigger in the middle of the flat-top response of this wave filter, approximately is 20% of maximum transmission rate, therefore just realizes flat-top basically.And this device is difficult for other photonic devices integrated realizing various sophisticated functionss, thereby the miniaturization that can not satisfy the practicability system applies can compatible integrated demand.
In the arrowband thermo-optical tunability Fabry-Perot wave filter patent of the flat-top of our group application in 2004 and the response of precipitous band edge, its Fabry-Perot chamber is made of two steps, above the step with step below representing two kinds of different chambeies long respectively, promptly two wavelength are had and select to see through effect, these two photoresponse spectrum stack backs form good flat-top and tuning performance, but have certain difficulty when optically-coupled.At this point, we have proposed the design philosophy of many steps, and the Fabry-Perot chamber is made of square net, and its length of side is much smaller than the core diameter of optical fiber, guaranteed that like this area that incident illumination from optical fiber is mapped to two parts equates, thereby be convenient to the aligning and the coupling of optical fiber.
Disclosed wave filter, it is divided into two parts of different-thickness with the Fabry-Perot chamber, is made of square net.Because the length of side of square net, makes that to shine the area of two parts in Fabry-Perot chamber from the incident light of the optical fiber logical light window by device substantially the same much smaller than the core diameter of optical fiber.Because two parts in Fabry-Perot chamber have different optical thicknesses, the light path difference of light beam process in two parts in Fabry-Perot chamber, the selected light wavelength difference of passing through, thus the light of two kinds of wavelength selected by and other wavelength components are intercepted.The thickness difference (Δ) of two parts of Fabry-Perot can be selected to be provided with, and makes device have the output response of flat-top.
As everyone knows, can press the wavelength selectivity of bandwidth to obtain in narrow Fabry-Perot chamber by the reflectivity that improves catoptron, the length that also can increase the Fabry-Perot chamber is pressed narrow bandwidth.In device of the present invention, use the SOR patented technology that thin slice Si material at low temperature is bonded to down on the catoptron, obtain the thicker Fabry-Perot chamber of tens micron dimensions through attenuated polishing, thereby obtain very narrow bandwidth.
Device of the present invention adopts the well heater of being made by metal or alloy, this well heater is after the Fabry-Perot chamber forms on following catoptron and is divided into two parts with different-thickness, on the Fabry-Perot chamber, form, after upper reflector forms, carved two electrodes subsequently.After feeding electric current, well heater provides heat that the Fabry-Perot chamber is heated, and thermo-optic effect causes that the cavity refractive index increases, thereby reaches the purpose of tuning response wave length.
Device of the present invention has the output response that two parts of different-thickness realize flat-top by the Fabry-Perot chamber is divided into.Can know that from formula hereinafter the quantity that wish to obtain the dielectric layer in the thickness difference Δ of these required two parts of good flat-top output response and the catoptron up and down is relevant.The Fabry-Perot chamber that utilization of the present invention is thicker, thus only need up and down less dielectric layer in the catoptron, obtain narrow bandwidth and precipitous band edge.The more important thing is,, realize easily so obtain the required thickness difference Δ of flat-top response, and have enough nargin, to machining precision and do not require harsh especially owing to up and down comprise less dielectric layer in the catoptron.The scheme technology that the present invention proposes is simple, realizes easily, and the reliability height, functional, and device is easy and other active or passive photonic devices are integrated to realize various sophisticated functionss.
Summary of the invention
The objective of the invention is to, proposed a kind of hot optic tunable fabry-perot filter in arrowband with flat-top response.
A kind of hot optic tunable fabry-perot filter in arrowband with flat-top response of the present invention is characterized in that, comprising:
One substrate;
One first Bragg mirror, this first Bragg mirror is produced on the substrate, and this first Bragg mirror is the following catoptron of wave filter;
One cavity, this cavity are produced on first Bragg mirror, and this cavity is the cavity of wave filter, are determining the operation wavelength of wave filter;
One well heater, this well heater is produced on the cavity, is used for heating cavity, changes the refractive index of cavity, thereby changes the operation wavelength of wave filter;
One second Bragg mirror, this second Bragg mirror is produced on the well heater, and this second Bragg mirror and above-mentioned first Bragg mirror constitute a pair of, form the Fabry-Perot cavity configuration, thereby have wavelength selection effect.
Wherein said cavity is divided into first thickness and second thickness, and the chamber of these two kinds of different-thickness is made of a plurality of square nets.
Wherein square net is a measuring fiber, and this measuring fiber is a single-mode fiber, and the length of side of square net is 2 microns, and is maximum to 5 microns.
Wherein said first thickness is the 30-40 micron.
Wherein said second thickness is the 6-12 nanometer.
The thickness difference of the part of wherein said first thickness and second thickness is realized by lithographic method.
Wherein said well heater is manufactured with electrode and resistance.
Wherein said electrode and resistance are all made by same metal.
The resistance of wherein said resistance is 5-50 ohm.
The three dB bandwidth of the output response of its median filter is 0.7 nanometer.
The tuning range of its median filter is 23 nanometers, and the response time is greater than 300 microseconds.
Description of drawings
For further specifying the structure of device of the present invention, below in conjunction with embodiment device of the present invention is described in detail, wherein:
Fig. 1 is the vertical view of device of the present invention;
Fig. 2 is the cut-open view of device of the present invention;
Fig. 3 is the reflectivity wavelength response curve of the upper reflector of device of the present invention;
Fig. 4 is the reflectivity wavelength response curve of the following catoptron of device of the present invention;
Fig. 5 is the simplification schematic diagram of device of the present invention;
Fig. 6 is that explanation device of the present invention is exported the relation curve of the relative transmittance at the trough place that responds to Fabry-Perot chamber thickness;
Fig. 7 is that explanation device of the present invention is exported the relation curve of the relative transmittance at the crest place that responds to Fabry-Perot chamber thickness;
Fig. 8 is that the waviness of output response of device of the present invention is to the relation curve of Fabry-Perot chamber thickness;
Fig. 9 is that the typical case of device of the present invention exports response.
Embodiment
See also Figure 1 and Figure 2, a kind of hot optic tunable fabry-perot filter in arrowband with flat-top response of the present invention comprises:
One substrate 10;
One first Bragg mirror 20, this first Bragg mirror 20 is produced on the substrate 10, and this first Bragg mirror 20 is following catoptrons of wave filter;
One cavity 30, this cavity 30 is produced on first Bragg mirror 20, this cavity 30 is cavitys of wave filter, determining the operation wavelength of wave filter, wherein said cavity 30 is divided into and has first thickness 31 and second thickness 32, and the chamber of these two kinds of different-thickness is made of a plurality of square nets, this square net is a measuring fiber, this measuring fiber is a single-mode fiber, the length of side of square net is 2 microns, maximum this first thickness 31 is the 30-40 micron to 5 microns, and this second thickness 32 is the 6-12 nanometer; The thickness difference of this first thickness 31 and second thickness 32 is realized by lithographic method;
One well heater 40, this well heater 40 is produced on the cavity 30, be used for heating cavity 30, change the refractive index of cavity, thereby change the operation wavelength of wave filter, this well heater 40 is manufactured with electrode 41 and resistance 42, and this electrode 41 and resistance 42 are all made by same metal, the resistance of this resistance 42 is 5-50 ohm;
One second Bragg mirror 50, this second Bragg mirror 50 is produced on the well heater 40, and this second Bragg mirror 50 and above-mentioned first Bragg mirror 20 constitute a pair of, form the Fabry-Perot cavity configuration, thereby have wavelength selection effect.
The three dB bandwidth of the output response of its median filter is 0.7 nanometer.
The tuning range of its median filter is 23 nanometers, and the response time is greater than 300 microseconds.
Request in person down again in conjunction with consulting the device architecture that Fig. 1 and Fig. 2 illustrate disclosed wave filter.
In one embodiment, its structure of tunable optic filter comprises: substrate 10; Following catoptron (DBR) 20; Fabry-Perot chamber 30; Well heater 40; Upper reflector (DBR) 50.
Following mask body is set forth the device architecture that present embodiment disclosed:
Following DBR20, following DBR20 specifically comprises:
SiO
2Layer 21;
Si layer 22;
SiO
2Layer 23;
Fabry-Perot chamber 30, Fabry-Perot chamber 30 is fabricated from a silicon, and has two kinds of thickness, specifically comprises:
Electrode 41;
Last DBR50, last DBR50 specifically comprises:
SiO
2Layer 51;
Wherein said substrate 10 is made by single crystal silicon material, and refractive index approximately is 3.5;
Wherein said SiO
2Layer 21 optical thickness is 1/4th of centre wavelength (1300 nanometer), i.e. 325 nanometers, and physical thickness is approximately 222 nanometers, and refractive index is approximately 1.46.
The optical thickness of wherein said Si layer 22 is 1/4th of a centre wavelength, i.e. 325 nanometers, and physical thickness is approximately 93 nanometers, and refractive index is approximately 3.5.
Wherein said SiO
2Layer 23 optical thickness is 1/4th of centre wavelength, i.e. 325 nanometers, and physical thickness is approximately 222 nanometers, and refractive index is approximately 1.46.
Wherein said Fabry-Perot chamber 30 is fabricated from a silicon, and refractive index is approximately 3.5.
First thickness of a part 31 in wherein said Fabry-Perot chamber 30 is approximately 30-40 micron or bigger, and its square length of side is 2 microns or 10 microns.
Another part second thickness 32 to the first thickness 31 little 6-12 nanometers in wherein said Fabry-Perot chamber 30, its square length of side is 2 microns or 10 microns.
The logical light window 60 that wherein said well heater 40 is surrounded is the about 100 microns circles of diameter.
Wherein the separatrix of two of Fabry-Perot chamber 30 parts is on a diameter of logical light window 60, so that equate through the area that logical light window shines two parts in Fabry-Perot chamber 30 from the incident light of optical fiber.
Wherein said electrode 41 and active component 42 are all made by the chromium billon, and the resistance of active component 42 is approximately 20-30 ohm.
Wherein said SiO
2Layer 51 optical thickness is 1/4th of centre wavelength, i.e. 325 nanometers, and physical thickness is approximately 222 nanometers, and refractive index is approximately 1.46.
The optical thickness of wherein said Si layer 52 is 1/4th of a centre wavelength, i.e. 325 nanometers, and physical thickness is approximately 93 nanometers, and refractive index is approximately 3.5.
Fig. 3 is the reflectivity wavelength response curve of device upper reflector of the present invention.The transfer matrix method of layered medium is well-known to the physical characteristics in analysis power territory.Though the reflectivity of the upper reflector that is made of multilayer dielectric film that utilizes that computer program realizes that transfer matrix method finds to use in the present invention is relevant with wavelength, changes slow in very wide wavelength coverage.Filter device of the present invention has near the output response of centre wavelength (1300 nanometer) very narrow (less than 1 nanometer), and the reflectivity of upper reflector is almost not too big change in so narrow bandwidth range.Provide the reflectivity of upper reflector in 1100nm arrives the 1600nm wavelength coverage of device of the present invention as Fig. 3, can see that the variation of reflectivity is very little near 1300.Therefore, the reflectivity of upper reflector can be regarded constant as basically, is expressed as R1 hereinafter, and it is approximately 0.8195.
Fig. 4 is the reflectivity wavelength response curve of catoptron under the device of the present invention.Similarly, the transfer matrix method that utilizes computer program to realize finds that near the change of the reflectivity arrowband output response that will realize of catoptron down of the present invention is very little.Provide the reflectivity of following catoptron in 1100nm arrives the 1600nm wavelength coverage of device of the present invention as Fig. 4.Therefore, the reflectivity of following catoptron can be regarded constant as basically, is expressed as R hereinafter
2, it is approximately 0.8859.
Fig. 5 is the simplification schematic diagram of device of the present invention.Because the reflectivity of upper and lower catoptron can be regarded as constant near the output response of arrowband, so the structure of device of the present invention shown in Fig. 2 can be represented so that calculate and analyze with the simplification schematic diagram shown in Fig. 5.Wherein the refractive index in Fabry-Perot chamber is n, and thickness is h, and the reflectivity of upper reflector is R
1, the reflectivity of following catoptron is R
2If ignore absorption loss, utilize multiple-beam interference method well-known in the art to calculate:
I
(t)/I
(i)＝(1-R
1)(1-R
2)/(1+R
1R
2-2R
1 1/2R
2 1/2cosδ) (1)
I wherein
(t)Be transmitted intensity, I
(1)Be incident intensity, I
(t)/ I
(i)The expression relative transmittance.Phase factor δ satisfies:
δ＝4πnhcosθ/λ (2)
Wherein θ is an incident angle, and λ is a wavelength, and n is the refractive index in chamber.When incident angle was 0 °, phase factor was:
δ＝4πnh/λ (3)
By formula (1) formula as can be known, when the resonance in Fabry-Perot chamber occurs in phase factor and equals the integral multiple of 2 π, just:
δ＝2?mπ (4)
By formula (3) and (4) formula as can be known, resonant wavelength λ
mFor:
λ
m＝2nh/m (5)
The Fabry-Perot chamber of device is made of two parts with different-thickness, and the thickness of supposing one of them part is h
1, then resonant wavelength is λ
M1=2 nh
1/ m; The thickness of another part is h
2, then resonant wavelength is λ
M2=2nh
2/ m.The wavelength table of supposing the intersection point correspondence of the outputs response that produced by these two parts is shown λ
Dip, obviously the output that is produced by two parts responds at λ
DipThe relative transmittance at place is equal, promptly
cosδ
1＝cosδ
2 (6)
δ wherein
1=4 π nh
1/ λ
Dip, δ
2=4 π nh
2/ λ
DipAccording to (4) and (6) formula as can be known:
δ
1+δ
2＝4mπ (7)
4πnh
1/λ
dip+4πnh
2/λ
dip＝4mπ
λ
dip＝n(h
1+h
2)/m(8)
h
2＝h
1-Δ (9)
We only consider centre wavelength (λ
0=near 1300hm) output responds, so m satisfies:
m＝Round(2nh
1/λ
0) (10)
Wherein Round represents the round function.According to formula (1), (3), (8), (9) and (10) formula as can be known, the first of Fabry-Perot is at λ
DipThe relative transmittance that the place produces is:
In like manner, the second portion in Fabry-Perot chamber is at λ
DipThe relative transmittance that the place produces is:
So Fabry-Perot chamber λ
DipThe relative transmittance that the place produces is:
F
dip＝(F
1+F
2)/2 (13)
Fig. 6 has provided with computer program and has realized formula (11), (12) and (13) and the λ that obtains
DipThe relative transmittance at place is to Fabry-Perot chamber thickness h
1Relation curve, R wherein
1=0.8195, R
2=0.8859, n=3.5, Δ=7nm, λ
0=1300nm, h
1Be 30 μ m-40 μ m.The trough of output response is approximately 0.61 as can see from Figure 6, to thickness h
1Variation insensitive.
The peak value that device is always exported response appears near the peak value of the output response that each part in Fabry-Perot chamber produces, and therefore total output response has two peaks.Work as h
1When bigger, can be approximated to be:
λ
peak1＝[2nh
1/m+n(h
1+h
2)/m]/2 (14)
According to formula (1), (3), (9), (10) and (14) formula as can be known, for λ
Peak1Have:
F
peak1＝(F
1’+F
2’)/2 (17)
Fig. 7 has provided with computer program and has realized formula (15), (16) and (17) and the λ that obtains
Peak1The relative transmittance at place is to Fabry-Perot chamber thickness h
1Relation curve, R wherein
1=0.8195, R
2=0.8859, n=3.5, Δ=7nm, λ
0=1300nm, h
1Be 30 μ m ~ 40 μ m.The crest of output response is approximately 0.626 as can see from Figure 7, to thickness h
1Variation insensitive.Use the same method and to obtain λ
Peak2The relative transmittance at place is to Fabry-Perot chamber thickness h
1Curve, find and λ
Peak1The situation at place is almost completely identical.
The waviness that Fig. 8 has provided device of the present invention output response is that difference between crest relative transmittance and the trough relative transmittance is to Fabry-Perot chamber thickness h
1Relation curve.The waviness of output response is approximately 0.017 as can see from Figure 8, to h
1Change insensitive.Therefore, can optionally design the one-tenth-value thickness 1/10 h of Fabry-Perot
1, and can not have influence on the performance of flat-top output response, thereby can realize the performance of arrowband and precipitous band edge and good flat-top response simultaneously.
The typical case that Fig. 9 has provided the device of the present invention that uses transfer matrix method well-known in the art and obtain exports response.Δ=7nm wherein, λ
0=1300nm, h
1Be 30 μ m.The three dB bandwidth of device output response is approximately 0.7nm as seen from Figure 9, the 10dB bandwidth is approximately 1.6nm, the waviness of flat-top response is approximately 0.02, and the nuance of the value 0.017 that this value and Fig. 8 provide is to cause owing to use approximate expression (14) in Fig. 8 calculates.
So far, understand the structure and the principle of device of the present invention in detail.Compare with existing wave filter, the Fabry-Perot chamber of wave filter of the present invention has two parts of different-thickness, is made of square net.Because the length of side of square net, has guaranteed the area that the incident illumination from optical fiber is mapped to two parts like this much smaller than the optical fiber core diameter and has equated; And the light path difference of light beam process in two parts in Fabry-Perot chamber, the light of two kinds of wavelength selected by and other wavelength components are intercepted, thereby make the output response have flat characteristic.The flat-top response performance of device of the present invention depends on the thickness difference of two parts in chamber, and it doesn't matter with Fabry-Perot chamber thickness, and the length that therefore can increase the Fabry-Perot chamber reduces bandwidth and obtains precipitous band edge.Device of the present invention also has well heater, thereby has arrowband, flat-top response and tunable superperformance simultaneously, thereby is more suitable for detecting in the difference to channel light in optical-fiber network.The scheme technology that the present invention proposes is simple, realizes easily the reliability height, superior performance, be convenient to optically-coupled, device is easily integrated realizing various sophisticated functionss with other active or passive photonic devices, thereby the miniaturization that can satisfy the practicability system applies can the integrated demand of compatibility.
Claims (11)
1. the hot optic tunable fabry-perot filter in arrowband with flat-top response is characterized in that, comprising:
One substrate;
One first Bragg mirror, this first Bragg mirror is produced on the substrate, and this first Bragg mirror is the following catoptron of wave filter;
One cavity, this cavity are produced on first Bragg mirror, and this cavity is the cavity of wave filter, are determining the operation wavelength of wave filter;
One well heater, this well heater is produced on the cavity, is used for heating cavity, changes the refractive index of cavity, thereby changes the operation wavelength of wave filter;
One second Bragg mirror, this second Bragg mirror is produced on the well heater, and this second Bragg mirror and above-mentioned first Bragg mirror constitute a pair of, form the Fabry-Perot cavity configuration, thereby have wavelength selection effect.
2. the hot optic tunable fabry-perot filter in arrowband with flat-top response according to claim 1 it is characterized in that wherein said cavity is divided into first thickness and second thickness, and the chamber of these two kinds of different-thickness is made of a plurality of square nets.
3. the hot optic tunable fabry-perot filter in arrowband with flat-top response according to claim 2, it is characterized in that wherein square net is a measuring fiber, this measuring fiber is a single-mode fiber, the length of side of square net is 2 microns, and is maximum to 5 microns.
4. the hot optic tunable fabry-perot filter in arrowband with flat-top response according to claim 2 is characterized in that wherein said first thickness is the 30-40 micron.
5. the hot optic tunable fabry-perot filter in arrowband with flat-top response according to claim 2 is characterized in that wherein said second thickness is the 6-12 nanometer.
6. the hot optic tunable fabry-perot filter in arrowband with flat-top response according to claim 2 is characterized in that the thickness difference of the part of wherein said first thickness and second thickness is realized by lithographic method.
7. the hot optic tunable fabry-perot filter in arrowband with flat-top response according to claim 1 is characterized in that wherein said well heater is manufactured with electrode and resistance.
8. the hot optic tunable fabry-perot filter in arrowband with flat-top response according to claim 7 is characterized in that wherein said electrode and resistance are all made by same metal.
9. the hot optic tunable fabry-perot filter in arrowband with flat-top response according to claim 8 is characterized in that the resistance of wherein said resistance is 5-50 ohm.
10. according to the described hot optic tunable fabry-perot filter in arrowband of claim 1-9, it is characterized in that the three dB bandwidth of the output response of its median filter is 0.7 nanometer with flat-top response.
11. according to the described hot optic tunable fabry-perot filter in arrowband with flat-top response of claim 1-10, it is characterized in that the tuning range of its median filter is 23 nanometers, the response time is greater than 300 microseconds.
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|---|---|---|---|
| CNB200510126326XA CN100397123C (en) | 2005-12-07 | 2005-12-07 | Narrow-band heat-light adjustable Farbry-Boro filter with flat-top responding |
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Cited By (4)
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| CN102213844A (en) * | 2011-06-13 | 2011-10-12 | 黄辉 | Tunable optical filter with metal heating electrode embedded in cavity |
| CN104917048A (en) * | 2015-07-06 | 2015-09-16 | 大连藏龙光电子科技有限公司 | Small packaged long-distance transmission DFB laser |
| CN105223654A (en) * | 2014-06-11 | 2016-01-06 | 上海贝尔股份有限公司 | For the method and apparatus that the wavelength of hot tunable optic filter jumps |
| CN108445570A (en) * | 2018-03-20 | 2018-08-24 | 厦门大学 | A kind of wavelength selector based on surface plasmon-polarition Yu optics cavity close coupling |
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| JP2000028931A (en) * | 1998-07-09 | 2000-01-28 | Tdk Corp | Multiple wavelength filter array |
| US6804471B1 (en) * | 2000-01-05 | 2004-10-12 | Hrl Laboratories Llc | Apparatus and method of pulsed frequency modulation for analog optical communication |
| US6459533B1 (en) * | 2000-06-26 | 2002-10-01 | Nortel Networks Limited | Tuneable optical filters |
| CN1300955C (en) * | 2004-02-13 | 2007-02-14 | 中国科学院半导体研究所 | Narrow band Fabry-Perot filter with flattop output response |
| CN1300959C (en) * | 2004-02-13 | 2007-02-14 | 中国科学院半导体研究所 | Narrow band thermal-optically tuned Fabry-Perot filter with flattop and steep belt edge response |
-
2005
- 2005-12-07 CN CNB200510126326XA patent/CN100397123C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102213844A (en) * | 2011-06-13 | 2011-10-12 | 黄辉 | Tunable optical filter with metal heating electrode embedded in cavity |
| CN105223654A (en) * | 2014-06-11 | 2016-01-06 | 上海贝尔股份有限公司 | For the method and apparatus that the wavelength of hot tunable optic filter jumps |
| CN105223654B (en) * | 2014-06-11 | 2019-02-01 | 上海诺基亚贝尔股份有限公司 | The method and apparatus that wavelength for hot tunable optic filter jumps |
| CN104917048A (en) * | 2015-07-06 | 2015-09-16 | 大连藏龙光电子科技有限公司 | Small packaged long-distance transmission DFB laser |
| CN108445570A (en) * | 2018-03-20 | 2018-08-24 | 厦门大学 | A kind of wavelength selector based on surface plasmon-polarition Yu optics cavity close coupling |
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| Publication number | Publication date |
|---|---|
| CN100397123C (en) | 2008-06-25 |
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