CN1976142A - Starting and stable discharging method for pulse radio-frequency panel CO2 laser - Google Patents
Starting and stable discharging method for pulse radio-frequency panel CO2 laser Download PDFInfo
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- CN1976142A CN1976142A CN 200610098045 CN200610098045A CN1976142A CN 1976142 A CN1976142 A CN 1976142A CN 200610098045 CN200610098045 CN 200610098045 CN 200610098045 A CN200610098045 A CN 200610098045A CN 1976142 A CN1976142 A CN 1976142A
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Abstract
A starting stable-discharging method of pulse radio frequency blade CO2 laser includes connecting scanner to coaxial cable on laser impedance matching box through stationary wave bridge, forming network impedance matching box by variable capacities of C1 and C2 as well as L, starting scanner and regulating C1 and C2, inputting power with input peak value <=2KW and duty ratio <= 20% then regulating C2 continuously, regulating duty radio from <= 20% to 50% and regulating C2 continuously to make reflection power be minimum for entering said laser into stabilized operation.
Description
Technical field
The present invention relates to a kind of pulse radiation frequency CO slab
2Laser especially relates to a kind of pulse radiation frequency CO slab
2The build-up of luminance of laser, stable discharging method.Belong to the laser technique field.
Background technology
The pulse radiation frequency CO slab
2Laser uses the excitation energy of complete solid state pulse radio frequency source as it.The complete solid state pulse radio frequency source has used a large amount of high-power FETs, and the ability that stands the reflection power impact is very weak, and strict control reflection power is no more than the damage threshold of field effect transistor, is complete solid state pulse radio frequency source and pulse radiation frequency CO slab
2A necessary condition of the normal operation of laser.
The key factor of decision radio-frequency power reflection size is the matching state of laser gas plasma impedance and complete solid state pulse radio frequency source output impedance 50 Ω.Generally speaking, the laser plasma impedance is not equal to 50 Ω, and it makes it to equal 50 Ω by impedance matching box by network transformation, reaches coupling.The laser gas plasma impedance is directly relevant with factors such as the size of the radio-frequency power of the composition of laser gas, gas pressure, injection and radio-frequency electromagnetic wave frequencies again.The pulse CO slab
2Laser is because the radio frequency average power of injecting is very big, thereby the laser plasma impedance variation is big especially.Thus, when laser did not discharge, gas was cold state, and the plasma impedance the when impedance of gas and laser stable operation has great difference.Behind the laser build-up of luminance, impedance variation is big especially.Because the variation of laser impedance, how making the rapid build-up of luminance of laser of cold conditions and stable discharging is a technical problem that difficulty is very big, and the various countries scholar has invented thousand and one way and solved it.
No. 5155739, United States Patent (USP) proposes radio-frequency (RF) board bar CO
2Laser ultraviolet preionization technique.It is to settle low pressure argon---mercury lamp in laser, with the region of discharge of the UV-irradiation laser of 185 to 254 nanometers of its emission, the irradiation of ultraviolet light impels gas molecule ionization, thereby can be after adding radio-frequency (RF) energy, make the laser build-up of luminance rapidly and reach stable discharging, produce laser.
No. 4748634, United States Patent (USP), in order to make RF-laser device build-up of luminance and to enter steady-working state, they design radio frequency source can produce a resonance frequency electromagnetic wave and an initial frequency electromagnetic wave, after the laser build-up of luminance, electromagnetic frequency is transformed to rapidly on the laser resonance frequency by initial frequency, thereby laser reaches the state of stable operation.The electromagnetic wave of two kinds of frequencies of complete solid state pulse radio frequency source emission also has the automatic ability of change frequency rapidly, has solved this problem.
Above patent has solved the build-up of luminance and the stable operation problem of pulse laser well, but also has shortcoming separately.At first, settle uviol lamp in laser, the life-span of ultraviolet argon-mercury lamp has just determined the life-span of laser, in case argon-mercury lamp can not be normally luminous, laser just quits work, and is extraneous uncontrollable.And, allow ultraviolet light directly shine region of discharge, position of laying and the fixing certain degree of difficulty that all exists.
Allow radio frequency source have the electromagnetic wave that sends two rf frequencies, frequency and the automatic instantaneous conversion of energy, the design and the making of giving solid-state radio frequency source have increased many difficulties.
Summary of the invention
The objective of the invention is to overcome above-mentioned deficiency, a kind of ultraviolet light beam preionization that do not need is provided, radio frequency source also only needs the radio-frequency pulse of a carrier frequency of emission, but laser is with regard to the pulse radiation frequency CO slab of trouble free service, stable operation
2The build-up of luminance of laser, stable discharging method.
The object of the present invention is achieved like this: a kind of pulse radiation frequency CO slab
2The build-up of luminance of laser, stable discharging method is characterized in that this method comprises following processing step:
Step 1, sweep generator is linked to each other with coaxial fitting on the laser impedance matching box by the standing wave electric bridge.Laser built-in upper and lower two be parallel to each other, the electrode of distance≤2mm, be connected with parallel resonant inductor L between upper and lower two electrodes equidistantly along two sides
1, bottom electrode links to each other with the casing of laser, with variable capacitance C
1And C
2Positive pole link to each other with inductance L, with variable capacitance C
1Positive pole link to each other with the inner wire of coaxial fitting.With variable capacitance C
2Positive pole link to each other with the top electrode of laser, with variable capacitance C
1And C
2Negative pole link to each other chassics earth, variable capacitance C with the casing of laser
1And C
2And inductance L composition π network impedance adaptation, the parameter of π network impedance adaptation is made following selection: C
1＞＞C
2, L＜0.186 μ H is when machining area is 180cm
2～360cm
2The time, select variable capacitance C
1Maximum be 1000pf, variable capacitance C
2Maximum be 100pf;
Step 2, open sweep generator, regulate C
1, C
2Value, on the display screen of sweep generator, access
Shape resonance curve, the resonance frequency of this resonance curve are f
0, it is identical with the carrier frequency of radio frequency source.F for example
0=100MHz.
C is regulated in step 4, continuation
2, monitor from the reflection power table of complete solid state pulse radio frequency source, make the reflection power minimum of laser;
Step 5, the output of complete solid state pulse radio frequency source is transferred to 50% duty ratio by≤20% duty ratio, peak power rises to 6KW, and continues to regulate C
2Make it the reflection power minimum, at this moment, laser is at f
0Operation has entered steady operational status.
If, and directly use 6KW without the low-duty-cycle pulses of low average power, 50% total power modulating pulse, laser also can build-up of luminance, but reflection power is too big, and all solid state radio frequency source of pulse will damage.
For this reason, the present invention does not need ultraviolet light beam preionization, and radio frequency source also only needs the radio-frequency pulse of a carrier frequency of emission, but laser is with regard to trouble free service, stable operation.
Description of drawings
Fig. 1 is the laser winding diagram that is connected to standing wave electric bridge and sweep generator of the present invention.
The frequency characteristics of the laser that Fig. 2 accesses on the sweep generator display screen with π network impedance adaptation in cold conditions for the present invention.F among the figure
0Be carrier frequency.
Fig. 3 is the laser winding diagram that is connected to π network impedance adaptation and complete solid state pulse radio frequency source of the present invention.
Equivalent circuit diagram when Fig. 4 does not discharge for laser of the present invention.
Equivalent circuit diagram when Fig. 5 is laser of the present invention discharge.
Among the figure: laser 1, impedance matching box 2,50 Ω coaxial cables 3, standing wave electric bridge 4, sweep generator 5, complete solid state pulse radio-frequency power supply 6, backward power dial gauge 7, top electrode 1.1, bottom electrode 1.2, housing 1.3, parallel resonant inductor L
1, variable capacitance C
1With C
2, inductance L, coaxial fitting 3.1, standard 50 Ω terminate loads 3.2, detection input 5.1, radio-frequency (RF) output end mouth 5.2.
Embodiment
The present invention relates to a kind of pulse radiation frequency CO slab
2The build-up of luminance of laser, stable discharging method.It comprises following processing step:
Step 1, referring to Fig. 1, sweep generator 5 is linked to each other with laser impedance matching box 2 by standing wave electric bridge 4.Laser 1 built-in upper and lower two be parallel to each other, the electrode 1.1,1.2 of distance≤2mm, be connected with parallel resonant inductor L between upper and lower two electrodes 1.1,1.2 equidistantly along two sides
1, bottom electrode 1.2 links to each other with the casing 1.3 of laser, with variable capacitance C
1And C
2Positive pole link to each other with inductance L, with variable capacitance C
1Positive pole link to each other with the inner wire of the coaxial fitting 3.1 of 50 Ω.With variable capacitance C
2Positive pole link to each other with the top electrode 1.1 of laser 1, with variable capacitance C
1And C
2Negative pole link to each other casing 1.3 ground connection, variable capacitance C with the casing 1.3 of laser
1And C
2And inductance L is formed π network impedance adaptation 2.In the present invention, the parameter of π network impedance adaptation 2 is made following selection: C
1＞＞C
2, L＜0.186 μ H is when machining area is 180cm
2～360cm
2The time, select variable capacitance C
1Maximum be 1000pf, variable capacitance C
2Maximum be 100pf.
Step 2, open sweep generator 5, regulate C
1, C
2Value, go out frequency characteristics shown in Figure 2 in the display screen adjusted of sweep generator, the resonance frequency of this resonance curve is f
0, it is identical with the carrier frequency of radio frequency source.F among the figure
0=100MHz.
C is regulated in step 4, continuation
2,, make the reflection power minimum of laser from backward power dial gauge 7 monitorings of complete solid state pulse radio frequency source.
Step 5, the output of complete solid state pulse radio frequency source is transferred to 50% duty ratio by 17% duty ratio, peak power rises to 6KW, continues to regulate C
2Make it the reflection power minimum.At this moment, laser is at f
0Operation has entered steady operational status.
We again from Circuit theory analyze the above course of work as can be seen the inventive method be very rational:
When laser does not have injecting power, and the complete solid state pulse radio frequency source is not connected with π network impedance tuner.The equivalent electric circuit of laser can be represented by Fig. 4.Among the figure: variable capacitance C
1And C
2, inductance L, distributed inductance L
Divide, distributed resistance R
Divide, the electrode structure capacitor C between the upper and lower battery lead plate of laser
El, the capacitor C between laser top electrode and the laser housing
Eg
After laser is annotated impingement rate power regular picture output laser, be covered with quasi-neutral plasma between the laser electrode, it has plasma capacitance C
PlAnd resistance R
Pl, resistance R
PlRepresent the laser glow discharge loss and be transformed into the energy loss of laser.And when 100MHZ, in the distance near laser electrode surface 0.35mm positive-ion sheath being arranged, it has capacitor C
iAnd loss resistance R
r(less relatively).Thereby when laser discharged, its equivalent electric circuit developed into Fig. 5 by Fig. 4.
In Fig. 5, choose electrode parallel resonant inductor L
1Value, make it and capacitor C
Eg, C
Pl, C
i, R
i, R
PlThe circuit that constitutes is at f
0Produce parallel resonance.f
0Be 100MHZ.Radio frequency incident average power is 3KW.At machining area 180cm
2The time, electrode shunt inductance L
1Be decided to be 0.5 μ H.
Comparison diagram 4 and Fig. 5 are because plasma capacitance C
Pl, positive ionosphere capacitor C
iWith the electrode structure capacitor C
ElDifference is at remaining C
1, C
2, L, C
Eg, C
Divide, R
Divide, L
1When parameter remained unchanged, the natural mode shape of two circuit had obviously had frequency displacement Δ f.That is to say, when the cold conditions circuit is tuned at f
0The time, keep C
1, C
2Invariant position, L is constant, and after the discharge, the natural resonance frequency of circuit has become f
0+ Δ f.We change C
2, making Δ f=0, this moment, circuit resonance was at f
0, identical with all solid state radio frequency source carrier frequency of pulse, thereby reflection is minimum, laser is able to stable operation.
Claims (2)
1, a kind of pulse radiation frequency CO slab
2The build-up of luminance of laser, stable discharging method is characterized in that this method comprises following processing step:
Step 1, sweep generator (5) is linked to each other with coaxial fitting (3.1) on the laser impedance matching box (2) by standing wave electric bridge (4), laser (1) built-in upper and lower two be parallel to each other, the electrode (1.1) of distance≤2mm, (1.2), be connected with two parallel resonant inductor L between upper and lower two electrodes (1.1), (1.2) equidistantly along two sides
1, bottom electrode (1.2) links to each other with the casing (1.3) of laser, with variable capacitance C
1And C
2Positive pole link to each other with inductance L, with variable capacitance C
1Positive pole link to each other with the inner wire of coaxial fitting (3.1), with variable capacitance C
2Positive pole link to each other with the top electrode (1.1) of laser (1), with variable capacitance C
1And C
2Negative pole link to each other casing (1.3) ground connection, variable capacitance C with the casing (1.3) of laser
1And C
2And inductance L composition π network impedance adaptation (2), the parameter of π network impedance adaptation (2) is made following selection: C
1＞＞C
2, L＜0.186 μ H is when machining area is 180cm
2～360cm
2The time, select variable capacitance C
1Maximum be 1000pf, variable capacitance C
2Maximum be 100pf;
Step 2, open sweep generator (5), regulate C
1, C
2Value, on the display screen of sweep generator, access
Shape laser frequency characteristic curve, the resonance frequency of this resonance curve are f
0, it is identical with the carrier frequency of radio frequency source;
Step 3, complete solid state pulse radio frequency source (6) is linked to each other with coaxial cable (3) with laser (1), open complete solid state pulse radio frequency source (6), the radio-frequency pulse power of duty ratio≤20% of input peak value≤2KW, laser build-up of luminance, output weak laser;
C is regulated in step 4, continuation
2,, make the reflection power minimum of laser from backward power dial gauge (7) monitoring of complete solid state pulse radio frequency source;
Step 5, the output of complete solid state pulse radio frequency source is transferred to 50% duty ratio by≤20% duty ratio, peak power rises to 6KW, continues to regulate C
2Make it the reflection power minimum, at this moment, laser is at f
0Operation has entered steady operational status.
2, a kind of pulse radiation frequency CO slab according to claim 1
2The build-up of luminance of laser, stable discharging method, its feature also are a kind of all solid state pulse radiation frequency source, and it exports a fixing carrier frequency, and pulse duty factor and modulating frequency can change.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100980452A CN100435435C (en) | 2006-11-29 | 2006-11-29 | Starting and stable discharging method for pulse radio-frequency panel CO2 laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100980452A CN100435435C (en) | 2006-11-29 | 2006-11-29 | Starting and stable discharging method for pulse radio-frequency panel CO2 laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1976142A true CN1976142A (en) | 2007-06-06 |
| CN100435435C CN100435435C (en) | 2008-11-19 |
Family
ID=38126007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100980452A Expired - Fee Related CN100435435C (en) | 2006-11-29 | 2006-11-29 | Starting and stable discharging method for pulse radio-frequency panel CO2 laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100435435C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105514768A (en) * | 2014-10-17 | 2016-04-20 | 北京礴德恒激光科技有限公司 | Cantilever support one-dimensional slab waveguide gas laser |
| CN105514780A (en) * | 2015-12-31 | 2016-04-20 | 北京热刺激光技术有限责任公司 | Laser for cutting leather and control method for realizing leather cutting |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4748634A (en) * | 1987-03-20 | 1988-05-31 | Hughes Aircraft Company | Pumping system for RF excited gas devices |
| US5155739A (en) * | 1990-10-12 | 1992-10-13 | Coherent, Inc. | RF excited CO2 slab waveguide laser |
| CN2317561Y (en) * | 1997-10-17 | 1999-05-05 | 中国科学院等离子体物理研究所 | One thousand watt radio frequency exciting fast axial flow carbon dioxide laser |
-
2006
- 2006-11-29 CN CNB2006100980452A patent/CN100435435C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105514768A (en) * | 2014-10-17 | 2016-04-20 | 北京礴德恒激光科技有限公司 | Cantilever support one-dimensional slab waveguide gas laser |
| CN105514780A (en) * | 2015-12-31 | 2016-04-20 | 北京热刺激光技术有限责任公司 | Laser for cutting leather and control method for realizing leather cutting |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100435435C (en) | 2008-11-19 |
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Granted publication date: 20081119 Termination date: 20101129 |