CN1975794A - Vibration detection method and system, battery-less vibration sensor and interrogator therefor - Google Patents
Vibration detection method and system, battery-less vibration sensor and interrogator therefor Download PDFInfo
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- CN1975794A CN1975794A CN 200610172870 CN200610172870A CN1975794A CN 1975794 A CN1975794 A CN 1975794A CN 200610172870 CN200610172870 CN 200610172870 CN 200610172870 A CN200610172870 A CN 200610172870A CN 1975794 A CN1975794 A CN 1975794A
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- vibration transducer
- transformer vibration
- transformer
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Abstract
A vibration detection system comprises a battery-less vibration sensor and an interrogator. The sensor comprises a single port surface acoustic wave resonator. The interrogator continuously transmits a carrier wave signal to the resonator while receiving a wave signal reflected from the resonator. The reflected wave signal includes components other than the transmitted carrier wave signal if the sensor senses a vibration event. Based the reflected wave signal, the interrogator judges whether the vibration event occurs.
Description
Background technology
The present invention relates to a kind of vibration detection method, and the vibration detecting system of a kind of involving vibrations sensor and interrogator.
Background technology
Proposed and known vibration transducer of all kinds, be used to identify, the break detection of incident of glass or pane, the perhaps detection of equipment or lathe abnormal vibrations such as the shock-resistance features of structure or buildings.
JP-A 2000-48268 discloses a kind of instantaneous and system cyclic fluctuation of surveying, the vibration that produces when breaking as glass or pane.Disclosed system comprises the vibration transducer of being made by piezoelectric, is converted to electric signal with the vibration that the glass breakage incident is produced.
Yet because structural reason, disclosed size sensor is too big.Need a kind of new structure that can dwindle the vibration transducer size.
Summary of the invention
One aspect of the present invention is applied to radio-frequency (RF) identification (RFID) in method for detecting vibration or the system, to realize non-transformer (battery-less) vibration transducer.
According to a kind of scheme of the present invention, a kind of method of detection of a target object vibration state is proposed, it comprises the steps: the non-transformer vibration transducer that is provided with single port surface acoustic wave (SAW) resonator is fixed on the target object; The non-transformer vibration transducer is configured in order to detect the vibrational state such as the mechanical vibration of non-transformer vibration transducer; Send carrier signal continuously to single port SAW resonator; Continuous monitoring is from the signal of single port SAW resonator reflection wave; And according to being included in the reflection wave signal and, reporting vibrational state by the fluctuation that mechanical vibration cause.
According to another scheme of the present invention, a kind of vibration detecting system is proposed, it comprises: the non-transformer vibration transducer that has single port surface acoustic wave (SAW) resonator, according to practical application described non-transformer vibration transducer is installed on the target object, and it is configured to follow the mechanical vibration of non-transformer vibration transducer and the vibrational state that detects target object; And interrogator, it is configured in order to finish: send carrier signal continuously to single port SAW resonator; Continuous monitoring is from the signal of single port SAW resonator reflection wave; And according to being included in the described reflection wave signal, and the fluctuation report vibrational state that causes by mechanical vibration.
By below with reference to accompanying drawing research description of preferred embodiments, can obtain the object of the invention is better understood and to its more fully understanding of structure.
Description of drawings
Fig. 1 is the synoptic diagram of expression an embodiment of the present invention vibration detecting system;
Fig. 2 is the skeleton view of non-transformer vibration transducer in the presentation graphs 1;
Fig. 3 is the sectional view of sensor chip in the presentation graphs 2;
Fig. 4 is the plan view from above of the single port SAW resonator of presentation graphs 3;
Fig. 5 is the thin portion enlarged drawing of oval part shown in the presentation graphs 4;
Fig. 6 is the schematic block diagram of d interrogator in the presentation graphs 1;
Fig. 7 is that exemplary process flow diagram is carried out in the judgment part in the presentation graphs 6; And
Fig. 8 is the synoptic diagram of a kind of application example of the system in the presentation graphs 1.
Though the present invention allows remodeling miscellaneous and replacement form, by the example in the accompanying drawing its specific implementations is shown, will give detailed description here.Yet be to be understood that, these accompanying drawings and detailed description are not invention to be defined as disclosed special shape, but on the contrary, being intended that of it will cover the purport of the present invention that falls into claims definition and all remodeling, equivalent and the replacement form of scope.
Embodiment
With reference to Fig. 1, comprise non-transformer vibration transducer 100 and interrogator 200 according to the vibration detecting system of one embodiment of the present invention.According to its practical application, non-transformer vibration transducer 100 is fixed to such as on the target objects such as glass pane.Inquiry body 200 passes through to send continuously carrier signal, and receives the answer signal from non-transformer vibration transducer 100, inquiry non-transformer vibration transducer 100.Mechanical vibration along with non-transformer vibration transducer 100, if non-transformer vibration transducer 100 detects the vibrational state or the vibration event of target object, it comprises and the corresponding to fluctuation of the mechanical vibration of non-transformer vibration transducer 100 answer signal of interrogator 200, thereby makes interrogator 200 can detect the vibrational state of target object.
As shown in Figure 1, non-transformer vibration transducer 100 comprises antenna 10 and sensor chip 20.In sensor chip 20, include single port SAW resonator 30.Antenna 10 is electrically connected to single port SAW resonator 30.
As shown in Figure 2, the non-transformer vibration transducer 100 of present embodiment is a label form.In detail, non-transformer vibration transducer 100 also comprises label substrate 40.The label substrate 40 of present embodiment is made by synthetic resin, but the present invention is not limited to this.For example, can make described label substrate by paper, metal, pottery, timber or concrete.Be formed with antenna 10 on the label substrate 40, and sensor chip 20 is installed.As an example, described antenna 10 can be the film antenna 11 and 12 of one group of conduction.Can also be that film antenna 11,12 is embedded in the label substrate 40 with antenna 10.Similarly, also sensor chip 20 can be embedded in the label substrate 40.
With reference to Fig. 3, described sensor chip 20 comprises supporting substrate 22 and cap cover part 23.Supporting substrate 22 and cap cover part 23 limit a cavity 24, and cavity inside is supported with single port SAW resonator 30 by supporting substrate 22, and single port resonator 30 can be vibrated in cavity 24.In detail, described supporting substrate 22 comprises main part 22a that roughly is plate-like and the sidewall sections 22b that stands on this main part 22a.Main part 22a is formed with depressed part 22c.By making described supporting substrate 22 and cap cover part 23 such as silicon or pottery.
With resisting medium also cap cover part 23 adhere to the edge of supporting substrate 22, also be the top of sidewall 22b.Thereby supporting substrate 22 and cap cover part 23 are sealed, form closed cavity 24.
Shown in Fig. 3 and 4, the single port SAW resonator 30 in the present embodiment comprises piezoelectric substrate 32, interdigital transducer (IDT) 34 and reverberator 37,38.Described piezoelectric substrate 32 has the shape that is similar to plate.On a surface of piezoelectric substrate 32, form IDT34 and reverberator 37,38.Piezoelectric substrate 32 in the present embodiment is by langbanite (La
3Ga
5SiO
14) monocrystalline makes, but also can be by another kind of monocrystalline, as quartzy, lithium niobate (LiNbO
3), lithium tantalate (LiTaO
3), lithium borate (LBO
2) or zinc paste make.
As shown in Figure 3, described piezoelectric substrate 32 supported substrates 22 are supported for cantilevered fashion, thereby IDT34 is positioned at above the sunk part 22c.In other words, piezoelectric substrate 32 has support section and extension; Support section is subjected to supporting substrate 22 and supports, and extension reach sunk part 22c above; On extension, form described IDT34.In the present embodiment, IDT34 is towards sunk part 22c.In addition, IDT34 is positioned in the position near the support section of piezoelectric substrate 32.In other words, IDT34 is positioned at the root of piezoelectric substrate 32 extensions.
Shown in Fig. 3 and 4, IDT34 is formed with coupling part 35,36, and the pattern (not shown) on making them and be formed at supporting substrate 22 by welding block 25,26 links to each other; Described pattern also passes the through hole (not shown) and is connected to the terminals 27 that are formed on the supporting substrate 22.Terminals 27 are connected to antenna 11,12 by line or the trace 42 that is formed on label substrate 40 (see figure 2)s.Like this, between the IDT34 of single port SAW resonator 30 and antenna 11,12, form electric pathway, thereby the waveform signal that antenna 11,12 is received is added to IDT34 by electric pathway; On the waveform signal that the IDT34 reflection receives,, reflection wave signal is sent to interrogator 200 by described electric pathway and antenna 11,12.In the present embodiment, on each boundary surface of described electric pathway, guarantee impedance matching, do not comprise undesirable reflection in the reflection wave signal thereby make.
The piezoelectric substrate 32 of present embodiment has special shape, according to this shape, the resonance frequency of single port SAW resonator 30 belongs to the typical frequencies of the mechanical vibration that detect target object, such as the typical frequencies of the glass breakage incident in detecting the glass breakage situation.So the resonance frequency of adjusting causes, even after target object stops vibration, piezoelectric substrate 32 still can sustained vibration.In the present embodiment, piezoelectric substrate 32 has fixing thickness, thereby can adjust its resonance frequency by the length that changes piezoelectric substrate 32 extensions.
As shown in Figure 5, IDT34 comprises two essential parts, only with reference numerals 34a one of them is shown among the figure, also comprises two groups of finger piece 34b, 34c.Each finger piece 34b among Fig. 5 raises up from essential part 34a.Among another group finger piece 34c each is not given another essential part of illustrating to lower convexity from Fig. 5.One group of finger piece 34b and another group finger piece 34c alternately arrange by the interval of rule.Each finger piece 34b, 34c have width W
1, and extend along the vertical direction among Fig. 5.Adjacent finger piece 34b and 34c are with distance D
1Separated from one another.In the present embodiment, described width W
1With described distance D
1Equate.
Distance D
1Resonance frequency for single port SAW resonator 30 can be influential.In the present embodiment, with described distance D
1Determine and be designed to, make the resonance frequency of single port SAW resonator 30 equal the frequency of the carrier signal that sends from interrogator 200.
With reference to Fig. 6, interrogator 200 comprises emitter/receiver 210, judgment part 220, output 230 and interface (I/F) part 240.
Described emitter/receiver 210 has the function of continuous transmission carrier signal to non-transformer vibration transducer 100, and the function that is received from the ripple signal of non-transformer vibration transducer 100 reflections.Typical emitter/receiver 210 comprises transmitter, circulator, the antenna that is used for sending continuously carrier signal, and the receiver that is used to receive reflection wave signal.In the present embodiment, even when receiving reflection wave signal, described emitter/receiver 210 also sends carrier signal continuously.In other words, the emitter/receiver among the embodiment 210 is carried out and is sent carrier signal and receive reflection wave signal.
Carrier signal in the present embodiment is become to be grouped into by single-frequency, and promptly the form with simple sinusoidal ripple signal occurs.Yet, if carrier signal is not a transient pulse, but having periodic variation, carrier signal can comprise multiple frequency content.Described carrier signal preferably has periodically, changes stably, so that the difference between easy discriminatory carrier signal and the reflection wave signal.
Described judgment part 220 is connected to emitter/receiver 210, has the monitoring reflection wave signal to judge whether target object is in the function of vibrational state.When non-transformer vibration transducer 100 detected the vibration event of target object, the received carrier signal of single port SAW resonator 30 reflections wherein contained vibration information.For example, vibration information is at least a in amplitude, frequency and the phase place that does not belong to carrier signal.In other words, single port SAW resonator 30 is modulated the carrier signal that receives according to detected vibration event.Therefore, when recognizing above-mentioned modulation, judgment part 220 judges that target object is in vibrational state.
Described output 230 is connected to judgment part 220, and, if judgment part 220 judges that target object is in vibrational state, then notify judged result to the user.In the present embodiment, described output 230 comprises hummer.
Described I/F part 240 be connected judgment part 220 and do not give the upper unit that illustrates, partly/unit between.If judgment part 220 judges that target object is in vibrational state, then described I/F part 240 is used for judging the notice upper unit.
Fig. 7 illustrates the example deterministic process of judgment part 220; Judgment part 220 in this example comprises timer.When detecting early-warning conditions (S101), under this condition, reflection wave signal comprises the modulation composition that does not belong to carrier signal, and judgment part 220 is set at 50ms (S102) with its timer.Then, whether judgment part 220 monitorings continue described early-warning conditions (S103).If early-warning conditions continues 50ms (S104), then judgment part 220 judges that target object is in vibrational state.After such judgement, hummer is opened in judgment part 220, and records vibrational state by I/F part 240 notice upper units.
Though the system of present embodiment comprises an independent non-transformer vibration transducer, the present invention is not so limited.Described vibration detecting system can comprise a plurality of non-transformer vibration transducers.Particularly have as shown in Figure 8, described vibration detecting system can comprise an independent interrogator 200a and a plurality of non-transformer vibration transducer 100
1, 100
2, they comprise single port SAW resonator 30 respectively
1, 30
2Single port SAW resonator 30
1, 30
2Has the structure that is similar to above-mentioned resonator 30.For example, by selecting the appropriate length of its piezoelectric substrate extension, make described single port SAW resonator 30
1, 30
2Has the resonance frequency that differs from one another.Interrogator 200a is according to its single port SAW resonator 30
1, 30
2Different resonance frequencies, discern non-transformer vibration transducer 100
1, 100
2
Japanese patent application JP2005-327855, JP2006-025852 and the JP2006-197678 of the application to submit in Jap.P. office respectively on November 11st, 2005, on January 11st, 2006 and July 20 in 2006, this paper draw their content and are list of references.
Though be described to being considered to the preferred embodiments of the present invention, but those skilled in the art should understand, under the situation that does not break away from purport of the present invention and scope, can to its carry out other, further remodeling, and be intended that all such embodiments that require to fall into true scope of the present invention.
Claims (28)
1. a method that detects the target object vibrational state comprises the steps:
The non-transformer vibration transducer that will be provided with single port surface acoustic wave (SAW) resonator is fixed on the target object, the non-transformer vibration transducer is configured to follow the mechanical vibration of non-transformer vibration transducer and detects vibrational state;
Carrier signal is sent to single port SAW resonator continuously;
Continuous monitoring when the non-transformer vibration transducer detects vibrational state, comprises the fluctuation that is caused by mechanical vibration from the ripple signal of single port SAW resonator reflection in the reflection wave signal; And
According to fluctuation report vibrational state.
2. method according to claim 1 wherein, is finished described continuous transmission and reception continuously simultaneously.
3. method according to claim 1, wherein, the step of described report vibrational state comprise check reflection wave signal whether comprise in all amplitudes that do not belong to carrier signal, frequency and the phase place one of at least.
4. vibration detecting system, it comprises:
Non-transformer vibration transducer with single port surface acoustic wave (SAW) resonator, described non-transformer vibration transducer is according to its practical application, be fixed on the target object, and it be configured to follow the mechanical vibration of non-transformer vibration transducer and the vibrational state that detects target object; And
Interrogator, it is configured to be used for carry out: carrier signal is sent to single port SAW resonator continuously; Continuous monitoring when the non-transformer vibration transducer detects vibrational state, comprises the fluctuation that causes because of mechanical vibration from the ripple signal of single port SAW resonator reflection in the reflection wave signal; And according to fluctuation report vibrational state.
5. vibration detecting system according to claim 4 wherein, is configured to described interrogator in order to the continuous transmission of finishing carrier signal simultaneously and the monitoring of reflection wave signal.
6. vibration detecting system according to claim 4 wherein, is configured to described interrogator, by check reflection wave signal whether comprise in all amplitudes that do not belong to carrier signal, frequency and the phase place one of at least, and report vibrational state.
7. non-transformer vibration transducer that is fixed to target object, it comprises:
Antenna; With
Single port surface acoustic wave (SAW) resonator that is electrically connected with described antenna.
8. non-transformer vibration transducer according to claim 7, wherein, described sensor can be fixed on the target object, and follows the mechanical vibration of non-transformer vibration transducer and detect the vibrational state of target object;
Described antenna configuration is become in order to the reception carrier signal, be sent to single port SAW resonator, and described antenna configuration is become to be used for to send the ripple signal that reflects from single port SAW resonator with the carrier signal that will receive; And
Described single port SAW resonator configurations is become, if target object is in vibrational state, reflection wave signal just comprises the fluctuation that causes because of mechanical vibration.
9. non-transformer vibration transducer according to claim 8, wherein, described single port SAW resonator comprises piezoelectric substrate, is formed at the interdigital transducer (IDT) on the piezoelectric substrate; Described non-transformer vibration transducer also comprises the supporting substrate that supports piezoelectric substrate.
10. according to the non-transformer vibration transducer of claim 9, wherein, described single port SAW resonator also comprises the energy block device, and described energy block device is configured for prevention loses institute's reception carrier signal on every side from IDT or IDT energy.
11. non-transformer vibration transducer according to claim 10, wherein:
Described IDT comprises a plurality of finger pieces, and each finger piece extends along first direction, and each finger piece is along arranging with the second direction of first direction quadrature, and each finger piece has two end finger on second direction, and other finger piece is between these two end finger; And
Described energy block device has a reverberator at least, and described reverberator is formed on the piezoelectric substrate, and extension is along the position of contiguous one of them end finger on the second direction.
12. non-transformer vibration transducer according to claim 11, wherein:
Described finger piece is by arranged at regular intervals, and adjacent finger piece is oriented to first distance separated from one another; And
Described reverberator is oriented to separate second distance with end finger, and second distance equals the integral multiple of first distance.
13. non-transformer vibration transducer according to claim 9, wherein, described piezoelectric substrate has given shape, causes the resonance frequency of single port SAW resonator to belong to the typical bands of mechanical vibration.
14. non-transformer vibration transducer according to claim 9, wherein:
Supporting substrate comprises the disc-shaped main body part that has sunk part; And
Support piezoelectric substrate, make IDT be positioned at the top of sunk part.
15. non-transformer vibration transducer according to claim 14, wherein, described piezoelectric substrate is supported, and makes IDT face sunk part.
16. non-transformer vibration transducer according to claim 9, wherein, piezoelectric substrate is supported with cantilevered fashion.
17. non-transformer vibration transducer according to claim 9 wherein, also comprises cap cover part,
Described cap cover part and supporting substrate limit a cavity; And
Piezoelectric substrate is supported, so that piezoelectric substrate is vibratile in described cavity.
18. non-transformer vibration transducer according to claim 17, wherein, described cap cover part and supporting substrate seal.
19. non-transformer vibration transducer according to claim 7 wherein, also comprises the label substrate that is provided with antenna.
20. non-transformer vibration transducer according to claim 19, wherein:
Described dwi hastasana is formed on the label substrate; And
Single port SAW resonator is installed on the label substrate, thereby makes the non-transformer vibration transducer form label form.
21. non-transformer vibration transducer according to claim 19, wherein:
Described dwi hastasana is formed on the label substrate; And
In the substrate of single port SAW resonator embedded tags, thereby make the non-transformer vibration transducer form label form.
22. non-transformer vibration transducer according to claim 19, wherein:
Described antenna is formed in the label substrate; And
Single port SAW resonator is installed on the label substrate, thereby makes the non-transformer vibration transducer form label form.
23. non-transformer vibration transducer according to claim 19, wherein:
Described antenna is formed in the label substrate; And
In the substrate of single port SAW resonator embedded tags, thereby make the non-transformer vibration transducer be formed label form.
24. non-transformer vibration transducer according to claim 19, wherein:
Make described label substrate by synthetic resin, paper, metal, pottery, timber or concrete; And
Make described antenna by conductive film.
25. interrogator, can be used for comprising in the vibration detecting system of non-transformer vibration transducer, described non-transformer vibration transducer is fixed on the target object according to practical application, and it is configured to follow the mechanical vibration of non-transformer vibration transducer and the vibrational state that detects target object, described interrogator comprises:
Emitter/receiver, it is configured to a carrier signal and sends to the non-transformer vibration transducer continuously, and be configured to be received from continuously the ripple signal of non-transformer vibration transducer reflection, when the non-transformer vibration transducer detected vibrational state, reflection wave signal comprised the fluctuation that causes because of mechanical vibration; With
The judgment part is connected with emitter/receiver, and is configured to monitor reflection wave signal, so that judge according to fluctuation whether target object is in vibrational state.
26. interrogator according to claim 25, wherein, described judgment part is configured to carry out:
Check reflection wave signal whether comprise in all amplitudes that do not belong to carrier signal, frequency and the phase place one of at least; And
Judge according to the result who checks whether target object is in vibrational state.
27. interrogator according to claim 25, wherein, described judgment part is configured to carry out:
Detect alert status, under alert status reflection wave signal comprise in amplitude, frequency and the phase place that does not belong to carrier signal one of at least;
Whether the monitoring and warning state continues preset time; And
Continue at alert status under the situation of the schedule time, judge that target object is in vibrational state.
28. the vibration detecting system according to radio-frequency (RF) identification figure, described vibration detecting system comprises:
Interrogator is configured to send continuously carrier signal; With
The non-transformer vibration transducer is configured to utilize the carrier signal electromagnetic energy to detect vibration event.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005327855 | 2005-11-11 | ||
| JP2005327855 | 2005-11-11 | ||
| JP2006025852 | 2006-02-02 | ||
| JP2006197678 | 2006-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1975794A true CN1975794A (en) | 2007-06-06 |
Family
ID=38125838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610172870 Pending CN1975794A (en) | 2005-11-11 | 2006-11-08 | Vibration detection method and system, battery-less vibration sensor and interrogator therefor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1975794A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101770592A (en) * | 2009-12-31 | 2010-07-07 | 上海量科电子科技有限公司 | Vibration detection electronic tag and system based on touch pressure switch |
| CN102889923A (en) * | 2012-09-05 | 2013-01-23 | 上海交通大学 | Vibration sensor based on surface acoustic wave radio frequency identification technology and application for vibration sensor |
-
2006
- 2006-11-08 CN CN 200610172870 patent/CN1975794A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101770592A (en) * | 2009-12-31 | 2010-07-07 | 上海量科电子科技有限公司 | Vibration detection electronic tag and system based on touch pressure switch |
| CN102889923A (en) * | 2012-09-05 | 2013-01-23 | 上海交通大学 | Vibration sensor based on surface acoustic wave radio frequency identification technology and application for vibration sensor |
| CN102889923B (en) * | 2012-09-05 | 2014-08-20 | 上海交通大学 | Vibration sensor based on surface acoustic wave radio frequency identification technology and application for vibration sensor |
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Application publication date: 20070606 |