CN1969360A - Method and equipment for manufacturing image display device - Google Patents
Method and equipment for manufacturing image display device Download PDFInfo
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- CN1969360A CN1969360A CN 200580020198 CN200580020198A CN1969360A CN 1969360 A CN1969360 A CN 1969360A CN 200580020198 CN200580020198 CN 200580020198 CN 200580020198 A CN200580020198 A CN 200580020198A CN 1969360 A CN1969360 A CN 1969360A
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Abstract
In the case of manufacturing a vacuum envelop for an image display device, degasification is performed by baking a rear plane board (4) whereupon a plurality of strip-shaped long and thin spacers (8) stand. At this time, irradiation of radiation heat on the side planes of the spacers (8) can be prevented by irradiating the spacers (8) with radiation heat from above the spacers (8), and increase of a temperature difference between the spacers (8) and the rear plane board (4) can be suppressed.
Description
Technical field
The present invention relates between counter substrate, to have the manufacture method and the manufacturing installation of the vacuum casting image-display units of reinforcement feature.
Background technology
In recent years, LCD (LCD), Field Emission Display (FED) and plasma scope (PDP) are progressively known by people as a kind of planar vacuum shell image-display units.As a kind of FED, developed a kind of surface-conduction-electron emission display with surface conductive type electronic emission element (Surface-conduction Electron-emitter Display, SED).
SED has prebasal plate and metacoxal plate, and two substrates are opposite each other and leave predetermined interval.The rectangle frame sidewall that these two substrates are made by glass at the form peripheral edge portions place couples together, thereby has constituted its inner rarefied planar vacuum shell.A plurality of sarks are arranged between prebasal plate and the metacoxal plate as reinforcement feature, to bear the air pressure that is added on these substrates.
On the inner surface of prebasal plate, formed the three fluorescence layer.On the inner surface of metacoxal plate, to arrange and the corresponding a large amount of electronic emission elements of each pixel, they are used for the fluorescence excitation layer and make fluorescence coating luminous as electron emission source.On the inner surface of metacoxal plate, a large amount of lead-in wires be used to drive electronic emission element, and the end that will go between are pulled out to the outside of vacuum casting by cells arranged in matrix.
In order to make SED work, on substrate, add the high pressure of about 10kV, and optionally driving voltage is applied to each electronic emission element by the drive circuit that is connected to lead-in wire.Electron beam optionally sends and hits fluorescence coating from each electronic emission element, thus fluorescence excitation layer and make it luminous, so coloured image has just shown.
In this SED, the thickness of display unit can be reduced to several millimeters, thereby has realized than the light and thin display unit of CRT that is used as television set and computer display at present.
When making the SED vacuum casting, prebasal plate and metacoxal plate are placed vacuum plant, leave sufficient interval between two substrates, in the baking substrate, remove the gas in the whole vacuum plant, up to its high vacuum that becomes.When having obtained predetermined vacuum and temperature, prebasal plate and metacoxal plate are coupled together by sidewall and sark.At this moment, use can be at the low-melting-point metal of relatively low temperature lower seal as sealant.
Be used to bear the plate shape parts that the sark of the air pressure on the front-back baseboard that acts on vacuum casting is made into to approach, its two ends extend to the outside of image display area, so that the image display performance in its fixed area is descended.
Manufacturing has the vacuum casting needs of this sark: bake process, and this process is heated to about 400 degrees centigrade with substrate, and discharges surface absorption gas, thereby makes substrate no longer produce undesired gas; And ensuing heat treatment process, this process comprises substrate is cooled to about 120 degrees centigrade step.
Yet, the substrate that the heating vertical fixing has a sark in bake process (for example, metacoxal plate) time, because sark is the Boping plate-shaped member as described above and has than the little a lot of thermal capacity of substrate, so between sark and substrate, thermal dilation difference occurred, and the temperature of sark increases more much higherly than the temperature of substrate.As a result, sark has expanded, and may crooked or distortion.This bending of sark and distortion have reduced the intensity of reinforcement feature, and make the output of assembling process of back lower.
In addition, in cooling procedure, if force cooling base and reduce cooling time with coldplate, the then very big thermal dilation difference of meeting appearance between substrate and sark, and sark may come off from substrate and maybe may be damaged.
Therefore, be necessary and be provided with cooling time more for a long time, to make the substrate cooling step by step.The problem that this has brought productivity ratio to descend again.
Summary of the invention
The purpose of this invention is to provide a kind of high efficiency, high yield and high reliability ground and make the method and apparatus of image-display units, this image-display units has vacuum casting, and the inside is provided with reinforcement feature (sark) to bear the air pressure that is added on the front-back baseboard.
In order to realize this purpose, according to a kind of method of making the vacuum casting of image-display units of the present invention, wherein this image-display units has a plurality of reinforcement features, their vertical arrangements are on the plate face of a pair of counter substrate, this method is a kind of image-display units manufacture method, it is characterized in that such step, have in the heat treatment process of substrate of reinforcement feature in heating and cooling, the temperature of control reinforcement feature in case with the adjustment of reinforcement feature to temperature near substrate.
In addition, according to another embodiment of the invention, a kind of device that is used to make the vacuum casting of image-display units, this image-display units has a plurality of reinforcement features, their vertical arrangements are on the plate face of a pair of counter substrate, wherein this device is the image-display units manufacturing installation, and it comprises: annealing device is used for the substrate that heating and cooling have reinforcement feature; And control device, the temperature that is used for control reinforcement feature when carrying out heating and cooling with annealing device makes its temperature near substrate.
Description of drawings
Fig. 1 is the outside figure of the transmission of the vacuum casting of SED according to an embodiment of the invention;
Fig. 2 is the sectional view of the vacuum casting II-II along the line of Fig. 1;
Fig. 3 is the part enlarged drawing of the cross section of Fig. 2;
Fig. 4 shows the configuration and the radiant heat control range of the primary clustering of heater according to an embodiment of the invention;
Fig. 5 shows according to one embodiment of the invention transition process of variations in temperature in metacoxal plate and the sark in heat treatment process;
Fig. 6 shows the configuration according to the production line of the manufacturing installation of one embodiment of the invention use heater;
Fig. 7 shows the configuration of the primary clustering of apparatus for manufacturing substrate according to an embodiment of the invention;
Fig. 8 shows the configuration of the primary clustering of apparatus for manufacturing substrate according to another embodiment of the invention;
Fig. 9 shows the temperature control example of the sark of above-mentioned each embodiment according to the present invention;
Figure 10 shows the temperature control example of the sark of above-mentioned each embodiment according to the present invention;
Figure 11 shows the temperature control example of the sark of above-mentioned each embodiment according to the present invention;
Figure 12 shows the configuration of the production line of the manufacturing installation of above-mentioned each embodiment according to the present invention.
Embodiment
Describe embodiments of the invention hereinafter with reference to the accompanying drawings in detail.
At first, with the example of SED, explain its configuration with reference to Fig. 1 to 3 as the image-display units that has vacuum casting according to the present invention.
Fig. 1 is the perspective view of the vacuum casting 10 of SED, and its prebasal plate 2 parts break.Fig. 2 is the sectional view of vacuum casting 10 II-II along the line of Fig. 1.Fig. 3 is the part enlarged drawing of the cross section of Fig. 2.
Shown in Fig. 1 to 3, SED has prebasal plate 2 and metacoxal plate 4, and each substrate is all made by the square glass plate.These substrate parallel opposed leave the interval of 1.0-2.0 millimeter therebetween.The size of metacoxal plate 4 is bigger than prebasal plate 2.The rectangular box-like sidewall 6 that prebasal plate 2 and metacoxal plate 4 are made by glass by its peripheral edge portion office couples together, thereby constitutes the planar vacuum shell 10 of its inner pumping.
On the inner surface of prebasal plate 2, formed the phosphor screen 12 that serves as image display surface., indigo plant red by parallel arranged and green fluorescence layer RGB and light shield layer 11 have formed phosphor screen 12.These fluorescence coatings form as striped or point.On phosphor screen 12, form aluminum metal liner 14.
On the inner surface of metacoxal plate 4, be provided with a large amount of surface conductive type electronic emission elements 16 that is used for divergent bundle, send electronics as electron emission source and come the fluorescence coating RGB of fluorescence excitation screen 12 and make fluorescence coating luminous.These electronic emission elements 16 be arranged in each pixel or the corresponding row of each fluorescence coating RGB and row in.Each electronic emission element 16 comprises unshowned electron emission part and a pair of element electrode, is used for voltage is applied to electron emission part.On the inner surface of metacoxal plate 4, by cells arranged in matrix a large amount of lead-in wires 18, be used for driving voltage is added to each electronic emission element 16, the end of each root lead-in wire is directed to the outside of vacuum casting 10.
The sidewall 6 that will serve as link with sealant 20 (20a, 20b are such as low-melting glass or metal) is sealed to the form peripheral edge portions of prebasal plate 2 and metacoxal plate 4, and these substrates are coupled together.In the present embodiment, metacoxal plate 4 is connected to sidewall 6, prebasal plate 2 is connected to sidewall 6 with indium 20b with frit 20a.
SED has a plurality of plate-like washer things as the reinforcement feature between prebasal plate 2 and the metacoxal plate 4, to keep the resistance of vacuum or to bear the atmosphere (vacuum) that acts on the substrate and press.Herein, a plurality of elongated (striated) sark 8 of being made by thin glass plate is arranged between rectangle prebasal plate 2 and the metacoxal plate 4 to erect the state that comes, along long one side being spaced by rule of substrate.
Each sark 8 has upper end 8a and lower end 8b, and upper end 8a passes the metal gasket 14 of phosphor screen 12 and the inner surface that thermal insulation layer 11 touches prebasal plate 2, and lower end 8b touches lead-in wire set on the inner surface of metacoxal plate 4 18.Therefore, these sarks 8 bear from external action in prebasal plate 2 and metacoxal plate 4 on atmospheric pressure, and make substrate distance keep predetermined value.
In addition, SED has unshowned voltage provides the unit, is used for anode voltage is applied to the metal gasket 14 of prebasal plate 2 and metacoxal plate 4.Voltage provides the unit that anode voltage is added on metacoxal plate 4 and the metal gasket 14, make the electromotive force of metacoxal plate be set to zero and the electromotive force of metal gasket be set to about 10kV.
When display image in above-mentioned SED, voltage is added on the element electrode of electronic emission element 16 by the unshowned drive circuit that is connected to lead-in wire 18, from the electron beam radiating portion of optional electronic emission element 16, send electron beam, and anode voltage is added on the metal gasket 14.The electron beam that sends from electron emission part is quickened by anode voltage, and bumps with phosphor screen 12.Therefore, the RGB fluorescence coating of phosphor screen 12 is excited and is luminous, has just shown coloured image on the screen.
When the vacuum casting of the SED that makes above-mentioned configuration, preparation phosphor screen 12, have the prebasal plate 2 of metal gasket 14 and have electronic emission element 16 and 18 the metacoxal plate 4 of going between, metacoxal plate 4 is connected to sidewall 6 and sark 8.Prebasal plate 2 and metacoxal plate 4 are placed in the unshowned vacuum chamber, and this cavity is evacuated, and prebasal plate 2 is connected to metacoxal plate 4 by sidewall 6.This has just finished the vacuum casting 10 of the SED with a plurality of sarks 8.
In the process of assembling vacuum casting, substrate is heated to about 400 degrees centigrade and remove surface adsorption gas so that substrate does not produce the bake process of undesired gas and comprises that next the heat treatment process that substrate is cooled to about 120 degrees centigrade step all is essential.
Hereinafter, explain according to bake process of the present invention with reference to Fig. 4 to 6.With the metacoxal plate 4 that is connected to sidewall 6 and sark 8 is example, will explain ensuing heat treatment process.
Bake process is that substrate is heated to about 400 degrees centigrade heat treatment process.In the present embodiment, in bake process, come to the substrate heating, to prevent increasing than the high sark expansion that causes of the temperature of metacoxal plate 4, crooked and distortion because of the sark temperature by directly over sark 8, applying radiant heat energy.
Fig. 4 show heater primary clustering configuration and as the example of the radiation scope control of the radiant heat energy of the heater of heating source.Heater has the heater 41 of a plurality of tubuloses and is arranged on reflector 42 in each heater.In Fig. 4, omitted the mechanism that is used to support heater 41 and reflector 42.Mechanism at the preposition supporting substrate has also omitted.
Each heater 41 comprises the tubular lamp heater of the length that is adjusted to sark 8.Each heater 41 location also are arranged on the direction with metacoxal plate 4 perpendicular and supported at preposition, as the purpose of bake process, directly over the sark 8 that is oriented to that promptly radiant heat energy is shone and is fixed on the plate face of corresponding metacoxal plate 4.
In the embodiment shown in fig. 4, heater 41 is arranged to just arrange a heater 41 illumination radiation heat energy directly over the sark 8 every the sark 8 on two plate faces that are arranged in metacoxal plate 4.Each heater 41 is all controlled by heating control apparatus 43.
Heat metacoxal plate 4 by directly over sark 8, applying radiant heat energy, can prevent to stand in lamellar sark 8 on the metacoxal plate 4 from its side direct receiver radiation heat energy and being heated rapidly.This prevents to occur excessive temperature contrast between metacoxal plate 4 and the sark 8, and prevents to make sark 8 distortion and crooked.
In order to increase above-mentioned effect, in the present embodiment, in each heater 41, be provided with reflector 42 so that directly over sark 8, apply radiant heat energy, and the scope that applies of the reflection heat energy of reflector 42 control reflection directions and heater 41.That is because the scope that applies of the radiant heat energy of reflector 42 control reflection directions and heater 41, so be not just the sark below heater 41 8 can toast below the heater 41 just as sark 8 just is positioned at.Therefore, can control radiant heat energy, make not produce great temperature difference between metacoxal plate 4 and the sark 8 and can heat metacoxal plate 4 effectively.
Fig. 5 shows the migration of variations in temperature in the metacoxal plate 4 and sark 8 when heating metacoxal plate 4 with the heater in the foregoing description.Herein, the temperature curve of metacoxal plate 4 is represented that by RP the temperature curve of sark 8 is represented by SP.For relatively, the temperature curve of sark 8 when SP ' expression is evenly heated sark 8 and metacoxal plate 4 with the heater (not using the heater as the position of the sort of consideration sark 8 in the foregoing description) of the position of not considering sark 8.
By using the heater in embodiment illustrated in fig. 4, the temperature curve of sark 8 can become solid line SP from chain-dotted line SP ', can solve the problem that produces very big temperature difference between sark 8 and metacoxal plate 4 thus.
Fig. 6 shows the simplified structure of vaccum processor 100, and it makes the vacuum casting of image-display units by using heater shown in Figure 4.
When making vacuum casting 10 with above-mentioned vaccum processor 100, prebasal plate 2 and metacoxal plate 4 are placed in the chamber 101 of packing into, and this cavity is evacuated, and substrate is delivered to baking and electron beam cleaning chambers 102.In baking and electron beam cleaning chambers 102, substrate 2 and 4 is heated to about 400 degrees centigrade with other parts (comprising each assembly on the substrate), remove the surface adsorption gas on each substrate, and clean the whole surface of phosphor screen and electronic emission element by the deflection scanning of electron beam.
In the bake process in baking and electron beam cleaning chambers 102, substrate is heated to about 400 degrees centigrade, so that do not produce undesired gas in the processing procedure, and drain surface adsorption gas.In this heat treatment process, especially in the step of baking metacoxal plate 4, used heater shown in Figure 4.Promptly, as mentioned above, thereby because directly over sark 8, apply radiant heat energy heating metacoxal plate 4, so can prevent to stand in lamellar sark 8 on the metacoxal plate 4 from its side quick receiver radiation heat energy, thereby and prevent to occur between metacoxal plate 4 and the sark 8 great temperature difference and make sark 8 distortion and crooked.In addition, the scope that applies of the radiant heat energy of reflector 42 control reflection directions and heater 41, so metacoxal plate 4 and be not just can not produce great temperature difference between the sark below heater 41 8 just looks like that sark 8 just is positioned at below the heater 41 like that.
After the degasification, prebasal plate 2 and metacoxal plate 4 are sent to the cooling chamber 103 with feature of the present invention, are cooled to about 120 degrees centigrade there in baking and electron beam cleaning chambers 102.Cooled prebasal plate 2 and metacoxal plate 4 are sent to breathing film evaporation chamber 104, wherein form the barium film as breathing film on the fluorescence coating outside.Next substrate is sent to assembling chamber 105, wherein makes the indium fusion as seal member seal these substrates by starting power supply 120, thereby forms vacuum casting.Vacuum casting after the sealing is sent to cooling chamber 106, and cool to room temperature takes out from take out chamber 107 again.By said process, made the vacuum casting 10 of SED.
As mentioned above, in metacoxal plate 4 heating processes, heat metacoxal plate 4 by directly over sark 8, applying radiant heat energy, can prevent the lamellar sark 8 that standing on the metacoxal plate 4 from its side direct absorbed radiation heat energy and being heated rapidly.This has solved sark 8 distortion and the crooked problem that is caused because of great temperature difference between metacoxal plate 4 and the sark 8.In addition, the scope that applies of the radiant heat energy of reflector 42 control reflection directions and heater 41, so metacoxal plate 4 and be not just can not produce great temperature difference between the sark below heater 41 8 just looks like that sark 8 just is positioned at below the heater 41 like that.This has controlled the heating process of metacoxal plate 4 effectively.
In above-mentioned each embodiment, the lamp heater is used as the sark heater.But heater is not limited to the lamp heater.Can use as other heating elements such as tungsten or titanium heating wires and quartz heaters.The position of sark and heater is not limited to those among the embodiment.For example, they can be provided with by one to one.Substrate configuration and production line are not limited to those shown in the embodiment.Under the situation that does not deviate from inner characteristic of the present invention, can modify them.
Next, explain cooling procedure of the present invention in detail with reference to Fig. 7 to 12.
In the cooling procedure after above-mentioned bake process, if forcibly make metacoxal plate 4 coolings in a short period of time with cooling devices such as coldplates, then sark 8 is cooled rapidly, because compare the thermal capacity of sark 8 with metacoxal plate 4 minimum, and very big temperature difference has appearred between sark 8 and metacoxal plate 4.As a result, sark 8 may come off from metacoxal plate 4, is perhaps damaged, and output also greatly reduces.
In order to prevent the appearance of this problem, as shown in figure 12, by serviceability temperature control device and heater, the temperature of control sark 8 in the refrigerating gas in cooling chamber 103, thus can not make the sark 8 of the device cooling of being cooled and the temperature difference between the metacoxal plate 4 increase to the degree that makes sark 8 come off or damage.Device shown in Figure 12 is with shown in Figure 6 identical.
That is, vaccum processor 100 has the chamber of packing into 101, baking and electron beam cleaning chambers 102, cooling chamber 103, breathing film evaporation chamber 104, assembling chamber 105, cooling chamber 106 and takes out chamber 107.Therefore, the content of explaining among Fig. 6 will be omitted.
The cooling chamber 103 of vaccum processor 100 makes the prebasal plate 2 and the metacoxal plate 4 that removed gas in baking and electron beam cleaning chambers 102 be cooled to about 120 degrees centigrade.In this cooling chamber, as mentioned above, by serviceability temperature control device and heater, the temperature of control interval thing 8 in cooling atmosphere, thus can not make the be cooled sark 8 of device cooling and the temperature difference between the metacoxal plate 4 increase to the degree that causes that sark 8 comes off or damages.
When cooling metacoxal plate 4 in cooling chamber 103, chilling temperature is cooled off atmosphere and is controlled, so that the adjustment of sark 8 is arrived the temperature of metacoxal plate 4, even and metacoxal plate 4 is large rectangles, also can prevent to come off, and can make the SED of high yield in a short period of time effectively along sark 8 damages of substrate 4 long limits settings or from substrate 4.
Fig. 7 shows the profile of manufacturing installation according to an embodiment of the invention, and it has the function of the temperature of control sark 8 in this cooling atmosphere.Herein, only show main assembly, the structure of having got rid of the cooling device as the coldplate, reflecting plate and being used to support heater (this heater is as the heating source of heater), these primary clusterings are arranged on and are used for cooling off the metacoxal plate 4 that bake process heated in the cooling chamber 103.
As mentioned above, in the plate face of the metacoxal plate 4 that is provided with in the cooling atmosphere in cooling chamber, a plurality of sarks 8 are by clocklike at interval along the long limit connection of substrate.For each sark 8 is provided as the heating element of the heating source of heater, thereby bestow radiant heat energy to each sark 8.Herein, as heating element from radiant heat energy to sark 8 that bestow, by keeping enough distances so that bestow radiant heat energy, a plurality of lamp heaters 51 are arranged on sark 8 tops diagonally.
Each lamp heater 51 is connected to the temperature controller 52 that serves as temperature control equipment.Temperature controller 52 energizes for lamp heater 51, and controls its heating (luminous) according to default temperature profile, and by applying radiant heat energy corresponding sark 8 on the substrate is heated.
That is, temperature controller 52 is being controlled lamp heater 51, is controlling the temperature of the sark 8 on the metacoxal plate 4 in the cooling atmosphere that is placed into cooling chamber 103 thus, descends so that regulate the temperature of metacoxal plate 4.The default temperature profile of temperature controller 52 bases is controlled the situation of energizing of lamp heater 51, makes the temperature of sark 8 always drop in the preset temperature difference scope relevant with the temperature of cooled metacoxal plate 4 (for example, 15 degrees centigrade).Use description to concrete the energizing and control device of lamp heater 15 with reference to Fig. 9 to 11.
Fig. 8 shows the configuration according to the example more specifically of manufacturing installation of the present invention, and it has the temperature controlled function of the sark 8 in the cooling atmosphere.Herein, thus except be opposite to structure by cooling surface, also show the configuration of the temperature controlled function that comprises sark 8 as the both sides coolings metacoxal plate 4 of the metacoxal plate 4 of cooling target with coldplate 60A and 60B.In the present embodiment, suppose that temperature controller shown in Figure 7 52 controls the heating (luminous) of the lamp heater 61 that can describe subsequently according to default temperature profile.
As mentioned above, a plurality of sarks 8 are by on the direction that is disposed on the long limit that is parallel to metacoxal plate 4 on one side of metacoxal plate 4 as the cooling target of rule (on prebasal plate 2 facing surfaces).Sark 8 is made by thin plate glass, is fixed on the two ends of metacoxal plate 4 or is in some positions in the metacoxal plate 4.
Cooling chamber 103 has a pair of coldplate 60A and 60B, is used for cooling off simultaneously the both sides as the metacoxal plate 4 of cooling target.This to one of coldplate 60A and 60B on, or on the coldplate 60B (its cooling surface is provided with as that plate face of sark 8 of the metacoxal plate 4 of cooling target mutually opposed with it), be provided with the penetrating hole of groove shape (S), this penetrating hole of groove shape is adjusted to the length direction along sark 8, so that by coldplate 60B radiant heat energy is composed to sark 8.On this penetrating hole (S), be adjusted to along the lamp heater 61 of the length direction of sark 8 and heat reflection plate 62 and be arranged on very place near coldplate 60B.Although the structure that supports lamp heater 61 is not shown herein, heat reflector 62 can constitute one with the structure that supports lamp heater 61.
As described in the cooling procedure of the substrate in the cooling chamber 103 4, temperature controller 52 is controlled energizing of lamp heater 61 according to default temperature profile, and temperature controlledly simultaneously it is cooled off carrying out, so as in cooling atmosphere with the adjustment of sark 8 temperature to metacoxal plate 4.
At this moment, the heat of sending from lamp heater 61 (thermal source) directly or at heat reflector 62 is reflected once the back by the penetrating hole of groove shape (S) arrival metacoxal plate 4 set on the coldplate 60B, and heat sark 8 with radiant heat energy, and the adjustment of sark 8 is arrived the temperature of metacoxal plate 4.
Fig. 9 to 11 shows the example of the control of energizing of lamp heater in the foregoing description.Said temperature controller 52 is controlled energizing of lamp heater according to default temperature profile.
Example of energizing control shown in Figure 9 is to energize for continuously the lamp heater, the voltage (EA) that wherein is added on the lamp heater is continuous and controlled changeably, so that the temperature (TA) of sark 8 is adjusted to the temperature (TS) of metacoxal plate 4 in the cooling atmosphere of metacoxal plate 4.
Example of energizing control shown in Figure 10 is that batch (-type) energizes for the lamp heater, the supply that wherein is applied to the certain hour voltage (EB) of lamp heater is controlled changeably at interval, so the temperature of sark 8 all drops in the preset temperature difference scope relevant with the temperature (TS) of metacoxal plate 4 usually in the cooling atmosphere of metacoxal plate 4.
Example of energizing control shown in Figure 11 is the example of energizing for the lamp heater step by step, the voltage (EC) that wherein is added on the lamp heater is controlled step by step, so the temperature (TC) of sark 8 all drops in the preset temperature difference scope relevant with the temperature (TS) of metacoxal plate 4 usually in the cooling atmosphere of metacoxal plate 4.
The control of energizing by above-mentioned lamp heater, when cooling off metacoxal plate 4 with cooling device, metacoxal plate 4 and the temperature difference that is arranged between the sark 8 on this substrate can remain in the predetermined scope, prevent from thus to cause the damage of sark 8 or come off from metacoxal plate 4 because of the temperature difference between sark 8 and the metacoxal plate 4.Therefore, can make high yield SED in a short period of time effectively.
In the above-described embodiment, the lamp heater is used as the device that heats sark 8.But heater is not limited to the lamp heater.Can use as other heating elements such as tungsten or titanium heater conductor and quartz heaters.The device of radiant heat energy being composed to sark 8 by coldplate is not limited to the penetrating hole of groove shape.Form the aperture of wire or can use along the elongated hole that sark 8 forms.Also allow on the cooling surface of coldplate to install and be used to heat the heater of sark, and in coldplate, do not form aperture.In addition, be used for heater heater, heater structure and all be not limited to described in the various embodiments described above those as the structure of the substrate of cooling target.They can be applied to variously be used for heat treated plate, and do not deviate from inner characteristic of the present invention.
In addition, in the above-described embodiments, the assembly that is connected with a plurality of sarks on the plate face of metacoxal plate 4 is used as the target of processing.Processing target can be the assembly with the sark 8 that is connected to prebasal plate 2.
Industrial applicability
According to the method and apparatus of shop drawings as display unit, might be in high efficiency, high yield and highly reliable The property prerequisite under effectively make the vacuum casting with reinforcement feature (sark), be added in front base to bear Air pressure on plate and the metacoxal plate.
Claims (28)
1. method that is used to make the vacuum casting of image-display units, the vacuum casting of this image-display units have the reinforcement feature on a plurality of upright plate faces that are arranged in a pair of counter substrate,
Wherein said method is the image-display units manufacture method, it is characterized in that such step, promptly in the heat treatment process of the substrate that has reinforcement feature being carried out heating and cooling the temperature of the described reinforcement feature of control so that the adjustment of described reinforcement feature is the temperature near described substrate.
2. image-display units manufacture method as claimed in claim 1, it is characterized in that, when in heat treatment process, the substrate that has reinforcement feature being heated, radiant heat energy be from described reinforcement feature the top, apply with the perpendicular direction of the plate face of described substrate basically.
3. image-display units manufacture method as claimed in claim 2 is characterized in that described reinforcement feature is made of the plate body of band shape, is used to support described this opposed plate face to substrate.
4. image-display units manufacture method as claimed in claim 3 is characterized in that, described heat treatment process is heated to default temperature by the substrate that the heater that uses number to lack than reinforcement feature will have reinforcement feature.
5. image-display units manufacture method as claimed in claim 4, it is characterized in that, described heat treatment process has and is used to control the device that is applied to the radiant heat energy of described substrate and reinforcement feature from described heater, so as in predetermined temperature difference scope described substrate of heating and described reinforcement feature.
6. image-display units manufacture method as claimed in claim 1 is characterized in that, when cooling has the substrate of reinforcement feature in described heat treatment process, and the described reinforcement feature of heating in cooling atmosphere.
7. image-display units manufacture method as claimed in claim 6, it is characterized in that, when heating reinforcement feature in cooling atmosphere, radiant heat energy is applied to described reinforcement feature, make that the temperature difference between described substrate and the reinforcement feature drops in the default temperature difference scope.
8. image-display units manufacture method as claimed in claim 7, it is characterized in that having with the opposed cooling surface of substrate surface and on this cooling surface, have mutually opposed with the plate face of described substrate with the coldplate of the corresponding opening in reinforcement feature position; And
Described substrate is cooled off by described coldplate, and
Described radiant heat energy is to be applied to described reinforcement feature by the opening that is provided with in the described coldplate.
9. as claim 7 or 8 described image-display units manufacture methods, it is characterized in that, described reinforcement feature is made of the plate body of band shape, a plurality of reinforcement features erectly is being set between by the interval of rule, two ends in another direction respectively on the direction of substrate surface.
10. image-display units manufacture method as claimed in claim 9, it is characterized in that, heating is during reinforcement feature in cooling atmosphere, and the heating-up temperature of heater that is used to send radiant heat energy is by continuous control, so that the heat value of this heater little by little decays.
11. image-display units manufacture method as claimed in claim 9, it is characterized in that, when in cooling atmosphere, heating reinforcement feature, be used to send the heater of radiant heat energy by clearance-type or control steppingly, so that the heat value of this heater little by little decays.
12. as each described image-display units manufacture method of claim 1 to 11, it is characterized in that, heat or the heat treatment process of cooling off described substrate is carried out in vacuum chamber.
13. a device that is used to make the vacuum casting of image-display units, the vacuum casting of this image-display units have the reinforcement feature on a plurality of upright plate faces that are arranged in a pair of counter substrate,
Wherein said device is the image-display units manufacturing installation, it is characterized in that, comprising:
Annealing device is used for the substrate that heating and cooling have reinforcement feature; And
Control device is used for controlling the temperature of described reinforcement feature so that its temperature near described substrate when carrying out heating and cooling with described annealing device.
14. image-display units manufacturing installation as claimed in claim 13 is characterized in that it also comprises heater, when heating during described substrate this heater from described reinforcement feature top, apply radiant heat energy with the direction of substrate surface perpendicular.
15. image-display units manufacturing installation as claimed in claim 14 is characterized in that described reinforcement feature is made of the plate body of band shape, is used to support described this opposed plate face to substrate.
16. image-display units manufacturing installation as claimed in claim 15 is characterized in that described heater has the heater that number lacks than reinforcement feature, and is heated to preset temperature by the substrate that uses described heater will have reinforcement feature.
17. image-display units manufacturing installation as claimed in claim 16, it is characterized in that, described heater has reflector, is used to control the radiant heat energy that is applied to substrate and reinforcement feature from heater, makes described reinforcement feature and substrate be heated in predetermined temperature difference scope.
18. image-display units manufacturing installation as claimed in claim 13 is characterized in that it also comprises heater, this heater is used at the described reinforcement feature of cooling atmosphere heating when the described substrate of cooling.
19. image-display units manufacturing installation as claimed in claim 18 is characterized in that described control device is controlled described heater, makes to drop in the default temperature difference scope in the temperature difference between substrate and the described reinforcement feature described in the cooling atmosphere.
20. image-display units manufacturing installation as claimed in claim 19, it is characterized in that, described annealing device has coldplate, and this coldplate has the cooling surface that is used to cool off opposed substrate surface with it and has on this cooling surface and the corresponding incision-like opening in reinforcement feature position or slotted hole shape opening or the wire opening that is provided with at interval by rule; And
Described heater is applied to radiant heat energy the reinforcement feature that is provided with on the described substrate by the opening that is provided with in the described coldplate.
21. image-display units manufacturing installation as claimed in claim 20, it is characterized in that, described reinforcement feature is made of the plate body of band shape, a plurality of reinforcement features erectly is being set between by the interval of rule, two ends in another direction respectively on the direction of substrate surface.
22. as claim 20 or 21 described image-display units manufacturing installations, it is characterized in that, described heater has the current control device that heater and being used to is controlled the electric current of this heater, and the electric current by described current control device control heater makes and drops in the default temperature difference scope in the temperature difference between substrate and the reinforcement feature described in the cooling atmosphere.
23. image-display units manufacturing installation as claimed in claim 22 is characterized in that described heater comprises reflector, this reflector converges to the radiant heat energy of heater in the opening set on the cooling surface of substrate.
24. image-display units manufacturing installation as claimed in claim 22 is characterized in that, in cooling atmosphere, described current control device is controlled the heating-up temperature of described heater continuously, so that the heat value of described heater little by little decays.
25. image-display units manufacturing installation as claimed in claim 22 is characterized in that, in cooling atmosphere, described current control device batch (-type) or control described heater steppingly is so that the heat value of described heater little by little decays.
26. image-display units manufacturing installation as claimed in claim 14, it is characterized in that, described heater has the current control device of the electric current of heater and this heater of control, and control the electric current of described heater by current control device, make and drop in the default temperature difference scope in the temperature difference between substrate and the reinforcement feature described in the cooling atmosphere.
27. image-display units manufacturing installation as claimed in claim 26 is characterized in that, in cooling atmosphere, described current control device is controlled the heating-up temperature of described heater continuously, so that the heat value of described heater little by little decays.
28. image-display units manufacturing installation as claimed in claim 26 is characterized in that, in cooling atmosphere, described current control device batch (-type) or control described heater steppingly is so that the heat value of described heater little by little decays.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004180966 | 2004-06-18 | ||
| JP180966/2004 | 2004-06-18 | ||
| JP226947/2004 | 2004-08-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1969360A true CN1969360A (en) | 2007-05-23 |
Family
ID=38077161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200580020198 Pending CN1969360A (en) | 2004-06-18 | 2005-06-16 | Method and equipment for manufacturing image display device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1969360A (en) |
-
2005
- 2005-06-16 CN CN 200580020198 patent/CN1969360A/en active Pending
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