CN1967662A - Magnetostrictive micro-actuator used for head servo - Google Patents
Magnetostrictive micro-actuator used for head servo Download PDFInfo
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- CN1967662A CN1967662A CN 200610124755 CN200610124755A CN1967662A CN 1967662 A CN1967662 A CN 1967662A CN 200610124755 CN200610124755 CN 200610124755 CN 200610124755 A CN200610124755 A CN 200610124755A CN 1967662 A CN1967662 A CN 1967662A
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Abstract
The invention discloses a super-magnetostrictive actuator for the magnetic head servo, including the magnetic circuit, the super-magnetostrictive actuator block, the flexible linking board, the linking pad, the pad wire, the coil pad, the fixed pad, the access point, the flexible wire, the inner and outer magnetic shielding layer, the embedded snail loop and the single crystal silicon spring. The invention uses the giant magnetostrictive effect of special materials, machining and molding in the magnetic head slider with conjunction manufacturing techniques, and producing a two-way servo movement by the use of permanent magnets or repeating addition of DC bias current in driven current. This super-magnetostrictive actuator can work in a lower voltage; can output greater driving force, and response speed over piezoelectric ceramic materials, and no failure of the Curie point.
Description
Technical field
The invention belongs to technical field of data storage, be specifically related to a kind of magnetostrictive micro-actuator that is used for head servo.
Background technology
In data storage devices such as hard disc of computer, use the film-type magnetic head that the card magnetic information is write or reads usually.A kind of one-piece construction figure of hard disk as shown in Figure 1,10 for taking the inside primary structure that the hard disk shell is seen apart under clean.Various assemblies in the disk at first are fixedly mounted on the chassis 14, are connected on the computer cabinet by installing and locating hole 12 usefulness screws again.Read/write head 13 is installed on the slide block foremost of head arm 16, and magnetic-head actuator 11 drives head arm 16 and rotate around stationary shaft, drives read/write head 13 and does tracking and follow the tracks of and move on disk disk body 15.Magnetic-head actuator 11 generally adopts voice coil motor as servo drive in the current hard disk.Read/write head 13 directly on slide block one shape, slide block can under the effect of air-gap on disk disk body 15 surfaces of rotation with the flight of nano level height.Slide block directly is assemblied on the universal joint and semi-girder of head arm 16 by HGA (Head Gimbal Assembly) technology.
Along with developing rapidly of material preparation science and microelectric technique, hard disc of computer track location mechanism is constantly to small-sized, lighting development.Magnetic head the flying height on the hard disc of computer from beginning from the about 140 μ m high developments of hard disk below 20nm, track width and track pitch also develop into about 1 μ m at present from original treaty 100 μ m, thereby disk size is rapidly improved.Simultaneously, the rotational speed of magnetic head on hard disk 360r/min from the outset develops into present 7200r/min, and the trend that further is increased to 12000r/min is arranged.But, along with continuous decline of magnetic head flight height and rotating speed improve rapidly, magnetic head can be because of the eccentric offtrack track of hard disk, be difficult to catch fast the signal on the magnetic track, thereby the bearing accuracy of raising hard disc of computer magnetic head has become the growing an urgent demand of hard disc of computer capacity with tracking magnetic track speed.
The hard disc of computer head position mode of generally using is a voice coil motor closed loop servo mode at present, this mode can satisfy the requirement of servo tracking preferably when magnetic storage density is also lower, be very difficult but the quick high accuracy of sub-micrometer scale magnetic track is located.Adopt two stage servomechanism better to address this problem, promptly voice coil motor is carried out coarse positioning as first order servo control mechanism, the micro-actuator that adds a more close slide block in addition directly carries out the servo positioning of the high-precision second level to the magnetic head on the slide block.Servo positioning micro-actuator in the second level has three kinds of installation sites at present, be mounted between universal joint and the slide block respectively, be installed in the middle of the magnetic head cantilever and with the conjuncted manufacturing moulding of slide block.Figure 2 shows that and between universal joint 5 and slide block 2a, design a little detent piece 3a separately, and be connected with universal joint 5 by pad 4.As for conjuncted micro-actuator then is to be manufactured on the slide block by MEMS technology is integrated, does side-to-side movement by the action drive read/write head of conjuncted micro-actuator again and carries out servo positioning.More than two kinds of installation sites be fit to adopt electrostatic plates type micro-actuators, its advantage is to make very complicated microstructure by MEMS technology, but that shortcoming is the power output of electrostatic plates type micro-actuator is smaller.Figure 3 shows that and a kind of micro-actuator 3c is made in structure between semi-girder 6c and the slide block 2c, this structure is suitable for adopting piezoelectric ceramics (PZ) material to do micro-actuator, its advantage is that control is fairly simple, processing is than being easier to, and the micro-actuator on the present magnetic head is mainly made with PZT piezo technology (Piezoe-lectric Technology).But also there is following shortcoming in the micro-actuator that adopts piezoelectric to do: first: dilatation can take place in piezoelectric in electric field, but because distortion of materials is higher than not, in order to reach the deformation length requirement, usually need to add that higher driving voltage forms stronger electric field, and that this requires for operating voltage is usually less than 5 volts hard disk is quite awkward.Second: Curie point lost efficacy.When the working temperature of piezoelectric ceramics surpasses its Curie-point temperature, can cause Problem of Failure, cause the piezoelectric effect permanent failure because lose polarization.And the Curie temperature of piezoceramic material only is about 180 ℃ ± 100.The 3rd: response speed is fast inadequately, is difficult to be applied in the device that requires to carry out fast.
The Mou Jiangqiang of Singapore DSI research institute, Chen Shixin etc. have showed independent micro-actuator block structure as shown in Figure 2 at the document " Modeling and Simulation of aSingle Crystal Silicon Microactuator for Hard Disk Drive " that Modeling andSimulation of Microsystems 2001 delivers; Hiroshi Toshiyoshi and Makoto Mita etc. are at JOURNAL OFMICROELECTROMECHANICAL SYSTEMS, VOL.11, NO.6, the document of delivering on the DECEMBER 2002 " A MEMS Piggyback Actuator for Hard-Disk Drives " has disclosed the structure of conjuncted micro-actuator as shown in Figure 3; Shinji Koganezawa and Takeyori Hara are at FUJITSU Sci.Tech.J., 37,2, p.212-219, the document that December 2001 delivers " Developmentof Shear-Mode Piezoelectric Microactuator for Precise Head Positioning " has then been showed the micro-actuator structure with the piezoceramic material design as shown in Figure 4.
The intermetallic compound Tb1-xDyxFe2-y that the beginning of the seventies, people such as U.S. A.E.Clark found to have the laves phase structure has good magnetostriction performance, low magnetocrystalline anisotropy and surpasses the Curie temperature of room temperature, and find that adding compressive pre-stress can improve the magnetostriction coefficient of this material directionally solidified crystal under downfield significantly, but thereby make this material become a kind of material of practical application, caused the extensive attention of scientific circles and industrial community.The saturation magnetostriction coefficient of this material reaches 1500～2000ppm, is called as " giant magnetostriction material ".(wide (the many characteristics such as 1Hz～10kHz) of＜=1 μ s, response band that the strain of giant magnetostriction material is big, high reliability is arranged, energy density is big, response speed is fast.
Terbium-dysprosium-iron giant magnetostriction material (Tb-Dy-Fe Giant Magnetostrictive Material, abbreviate REGMsM or GMM as), i.e. giant magnetostrictive material (Super Magnetostrictive Material), magnetostriction material in large or Terfenol-D.It is " super magnetic " material in China person also.With piezoelectric (PZT) and traditional magnetostriction materials Ni, Co etc. compare, and GMM has particular performances: (1) magnetostrictive strain at room temperature is big, is 40～50 times of Ni, are 5～8 times of PZT; (2) energy density height is 400～500 times of Ni, is 10～25 times of PZT; (3) response speed is fast, generally below a few tens of milliseconds, even reaches the microsecond level; (4) power output is big, and load capacity is strong, can reach 220～800N; (5) its magnetic machine coupling coefficient is big, and the conversion efficiency height of electromagnetic energy-mechanical energy generally can reach 72%; (6) Curie-point temperature height, stable work in work, and for high-power, the overheated permanent polarization complete obiteration that easily makes PZT because of device, even and GMM works more than the Curie-point temperature and also only its Magnetostrictive Properties temporarily to be disappeared, when being cooled to Curie-point temperature when following, its Magnetostrictive Properties is recovered again fully.In addition, the velocity of sound is low, is 1/3 of Ni approximately, 1/2 of PZT.
In addition, giant magnetostrictive material can also be deposited on the form of film and constitute intelligent device on the substrate.In recent years, many researchers adopt sputtering method to prepare the rare earth-transition metal noncrystal membrane on non-magnetic substrate (as silicon, polyimide polyimid), and the structure and the Magnetostrictive Properties of film studied, find that magnetostrictive thin film has good soft magnet performance, magnetocrystalline anisotropy is low, can produce very big magnetostrictive strain under room temperature and downfield.These preparation methods make that also the micro-actuator that utilizes the microelectron-mechanical manufacturing process to make giant magnetostrictive material becomes possibility.
Embedded solenoid has obtained application in fields such as communication, and job operation also has many pieces of articles to be reported.The manufacture method of embedded solenoid can be with reference to Chong H.Ahn, article " Micromachined Planar Inductors on Silicon Wafers for MEMSApplications " with Mark G.Allen, IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, VOL.45, NO.6, DECEMBER 1998, and Yong-Kyu Yoon, Emery Chen, the article of Mark G.Allen and Joy Laskar " Embedded Solenoid Inductors for RF CMOS PowerAmplifiers ".
Summary of the invention
The object of the present invention is to provide a kind of magnetostrictive micro-actuator that is used for head servo, this micro-actuator can be worked under lower voltage, can export bigger driving force, and response speed surpasses piezoceramic material, and does not have the Curie point Problem of Failure.
A kind of magnetostrictive micro-actuator that is used for head servo provided by the invention, it is characterized in that: this micro-actuator comprises magnetic circuit, ultra-magnetic telescopic actuator block, flexibly connects plate, connection pads, lead pad, coil pad, anchor pad, tie point, flexible lead wire, inside and outside magnetic masking layer, embedded solenoid and monocrystalline silicon spring; Wherein,
Connection pads is positioned at the slide block end face near the first side of read-write; Magnetic circuit is positioned at slide block, it is shaped as " E " word that lies low, the side of the end that magnetic circuit and connection pads are close is connected with the side on the top of ultra-magnetic telescopic actuator block, and the end face of center protrusion part contacts with the bottom surface of the ultra-magnetic telescopic actuator block other end, the formation closed magnetic circuit; The end that the ultra-magnetic telescopic actuator block is positioned at center protrusion part by side center fixed pad with flexibly connect plate and fix; One end and the magnetic circuit of ultra-magnetic telescopic actuator block are fixed, and the ultra-magnetic telescopic actuator block is wrapped in the magnetic circuit;
The ultra-magnetic telescopic actuator block comprises positive magnetic materials layer, middle layer and negative magnetic materials layer, the middle layer is materials such as silicon chip or polyimide, positive magnetic materials layer and negative magnetic materials layer lay respectively at the both sides in middle layer, and the effect of support fixation micro-actuator is played in the middle layer;
The monocrystalline silicon spring is made of a pair of spring, and an end of each spring contacts with negative magnetic materials layer with the positive magnetic materials layer of ultra-magnetic telescopic actuator block respectively, and an end of close magnetic circuit, and its other end then combines as a whole with silicon base;
Embedded solenoid is centered around on the ultra-magnetic telescopic actuator block, and its lead terminal is connected to flexible lead wire by the coil pad;
An end that flexibly connects plate is inserted between the end and ultra-magnetic telescopic actuator block of magnetic circuit, and fixes with the ultra-magnetic telescopic actuator block, and the other end and semi-girder are fixed; Flexibly connect an end that links to each other with semi-girder on the plate and be provided with lead pad and tie point, the other end is provided with coil pad and side center fixed pad, and lead pad is connected with the flexible lead wire of semi-girder, and tie point is used to flexibly connect the fixing of plate and semi-girder; Side center fixed pad is used to flexibly connect the fixing of plate and ultra-magnetic telescopic actuator block, and the coil pad is used to connect the lead-in wire of embedded solenoid;
The inner magnetic screen layer covers on the magnetic circuit, and the external magnetism shielding layer is between magnetic circuit and silicon base.
The present invention has mainly used the giant magnetostrictive driver effect of special material, and it adopts a kind of novel giant magnetostriction material to substitute piezoceramic material, and adopts conjuncted manufacturing process to do the micro-actuator of head-slider.Be called magnetostrictive effect adding the phenomenon that size and volume change under the action of a magnetic field.The traditional magnetostriction materials such as the magnetostriction coefficient of iron, nickel etc. are all very little, be respectively 21ppm (1,000,000/) and-46ppm.Because giant magnetostrictive material has excellent properties, the present invention has just adopted this new material to substitute piezoceramic material, and designed novel little actuating structure, embedded drive coil, and closed magnetic circuit etc., the design adopts the scheme of making conjuncted micro-actuator on slide block.The novel magnetic head micro-actuator that adopts the present invention to provide, can reach following technique effect: first, the response speed of microsecond level can be reached, the requirement of track and localization magnetic track fast under the high storage density condition can be satisfied, than the fast order of magnitude of the response speed of PZT micro-actuator; The second, operating voltage is low, can be under the voltage below 5 volts operate as normal, satisfy the working environment restriction of hard disc magnetic head; The 3rd, the Curie point permanent failure problem of no PZT micro-actuator, this micro-actuator work be to also only can making its Magnetostrictive Properties temporarily disappear more than the Curie-point temperature, and when being cooled to Curie-point temperature when following, its Magnetostrictive Properties can be recovered again fully; The 4th, the bearing accuracy height, amplitude of fluctuation is big, and bearing accuracy can be as small as nanoscale, and motion amplitude then can hereinafter will provide analysis to the precision and the amplitude of this micro-actuator more than micron order; The 5th, magnetic machine coupling coefficient is big, the energy conversion efficiency height, and the conversion efficiency of electromagnetic energy-mechanical energy generally can reach 72%.Compare with electrostatic plates type micro-actuator in addition and also have the characteristics that power output is big, load capacity is strong, energy density is high.
Description of drawings
Fig. 1 is a disk one-piece construction synoptic diagram;
Fig. 2 is existing micro-actuator structure between slide block and universal joint;
Fig. 3 is existing piezoelectric ceramics micro-actuator structure between slide block and semi-girder;
Fig. 4 A is used for the partial sectional view of the magnetostrictive micro-actuator structure of head servo for the present invention;
Fig. 4 B is the A-A cut-open view among Fig. 4 A;
Fig. 4 C is the structural representation that flexibly connects plate, and wherein Fig. 4 C (a) is a side view, and Fig. 4 C (b) is a left view;
Fig. 4 D is the structural representation of slide block among Fig. 4 A;
Fig. 5 is the hierarchical diagram of magnetic head cantilever beam;
Fig. 6 is the hierarchy synoptic diagram of the little actuator block of ultra-magnetic telescopic among Fig. 4 A.
Embodiment
Shown in Fig. 4 A, 4B, 4C, 4D, magnetostrictive micro-actuator and the slide block 25 conjuncted manufacturing moulding that are used for head servo provided by the invention.Micro-actuator consists of the following components: magnetic circuit 28, ultra-magnetic telescopic actuator block 29, flexibly connect plate 30, connection pads 24, lead pad 32, coil pad 33b, anchor pad 34, tie point 31, flexible lead wire 35, inside and outside magnetic masking layer 50,51, embedded solenoid 53 and monocrystalline silicon spring 55.Each component part of micro-actuator can two parts, and a part is positioned at and flexibly connects on the plate, and another part all is positioned at slide block 25, and slide block 25 processes on silicon base 27.
Ultra-magnetic telescopic actuator block 29 is made up of 3 layer materials, and middle layer 29c is materials such as silicon chip or polyimide, and positive magnetic materials layer 29a and negative magnetic materials layer 29b lay respectively at the both sides of middle layer 29c.Middle layer 29c plays the effect of support fixation micro-actuator, and it can be made into integration at the silicon chip 27 with slide block, also can adopt materials such as polyimide to do.Because positive and negative magnetic materials layer 29a, 29b pulling strengrth are lower, fragility is bigger, and fracture easily can not be born drawing stress or shear stress when work, and the present invention adopts the middle layer load-bearing and bears shear stress to avoid the problems referred to above.
Ultra-magnetic telescopic actuator block 29 is output sources of actuation force, embedded solenoid 53 is under the driving of exciting current, and the magnetic field that changes influences the distortion of super mangneto membraneous material 29a and 29b, the read/write head 26 that drives slide block 25 front end faces swings, and realizes servo action.
For easily manufactured, monocrystalline silicon spring 55 can be made "
" structure of shape.
Embedded solenoid 53 is centered around on the ultra-magnetic telescopic actuator block 29, and excitation is provided, and its lead terminal 33a is connected to flexible lead wire 35 by coil pad 33b.
An end that flexibly connects plate 30 is inserted between the end 28c and ultra-magnetic telescopic actuator block 29 of magnetic circuit 28, and fixing with ultra-magnetic telescopic actuator block 29, and the other end and semi-girder 21 are fixing.Flexibly connect an end that links to each other with semi-girder 21 on the plate 30 and be provided with lead pad 32 and tie point 31, the other end is provided with coil pad 33b and side center fixed pad 34.Lead pad 32 is connected with the flexible lead wire 35 of semi-girder 21, and tie point 31 is used to flexibly connect the fixing of plate 30 and semi-girder 21.Side center fixed pad 34 is used to flexibly connect the fixing of plate 30 and ultra-magnetic telescopic actuator block 29, and coil pad 33b is used to connect the lead-in wire of embedded solenoid 53.Flexibly connect plate 30 and have thin and wide profile, so vertical direction has certain elasticity, and therefore horizontal direction can be used as the stationary shaft of ultra-magnetic telescopic actuator block 29 because broad.This just makes ultra-magnetic telescopic actuator block 29 1 ends fix, and the other end then can swing under the driving of ultra-magnetic telescopic actuator block 29, realizes the precision positioning of read/write head 26.
Inner magnetic screen layer 50 covers on the magnetic circuit 28, and external magnetism shielding layer 51 is between magnetic circuit 28 and silicon base 27.Inside and outside magnetic masking layer 50,51 is made by technologies such as sputter or depositions by the very high material of magnetic permeability, in magnetic circuit 28 is wrapped in, prevents the interference of the driving magnetic field of micro-actuator to magnetic head or storage medium.
Usually, slide block 25 comprises conventional side read/write head 26 and the ABS air bearing of bottom surface and the tie point at top center position, the micro-actuator conjuncted of the present invention design with slide block 25, the tie point at a top center position of routine is expanded to preposition tie point 24 and tie point 31, with the weight of balance slide block.
The embedded solenoid 53 main excitation fields that produce.Monocrystalline silicon spring 55 is mainly used to reduce the impact of motion.Ultra-magnetic telescopic actuator block 29 deflects under the effect of excitation field (bending), thereby drives slide block 25 mass motions.For ultra-magnetic telescopic actuator block 29 can normally be swung, the space between embedded solenoid 53, the ultra-magnetic telescopic actuator block 29 must be clog-free.This can fill sacrifice layer 56 man-hour and realize by adding.
For ultra-magnetic telescopic actuator block 29 can normally be swung, the space between embedded solenoid 53, the ultra-magnetic telescopic actuator block 29 must be clog-free.This can fill sacrifice layer 56 man-hour and realize by adding.When promptly on silicon chip 29c, growing embedded solenoid 53, micro-actuator 29 and monocrystalline silicon spring 55, in the slit, insert sacrificial layer material, as earth silicon material, formula solenoid 53 to be embedded then, monocrystalline silicon spring 55 and ultra-magnetic telescopic actuator block 29 are cleaned with salicylic acid after growing and finishing again, sacrifice layer 56 are washed off get final product.Flexibly connect in bending section insertion ultra-magnetic telescopic actuator block 29 right sides and the slit between magnetic circuit 28 right-hand members of plate 30, fixing with ultra-magnetic telescopic actuator block 29 right sides bonding or welding, can guarantee secure bond between the two.Consider the difficulty of manufacturing, also can change the bending section and ultra-magnetic telescopic actuator block 29 right-hand member tops bonding or the welding that flexibly connect plate 30 into.
Fig. 5 has showed the hierarchy of semi-girder each several part, wherein connection pads 24, flexible lead wire 35 and flexibly connect cable 36 and link to each other with slide block.Head arm among Fig. 1 16 is repainted as the semi-girder among Fig. 5 21, flexible board 22 is fixed on semi-girder 21 belows, the Front-end Design of flexible board 22 has a universal joint 23, design has slide block bonding dish 20 in the middle of the universal joint 23, slide block bonding dish 20 can be that pad also can be an adhesive spots, connection pads 24 welding on it and the slide block 25 or be bonded together, thus provide the support of slide block 25 and fixing.Flexible board 22 and universal joint 23 all are flexible member, and the degree of freedom of several directions such as level, vertical, upset, pitching can be provided jointly.Flexibly connect cable 36 and be directly connected on the read/write head 26, input write signal or output read signal.Flexible lead wire 35 is directly connected on the lead pad 32 that flexibly connects plate 30, and the lead terminal 33a that is connected to embedded solenoid 53 provides the drive current of embedded solenoid 53.The tie point 31 that flexibly connects plate 30 also is fixed on the semi-girder 21.
Fig. 6 has illustrated the hierarchy of ultra-magnetic telescopic actuator block.It is by having positive excess magnetostrictive effect material (as TbFe
2Film) the positive excess magnetostrictive layer of Zu Chenging, middle layer (as silicon chip or polyimide base film), have negative ultra-magnetic telescopic effect material (as SmFe
2Film) the negative ultra-magnetic telescopic layer of forming is formed.Substrate can be that as shown in the figure polyimide material also can be other materials such as silicon.To studies show that of rare-earth-iron giant magnetostrictive material, SmFe under the room temperature
2Magnetostriction numerical value near TbFe
2Level, polycrystalline SmFe
2Room temperature saturation magnetostriction λ be-1560 * 10
-6, TbFe
2Be 1753 * 10
-6, both magnetostriction coefficients equate under downfield especially.The semi-girder of the bimetallic strip type that is constituted jointly by positive and negative magnetic effect can strengthen overall magnetostrictive effect, reduces the initial curve of semi-girder.Micro-actuator of the present invention has promptly adopted this film-type ultra-magnetic telescopic hierarchy.
The structure of the structure of universal joint and flexible board and present commercial hard disk universal joint and flexible board can be basic identical, difference is the connecting portion of universal joint and slide block, in order to make the certain amount of deformation energy accumulation of super mangneto film, the length of film can not be too short, for this reason, the bond pads of universal joint and slide block must be moved to a side of slide block, make opposite side can have the length of hundreds of micron to make super mangneto film.The universal joint that slide block is connected with the semi-girder flexible board has three kinds of common structures: (i) be cross structure; It (ii) is the convex structure; It (iii) is snake type structure.Though first, the third can make slide block that better suspension characteristic is arranged, complex structure, and second kind simple in structure, various response characteristics also can satisfy the magnetic head requirement, thereby also are the general selections of present commercial disk.The present invention has also adopted this structure, but adjusting to the first side of close read-write with the tie point of slide block, simultaneously having increased by one at opposite side again flexibly connects plate and fixes, this design may make the dynamic response characteristic of slide block worsen, and needs to adopt the soft as far as possible plate that flexibly connects for this reason.
From above structure as can be seen, the groundwork principle of micro-actuator is: generate an electromagnetic field after the embedded solenoid energising, the super mangneto membraneous material with positive excess magnetic effect in the embedded solenoid can extend on magnetic direction, and the membraneous material with negative super magnetic effect can shorten on magnetic direction, because film-type micro-actuator one end is connected to semi-girder and fixes by flexibly connecting plate, thereby whole slide block is done oscillating motion because reacting force can drive, this movement locus is an arc, but direction of motion is the vertical direction along the disk track, thereby can be used as the fine positioning that two stage servomechanism is realized the disk track.
From the structure of micro-actuator and principle of work as can be known, this micro-actuator can change to negative magnetic materials one lateral deviation, but can not change to positive magnetic materials one lateral deviation, also be that the motion of micro-actuator is always unidirectional.If adopt paired this micro-actuator can realize the motion of both direction undoubtedly, but this can bring very high cost, even can not realize.If only adopt single micro-actuator, must consider that in design motion with the first order has been designed to certain overshoot (/ or undershoot), utilizes partial motion to do compensation again during two-stage servosystem with regard to requiring.This reality has been transferred to structural complicacy in the complicacy of system's control.The solution of realization twocouese motion can also be finished by two groups of solenoid.One group of solenoid produces the excitation field of film length direction, makes the film semi-girder to negative super magnetic materials one lateral bending song; The magnetic field that another group solenoid then produces the film X direction makes the film semi-girder to positive excess magnetic materials one lateral bending song.But the difficulty of processing two groups of solenoid in minimum space is very big, and cost surpasses its benefit of bringing probably.
The solution that the present invention adopts is to add bias magnetic field, makes super magnetic materials just be in the center of beat motion when static state, so just can realize the motion of both direction.Bias magnetic field can also can be provided with permanent magnet and produce by adding permanent magnet or adopting the suitable dc bias current that superposes in drive current to produce in the both sides of ultra-magnetic telescopic actuator block 29.
Claims (3)
1, a kind of magnetostrictive micro-actuator that is used for head servo, it is characterized in that: this micro-actuator comprises magnetic circuit (28), ultra-magnetic telescopic actuator block (29), flexibly connects plate (30), connection pads (24), lead pad (32), coil pad (33b), anchor pad (34), tie point (31), flexible lead wire (35), inside and outside magnetic masking layer (50,51), embedded solenoid (53) and monocrystalline silicon spring (55); Wherein,
Connection pads (24) is positioned at slide block (25) end face near read/write head (26) one sides; Magnetic circuit (28) is positioned at slide block (25), it is shaped as " E " word that lies low, the side of the end (28a) that magnetic circuit (28) and connection pads (24) are close is connected with the side on the top of ultra-magnetic telescopic actuator block (29), the end face of center protrusion part (28b) contacts with the bottom surface of ultra-magnetic telescopic actuator block (29) other end, forms closed magnetic circuit; The end that ultra-magnetic telescopic actuator block (29) is positioned at center protrusion part (28b) by side center fixed pad (34) with flexibly connect plate (30) and fix; One end of ultra-magnetic telescopic actuator block (29) and magnetic circuit (28) are fixing, and ultra-magnetic telescopic actuator block (29) is wrapped in the magnetic circuit (28);
Ultra-magnetic telescopic actuator block (29) comprises positive magnetic materials layer (29a), middle layer (29c) and negative magnetic materials layer (29b), middle layer (29c) is materials such as silicon chip or polyimide, positive magnetic materials layer (29a) and negative magnetic materials layer (29b) lay respectively at the both sides of middle layer (29c), and middle layer (29c) plays the effect of support fixation micro-actuator;
Monocrystalline silicon spring (55) is made of a pair of spring, one end of each spring contacts with negative magnetic materials layer (29b) with the positive magnetic materials layer (29a) of ultra-magnetic telescopic actuator block (29) respectively, and an end (28a) of close magnetic circuit (28), its other end then combines as a whole with silicon base (27);
Embedded solenoid (53) is centered around on the ultra-magnetic telescopic actuator block (29), and its lead terminal (33a) is connected to flexible lead wire (35) by coil pad (33b);
An end that flexibly connects plate (30) is inserted between the end (28c) and ultra-magnetic telescopic actuator block (29) of magnetic circuit (28), and fixing with ultra-magnetic telescopic actuator block (29), and the other end and semi-girder (21) are fixing; Flexibly connect the last end that links to each other with semi-girder (21) of plate (30) and be provided with lead pad (32) and tie point (31), the other end is provided with coil pad (33b) and side center fixed pad (34), lead pad (32) is connected with the flexible lead wire (35) of semi-girder (21), and tie point (31) is used to flexibly connect the fixing of plate (30) and semi-girder (21); Side center fixed pad (34) is used to flexibly connect the fixing of plate (30) and ultra-magnetic telescopic actuator block (29), and coil pad (33b) is used to connect the lead-in wire of embedded solenoid (53);
Inner magnetic screen layer (50) covers on the magnetic circuit (28), and external magnetism shielding layer (51) is positioned between magnetic circuit (28) and the silicon base (27).
2, magnetostrictive micro-actuator according to claim 1 is characterized in that: monocrystalline silicon spring (55) is for a pair of
The spring of shape structure.
3, magnetostrictive micro-actuator according to claim 1 and 2 is characterized in that: the both sides in ultra-magnetic telescopic actuator block (29) are respectively equipped with permanent magnet.
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| CN109581082A (en) * | 2018-12-25 | 2019-04-05 | 中国科学院电子学研究所 | Trigone structure mini three-dimensional electric field sensor and technology of preparing based on micro-group dress |
| CN110634667A (en) * | 2019-09-29 | 2019-12-31 | 苏州蓝沛无线通信科技有限公司 | Assembling method of wireless charging receiving coil module |
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| KR100580242B1 (en) * | 1999-10-21 | 2006-05-16 | 삼성전자주식회사 | Micro-actuator |
| US6744173B2 (en) * | 2000-03-24 | 2004-06-01 | Analog Devices, Inc. | Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
| JP2003208769A (en) * | 2002-01-11 | 2003-07-25 | Data Storage Inst | Microactuator for disk drive suspension |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109581082A (en) * | 2018-12-25 | 2019-04-05 | 中国科学院电子学研究所 | Trigone structure mini three-dimensional electric field sensor and technology of preparing based on micro-group dress |
| CN109581082B (en) * | 2018-12-25 | 2020-09-25 | 中国科学院电子学研究所 | Triangular structure micro three-dimensional electric field sensor based on micro assembly and preparation technology |
| CN110634667A (en) * | 2019-09-29 | 2019-12-31 | 苏州蓝沛无线通信科技有限公司 | Assembling method of wireless charging receiving coil module |
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