CN1940414A - Cryogenic refrigerator including separating device - Google Patents

Cryogenic refrigerator including separating device Download PDF

Info

Publication number
CN1940414A
CN1940414A CNA2006101281101A CN200610128110A CN1940414A CN 1940414 A CN1940414 A CN 1940414A CN A2006101281101 A CNA2006101281101 A CN A2006101281101A CN 200610128110 A CN200610128110 A CN 200610128110A CN 1940414 A CN1940414 A CN 1940414A
Authority
CN
China
Prior art keywords
separator
cryogenic refrigerator
lower temperature
heat exchanger
top board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2006101281101A
Other languages
Chinese (zh)
Other versions
CN1940414B (en
Inventor
金春东
张铉万
朴仁善
金益生
金度亨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LS Cable and Systems Ltd
Original Assignee
LS Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LS Cable Ltd filed Critical LS Cable Ltd
Publication of CN1940414A publication Critical patent/CN1940414A/en
Application granted granted Critical
Publication of CN1940414B publication Critical patent/CN1940414B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/12Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using 3He-4He dilution
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00Gas cycle refrigeration machines
    • F25B2309/001Gas cycle refrigeration machines with a linear configuration or a linear motor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

A cryogenic refrigerator has a separating device provided between a lower temperature portion and a heat exchanger to selectively separate the lower temperature portion and the heat exchanger, and thus to selectively block heat transfer between the lower temperature portion and the heat exchanger. According to the cryogenic refrigerator, it can have an ability to perform a maintenance operation of the cryogenic refrigerator at normal temperature by blocking heat transfer from the lower temperature portion to the heat exchanger during maintenance after disassembly.

Description

The cryogenic refrigerator that comprises separator
Technical field
The present invention relates to comprise the cryogenic refrigerator of separator, relate more specifically to comprise the cryogenic refrigerator that is located at the separator between lower temperature part and the heat exchanger, be used for during safeguarding optionally hindering heat transmission between lower temperature part and heat exchanger by this separator.
Background technology
Normally, in the various fields that comprise high vacuum relevant industries, energy relevant industries, medical industry, traffic relevant industries, food service industry, aviation industry, the communications industry etc., need low temperature environment, and its practical application is along with the development expansion gradually of these art.
Refrigeration Technique is liquid nitrogen, argon, helium etc., circulates in any suitable manner and stores the liquid of these liquefaction, circularly they is transported to the position that requires refrigeration, thereby obtains low temperature environment.Cryogenic refrigerator is divided into two zones; The closed system zone (following) that is used for the cooled with liquid nitrogen agent referring to heat exchanger, it has the relatively-high temperature scope of 76-77K, and the closed system zone (following referring to the lower temperature part) that is used for liquid helium coolant, it has very the relative low temperature range near about 4.2K of 0k.Recently, the cryogenic refrigerator that comprises these two cooling agent zones is used.Though not shown, above-mentioned lower temperature part and heat exchanger have their coolant entrance and cooling agent part.
According to the structure of above-mentioned cryogenic refrigerator, heat relies on thermograde to be delivered to the lower temperature part from heat exchanger.But, for the cryogenic refrigerator that comprises lower temperature part and heat exchanger is carried out attended operation, must dismantle the lower temperature part adjacent with the body part, and when after dismounting, carrying out attended operation, the temperature of lower temperature part raises so that the thermograde upset, thereby relates to problem: heat partly is delivered to and the heat exchanger for the treatment of that refrigerated product directly contacts from lower temperature.
Summary of the invention
Therefore, the present invention has been made to be used to address the above problem, and the purpose of this invention is to provide a kind of cryogenic refrigerator, during the attended operation of cryogenic refrigerator, can prevent that heat partly is delivered to heat exchanger from lower temperature.
Above-mentioned purpose of the present invention obtains by the cryogenic refrigerator that comprises lower temperature part, heat exchanger and separator, this separator is located between lower temperature part and the heat exchanger, so that optionally lower temperature part is separated with heat exchanger, thereby optionally hinder partly and the heat transmission between the heat exchanger at lower temperature.
At this, separator can comprise top board; Base plate with shape consistent with the top board shape; Connect top board and base plate to form the side plate of cavity part therein; And to cavity part supply gas or partly discharge the pipeline of gas from cavity, and when the time to cavity part supply gas, separator expands so that top board and base plate is separated from one another, thereby hinder the heat transmission between lower temperature part and heat exchanger, and when when cavity is partly discharged gas, separator shrinks so that top board is closely contacted each other with base plate, thereby allows the heat transmission between lower temperature part and heat exchanger.
According to the present invention, separator can be made up of aluminium, copper, stainless steel or oxygen-free copper, and can be made up of nitrogen, helium or argon to the gas that cavity is partly supplied.
Simultaneously, according to the present invention, adhesive layer can be applied on the apparent surface of the top board of separator and base plate, thereby easily keeps the tight contact condition of top board and base plate when separator shrinks.
At this, adhesive layer can be made up of indium.
Simultaneously, according to the present invention, separator can comprise that two or more are used for the pipeline that gas partly is provided or partly discharges gas from cavity to cavity.
Description of drawings
With reference to accompanying drawing, from following detailed explanation, above and other objects of the present invention, feature and advantage will be more obvious.Wherein:
Fig. 1 is the front view according to the cryogenic refrigerator that comprises separator of a preferred embodiment of the present invention, shows when separator shrinks the wherein state of cryogenic refrigerator operation;
Fig. 2 is the top plan view of separator among Fig. 1;
Fig. 3 is the cutaway view along the III-III ' line of Fig. 2;
Fig. 4 be when the separator of Fig. 1 expands cryogenic refrigerator at the front view of maintenance state;
Fig. 5 is the front view according to the cryogenic refrigerator that comprises separator of another preferred embodiment of the present invention, shows when separator shrinks the wherein state of cryogenic refrigerator operation;
Fig. 6 is the top plan view of the separator of Fig. 5; And
Fig. 7 be when the separator of Fig. 5 expands cryogenic refrigerator at the front view of maintenance state.
The specific embodiment
Hereinafter, with reference to accompanying drawing, with the cryogenic refrigerator of describing in detail according to the preferred embodiments of the present invention, wherein
Fig. 1 is the front view according to the cryogenic refrigerator that comprises separator of a preferred embodiment of the present invention, and the wherein state of cryogenic refrigerator operation is shown when separator shrinks.
With reference to Fig. 1, according to cryogenic refrigerator 100 of the present invention comprise by the body part 10 of suspension bracket 11 supporting, be arranged on the lower temperature part 1 and the heat exchanger 2 of body part 10 bottoms continuously and be arranged on lower temperature part 1 and heat exchanger 2 between separator 3.
Body 10 is provided with heat exchanger 2 by suspension bracket 11 supportings in the bottom of body part, and its contact lower temperature part 1 and just cooled article are so that carry out heat exchange betwixt.
Heat exchanger 2 is supported by the buffer 15 that is connected than lower part of the cramp bars 5 that extend downwards from suspension bracket 11, an end and cramp bar 5 and the secondary cramp bar 16 that is connected with the other end of buffer 15.Because cryogenic refrigerator 100 moves by the repeatable operation of adiabatic expansion process, vibration in heat exchanger, occurs, and the buffer 15 that is provided with absorbs and reduce this vibration between cramp bar 5 and secondary cramp bar 16.As this buffer 15, various buffers are known, and the present invention preferably utilizes spring as buffer.
Separator 3 is installed between heat exchanger 2 and the lower temperature part 1.Separator 3 is pucker ﹠ bloat optionally, so that hinder or the heat transmission of permission between heat exchanger 2 and lower temperature part 1.This separator 3 is at length shown in Fig. 2 and Fig. 3.
Fig. 2 is the top plan view according to the separator 3 of cryogenic refrigerator 100 of the present invention, and Fig. 3 is the cutaway view along the III-III ' line of Fig. 2.
With reference to Fig. 2 and Fig. 3, separator 3 comprises top board 6, have the base plate 8 of the shape consistent with the shape of top board and connect top board 6 and base plate 8 so that form the side plate 7 of cavity part 20 betwixt.
Top board 6 and base plate 8 preferably have round-shaped, and have consistent size.The cross section that the side plate 7 of connection top board 6 and base plate 8 has ' C ' shape or '<' shape, thus cavity part 20 formed by top board 6, base plate 8 and side plate 7.Top board 6 and base plate 8 have deformable structure, and it is around side plate distortion, for example around side plate 7 bendings, to allow top board closely to contact each other with base plate or separated from one another.Preferably, top board 6, base plate 8 and side plate 7 are made up of any of aluminium, copper, stainless steel or oxygen-free copper.
In addition, adhesive layer 9 is applied on the apparent surface of top board 6 and base plate 8, and helps when top board 6 closely contacts each other with base plate 8 and easily keep tight contact condition.The material of adhesive layer 9 is specific, but preferably the present invention utilizes the material of indium as adhesive layer.
Pipeline 4 is connected to one side of top board 6, and provides the gas separator 3 that is used to expand to cavity part 20, or discharges gases from cavity part 20 and be used to shrink separator 3.Pipeline 4 is connected to the extraneous gas feeding mechanism, and is not shown.Preferably, gas can be made up of nitrogen, helium or argon.
Now, description is used in the operation of the separator 3 in the cryogenic refrigerator 100 of the present invention.When gas when the extraneous gas feeding mechanism enters the cavity part 20 of separator 3 by pipeline 4, separator is by the pressure expansion of gas, thereby top board 6 and base plate 8 is separated from one another.On the contrary, when gas by pipeline 4 when the cavity part 20 of separator 3 is discharged, separator 3 shrinks so that force top board 6 closely to contact each other with base plate 8.Because top board 6 closely contacts each other with base plate 8, be applied to adhesive layer 9 on the apparent surface of top board 6 and base plate 8 and more help therebetween tight the contact.
Fig. 4 is the front view of the state that expands of separator 3 gas by supply wherein.
As shown in Figure 4, carry out the attended operation of cryogenic refrigerator 100 if desired, the operator is to cavity part 20 supply gas of separator 3, so that expansion separator 3.By this operation, the top board 6 (Fig. 3) of separator 3 and base plate 8 (Fig. 3) are away from each other, so that hinder the heat transmission between lower temperature part 1 and heat exchanger 2, and therefore, even the temperature of lower temperature part 1 temporarily raises, also can prevent from lower temperature part 1 to heat exchanger 2 heat transmission.
On the contrary, when expectation moved cryogenic refrigerator 100 once more after the operator finishes attended operation, the operator as shown in Figure 1, discharged gas by pipeline 4 from cavity part 20, so that shrink separator 3.Contraction by separator 3 closely contacts top board 6 each other with base plate 8, and easily closely contacts each other by the adhesive layer 9 on the apparent surface who is applied to top board 6 and base plate 8.By the tight contact between top board 6 and base plate 8 heat transmission being taken place, thereby moves cryogenic refrigerator 100 once more.
Fig. 5 is the front view according to the cryogenic refrigerator 100 ' of another preferred embodiment of the present invention, shows when separator 3 ' shrinks the wherein state of cryogenic refrigerator 100 ' operation.
With reference to Fig. 5, the embodiment of Fig. 5 is different with the embodiment of Fig. 1, is connected to the pipeline 4,4 ' of separator 3 ' because two or more have been installed, and supplies or discharge gas by these pipelines to separator 3 '.Difference between the embodiment of detailed description Fig. 1 and Fig. 5 below.
Fig. 6 is the top plan view according to the separator 3 ' of present embodiment.With reference to Fig. 6, in according to separator 3 ' of the present invention, around the bilateral symmetry of lower temperature part 1 be provided with two pipelines 4,4 '.Though Fig. 6 only shows two pipelines 4,4 ', the present invention is not limited to this, but can comprise the pipeline more than arbitrary suitable number of two.
Fig. 7 comprises that the cryogenic refrigerator 100 ' of separator 3 ' is in the front view of maintenance state when separator expands.
Now, with reference to Fig. 5 and Fig. 7, description is according to the operation of the separator 3 ' of the cryogenic refrigerator 100 ' of present embodiment.
As shown in Figure 5, when operation cryogenic refrigerator 100 ', the pipeline 4 of a side is closed, and the pipeline 4 ' of opposite side is opened, and gas is discharged so that shrink separator 3 ' from cavity part 20 by the pipeline of opening 4 '.Contraction by separator 3 ' closely contacts top board 6 each other with base plate 8, and easily closely contacts each other by the adhesive layer 9 on the apparent surface who is applied to top board 6 and base plate 8.By the tight contact between top board 6 and base plate 8, heat transmission appears between lower temperature part and heat exchanger, move cryogenic refrigerator 100 '.
On the contrary, as shown in Figure 7, when needs were carried out the attended operation of cryogenic refrigerator 100 ', the operator was to cavity part 20 supply gas of separator 3 ', so that expansion separator 3 '.Particularly, the operator passes through cavity part 20 supply gas of the pipeline 4 of a side to separator 3 ', so that expansion separator 3 ' is discharged gas by the pipeline 4 ' of opposite side then.In this case, gas is discharged by the pipeline 4 ' of opposite side, and will maintain desired amount at the gas volume in the cavity part 20, is used to keep the swelling state of separator 3 '.The expansion of top board 6 and base plate 8 by separator 3 ' away from each other, thereby hinder the heat transmission between lower temperature part 1 and heat exchanger 2, even so that the temperature of lower temperature part 1 temporarily raises during safeguarding, heat is not delivered to heat exchanger 2 from lower temperature part 1 yet.
According to this embodiment, the separator 3 ' that expands if desired, gas is without interruption by the pipeline 4 of a side, and discharges by the pipeline 4 ' of opposite side, and the gas volume in separator 3 ' is maintained desired amount.Therefore, because the condensation by the heat exchanger 2 of the lower temperature that is connected with base plate 8 of gas cavity part 20 in, its volume reduces, so the swelling state of impossible maintenance separator 3 '.Therefore, prevented that top board 6 from closely contacting each other with base plate 8.
According to the present invention, comprise that the cryogenic refrigerator that is arranged on the separator between lower temperature part and the heat exchanger can be by during safeguarding, utilize separator optionally to hinder heat transmission between lower temperature part and heat exchanger, carry out attended operation at the cryogenic refrigerator of normal temperature.
Though described the preferred embodiments of the present invention for illustrative purpose, it will be understood by those skilled in the art under the situation that does not break away from the disclosed scope and spirit of the present invention of claims, can do various modifications, increase and displacement.

Claims (7)

1. cryogenic refrigerator, it comprises:
The lower temperature part;
Heat exchanger; And
Separator, it is arranged between lower temperature part and the heat exchanger, so that optionally separate lower temperature part and heat exchanger, thereby optionally hinders the heat transmission between lower temperature part and heat exchanger.
2. according to the cryogenic refrigerator of claim 1, wherein, separator comprises:
Top board;
Base plate with shape consistent with the shape of top board; Connect top board and base plate so that form the side plate of cavity part therein; And
Supply gas enters cavity part or partly discharges the pipeline of gas from cavity,
Wherein, when gas enters the cavity part, separator expands so that top board and base plate is separated from one another, thereby hinder the heat transmission between lower temperature part and heat exchanger, and when gas when cavity is partly discharged, separator shrinks so that top board closely contacts each other with base plate, thereby allows the heat transmission between lower temperature part and heat exchanger.
3. according to the cryogenic refrigerator of claim 2, wherein separator is made by aluminium, copper, stainless steel or oxygen-free copper.
4. according to the cryogenic refrigerator of claim 2, the gas that wherein is fed to the cavity part is made up of nitrogen, helium or argon.
5. according to the cryogenic refrigerator of claim 2, wherein adhesive layer is applied on the apparent surface of the top board of separator and base plate.
6. according to the cryogenic refrigerator of claim 5, wherein adhesive layer is made up of indium.
7. according to the cryogenic refrigerator of claim 2, wherein separator comprises that two or more are used for to cavity part supply gas or partly discharge the pipeline of gas from cavity.
CN2006101281101A 2005-09-30 2006-09-04 Cryogenic refrigerator including separating device Expired - Fee Related CN1940414B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020050091824 2005-09-30
KR10-2005-0091824 2005-09-30
KR1020050091824A KR100633223B1 (en) 2005-09-30 2005-09-30 Cryogenic refrigerators having dividing means

Publications (2)

Publication Number Publication Date
CN1940414A true CN1940414A (en) 2007-04-04
CN1940414B CN1940414B (en) 2011-04-27

Family

ID=37635581

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006101281101A Expired - Fee Related CN1940414B (en) 2005-09-30 2006-09-04 Cryogenic refrigerator including separating device

Country Status (3)

Country Link
US (1) US20070074522A1 (en)
KR (1) KR100633223B1 (en)
CN (1) CN1940414B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105501679A (en) * 2014-09-18 2016-04-20 布鲁克碧奥斯平有限公司 Automatic thermal decoupling of cold head

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008014330A2 (en) 2006-07-25 2008-01-31 Lai Shui T Method of making high precision optics having a wavefront profile
JP5907965B2 (en) 2010-07-30 2016-04-26 ブルックス オートメーション インコーポレイテッド Multi-cooler high-speed cryopump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3430455A (en) * 1967-04-17 1969-03-04 500 Inc Thermal switch for cryogenic apparatus
US4689970A (en) * 1985-06-29 1987-09-01 Kabushiki Kaisha Toshiba Cryogenic apparatus
JPS62185383A (en) * 1986-02-12 1987-08-13 Toshiba Corp Cryogenic vessel
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
CN1123748C (en) * 2000-12-07 2003-10-08 上海交通大学 Low-loss low-temp enclosure with liquefied nitrogen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105501679A (en) * 2014-09-18 2016-04-20 布鲁克碧奥斯平有限公司 Automatic thermal decoupling of cold head
CN105501679B (en) * 2014-09-18 2019-05-31 布鲁克碧奥斯平有限公司 Refrigerating head it is automatic heat-insulated

Also Published As

Publication number Publication date
US20070074522A1 (en) 2007-04-05
CN1940414B (en) 2011-04-27
KR100633223B1 (en) 2006-10-11

Similar Documents

Publication Publication Date Title
CN1940414A (en) Cryogenic refrigerator including separating device
US6905107B2 (en) Inflatable slit/gate valve
CN1137362C (en) Refrigerator and condenser
JP4991561B2 (en) Cryogenic separator
CN102171523B (en) Modular cabinet for ultra-low temperature freezer
US20090272127A1 (en) Cryogenic vacuum break thermal coupler with cross-axial actuation
CN1868827A (en) Glass box of glass substrate mounted with display panel
CN111033110B (en) Vacuum insulator and refrigerator
CN1782644A (en) Apparatus for the low-temperature separation of a gas mixture, in particular air
AU2010279692B2 (en) Cryogenic insulation attachment and method
JP2015523305A (en) Apparatus and method for molding glass
CN102246290A (en) Substrate cooling apparatus and substrate processing system
CN110016652A (en) It is a kind of for making the preparation method and applications of the pyrolytic boron nitride plate of supporting rod
US11015262B2 (en) Apparatus and method for molecular beam epitaxy
KR100667886B1 (en) In-line sputtering system
CN101113517B (en) Substrate processing apparatus
US8267253B2 (en) Carrier and manufacturing apparatus having the same
US8894894B2 (en) Fluid recirculation system for localized temperature control and chilling of compressed articles
WO2009145377A1 (en) Workstation for cryo transmission electron microscope
US11971141B2 (en) Low thermal conductivity support system for cryogenic environments
CN1041751C (en) Improvement to cooled cylinders for handling siderurgical products
CN219222979U (en) Refrigerator with adjustable storage space
KR100880868B1 (en) Apparatus and method for molding pipe
CN213955691U (en) Condenser for refrigeration of refrigeration house
CN217070296U (en) U-shaped bending device for evaporator

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110427

Termination date: 20140904

EXPY Termination of patent right or utility model