CN1939642B - Laser fusing device and method - Google Patents
Laser fusing device and method Download PDFInfo
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- CN1939642B CN1939642B CN2006101592878A CN200610159287A CN1939642B CN 1939642 B CN1939642 B CN 1939642B CN 2006101592878 A CN2006101592878 A CN 2006101592878A CN 200610159287 A CN200610159287 A CN 200610159287A CN 1939642 B CN1939642 B CN 1939642B
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Abstract
The present invention provides a laser welding apparatus which can appropriately weld by laser a plurality of workpieces with a simple configuration, and further a method for laser welding is provides. The laser welding apparatus irradiates laser beam to the workpiece provided with a lid and a package to execute welding to seal the workpiece. Concretely, the laser welding apparatus comprises a laser beam radiating section, an irradiating position changing section, and a moving means. The laser beam radiating section radiates the laser beam. The irradiating position changing section receives the laser beam radiated from the laser beam radiating section, and changes the position to be irradiated with the laser beam. Specifically, the irradiating position changing section changes the irradiating position by the laser beam in order to carry out the welding for a plurality of workpieces arranged on a tray, etc. The moving means moves at least either of the workpiece and the irradiating position changing section. In this way, the above-mentioned apparatus for laser welding can efficiently and appropriately carry out the welding for a plurality of workpieces with a simple configuration of the apparatus.
Description
Technical field
The present invention relates to by the workpiece illuminating laser beam being carried out the laser welding device and the laser welding method of welding.
Background technology
All the time, in the packaging part sealing of light device element, quartz crystal etc., be by the lid illuminating laser beam being come welding (being laser welding) lid and packaging part.For example put down in writing the laser welding device that carries out welding with laser beam in the patent documentation 1 to 3.
Patent documentation 1: the spy opens the 2000-164095 communique
Patent documentation 2: the spy opens the 2002-244072 communique
Patent documentation 3: the spy opens the 2004-90060 communique
Summary of the invention
The problem that solution is planned in invention
Yet, in above-mentioned patent documentation 1 to 3 technology of being put down in writing, in the occasion that a plurality of workpiece (being fused thing by what lid and packaging part constituted) are carried out welding, make sometimes device complicated, maximize.
The problem that the present invention plans to solve is an example with above-mentioned situation.Problem of the present invention provides a kind of laser welding device and laser welding method that adopts easy formation a plurality of workpiece to be carried out rightly laser welding.
Be used to solve the scheme of problem
The invention of technical scheme 1 record is a kind of by the workpiece irradiating laser that possesses lid and packaging part is carried out the laser welding device that welding seals above-mentioned workpiece, possesses: the laser beam outgoing portion of the above-mentioned laser beam of outgoing; Acceptance from the outgoing of above-mentioned laser beam outgoing portion laser beam, the irradiating position changing section of the position of this laser beam of change irradiation; And make any one mobile member that moves at least in above-mentioned workpiece and the above-mentioned irradiating position changing section.
The invention of technical scheme 9 record is that a kind of device of irradiating position changing section of the position by laser beam outgoing portion that possesses the laser beam and the above-mentioned laser beam of change irradiation is carried out, carry out welding and seal the laser welding method of above-mentioned workpiece, it is characterized in that possessing: make above-mentioned laser beam emitting laser bundle outgoing operation; Make the irradiating position changing operation of the position change of the above-mentioned laser beam of irradiation; And make any one mobile process that moves at least in above-mentioned workpiece and the above-mentioned irradiating position changing section.
Description of drawings
Fig. 1 is the figure that the summary of the related laser welding device of expression the 1st embodiment of the present invention constitutes.
Fig. 2 is the figure of the concrete formation of expression workpiece.
The figure of state of the pallet of Fig. 3 is expression mounting workpiece.
Fig. 4 is the figure that is used to illustrate pre-assembling welding process.
Fig. 5 is the figure that is used to illustrate the fixing means that adopts magnet.
Fig. 6 is the figure that the summary of the related laser welding device of expression the 2nd embodiment constitutes.
Fig. 7 is the figure that the summary of the related laser welding device of expression the 3rd embodiment constitutes.
Fig. 8 is the figure that the summary of the related laser welding device of expression the 4th embodiment constitutes.
Label declaration
10 workpiece
The 10a lid
The 10b packaging part
20 pallets
23 stands
27,28 travel mechanisms
30 preparation rooms
31 closed chambers
35 laser beam beam emitters
36 transfer gauge head
100 laser welding devices
The specific embodiment
In a preferred embodiment of this invention, possess by the workpiece irradiating laser that possesses lid and packaging part being carried out the laser welding device that welding seals above-mentioned workpiece: the laser beam outgoing portion of the above-mentioned laser beam of outgoing; Acceptance from the outgoing of above-mentioned laser beam outgoing portion laser beam, the irradiating position changing section of the position of this laser beam of change irradiation; And make any one mobile member that moves at least in above-mentioned workpiece and the above-mentioned irradiating position changing section.
Above-mentioned laser welding device seals above-mentioned workpiece by the workpiece irradiating laser that possesses lid and packaging part is carried out welding.Particularly, laser welding device possesses laser beam outgoing portion, irradiating position changing section and mobile member.The laser beam that laser beam outgoing portion outgoing laser beam, irradiating position changing section have been accepted from the outgoing of laser beam outgoing portion, the position of change illuminating laser beam.Particularly, for a plurality of workpiece to last mountings such as pallets carry out welding, the position of irradiating position changing section change illuminating laser beam.And, mobile member make in workpiece and the irradiating position changing section any one moves at least.For example, when the welding to all workpiece of being positioned at the scope that the related laser beam of irradiating position changing section can shine was through with, mobile member was carried out above-mentioned moving.According to above-mentioned laser welding device, can adopt easy device to constitute a plurality of workpiece effectively and are rightly carried out welding.
In a mode of above-mentioned laser welding device, also possess when the above-mentioned workpiece of welding, the closed chamber that this workpiece is moved into, above-mentioned laser beam outgoing portion and above-mentioned irradiating position changing section are arranged on the outside of above-mentioned closed chamber.Constitute like this that laser welding device can be simplified, the miniaturization closed chamber.
Preferably, above-mentioned closed chamber is provided with the penetrating window that above-mentioned laser beam sees through, and above-mentioned irradiating position changing section can change the position of illuminated above-mentioned laser beam, make laser beam from above-mentioned penetrating window to above-mentioned closed chamber incident.
In the another way of above-mentioned laser welding device,, be used to seal the welding of above-mentioned workpiece to being in the workpiece of the state that above-mentioned lid and above-mentioned packaging part assembled in advance.The lid that produces in the time of so just preventing to seal and the position deviation of packaging part, lid cursory, the conveyance workpiece of caused lid and packaging part such as melt the time vibration, impact the position deviation of caused lid and packaging part etc.That is,, can be used for the welding of the sealing of lid and packaging part rightly according to above-mentioned laser welding device.
In above-mentioned laser welding device, preferably, also possessed before the welding that is used for above-mentioned sealing, be used for the pre-assembling mechanism that above-mentioned lid and above-mentioned packaging part are carried out above-mentioned pre-assembled welding.So just can be used for the welding of pre-assembling and sealing effectively.
In the another way of above-mentioned laser welding device, by above-mentioned lid being paid the related magnetic force of magnet, on above-mentioned packaging part, fix above-mentioned lid, and on the pallet of the above-mentioned workpiece of mounting, fix above-mentioned lid and above-mentioned packaging part.So just can be used for the welding of the sealing of lid and packaging part rightly.
Preferably, mounting the pallet of a plurality of workpiece moved into above-mentioned closed chamber.In this occasion, laser welding device by means of mobile member make in workpiece and the irradiating position changing section any one moves at least, thereby can carry out welding rightly to a plurality of workpiece.
Also have, in above-mentioned laser welding device, preferably, above-mentioned irradiating position changing section also possesses carries out the image measurement member of image measurement and comes revisal to shine the position correcting member of the position of above-mentioned laser beam based on above-mentioned image measurement result above-mentioned workpiece.
In another embodiment of the present invention, a kind of device of irradiating position changing section of the position by laser beam outgoing portion that possesses the laser beam and the above-mentioned laser beam of change irradiation is carried out, and carries out welding and the laser welding method that seals above-mentioned workpiece possesses: make above-mentioned laser beam emitting laser bundle outgoing operation; Make the irradiating position changing operation of the position change of the above-mentioned laser beam of irradiation; And make any one mobile process that moves at least in above-mentioned workpiece and the above-mentioned irradiating position changing section.According to above-mentioned laser welding method, also can effectively and rightly carry out welding to a plurality of workpiece with the device of easy formation.
Embodiment
Followingly the preferred embodiments of the present invention are described with reference to accompanying drawing.
[the 1st embodiment]
The 1st embodiment of the present invention at first is described.
(formation of laser welding device)
Fig. 1 is the figure that the summary of the related laser welding device 100 of expression the 1st embodiment constitutes.Particularly, (a) figure (a perspective part is represented) of the laser welding device 100 of Fig. 1 is seen in expression from top, and the arrow H direction of Fig. 1 (b) expression from Fig. 1 (a) seen the figure of the inside of closed chamber 31.In addition, the solid arrow among Fig. 1 (a) is represented the direction that moves of pallet 20.Also have, in Fig. 1 (a),, omitted workpiece 10 and represented for ease of explanation.Have again, transfer gauge head (ガ Le バ ノ ヘ Star De) 36 to be physically located in the top (with reference to Fig. 1 (b)) of windowpane 25 (being represented by dotted lines), for ease of explanation, remove and transfer gauge head 36 to represent among Fig. 1 (a).
Laser welding device 100 mainly possesses travel mechanism 27,28, preparation room 30, closed chamber 31, dried pump 32, cryogenic pump 33, laser beam beam emitter 35 and transfers gauge head 36.The device that laser welding device 100 carries out welding to a plurality of workpiece 10 that are positioned on the pallet 20 (" pallet 20a～pallet 20d " is that reindexing is represented in order to distinguish pallet 20 according to the position among Fig. 1 (a)).
The state of the pallet 20 of the concrete formation of workpiece 10 and mounting workpiece 10 here, is described with Fig. 2 and Fig. 3.
Fig. 2 is the figure that amplifies expression workpiece 10.Particularly, the top figure of Fig. 2 (a) expression workpiece 10, the side view of Fig. 2 (b) expression workpiece 10, the cutaway view of the cutting line A1-A2 of Fig. 2 (c) expression in Fig. 2 (a).Workpiece 10 possesses the packaging part 10b and the electronic unit 10c of tabular lid 10a, case shape.Particularly, lid 10a is made of Kovar alloy material, 42 alloy materials, stainless steel or low contracted payment material metal materials such as (A g ロ one Network ラ Star De materials), and packaging part 10b is made of ceramic material.Electronic unit 10c has element, piezoelectrics such as quartzy element, semiconductor element, is incorporated in the packaging part 10b.Above-mentioned laser welding device 100 is for example to the dashed region 10aa illuminating laser beam of lid 10a.So just lid 10a is fused to packaging part 10b and seals workpiece 10.
In addition, the example that expression is only carried out welding to lid 10a illuminating laser beam among Fig. 2 (a) but, is not limited thereto.In another example, laser welding device can be penetrated laser beam and carry out welding lid 10a and packaging part 10b two quadratures.
The figure of concrete example of the state of the pallet 20 of Fig. 3 is expression mounting workpiece 10.Particularly, Fig. 3 (a) expression mounting workpiece 10 pallet 20 above, the cutaway view of the cutting line B1-B2 of Fig. 3 (b) expression in Fig. 3 (a).Shown in Fig. 3 (a) and Fig. 3 (b), a plurality of workpiece were placed in a plurality of groove 20x that form on the pallet 20 in 10 years.For example, the workpiece 10 of 600 degree of mounting on pallet 20.
Get back to Fig. 1, describe for laser welding device 100.Preparation room 30 carries out the room that pallet 20 is awaited orders before the welding, and closed chamber 31 is actual rooms that carry out welding.These preparation rooms 30 and closed chamber 31 are provided with door 21,26 and intermediate door 22.Door 21 is transferring to open from closing when preparation room 30 moves into pallet 20, and door 26 30 is transferring to open from closing when discharging pallets 20 from the preparation room.Also have, intermediate door 22 30 is transferring to open from closing when closed chamber 31 is moved into pallet 20 from the preparation room.
Dried pump 32 is connected with closed chamber 31 with preparation room 30, gases in suction preparation room 30 and the closed chamber 31 and carry out exhaust.Cryogenic pump 33 is connected with closed chamber 31, gases in the suction closed chamber 31 and carry out exhaust.Specifically, dried pump 32 carries out exhaust, up to the preparation room 30 and the vacuum of closed chamber 31 become low vacuum (pressure of number (Pa) degree).On the other hand, cryogenic pump 33 carries out exhaust, becomes high vacuum (being lower than the pressure of low vacuum) up to the vacuum of closed chamber 31 from low vacuum.
Travel mechanism 27 the direction of arrow 90 expression make mounting the stand 23 of pallet 20 move.Also have, travel mechanism 28 the direction of arrow 91 expressions make mounting the stand 23 of pallet 20 move.
Laser beam beam emitter 35 and accent gauge head 36 are arranged on the outside of closed chamber 31.Laser beam beam emitter 35 outgoing laser beam LB1 exchange gauge head 36 this laser beam of irradiation LB1.Transfer gauge head 36 to accept laser beam LB1, the position of this laser beam of change irradiation LB1.Particularly, transfer gauge head 36 possess to the workpiece on the pallet 20 10 carry out image measurement video camera, based on the image measurement result come sweep mechanism, the reflection lasering beam of position correcting member, the scanning laser beam of the position of revisal irradiation speculum, make the collector lens of laser beam condensation etc.From transferring gauge head 36 emitting laser bundle LB2 to see through the windowpane 25 of being located at closed chamber 31, to closed chamber 31 incidents.Then, to workpiece 10 illuminating laser beam LB2, carry out the welding of workpiece 10.
Like this, laser beam beam emitter 35 works as laser beam outgoing portion, transfer gauge head 36 to work as irradiating position changing section, image measurement member and position correcting member, travel mechanism 27,28 works as mobile member, and windowpane 25 works as penetrating window.In addition, laser beam beam emitter 35, transfer gauge head 36 and travel mechanism 27,28 by PC (PC) etc. adjust, control etc.
The action of the laser welding device 100 when workpiece 10 carried out welding here is described.
Then, intermediate door 22 is transferred to open from closing, the pallet 20 that is in the position of representing with symbol 20b is moved to the position of representing with symbol 20c in the closed chamber 31, promptly move on the stand 23.Then intermediate door 22 is closed from opening to transfer to.Afterwards, make preparation room 30 become atmospheric pressure, door 21 is transferred to open from closing, move into new pallet 20 to preparation room 30.Then, the door 21 from open transfer to close after, dried pump 32 just carries out the exhaust of preparation room 30.In addition, between stand 23 and pallet 20, inserted magnetic bed (in other words, on stand 23, placing the magnetic bed in advance, loading tray 20 on this magnetic bed) with magnet.Pay magnetic force by the magnet that the magnetic bed accessory has to lid 10a, make lid 10a be fixed in packaging part 10b, and make lid 10a and packaging part 10b be fixed in pallet 20.That is, under the state of having fixed as mentioned above by magnet, in closed chamber 31, carry out welding.In addition, about using the fixing means of magnet, details aftermentioned.
Secondly, cryogenic pump 33 carries out the exhaust of closed chamber 31.The pressure of closed chamber 31 reaches the words of setting pressure, specifically be the words that vacuum reaches high vacuum, transfer gauge head 36 just to be positioned in the image measurement of the workpiece 10 on the pallet 20, come the position that revisal (position revisal) should illuminating laser beam based on the image measurement result.Then, laser beam beam emitter 35 is exchanged gauge head 36 outgoing laser beam LB1, transfers gauge head 36 position-based revisal results to workpiece 10 illuminating laser beam LB2.Transfer the welding of 36 pairs of 1 workpiece 10 of gauge head to finish, but just other workpiece 10 to the zone on the pallet 20 of illuminating laser beam LB2 (is " but irradiation area " to call this zone in the following text) internal memory carry out image measurement and position revisal in the position of stand 23 now.Then, laser beam beam emitter 35 outgoing laser beam LB1, the workpiece 10 illuminating laser beam LB2 that transfer 36 pairs of gauge heads to carry out the position revisal.But such accent gauge head 36 related image measurement and position revisals will be carried out all workpiece 10 in the irradiation area.
Secondly, but the welding of all workpiece 10 in the irradiation area is finished, made the workpiece 10 that does not carry out welding enter the position in the irradiation area of transferring gauge head 36 but travel mechanism 27,28 moves to stand 23.Then, according to above-mentioned order, but all workpiece 10 in the irradiation area are carried out welding.But the welding to all workpiece 10 of being positioned at this irradiation area finishes, and travel mechanism 27,28 just makes stand 23 move again.Travel mechanism 27,28 moves stand 23, finishes up to the welding to all workpiece 10 on the pallet 20.
Welding to all workpiece 10 on the pallet 20 finishes, and travel mechanism 27,28 just makes stand 23 to discharging side shifting, and cryogenic pump 33 stops exhaust.Secondly, intermediate door 22 is transferred out to the pallet 20 that is through with to preparation room's 30 conveyance weldings from closing.At this moment, 30 move into new pallet 20 from the preparation room to closed chamber 31.Then, make intermediate door 22 preparation room 30 become atmospheric pressure from opening to transfer to after closing, door 26 is transferred to open from closing, the pallet 20 of mounting the workpiece 10 that welding is through with is to the position conveyance of representing with symbol 20d (promptly from the preparation room 30 discharge), and the pallet 20 of mounting the workpiece 10 that will carry out welding is moved into (promptly moving into to preparation room 30) to the position of representing with symbol 20b.Afterwards, the mounting pallet 20 of the workpiece 10 that welding is through with the placement table conveyances such as (not shown) of the pallet 20 of the workpiece 10 that welding is through with by travel mechanism (not shown) to shelving mounting.
Like this, in the related laser welding device 100 of the 1st embodiment, 36 related position revisals come illuminating laser beam based on the accent gauge head, but and the welding end of exchanging the workpiece 10 in gauge head 36 irradiation areas, the stand 23 that travel mechanism 27,28 just makes mounting pallet 20 moves.Therefore, according to above-mentioned laser welding device 100, can effectively and rightly carry out welding to a plurality of workpiece 10.Also have, laser welding device 100 is laser beam beam emitter 35 and transfer gauge head 36 to be arranged on the outside of closed chamber 31, can carry out the irradiation of position revisal and laser beam from the outside of closed chamber 31.So just simplified the formation of closed chamber 31, Miniaturizable.Thereby, can improve the vacuum of closed chamber 31, can also shorten evacuation time.
Here, the welding process of the related laser welding device 100 of the 1st embodiment and the welding process that generally carries out (hereinafter referred to as " other welding process ") are compared.As other welding process, the method that adopts electron beam to carry out welding is arranged.In the method, electron beam can not see through windowpane, thereby can not be with the external irradiation electron beam of windowpane from closed chamber.Thereby, adopting electron beam to carry out in the method for welding, need possess and the electron gun of closed chamber one and the position correcting mechanism in magnetic field in order to come the revisal irradiation position with magnetic field, compare with the welding process that laser welding device 100 is related, the device price is high and can maximize.Also have, adopting electron beam to carry out in the method for welding, can not carry out the image measurement of workpiece 10, thereby need mechanically determine the position of workpiece 10, and in the related welding process of laser welding device 100, carry out the position revisal by the image measurement result who transfers gauge head 36 based on workpiece 10, thereby can save the positioning process of workpiece.
As another other welding process, the method for carrying out the resistance eam welding is arranged.In the method, the welding of on workpiece 10, rolling of pair of rolls electrode, thereby miniaturization that can not corresponding workpiece.Also have, tens thousand of workpiece of every welding 10 just need more roll change electrode.And in the related welding process of laser welding device 100, direct contact workpiece 10, thereby miniaturization that can corresponding workpiece 10, and without the roller electrode etc., thereby do not need to change inscape in the closed chamber.
In addition, the invention is not restricted in closed chamber 31, take in the situation of 1 pallet 20.In other examples, can make closed chamber 31 take in pallet 20 more than 2.In this occasion, after the welding of the workpiece 10 of mounting finishes on all pallets 20 that laser welding device 100 can be taken in to closed chamber 31, discharge these pallets 20, and move into new pallet 20.
Also have, the invention is not restricted to closed chamber 31 is maintained under the state of vacuum and carry out welding, but also can not be maintained at vacuum, but be maintained at N
2Deng carrying out welding under the state of atmosphere such as inert gas.In this occasion, laser welding device does not possess dried pump 32 and cryogenic pump 33, but possesses the gas displacement pump and inert gas imported the gas gatherer of preparation room 30 and closed chamber 31 and constitute.
(assembling welding process in advance)
Here, the pre-assembling for lid 10a and packaging part 10b describes.In addition, in this manual, " pre-assembling " is meant carried out bonding in advance before lid 10a and packaging part 10b are sealed fully.
In the present embodiment, to being in the workpiece 10 under the state that lid 10a and packaging part 10b assembled in advance, be used for the welding (hereinafter referred to as " sealing welding ") that lid 10a and packaging part 10b are sealed fully.Specifically, before supplying with workpiece 10, be used for assembling in advance the welding (hereinafter referred to as " assembling welding in advance ") of lid 10a and packaging part 10b to laser welding device 100.Particularly, assembling welding in advance is that the part in the zone on the lid 10a of sealed welding is carried out welding.
Assemble welding in advance and be the lid 10a that produces in order to prevent to seal welding and packaging part 10b position deviation, lid 10a cursory, the conveyance workpiece 10 of caused lid 10a and packaging part 10b such as melt the time vibration, impact the position deviation of caused lid 10a and packaging part 10b etc.That is, in the present embodiment, before the sealing welding, assemble welding in advance for the sealing welding of carrying out lid 10a and packaging part 10b rightly.
With Fig. 4 the pre-assembling welding process that present embodiment is related is described.The top figure of Fig. 4 (a) and Fig. 4 (b) expression workpiece 10.An example of the pre-assembling welding that Fig. 4 (a) expression laser beam or electron beam are related.In this occasion, assemble welding in advance to four jiaos point 40 illuminating laser beams or the electron beam of lid 10a.Other examples of the pre-assembling welding that the welding of Fig. 4 (b) expression eam welding constant resistance is related.In this occasion, on 2 limits 41 that face toward of lid 10a, carry out electric resistance welding.The pre-assembling welding on 2 limits 41 is like this formed by roll welding or extruding welding such as pair of rolls electrode.
In the welding of general bundle, before the sealing welding, do not carry out above-mentioned pre-assembling welding, but when sealing welding, use anchor clamps etc. to carry out the location of lid 10a and packaging part 10b and fixing, lid 10a extruding to packaging part 10b.In this occasion, be the outer peripheral portion of pinning lid 10a by anchor clamps, so need seal welding in the inboard of lid 10a.Thereby, in the method for using anchor clamps, needing the sealing-in amplitude (wall amplitude) of packaging part 10b sometimes, it is narrow that the internal volume of packaging part 10b will become, and is difficult to corresponding small-sized packaging part 10b, and perhaps the mark space of lid 10a narrows down.But also need installation exercise of anchor clamps etc.
By contrast, in the present embodiment, be that the workpiece 10 that has carried out pre-assembling welding is sealed welding, thereby the periphery (that is, not needing the part of guaranteeing that anchor clamps are pinned) of energy welding lid 10a, so the sealing-in amplitude of packaging part 10b can be narrower.Thereby, carry out internal volume that the related pre-assembling welding of present embodiment can guarantee packaging part 10b more greatly, can easily corresponding small-sized packaging part 10b, the mark space of guaranteeing lid 10a is more greatly.Also have,, thereby do not need to carry out the installation exercise etc. of anchor clamps without anchor clamps.As mentioned above, the pre-assembling welding related according to present embodiment can seal welding rightly by easy operation.
In addition, in the occasion of assembling welding with laser beam in advance, preferably, a little less than the laser power that must set the laser power settings of laser beam during welding than sealing.This is in order positively to assemble welding in advance, and prevents to assemble in advance the related lid 10a of welding and dissolve too much.
(using the fixing means of magnet)
Here, for magnet fixed cover 10a on the packaging part 10b and on pallet 20 method of fixation workpiece 10 describe.In the present embodiment, when sealing welding, in other words, in closed chamber 31, by lid 10a being paid the related magnetic force of magnet on packaging part 10b fixed cover 10a.This is in order to make that lid 10a can not move with respect to packaging part 10b when sealing welding.Also have, by lid 10a being paid the related magnetic force of magnet on pallet 20 fixed cover 10a and packaging part 10b.This is in order to make that lid 10a can not move because of laser beam when sealing welding.In addition, be in state after the pre-assembling welding by conveyance to the workpiece 10 of closed chamber 31 as mentioned above, but, in the present embodiment, lid 10a and the fixing of packaging part 10b when making the sealing welding are fixed with magnet more really.For example, in sealing pre-assembled portion branch fusion during welding, thereby lid 10a just moves easily with respect to packaging part 10b, and fixes with magnet, just can suppress so mobile really.
Fig. 5 is the figure of the fixing means that is used to illustrate that magnet is related.The cutaway view (with the corresponding related cutaway view of line segment of cutting line B1 one B2 among Fig. 3 (a)) of Fig. 5 (a) expression workpiece 10, pallet 20, magnetic bed 46 and stand 23.Be provided with a plurality of magnet 45 on the magnetic bed 46, be clipped between pallet 20 and the stand 23.Magnetic bed 46 is positioned on the stand 23 in advance, thereby when pallet 20 has been moved into closed chamber 31, just loading tray 20 on magnetic bed 46.A plurality of magnet 45 under pallet 20 is positioned in state on the magnetic bed 46, are arranged on the position that faces toward with lid 10a and packaging part 10b.Also have, magnet 45 has rectangular shape, and the size of magnet 45 and lid 10a and packaging part 10b's is big or small roughly the same.Have, magnet 45 is configured in and makes the center consistent location roughly of the center of workpiece 10 and magnet 45 under workpiece 10 is positioned in state on the pallet 20 again.
Fig. 5 (b) is the figure that the arrow C direction from Fig. 5 (a) is seen magnetic bed 46, is the figure of an example of expression magnetic bed 46.Shown in Fig. 5 (b), make that the horizontal direction of direction and magnetic bed 46 of the axle that the N utmost point of magnet 45 and the S utmost point form is consistent and on magnetic bed 46, disposed magnet 45.Particularly, make the N utmost point of magnet 45 and the S utmost point in abutting connection with and at transverse direction distributed magnet 45, longitudinal direction also be make the N utmost point and the S utmost point in abutting connection with and distributed magnet 45.Distributed magnet 45 like this, will be roughly even at the magnetic force that the position (being the position of mounting workpiece 10) that faces toward with magnet 45 relates to, thereby on magnetic bed 46 during loading tray 20, can suppress workpiece 10 on the pallet 20 because magnetic force and counter-rotating etc.
In the welding of general bundle, do not carry out related fixing of magnet as described above 45, mechanically pin the method that lid 10a and packaging part 10b seal welding but adopt with anchor clamps.In this occasion, need have the anchor clamps of complicated shape (promptly to the suitable shape of the shape of lid 10a and packaging part 10b), and need when welding, make up these anchor clamps.Have, except with the fixing method of anchor clamps, pushing packaging part 10b with glass plate, to go up the method for the surface of the lid 10a that carries fixing be general the employing, but, in the occasion of this method of employing, need take time and energy and remove the filth of adhering on the glass plate again.
By contrast, in the present embodiment, not to adopt anchor clamps, glass plate but adopt magnet 45, thereby do not take time and energy, and can when the sealing welding, lid 10a be fixed on the packaging part 10b, and lid 10a and packaging part 10b are fixed on the pallet 20 by easy operation.Also have, in the occasion that adopts anchor clamps to fix, inboard illuminating laser beam of the lid 10a that need not pin to anchor clamps etc., thereby be difficult to the narrow small-sized packaging part 10b of corresponding sealing-in amplitude, and according to the fixing means of the related employing magnet 45 of present embodiment, not mechanically to fix (promptly directly not contacting lid 10a and packaging part 10b), thereby can not hinder the irradiation of laser beam, so can also the narrow small-sized packaging part 10b of corresponding sealing-in amplitude.
[the 2nd embodiment]
Secondly, the laser welding device related for the 2nd embodiment describes.The laser welding device that the 2nd embodiment is related not only seals welding, also assembles welding in advance, and the related laser welding device 100 of this point and the 1st embodiment is different.That is, the related laser welding device 100 of the 1st embodiment be to be in pre-assembling welding the workpiece 10 of state carry out operation, and the related laser welding device of the 2nd embodiment is that the workpiece 10 that is in the state of assembling welding is in advance carried out operation.
Fig. 6 is the figure that the summary of the related laser welding device 101 of expression the 2nd embodiment constitutes.Laser welding device 101 mainly has annealing chamber 50, dried pump 51, cryogenic pump 52, pre-assembly chamber 57 and pre-assembling mechanism 55, and the formation of the laser welding device 100 that this point and the 1st embodiment are related is different.Thereby, same inscape is paid with same symbol, omit its explanation.In addition, the solid arrow among Fig. 6 is represented the moving direction of pallet 20.In addition, transfer gauge head 36 to be physically located in the top of windowpane 25 (being represented by dotted lines), but, for ease of explanation, remove and transfer gauge head 36 to represent among Fig. 6.
Annealing chamber 50 is used to remove the annealing in process (vacuum heating treatment) of gas of adhering on the packaging part 10b etc.In annealing chamber 50, a mounting pallet 20 of packaging part 10b (comprising electronic unit 10c) moved into, make pump 51 dry up and cryogenic pump 52 makes inside become vacuum state, heat by not shown electric heaters in the annealing chamber 50.Mounting the pallet 20 of a plurality of packaging part 10b after the annealing in process move into the rest stand of pre-assembly chamber 57 by conveyance buffering 53.In addition, can annealing chamber 50 not maintained vacuum state yet, but maintain in the atmosphere of inert gas etc.
Pre-assembly chamber 57 is used to carry out the pre-assembling welding of lid 10a and packaging part 10b.In pre-assembly chamber 57, move into pallet 20 from annealing chamber 50 by conveyance buffering 53.Then, the pallet of having moved into 20 is positioned on the rest stand 54.Pallet 20 after mounting annealing in process on this rest stand 54.Secondly, be positioned in pallet 20 on the rest stand 54 by travel mechanism's 56 conveyances to the pre-assembly or fitting table 58 of assembling welding in advance.
In pre-assembly or fitting table 58, be used for assembling in advance the operation of welding by pre-assembling mechanism 55.At first, carry out image by the packaging part 10b on 55 pairs of pallets 20 of pre-assembling mechanism and handle, based on processing result image on packaging part 10b mounting centering lid 10a.Then, pre-assembling mechanism 55 adopts the pre-assembling welding of above-mentioned laser beam, perhaps eam welding constant resistance welding.Particularly, adopt above-mentioned method shown in Figure 4, a plurality of workpiece 10 that are positioned on the pallet 20 are all assembled welding in advance.The pre-assembling welding that is positioned in all workpiece 10 on the pallet 20 is finished, and this pallet 20 is just moved in the preparation room 30 from pre-assembly or fitting table 58 by travel mechanism 56.Then, adopt the identical method of method of carrying out, carry out sealing welding workpiece 10 with above-mentioned laser welding device 100.
The laser welding device 101 related according to the 2nd such embodiment can be assembled welding and sealing welding effectively in advance.
In addition, in laser welding device 101, the laser welding device 100 related with above-mentioned the 1st embodiment is the same, also is to carry out the fixing of lid 10a and packaging part 10b with magnet 45 when sealing welding, and carries out the fixing of workpiece 10 and pallet 20.
Also have, more than represented after annealing in process, to assemble in advance the example of welding, but, also can after pre-assembling welding, carry out annealing in process.In this occasion, laser welding device has the formation of removing pre-assembly or fitting table 58 and pre-assembling mechanism 55, assembles welding in advance and adopts other device to carry out.
[the 3rd embodiment]
Secondly, the laser welding device related for the 3rd embodiment describes.The related laser welding device of the 3rd embodiment is not that the stands 23 in the closed chamber 31 are moved, and transfers gauge head 36 self to move but make, and the related laser welding device 100 of this point and above-mentioned the 1st embodiment is different on formation.
Fig. 7 is the figure that the summary of the related laser welding device 102 of expression the 3rd embodiment constitutes.In Fig. 7, laser beam beam emitter 35, the device of moving into to preparation room 30, the related laser welding device 100 of 30 devices of discharging etc. and the 1st embodiment is identical from the preparation room, thereby omits diagram.Laser welding device 102 mainly has the closed chamber 31a that replaces closed chamber 31, has the travel mechanism 61,62 that replaces travel mechanism 27,28, and the related laser welding device 100 of this point and the 1st embodiment is different on formation.Thereby, same inscape is paid with same symbol, omit its explanation.In addition, transfer gauge head 36 to be physically located in the top of windowpane 25 (being represented by dotted lines), but, for ease of explanation, remove and transfer gauge head 36 to represent among Fig. 7.
Travel mechanism 61 makes in the direction with arrow 94 expressions and transfers gauge head 36 to move, and travel mechanism 62 makes in the direction with arrow 95 expressions and transfers gauge head 36 to move.Particularly, but the welding end of the workpiece 10 of travel mechanism 61,62 in 36 pairs of irradiation areas of accent gauge head, but just make accent gauge head 36 move to the interior position of irradiation area that the feasible workpiece 10 that does not carry out welding enters accent gauge head 36.
Make like this and transfer gauge head 36 to move, just need pallet 20 be moved, in other words, can fixed rack 63, thereby can make closed chamber 31a than closed chamber 31 miniaturizations.In addition, by making closed chamber 31a miniaturization, the intermediate door 22 of the also comparable closed chamber 31 of the intermediate door 22a of closed chamber 31a is littler.Therefore, in order to move into pallet 20 rightly from this intermediate door 22a, laser welding device 102 have can be in preparation room 30 in travel mechanism 64 that arrow 96 directions move pallet 20.
As mentioned above, the laser welding device 102 related according to the 3rd embodiment, energy be miniaturization and simplification closed chamber 31a further, thereby can improve the vacuum of closed chamber 31a, and can shorten evacuation time.
In addition, in the related laser welding device 102 of the 3rd embodiment, also the laser welding device 100 with above-mentioned the 1st embodiment is the same, the workpiece 10 that is under the state after the pre-assembling welding is sealed welding, and when sealing welding, carry out the fixing of lid 10a and packaging part 10b, and carry out the fixing of workpiece 10 and pallet 20 with magnet 45.
Also have, also can be configured laser welding device 102 and can carry out above-mentioned pre-assembling welding and annealing in process.In this occasion, in preparation room 30, connect above-mentioned pre-assembly chamber 57 or annealing chamber 50 (with reference to Fig. 6) and constitute laser welding device and get final product.
[the 4th embodiment]
Secondly, the laser welding device related for the 4th embodiment describes.The related laser welding device of the 4th embodiment makes pallet 20 move in closed chamber, and make and transfer gauge head 36 to move, the related laser welding device 102 of laser welding device 100 that this point and above-mentioned the 1st embodiment are related and the 3rd embodiment is different on formation.
Fig. 8 is the figure that the summary of the related laser welding device 103 of expression the 4th embodiment constitutes.In Fig. 8, the formation of laser beam beam emitter 35, preparation room 30, the device of moving into to preparation room 30 and from the preparation room the related laser welding device 100 of 30 devices of discharging etc. and the 1st embodiment is identical, thereby omit diagram.Laser welding device 103 mainly has the closed chamber 31b that replaces closed chamber 31, has the travel mechanism 71,72 that replaces travel mechanism 27,28, and the related laser welding device 100 of this point and the 1st embodiment is different on formation.Thereby, same inscape is paid with same symbol, omit its explanation.In addition, transfer gauge head 36 to be physically located in the top of windowpane 25 (being represented by dotted lines), but, for ease of explanation, remove and transfer gauge head 36 to represent among Fig. 8.
Make like this and transfer gauge head 36 to move, in closed chamber 31b, only stand 73 is moved and get final product, thereby can make closed chamber 31b than closed chamber 31 miniaturizations in a direction.Particularly, the moving direction transferring gauge head 36 can make the size of closed chamber 31b littler.Also have, stand 73 is moved, make and transfer 36 of gauge heads to move, thereby compare, can simplify the device formation of accent gauge head 36 peripheries with the related laser welding device 102 of the 3rd embodiment in a direction by travel mechanism 72.
As mentioned above, the laser welding device 103 related according to the 4th embodiment can be simplified the device of transferring gauge head 36 peripheries and constitute, can miniaturization and simplification closed chamber 31b.
In addition, in the related laser welding device 103 of the 4th embodiment, also the laser welding device 100 with above-mentioned the 1st embodiment is the same, the workpiece 10 that is under the state after the pre-assembling welding is sealed welding, and when sealing welding, carry out the fixing of lid 10a and packaging part 10b, and carry out the fixing of workpiece 10 and pallet 20 with magnet 45.
Also have, also can be configured laser welding device 103 and can carry out above-mentioned pre-assembling welding and annealing in process.In this occasion, in preparation room 30, connect above-mentioned pre-assembly chamber 57 or annealing chamber 50 (with reference to Fig. 6) and constitute laser welding device and get final product.
[variation]
Represented in the above-described embodiments to move into workpiece 10 under the state after being in pre-assembling welding to closed chamber 31,31a, 31b, in closed chamber 31,31a, 31b, only seal the example of welding, and the laser welding device of variation is to assemble welding and sealing welding two sides in closed chamber in advance.That is, the related laser welding device of variation is to assemble welding and sealing welding two sides in advance in same room.In this occasion, under the state of having fixed by magnet 45, to the room conveyance pallet 20 of assembling welding and sealing welding in advance.That is, the magnetic bed 46 of loading tray 20 self is moved by travel mechanism etc.Then, after above-mentioned room conveyance pallet 20, by magnet 45 fixed cover 10a on packaging part 10b, fixed cover 10a and packaging part 10b on pallet 20 carry out pre-assembling welding and sealing welding to workpiece 10 under this state.In addition, assemble welding and sealing welding two sides' occasion as mentioned above in advance in same room, also can not use magnetic bed 46, and be to use the pallet that has set in advance magnet 45.In this occasion, on pallet mounting the time point of workpiece 10, lid 10a is fixed on the packaging part 10b by magnetic force, lid 10a and packaging part 10b are fixed on the pallet 20.
As mentioned above, the laser welding device that present embodiment relates to is the workpiece illuminating laser beam that possesses lid and packaging part is carried out welding and to seal the device of workpiece, possesses: the laser beam outgoing portion of outgoing laser beam; Acceptance from the outgoing of laser beam outgoing portion laser beam, the accent gauge head of the position of this laser beam of change irradiation; And make workpiece and transfer any one travel mechanism that moves at least in the gauge head.So just can adopt easy device to constitute, a plurality of workpiece effectively and are rightly carried out welding.
Claims (8)
1. a laser welding device seals described workpiece by the workpiece illuminating laser beam that possesses lid and packaging part is carried out welding, it is characterized in that possessing:
The laser beam outgoing portion of the described laser beam of outgoing;
Acceptance from the outgoing of described laser beam outgoing portion laser beam, the irradiating position changing section of the position of this laser beam of change irradiation; And
Make any one mobile member that moves at least in described workpiece and the described irradiating position changing section,
To being in the workpiece of the state that described lid and described packaging part assembled in advance, be used to seal the welding of described workpiece.
2. laser welding device according to claim 1 is characterized in that,
Also possess when the described workpiece of welding, the closed chamber that this workpiece is moved into,
Described laser beam outgoing portion and described irradiating position changing section are arranged on the outside of described closed chamber.
3. laser welding device according to claim 2 is characterized in that,
Described closed chamber is provided with the penetrating window that described laser beam sees through,
Described irradiating position changing section changes the position of illuminated described laser beam, make laser beam from described penetrating window to described closed chamber incident.
4. laser welding device according to claim 1 is characterized in that, also possesses before the welding that is used for described sealing, is used for the pre-assembling mechanism that described lid and described packaging part are carried out described pre-assembled welding.
5. laser welding device according to claim 1 is characterized in that, by described lid being paid the related magnetic force of magnet, fixes described lid on described packaging part, and fixes described lid and described packaging part on the pallet of the described workpiece of mounting.
6. laser welding device according to claim 2 is characterized in that, mounting the pallet of a plurality of workpiece moved into described closed chamber.
7. laser welding device according to claim 1 is characterized in that, described irradiating position changing section also possesses:
Described workpiece is carried out the image measurement member of image measurement; And
Come revisal to shine the position correcting member of the position of described laser beam based on the image measurement result.
8. laser welding method is carried out by the device of the irradiating position changing section of the position of laser beam outgoing portion that possesses outgoing laser beam and the described laser beam of change irradiation, carries out welding and seals described workpiece, it is characterized in that possessing:
Make described laser beam emitting laser bundle outgoing operation;
Make the irradiating position changing operation of the position change of the described laser beam of irradiation; And
Make any one mobile process that moves at least in described workpiece and the described irradiating position changing section,
To being in the workpiece of the state that lid and packaging part assembled in advance, be used to seal the welding of described workpiece.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005280376 | 2005-09-27 | ||
| JP2005280376A JP2007090368A (en) | 2005-09-27 | 2005-09-27 | Apparatus and method for laser welding |
| JP2005-280376 | 2005-09-27 |
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| Publication Number | Publication Date |
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| CN1939642A CN1939642A (en) | 2007-04-04 |
| CN1939642B true CN1939642B (en) | 2010-05-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006101592878A Expired - Fee Related CN1939642B (en) | 2005-09-27 | 2006-09-26 | Laser fusing device and method |
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| JP (1) | JP2007090368A (en) |
| CN (1) | CN1939642B (en) |
| TW (1) | TW200726561A (en) |
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|---|---|---|---|---|
| JP2009202200A (en) * | 2008-02-28 | 2009-09-10 | Mitsubishi Heavy Ind Ltd | Laser beam machining apparatus and laser beam machining method using the same |
| TWI417587B (en) | 2009-03-10 | 2013-12-01 | Au Optronics Corp | Light guide plate combination |
| KR100952594B1 (en) * | 2009-08-25 | 2010-04-15 | 유한프리시전(주) | Multi-laser welding apparatus |
| CN102152004B (en) * | 2010-12-13 | 2014-07-02 | 亿和精密工业（苏州）有限公司 | Laser welding conveyor line |
| JP6022784B2 (en) * | 2011-04-07 | 2016-11-09 | 日産自動車株式会社 | Separator welding apparatus and separator welding method |
| CN102825386A (en) * | 2012-08-10 | 2012-12-19 | 昆山市和博电子科技有限公司 | Shifting transmission mechanism |
| JP2014128832A (en) * | 2012-11-28 | 2014-07-10 | Toshiba Corp | Apparatus and method for laser welding |
| CN104551401A (en) * | 2015-01-05 | 2015-04-29 | 惠州市杰普特电子技术有限公司 | LED lamp spot welding machine |
| CN104551398A (en) * | 2015-01-05 | 2015-04-29 | 惠州市杰普特电子技术有限公司 | Welding machine |
| CN104551399A (en) * | 2015-01-05 | 2015-04-29 | 惠州市杰普特电子技术有限公司 | Laser welding device |
| KR20170020567A (en) * | 2015-08-12 | 2017-02-23 | 주식회사 웰탑테크노스 | An Automatic laser diode cap welder |
| JP6386501B2 (en) | 2016-08-12 | 2018-09-05 | ファナック株式会社 | Laser processing robot system and laser processing method |
| CN106271056B (en) * | 2016-09-12 | 2019-03-05 | 中山市镭通激光科技有限公司 | Microelectronic device packaging and welding machine and using method thereof |
| JP2022126471A (en) * | 2021-02-18 | 2022-08-30 | 株式会社アマダ | Laser processing system and laser processing method |
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| JPH08315790A (en) * | 1995-03-13 | 1996-11-29 | Nippondenso Co Ltd | Welding method of sealed vessel of square battery |
| JP3835026B2 (en) * | 1998-11-25 | 2006-10-18 | 松下電工株式会社 | Hydrogen gas sealing device |
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| JP2004172206A (en) * | 2002-11-18 | 2004-06-17 | Teitsu Engineering Co Ltd | Lid welding method to electronic component package |
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| CN1939642A (en) | 2007-04-04 |
| JP2007090368A (en) | 2007-04-12 |
| TW200726561A (en) | 2007-07-16 |
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