Summary of the invention
The object of the present invention is to provide a kind of method that can effectively suppress alkali metal volatilization in the niobate piezoelectric ceramic material sintering process, described niobate piezoelectric ceramic material is pressed compound general formula (Li
xK
zNa
1-x-z) (Nb
1-yTa
y) O
3, x wherein, y, z are molar weight; 0≤x<0.1,0≤y<0.5,0<z≤0.5; The preparation of employing pressureless sintering method is characterized in that the method for alkali metal volatilization adopts the double crucible pressureless sintering method in the described inhibition niobate piezoelectric ceramic material sintering process, and concrete implementing process is as follows:
(1) preparation base metal niobate based leadless piezoelectric ceramic pre-burning powder: with required Li, K, the carbonate powder of Na, and Nb, the oxide powder of Ta is by (Li
xK
zNa
1-x-z) (Nb
1-yTa
y) O
3, the stoichiometric ratio that formula is represented takes by weighing batching, x wherein, and y, z are molar weight; 0≤x<0.1,0≤y<0.5,0<z≤0.5; It is in the ball grinder of medium that confected materials joins with the dehydrated alcohol, uses planetary ball mill batch mixing 4~24 hours, gets the compound powder after the oven dry; With the roasting in air, in 750~900 ℃ of compound powder, be incubated 2~10 hours, the synthetic alkali metal niobate; After coldmoulding under 50~90MPa, isostatic cool pressing under 200MPa obtains base metal niobate presintered compact system product with the base metal niobate powder after synthetic.
(2) preparation of crucible in the base metal niobate in the double crucible: with the base metal niobate powder after the pre-burning in the step (1) or with the similar pre-burning of its composition after the base metal niobate powder, slotted base metal niobate crucible in the middle of compacting is suppressed a base metal niobate loam cake of base metal niobate crucible base substrate identical component therewith simultaneously.
(3) double-deck crucible method sintering prepares the base metal niobate leadless piezoelectric material material: the base metal niobate presintered compact system product in the step (1) after the isostatic cool pressing are put into the groove of the base metal niobate crucible of step (2) preparation, and cover loam cake, again it is imbedded in the outer crucible with the burying in the powder of ceramic similar component to be sintered; Under air atmosphere, 1000~1200 ℃ are carried out pressureless sintering, are incubated 1~3 hour, make base metal niobate lead-free piezoceramic material goods.
(4) following process and detection: with the density of Archimedes's method working sample; Goods behind the sintering are coated with roasting silver electrode, in silicone oil, polarize,, kept 10~60 minutes, cool to room temperature again, finish polarization 80~120 ℃ of polarizing voltages that apply 1~4kV/mm; Polarization is finished to place and is measured piezoelectric constant d after one day
33
The invention has the beneficial effects as follows with the existing common powder sintering technology of burying and compare that the present invention has (1) and obtains not reducing the piezoelectric property of goods in the high dense product under higher sintering temperature; (2) can obtain uniform tissue, and the abnormal grain that can effectively suppress to occur easily in the high-temperature sintering process is grown up; (3) effectively suppress alkali metal volatilization in the high-temperature sintering process, control the sintering component concentration comparatively accurately.
Embodiment
The invention provides a kind of method that can effectively suppress alkali metal volatilization in the niobate piezoelectric ceramic material sintering process.The method of alkali metal volatilization adopts the double crucible pressureless sintering method in the described inhibition niobate piezoelectric ceramic material sintering process.The concrete implementing process that effectively suppresses the alkali metal volatilization in the high-temperature sintering process is as follows:
(1) preparation base metal niobate based leadless piezoelectric ceramic pre-burning powder: press compound general formula (Li
xK
zNa
1-x-z) (Nb
1-yTa
y) O
3Stoichiometric ratio take by weighing batching, x wherein, y, z are molar weight; 0≤x<0.1,0≤y<0.5,0<z≤0.5; With required Li, K, it is in the ball grinder of medium that the carbonate powder of Na, and Nb, the oxidate powder powder stock of Ta join with the dehydrated alcohol, uses planetary ball mill batch mixing 4~24 hours, gets the compound powder after the oven dry; With the roasting in air, in 750~900 ℃ of compound powder, be incubated 2~10 hours, the synthetic alkali metal niobate; After coldmoulding under 50~90MPa, isostatic cool pressing under 200MPa obtains base metal niobate presintered compact system product with the base metal niobate powder after synthetic.
(2) preparation of crucible in the base metal niobate in the double crucible: with the base metal niobate powder after the pre-burning in the step (1) or with the similar pre-burning of its composition after the base metal niobate powder, crucible 4 in the base metal niobate of groove 5 is arranged in the middle of compacting, suppress a base metal niobate loam cake 3 (as shown in Figure 1) of base metal niobate crucible base substrate identical component therewith simultaneously.
(3) double-deck crucible method sintering prepares the base metal niobate block materials: base metal niobate presintered compact system product are put into 5 li of grooves with the base metal niobate crucible 4 of step (2) preparation, and cover loam cake 3, again it is imbedded the base metal niobate that fills with ceramic 6 similar components to be sintered and bury in the alumina outer crucible 1 of powder 7, closed the lid then for 2 (as shown in Figure 1).In atmosphere, 1000~1200 ℃ are carried out sintering, are incubated 1~3 hour, make base metal niobate lead-free piezoceramic material goods 5.In order to compare, only with the common powder sintering that buries, other all adopts above-mentioned same processing parameter also to prepare the base metal niobate goods.
(4) following process and detection: a. Archimedes's method, the density of working sample in room temperature, pure water; B. the goods behind the sintering are coated with roasting silver electrode, in silicone oil, polarize,, kept 10~60 minutes, cool to room temperature again, finish polarization 80~120 ℃ of polarizing voltages that apply 1~4kV/mm; C. polarization is finished to place and is measured piezoelectric constant d after one day
33
Lifting specific embodiment is below further specified:
Embodiment 1 (the double crucible legal system is equipped with the base metal niobate goods):
1. according to chemical formula (Li
0.04K
0.44Na
0.52) (Nb
0.85Ta
0.15) O
3Prepare burden, total mass is 20g;
2. confected materials adds dehydrated alcohol as medium, uses planetary ball mill ball milling 12 hours, and ball milling speed is 250 rev/mins, and the powder behind the ball milling is dried down at 70 ℃ and obtained dry powder.
3. with the dry powder roasting, 800 ℃ of maturing temperatures are incubated 5 hours, carry out the synthetic of niobate.Fig. 2 represents the X-ray diffractogram of the niobate material powder after the roasting, illustrates to have finished the synthetic of niobate this moment.
4. the niobate material powder after will synthesizing is after 90MPa coldmoulding, and isostatic cool pressing under the 200MPa makes base substrate;
5. pressureless sintering in the inherent air of the double crucible of base substrate being packed into, temperature is 1110 ℃, and 10 ℃/min of temperature rise rate is incubated 2 hours, and furnace cooling can make the base metal niobate goods;
6. the density with Archimedes's method working sample is 96.9%; Goods behind the sintering are coated with roasting silver electrode, in silicone oil, polarize,, kept 30 minutes, cool to room temperature again, finish polarization 120 ℃ of polarizing voltages that apply 3kV/mm; Polarization is finished to place and is measured piezoelectric constant d after one day
33=196pc/N.
Embodiment 2 (the double crucible legal system is equipped with the base metal niobate goods):
1. according to chemical formula (Li
0.02K
0.48Na
0.5) (Nb
0.8Ta
0.2) O
3Prepare burden, total mass is 20g;
2. confected materials adds dehydrated alcohol as medium, uses planetary ball mill ball milling 12 hours, and ball milling speed is 250 rev/mins, and the powder behind the ball milling is dried down at 70 ℃ and obtained dry powder.
3. with the dry powder roasting, 850 ℃ of maturing temperatures are incubated 4 hours, carry out the synthetic of niobate.Fig. 2 represents the X-ray diffractogram of the niobate material powder after the roasting, illustrates to have finished the synthetic of niobate this moment.
4. the niobate material powder after will synthesizing is after 90MPa coldmoulding, and isostatic cool pressing under the 200MPa makes base substrate;
5. pressureless sintering in the inherent air of the double crucible of base substrate being packed into, temperature is 1120 ℃, and 10 ℃/min of temperature rise rate is incubated 2 hours, and furnace cooling can make the base metal niobate goods;
6. the density with Archimedes's method working sample is 97%; Goods behind the sintering are coated with roasting silver electrode, in silicone oil, polarize,, kept 30 minutes, cool to room temperature again, finish polarization 120 ℃ of polarizing voltages that apply 3kV/mm; Polarization is finished to place and is measured piezoelectric constant d after one day
33=190pC/N.
Embodiment 3 (the double crucible legal system is equipped with the base metal niobate goods):
1. with embodiment 1 step 1;
2. with embodiment 1 step 2;
3. with the dry powder roasting, 750 ℃ of maturing temperatures are incubated 5 hours, carry out the synthetic of niobate.
4. the niobate material powder after will synthesizing is after 90MPa coldmoulding, and isostatic cool pressing under the 200MPa makes base substrate;
5. pressureless sintering in the inherent air of the double crucible of base substrate being packed into, temperature is 1060 ℃, and 10 ℃/min of temperature rise rate is incubated 2 hours, and furnace cooling can make the base metal niobate goods;
6. the density with Archimedes's method working sample is 86.5%; Goods behind the sintering are coated with roasting silver electrode, in silicone oil, polarize,, kept 30 minutes, cool to room temperature again, finish polarization 120 ℃ of polarizing voltages that apply 3kV/mm; Polarization is finished to place and is measured piezoelectric constant d after one day
33=180pC/N.
Embodiment 4 (the double crucible legal system is equipped with the base metal niobate goods):
1. with embodiment 2 steps 1;
2. with embodiment 2 steps 2;
3. with the dry powder roasting, 900 ℃ of maturing temperatures are incubated 5 hours, carry out the synthetic of niobate.Fig. 2 represents the X-ray diffractogram of the niobate material powder after the roasting, illustrates to have finished the synthetic of niobate this moment.
4. the niobate material powder after will synthesizing is after 90MPa coldmoulding, and isostatic cool pressing under the 200MPa makes base substrate;
5. pressureless sintering in the inherent air of the double crucible of base substrate being packed into, temperature is 1160 ℃, and 10 ℃/min of temperature rise rate is incubated 2 hours, and furnace cooling can make the base metal niobate goods;
6. the density with Archimedes's method working sample is 98.1%; Goods behind the sintering are coated with roasting silver electrode, in silicone oil, polarize,, kept 30 minutes, cool to room temperature again, finish polarization 120 ℃ of polarizing voltages that apply 3kV/mm; Polarization is finished to place and is measured piezoelectric constant d after one day
33=115pC/N.
Comparing embodiment
Commonly bury the preparation process that the powder legal system is equipped with the base metal niobate goods:
1. according to chemical formula (Li
0.04K
0.44Na
0.52) (Nb
0.85Ta
0.15) O
3Prepare burden, total mass is 20g;
2. confected materials adds dehydrated alcohol as medium, uses planetary ball mill ball milling 12 hours, and ball milling speed is 250 rev/mins, and the powder behind the ball milling is dried down at 70 ℃ and obtained dry powder.
3. with the dry powder roasting, 800 ℃ of maturing temperatures are incubated 5 hours, carry out the synthetic of niobate.
4. the niobate material powder after will synthesizing is after 90MPa coldmoulding, and isostatic cool pressing under the 200MPa makes base substrate;
5. the base metal niobate that fills with ceramic similar component to be sintered of base substrate being packed into buries in the alumina crucible of powder, pressureless sintering in air, and temperature is 1110 ℃, and 10 ℃/min of temperature rise rate is incubated 2 hours, and furnace cooling can make the base metal niobate goods;
6. use the density 97.8% of Archimedes's method working sample; Goods behind the sintering are coated with roasting silver electrode, in silicone oil, polarize,, kept 30 minutes, cool to room temperature again, finish polarization 120 ℃ of polarizing voltages that apply 3kV/mm; Polarization is finished to place and is measured piezoelectric constant d after one day
33=155pC/N.
Table 1 is depicted as the method protection of mensuration double crucible and only uses extrudate density and the piezoelectric constant d that buries after powder is protected sintering
33, under the double crucible method sfgd. density of agglomerating goods with only be more or less the same but piezoelectric constant d with the density of burying the goods that powder sintering obtains
33Than only the raising of higher amplitude but being arranged with burying goods that powder sintering obtains.
Fig. 3 represents the X-ray diffractogram of the sintered article under the different sfgd.s; the main peak position of only burying the goods of powder protection as can be seen all is offset left than the peak position that has double crucible to add to bury the goods of powder protection; this has proved and has had comparatively serious alkali metal volatilization in the goods that only bury the powder protection that double crucible method protection agglomerating preparation method has then effectively suppressed alkali-metal volatilization.
Fig. 4 has compared two kinds of surface heat erosion profile that difference is buried the sample that obtains under the powder mode.(a) double crucible method sintering (b) only buries powder sintering, and the condition of thermal etching is 1050 ℃ and is incubated half an hour.As can be seen, use the homogeneous grain size of the sample that double crucible method sintering obtains, and only protecting and occurred the crystal grain phenomenon of growing up unusually in the agglomerating sample with burying powder.Common bury the powder method and also can prepare highdensity base metal niobate based leadless piezoelectric ceramic although utilize, but because the composition volatilization can not effectively be restrained, can occur too much liquid phase in the sintering process and make that part crystal grain takes place to grow up unusually, the piezoelectric property of resulting product is also low.
The density and the d of the goods of 1110 ℃ of pressureless sinterings under the different sfgd.s of table 1.
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Sfgd. |
Density (%) |
d
33 (pC/N)
|
Double crucible+bury powder |
96.9 |
196 |
Bury powder |
97.8 |
155 |