CN1926658A - High-intensity electromagnetic radiation device and method - Google Patents
High-intensity electromagnetic radiation device and method Download PDFInfo
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/90—Lamps suitable only for intermittent operation, e.g. flash lamp
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
- H01J61/523—Heating or cooling particular parts of the lamp
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
- H01J61/523—Heating or cooling particular parts of the lamp
- H01J61/526—Heating or cooling particular parts of the lamp heating or cooling of electrodes
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- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
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- Discharge Lamps And Accessories Thereof (AREA)
Abstract
An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
Description
Technical field
The present invention relates to irradiation, relate in particular to the method and apparatus that is used to produce electromagnetic radiation.
Background technology
Arc lamp has been used to multiple purpose to produce electromagnetic radiation.Usually, arc lamp comprises the photoflash lamp that is used to produce the continuous or DC arc light modulation of continuous irradiation and is used to produce irradiance flash.
Continuous or DC arc light modulation has been used for simulating the semiconductor wafer quick heat treatment from daylight and has used.Typical traditional DC arc light modulation comprises two electrodes that are installed in the quartz envelope (quartz envelope) that is filled with such as the inert gas of xenon or argon, that is, and and negative electrode and anode.There is an electrical power to supply with the continuumpiston arc that is used to keep between the electrode.In plasma arcs, plasma by particle encounter by high current flow heats to high temperature and with corresponding to the current's intensity emission electromagnetic radiation of electrode, flowing.
Photoflash lamp is being similar to the continuous arc light modulation aspect some, but in the others difference.Be not to use constant electric current to produce continuous radiation output, but capacitor group or other pulse power discharge suddenly by electrode, so that between electrode, produce the high-energy discharge of electricity pulse of plasma arc form.The same with the continuous arc light modulation, plasma is by the big current flow heats of discharge pulse and launch the luminous energy of unexpected flash of light form, and duration of this flash of light suddenly is corresponding to the duration of discharge of electricity pulse.For example, the duration of some flashes of light can be about one millisecond, although other duration also can realize.Do not resemble the continuous arc light modulation of typically working under quasistatic pressure and temperature condition, the characteristic feature of photoflash lamp is the big and unexpected variation of pressure and temperature in the flash of light process.
In history, a kind of main application of high-power flash lamp is laser pumping.As a kind of example closer the time, the high-power flash lamp is used for making annealing semiconductor wafer by the about one millisecond pulse duration of power irradiation wafer surface with about five megawatts.
The cooling of conventional flash lamp typically comprises the outer surface that only cools off big envelope, rather than inner surface.Although utilizing the simple convection cooling of surrounding air is enough for low power applications, high power applications usually needs the outside of big envelope by forced ventilation or other gas cooled, perhaps for more high-power application, by water or other liquid cools.
This traditional high-power flash lamp trends towards suffering multiple difficult point and shortcoming.Trend towards limiting the mechanical strength that factor is a quartz envelope in the life-span of this lamp, its thickness is about 1mm typically, and thickness seldom surpasses 2.5mm.In this respect, increased its mechanical strength although increase the thickness of quartz envelope, additional quartz material provides the insulation that increases between the outer surface of the cooling of big envelope and the big envelope inner surface that heated by plasma arcs.Therefore, Guan Yuehou, the external coolant just difficult more inner surface belt from big envelope is walked heat.Therefore, the inner surface of thick more big envelope is heated to high more temperature, causes thermal gradient high more in the big envelope, and this trends towards causing thermal stress to break, and finally causes the big envelope fault.Therefore, in conventional flash lamp, the thickness of big envelope and thus its mechanical strength be limited.This can limit big envelope opposing again since in the big envelope air pressure change the ability of the mechanical stress that causes significantly fast, wherein changing significantly fast of air pressure is because in the flash of light process the quick increase of arc temperature and diameter causes.
Another difficult point of conventional lights relates to the ablation (ablation) of quartz envelope, mainly is owing to the evaporation of quartz material from the big envelope inner surface of heating.This ablation trends towards making arc gas by oxygen contamination.Because most of commercial arc lamp is sealing system rather than recirculation, therefore the accumulation of this pollutant in arc gas trends towards causing the radiation output of lamp to descend in time.This variation of photoflash lamp radiation output may not expected for many application, as needing the semiconductor annealing of reproducibility strongly.The accumulation of these pollutants also trends towards making the difficult startup of lamp.
Another shortcoming of conventional flash lamp is that described electrode is typically made by tungsten or tungsten alloy owing to the sputter of material from electrode causes.In this respect, the unexpected emission of electronics and consequent arc can be from the materials of cathodic sputtering or emission significant quantity.With lesser extent, the unexpected electron bombard and the heat of arc can cause the partial melting of anode tip, also can cause the release of anode material.Therefore, the deposit of sputter trends towards accumulating on the inner surface of big envelope, reduces the radiation output of lamp thus, and causes its radiation mode to become more and more inhomogeneous in time.In addition, this deposit on the big envelope inner surface trends towards the heating of being glistened, and increases the localized heat stress in the big envelope thus, and this may finally cause breaking and fault of big envelope.This loss of material has also reduced the life-span of electrode.
Another shortcoming of conventional flash lamp is the reproducibility of relative mistake of the radiated emission of arc itself.Some conventional lights is kept the continuous direct-current discharge of low current between the electrode between flash of light, be called idle current or ferment electric current (simmer current).The purpose of fermenting electric current in the conventional lights mainly is abundant heated cathode, in case the beginning emitting electrons, although ferment certain preionization at least that electric current also provides gas, the life-span that this has reduced sputter and has increased lamp thus.Ferment electric current typically less than one ampere, and in conventional flash lamp, can not under the situation that does not cause electrode overheating and sputter, significantly increase usually.Therefore, the inventor observed in the conventional flash lamp from the big tendency of changes that ferments the arc current that electric current takes place to the transition of peak value flashing current in taking place in inconsistent relatively mode, thereby cause the flash of light reproducibility characteristic of difference.
Therefore, need improved photoflash lamp and method.
Summary of the invention
When solving above demand, the inventor after deliberation continuously or the modification of DC arc light modulation, wherein the inner surface of big envelope is cooled off by the vortex flow of liquid, as for example in common all U.S. Patent No.s 6,621,199,4,937,490 and 4,700,102 reach U.S. Patent number 4,027 more early, in 185 disclosed those, whole disclosures of these patents are incorporated herein by reference.Although one of inventor had before described this waterwall continuous arc light modulation and used in conjunction with the modification that the pulse power serves as photoflash lamp, think typically that usually this waterwall arc lamp is unfavorable for flash application.In this respect, the very big increase of arc temperature and diameter may have appreciable impact to the liquids and gases stream in the big envelope in the flash of light process.If the boiling of internal coolant body also produces steam, the increase meeting that then pressure is big and unexpected in the big envelope further increases, further thus increase pressure, thus may cause the big envelope fault.
This identical unexpected increase of pressure can make vortex liquid wall facing to the inner surface of big envelope and be pushed, thus with liquid along away from the rightabout at lamp center axially to extrapolation, towards electrode and through electrode.This can cause the unexpected splash of liquid to electrode, thereby expulsion of arc may be gone out, and may reduce the life-span of electrode.
In addition, with regard to this pressure increase pushed back liquid towards negative electrode with regard to, the back pressure on this direction (back-pressure) was resisted the pressure of pump, and may weaken the mechanical connection of whirlpool flow of liquid generator part.
In addition, the inventor finds, as the work of this waterwall arc lamp of photoflash lamp trend towards producing with by lamp of the same type at the different particle contamination of pollutant continuous or that DC mode work is caused.Especially, the inventor finds that little to 0.5 to 2 micron tungsten particle trends towards being discharged under flash mode by electrode, and is typically comprised by the particle contamination that lamp of the same type is caused when continuous or the DC mode work and to be not less than 5 microns particle.Existing waterwall arc lamp filtration system typically is unsuitable for removing particularly because the less particle contamination that flash mode work is caused.The inventor recognizes, the accumulation of this little particle contamination trends towards in time and changes the power output and the spectrum of lamp in the liquid coolant, reduces the reproducibility of the flash of light that is produced by lamp thus undesirably.
The inventor also recognizes the application for some ultra high power, need to adopt very approaching each other a plurality of photoflash lamps, so that allow this lamp simultaneously or glisten together the same period.But typically existing waterwall arc lamp has the nonisulated metal flow generator part that is installed in outside the big envelope radial distance.Except their conductivity, the metal flow generator part is typically also with accomplishing the electrical connection of negative electrode, so that effectively negative electrode is connected to the negative terminal of capacitor group or other pulse power.Therefore, in the flash of light process, the flow-generator parts are in the negative potential identical with negative electrode.Therefore, the conductive component of each lamp, as the reflector of for example its ground connection, must keep enough far away, to prevent the starting the arc of passing through surrounding air from the flow-generator of a lamp to ground connection reflector or other conductive component of adjacent lamps with the flow-generator of each adjacent lamps.This trends towards forcing the big minimum spacing of not expecting between adjacent lamps.
According to an aspect of the present invention, provide a kind of device that is used to produce electromagnetic radiation.This device comprises the flow-generator that is configured to generate along the flow of liquid of big envelope inner surface, and is configured to generate electric arc so that produce first and second electrodes of electromagnetic radiation in big envelope.This device also comprises the drain chamber (exhaust chamber) that extends outwardly beyond an electrode, is configured to hold a part of flow of liquid.
Have been found that this drain chamber all is favourable for photoflash lamp and the application of continuous arc light modulation.In this respect, the existence of drain chamber trends towards increasing the distance between the position that arc and flow of liquid begin to collapse.Therefore, drain chamber trends towards reducing because the turbulent flow that flow of liquid collapse causes to the influence of arc, improves the stability of arc thus.Therefore, for continuous and flash application, drain chamber all trends towards improving the stability and the reproducibility of arc lamp radiation output.
Flow of liquid along the big envelope inner surface also is favourable.For example, this flow of liquid has significantly reduced the thermal gradient between the big envelope surfaces externally and internally, has reduced the thermal stress on the big envelope thus, and this all is favourable for continuous and flash application.This allows to use the big envelope than thick in the conventional flash lamp again, allows thus to use the big envelope with higher mechanical strength, so that the abrupt pressure in the easier opposing flash of light process increases.Increase big envelope thickness and allow to adopt larger-diameter pipe again, allow big stronger arc thus, and can not surpass the stress tolerance limit of big envelope.Also suppress or prevent in the flash of light process or the ablation of big envelope inner surface in the continuous operation process along the flow of liquid of big envelope inner surface.In addition, because the material of any sputter is accumulated on the inner surface all trending towards being flushed to outside the big envelope by flow of liquid rather than resembling in the conventional flash lamp, therefore this flow of liquid has also reduced because the problem that the electrode sputter causes.Therefore, irradiance flash or the continuous irradiation output that is produced by this device trends towards more can reproducing with consistent in time than irradiance flash that is produced by conventional flash lamp or continuous arc light modulation or continuous irradiation output respectively.
Drain chamber can stretch out enough far vertically, surpasses an electrode, so that this electrode and the turbulent flow that collapse caused owing to flow of liquid in the drain chamber are isolated.
Flow-generator can be configured to generate from the radially inner gas stream of flow of liquid, and drain chamber can be extended enough far in this case, surpasses a described electrode, so that this electrode is isolated with the turbulent flow of mixing to be caused that flows owing to liquids and gases.
Electrode can be configured to generate the discharge of electricity pulse so that produce irradiance flash, in this case drain chamber preferably have enough capacity hold by since the pressure pulse that the discharge of electricity pulse causes to the liquid of a volume of extrapolation.This drain chamber is particularly advantageous for flash application, because it has increased effective internal capacity of device, and helps thus to reduce because the peak value internal pressure that flash of light causes generates with contingent any related boiling and steam.Therefore, reduced mechanical stress on big envelope and other parts.In addition, this drain chamber allows by the pressure of the increase of flash of light axially the electrode that continues to flow through of the water to extrapolation, reduces the trend of this water splash to the electrode thus.Splash possibility on the electrode by reducing liquid, drain chamber trends towards increasing electrode life and reduces arc cancellation or the possibility extinguished.
Second electrode can comprise anode, and drain chamber can axially stretch out, and surpasses this anode.
Flow-generator can electric insulation.For example, described device can comprise the electric insulation around flow-generator, and flow-generator can comprise conductor.The electric insulation of flow-generator allow device than trouble free service, and do not worry the starting the arc between flow-generator and the external conductor, and allow the nearer spacing of adjacent lamps in the multi-lamp syste.Availability as the conductor of flow-generator is favourable, because its allows mechanical strength that flow-generator has benefited from metal so that pressure liquid stream and the back pressure in the opposing flash of light process, but also allows flow-generator to serve as the electric connector that negative electrode is connected to power supply.
First electrode can comprise negative electrode, and electric insulation can be around this negative electrode and the electrical connection of arriving this negative electrode.This execution mode trends towards further strengthening the fail safe of single lamp system and reducing the minimum spacing between the adjacent lamps in the multi-lamp syste.
This device can also comprise electrical connection, wherein is electrically connected can comprise flow-generator again.Therefore, flow-generator itself can advantageously serve as the part that is electrically connected between the negative terminal of negative electrode and capacitor group or other pulse power.
Electric insulation around flow-generator can comprise big envelope.Electric insulation around flow-generator can also comprise insulating cover.In this embodiment, insulating cover can be around to the small part big envelope.
Advantageously, comprise that in big envelope and insulating cover flow-generator allows flow-generator to be arranged on the position of approaching very much assembly axis, this allows again to be positioned at the stronger screw thread of the outer waterwall arc lamp of big envelope and the mechanical connection of bolt than previous flow-generator parts.This helps the mechanical stress of flow-generator opposing flash of light again, and wherein Shan Guang mechanical stress trends towards the axis of orientation that some liquid edges are opposite with the flow-generator direction to extrapolation.
Described electric insulation can also comprise the Compressed Gas in the space between the described part of insulating cover and big envelope.
Big envelope can comprise the transparent column pipe.This pipe can have at least four millimeters thickness.In this respect, the flow of liquid on the big envelope inner surface has reduced the thermal gradient in the big envelope, and therefore allows the pipe than the employed thickness of pipe in the conventional flash lamp, and the big higher mechanical strength that increases suddenly of pressure in the opposing flash of light process is provided to big envelope thus.
Described pipe can comprise the right boring cylindrical tube, and this trends towards improving the validity of the sealing that engages with big envelope, but also trends towards improving the performance along the flow of liquid of big envelope inner surface.
Insulating cover can comprise at least a in plastics and the pottery.
First and second electrodes can comprise negative electrode and anode, and negative electrode can have the length shorter than anode.In this respect, the negative electrode of shortening trends towards having higher mechanical strength, and this is for preventing that the negative electrode vibration of continuous arc light modulation in using from being favourable, and this changes for unexpected pressure in the opposing flash of light process and stress also is favourable.
First electrode can comprise the negative electrode with outstanding length, and it is inside vertically in big envelope, outstanding towards the center of described device that length should be given prominence in the negative electrode edge, above the inferior penetralia spare that installs in the big envelope.Outstanding length can be less than the twice of negative electrode diameter.Therefore, with respect to its thickness, negative electrode can be shorter than typical conventional cathode, improves its mechanical strength thus and provide abrupt pressure in vibration in the opposing continuous operation or the flash of light process to change and the bigger ability of stress to it.
But on the contrary, outstanding length is long enough preferably, so that prevent the generation of electric arc between the flow-generator and second electrode.This length is that conductor and the execution mode that forms the part that is electrically connected between negative electrode and the pulse power are preferred for flow-generator wherein, because flow-generator is in the current potential identical with negative electrode in this embodiment.Thus, need in this embodiment to guarantee the negative electrode long enough, setting up arc between anode and the flow-generator rather than between anode and the negative electrode so that prevent.
According to a further aspect in the invention, provide a kind of system that comprises a plurality of said apparatus that are configured to irradiation one common target.For example, this multiple arrangement can be configured to the irradiation semiconductor wafer.
This multiple arrangement can be configured to be connected in parallel to each other.If like this, then each in this multiple arrangement device preferably is arranged on the direction relative with the neighboring devices in this multiple arrangement, makes that the anode of the negative electrode of described each device in this multiple arrangement and the described neighboring devices in this multiple arrangement is adjacent.Therefore, no matter be continuously or in the flash of light work, the high-intensity magnetic field that is produced by plasma arcs all trends towards cancelling each other out, particularly in the device that has even number to arrange like this.
This system can also comprise that the flow-generator of each device that is configured in multiple arrangement provides the single recycle unit of liquid.In this embodiment, by eliminating demand, provide more effective system to the independent loops equipment that is used for each device.
It is outer and from extending near the electrically-conductive reflector second electrode near first electrode that this device can also be included in big envelope.
This device can also comprise a plurality of power circuits with the electrode electrical communication.If like this, then this device preferably includes another the isolator at least at least one and a plurality of power circuit that is configured to isolate in a plurality of power circuits.
Each electrode can comprise the coolant channel that is used to hold the cooling agent stream by wherein.In addition, at least one electrode can comprise the tungsten tip with at least one centimetre of thickness.
Advantageously, kind electrode trends towards having the life-span longer than traditional electrode, especially uses for flash of light, although also be like this for continuous operation.In this respect, although in the middle of flash of light process itself, especially the duration is about one millisecond or shorter quick flash of light, the heating of electrode surface trends towards taking place quickly from the electrode heat extraction by coolant channel than cooling agent, but liquid cools trends towards reducing the trend of electrode melting, sputter or releasable material.In the flash of light process, the big thickness of comparing eletrode tip with traditional electrode provides bigger thermal capacity to eletrode tip, and this trends towards alleviating the heating effect of flash of light, and reduce thus most advanced and sophisticatedly trend towards melting, the speed of sputter or loss material.Still can be with regard to electrode with the rate loss material that reduces, thick more tip has further prolonged the life-span of electrode thus for electrode provides many more materials that can lose.Flow of liquid along the big envelope inner surface is removed the material of this fusing or loss from system, rather than allows on its inner surface that is accumulated in big envelope, has prolonged the frequency spectrum of big envelope life-span and holding device radiation output and the consistency and the reproducibility of power thus.
Electrode can be configured to generate the discharge of electricity pulse, so that produce irradiance flash, and device can also comprise the idle current circuit that is configured to generate idle current between first and second electrodes.This idle current circuit can be configured to generate idle current in time period before the discharge of electricity pulse, and this time period is longer by the time (fluid transit time) by the required fluid of big envelope than flow of liquid.For example, pass through in the execution mode of big envelope with about 30 milliseconds in flow of liquid, the idle current circuit can be configured to produce about at least 30 milliseconds idle current.
The idle current circuit can be configured to generate about at least 1 * 10
2The electric current of ampere is as idle current.In this respect, coolant channel in the electrode allows than much higher idle of conventional flash lamp or ferments electric current, and does not have the serious fusing or the sputter that will trend towards taking place when traditional electrode suffers this high idle current.The inventor has been found that high more idle current provides entry condition consistent more, good qualification for flash of light.More particularly, higher idle current is used to limit ionization passage heat, wide between the electrode, is ready to receive the discharge of electricity pulse.Effectively, higher idle current is used for being right after at the initial resistance (although the peak impedance of flash of light process itself can remain unchanged to a great extent) between the reduction electrode before the flash of light.The inventor has been found that the bigger consistency and the reproducibility of the flash of light that this advantageously causes device and is produced, but also trends towards reducing the loss of electrode material, causes longer electrode life thus.
The idle current circuit can be configured to about at least 1 * 10
2Generate about at least 4 * 10 in the millisecond
2The electric current of ampere is as idle current.
According to a further aspect in the invention, provide a kind of device that is used to produce electromagnetic radiation.This device comprises the device that is used to generate along the flow of liquid of big envelope inner surface, also comprises being used for generating electric arc so that produce the device of electromagnetic radiation at big envelope.This device also comprises the device that is used to hold a part of flow of liquid, and this device that is used to hold stretches out, and surpasses the device that is used to generate.
According to a further aspect in the invention, provide a kind of method that produces electromagnetic radiation.This method comprises the flow of liquid of generation along the big envelope inner surface, and generates electric arc so that produce electromagnetic radiation between first and second electrodes, in big envelope.This method also is included in holds a part of flow of liquid in the drain chamber that extends outwardly beyond an electrode.
Hold and to comprise a described electrode and the turbulent flow isolation that causes owing to flow of liquid collapse in the drain chamber.
This method can also comprise generation from the radially inner gas stream of flow of liquid, and hold can comprise with an electrode with since the turbulent flow that liquids and gases stream collapse causes isolate.
Generate electric arc and can comprise and generate the discharge of electricity pulse so that produce irradiance flash, and hold can comprise hold by since the pressure pulse that the discharge of electricity pulse causes to the liquid of a volume of extrapolation.
Generate flow of liquid and can comprise that the flow-generator that utilizes electric insulation generates flow of liquid.
According to a further aspect in the invention, provide a kind of a plurality of said devices of control that comprise to come the method for irradiation as a common target of for example semiconductor wafer.
Control can comprise each device that makes in the described multiple arrangement generate with described multiple arrangement in each neighboring devices in the electric arc gone up in the opposite direction of electric arc side.
This method can also comprise another isolation at least at least one and the described a plurality of power circuit in a plurality of power circuits.
This method can also comprise cooling first and second electrodes.Cooling can comprise that the corresponding coolant channel by first and second electrodes comes the circulating fluid cooling agent.
Generate electric arc and can comprise and generate the discharge of electricity pulse, so that produce irradiance flash, and this method can also be included between first and second electrodes and generates idle current.Generate idle current and can be included in generation idle current in the discharge of electricity pulse time period before, this time period is longer by the time by the required fluid of big envelope than flow of liquid.This can comprise generation about at least 1 * 10
2The electric current of ampere is as idle current.More particularly, this can be included in about at least 1 * 10
2Generate about at least 4 * 10 in the millisecond
2The electric current of ampere is as idle current.
According to a further aspect in the invention, provide a kind of device that is used to produce electromagnetic radiation.This device comprises the flow-generator that is configured to generate along the electric insulation of the flow of liquid of big envelope inner surface.This device also comprises and is configured in big envelope to generate electric arc so that produce first and second electrodes of electromagnetic radiation.
Advantageously, as discussed above, flow of liquid has reduced the thermal stress in the big envelope, allows to use thicker big envelope, suppresses or has prevented the ablation of big envelope, and reduced the problem that is caused by the electrode sputter.Therefore, no matter be to use for photoflash lamp or continuous irradiation, the irradiation output of this device all trends towards more one making peace and can reproducing in time than conventional lights.Simultaneously, the fact of flow-generator electric insulation allow device than trouble free service, and do not worry the starting the arc between flow-generator and the external conductor, and in multi-lamp syste, allow the nearer spacing of adjacent lamps.
This device preferably includes the electric insulation that surrounds flow-generator, and therefore, if desired, then flow-generator can comprise conductor, and in this case, flow-generator still obtains electric insulation by electric insulation.Advantageously, as discussed above, resist pressure liquid stream and back pressure in the flash of light process as the mechanical strength that the availability of the conductor of flow-generator makes flow-generator have benefited from metal, but also allow flow-generator to serve as the electric connector that negative electrode is connected to power supply.
In a preferred embodiment, first electrode comprises negative electrode, and the electrical connection that electric insulation centers on this negative electrode and arrives this negative electrode.This execution mode trends towards further strengthening the fail safe of single lamp system and reducing the minimum spacing between the adjacent lamps in the multi-lamp syste.
This device can also comprise electrical connection, and this electrical connection can comprise flow-generator again.Therefore, flow-generator itself can advantageously serve as being electrically connected between the negative terminal of negative electrode and capacitor group or other pulse power.
Electric insulation around flow-generator can comprise big envelope.
Electric insulation around flow-generator can also comprise insulating cover.In this embodiment, insulating cover can be around at least a portion of big envelope.
Advantageously, as discussed above, comprise that in big envelope and insulating cover flow-generator allows flow-generator to be arranged on the position of approaching very much assembly axis, this allows stronger mechanical connection again, helps the mechanical stress of flow-generator opposing flash of light thus.
Electric insulation can also comprise the gas in the space between insulating cover and the big envelope part.Gas can comprise the insulating gas as for example nitrogen.In this embodiment, device can also comprise with the outer surface of the inner surface of insulating cover and big envelope part and cooperating so that seal a pair of sealing that separates each other of the gas in the described space.Gas preferably compresses more than atmospheric pressure.
Big envelope can comprise the transparent column pipe.
Described pipe can have at least four millimeters thickness.More particularly, described pipe can have at least five millimeters thickness.As noted above, flow of liquid has reduced the thermal gradient in the big envelope, and therefore permission provides the big bigger ability of increase suddenly of pressure in the opposing flash of light process thus than the pipe with corresponding bigger mechanical strength of employed those Guan Genghou in the conventional flash lamp to big envelope.
Described pipe can comprise the right boring cylindrical tube.If like this, then right boring cylindrical tube can have low at least to 5 * 10
-2The yardstick tolerance of millimeter.As noted, the use of this right boring has improved the validity of the sealing that engages with big envelope, but also has improved along the performance of the flow of liquid of big envelope inner surface.
Described pipe can comprise quartz.For example, described pipe can comprise pure quartz, as synthetic quartz.Alternatively, described pipe can comprise and for example mixes the cerium quartz.Pure quartz or the use of mixing the cerium quartz need, because these materials trend towards not being subjected to the influence of solarization (because the UV of quartzy intermediate ion impurity absorbs the quartzy variable color that causes; Pure quartz lacks this impurity, and the cerium oxide alloy absorbs harmful UV and before it can be absorbed by other impurity in the quartz its energy is emitted as visible fluorescence again).This execution mode is used as for example semiconductor annealing for the application advantageous particularly that wherein needs constant in time, reproducible flash of light frequency spectrum.
Alternatively, described pipe can comprise sapphire.Alternatively, other suitable transparent material also can replace.
The insulating cover of device can comprise at least a in plastics and the pottery.For example, insulating cover can comprise ULTEM (
TM) plastics.
First and second electrodes can comprise negative electrode and anode, and negative electrode can have the length shorter than anode.In this respect, the negative electrode of shortening trends towards having that abrupt pressure in the opposing flash of light process changes and the higher mechanical strength of stress.
First electrode can comprise the negative electrode with outstanding length, negative electrode along should outstanding length in big envelope vertically inwardly, outstanding towards the center of device, surpass the inferior penetralia spare that installs in the big envelope.
Outstanding length can be less than the twice of negative electrode diameter.Therefore, with respect to its thickness, negative electrode can be shorter than typical conventional cathode, improves its mechanical strength thus.
But on the contrary, outstanding length is long enough preferably, so that prevent the generation of electric arc between the flow-generator and second electrode.This length is that conductor and the execution mode that forms the part that is electrically connected between negative electrode and the pulse power are preferred for flow-generator wherein, because flow-generator is in the current potential identical with negative electrode in this embodiment.Therefore, need to guarantee the negative electrode long enough in this embodiment, to prevent setting up arc between anode and the flow-generator rather than between anode and the negative electrode.
Outstanding length can be at least 35 centimetres.
Flow-generator can comprise time interior parts.The outstanding length of negative electrode that surpasses flow-generator can be less than five centimetres.
According to a further aspect in the invention, provide a kind of system that comprises a plurality of said apparatus that are configured to irradiation one common target.This common objective can comprise semiconductor wafer.
Multiple arrangement can be configured to be connected in parallel to each other.If like this, then the device of each in this multiple arrangement preferably is arranged on the direction relative with the neighboring devices in this multiple arrangement.Therefore, the anode of the negative electrode of each device in this multiple arrangement and the neighboring devices in this multiple arrangement is adjacent.Advantageously, as noted above, the high-intensity magnetic field that is produced by plasma arcs trends towards cancelling each other out, particularly when having the even number device to arrange like this.
Axis between first and second electrodes of each device in this multiple arrangement can and this multiple arrangement in first and second electrodes of neighboring devices between axis separate less than 1 * 10
-1Rice.Be easy to this very near spacing and in single multi-lamp syste, allow the lamp of larger amt placed side by side owing to the fact of flow-generator electric insulation becomes.
This system can also comprise that the flow-generator of each device that is configured in multiple arrangement provides the single recycle unit of liquid.If like this, then this single recycle unit can be configured to the discharge port reception liquids and gases of each device from multiple arrangement.This single recycle unit can comprise the separator that is configured to separating liquid and gas, and can comprise the filter of removing particle contamination from liquid.
This single recycle unit can be configured to provide to flow-generator to have less than about 1 * 10
-5The water of the conductivity that Siemens is every centimetre is as liquid.In this respect, the water with low conductivity like this trends towards serving as good insulator, is favourable for the use in the highfield that produces in big envelope therefore.
It is outer and from extending near the electrically-conductive reflector second electrode near first electrode that this device can also be included in big envelope.If like this, then this electrically-conductive reflector can ground connection.
This device can also comprise the drain chamber that extends outwardly beyond an electrode, is configured to hold a part of flow of liquid.Advantageously, as discussed above, by reducing the influence of turbulent flow to arc, to using with flash of light continuously, drain chamber all trends towards improving the stability and the reproducibility of device radiation output.
For example, drain chamber can stretch out enough far vertically, surpasses a described electrode, so that itself and the turbulent flow that is caused owing to the collapse of the flow of liquid in the drain chamber are isolated.
Flow-generator can be configured to generate from the radially inner gas stream of flow of liquid.In this embodiment, drain chamber can be extended enough far, surpasses a described electrode, so as with its with because liquids and gases stream mixes the turbulent flow isolation that is caused.
Electrode can be configured to generate betwixt the discharge of electricity pulse, so that produce irradiance flash.In this embodiment, drain chamber preferably have enough volumes hold by since the pressure pulse that causes of discharge of electricity pulse to the liquid of a volume of extrapolation.Advantageously, as discussed above, this drain chamber helps to reduce because the peak value internal pressure that flash of light causes, reduce the mechanical stress on big envelope and other parts thus, and also allow the increase by flash of light pressure and vertically to the water electrode that continues to flow through of extrapolation, reduce this water thus to the trend of splash to the electrode, this trends towards the possibility that increases electrode life and reduce the electric arc cancellation or extinguish again.
This device can also comprise a plurality of power circuits with the electrode electrical communication.For example, a plurality of power circuits can comprise and are configured between first and second electrodes to generate the discharge of electricity pulse so that produce the pulse supply circuit of irradiance flash.A plurality of power circuits can also comprise the idle current circuit that is configured to generate idle current between first and second electrodes.A plurality of power circuits can also comprise the start-up circuit that is configured to generate starting current between first and second electrodes.A plurality of power circuits can also additionally comprise and are configured between first and second electrodes to generate the holding circuit of keeping electric current.
In this embodiment, described device preferably includes another the isolator at least at least one and a plurality of power circuit that is configured to isolate in a plurality of power circuits.Isolator can comprise mechanical switch.Alternatively or additionally, isolator can comprise diode.
Each electrode can comprise the coolant channel that is used to receive the cooling agent stream by wherein.
In addition, at least one electrode can comprise the tungsten tip with at least one centimetre of thickness.
Advantageously, for the reason of being discussed in this paper front, kind electrode trends towards having the life-span longer than traditional electrode.
Electrode can be configured to generate the discharge of electricity pulse, so that produce irradiance flash.In this embodiment, device can also comprise the idle current circuit that is configured to generate idle current between first and second electrodes.This idle current circuit can be configured to generate idle current in time period before the discharge of electricity pulse, and this time period is longer by the time by the required fluid of big envelope than flow of liquid.For example, in flow of liquid 3 * 10
1By in the execution mode of big envelope, the idle current circuit arrangement becomes to generate at least 3 * 10 in the millisecond
1The idle current of millisecond.
The idle current circuit can be configured to generate about at least 1 * 10
2The electric current of ampere is as idle current.In this respect, as noted above, coolant channel in the electrode allows than much higher idle of conventional flash lamp or ferments electric current, and does not have the fusing or the sputter that will trend towards taking place when traditional electrode suffers this high idle current.For the reason of being discussed in this paper front, the higher consistency and the reproducibility of the flash of light that this high idle current advantageously causes device and produced, but also trend towards reducing the loss of electrode material, cause long electrode life thus.
The idle current circuit can be configured to about at least 1 * 10
2Generate about at least 4 * 10 in the millisecond
2The electric current of ampere is as idle current.
Alternatively, for application-specific, idle current that other is suitable and duration also can replace.
According to a further aspect in the invention, provide a kind of device that is used to produce electromagnetic radiation.This device comprises the device that is used to generate along the electric insulation of the flow of liquid of big envelope inner surface.This device also comprises and is used for generating electric arc so that produce the device of electromagnetic radiation at big envelope.
According to a further aspect in the invention, provide a kind of method that produces electromagnetic radiation.This method comprises that the flow-generator that utilizes electric insulation generates the flow of liquid along the big envelope inner surface.This method also is included in and generates electric arc between first and second electrodes so that produce electromagnetic radiation.
According to a further aspect in the invention, provide a kind of a plurality of said devices of control that comprise so that the method for irradiation one common target.This common objective can comprise for example semiconductor wafer.
Control can comprise each device that makes in the described multiple arrangement generate with described multiple arrangement in the electric arc gone up in the opposite direction of the electric arc side of neighboring devices.Advantageously, as discussed above, this configuration allows to be cancelled each other out basically by the high-intensity magnetic field that adjacent arcs generate.
This method can be included in holds a part of flow of liquid in the drain chamber that extends outwardly beyond an electrode.This can comprise isolates a described electrode and the turbulent flow that collapse caused owing to flow of liquid in the drain chamber.
This method can comprise generation from the radially inner gas stream of flow of liquid, and hold can comprise with a described electrode with since the turbulent flow that collapse caused of liquids and gases stream isolate.
Generate electric arc and can comprise and generate the discharge of electricity pulse so that produce irradiance flash, and hold can comprise hold by since the pressure pulse that the discharge of electricity pulse is caused to the liquid of a volume of extrapolation.Advantageously, as discussed above, by reducing the mechanical stress on the big envelope and reduce the possibility of liquid splash to the electrode, this trends towards increasing the life-span of big envelope and electrode.
This method can also comprise other power circuit at least one and a plurality of power circuit of isolating in a plurality of power circuits.
This method can also comprise cooling first and second electrodes.Cooling can comprise that the corresponding coolant channel by first and second electrodes comes the circulating fluid cooling agent.
Generate electric arc and can comprise and generate the discharge of electricity pulse, so that produce irradiance flash, and this method can also be included between first and second electrodes and generates idle current.This can be included in the interior idle current that generates of a time period before the discharge of electricity pulse, and this time period is longer by the time by the required fluid of big envelope than flow of liquid.For example, this can comprise generation at least 3 * 10
1The idle current of millisecond.Generation can comprise generation about at least 1 * 10
2The electric current of ampere is as idle current.For example, this can be included in about at least 1 * 10
2Generate about at least 4 * 10 in the millisecond
2The electric current of ampere is as idle current.As discussed above, compare with conventional flash lamp, this big idle current trends towards strengthening the consistency and the reproducibility of flash of light.
According to a further aspect in the invention, provide a kind of device that is used to produce irradiance flash.This device comprises the flow-generator that is configured to generate along the flow of liquid of big envelope inner surface.This device comprises also and is configured in big envelope to generate the discharge of electricity pulse so that produce first and second electrodes of irradiance flash that this pulse makes the different particle contamination of particle contamination that electrode discharges and electrode is discharged in its continuous operation process.This device also comprises the removal equipment that is configured to remove particle contamination from liquid.
Therefore, advantageously, contrast with the direct current waterwall arc lamp continuously that is not configured to remove this particle contamination, this device can prevent that this particle contamination is accumulated in the flow of liquid, thus the consistency of holding device power output and frequency spectrum.
Removal equipment can comprise the filter that is configured to filtered particles pollutant from liquid.For example, filter can be configured to filter little particle to two microns.More particularly, filter can be configured to filter little particle to a micron.Again especially, filter can be configured to filter the little particle that arrives half micron.
Alternatively or additionally, removal equipment can comprise the disposal valve (disposal valve) of fluid circulating system, this disposal valve can operate in case at the fluid required of flow of liquid at least by big envelope by liquid disposal stream in the time.For example, if flow of liquid typically needs 30 milliseconds to pass through device, then disposing valve can or open with the flash of light while same period, and can stay open in by the time (being 30 milliseconds in this example) at fluid at least, so that dispose the possible contaminated liquids that when flash of light, is present in the big envelope.
According to a further aspect in the invention, provide a kind of device that is used to produce irradiance flash.This device comprises the device that is used to generate along the flow of liquid of big envelope inner surface.This device comprises also and is used for generating the discharge of electricity pulse so that produce the device of irradiance flash at big envelope that the device that pulse is used in generation discharges the different particle contamination of particle contamination that is discharged in its continuous operation process with this device that is used for generating.This device also comprises the device that is used for removing from liquid particle contamination.
According to a further aspect in the invention, provide a kind of method that produces irradiance flash.This method comprises the flow of liquid of generation along the big envelope inner surface.This method also is included in and generates the discharge of electricity pulse between first and second electrodes, in big envelope so that produce irradiance flash, and described pulse makes electrode discharge the different particle contamination of particle contamination that is discharged with electrode in its continuous operation process.This method also comprises removes particle contamination from liquid.
Removal can comprise filtered particles pollutant from liquid.Filtration can comprise filters little particle to two microns.For example, filtration can comprise and filters little particle to a micron.More particularly, filtration can comprise the little particle that arrives half micron of filtration.
Alternatively or additionally, removal can be included in flow of liquid at least by the required fluid of big envelope by liquid disposal stream in the time.
Although under the situation of the preferred embodiment for the present invention, various features illustrates and describes in this combination, should be appreciated that if desired, and many this features can adopt independently of one another.
To the review described below of specific implementations of the present invention, others of the present invention and feature will become apparent those of ordinary skills in conjunction with the drawings.
Description of drawings
In the accompanying drawing of explanation embodiment of the present invention:
Fig. 1 is the front view of device that is used to produce electromagnetic radiation according to first embodiment of the invention;
Fig. 2 show have power-supply system, Fig. 1 device of the block representation of fluid circulating system and control computer;
Fig. 3 is the segmentation sectional view of the cathode portion of device shown in Figure 1;
Fig. 4 is the sectional view details of cathode portion shown in Figure 3;
Fig. 5 is the decomposition section of cathode portion shown in Figure 3;
Fig. 6 is the decomposition diagram of cathode portion shown in Figure 3;
Fig. 7 is the segmentation sectional view of the anode part of device shown in Figure 1;
Fig. 8 is the big envelope inboard from device shown in Figure 1, the front view of the second plate shade assembly of anode part shown in Figure 7;
Fig. 9 is the decomposition section of anode part shown in Figure 7;
Figure 10 is the decomposition diagram of anode part shown in Figure 7;
Figure 11 is the end view of anode insert of the anode of anode part shown in Figure 7;
Figure 12 is the end view of anode tip of the anode of anode part shown in Figure 7;
Figure 13 is the bottom view of the inner surface of anode tip shown in Figure 12;
Figure 14 is the perspective view of the electrically-conductive reflector of device shown in Figure 1;
Figure 15 is the circuit diagram of power supply shown in Figure 2; And
Figure 16 is the front view of system that is used to produce irradiance flash that comprises a plurality of devices that are similar to device shown in Figure 1 and single circulation of fluid equipment.
Embodiment
With reference to figure 1, the device that is used to produce electromagnetic radiation according to first embodiment of the invention totally illustrates with 100.In this embodiment, device 100 comprises the flow-generator (not shown in Fig. 1) that is configured to generate along inner surface 102 flow of liquid of big envelope 104.Device 100 comprises first and second electrodes, and it comprises negative electrode 106 and anode 108 in this embodiment respectively.Negative electrode becomes in big envelope 104 with anode arrangement to generate electric arc, so that produce electromagnetic radiation.In this embodiment, device 100 also comprises the drain chamber that totally illustrates with 110, and this drain chamber extends outwardly beyond an electrode and is configured to hold a part of flow of liquid.
More particularly, in this embodiment, drain chamber 110 extends outwardly beyond anode 108 vertically.In the present embodiment, drain chamber 110 stretches out enough far vertically, surpasses anode 108, so that anode 108 and the turbulent flow that is caused owing to flow of liquid collapse in the drain chamber 110 are isolated.
In this embodiment, electrode, or more particularly negative electrode 106 and anode 108 are configured to generate the discharge of electricity pulse, so that produce irradiance flash.Still in this embodiment, drain chamber 110 have enough volumes hold by since the pressure pulse that causes of discharge of electricity pulse to the liquid of a volume of extrapolation.Thus, advantageously, as discussed above, by reducing the mechanical stress on the big envelope and reduce the possibility of liquid splash to the electrode, drain chamber 110 trends towards increasing the life-span of big envelope 104 and electrode.
In this embodiment, device 100 comprises with 112 cathode sides that totally illustrate with 114 anode-side that totally illustrate.The reflector that comprises electrically-conductive reflector 116 in this embodiment connects together negative electrode with anode-side.In this embodiment, electrically-conductive reflector 116 electrical ground.
In the present embodiment, cathode side 112 comprises insulating cover 118, and insulating cover 118 bolts (bolt) are to electrically-conductive reflector 116 in the present embodiment.Anode-side 114 comprises the first and second anode cap assemblies 120 and 122 that are connected between reflector 116 and the drain chamber 110.
With reference to figure 2, the device 100 be shown with the 130 power-supply system electrical communication that totally illustrate and be communicated with the 140 fluid circulating system fluids that totally illustrate.
In this embodiment, device 100 is included among Fig. 2 with the flow-generator shown in 150.In this embodiment, flow-generator is an electric insulation.
In the present embodiment, flow-generator 150 is included in the cathode side 112 of device 100.The flow-generator 150 of present embodiment comprises the electric connector 152 that is used for flow-generator 150 is connected to power-supply system 130.Flow-generator 150 also comprises liquid inlet port 154 and the gas ingress port 156 that is respectively applied for from fluid circulating system 140 reception liquids and gases.Flow-generator 150 also comprises the liquid outlet port one 58 that is used for the negative electrode coolant liquid is turned back to fluid circulating system.
In this embodiment, fluid circulating system 140 comprises with described in the United States Patent (USP) mentioned above those and similarly separating and cleaning system 142.As at this with described in the above-mentioned United States Patent (USP), generally speaking, separate with cleaning system 142 receiving liquid and gas, separating liquid and gas, cooling liquid and gas, filtration also decontaminating liquid and gas and liquids and gases recirculation got back to flow-generator 150, so that the form that flows with the whirlpool liquids and gases is by installing 100 and recirculation is returned from installing 100 drain chamber 110.In addition, in the present embodiment, separate with cleaning system receiving liquid coolant from negative electrode 106 and by drain chamber 110 from anode 108 by liquid outlet port one 58.The liquid coolant that is received is cooled off similarly and is purified, and turns back to flow-generator 150 and second plate shade assembly 122 then, so that recirculation is by the internal cooling channel (not shown in Figure 2) of negative electrode and anode.
In this embodiment, the discharge of electricity pulse that being used for of generating in big envelope 104, between first and second electrodes produces irradiance flash makes the different particle contamination of particle contamination that electrode discharges and electrode is discharged in its continuous operation process.More particularly, the inventor finds to contrast with continuous DC operation, this discharge of electricity pulse makes negative electrode 106 and anode 108 discharge the particle contamination of the particle that comprises the little 0.5-2.0 μ m of arriving, and the particle contamination that is discharged by negative electrode and anode in continuous DC operation does not typically comprise the particle less than 5 μ m.
Therefore, in the present embodiment, device 100 comprises that at least one is configured to from the liquid that is received from drain chamber 110 to remove the removal equipment of this different particle contamination.More particularly, in this embodiment, the fluid circulating system 140 of device 100 comprises two this removal equipment, that is, and and filter 144 in separation and the cleaning system 142 and disposal valve 160.
Dispose valve 160 and comprise inlet port one 62, it receives liquids and gases by this ingress port 162 from installing 100 drain chamber 110.Dispose valve and also comprise recirculation outlet port 164, it is transferred to the liquids and gases that receive by this recirculation outlet port 164 separates and cleaning system 142.Dispose valve 160 and also comprise disposal outlet port 166, when needs, it disposes the liquids and gases that receive by this disposal outlet port 166.Default ground, recirculation outlet port 164 is opened, and closes and dispose outlet port 166.But, in this embodiment, dispose valve and can operate at the fluid required of flow of liquid at least and dispose the flow of liquid that receives from drain chamber 110 in by the time by big envelope 104.More particularly, in this embodiment, the time of passing through of the whirlpool flow of liquid by big envelope 104 is about 30 milliseconds.Therefore, after each discharge of electricity pulse, all controlled being made as of disposal valve 160 closed recirculation outlet port 164 and opened 166 at least 30 milliseconds of disposal outlet ports.More particularly, in this embodiment, dispose controlled being made as of valve and each discharge of electricity pulse after, keep recirculation outlet port 164 and close and dispose outlet port 166 and open 100ms at least, so that all liq that is present in the big envelope 104 when allowing time enough by the discharge of electricity pulse obtains disposal.
In this embodiment, the excitation of disposing valve 160 is by master controller 170 controls, master controller 170 also with power-supply system 130, separate with cleaning system 142 and with the various transducer (not shown) that install 100 and communicate by letter.In this embodiment, master controller 170 comprises the control computer, and this control computer comprises processor circuit 172, and processor circuit 172 comprises microprocessor in this embodiment.Processor circuit 172 is carried out described herein functionally by being stored in various elements that executable code on the computer-readable medium 174 is configured to control present embodiment, and computer-readable medium 174 comprises hard disk drive in this embodiment.Alternatively, other approach that other suitable system controller, other computer-readable medium or generation are included in the signal in communication media or the carrier wave also can replace, and wherein the signal indicating controller is carried out described herein functional.
In this embodiment, filter 144 is configured to filtered particles pollutant from liquid.Therefore, in the present embodiment, filter deployment becomes to filter little particle to two microns from liquid.More particularly, in this embodiment, filter deployment becomes to be filtered to when young one micron particle from liquid.Again especially, in this embodiment, filter deployment becomes from liquid filtering to when young to half micron particle.
In the present embodiment, the separation of fluid circulating system 140 and cleaning system 142 comprise the main liquid outlet port one 80 that is used for liquid is sent to the liquid inlet port 154 of flow-generator 150, so that provide along the required liquid of the whirlpool flow of liquid of the inner surface 102 of big envelope 104 and be used for the cooling agent of negative electrode 106.Separate with cleaning system 142 also comprise be used for gas be sent to flow-generator 150 gas access port one 56 gas vent port 182 and be used for the anode coolant liquid being sent to the second liquid outlet port one 84 of anode 108 by second plate shade assembly 122.System 142 comprises that also the liquid outlet port one 58 that is used for by flow-generator 150 receives the coolant entrance port one 86 of liquid coolants and is used for by disposing valve 160 receives liquids and gases from drain chamber 110 main-inlet port one 88 from negative electrode 106.System 142 also comprises the additional supply that is used to receive liquids and gases so that replace after each flash of light by additional input port 190 of liquid and the gas make-up input port 192 of disposing the amount that valve 160 disposes.
In this embodiment, liquid replenishes input port 190 and is communicated with the supply of purifying waste water, and purifies waste water and not only serves as the liquid that is used for the whirlpool flow of liquid but also serve as the electrode cooling agent.More particularly, in this embodiment, purifying waste water has conductivity less than every centimetre of about ten little Siemens.Again especially, in this embodiment, purify electrical conductivity of water between every centimetre of about five to about ten little Siemens.The water of this low conductivity serves as good electric insulation, is favourable for the use in the present embodiment therefore, and wherein water will suffer the highfield in the big envelope 104.Alternatively, if desired, then for application-specific, other suitable liquid also can replace.
In this embodiment, gas make-up input port 192 is connected with the supply that is the inert gas of argon in this embodiment.In the present embodiment since with compare relative low cost such as other inert gas of xenon or krypton, so argon is preferred.But alternatively, if desired, then other suitable gas or admixture of gas also can replace.
In this embodiment, power-supply system 130 comprises negative terminal 132 of getting in touch with negative electrode 106 and the plus end 134 of getting in touch with anode 108.More particularly, in this embodiment, negative terminal 132 is connected to the electric connector 152 of flow-generator 150, in this embodiment flow-generator 150 comprise conductor and with negative electrode 106 electrical communication.Similarly, in this embodiment, plus end 134 is connected to second plate shade assembly 122, second plate shade assembly 122 also comprise conductor and with anode 108 electrical communication.In this embodiment, plus end 134 electrical ground, and any required voltage all generates by the current potential that the plus end 134 with respect to ground connection reduces negative terminals 132.Therefore, in the present embodiment, the conductive component of the outer exposed of device 100 as second plate shade assembly 122 and reflector 116, maintains identical (ground connection) current potential.
Cathode side
With reference to figure 1-3, in Fig. 3, more specifically show the cathode side 112 of device 100.In this embodiment, cathode side 112 comprises flow-generator 150, in this embodiment flow-generator 150 electric insulations and be configured to generate flow of liquid along big envelope 104 inner surfaces 102.
In this embodiment, the flow-generator 150 of electric insulation comprises conductor.More particularly, in this embodiment, flow-generator 150 is made up of brass.In this respect, brass have opposing because the suitable mechanical intensity of the mechanical stress that causes of flash of light and serve as negative electrode 106 and power supply 130 between the electrically conductive, electrically path, the negative terminal 132 of power supply 130 is connected to flow-generator 150 (electric connector 152 and liquid outlet port one 58 shown in Figure 2 are not shown in Fig. 3, because they are not in the plane of sectional view shown in Figure 3) at its electric connector 152.Therefore, in this embodiment, except generating the eddy-currents of liquids and gases as more specifically described as the following, the electrical connection that flow-generator 150 and electric connector 152 thereof also serve as negative electrode 106.Alternatively, except brass, flow-generator 150 can comprise one or more other suitable conductor.
Perhaps, as alternative dispensing means, center on except being insulated material resembling in the present embodiment, flow-generator 150 can rely on by electrical insulating material to be formed or comprises that electrical insulating material comes electric insulation, in this case, if desired, then can provide by additional wiring to the electrical connection of negative electrode.
Flow-generator 150 is in this execution mode of conductor therein, and cathode side 112 comprises the electric insulation around flow-generator 150.More particularly, in this embodiment, the electric insulation that centers on flow-generator 150 comprises big envelope 104, also comprises insulating cover 118.As shown in Figure 3, in this embodiment, insulating cover 118 is around to small part big envelope 104, or more particularly, the end 300 of big envelope 104.
In the present embodiment, insulating cover 118 comprises at least a in plastics and the pottery.More particularly, in this embodiment, insulating cover 118 by ULTEM (
TM) the plastics composition.Alternatively, other suitable insulation material as for example other plastics or pottery, also can replace.
In this embodiment, big envelope 104 comprises the transparent column pipe.In this embodiment, described pipe has at least four millimeters thickness.More particularly, in this embodiment, described pipe has at least five millimeters thickness.Again especially, in this embodiment, described pipe has at least five millimeters thickness and has 45 millimeters interior diameter and 55 millimeters overall diameter.As discussing, because the thermal gradient that produces between the outer surface of the inner surface of the heated by plasma of pipe and cooling in conventional flash lamp is to be understood that it is inappropriate that the pipe thicker than 3mm it has been generally acknowledged that flash application in this paper front.Whirlpool flow of liquid along the inner surface 102 of big envelope 104 has reduced this thermal gradient, allows the thicker effective big envelope 104 of doing thus.Therefore, in the present embodiment, because its bigger thickness, so big envelope 104 has than mechanical strength higher in the conventional flash lamp the related mechanical stress of rapid pressure variation that therefore can resist better and cause owing to glistening.
In this embodiment, big envelope 104 comprises smart thorax cylindrical tube.More particularly, in this embodiment, smart thorax cylindrical tube has the yardstick tolerance of hanging down at least to 0.05 millimeter.In this respect, this smart thorax trends towards providing more reliable sealing to resist big envelope Intermediate High Pressure in the flash of light process.In addition, the smoothness that the big envelope inner surface strengthens trends towards improving the performance along the mobile whirlpool flow of liquid of big envelope inner surface, also trends towards reducing electrode corrosion.
In the present embodiment, big envelope 104, or more particularly smart thorax cylindrical tube comprise quartz ampoule.Again especially, in this embodiment, quartz ampoule is to mix the cerium quartz ampoule, is mixed with cerium oxide to avoid solarization described above/variable color difficult point.Therefore, in the present embodiment,, improved the consistency and the reproducibility of the output spectrum of the flash of light that produces by device 100 by avoiding this solarization/variable color.Alternatively, big envelope 104 can comprise pure quartz, and as for example synthetic quartz, this also trends towards being avoided solarization/variable color shortcoming.But alternatively, if inessential for the consistency and the reproducibility of application-specific frequency spectrum, then big envelope 104 can comprise the material that suffers solarization, as for example common transparent vitreosil.More generally, if desired, then depend on required machinery of application-specific and hot robustness, also can replace as for example sapphire other transparent material.
In the present embodiment, electric insulation, or more particularly big envelope 104 and insulating cover 118 are around negative electrode 106 with to the electrical connection of negative electrode 106.As noted above, in this embodiment, electrical connection to negative electrode 106 comprises flow-generator 150 and electric connector 152 (not shown in the plane of Fig. 3 sectional view), is electrically connected negative terminal 132 electrical communication of negative electrode 106 and power-supply system 130 shown in Figure 2 by this.
In this embodiment, also comprise gas in the space between insulating cover 118 and the big envelope end 300 around the electric insulation of flow-generator 150.More particularly, in this embodiment, device 100 comprises a pair of sealing that separates each other 302 and 304, and they cooperate with the inner surface 306 of insulating cover 118 and the outer surface 308 of big envelope 104 ends 300, so that seal the gas in the described space.In this embodiment, gas compresses.More particularly, in this embodiment, gas is the nitrogen of compression.For N with compression
2To surface 306 and 308 and seal space pressurization between 302 and 304, insulating cover 118 comprises inlet valve 310 and outlet valve 312.In this embodiment, the nitrogen pressure between the sealing 302 and 304 maintains the pressure higher than the typical pressure in the big envelope 104.More particularly, in the present embodiment, the pressure in the big envelope typically is in about 2 atmospheric magnitudes, and the nitrogen pressure between the sealing maintains three times of about this pressure, or in other words, about 6 atmospheric magnitudes.Have been found that the desirable entry condition collection that keeps this pressurization insulation in the space between the dry sealing 302 and 304 of space cleaning to help to provide arc.
Although alternatively, other suitable sealing also can replace, and in this embodiment, sealing 302 and 304 comprises the O ring.
With reference to figure 2,3,4 and 5, except the flow of liquid on the inner surface 102 that generates big envelope 104, in this embodiment, flow-generator 150 also is configured to generate from the radially inner gas stream of flow of liquid.Therefore, in the present embodiment, drain chamber 110 is extended enough far, surpasses anode 108, so as with anode 108 with since in the drain chamber 110 liquids and gases stream mix the turbulent flow isolation that causes.
With reference to figure 3,4 and 5, in order to generate liquids and gases stream, in the present embodiment, flow-generator 150 comprises the flow-generator core 320 that is threaded onto gas eddy generator 322 and liquid eddy generator 324.In this embodiment, gas and liquid eddy generator have screw thread in the direction opposite with whirlpool liquids and gases flow path direction, make that the reaction pressure that flows from liquids and gases is to trend towards making the direction of rotation that change is tight rather than fluff that is threaded.Alternatively, other suitable method that gas and liquid eddy generator is connected to described core also can replace.
In the present embodiment, lock ring 321 prevents that the flow-generator core 320 in the insulating cover 118 from fluffing.The sealing 326 that comprises the O ring in this embodiment provides tight seal between the inner surface 102 of flow-generator core 320 and big envelope 104.
In addition, in this embodiment, packing ring 329 is inserted between the outward flange and insulating cover 118 of big envelope 104.Although alternatively, other suitable material also can replace, and in the present embodiment, packing ring 329 comprises teflon.
Another sealing 330 provides tight seal between flow-generator core 320 and liquid eddy generator 324.
Referring to figs. 2 to 5, in this embodiment,, receive by its liquid inlet port 154 at flow-generator 150 from the fluid under pressure of fluid circulating system 140 for the whirlpool flow of liquid on the inner surface 102 that generates big envelope 104.The liquid admission passage 340 of fluid under pressure by in flow-generator core 320, limiting.Some liquid are compelled to by a plurality of holes, as in 342 and 344 shown those holes, these holes extend in the manifold space (manifold space) 346 that is limited between flow-generator core 320 and the liquid eddy generator 324 by the body of flow-generator core 320.From manifold space 346, liquid is compelled to by a plurality of holes, as in 348 and 350 shown those holes, these holes extend through the body (hole 350 is not in the plane of Fig. 3-5 sectional view, but its part can be seen by the manifold space 346 of Fig. 4) of liquid eddy generator 324.It all is angled that hole 348 and 350 reaches by each hole in other similar hole of liquid eddy generator 324 bodies, therefore when liquid is compelled to by the hole, it not only obtains the velocity component with respect to the radial and axial direction of big envelope, but also the tangent velocity component of circumference of acquisition and big envelope inner surface 102.Therefore, when fluid under pressure left hole 348,350 and other similar hole, its formed whirlpool liquid wall, when it in the axial direction towards anode 108 inner surface 102 around big envelope 104 during by big envelope.
In this embodiment, each electrode all comprises the coolant channel that is used to hold the cooling agent stream by wherein.More particularly, in the present embodiment, enter liquid except leaving liquid admission passage 340 by hole 342 and 344 as mentioned above so that form the part of whirlpool flow of liquid, the remainder of the liquid of the liquid admission passage 340 of flowing through is pushed into negative electrode coolant channel 360 and serves as the cooling agent that cools off negative electrode 106.
In this embodiment, negative electrode 106 comprises it being the hollow cathode pipeline 362 of brass in this embodiment.The open outer end of cathode pipe 362 is screwed in the hole that limits by flow-generator core 320, has a sealing 363 to provide tight seal between cathode pipe and flow-generator core.Also be the inner that the negative electrode plug-in unit 364 of brass is threaded onto cathode pipe 362 in the present embodiment.Negative electrode 106 also comprises the cathode 376 around cathode pipe 362.The cathode 376 that is brass in this embodiment is screwed in the wider portion in the hole that limits by flow-generator core 320, has a sealing 377 to provide tight seal between cathode and flow-generator core.In this embodiment, negative electrode 106 also comprises the cathode taps 370 that is threaded onto cathode 376 and centers on negative electrode plug-in unit 364.Cathode point 372 is installed to cathode taps 370.In this embodiment, cathode taps 370 and cathode point 372 all are conductors.More particularly, in this embodiment, cathode taps 370 comprises copper, and cathode point 372 comprises tungsten.Therefore, with reference to figure 2-4, with understand negative terminal 132 from power-supply system 130, by electric connector 152 and flow-generator core 320, by cathode 376 and cathode taps 370, formed electric pathway to cathode point 372, allow electronics to flow to cathode point 372 thus, so that between negative electrode 106 and anode 108, set up arc from negative terminal 132.
If desired, the connection of other adequate types also can replace various being threaded.For example, if desired, then cathode taps 370 can be soldered or welded to cathode 376.
In this embodiment, negative electrode coolant channel 360 is defined in the cathode pipe 362 of hollow.Coolant liquid continues to enter the negative electrode plug-in unit 364 of hollow by coolant channel 360.The coolant liquid process limits by the hole 366 of negative electrode plug-in unit 364 and enter the space 368 that limits between negative electrode plug-in unit 364 and cathode taps 370, and cathode point 372 is installed to cathode taps 370.Therefore, when coolant liquid during through space 368, it is from cathode taps 370 and remove heats from cathode point 372 indirectly thus.As what specifically discuss below in conjunction with the first watch of similar anode 108, in this embodiment, the inner surface (not shown) of cathode taps 370 has a plurality of parallel groove (not shown), is used for along required direction guiding liquids cooling agent.Coolant liquid by space 368, enters the space 374 that limits by described groove guiding then between cathode pipe 362 and cathode 376.Coolant liquid enters flow-generator core 320 cooling agent that limits and leaves passage (not shown in the plane of the sectional view of Fig. 3-5) from space 374, it leads to liquid outlet port one 58 shown in Figure 2, turns back to the separation of fluid circulating system 140 and the coolant entrance port one 86 of cleaning system 142 by these outlet port 158 coolant liquids.
In this embodiment, tungsten cathode tip 372 has at least one centimetre thickness.Therefore, advantageously, as discussing in this paper front, the liquid cools of above-mentioned negative electrode 106 trends towards providing the life-span longer than traditional electrode to negative electrode 106 with the combination at relative thick tungsten cathode tip 372.
In this embodiment, to be similar to the mode that aforesaid liquid eddy generator 324 generates the whirlpool flow of liquid, gas eddy generator 322 generates the whirlpool gas stream.In this embodiment, gas-pressurized receives from the gas vent port 182 of separation with cleaning system 142 at the gas access of flow-generator 150 port one 56.The gas admission passage 380 of gas-pressurized by in flow-generator core 320, limiting, finally by as leaving the gas admission passage in a plurality of holes shown in 382, these holes extend through the body (hole 382 not in the plane of Fig. 3-5 sectional view, but can see) of gas eddy generator 322 in Fig. 4.Gas-pressurized leaves by hole 382 and similar hole, and the inner surface 384 of bump liquid eddy generator 324.Resemble the hole 348 and 350 of liquid eddy generator 324, hole 382 and other similar hole of gas eddy generator 322 are angled, make the gas leave not only have with respect to big envelope axially and the velocity component of radial direction, and have with the tangent direction of the inner periphery of the inner surface 384 of liquid eddy generator 324 on velocity component.Therefore, when gas was released by hole 382 and other similar hole, its formed whirlpool gas stream, when it axial direction during through big envelope 104 around circumferencial direction.In this embodiment, the hole 382 of gas eddy generator 322 and the angle in other similar hole be with the hole 348 of liquid eddy generator 324 and 350 and the identical direction in similar hole on angled, therefore when their process big envelopes, liquids and gases are in identical direction rotation.
Return with reference to figure 3 and 4, in this embodiment, negative electrode 106 has outstanding length, and it is axially inside in big envelope 104, outstanding towards the center of installing 100 that length should be given prominence in its edge, above the inferior penetralia spare that installs in the big envelope.In this embodiment, this time penetralia spare is a flow-generator, perhaps more particularly, is its liquid eddy generator 324.
In the present embodiment, the outstanding length of negative electrode is less than the twice of negative electrode 106 diameters.Therefore, with respect to its diameter, negative electrode 106 is shorter than conventional cathode, and this resists and the related big abrupt pressure change of glistening for its higher rigidity and mechanical strength.Say that utterly in the present embodiment, the outstanding length of negative electrode that surpasses flow-generator is less than five centimetres.
But simultaneously, in the present embodiment, the outstanding length long enough of negative electrode 106 takes place between flow-generator 150 and anode 108 rather than between negative electrode and anode to prevent the discharge of electricity pulse.More particularly, in this embodiment, outstanding length is at least 35 centimetres.
In the present embodiment, the cathode point 372 of negative electrode 106 has at least one centimetre thickness.Therefore, advantageously, as discussing in this paper front, the liquid cools of following negative electrode 106 trends towards providing the life-span longer than traditional electrode to negative electrode 106 with the combination at relative thick tungsten cathode tip 372.
Anode-side
With reference to figure 2 and 7-10, in Fig. 7, more specifically show the anode-side 114 of device 100.Generally speaking, in this embodiment, anode-side 114 comprises anode 108, reflector 116, the first and second anode cap assemblies 120 and 122 and drain chamber 110.
In this embodiment, drain chamber 110 has inner surface 700, and this inner surface has the shape of truncated cone in this embodiment, radially inwardly is tapered when axially stretching out by anode 108.But alternatively, this inner surface can be a cylinder, perhaps can outwards rather than inwardly be tapered.Preferably, the inner surface 700 of drain chamber 110 is configured to allow flow of liquid to continue whirlpool along inner surface 700 after leaving big envelope 104, make that whirlpool liquid continues to separate with the whirlpool gas stream in drain chamber 110, (rather than mixture of gas and water) return in the big envelope 104 because this makes gas when arc is set up.
In this embodiment, drain chamber 110 is connected to accessory 702, and accessory 702 is the stainless steel accessory in the present embodiment.The sealing 703 that comprises O ring in this embodiment provides tight seal between the inner surface 700 of drain chamber 110 and accessory 702.Accessory 702 is connected to flexible pipe, by this flexible pipe, leaves the liquids and gases eddy-currents Returning fluid circulatory system 140 of drain chamber 110.
Although negative electrode 106 has the length than anode 108 weak points in this embodiment, with reference to figure 7 and 8, in the present embodiment, anode 108 is similar to negative electrode 106 to a certain extent.More particularly, in this embodiment, anode 108 comprises anode pipe 704, and its outer end is screwed in the hole that limits by second plate shade assembly 122.Sealing 706 provides tight seal between the outer end of anode pipe 704 and second plate shade assembly 122.Anode 108 also comprises anode bodies 708, and it is screwed onto in the wider portion in the hole that limits by second plate shade assembly 122, has a sealing 710 to provide tight seal between anode bodies 708 and second plate cover 122.Anode pipe 704 is threaded onto anode insert 712, and anode bodies 708 is threaded onto anode head 714, and anode tip 716 is installed to anode head 714.Anode bodies 708 and anode head 714 are around anode pipe 704 and anode insert 712.Equally, the same with negative electrode, if desired, the then connection of other adequate types as welding or welding, can replace above-mentioned being threaded.
In this embodiment, anode pipe 704, anode bodies 708 and anode insert 712 are made by brass, and anode head 714 is made of copper, and anode tip 716 is made by tungsten.Alternatively, if desired, then other suitable material can replace.In this embodiment, tungsten anode tip 716 has at least one centimetre thickness.Therefore, advantageously, as discussing in this paper front, the liquid cools of following anode 108 trends towards providing the life-span longer than traditional electrode to anode 108 with the combination of relative thick tungsten anode tip 716.
With reference to figure 2,7,8 and 11-13, for anode 108 provides liquid coolant flow, in this embodiment, the anode-side 114 of device 100 comprises the liquid inlet that is installed to second plate cover 122 720 shown in Figure 7.Liquid inlet 720 receives the liquid coolant of pressurization from the liquid outlet port one 84 of separation shown in Figure 2 and cleaning system 142.Liquid coolant is sent to the coolant conduit 722 that limits in second plate cover 122 by liquid inlet 720.Coolant conduit 722 is sent to liquid in the space 732 that limits between the inner surface of the outer surface of anode pipe 704 and anode bodies 708.The first of the fluid under pressure cooling agent of the first by space 732 shown in Fig. 3 the latter half enters the space 728 that limits between anode insert 712 and anode head 714.When liquid passed through space 728, it was from anode head 714 and remove heats from anode tip 716 thus.As shown in figure 13, in the present embodiment, the inner surface 730 of anode head 714 comprises a plurality of parallel grooves, is used for guiding liquids cooling agent on required direction.As shown in Figure 7, near the hole 726 that limits by anode insert 712, described groove will be directed to the second portion in space 732 shown in Fig. 3 the first half from the first of the liquid coolant in space 728.The second portion of fluid under pressure cooling agent from coolant conduit 722 along the space 732 second portion directly arrive hole 726 near.Then, two parts of fluid under pressure cooling agent are all by hole 726 and enter at the inner coolant channels 724 that limit of anode pipe 704.Liquid coolant continues outwards to advance by coolant channel 724, up to entering drain chamber 110.
With reference to figure 2 and 7-10, except the aforesaid liquid coolant channel is provided, in this embodiment, second plate shade assembly 122 also provides the electrical connection between anode 108 and the power-supply system 130.In this embodiment, second plate shade assembly 122 comprises conductor.More particularly, in this embodiment, second plate shade assembly 122 is made by brass.By the electric connector 900 shown in Fig. 9 and 10, second plate shade assembly 122 is connected to (ground connection in this embodiment) plus end 134 of power-supply system 130.Although alternatively, the electric connector of other adequate types also can replace, and in this embodiment, electric connector 900 comprises four extrusion pressing type lug plate connectors (compression-style lug connector).Therefore, second plate shade assembly 122 is finished electrical connection, allows electronics from anode tip 716, by anode head 714 and by anode bodies 708, flows into and flow to by second plate shade assembly 122 and electric connector 900 thereof the plus end 134 of power-supply system 130.
With reference to figure 2,9 and 10, in this embodiment, second plate shade assembly 122 comprises pressure transducer port 902, is used for holding therein pressure converter 904.Pressure converter is communicated by letter with controller 170 shown in Figure 2, and it sends the signal of indicating pressure in the big envelope 104 to controller 170.
With reference to figure 7 and 9, in this embodiment, big envelope 104 holds by the respective aperture in reflector 116 and the first anode shade assembly 120, and is contained in closely in the second plate shade assembly 122.The sealing 740 that comprises O ring in this embodiment provides tight seal between the outer surface of big envelope 104 and second plate shade assembly 122.The packing ring 742 that comprises teflon washer in this embodiment is inserted between the outer end and second plate shade assembly 122 of big envelope 104.
With reference to figure 7 and 8, figure 8 illustrates another view of second plate shade assembly 122.The core 802 of second plate shade assembly 122 is installed in the center in the hole 804 that limits by second plate shade assembly 122, and anode bodies 708 is connected to this core 802.Antelabium 806 core 802 is connected to the remainder of second plate shade assembly 122 and in hole 804 centre of support part 802, and supporting anodes 108 thus.Coolant conduit 722 extends to the hole that limits by core 802 by antelabium 806.
In the course of the work, the liquids and gases eddy-currents that is generated by the flow-generator shown in Fig. 2 and 3 is by hole 804 and enter drain chamber 110, is just partly interrupted by antelabium 806.In this respect, it is enough big that the size of antelabium 806 is preferably wanted, so that being provided, enough mechanical strengths support the great machinery stress that anode 108 opposings cause in each flash of light process, preferably as far as possible little but then, so that minimize interference to the liquid eddy-currents on the inner surface 102 of big envelope 104.
In this embodiment, first anode shade assembly 120 comprises plastics, or more particularly, be ULTEM (
TM) plastics.Alternatively, also can replace as for example other suitable material of pottery.In the present embodiment of the sub-ground connection of power positive end that has connected second plate shade assembly 122, in order to eliminate earth-return, insulator is preferred for first anode shade assembly 120, but optional.Therefore, alternatively, if desired, then first anode shade assembly can comprise conductor.
Reflector
With reference to figure 2 and 14, in Figure 14, more specifically show the reflector 116 of conduction.In this embodiment, reflector comprises conductor, or more particularly, is aluminium.Alternatively, other suitable material also can replace with configuration.As noted, in this embodiment, reflector 116 ground connection.In this embodiment, reflector outside big envelope 104 from extend near the negative electrode 106 anode 108 near.
Power supply
With reference to figure 2 and 15, power-supply system 130 more specifically illustrates in Figure 15.In this embodiment, power-supply system 130 comprises and electrode, or more particularly with negative electrode 106 and anode 108, a plurality of power circuits of electrical communication.
Again especially, in this embodiment, a plurality of power circuits comprise and are configured at the pulse supply circuit 1500 that generates the discharge of electricity pulse between first and second electrodes, are configured at the idle current circuit 1502 that generates idle current between first and second electrodes, are configured to generating the start-up circuit 1504 of starting current between first and second electrodes and be configured to generate the holding circuit 1506 of keeping electric current between first and second electrodes.
In this embodiment, power-supply system 130 comprises that at least one is configured to isolate another the isolator at least at least one and a plurality of power circuit in a plurality of power circuits.More particularly, in this embodiment, first isolator comprises mechanical switch 1510, and when disconnecting, this switch is used for the negative terminal of the negative terminal of idle current circuit 1502 and holding circuit 1506 and start-up circuit 1504 is isolated.Still in this embodiment, second isolator comprises isolating diode 1512, is configured to idle current circuit 1502 and holding circuit 1506 are isolated with pulse supply circuit 1500.In this embodiment, mechanical switch 1510 comprises ROSS type GD60-P60-800-2C-40 mechanical switch and can respond from the control signal of controller 170 shown in Figure 2 and electric excitation.In the present embodiment, isolating diode 1512 comprises 6kV
RRMDiode.Alternatively, other suitable isolator also can replace.
In the present embodiment, each all receives AC power idle current circuit 1502, start-up circuit 1504 and holding circuit 1506, or more particularly, the three phase power of 480V, 60Hz.Similarly, pulse supply circuit 1500 also comprises DC power supply 1514, and it receives similar 480V/60Hz power, and is as described below, and it becomes direct voltage with this power transfer, so that give the capacitor charging of pulse supply circuit.In this embodiment, DC power supply 1514 scalable are so that produce required DC charging voltage up to 4kV.As shown in figure 15, in this embodiment, the 480V/60Hz AC power also is used to supply with miscellaneous equipment, as shown in Figure 2 the main pump (not shown) of fluid circulating system 140.Similarly, in this embodiment, 480V/60Hz power also offers a plurality of transformers, and transformer provides 110V AC power to the clarifier (not shown) of controller shown in Figure 2 170 and fluid circulating system 140 again.If desired, 220V power also can obtain from the 480V power that enters.
In this embodiment, the 480V AC power that enters of idle current circuit 1502 rectifications and produce controlled direct current up to 600A.In this embodiment, therefore the plus end of idle current circuit 1502, generates direct voltage by the current potential that reduces negative terminal with respect to ground electrical ground.
In the present embodiment, idle current circuit 1502 is communicated by letter with controller 170 shown in Figure 2.When mechanical switch 1510 was closed, idle current circuit 1502 received the digital command of the required idle current of appointment that slave controllers 170 receive, and it makes appointment in response to this order idle current flows between the negative electrode 106 of device 100 and anode 108.In this embodiment, idle current circuit 1502 comprises can be from the branch company of Massachusetts, USA SatCon Technology Corporationof Cambridge, the SatCon type HCSR-480-1000 DC power supply circuit that Ontario, Canada SatCon Power System of Burlington obtains.Alternatively, the idle current circuit of any other adequate types can replace.
In this embodiment, 1504 of start-up circuits are used for setting up arc at first between negative electrode 106 and anode 108.In order to achieve this end, in the present embodiment, start-up circuit 1504 receives the 480V/60Hz AC power, and it is with its rectification and be used for to a plurality of internal capacitor (not shown) chargings.When the internal electric source of its rising reaches predetermined threshold for example during 30kV, start-up circuit 1504 send current impulse (for example, 10A) so that between negative electrode 106 and anode 108, set up arc.
In the present embodiment, holding circuit 1506 uses thereafter when starting and and then, so that keep the arc between negative electrode 106 and the anode 108.In this embodiment, holding circuit receives the 480V/60Hz AC power, and it is with its rectification, so that produce the constant current direct current output of 15A.The plus end 134 of the plus end of holding circuit 1506 and power-supply system 130 is got in touch, and gets in touch with anode 108 thus.The negative terminal of holding circuit 1506 can be arranged to by start-up circuit 1504 indirectly or by closed mechanical switch 1510 directly with negative electrode 106 electrical communication, the latter's direct connection allow electronics from the negative terminal of holding circuit 1506 by core inductor 1508, by isolating diode 1512, flow to negative electrode 106 by switch 1510 and the negative terminal 132 by power supply.Although alternatively, other suitable inductance also can replace, and in this embodiment, core inductor 1508 has the inductance of 50 milihenries.
In this embodiment, pulse supply circuit 1500 is used for generating the discharge of electricity pulse that produces required irradiance flash between negative electrode 106 and anode 108.In order to achieve this end, pulse supply circuit 1500 receives the 480V/60Hz AC power, so that produce direct voltage, this direct voltage is used for this power to a plurality of capacitor chargings by DC power supply 1514 rectifications.More particularly, in this embodiment, capacitor comprises first and second capacitors 1520 and 1522 that are connected in parallel.Although alternatively, other suitable capacitor also can replace, and in this embodiment, each in first and second capacitors all has the electric capacity of 7900 μ F.In this embodiment, pulse supply circuit 1500 also comprises diode 1524 and 1526, resistor 1528,1530,1532 and 1534 and dump relay (dump relay) 1536, and all dispose as shown in figure 15.In this embodiment, resistor 1528,1530,1532 and 1534 has the resistance of 60 Ω, 5 Ω, 20k Ω and 20k Ω respectively.
In this embodiment, to capacitor discharge and the pulse of generation discharge of electricity, pulse supply circuit 1500 comprises discharge switch for when needed.More particularly, in this embodiment, discharge switch comprises the silicon controlled rectifier (SCR) 1540 of getting in touch with controller 170 shown in Figure 2.As will be appreciated, SCR 1540 is applied to SCR1540 up to gate voltage by controller 170 with not conducting, in response to this, as long as SCR 1540 will begin conducting and its electric current of flowing through surpasses the intrinsic holding current of SCR, just continues conducting.Therefore, SCR 1540 does not allow the capacitor discharge of pulse supply circuit 1500, is applied to SCR 1540 up to gate voltage by controller 170, and in response, the capacitor of pulse supply circuit is allowed to discharge.In this embodiment, the inductor 1542 by having 4.6 microhenry inductance in the present embodiment.Alternatively, the discharge switch of other adequate types also can replace.
Work
With reference to figure 2 and 15, in this embodiment, controller 170, or its processor circuit 172 more particularly, be configured to communicate by letter with the associated components of power-supply system 130 by the routine that comprises executable instruction code that is stored in the computer-readable medium 174 with fluid circulating system 140, so that operative installations 100 produces irradiance flash, as more specifically described as the following.
More specifically describe in conjunction with Fig. 3-5 as above, processor circuit 172 at first points to fluid circulating system 140 and sends signal so that beginning circulating fluid and gas pass through device, thereby generates the eddy-currents of liquids and gases.In this embodiment, the whirlpool flow of liquid is sent to liquid eddy generator 324 with the pressure of about 17-20 atmospheric level.Advantageously, this high pressure trends towards reducing the possibility of big envelope exposure (envelope exposure) in the flash of light process that is produced.
Then, processor circuit 172 points to each components communicate with power-supply system 130, carry out following sequence so that make these parts: starting arc between negative electrode 106 and the anode 108, keep this arc, before flash of light, idle current be set, generating the discharge of electricity pulse then so that produce irradiance flash.
More particularly, when initial the startup, mechanical switch 1510 is in open position.Processor circuit 172 points to start-up circuit 1504, holding circuit 1506 and pulse supply circuit 1500 and sends enabling signal, so that connect in these equipment each.Therefore, the capacitor in start-up circuit 1504 and the pulse supply circuit 1500 begins charging.Holding circuit 1506 does not produce enough voltage so that set up arc between negative electrode 106 and anode 108, therefore is not required, after arc is set up.Idle current is supplied with 1502 and is not also produced electric current, and waits for from processor circuit 172 reception appropriate control signals.
In case the internal capacitor in the start-up circuit 1504 reaches the threshold voltage of arcing (foundation), be up to 30kV in this embodiment, capacitor is just sent the electric current up to 10 amperes, so that set up arc between negative electrode 106 and anode 108.In case arc is set up, holding circuit 1506 just can be kept this arc by the start-up circuit 1504 indirect electric currents of keeping that transmit 15A.The current sensor (not shown) of device 100 sends the signal that the stable arc of indication has been set up to processor circuit 172.When receiving sort signal, processor circuit 172 points to send to start-up circuit 1504 and turn-offs its oneself signal, the electrical driver that also points to mechanical switch 1510 transmits control signal, so that make the mechanical switch closure, allows holding circuit 1506 to walk around start-up circuit 1504 thus.In other words, the closure of switch 1510 makes the negative terminal of holding circuit 1506 get in touch with negative electrode 106 by core inductor 1508, isolating diode 1512 and switch 1510.Therefore, when switch 1510 closures, holding circuit 1506 continues to make the electric current of keeping of 15A to flow between negative electrode 106 and anode 108.
When needs glistened, the processor circuit 172 of controller 170 pointed at first and sends signal so that suitable idle current is provided to idle current circuit 1502, and controller sends signal so that generate the discharge of electricity pulse to pulse supply circuit 1500 then.
More particularly, in the present embodiment, idle current circuit 1502 is configured to generate idle current in time period before the discharge of electricity pulse, and this time period is longer by the time by the required fluid of big envelope 104 than flow of liquid.Therefore, in fluid by the time was about 30 milliseconds present embodiment, the idle current circuit arrangement became to generate idle current 30ms at least.
As discussing in this paper front, in the present embodiment, idle current circuit 1502 is configured to generate the idle current more much bigger than conventional flash lamp, idle current 1A or littler typically in conventional flash lamp.As discussing in this paper front, this high idle current is favourable, because they have significantly improved the consistency and the reproducibility of the irradiance flash that is produced.More particularly, in this embodiment, the idle current circuit arrangement becomes to generate about at least 100 amperes idle current.
Again especially, in this embodiment, the idle current circuit arrangement becomes to generate effectively at least approximately idle current of 400A in the duration of about at least 100ms.In order to achieve this end, in the present embodiment, processor circuit 172 points to the digital signal that sends the required electric current output of specifying 385A to idle current circuit 1502.In response to this digital signal, idle current circuit 1502 begins to apply the electric current of specified 385A, and in the time of on the 15A that is provided by holding circuit 1506 is provided, this electric current produces required 400A electric current between negative electrode 106 and anode 108.
Approximately after the 100ms, processor circuit 172 points to and applies gate voltage to SCR 1540, the capacitor that allows pulse supply circuit 1500 thus generates required discharge of electricity pulse thus and produces required irradiance flash thus by inductor 1542 and closed mechanical switch 1510 discharges between negative electrode 106 and anode 108.In this embodiment, the output of the emittance of device 100 is about 50kJ in the flash of light process.
When pulse supply circuit 1500 discharged in the above described manner, isolating diode 1512 protection holding circuits 1506 and idle current circuit 1502 can not discharge from the pulse supply circuit.Need be as the start-up circuit 1504 of high voltage installation at the protection of this discharge because at this time point, start-up circuit 1504 be turn-off and by mechanical switch 1510 protections.
Approximate and gate voltage is applied to SCR 1540 so that produce flash of light simultaneously, processor circuit also points to disposing valve 160 and transmits control signal, export port 166 so that make to dispose valve closing recirculation outlet port 164 and open to dispose, so that when flash of light, begin to dispose the liquids and gases in the big envelope 104.Processor circuit 172 also points to separating with cleaning system 142 and sends signal so that begin to replenish input port 190 and gas make-up input port 192 reception liquid make-up and gases by liquid, so that change by disposing the liquids and gases of outlet port 166 discharges.(approximately be 100ms in this embodiment after short time, this significantly is longer than by the typical fluid of big envelope 104 and passes through the time), processor circuit 172 points to disposing valve and sends signal so that reopen recirculation outlet port 164 and close and dispose outlet port 166, and points to similarly to separating with cleaning system 142 and send signals so that closing liquid and gas make-up input port 190 and 192.Therefore, all liq during flash of light in big envelope 104 obtains disposing basically, and these liquid may be polluted by tiny particulate material, keeps simultaneously from the remaining liq of system and gas so that recirculation.
Although pulse supply circuit 1500 is unwanted, in this embodiment, device 100 continuously or DC operation with to a certain extent similarly mode take place.As discussed above, arc is set up and kept to start-up circuit 1504 and holding circuit 1506 cooperatively.Then, idle current circuit 1502 can be with the main dc power supply circuit that acts on device 100 continuous operations.As discussed above, controller 170 sends the digital signal of specifying required electric current output to idle current circuit 1502.The combination current output of idle current circuit 1502 and holding circuit 1506 is provided between negative electrode 106 and the anode 108, so that generate required continuous current, produces required continuous irradiation power output thus.
Possibility
Although device 100 described herein can be as photoflash lamp or as the dual work of continuous arc light modulation, alternatively, if desired, a kind of during embodiments of the present invention can be used at these customizes or is special.
Although above-mentioned execution mode relates to the single waterwall that flows on the inner surface 102 of big envelope 104, but alternatively, the present invention can implement in biliquid wall arc lamp, as common all U.S. Patent No.s 6 of for example mentioning in the above, 621, disclosed in 199, so that biliquid wall arc lamp is modified as photoflash lamp described herein.
With reference to figure 2 and 16, comprise that the system of the multiple arrangement that is similar to device 100 totally illustrates with 1600 in Figure 16.More particularly, in this embodiment, system 1600 comprises the first, second, third and the 4th device 1602,1604,1606 and 1608, and each all is similar to device shown in Figure 2 100.Device 1602,1604,1606 and 1608 is configured to produce a plurality of corresponding irradiance flash that incide on the common target.
In this embodiment, device 1602,1604,1606 and 1608 is configured to be connected in parallel to each other.More particularly, in the present embodiment, each device in the device 1602,1604,1606 and 1608 all is arranged on the direction relative with the neighboring devices in this multiple arrangement.Therefore, in this embodiment, the negative electrode of each device in the multiple arrangement is adjacent with the anode of the neighboring devices in the multiple arrangement.Therefore, advantageously, be used to produce flash of light simultaneously if install 1602,1604,1606 and 1608, then since the big magnetic field that the discharge of electricity pulse of four lamps causes cancel out each other to a great extent.
In the present embodiment, reach the nearly spacing of the electric insulation permission neighboring devices of the electrical connection of arriving it around flow-generator, negative electrode.Therefore, in this embodiment, the axis in axis in the multiple arrangement 1602,1604,1606 and 1608 between first and second electrodes of each and the multiple arrangement between adjacent one first and second electrodes separates each other less than 10 centimetres.
In this embodiment, system 1600 also comprises single recycle unit 1620, is configured to that the flow-generator of each provides liquid in multiple arrangement.Recycle unit 1620 is similar to fluid circulating system shown in Figure 2 140 generally, and combines the disposal valve 1622 that is similar to disposal valve 160 shown in Figure 2.In this embodiment, the discharge port that single recycle unit 1620 is configured to from multiple arrangement each receives liquids and gases, also comprises the separator 1624 that is configured to separating liquid and gas.Equally, in this embodiment, single recycle unit 1620 comprises the filter 1626 that is used for removing from liquid particle contamination, and it is similar to filter shown in Figure 2 144 in this embodiment.Similarly, in this embodiment, single recycle unit 1620 comprises among Figure 16 unshowned addition entry point and outlet port, be similar to described in conjunction with Figure 2 those, comprise that disposing outlet port, gas make-up ingress port and liquid replenishes ingress port.Resemble in the execution mode in front, comprise low conductivity water purification, high-insulation by the liquid that liquid replenishes the ingress port reception by recycle unit 1620.Therefore, in this embodiment, single recycle unit 1620 is configured to provide the water with the conductivity that is lower than every centimetre of about 10 little Siemens to the flow-generator of each device.
If desired, then install 1602,1604,1606 and 1608 and can be configured to produce a plurality of corresponding irradiance flash that incide semiconductor wafer.Therefore, for example, system 1600 can replace in common all U.S. Patent No.s 6,594,446 or all jointly U.S. Patent Application Publication No.US 2002/0102098A1 in disclosed photoflash lamp so that fast the device-side of semiconductor wafer is heated to required annealing temperature.If desired, the flash of light that is then produced by lamp can be simultaneously.
Perhaps, return with reference to figure 2, if desired, then single assembly 100 is not a replacement system 1600, but can replace disclosed photoflash lamp among above-mentioned common all U.S. Patent No.s 6,594,446 or the open No.US 2002/0102098A1.
Similarly, if desired, the multiple arrangement that then is similar to device 100 can be arranged as shown in figure 16, but can utilize continuous direct current to be operated, so that continuous radiation output is provided.If desired, then this device combination perhaps is single assembly 100 alternatively, can replace above-mentioned common all U.S. Patent No.s 6,594,446 or disclose the continuous arc light modulation that is used as pre-heating device among the No.US2002/0102098A1.
More generally, although specific implementations of the present invention has obtained describing and explanation, this execution mode should be regarded just the present invention that explanation of the present invention rather than restriction are constituted according to claims as.
Claims (144)
1. device that is used to produce electromagnetic radiation, this device comprises:
A) flow-generator is configured to generate the flow of liquid along the big envelope inner surface;
B) first and second electrodes are configured to generate electric arc in big envelope, so that produce electromagnetic radiation; And
C) drain chamber extends outwardly beyond a described electrode, is configured to hold a part of described flow of liquid.
2. device as claimed in claim 1, wherein said drain chamber axially stretch out enough far, surpass a described described electrode, so that with a described described electrode and because the turbulent flow isolation that the collapse of flow of liquid causes described in the described drain chamber.
3. device as claimed in claim 1, wherein said flow-generator is configured to generate from the radially inner gas stream of described flow of liquid, and wherein said drain chamber is extended enough far, surpass a described described electrode, so that a described described electrode is isolated with the turbulent flow of mixing to cause that flows owing to described liquids and gases.
4. device as claimed in claim 1, wherein said electrode is configured to generate the discharge of electricity pulse, so that the generation irradiance flash, and wherein said drain chamber have enough volumes hold by since the pressure pulse that described discharge of electricity pulse causes to the described liquid of a volume of extrapolation.
5. device as claimed in claim 1, wherein said second electrode comprises anode, and wherein said drain chamber axially extends outwardly beyond described anode.
6. device as claimed in claim 1, wherein said flow-generator is an electric insulation.
7. device as claimed in claim 6 also comprises the electric insulation around described flow-generator.
8. device as claimed in claim 7, wherein said flow-generator comprises conductor.
9. device as claimed in claim 7, wherein said first electrode comprises negative electrode, and wherein said electric insulation reaches the electrical connection of this negative electrode around described negative electrode.
10. device as claimed in claim 9 also comprises described electrical connection, and wherein said electrical connection comprises described flow-generator.
11. device as claimed in claim 7, wherein the described electric insulation around described flow-generator comprises described big envelope.
12. device as claimed in claim 11, wherein the described electric insulation around described flow-generator also comprises insulating cover.
13. device as claimed in claim 12, wherein said insulating cover is around to the described big envelope of small part.
14. device as claimed in claim 13, wherein said electric insulation also comprise the Compressed Gas in the space between the described part of described insulating cover and described big envelope.
15. device as claimed in claim 11, wherein said big envelope comprises the transparent column pipe.
16. device as claimed in claim 15, wherein said pipe has at least four millimeters thickness.
17. device as claimed in claim 15, wherein said pipe comprise smart thorax cylindrical tube.
18. device as claimed in claim 12, wherein said insulating cover comprise at least a in plastics and the pottery.
19. device as claimed in claim 6, wherein said first and second electrodes comprise negative electrode and anode, and described negative electrode has the length shorter than described anode.
20. device as claimed in claim 6, wherein said first electrode comprises the negative electrode with outstanding length, it is axially inside, outstanding towards the center of device along giving prominence to length, surpass the inferior penetralia spare that installs in the big envelope, and wherein said outstanding length is less than the twice of the diameter of described negative electrode.
21. device as claimed in claim 20, wherein said outstanding length long enough takes place between described flow-generator and described second electrode so that prevent described electric arc.
22. a system comprises a plurality ofly as the device that claim 6 limited, and is configured to irradiation one common target.
23. the system as claimed in claim 22, wherein said multiple arrangement is configured to the radiation-emitting semi-conductor wafer.
24. the system as claimed in claim 22, wherein said multiple arrangement is configured to be connected in parallel to each other.
25. system as claimed in claim 24, each device in the wherein said multiple arrangement is arranged on the direction relative with the neighboring devices in the described multiple arrangement, makes that the anode of the negative electrode of described each device in the described multiple arrangement and the described neighboring devices in the described multiple arrangement is adjacent.
26. the system as claimed in claim 22 also comprises single recycle unit, the described flow-generator that is configured to each device in described multiple arrangement provides liquid.
27. device as claimed in claim 6 also is included in outside the described big envelope and from extending near the electrically-conductive reflector of described second electrode near described first electrode.
28. device as claimed in claim 6 also comprises a plurality of power circuits with described electrode electrical communication.
29. device as claimed in claim 28 also comprises the isolator that is configured to another isolation at least at least one and the described a plurality of power circuit in described a plurality of power circuits.
30. device as claimed in claim 6, wherein each described electrode comprises the coolant channel that is used to hold the cooling agent stream by wherein.
31. device as claimed in claim 30, wherein at least one described electrode comprises the tungsten tip with at least one centimetre of thickness.
32. device as claimed in claim 30, wherein said electrode is configured to generate the discharge of electricity pulse, so that produce irradiance flash, but also comprises the idle current circuit that is configured to generate idle current between described first and second electrodes.
33. device as claimed in claim 32 generates described idle current in the wherein said time period of idle current circuit arrangement one-tenth before described discharge of electricity pulse, the described time period is longer by the time by the required fluid of described big envelope than described flow of liquid.
34. device as claimed in claim 32, wherein said idle current circuit arrangement becomes to generate about at least 1 * 10
2The electric current of ampere is as described idle current.
35. device as claimed in claim 32, wherein said idle current circuit arrangement becomes about at least 1 * 10
2Generate about at least 4 * 10 in the millisecond
2The electric current of ampere is as described idle current.
36. a device that is used to produce electromagnetic radiation, this device comprises:
A) be used to generate device along the flow of liquid of big envelope inner surface;
B) be used for generating electric arc so that produce the device of electromagnetic radiation at big envelope; And
C) be used to hold the device of a part of described flow of liquid, the described device that is used to hold extends outwardly beyond the described device that is used to generate.
37. comprising, device as claimed in claim 36, the wherein said device that is used to hold be used for the device of a described described electrode with the turbulent flow isolation that causes owing to the collapse of flow of liquid described in the described device that is used to hold.
38. device as claimed in claim 36, also comprise the device that is used to generate from the radially inner gas stream of described flow of liquid, and the wherein said device that is used to hold comprise be used for a described described electrode with because the device that the turbulent flow that the collapse of described liquids and gases stream causes is isolated.
39. device as claimed in claim 36, the wherein said device that is used to generate electric arc comprises and is used to generate the discharge of electricity pulse so that produce the device of irradiance flash, and the wherein said device that is used to hold comprise hold by since the pressure pulse that described discharge of electricity pulse causes to the described liquid of a volume of extrapolation.
40. a method that produces electromagnetic radiation, this method comprises:
A) generate along the flow of liquid of the inner surface of big envelope;
B) between first and second electrodes, in big envelope, generate electric arc, so that produce electromagnetic radiation; And
C) hold a part of described flow of liquid in drain chamber, described drain chamber extends outwardly beyond a described electrode.
41. method as claimed in claim 40, wherein hold comprise with a described described electrode with since the turbulent flow that flow of liquid collapse causes described in the described drain chamber isolate.
42. method as claimed in claim 40 also comprises generation from the radially inner gas stream of described flow of liquid, and wherein hold comprise with a described described electrode with since the turbulent flow that the collapse of described liquids and gases stream causes isolate.
43. method as claimed in claim 40 wherein generates electric arc and comprises and generate the discharge of electricity pulse so that produce irradiance flash, and wherein hold comprise hold by since the pressure pulse that described discharge of electricity pulse causes to the described liquid of a volume of extrapolation.
44. method as claimed in claim 40 wherein generates flow of liquid and comprises that the stream reflector that utilizes electric insulation generates flow of liquid.
45. one kind comprises a plurality of methods of coming irradiation one common target as the device that claim 44 limited of control.
46. method as claimed in claim 45, wherein control comprises that the control multiple arrangement comes the irradiation semiconductor wafer.
47. method as claimed in claim 45, wherein control comprises that each device that makes in the described multiple arrangement generates the described electric arc on the direction relative with the electric arc direction of each neighboring devices in the described multiple arrangement.
48. method as claimed in claim 44 also comprises another isolation at least at least one and the described a plurality of power circuit in a plurality of power circuits.
49. method as claimed in claim 44 also comprises described first and second electrodes of cooling.
50. method as claimed in claim 49, wherein cooling comprises by the corresponding coolant channel of described first and second electrodes and comes the circulating fluid cooling agent.
51. method as claimed in claim 49 wherein generates described electric arc and comprises generation discharge of electricity pulse so that produce irradiance flash, generates idle current but also be included between described first and second electrodes.
52. method as claimed in claim 51 wherein generates described idle current and is included in the described idle current of generation in the described discharge of electricity pulse time period before, the described time period is longer by the time by the required fluid of described big envelope than described flow of liquid.
53. method as claimed in claim 51 wherein generates described idle current and comprises generation about at least 1 * 10
2The electric current of ampere is as described idle current.
54. method as claimed in claim 51 wherein generates described idle current and is included in about at least 1 * 10
2Generate about at least 4 * 10 in the millisecond
2The electric current of ampere is as described idle current.
55. a device that is used to produce electromagnetic radiation, this device comprises:
A) flow-generator of electric insulation is configured to generate the flow of liquid along the big envelope inner surface; And
B) first and second electrodes are configured to generate electric arc in big envelope, so that produce electromagnetic radiation.
56. device as claimed in claim 55 also comprises the electric insulation around described flow-generator.
57. device as claimed in claim 56, wherein said flow-generator comprises conductor.
58. device as claimed in claim 56, wherein said first electrode comprises negative electrode, and wherein said electric insulation reaches the electrical connection of this negative electrode around described negative electrode.
59. device as claimed in claim 58 also comprises described electrical connection, and wherein said electrical connection comprises described flow-generator.
60. device as claimed in claim 56, wherein the described electric insulation around described flow-generator comprises described big envelope.
61. device as claimed in claim 60, wherein the described electric insulation around described flow-generator also comprises insulating cover.
62. device as claimed in claim 61, wherein said insulating cover is around to the described big envelope of small part.
63. device as claimed in claim 62, wherein said electric insulation also comprise the gas in the space between the described part of described insulating cover and described big envelope.
64., also comprise cooperating with the outer surface of the described part of the inner surface of described insulating cover and described big envelope so that with a pair of sealing that separates each other of described air seal in the described space as the described device of claim 63.
65. as the described device of claim 64, wherein said gas compresses.
66. device as claimed in claim 60, wherein said big envelope comprises the transparent column pipe.
67. as the described device of claim 66, wherein said pipe has at least four millimeters thickness.
68. as the described device of claim 67, wherein said pipe has at least five millimeters thickness.
69. as the described device of claim 66, wherein said pipe comprises smart thorax cylindrical tube.
70. as the described device of claim 69, wherein said smart thorax cylindrical tube has low at least to 5 * 10
-2The yardstick tolerance of millimeter.
71. as the described device of claim 66, wherein said pipe comprises quartz.
72. as the described device of claim 71, wherein said pipe comprises pure quartz.
73. as the described device of claim 71, wherein said pipe comprises mixes the cerium quartz.
74. as the described device of claim 66, wherein said pipe comprises sapphire.
75. device as claimed in claim 61, wherein said insulating cover comprise at least a in plastics and the pottery.
76. device as claimed in claim 55, wherein said first and second electrodes comprise negative electrode and anode, and described negative electrode has the length shorter than described anode.
77. device as claimed in claim 55, wherein said first electrode comprises the negative electrode with outstanding length, and it is axially inside, outstanding towards the center of installing that length should be given prominence in its edge, above the inferior penetralia spare that installs in the big envelope.
78. as the described device of claim 77, wherein said outstanding length is less than the twice of described negative electrode diameter.
79. as the described device of claim 78, wherein said outstanding length long enough takes place between described flow-generator and described second electrode so that prevent described electric arc.
80. as the described device of claim 79, wherein said outstanding length is 35 centimetres at least.
81. as the described device of claim 77, wherein said flow-generator comprises described time penetralia spare, and wherein gives prominence to length less than five centimetres above the negative electrode of flow-generator.
82. as the described device of claim 77, also comprise electric insulation, the electrical connection that wherein said insulation centers on described negative electrode and arrives this negative electrode around described flow-generator.
83. a system comprises a plurality ofly as the device that claim 55 limited, and is configured to irradiation one common target.
84. as the described system of claim 83, wherein said multiple arrangement is configured to the irradiation semiconductor wafer.
85. as the described system of claim 83, wherein said multiple arrangement is configured to be connected in parallel to each other.
86. as the described system of claim 85, each device in the wherein said multiple arrangement is arranged on the direction relative with the neighboring devices in the described multiple arrangement.
87. as the described system of claim 86, the anode of the described neighboring devices in the negative electrode of described each device in the wherein said multiple arrangement and the described multiple arrangement is adjacent.
88. as the described system of claim 85, the axis between the axis between described first and second electrodes of each device in the wherein said multiple arrangement and described first and second electrodes of the neighboring devices in the described multiple arrangement separates less than 1 * 10
-1Rice.
89. as the described system of claim 83, also comprise single recycle unit, the described flow-generator that is configured to each device in described multiple arrangement provides liquid.
90. as the described system of claim 89, the discharge port that wherein said single recycle unit is configured to each device from described multiple arrangement receives liquid.
91. as the described system of claim 90, wherein said single recycle unit is configured to the described discharge port receiver gases of described each device from described multiple arrangement, and wherein said single recycle unit comprises the separator that is configured to separate described liquid and described gas.
92. as the described system of claim 90, wherein said single recycle unit comprises the filter that is used for removing from described liquid particle contamination.
93. as the described system of claim 89, wherein said single recycle unit is configured to provide to described flow-generator to have less than about 1 * 10
-5The water of the conductivity that Siemens is every centimetre is as described liquid.
94. device as claimed in claim 55 also is included in outside the described big envelope and from extending near the electrically-conductive reflector of described second electrode near described first electrode.
95. as the described device of claim 94, wherein said electrically-conductive reflector ground connection.
96. device as claimed in claim 55 also comprises the drain chamber that extends outwardly beyond described electrode, is configured to hold a part of described flow of liquid.
97. as the described device of claim 96, wherein said drain chamber axially stretches out enough far, surpasses a described described electrode, so that a described described electrode and the turbulent flow that causes owing to the collapse of flow of liquid described in the described drain chamber are isolated.
98. as the described device of claim 96, wherein said flow-generator is configured to generate from the radially inner gas stream of described flow of liquid, and wherein said drain chamber axially stretches out enough far, surpass a described described electrode, so that a described described electrode is isolated with the turbulent flow of mixing to cause owing to described liquids and gases stream.
99. as the described device of claim 96, wherein said electrode is configured to generate betwixt the discharge of electricity pulse, so that the generation irradiance flash, and wherein said drain chamber have enough volumes hold by since the pressure pulse that described discharge of electricity pulse causes to the described liquid of a volume of extrapolation.
100. device as claimed in claim 55 also comprises a plurality of power circuits with described electrode electrical communication.
101. as the described device of claim 100, wherein said a plurality of power circuits comprise and are configured between described first and second electrodes to generate the discharge of electricity pulse so that produce the pulse supply circuit of irradiance flash.
102. as the described device of claim 101, wherein said a plurality of power circuits also comprise the idle current circuit that is configured to generate idle current between described first and second electrodes.
103. as the described device of claim 102, wherein said a plurality of power circuits also comprise the start-up circuit that is configured to generate starting current between described first and second electrodes.
104. as the described device of claim 103, wherein said a plurality of power circuits also comprise and are configured between described first and second electrodes to generate the holding circuit of keeping electric current.
105., also comprise the isolator that is configured to another isolation at least at least one and the described a plurality of power circuit in described a plurality of power circuits as the described device of claim 100.
106. as the described device of claim 105, wherein said isolator comprises mechanical switch.
107. as the described device of claim 105, wherein said isolator comprises diode.
108. device as claimed in claim 55, wherein each described electrode comprises the coolant channel that is used to hold the cooling agent stream by wherein.
109. as the described device of claim 108, wherein at least one described electrode comprises the tungsten tip with at least one centimetre of thickness.
110. as the described device of claim 108, wherein said electrode is configured to generate the discharge of electricity pulse, so that produce irradiance flash, but also comprises the idle current circuit that is configured to generate idle current between described first and second electrodes.
111. as the described device of claim 110, generate described idle current in the wherein said time period of idle current circuit arrangement one-tenth before described discharge of electricity pulse, the described time period is longer by the time by the required fluid of described big envelope than described flow of liquid.
112. as the described device of claim 111, wherein said idle current circuit arrangement becomes to generate described idle current at least 3 * 10
1Millisecond.
113. as the described device of claim 110, wherein said idle current circuit arrangement becomes to generate about at least 1 * 10
2The electric current of ampere is as described idle current.
114. as the described device of claim 110, wherein said idle current circuit arrangement becomes about at least 1 * 10
2Generate about at least 4 * 10 in the millisecond
2The electric current of ampere is as described idle current.
115. a device that is used to produce electromagnetic radiation, this device comprises:
A) be used to generate along the device of the electric insulation of the flow of liquid of big envelope inner surface; And
B) be used for generating electric arc so that produce the device of electromagnetic radiation at big envelope.
116. a method that produces electromagnetic radiation, this method comprises:
A) utilize the flow-generator of electric insulation, generate flow of liquid along the big envelope inner surface; And
B) between first and second electrodes, generate electric arc so that produce described irradiance flash.
117. one kind comprises a plurality of methods of coming irradiation one common target as the device that claim 55 limited of control.
118. as the described method of claim 117, wherein control comprises control multiple arrangement irradiation semiconductor wafer.
119. as the described method of claim 117, wherein control comprises that each device that makes in the described multiple arrangement generates the described electric arc on the direction relative with the electric arc direction of each neighboring devices in the described multiple arrangement.
120., also be included in and hold a part of described flow of liquid in the drain chamber that extends outwardly beyond a described electrode as the described method of claim 116.
121. as the described method of claim 120, wherein hold comprise with a described described electrode with since the turbulent flow that the collapse of flow of liquid causes described in the described drain chamber isolate.
122. as the described method of claim 120, also comprise generation from the radially inner gas stream of described flow of liquid, and wherein hold comprise with a described described electrode with since the turbulent flow that the collapse of described liquids and gases stream causes isolate.
123. as the described method of claim 120, wherein generate electric arc and comprise and generate the discharge of electricity pulse so that produce irradiance flash, and wherein hold comprise hold by since the pressure pulse that described discharge of electricity pulse causes to the described liquid of a volume of extrapolation.
124., also comprise with another isolation at least at least one and the described a plurality of power circuit in a plurality of power circuits as the described method of claim 116.
125., also comprise described first and second electrodes of cooling as the described method of claim 116.
126. as the described method of claim 125, wherein cooling comprises that the corresponding coolant channel by described first and second electrodes comes the circulating fluid cooling agent.
127. as the described method of claim 125, wherein generate described electric arc and comprise the pulse of generation discharge of electricity,, generate idle current but also be included between described first and second electrodes so that produce irradiance flash.
128. as the described method of claim 127, wherein generate described idle current and be included in the described idle current of generation in the described discharge of electricity pulse time period before, the described time period is longer by the time by the required fluid of described big envelope than described flow of liquid.
129. as the described method of claim 128, wherein generation comprises generation described idle current at least 3 * 10
1Millisecond.
130. as the described method of claim 127, wherein generation comprises generation about at least 1 * 10
2The electric current of ampere is as described idle current.
131., wherein generate and be included in about at least 1 * 10 as the described method of claim 127
2Generate about at least 4 * 10 in the millisecond
2The electric current of ampere is as described idle current.
132. a device that is used to produce irradiance flash, this device comprises:
A) flow-generator is configured to generate the flow of liquid along the big envelope inner surface;
B) first and second electrodes are configured to generate the discharge of electricity pulse in big envelope, so that produce described irradiance flash, described pulse makes described electrode discharge the different particle contamination of particle contamination that is discharged with described electrode in its continuous operation process; And
C) removal equipment is configured to remove described particle contamination from described liquid.
133. as the described device of claim 132, wherein said removal equipment comprises the filter that is configured to filter described particle contamination from described liquid.
134. as the described device of claim 133, wherein said filter deployment becomes to filter little particle to two microns.
135. as the described device of claim 134, wherein said filter deployment becomes to filter little particle to a micron.
136. as the described device of claim 135, wherein said filter deployment becomes to filter the little particle that arrives half micron.
137. as the described device of claim 132, wherein said removal equipment comprises the disposal valve of fluid circulating system, described disposal valve can be operated at the described at least flow of liquid fluid required by described big envelope and pass through to dispose in the time described flow of liquid.
138. a device that is used to produce irradiance flash, this device comprises:
A) be used to generate device along the flow of liquid of big envelope inner surface;
B) be used for generating the discharge of electricity pulse so that produce the device of described irradiance flash at described big envelope, described pulse makes the described device that is used for generating discharge the different particle contamination of particle contamination that is discharged in its continuous operation process with the described device that is used to generate; And
C) be used for from the device of the described particle contamination of described liquid removal.
139. a method that produces irradiance flash, this method comprises:
A) generation is along the flow of liquid of big envelope inner surface;
B) generate the discharge of electricity pulse in the big envelope between first and second electrodes, so that produce described irradiance flash, described pulse makes described electrode discharge the different particle contamination of particle contamination that is discharged with described electrode in its continuous operation process; And
C) from described liquid, remove described particle contamination.
140. as the described method of claim 139, wherein removal comprises the described particle contamination of filtration from described liquid.
141., wherein filter and comprise and filter little particle to two microns as the described method of claim 140.
142., wherein filter and comprise and filter little particle to a micron as the described method of claim 141.
143. as the described method of claim 142, wherein filtration comprises the little particle that arrives half micron of filtration.
144. as the described method of claim 139, wherein remove be included in described at least flow of liquid by the required fluid of described big envelope by the described flow of liquid of disposal in the time.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CA2004/000202 WO2005078762A2 (en) | 2004-02-12 | 2004-02-12 | High-intensity electromagnetic radiation apparatus and methods |
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| CN2012103369875A Division CN102891068A (en) | 2004-02-12 | 2004-02-12 | High-intensity electromagnetic radiation device and method |
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| CN1926658A true CN1926658A (en) | 2007-03-07 |
| CN1926658B CN1926658B (en) | 2012-10-10 |
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| JP (1) | JP5074039B2 (en) |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104145321A (en) * | 2012-02-24 | 2014-11-12 | 马特森技术有限公司 | Apparatus and methods for generating electromagnetic radiation |
| CN108369918A (en) * | 2015-12-30 | 2018-08-03 | 马特森技术有限公司 | Nitrogen for arc lamp injects |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101163682B1 (en) | 2002-12-20 | 2012-07-09 | 맷슨 테크날러지 캐나다 인코퍼레이티드 | Apparatus and method for supporting a workpiece |
| US7781947B2 (en) | 2004-02-12 | 2010-08-24 | Mattson Technology Canada, Inc. | Apparatus and methods for producing electromagnetic radiation |
| KR101610269B1 (en) | 2008-05-16 | 2016-04-07 | 맷슨 테크놀로지, 인크. | Workpiece breakage prevention method and apparatus |
| KR102436519B1 (en) * | 2015-08-18 | 2022-08-25 | 삼성전자주식회사 | Arc lamp and substrate heating apparatus having the arc lamp |
| US20170194133A1 (en) * | 2015-12-30 | 2017-07-06 | Mattson Technology, Inc. | Electrode Tip for ARC Lamp |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2877341A (en) * | 1955-06-28 | 1959-03-10 | Harold E Edgerton | Liquid cooled flash-producing apparatus |
| US2906858A (en) * | 1957-10-10 | 1959-09-29 | Union Carbide Corp | Liquid vortex arc torch process |
| US3366815A (en) * | 1965-12-29 | 1968-01-30 | Union Carbide Corp | High pressure arc cooled by a thin film of liquid on the wall of the envelope |
| US3651358A (en) * | 1970-05-04 | 1972-03-21 | Union Carbide Corp | Method and apparatus for extending the useful life of an arc radiation source |
| US4027185A (en) * | 1974-06-13 | 1977-05-31 | Canadian Patents And Development Limited | High intensity radiation source |
| CA1015817A (en) * | 1974-06-13 | 1977-08-16 | Roy A. Nodwell | Liquid-cooled arc radiation source |
| DE2433781C2 (en) * | 1974-07-13 | 1984-12-13 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe | Electron source |
| DE2460277C2 (en) * | 1974-12-19 | 1997-01-27 | Max Planck Gesellschaft | ELECTRIC ARCH DISCHARGE LAMP |
| JPH0653580A (en) * | 1992-07-31 | 1994-02-25 | Toshiba Medical Eng Co Ltd | Laser apparatus |
| JP2000195469A (en) * | 1998-12-24 | 2000-07-14 | Fuji Koken Kk | Ultrahigh pressure mercury lamp device and jacket tube |
| JP3458757B2 (en) * | 1999-03-30 | 2003-10-20 | ウシオ電機株式会社 | Dielectric barrier discharge lamp device |
| US6621199B1 (en) * | 2000-01-21 | 2003-09-16 | Vortek Industries Ltd. | High intensity electromagnetic radiation apparatus and method |
| CN1292451C (en) * | 2001-08-02 | 2006-12-27 | 皇家飞利浦电子股份有限公司 | Low-pressure gas discharge lamp |
-
2004
- 2004-02-12 CN CN2004800415926A patent/CN1926658B/en not_active Expired - Lifetime
- 2004-02-12 WO PCT/CA2004/000202 patent/WO2005078762A2/en active Application Filing
- 2004-02-12 JP JP2006552429A patent/JP5074039B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104145321A (en) * | 2012-02-24 | 2014-11-12 | 马特森技术有限公司 | Apparatus and methods for generating electromagnetic radiation |
| CN104145321B (en) * | 2012-02-24 | 2016-07-06 | 马特森技术有限公司 | For generating equipment and the method for electromagnetic radiation |
| CN108369918A (en) * | 2015-12-30 | 2018-08-03 | 马特森技术有限公司 | Nitrogen for arc lamp injects |
| CN108369918B (en) * | 2015-12-30 | 2021-12-24 | 玛特森技术公司 | Nitrogen injection for arc lamps |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2005078762A2 (en) | 2005-08-25 |
| CN1926658B (en) | 2012-10-10 |
| JP5074039B2 (en) | 2012-11-14 |
| WO2005078762A3 (en) | 2006-06-01 |
| JP2007522624A (en) | 2007-08-09 |
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