CN1924537A - Laser measuring method for non-contact type micro-rotor vibration displacement - Google Patents
Laser measuring method for non-contact type micro-rotor vibration displacement Download PDFInfo
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- CN1924537A CN1924537A CN 200610026843 CN200610026843A CN1924537A CN 1924537 A CN1924537 A CN 1924537A CN 200610026843 CN200610026843 CN 200610026843 CN 200610026843 A CN200610026843 A CN 200610026843A CN 1924537 A CN1924537 A CN 1924537A
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Abstract
This invention relates to non-contact micro rotor vibration displacement laser measurement in the micro machine technique field. This invention uses radio ejector to send laser band to scan the micro rotor movement status, wherein, the micro rotor high speed track is collected by CCD displacement sensor and image collector card to get the vibration signals by image process technique. The invention adopts hardware system in charge for micro rotor high speed rotation to realize stable control and vibration image signal collection ad adopts software system to process the image signals to extract characteristic points to get the movement track from the fix points of rotor.
Description
Technical field
The present invention relates to a kind of method of field of micro electromechanical technology, specifically is a kind of laser measurement method of non-contact type micro-rotor vibration displacement.
Background technology
Growing along with science and technology, aspects such as the running speed of little rotating machinery, mission life have been proposed more and more higher requirement, if owing to the processing and manufacturing reason of little rotating machinery own or under the hypervelocity situation running all may make system produce vibration, influence the stable operation of system, effectively in time various vibrations are made and measured and analyze, become the important step that improves the normal operation of little rotatory mechanical system.High-precision displacement measurement system is the basis that fields such as micromechanics, instrument and meter obtain positional precision, also is the constantly progressive restraining factors of the said goods and technology.At present, sensing and Research on Measuring Technology to micromechanics are more, and mainly concentrate on silicon sensor and optical measurement aspect, but the problem that the measurement of micro-rotor vibration characteristic is also existed many needs solutions, especially the vibration characteristics measurement under ultrahigh rotating speed also lacks effective means to the ultra micro rotating machinery, yet there are no open report.
Find through literature search prior art, W.S. Bo Nieer since U.S.'s Bell Laboratory in 1969, G.E. people such as Smith proposes electric charge and has been coupled since these new ideas, along with science and technology development, particularly modern age development of electronic technology, charge-coupled image sensor, be called for short CCD, be applied to geometric measurement and can realize high precision, high-level efficiency, robotization, detection of dynamic, requirements such as non-cpntact measurement, especially undersized measurement had very strong advantage, S.H.Wang etc. are at " Optik " (optics) (2004,115 (12): " A genetic optical interferometric inspection onmicro-deformation " (the hereditary optical interferometry of little distortion) delivered 564-568), propose to measure the vibration deformation and the dynamic perfromance of the simple microstructure of MEMS (little beam and mems thin film) in this article with the CCD method, measurement range can be about 1 μ m, but up to now, by a large amount of literature searches, also do not find to adopt any report of CCD displacement sensing technology to MEMS micro-rotor vibration and dynamic characteristic measuring.
Summary of the invention
The objective of the invention is to overcome the deficiency of existing optical measuring technique, a kind of laser measurement method of non-contact type micro-rotor vibration displacement is provided.Make it replace traditional geometric optical imaging detection method, realize that the digital accurate of MEMS micro-rotor vibration detects and control.
The present invention is achieved by the following technical solutions, tested micromotor is installed on the testing table, utilize the little rotor in the transmitter emission laser light belt scanning motion state, the projection record of the movement locus of little rotor under running up is gathered little rotor motion image with CCD displacement transducer and image pick-up card and is used image processing techniques to obtain vibration signal again, wherein: adopt hardware system to be responsible for running up of little rotor, realize little rotor speed control and rotor motion picture signal are gathered; Adopt software systems that the image that collects is carried out picture signal and handle, extract the change in displacement of unique point in the image, thereby obtain the movement locus and the vibration characteristics of little rotor rotation.Micro-rotor vibration measuring method proposed by the invention has simple, the contactless detection of dynamic of realization, measuring accuracy advantages of higher, and almost can ignore the influence of micro-motor rotor system itself.
In the present invention, adopt hardware system to realize to little rotor speed control, improve bearing accuracy, be specially: adopt constant force square segmentation control method, differ the phase winding of 2 π/m each other in the space, pass to respectively and differ 2 π/m on the phase place and the identical sinusoidal current of amplitude, then He Cheng current phasor just rotates in the space, and amplitude remains unchanged.Micromotor is realized any segmentation of step angle, and winding current adopts following form: when 0≤α≤2 π/3, and i
α=I
mSin α; When 2 π/3≤α≤4 π/3, i
α=I
mSin (α-π/3); When 4 π/3≤α≤2 π, i
α=0; Wherein, α is the angle that micro-motor rotor departs from reference point.Exciting current in the control micromotor stator winding, synthetic constant amplitude, angle change uniform magnetic vector, realize the control to micromotor constant force square uniform subdivision, make operating steadily of micromotor, thereby realization is controlled, adjustable to rotating speed, satisfies the vibration-testing requirement of little rotor.
Signals collecting is another key of Vibration-Measuring System, rotor motion picture signal acquisition applications CCD scanning imaging technology of the present invention carries out sampling analysis to the micro-rotor vibration process, adopts hardware and software location technology to realize each pixel of CCD is carried out high speed acquisition and is transferred to Computer Processing in real time.When picture signal is gathered, because little rotor is small-sized, must carry out the CCD focusing, until little clearly rotor image occurring, obtain the picture signal of little rotor by the CCD scanning system, deposit the data acquisition card buffer memory in, signals collecting software by the speed of appointment the video signal collective in the buffer memory in calculator memory, the application development software bag obtains the vibration signal of little rotor rotation in computing machine then.The simulating signal of detailed process: CCD output is input among the A/D of capture card, A/D converts the magnitude of voltage of each pixel of CCD to digital signal, signal is sent to computer interface by interface module, monitor is responsible for regularly showing the analog video signal that CCD collects, so that monitor the motion state of little rotor in real time, be convenient to adjust the motion state of little rotor, gather the vibration signal of little rotor under the various different operating modes.
The present invention adopts software systems that the image that collects is carried out picture signal and handles, specifically: the picture signal that CCD gathers is carried out binaryzation, filtering, pre-service such as denoising, carry out the algorithm process of picture signal again, the present invention adopts FFT that signal is handled, select SPLIT RADIX ALGORITHM FOR (SRFFT) for use, this algorithm has minimum operand, the computation structure regularity, with location property, internal data need not advantages such as rearrangement, its basic thought is: establish N=2M, select method according to frequency this N point DFT is resolved into a N/2 point DFT and two N/4 point DFT, and N/2 point DFT and N/4 point DFT can use identical process recursive calculation when having only the combination of 2 DFT till, each step of this algorithm all is to be formed by base-2 and base-4 decomposition and combination, operand is little, and computing velocity is fast.And then vibration signal carried out analysis of spectrum, because time-domain signal can be blocked, promptly be equivalent to the original signal function and a truncation funcation multiplies each other, the result not exclusively is original signal, thereby causes spectrum to be revealed, even occurs disturbing between spectrum, cause the error of analysis of spectrum, therefore, system chooses appropriate window function, reduces the influence of truncation effect.Picture signal in order to determine between the frequency sampling point whether bigger peak value is arranged, adopts the ZFFT algorithm to obtain the High-Resolution Spectral of this frequency range after finishing FFT.
The present invention has following characteristics: adopt the non-contact laser displacement sensing method, ccd image collection and digital image processing techniques are applied to the vibration survey of little rotor rotation, obtain the vibration signal of little rotor rotation, can avoid shortcomings such as the traditional measurement method precision is low, poor reliability, have and realize simple, contactless detection of dynamic, the advantage that measuring accuracy is high; Adopt constant force square segmentation control method, realized that the constant and little rotor speed of micromotor output torque is controlled, adjustable; Adopt signal to amplify and the A/D conversion, carry out quick FFT conversion on computers, obtain rumble spectrum, the frequency of energy maximum is exactly the frequency of little rotor rotation on the rumble spectrum, also can get the actual rotational speed of little rotor thus.
Description of drawings
Fig. 1 is a micro-rotor vibration measuring system structural drawing
Fig. 2 is a CCD scanning imagery schematic diagram
The amplitude spectrogram a and the time domain waveform figure b of the vibration of 6mm micro-motor rotor when Fig. 3 is 8.8Hz for rotational frequency.
The amplitude spectrogram a and the time domain waveform figure b. of the vibration of 6mm micro-motor rotor when Fig. 4 is 50Hz for rotational frequency
The amplitude spectrogram of 2mm micro-motor rotor vibration when Fig. 5 is respectively 28.8Hz, 35.0Hz and 51.3Hz for rotational frequency, wherein: figure a, b, c be corresponding 28.8Hz, 35.0Hz and 51.3Hz rotational frequency respectively.
Fig. 6 is when running up, and the time domain waveform figure of 2mm micro-motor rotor vibration wherein schemes a, b, c corresponding 78.4Hz, 95.1Hz and 125.6Hz rotational frequency respectively.
Embodiment
Content in conjunction with the inventive method provides following examples:
The experiment porch that present embodiment adopts comprises 2mm and 6mm electromagnetic type film micromotor apparatus system, constant current sub-driver circuit system, CCD laser displacement sensor, simulating signal controller, microcomputer data acquisition device and data acquisition software, spectrum analyzer.
Fig. 1 has provided micro-rotor vibration measuring system structural drawing, is made up of micromotor, sensor, controller, driving circuit and acquisition system.Wherein, adopt the CCD scanning imaging technology to measure the principle of rotation micro-rotor vibration, as shown in Figure 2.For miniature rotating machinery, adopting the motion of the contactless little rotor axis of light belt sensor measurement is very easily, and precision is higher.The light belt that makes the light belt sensor is by little rotor, and support is fixedly mounted on the support, utilizes the vibration regularity of the little rotor of inclined to one side dynamic simulated of laser band, and the laser sensor precision that is adopted can reach 0.05 μ m.
Embodiment 1
Choose 6mm electromagnetic type film micromotor, its important technological parameters is: little rotor discs diameter is D=6mm, and disc thickness is t=1.2mm, and axial length is L=3mm, and shaft diameter is d=1.5mm, and operating voltage is 10V～13V.Sample frequency is 60Hz.
In the present embodiment,, improve bearing accuracy, adopt constant current sub-driver circuit system in order to realize rotating speed control, the exciting current in the control micromotor stator winding, synthetic constant amplitude, angle change uniform magnetic vector, and micromotor is operated steadily; Adopt the CCD scanning imaging technology that little the commentaries on classics in the vibration processes under the speed-controllable situation carried out sampling analysis, obtain the picture signal of little rotor by the displacement transducer in the CCD scanning system, deposit the data acquisition card buffer memory in, export the simulating signal of CCD again by the simulating signal controller, then simulating signal is input among the A/D of capture card, A/D converts the magnitude of voltage of each pixel of CCD to digital signal, signal is sent to computer interface by interface module, carry out quick FFT conversion on computers, obtain the amplitude spectrogram and the time domain waveform figure of micro-rotor vibration.
Fig. 3 and Fig. 4 are respectively the amplitude spectrogram (left side) and the time domain waveform figure (right side) of rotational frequency 6mm micro-motor rotor vibration when being 8.8Hz and 50Hz.On scheming, can find out, rising along with rotating speed, vibration changes comparatively obvious, the amplitude of little rotor slightly increases, and can calculate the rotating speed of little rotor by rotational frequency and sample frequency, promptly by frequency (rotational frequency) f of energy maximum on the rumble spectrum, can get rotational speed according to formula is n=60f.
Choose 2mm electromagnetic type film micromotor, its important technological parameters is: physical dimension is 2.3mm * 2.3mm * 1.5mm, little root diameter is D=2mm, operating voltage is 8V, and working current is 70mA, and maximum non-load speed is 25000rpm, weight is 38mg, speed adjustable range is 50: 1, and maximum output torque is 2.8 μ Nm, and rotor-support-foundation system adopts two stators-single rotor sandwich construction.Sample frequency is 60Hz.
In the present embodiment,, improve bearing accuracy, adopt constant current sub-driver circuit system in order to control the rotating speed of little rotor, the exciting current in the control micromotor stator winding, synthetic constant amplitude, angle change uniform magnetic vector, and micromotor is operated steadily; Adopt the CCD scanning imaging technology that the vibration processes of little rotor under the speed-controllable situation carried out sampling analysis, obtain the picture signal of little rotor by the displacement transducer in the CCD scanning system, deposit the data acquisition card buffer memory in, export the simulating signal of CCD again by the simulating signal controller, then simulating signal is input among the A/D of capture card, A/D converts the magnitude of voltage of each pixel of CCD to digital signal, signal is sent to computer interface by interface module, carry out quick FFT conversion on computers, obtain the amplitude spectrogram and the time domain waveform figure of micro-rotor vibration.
Fig. 5 is the amplitude spectrogram of rotational frequency 2mm micro-motor rotor vibration when being respectively 28.8Hz, 35.0Hz and 51.3Hz.As seen from the figure, be the amplitude spectrogram of system when low speed, frequency content is comparatively complicated, mainly is because the instability of start-up course; Along with the rising of rotating speed, amplitude tends to be steady, and mainly based on the frequency multiplication composition, this shows system after turning round through the long period in the system, and complicated ingredient fades away, based on low order frequency multiplication composition.
Fig. 6 is the rising along with rotating speed (rotational frequency is respectively 78.4Hz, 95.1Hz and 125.6Hz), and friction increases the weight of the time domain waveform figure of the steady-state process of back record gradually.Along with the rising of rotating speed, friction increases the weight of, and duration of contact is shorter and shorter, it is more and more frequent to rub, along with constantly increasing the weight of of friction, and little rotor-support-foundation system heating, because overlong time, little rotor-support-foundation system is cisco unity malfunction sometimes, and the vibration problem that illustrating rubs causes has a strong impact on the stability of micromotor.Therefore, adopt measuring method of the present invention to can be used for the vibration detection of little rotor rotation under the various different operating modes.
Claims (4)
1, a kind of laser measurement method of non-contact type micro-rotor vibration displacement, it is characterized in that, tested micromotor is installed on the testing table, utilize the little rotor in the transmitter emission laser light belt scanning motion state, the projection record of the movement locus of little rotor under running up is gathered little rotor motion image with CCD displacement transducer and image pick-up card and is used image processing techniques to obtain vibration signal again, wherein: adopt hardware system to be responsible for running up of little rotor, realize little rotor speed control and rotor motion picture signal are gathered; Adopt software systems that the image that collects is carried out picture signal and handle, extract the change in displacement of unique point in the image, thereby obtain the movement locus and the vibration characteristics of little rotor rotation.
2, the laser measurement method of non-contact type micro-rotor vibration displacement according to claim 1, it is characterized in that, described employing hardware system is realized little rotor speed control, be specially: adopt constant force square segmentation control method, differ the phase winding of 2 π/m each other in the space, pass to respectively and differ 2 π/m on the phase place and the identical sinusoidal current of amplitude, then He Cheng current phasor just rotates in the space, and amplitude is fixed, micromotor is realized any segmentation of step angle, winding current adopts following form: when 0≤α≤2 π/3, and i
a=I
mSin α; When 2 π/3≤α≤4 π/3, i
a=I
mSin (α-π/3); When 4 π/3≤α≤2 π, i
a=0; Wherein, α is the angle that micro-motor rotor departs from reference point, the exciting current in the control micromotor stator winding, and synthetic constant amplitude, angle change uniform magnetic vector, realize the control to micromotor constant force square uniform subdivision.
3, the laser measurement method of non-contact type micro-rotor vibration displacement according to claim 1, it is characterized in that, described employing hardware system is realized the collection of rotor motion picture signal, be specially: application CCD scanning imaging technology carries out sampling analysis to the vibration processes of little rotor rotation, adopt hardware and software location technology to realize each pixel of CCD is carried out high speed acquisition and is transferred to MICROCOMPUTER PROCESSING in real time, monitor is responsible for regularly showing the analog video signal that CCD collects, so that monitor the motion state of little rotor in real time, adjust the motion state of little rotor, measure the vibration signal of little rotor under the various operating modes.
4, the laser measurement method of non-contact type micro-rotor vibration displacement according to claim 1, it is characterized in that, described employing software systems are carried out picture signal to the image that collects and are handled, be specially: the picture signal that CCD obtains is carried out binaryzation, filtering, the denoising pre-service, adopt FFT to carry out the algorithm process of picture signal again, and then choose window function, vibration signal is carried out analysis of spectrum, picture signal is after finishing FFT, in order to determine between the frequency sampling point whether bigger peak value is arranged, adopt the ZFFT algorithm to obtain the High-Resolution Spectral of this frequency range.
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| CNB2006100268434A CN100523767C (en) | 2006-05-25 | 2006-05-25 | Laser measuring method for non-contact type micro-rotor vibration displacement |
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| CN101876666A (en) * | 2010-05-21 | 2010-11-03 | 中钢集团天澄环保科技股份有限公司 | Non-contact type acceleration measurement method and device of filter-bag |
| CN102645161A (en) * | 2012-03-31 | 2012-08-22 | 安徽大学 | Motor rotor position detection method based on image phase correlation algorithm |
| CN102735423A (en) * | 2012-06-29 | 2012-10-17 | 西北核技术研究所 | On-line measuring method and device for forced vibration of optical system |
| CN103940357A (en) * | 2014-03-26 | 2014-07-23 | 北京卓越经纬测控技术有限公司 | Non-contact spatial displacement measurement device |
| CN104713546A (en) * | 2015-03-12 | 2015-06-17 | 大连理工大学 | Novel non-contact photoelectric detection method for high-speed two-dimensioned motion tracks |
| CN105571783A (en) * | 2016-01-12 | 2016-05-11 | 西安电子科技大学 | Rotor high precision dynamic balancing device based on differential capacitance sensing principle |
| CN108195318A (en) * | 2017-12-25 | 2018-06-22 | 安徽大学 | Globular motor rotor fixed position device and localization method based on laser curtain imaging |
| CN109782011A (en) * | 2019-02-18 | 2019-05-21 | 江苏大学 | A kind of rotation-speed measuring device and method of sea water desalination high-pressure pump and turbine all-in-one machine |
| CN111288952A (en) * | 2020-03-16 | 2020-06-16 | 湖南米艾西测控技术有限公司 | Automatic centering adjusting tool for rotary transformer |
| CN113340244A (en) * | 2021-03-04 | 2021-09-03 | 北京化工大学 | Non-contact type turbine machinery blade vibration displacement monitoring method and device |
| CN113513993A (en) * | 2021-05-14 | 2021-10-19 | 国网宁夏电力有限公司电力科学研究院 | Method, medium and system for measuring transformer winding movement displacement |
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2006
- 2006-05-25 CN CNB2006100268434A patent/CN100523767C/en not_active Expired - Fee Related
Cited By (17)
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| CN101876666A (en) * | 2010-05-21 | 2010-11-03 | 中钢集团天澄环保科技股份有限公司 | Non-contact type acceleration measurement method and device of filter-bag |
| CN102645161A (en) * | 2012-03-31 | 2012-08-22 | 安徽大学 | Motor rotor position detection method based on image phase correlation algorithm |
| CN102645161B (en) * | 2012-03-31 | 2015-01-28 | 安徽大学 | Motor rotor position detection method based on image phase correlation algorithm |
| CN102735423A (en) * | 2012-06-29 | 2012-10-17 | 西北核技术研究所 | On-line measuring method and device for forced vibration of optical system |
| CN102735423B (en) * | 2012-06-29 | 2015-06-10 | 西北核技术研究所 | On-line measuring method and device for forced vibration of optical system |
| CN103940357A (en) * | 2014-03-26 | 2014-07-23 | 北京卓越经纬测控技术有限公司 | Non-contact spatial displacement measurement device |
| CN104713546A (en) * | 2015-03-12 | 2015-06-17 | 大连理工大学 | Novel non-contact photoelectric detection method for high-speed two-dimensioned motion tracks |
| CN105571783A (en) * | 2016-01-12 | 2016-05-11 | 西安电子科技大学 | Rotor high precision dynamic balancing device based on differential capacitance sensing principle |
| CN108195318A (en) * | 2017-12-25 | 2018-06-22 | 安徽大学 | Globular motor rotor fixed position device and localization method based on laser curtain imaging |
| CN108195318B (en) * | 2017-12-25 | 2020-05-12 | 安徽大学 | Spherical motor rotor positioning device and positioning method based on laser curtain imaging |
| CN109782011A (en) * | 2019-02-18 | 2019-05-21 | 江苏大学 | A kind of rotation-speed measuring device and method of sea water desalination high-pressure pump and turbine all-in-one machine |
| CN111288952A (en) * | 2020-03-16 | 2020-06-16 | 湖南米艾西测控技术有限公司 | Automatic centering adjusting tool for rotary transformer |
| CN111288952B (en) * | 2020-03-16 | 2022-07-05 | 湖南米艾西测控技术有限公司 | Automatic centering adjusting tool for rotary transformer |
| CN113340244A (en) * | 2021-03-04 | 2021-09-03 | 北京化工大学 | Non-contact type turbine machinery blade vibration displacement monitoring method and device |
| CN113340244B (en) * | 2021-03-04 | 2023-06-13 | 北京化工大学 | Non-contact turbine mechanical blade vibration displacement monitoring method and device |
| CN113513993A (en) * | 2021-05-14 | 2021-10-19 | 国网宁夏电力有限公司电力科学研究院 | Method, medium and system for measuring transformer winding movement displacement |
| CN113513993B (en) * | 2021-05-14 | 2023-03-14 | 国网宁夏电力有限公司电力科学研究院 | Method, medium and system for measuring transformer winding movement displacement |
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