CN1924111B - Two-way modulation pulse electrochemical deposition apparatus - Google Patents
Two-way modulation pulse electrochemical deposition apparatus Download PDFInfo
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- CN1924111B CN1924111B CN200510094242A CN200510094242A CN1924111B CN 1924111 B CN1924111 B CN 1924111B CN 200510094242 A CN200510094242 A CN 200510094242A CN 200510094242 A CN200510094242 A CN 200510094242A CN 1924111 B CN1924111 B CN 1924111B
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Abstract
The invention discloses a double-path modulating pulse electrochemical sediment device, which is characterized by the following: the signal generating mode (2) consists of U1 chip AD654 and external circuit; the frequency multiplication frequency-division mode (3) is composed of mutually interconnected U2chip CD4046, U3 chip CD4518, U4 1/2 chip CD4518, U4 2/2 chip CD4518 and U5 chip CD4585, U6 chip CD4585 and external circuit; the four-quadrant multiplier mode (4) contains U7 MC1494 and external circuit; the power amplifier mode (6) concludes U8 chip LF351, U9 chip OPA551 and external circuit;the double-path timing mode (1) is composed of two output ends of synchronous timing switch DHC9A with 8-number dial switch and double-path synchronous relay and level modular (7), modulating singledevice (9), dutycycle setter (10) and frequency giver (11).
Description
Technical field the present invention relates to a kind of two-way modulation pulse electrochemical deposition apparatus.
Background technology is present, and excellent performance, miscellaneous nano material have caused people's very big interest.Preparation of nanomaterials also is diversified, utilizing electrochemical deposition method is one of them, the equipment of realizing this method mostly is the pulse electrolysis electroplating power supply, as a kind of " electroplating current supply system " that discloses among the disclosed Chinese invention patent specification sheets CN1169282C on September 29th, 2004.It is intended to provide a kind of electrolytic coating that can be obtained uniform thickness by the galvanized multilayer printed circuit board that through hole or via hole arranged that makes.It is by first direct supply that positive current is provided and the electroplating current power subsystem that provides second direct supply of negative current to form, and control first direct supply and second direct supply offer the size of the positive current of being electroplated object and negative current and time length at interval than the processing unit formation.During use, the electroplating current power subsystem is exported the positive current and the negative current of required size when electroplating under the control of processing unit, and the corresponding time length.But, just one tunnel pulse electrolysis electroplating current of this system output, can not export two-way modulating pulse metallide electric current, and have a nano thread that two kinds of differing materials are alternately arranged for synthetic, often but be to need the two-way modulation pulse signal to regulate the frequency of two output voltage, dutycycle, amplitude, level in real time.
The summary of the invention the technical problem to be solved in the present invention provides a kind of simple in structure for overcoming weak point of the prior art, practicality, two-way modulation pulse electrochemical deposition apparatus easy to use.
The technical scheme that is adopted comprises power supply and the output terminal that is electrically connected with it, particularly also comprise the signal generating module, frequency multiplication frequency division module, four-quadrant multiplier module and the power amplifier module that are electrically connected successively, and device and frequency setter are set through level regulator, modulation signal device, the dutycycle that its output that the two-way time block is electrically connected with disparate modules in these modules is two-way, wherein
Signal generating module is made up of U1 chip AD654 and peripheral circuit thereof, wherein, 4. the input terminus pin of U1 chip AD654 is electrically connected with the given port of the frequency of two-way time block, 1. the output terminal pin is electrically connected with the input terminus of frequency multiplication frequency division module, is used to produce the square-wave signal of 10Hz～10KHz;
The frequency multiplication frequency division module is made up of U2 chip CD4046, U3 chip CD4518, U41/2 chip CD4518, U42/2 chip CD4518 and U5 chip CD4585, the U6 chip CD4585 and the peripheral circuit thereof that are electrically connected mutually successively, wherein, the input terminus pin of U2 chip CD4046
1. be electrically connected the output terminal pin of U6 chip CD4585 with the output terminal pin of signal generating module
Be electrically connected the pin of U5 chip CD4585 and U6 chip CD4585 with the input terminus of four-quadrant multiplier module
Pin 9., pin 1., pin
All be electrically connected with eight wiretaps that the dutycycle of two-way time block is provided with port controlling, be used for earlier 100 times of the frequency upgradings of the square wave of signal generating module output, carry out frequency division again, and the output of device is set, obtain duty cycle range and be 5～98% output according to dutycycle;
The four-quadrant multiplier module is made up of U7 chip MC1494 and peripheral circuit thereof, wherein, the input terminus pin of U7 chip MC1494 10. with the output terminal pin of the U6 chip CD4585 of frequency multiplication frequency division module
Be electrically connected, 9. the input terminus pin of U7 chip MC1494 is electrically connected with the modulation signal port of two-way time block, the output terminal pin
Be electrically connected with the input terminus of power amplifier module, be used for exporting required compound electric impulse signal after multiplying each other from the pulse high-frequency signal of frequency multiplication frequency division module with from the modulation signal of modulation signal device;
Power amplifier module is made up of with U9 chip OPA551 cascade and peripheral circuit thereof U8 chip LF351, wherein, the input terminus pin of U8 chip LF351 2. with the output terminal pin of four-quadrant multiplier module
3. electrical connection, pin are electrically connected with the level adjustment port of two-way time block, 6. the output terminal pin of U9 chip OPA551 is electrically connected with output terminal, be used for required compound electric impulse signal is amplified to available power and sets quiescent point, so that output terminal is exported the electric impulse signal of required waveform;
The two-way time block is by the synchronization timing switch DHC9A that has eight digit number word dial switch and two-way synchronizing relay and level regulator, the modulation signal device, dutycycle is provided with the two-way output terminal of device and frequency setter and forms, wherein, the working coil of two-way synchronizing relay and synchronization timing switch DHC9A and its driving circuit polarity formula four blade double throw switch that is electrically connected to form, two group of eight road input terminus of said polarity formula four blade double throw switch respectively with the two-way output terminal of level regulator, the two-way output terminal of modulation signal device, dutycycle is provided with two synthetic ports of the two-way output signal of device, the two-way output terminal of frequency setter is electrically connected, one group of four road output terminal respectively with the level adjustment port, the modulation signal port, port is set dutycycle and the given port of frequency is electrically connected, be used on the eight digit number word dial switch of synchronization timing switch DHC9A, being provided with respectively the time of two groups of time periods with manual mode, and the level regulator that will set respectively, the modulation signal device, the output that dutycycle is provided with device and frequency setter exports corresponding module to synchronously via the polarity formula four blade double throw switch that synchronization timing switch DHC9A and two-way synchronizing relay constitute.
As the further improvement of technical scheme, described level regulator is the voltage voltage regulation part, and its two-way output terminal is the voltage output end that places two potentiometers on the device front panel respectively; Described modulation signal device is the voltage voltage regulation part, and its two-way output terminal is the voltage output end that places two potentiometers on the device front panel respectively; It is the 4-digit number dial switch that described dutycycle is provided with device, and its two-way output terminal is the output terminal that places the 4-digit number dial switch on the device front panel; Described frequency setter is the voltage voltage regulation part, and its two-way output terminal is the voltage output end that places two potentiometers on the device front panel respectively; 2. 6. the pin of the U9 chip OPA551 of described power amplifier module be connected with the tie point of feedback sample device with pin through resistance R 21, is used for stablizing the output of power amplifier module; Described feedback sample device is a resistance R 22, the other end ground connection of said resistance R 22.
Beneficial effect with respect to prior art is, one, on the basis of existing power supply and the output terminal that is electrically connected with it, set up the signal generating module that is electrically connected successively, the frequency multiplication frequency division module, four-quadrant multiplier module and power amplifier module, and be the level regulator of two-way through its output that the two-way time block is electrically connected with disparate modules in these modules, the modulation signal device, dutycycle is provided with the structure of device and frequency setter, obtained output frequency, dutycycle, amplitude, the synthetic pulse electrochemical deposition apparatus of the two-way that quiescent point is adjustable, wherein, frequency-tuning range is 10Hz～10KHz, the duty cycle adjustment scope is 5～98%, the amplitude regulation range is 0.4～12V, the regulation range of quiescent point is-and 5V～+ 5V; Its two, the frequency of every road pulse signal, dutycycle, amplitude, quiescent point (level) all can be regulated alone, are independent of each other mutually, and can switch synchronously; Its three, during work, the two-way pulse is through manually switching and alternately occurring, the variation range that is respectively the time slice t1 of every road pulse or t2 is 1 second～1 day adjustable.The low frequency part of frequency is 1/ (t1+t2), and the high frequency frequency is 1MHz～10Hz.Dutycycle is in time slice t1 and t2, and all independent adjustable, precision is 1%.The V of amplitude
1HBe that 0～10v is adjustable, V
2HBe that 0～10v is adjustable, V
1LFor-6～0v adjustable, V
2LFor-6～0v adjustable.(the V of quiescent point
1H+ V
1L)/2＞V
0, (V
2H+ V
2L)/2＞V
0Wherein, V
1H, V
1LBe respectively the high level and the lower level of first via pulse, V
2H, V
2LBe respectively the high level and the lower level of the second tunnel pulse, V
0Be Zero Potential; Its four, adopt directly stir with the setting device front panel on switch and potentiometer knob realize manual control, directly perceived, convenient, get final product if need control automatically only to need that then the two-way time block is replaced with the control corresponding parts.
Description of drawings is described in further detail optimal way of the present invention below in conjunction with accompanying drawing.
Fig. 1 is a kind of basic structure principle schematic of the present invention;
Fig. 2 is an output waveform figure of the present invention, V among the figure
0Be Zero Potential, V
1H, V
1LBe respectively the high level and the lower level of first via pulse, f1 is the frequency of first via pulse, and t1 is the working lipe of first via pulse, V
2H, V
2LBe respectively the high level and the lower level of the second tunnel pulse, f2 is the frequency of the second tunnel pulse, and t2 is the working lipe of the second tunnel pulse;
Fig. 3 is a kind of embodiment circuit structure diagram of realizing principle among Fig. 1.
Embodiment is referring to Fig. 1, Fig. 2 and Fig. 3, two-way modulation pulse electrochemical deposition apparatus is by the signal generating module 2, frequency multiplication frequency division module 3, four-quadrant multiplier module 4, power amplifier module 6 and the output terminal 5 that are electrically connected successively, and device 10 is set and frequency setter 11 constitutes through level regulator 7, modulation signal device 9, dutycycle that its output that two-way time block 1 is electrically connected with disparate modules in these modules is two-way, wherein:
A kind of voltage transitions frequency circuit that signal generating module 2 is made up of U1 chip AD654 and peripheral circuit thereof; Wherein, operating voltage VCC1 is+15V.4. the input terminus pin of U1 chip AD654 is electrically connected with the given port A of the frequency of two-way time block 1, is used to receive the voltage control signal of the 0～5V that is sent here by the given port A of frequency.1. the output terminal pin of U1 chip AD654 is electrically connected with the input terminus of frequency multiplication frequency division module 3, with the frequency signal output that conversion is gone out.3. the pin of U1 chip AD654 connects variable resistor (R1+VAR1) to ground, pin 6. and pin connect capacitor C 1 between 7., be used to produce the square-wave signal of 10Hz～10KHz.The pin of U1 chip AD654 2. with 5. ground connection of pin, pin 8. and pin be connected to pull-up resistor R2 between 1., to regulate 1. output signal level of pin.
Frequency multiplication frequency division module 3 is made up of U2 chip CD4046, U3 chip CD4518, U4 1/2 chip CD4518, U4 2/2 chip CD4518 and U5 chip CD4585, the U6 chip CD4585 and the peripheral circuit thereof that are electrically connected mutually successively; Wherein, the input terminus pin of U2 chip CD4046
1. be electrically connected with the output terminal pin of signal generating module 2, needing the signal of frequency multiplication, the capacitor C 4 of peripheral circuit, resistance R 3, R4 and R5 and being connected of U2 chip CD4046 are that working range for definite signal frequency is in 1.3MHz.U2 chip CD4046 and U3 chip CD4518 component frequency promote circuit unit, to provide 100 times signal frequency to promote, this unitary operating voltage VCC2 is+5V that wherein U2 is a phase locking unit, 1. signal after the frequency multiplication is exported by the pin of U3, and 10. 6. the pin of U3 link to each other with pin.Be duty frequency dividing circuit unit when after this, form that the voltage that the power supply VCC2 of this circuit unit provides is+5V by frequency divider U4 1/2 chip CD4518, U4 2/2 chip CD4518 and preset conuter U5 chip CD4585, U6 chip CD4585; Wherein, 10. 6. the pin of U4 1/2 chip CD4518 link to each other with the pin of U4 2/2 chip CD4518, and it is 100 that maximum range is set, as 1/100 frequency divider, the pin of U4 1/2 chip CD4518 9., pin 8., pin 7. and
Ground connection; The pin of U5 chip CD4585 and U6 chip CD4585
Pin 9., pin 1. and pin
Totally eight lead legs connect the 1K biasing resistor respectively to ground, in case this eight level that input terminus adds (" 0 ", " 1 ") flase operation; Their tape splicing current limliting 500 ohmic resistances+the 5V power supply be " 1 ", otherwise be zero, thereby form 8 scale-of-two and preset threshold, will be in per 100 pulses, be divided into high level and lower level, also promptly determine dutycycle, the two digits dial switch that device is set as dutycycle on each route device front panel is formed, the bits per inch word is synthetic by 8421 yards, two digits needs eight line signal connection ends altogether, this eight line all is provided with port B via the dutycycle of two-way time block 1 and controls it and connect, and the dutycycle of two-way does not influence mutually, controls its synchronous switching by two-way time block 1 equally.Have the output terminal pin of the signal of dutycycle by U6 chip CD4585
Output, its level is 0～4.8v, through the resistance-capacitance circuit of forming by resistance R 14, resistance R 19 and capacitor C 14, the input terminus of delivering to four-quadrant multiplier module 4 is to carry out pulsed modulation, be used for earlier 100 times of the frequency upgradings of the square wave of signal generating module 2 outputs, carry out frequency division again, and the output of device 10 is set, obtain duty cycle range and be 5～98% output according to dutycycle;
Four-quadrant multiplier module 4 is made up of U7 chip MC1494 and peripheral circuit thereof, wherein, the input terminus pin of U7 chip MC1494 10. with the output terminal pin of the U6 chip CD4585 of frequency multiplication frequency division module 3
Be electrically connected, 9. the input terminus pin of U7 chip MC1494 is electrically connected with the modulation signal port C of two-way time block 1, the output terminal pin
Be electrically connected with the input terminus of power amplifier module 6; The resistance R 17 of peripheral circuit is connected to the pin of U7 chip MC1494
Pin
Between, the pin that resistance R 18 is connected to U7 chip MC1494 7., pin 8. between, the pin that resistance VR1 and resistance VR2 all are connected to U7 2., pin 4. between, 6. and pin the pin that its movable contact meets U7 respectively
The pin of thinking U7 2., 4. pin provide stable generating positive and negative voltage reference signal; Operating voltage VCC1 is+15V; Being used for to be 10Hz～10KHz from the range of frequency of frequency multiplication frequency division module 3, and the duty cycle adjustment scope is 5% to 95%, high level be the pulse high-frequency signal of 4.8V and multiply each other from the modulation signal of modulation signal device 9 after, export required compound electric impulse signal;
Two-way time block 1 is by the synchronization timing switch DHC9A that has eight digit number word dial switch and two-way synchronizing relay and level regulator 7, modulation signal device 9, dutycycle is provided with the two-way output terminal of device 10 and frequency setter 11 and forms, wherein, the working coil of two-way synchronizing relay is electrically connected with synchronization timing switch DHC9A and its driving circuit, constituted polarity formula four blade double throw switch jointly with a two-way synchronizing relay that includes with synchronization timing switch DHC9A, two group of eight road input terminus of said polarity formula four blade double throw switch respectively with the two-way output terminal (t1-7 of level regulator 7, t2-7), two-way output terminal (the t1-9 of modulation signal device 9, t 2-9), dutycycle is provided with two synthetic port (t1-10 of the two-way output signal of device 10, t2-10), two-way output terminal (the t1-11 of frequency setter 11, t2-11) be electrically connected, one group of four road output terminal respectively with level adjustment port D, modulation signal port C, port B is set dutycycle and the given port A of frequency is electrically connected; Level regulator 7 is the voltage voltage regulation part, its two-way output terminal (t1-7, t2-7) be the voltage output end that places two potentiometers on the device front panel respectively, modulation signal device 9 is the voltage voltage regulation part, its two-way output terminal (t1-9, t2-9) be the voltage output end that places two potentiometers on the device front panel respectively, dutycycle is provided with device 10 and is the 4-digit number dial switch, its two-way output terminal is the output terminal that places the 4-digit number dial switch on the device front panel, frequency setter 11 is the voltage voltage regulation part, (t1-11 t2-11) is the voltage output end that places two potentiometers on the device front panel respectively to its two-way output terminal; Be used on the eight digit number word dial switch of synchronization timing switch DHC9A, two groups of time period (t1 being set respectively with manual mode, t2) time slice, and the output that the level regulator 7 that will set respectively, modulation signal device 9, dutycycle are provided with device 10 and frequency setter 11 exports corresponding module to synchronously via the polarity formula four blade double throw switch that synchronization timing switch DHC9A and two-way synchronizing relay constitute.
During use, prior to setting-up time sheet t1 or t2 on the eight digit number word dial switch on the device front panel, again respectively at device on the front panel six potentiometers and the 4-digit number dial switch on the given numerical value of setpoint frequency, modulation signal numerical value, level adjustment numerical value and dutycycle numerical value, output terminal 5 of the present invention is the electric impulse signal of exportable waveform as shown in Figure 2.
Obviously, those skilled in the art can carry out various changes and modification to two-way modulation pulse electrochemical deposition apparatus of the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (7)
1. two-way modulation pulse electrochemical deposition apparatus, the output terminal that comprises power supply and be electrically connected (5) with it, it is characterized in that comprising the signal generating module (2) that is electrically connected successively, frequency multiplication frequency division module (3), four-quadrant multiplier module (4) and power amplifier module (6), and be the level regulator (7) of two-way through its output that two-way time block (1) is electrically connected with disparate modules in these modules, modulation signal device (9), dutycycle is provided with device (10) and frequency setter (11), wherein
1.1, signal generating module (2) is made up of U1 chip AD654 and peripheral circuit thereof, wherein, 4. the input terminus pin of U1 chip AD654 is electrically connected with the given port A of the frequency of two-way time block (1), 1. the output terminal pin is electrically connected with the input terminus of frequency multiplication frequency division module (3), is used to produce the square-wave signal of 10Hz～10KHz;
1.2, frequency multiplication frequency division module (3) is made up of U2 chip CD4046, U3 chip CD4518, U4 1/2 chip CD4518, U4 2/2 chip CD4518 and U5 chip CD4585, the U6 chip CD4585 and the peripheral circuit thereof that mutually are electrically connected successively, wherein, the input terminus pin of U2 chip CD4046
1. be electrically connected the output terminal pin of U6 chip CD4585 with the output terminal pin of signal generating module (2)
Be electrically connected the pin of U5 chip CD4585 and U6 chip CD4585 with the input terminus of four-quadrant multiplier module (4)
Pin 9., pin 1., pin
All be electrically connected with eight wiretaps that the dutycycle of two-way time block (1) is provided with port B control, be used for earlier 100 times of the frequency upgradings of the square wave of signal generating module (2) output, carry out frequency division again, and the output of device (10) is set according to dutycycle, obtain duty cycle range and be 5～98% output;
1.3, four-quadrant multiplier module (4) is made up of U7 chip MC1494 and peripheral circuit thereof, wherein, the input terminus pin of U7 chip MC1494 10. with the output terminal pin of the U6 chip CD4585 of frequency multiplication frequency division module (3)
Be electrically connected, 9. the input terminus pin of U7 chip MC1494 is electrically connected with the modulation signal port C of two-way time block (1), the output terminal pin
Be electrically connected with the input terminus of power amplifier module (6), be used for exporting required compound electric impulse signal after multiplying each other from the pulse high-frequency signal of frequency multiplication frequency division module (3) with from the modulation signal of modulation signal device (9);
1.4, power amplifier module (6) is made up of with U9 chip OPA551 cascade and peripheral circuit thereof U8 chip LF351, wherein, the input terminus pin of U8 chip LF351 2. with the output terminal pin of four-quadrant multiplier module (4)
3. electrical connection, pin are electrically connected with the level adjustment port D of two-way time block (1), 6. the output terminal pin of U9 chip OPA551 is electrically connected with output terminal (5), be used for required compound electric impulse signal is amplified to available power and sets quiescent point, so that the electric impulse signal of the required waveform of output terminal (5) output;
1.5, two-way time block (1) is by the synchronization timing switch DHC9A that has eight digit number word dial switch and two-way synchronizing relay and level regulator (7), modulation signal device (9), dutycycle is provided with the two-way output terminal of device (10) and frequency setter (11) and forms, wherein, the working coil of two-way synchronizing relay and synchronization timing switch DHC9A and its driving circuit polarity formula four blade double throw switch that is electrically connected to form, two group of eight road input terminus of said polarity formula four blade double throw switch respectively with the two-way output terminal (t1-7 of level regulator (7), t2-7), two-way output terminal (the t1-9 of modulation signal device (9), t2-9), dutycycle is provided with two synthetic port (t1-10 of the two-way output signal of device (10), t2-10), two-way output terminal (the t1-11 of frequency setter (11), t2-11) be electrically connected, one group of four road output terminal respectively with level adjustment port D, modulation signal port C, port B is set dutycycle and the given port A of frequency is electrically connected, be used on the eight digit number word dial switch of synchronization timing switch DHC9A, two groups of time period (t1 being set respectively with manual mode, t2) time, and the level regulator that will set respectively (7), modulation signal device (9), the output that dutycycle is provided with device (10) and frequency setter (11) exports corresponding module to synchronously via the polarity formula four blade double throw switch that synchronization timing switch DHC9A and two-way synchronizing relay constitute.
2. two-way modulation pulse electrochemical deposition apparatus according to claim 1 is characterized in that level regulator (7) is the voltage voltage regulation part, and (t1-7 t2-7) is the voltage output end that places two potentiometers on the device front panel respectively to its two-way output terminal.
3. two-way modulation pulse electrochemical deposition apparatus according to claim 1 is characterized in that modulation signal device (9) is the voltage voltage regulation part, its two-way output terminal (t1-9 t2-9) is the voltage output end that places two potentiometers on the device front panel respectively.
4. two-way modulation pulse electrochemical deposition apparatus according to claim 1 is characterized in that it is the 4-digit number dial switch that dutycycle is provided with device (10), and its two-way output terminal is the output terminal that places the 4-digit number dial switch on the device front panel.
5. two-way modulation pulse electrochemical deposition apparatus according to claim 1, it is characterized in that frequency setter (11) is the voltage voltage regulation part, (t1-11 t2-11) is the voltage output end that places two potentiometers on the device front panel respectively to its two-way output terminal.
6. two-way modulation pulse electrochemical deposition apparatus according to claim 1,2. the pin that it is characterized in that the U9 chip OPA551 of power amplifier module (6) 6. is connected with the tie point of feedback sample device (8) with pin through resistance (R21), is used for stablizing the output of power amplifier module (6).
7. two-way modulation pulse electrochemical deposition apparatus according to claim 6 is characterized in that feedback sample device (8) is a resistance (R22), the other end ground connection of said resistance (R22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200510094242A CN1924111B (en) | 2005-09-02 | 2005-09-02 | Two-way modulation pulse electrochemical deposition apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200510094242A CN1924111B (en) | 2005-09-02 | 2005-09-02 | Two-way modulation pulse electrochemical deposition apparatus |
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| CN1924111A CN1924111A (en) | 2007-03-07 |
| CN1924111B true CN1924111B (en) | 2010-05-05 |
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| CN200510094242A Expired - Fee Related CN1924111B (en) | 2005-09-02 | 2005-09-02 | Two-way modulation pulse electrochemical deposition apparatus |
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| CN104313657A (en) * | 2014-11-10 | 2015-01-28 | 临安振有电子有限公司 | Electro-deposition device of through hole of HDI printed circuit board |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2412322Y (en) * | 2000-03-27 | 2000-12-27 | 余兴东 | Bipolar pulse power source with two-way pulse differently controlled |
| CN1348254A (en) * | 2001-10-18 | 2002-05-08 | 上海复旦微电子股份有限公司 | Product-to-pulse conversion method and circuit |
| CN2588652Y (en) * | 2002-11-26 | 2003-11-26 | 北京理工大学 | High-frequency group pulse power supply |
-
2005
- 2005-09-02 CN CN200510094242A patent/CN1924111B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2412322Y (en) * | 2000-03-27 | 2000-12-27 | 余兴东 | Bipolar pulse power source with two-way pulse differently controlled |
| CN1348254A (en) * | 2001-10-18 | 2002-05-08 | 上海复旦微电子股份有限公司 | Product-to-pulse conversion method and circuit |
| CN2588652Y (en) * | 2002-11-26 | 2003-11-26 | 北京理工大学 | High-frequency group pulse power supply |
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