CN1917144A - Method for forming doping region in embedding type - Google Patents
Method for forming doping region in embedding type Download PDFInfo
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- CN1917144A CN1917144A CN 200510091948 CN200510091948A CN1917144A CN 1917144 A CN1917144 A CN 1917144A CN 200510091948 CN200510091948 CN 200510091948 CN 200510091948 A CN200510091948 A CN 200510091948A CN 1917144 A CN1917144 A CN 1917144A
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- formation method
- doping region
- substrate
- insulating barrier
- silicon oxide
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- 238000000034 method Methods 0.000 title claims abstract description 114
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 239000004065 semiconductor Substances 0.000 claims abstract description 44
- 230000015572 biosynthetic process Effects 0.000 claims description 60
- 230000004888 barrier function Effects 0.000 claims description 57
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 50
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 16
- 238000005229 chemical vapour deposition Methods 0.000 claims description 13
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 10
- 238000005468 ion implantation Methods 0.000 claims description 10
- 238000000059 patterning Methods 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 5
- 238000003701 mechanical milling Methods 0.000 claims description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 229920005591 polysilicon Polymers 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 238000002955 isolation Methods 0.000 abstract description 18
- 150000002500 ions Chemical class 0.000 abstract description 12
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- HAYXDMNJJFVXCI-UHFFFAOYSA-N arsenic(5+) Chemical compound [As+5] HAYXDMNJJFVXCI-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- -1 boron ion Chemical class 0.000 description 1
- 230000005465 channeling Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The method includes steps: forming a first isolation layer on provided substrate; patternizing first isolation layer to form an opening extended to first direction; forming embedded type doping area on substrate exposed on the opening; next, being formed on substrate, second isolation layer fills in the opening; the said second isolation layer and the first isolation layer constitute the third isolation layer; patternizing the third isolation layer to form an isolation layer, and to expose substrate and embedded type doping area; the isolation layer is extended to second direction, which is staggered to the said first direction; forming semiconductor layer on substrate to fill in areas on two sides of isolation layer. Forming embedded type doping area first, and then forming isolation layer, the invention can reduce energy for injecting ions.
Description
Technical field
The present invention relates to a kind of manufacture method of semiconductor component structure, particularly relate to a kind of method that under separator, forms doping region in embedding type.
Background technology
In semiconductor element, (Metal Oxide Semiconductor MOS) because its power consumption is very little, and is fit to plurality of advantages such as highdensity integrated manufacturing in metal-oxide-semiconductor (MOS), for in the semiconductor technology now, most important and most widely used a kind of semiconductor element.
Generally speaking, the grid of metal-oxide-semiconductor element and source/drain regions normally are produced on the surface of substrate.Grid is arranged on wafer surface, and source/drain regions is arranged in the grid substrate on two sides, and is then parallel with substrate surface at the channel region below the grid and between source/drain regions, that is so-called horizontal passage.Yet along with the increase of the integrated level (Integration) of semiconductor element, relative metal-oxide-semiconductor element size also reduces thereupon.When metal-oxide-semiconductor element dwindles, then the length of passage (ChannelLength) also reduces thereupon, and then the service speed of semiconductor element will be accelerated.But, the length of passage can not unconfinedly be dwindled, when the contraction in length of passage to a certain degree, then cause easily abnormal electrical perforation (Punch Through) takes place between drain electrode and source electrode, and so-called short-channel effect (Short Channeling Effect) such as thermoelectronic effect, so will have a strong impact on the electrical performance of element.
On the other hand, the passage length of above-mentioned horizontal passage is normally determined by grid length.And grid utilizes photoetching (Photolithography) and engraving method to make.But photoetching process has so-called critical size (Critical Dimension, problem CD), and limited dwindling of grid live width (LineWidth), and be unfavorable for further dwindling of semiconductor element.
So at present industry develops and a kind of plough groove type semiconductor component technology, and metal-oxide-semiconductor element is produced in the groove.For instance, source/drain regions is formed on the top and the bottom of groove separately, and grid is arranged in the groove, and the channel region between source/drain regions is then vertical with substrate surface, that is so-called rectilinear passage.Because being the degree of depth by groove, the passage length of plough groove type semiconductor element decides, therefore can avoid critical size (Critical Dimension, problem CD), and can dwindle size of component of photoetching process, reduce it and on wafer, account for cloth area, increase the element integrated level.
Yet in above-mentioned plough groove type semiconductor element, one of them of source/drain regions (doped region) is arranged on channel bottom.And this source/drain regions (doped region) normally at component isolation structure (for example: fleet plough groove isolation structure (Shallow Trench Isolation, STI)) finish after, carry out ion implantation technology again and in component isolation structure element bottom and channel bottom form it.Because in ion implantation technology, need make alloy pass component isolation structure (fleet plough groove isolation structure), not only make the degree of depth of the injection phase of alloy increase and be difficult to the controlled doping thing and inject the degree of depth, also need improve and inject energy of ions (Energy).Therefore, not only make ion implantation technology become wayward, also can increase the technology cost simultaneously.
Summary of the invention
In view of this, purpose of the present invention is exactly that a kind of formation method of doping region in embedding type is being provided, and forms doping region in embedding type earlier, forms separator more thereon, lowers the degree of depth that ion injects, so can reduce the injection energy of ions.
The present invention proposes a kind of formation method of doping region in embedding type, and the method at first provides a substrate.In substrate, form first insulating barrier then.Afterwards, this first insulating barrier of patterning is to form the opening that extends toward first direction.Then, in the substrate that opening exposed, form a doping region in embedding type.Then, form second insulating barrier in substrate, this second insulating barrier fills up opening at least, and constitutes the 3rd insulating barrier with first insulating barrier.Then, patterning the 3rd insulating barrier to be to form a separator and to expose substrate and doping region in embedding type, and wherein separator extends toward second direction, and second direction is interlocked with first direction.Afterwards, in substrate, form semi-conductor layer.
According to the formation method of the described doping region in embedding type of the preferred embodiments of the present invention, above-mentioned semiconductor layer exposes separator at least.
Formation method according to the described doping region in embedding type of the preferred embodiments of the present invention, the method of above-mentioned formation semiconductor layer for example is chemical vapour deposition technique (Chemical Vapor Deposition, CVD), employed reacting gas for example is silicomethane (SiH
4, Silane).
According to the formation method of the described doping region in embedding type of the preferred embodiments of the present invention, the formation method of above-mentioned semiconductor layer comprises chemical vapour deposition technique or epitaxial silicon method (Epitaxy).The material of semiconductor layer comprises monocrystalline silicon, polysilicon, amorphous silicon.The formation method of semiconductor layer comprises uses silicomethane as reacting gas.
According to the formation method of the described doping region in embedding type of the preferred embodiments of the present invention, the formation method of above-mentioned first insulating barrier and second insulating barrier comprises chemical vapour deposition technique.The material of first insulating barrier and second insulating barrier comprises silica.The formation method of first insulating barrier and second insulating barrier comprises use silicomethane or tetraethoxysilane, and (Tetraethylorthosilicate is TEOS) as reacting gas.
According to the formation method of the described doping region in embedding type of the preferred embodiments of the present invention, above-mentioned after forming the step of second insulating barrier in the substrate, also comprise and carry out flatening process.Flatening process comprises chemical mechanical milling method or eat-backs method.And flatening process can only be removed partly uneven second insulating barrier and not expose first insulating barrier or expose first insulating barrier, or remove partly first insulating barrier and second insulating barrier simultaneously, make the thickness attenuation of the two the 3rd insulating barrier that constitutes.Therefore, promptly can control the thickness of the 3rd insulating barrier by controlling flatening process, the height of the separator that has formed after just having controlled.
According to the formation method of the described flush type doping of the preferred embodiments of the present invention passage, the method for above-mentioned formation doping region in embedding type for example is an ion implantation.
The invention provides a kind of formation method of doping region in embedding type, the method provides substrate earlier.In formation first silicon oxide layer in this substrate, and patterning first silicon oxide layer is to form an opening that exposes substrate, the past first direction extension of this opening.In the substrate that this opening exposed, form a doping region in embedding type.After second silicon oxide layer of opening was filled up in formation in the substrate, planarization second silicon oxide layer made second silicon oxide layer and first silicon oxide layer constitute the 3rd silicon oxide layer.Patterning the 3rd silicon oxide layer to be forming a separator, and exposes part substrate and doping region in embedding type, and separator extends toward a second direction, and second direction and first direction interlock.Afterwards, in substrate, form semiconductor layer and expose separator at least.
According to the formation method of the described flush type doping of the preferred embodiments of the present invention passage, the formation method of above-mentioned semiconductor layer comprises chemical vapour deposition technique or epitaxial silicon method.The material of semiconductor layer comprises monocrystalline silicon, polysilicon, amorphous silicon.
According to the formation method of the described flush type doping of the preferred embodiments of the present invention passage, the method that forms first silicon oxide layer and second silicon oxide layer comprises chemical vapour deposition technique.The method of this first silicon oxide layer of above-mentioned formation and this second silicon oxide layer comprises use silicomethane or tetraethoxysilane, and (Tetraethylorthosilicate is TEOS) as reacting gas.
According to the formation method of the described flush type doping of the preferred embodiments of the present invention passage, in the step of planarization second silicon oxide layer, also comprise removing part first silicon oxide layer.The method of planarization second silicon oxide layer comprises chemical mechanical milling method or eat-backs method.And planarization second silicon oxide layer can only be removed partly uneven second silicon oxide layer and not expose first silicon oxide layer or expose first silicon oxide layer, or remove partly first silicon oxide layer and second silicon oxide layer simultaneously, make the thickness attenuation of the two the 3rd silicon oxide layer that constitutes.Therefore, promptly can control the thickness of the 3rd silicon oxide layer by controlling flatening process, the height of the separator that has formed after just having controlled.
According to the formation method of the described flush type doping of the preferred embodiments of the present invention passage, the formation method of above-mentioned doping region in embedding type comprises ion implantation.
The present invention forms doping region in embedding type earlier because adopt, form the method for separator more thereon, so when forming doping region in embedding type, alloy does not need to pass the degree of depth of component isolation structure, so the degree of depth that ion injects can reduce, and can reduce the injection energy of ions.And, because the degree of depth that ion injects reduces, therefore can reduce the control difficulty of ion implantation technology, also can reduce the technology cost simultaneously.
For above and other objects of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. is described in detail below.
Description of drawings
Figure 1A-1E illustrates and is the formation method flow profile according to a kind of doping region in embedding type of the preferred embodiments of the present invention.
The simple symbol explanation
100: substrate
120,140,160: insulating barrier
122: opening
124: doping region in embedding type
142,144: direction
160a: separator
164: semiconductor layer
Embodiment
Figure 1A to Fig. 1 E illustrates and is the formation method flow profile according to a kind of doping region in embedding type of the preferred embodiments of the present invention.For clear and simple explanation, illustrated in Fig. 1 E at Figure 1A is the manufacturing process that has only single doping region in embedding type, but in fact can be formed with a lot of bar doping region in embedding type under separator.
Please earlier with reference to Figure 1A, at first provide substrate 100, it for example is a silicon base.Then, in substrate 100, form insulating barrier 120.The material of this insulating barrier 120 for example is a silica.The formation method of insulating barrier 120 for example is a chemical vapour deposition technique.When the material of insulating barrier 120 was silica, employed reacting gas for example was silicomethane or tetraethoxysilane.Certainly the material of insulating barrier 120 also can be other other material with insulation characterisitic, as silicon nitride, silicon oxynitride or advanced low-k materials (dielectric constant is less than 4).
Then, please refer to Figure 1B, this insulating barrier 120 of patterning is to form opening 122, and this opening 122 extends toward direction 142.And the method for patterned insulation layer 120 for example is the photoengraving carving technology.Afterwards, in the substrate 100 that opening 122 is exposed, form doping region in embedding type 124.Wherein, the method that forms doping region in embedding type 124 for example is an ion implantation, and the ion of its injection comprises N type alloy or P type alloy, for example is boron ion or arsenic ion etc.
Then, please refer to Fig. 1 C, form another layer insulating 140 in substrate 100, this insulating barrier 140 fills up opening 122, and constitutes insulating barrier 160 with insulating barrier 120.The material of this insulating barrier 140 for example is a silica.The formation method of insulating barrier 140 for example is a chemical vapour deposition technique.When the material of insulating barrier 120 was silica, employed reacting gas for example was silicomethane or tetraethoxysilane.After forming the step of insulating barrier 140, for example can carry out flatening process earlier with insulating barrier 140 planarizations.Flatening process for example is chemical mechanical milling tech or eat-backs method.And flatening process can be controlled in and only removes uneven insulating barrier 140, and do not expose insulating barrier 120 or expose insulating barrier 120, or down remove insulating barrier 120 and insulating barrier 140 more simultaneously, make the thickness attenuation of the two insulating barrier that constitutes 160, therefore promptly can control the thickness of insulating barrier 160 by the control flatening process, the height of the separator 160a that has formed after just having controlled.
Then, please refer to Fig. 1 D, patterned insulation layer 160 to be forming separator 160a, and exposes part substrate 100 and part doping region in embedding type 124.And the method for patterned insulation layer 160 for example is the photoengraving carving technology.Shown in Fig. 1 D, separator 160a extends toward direction 144, and direction 144 is staggered with direction 142.
Afterwards, please refer to Fig. 1 E, in substrate 100, form semiconductor layer 164, and visual product needed and expose separator 160a, that is semiconductor layer 164 fills up the two side areas of separator 160a.The material of semiconductor layer 164 for example is monocrystalline silicon, polysilicon, amorphous silicon or other semi-conducting material such as germanium etc.When the material of semiconductor layer 164 was material, the formation method of semiconductor layer 164 for example was chemical vapour deposition technique or epitaxial silicon method, and employed reacting gas for example is a silicomethane etc.
In the formation method of above-mentioned doping region in embedding type, can optionally add etch stop layer, but this repeats no more for it be known to those skilled in the art that event with control technology.
In the formation method of above-mentioned doping region in embedding type, owing to form doping region in embedding type earlier, form separator more thereon, and be formed on the structure of the doping region in embedding type under the shallow trench isolated insulation layer, when therefore forming doping region in embedding type with ion implantation, the degree of depth of ion injection phase need not comprise the thickness of separator, so the degree of depth that ion injects is more shallow, so the formation method of a kind of doping region in embedding type of the present invention has the following advantages at least:
1. can reduce the injection energy of ions, and then reduce the technology cost.
2. the difficulty that makes the control ion inject the degree of depth reduces.
Though the present invention discloses as above with preferred embodiment; yet it is not in order to limit the present invention; those skilled in the art can do a little change and retouching without departing from the spirit and scope of the present invention, thus protection scope of the present invention should with accompanying Claim the person of being defined be as the criterion.
Claims (21)
1, a kind of formation method of doping region in embedding type, this method comprises:
One substrate is provided;
In this substrate, form one first insulating barrier;
This first insulating barrier of patterning is to form an opening that exposes this substrate, and this opening extends toward a first direction;
In this substrate that this opening exposed, form a doping region in embedding type;
Form one second insulating barrier that fills up this opening in this substrate, this second insulating barrier and first insulating barrier constitute one the 3rd insulating barrier;
Patterning the 3rd insulating barrier to be forming a separator, and exposes this substrate of part and this doping region in embedding type, and this separator extends toward a second direction, and this second direction and this first direction interlock; And
In this substrate, form semi-conductor layer.
2, the formation method of doping region in embedding type as claimed in claim 1, wherein the formation method of this semiconductor layer comprises chemical vapour deposition technique.
3, the formation method of doping region in embedding type as claimed in claim 1, wherein the formation method of this semiconductor layer comprises the epitaxial silicon method.
4, the formation method of doping region in embedding type as claimed in claim 2, wherein the material of this semiconductor layer comprises monocrystalline silicon, polysilicon, amorphous silicon.
5, the formation method of doping region in embedding type as claimed in claim 3, wherein the formation method of this semiconductor layer comprises that the use silicomethane is as reacting gas.
6, the formation method of doping region in embedding type as claimed in claim 1, the method that wherein forms this first insulating barrier and this second insulating barrier comprises chemical vapour deposition technique.
7, the formation method of doping region in embedding type as claimed in claim 1, wherein the material of this first insulating barrier and this second insulating barrier comprises silica.
8, the formation method of flush type doping passage as claimed in claim 7, the method that wherein forms this first insulating barrier and this second insulating barrier comprise uses silicomethane or tetraethoxysilane as reacting gas.
9, the formation method of flush type doping passage as claimed in claim 1 wherein after forming the step of this second insulating barrier in this substrate, also comprises and carries out flatening process.
10, the formation method of flush type doping passage as claimed in claim 9, wherein this flatening process comprises chemical mechanical milling method or eat-backs method.
11, the formation method of flush type doping passage as claimed in claim 1, wherein the formation method of this doping region in embedding type comprises ion implantation.
12, the formation method of flush type doping passage as claimed in claim 1, wherein this semiconductor layer exposes this separator at least.
13, a kind of formation method of doping region in embedding type, this method comprises:
One substrate is provided;
In this substrate, form one first silicon oxide layer;
This first silicon oxide layer of patterning is to form an opening that exposes this substrate, and this opening extends toward a first direction;
In this substrate that this opening exposed, form a doping region in embedding type;
In this substrate, form one second silicon oxide layer that fills up this opening;
This second silicon oxide layer of planarization makes this second silicon oxide layer and this first silicon oxide layer constitute one the 3rd silicon oxide layer;
Patterning the 3rd silicon oxide layer to be forming a separator, and exposes this substrate of part and this doping region in embedding type, and this separator extends toward a second direction, and this second direction and this first direction interlock; And
Form semi-conductor layer in this substrate, this semiconductor layer exposes this separator at least.
14, the formation method of doping region in embedding type as claimed in claim 13, wherein the formation method of this semiconductor layer comprises chemical vapour deposition technique.
15, the formation method of doping region in embedding type as claimed in claim 13, wherein the formation method of this semiconductor layer comprises the epitaxial silicon method.
16, the formation method of doping region in embedding type as claimed in claim 14, wherein the material of this semiconductor layer comprises monocrystalline silicon, polysilicon, amorphous silicon.
17, the formation method of doping region in embedding type as claimed in claim 13, the method that wherein forms this first silicon oxide layer and this second silicon oxide layer comprises chemical vapour deposition technique.
18, the formation method of flush type doping passage as claimed in claim 13, the method that wherein forms this first silicon oxide layer and this second silicon oxide layer comprise uses silicomethane or tetraethoxysilane as reacting gas.
19, the formation method of doping region in embedding type as claimed in claim 13 wherein in the step of this second silicon oxide layer of planarization, also comprises removing this first silicon oxide layer of part.
20, the formation method of flush type doping passage as claimed in claim 13, wherein the method for this second silicon oxide layer of planarization comprises chemical mechanical milling method or eat-backs method.
21, the formation method of flush type doping passage as claimed in claim 13, wherein the formation method of this doping region in embedding type comprises ion implantation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100919483A CN100392812C (en) | 2005-08-15 | 2005-08-15 | Method for forming doping region in embedding type |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100919483A CN100392812C (en) | 2005-08-15 | 2005-08-15 | Method for forming doping region in embedding type |
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| Publication Number | Publication Date |
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| CN1917144A true CN1917144A (en) | 2007-02-21 |
| CN100392812C CN100392812C (en) | 2008-06-04 |
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| JP3383377B2 (en) * | 1993-10-28 | 2003-03-04 | 株式会社東芝 | Vertical normally-on type power MOSFET having a trench structure and method of manufacturing the same |
| US6351009B1 (en) * | 1999-03-01 | 2002-02-26 | Fairchild Semiconductor Corporation | MOS-gated device having a buried gate and process for forming same |
| JP4091242B2 (en) * | 1999-10-18 | 2008-05-28 | セイコーインスツル株式会社 | Vertical MOS transistor and manufacturing method thereof |
| US6822288B2 (en) * | 2001-11-20 | 2004-11-23 | General Semiconductor, Inc. | Trench MOSFET device with polycrystalline silicon source contact structure |
| CN1193421C (en) * | 2003-02-14 | 2005-03-16 | 中国科学院上海微系统与信息技术研究所 | Method for forming graphical oxygen injection and separator with shallow grooves at same time |
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