CN1897453A - Method for improving permanent-magnetic linear motor motion precision - Google Patents
Method for improving permanent-magnetic linear motor motion precision Download PDFInfo
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- CN1897453A CN1897453A CNA2006100277062A CN200610027706A CN1897453A CN 1897453 A CN1897453 A CN 1897453A CN A2006100277062 A CNA2006100277062 A CN A2006100277062A CN 200610027706 A CN200610027706 A CN 200610027706A CN 1897453 A CN1897453 A CN 1897453A
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Abstract
The method comprises: based on the linear motor control ring composed of PID control module, driver and motor, an accuracy table is added in front of the driver; when the motor reaches a position recorded in the accuracy table, a feed-forward control signal is added in term of the secondary force value in the table such that a reversed force is applied so as to lower the level of system fluctuate.
Description
Affiliated technical field
The present invention relates to the electrical engineering field, particularly about a kind of method that improves permanent-magnetic linear motor motion precision.
Background technology
Linear electric motors are one of core components of mask aligner as the ultraprecise work stage of mask aligner, and its kinematic accuracy directly influences the resolving power of mask aligner.Because mask aligner belongs to precision equipment, very high to the required precision of its kinematic system, so linear electric motors as Primary Location device wherein, its precision also needs to reach micron order.Therefore, how further to improve the system motion precision, become the problem of a lot of professional person's researchs.
In Chinese patent CN1592051 number, disclosed linear electric motors by improving supporting, radiator structure, methods such as vibration isolation improve precision.But this method, precision improve and to be limited in scope, and processing, design difficulty are very high.Therefore, the present invention adopts the improvement control method to improve precision.
Control method has a lot, mainly in industrial SERVO CONTROL field adopts PID control (proportion integration differentiation control), but owing to there being non-linear factors such as force oscillation, load variations, frictional force, high-precision equipment is had seriously influence.In Chinese patent CN1536456 number, disclosed a kind of fuzzy Self-adjusting PID Control method of linear electric motors, wherein propose to adopt the method for fuzzy control, can improve precision and response speed to a certain extent, be limited in scope but improve, in case and fuzzy control model carry out with regard to immutable system accuracy.This method is the requirement that can't satisfy the change control precision in the high-accuracy mask aligner kinematic system.
Please refer to Fig. 1, Fig. 1 is the equilbrium position schematic diagram of magnet and coil, and in the linear motor, magnet and coil are because magnetic attraction has been produced into a series of equilbrium positions, and the attraction that coil is subjected to magnet moves to the position that tends to be balanced.Coil is moved away the equilbrium position or coil is shifted to the power that the equilbrium position need be bigger.Please refer to Fig. 2, Fig. 2 is linear electric motors stressed schematic diagrames in motion process, and therefrom the power that is subjected in motion process of linear electric motors fluctuates as can be seen.Because the fluctuation of power, the mover of linear electric motors can cause the instability of motion under inertia effects, causes that displacement accuracy descends.
Summary of the invention
For solving above-mentioned prior art problem, the invention provides a kind of method that improves permanent-magnetic linear motor motion precision, adopt feedfoward control to improve output pulsation, under the prerequisite that does not increase the control complexity, improve linear motor motion precision, reduce hardware, improve the reliability of system.
The method of raising permanent-magnetic linear motor motion precision provided by the invention, for pid control module, driver, sequence motor connect, on the basis of linear AC motor closed-loop control, before driver, add correction chart, when position that motor movement is write down in correction chart, just, add feed-forward control signals, to offset magnetic force by the value of the additional force in the table.
Wherein said correction chart is made up of the additional force of certain movement scope internal fixation a series of positions at interval, its scope (original position and final position) is determined by the needed pinpoint scope of equipment, the more little then motion of fixed intervals tends to be steady more, and precision is high more.This correction chart is by travel motor within the specific limits, and gathers the current signal and the position signalling of motor simultaneously, and current value is scaled the power value, again the data that collect is carried out data processing and obtains.
Owing to adopt feedforward, can utilize simple as far as possible method to realize that feedfoward control to improve output pulsation, improves positional precision simultaneously under the prerequisite that does not increase the control complexity, reduce hardware, improved the reliability of system.
Description of drawings
Fig. 1 is magnet and coil and equilbrium position schematic diagram thereof.
Fig. 2 is a stressed schematic diagram in the linear electric motors motion process.
Fig. 3 is a structural representation of the present invention.
Embodiment
The invention relates to a kind of method that improves permanent-magnetic linear motor motion precision.A specific embodiment of the present invention is: earlier with the zero clearing of feed-forward signal table, the size of table is according to the operational capability of system, and range of movement is determined.Then, the control motor moves to original position, moves to final position (just can fine compensation magnetic force influence) with slower speed; Utilize the station acquisition transducer, for example known encoder, a kind of grating chi, can be by the collection position information that relatively moves, precision can reach micron order, gather actual displacement information, gather the pairing electromagnetic force in each position (current value of pairing motor is converted to the power value, and the relation between electric current and the power value is linear) simultaneously.Move to original position from final position with slower speed again, carry out the signals collecting of position and electromagnetic force simultaneously.Then,, average, from these group data, deduct mean value, promptly only stay undulating value the forward signal (current value of linear motor is through being scaled the power value) of gathering.Re-use filtering algorithm, for example known low-pass filtering algorithm carries out signal to it and filters; Again array is inverted and re-uses a filtering, array is inverted back former sequence, can reduce distortion by real more reflected signal like this.It uses data processing method, can adopt known linear interpolation method, determines the value of the additional force on each physical location.Then, more reverse data are done the processing same with forward data.Like this, same position just has two data (value of additional force), and it is averaged as the value of correction chart at this locational additional force.At last, find out maximum, minimum value in the correction chart, whether the difference of judging both is less than the scope that allows fluctuation, if the correction chart and the former correction chart that do not satisfy then will this time obtain add up as new correction chart, this time needn't zero clearing, begin to carry out new sampling and data processing again, till the difference of the maximum of resultant new correction chart, minimum value satisfies condition (being determined by needed precision).
In the Electric Machine Control process, during the position that in running to correction chart, keeps a record, with introducing the value of the additional force that writes down in the feed-forward signal correction chart and it being converted into the magnitude of current, as the input variable of Electric Machine Control.In addition, use the correction chart front and back, gathering electric electromechanics magnetic force signal, can calculate its undulate quantity.Before not using correction chart, the electromagnetic force fluctuation that collects linear electric motors reaches 25 newton, and through after the calibration of correction chart, the fluctuation of the electromagnetic force of the motor of collection can be reduced to 0.25 newton.
Below in conjunction with accompanying drawing and specific embodiments, the present invention is further illustrated.
Fig. 1 is magnet and coil and equilbrium position schematic diagram thereof.Magnet and the coil of 1 expression in the linear motor, because the attraction of magnetic force produced into a series of equilbrium positions 2, and coil is subjected to the attraction of magnet and moves to the position that tends to be balanced.
Fig. 2 is a stressed schematic diagram in the linear electric motors motion process.Because coil is moved away the equilbrium position or coil is shifted to the power that the equilbrium position need be bigger, so linear electric motors suffered power in motion process fluctuates, the curve of cyclical fluctuations 4 is between fluctuation range 3.
Fig. 3 is a structural representation of the present invention.Pid control module, driver, sequence motor connect, and form the closed-loop control of linear AC motor, add correction chart before driver, when position that motor movement is write down in correction chart, just, add feed-forward control signals, to offset magnetic force by the value of the additional force in the table.
That more than introduces only is based on preferred embodiment of the present invention, can not limit scope of the present invention with this.Any device of the present invention is done replacement, the combination, discrete of parts well know in the art, and the invention process step is done well know in the art being equal to change or replace and all do not exceed exposure of the present invention and protection range.
Claims (3)
1, a kind of method that improves permanent-magnetic linear motor motion precision, pid control module, driver, sequence motor connect, it is characterized in that on the basis of linear AC motor closed-loop control, before driver, add correction chart, when position that motor movement is write down in correction chart, just, add the feed-forward control signals of offsetting magnetic force by the value of the additional force in the table.
2, the method for raising permanent-magnetic linear motor motion precision as claimed in claim 1, it is characterized in that described correction chart is made up of the additional force of certain movement scope internal fixation a series of positions at interval, its original position and final position are definite by the needed pinpoint scope of equipment.
3, the method for raising permanent-magnetic linear motor motion precision as claimed in claim 1, it is characterized in that described correction chart, be by travel motor within the specific limits, and gather the current signal and the position signalling of motor simultaneously, current value is scaled the power value, again the data that collect is carried out data processing and obtain.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006100277062A CN100388620C (en) | 2006-06-13 | 2006-06-13 | Method for improving permanent-magnetic linear motor motion precision |
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| CNB2006100277062A CN100388620C (en) | 2006-06-13 | 2006-06-13 | Method for improving permanent-magnetic linear motor motion precision |
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| CN1897453A true CN1897453A (en) | 2007-01-17 |
| CN100388620C CN100388620C (en) | 2008-05-14 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103901904A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Motor position disturbance force calibration method |
| CN104796061A (en) * | 2014-03-18 | 2015-07-22 | 珍妮科学股份公司 | Force calibration, force calculation and force limit methods for iron core linear motors |
| CN106100494A (en) * | 2016-05-20 | 2016-11-09 | 瑞声科技(新加坡)有限公司 | The drive system of linear electric machine and driving method thereof |
| CN109358492A (en) * | 2018-10-31 | 2019-02-19 | 电子科技大学 | A kind of photo-etching machine work-piece platform motion control method |
| CN111610715A (en) * | 2020-04-23 | 2020-09-01 | 清华大学 | Self-adaptive recursive feedforward control method of linear motion system |
| CN112234890A (en) * | 2020-09-21 | 2021-01-15 | 瑞声新能源发展(常州)有限公司科教城分公司 | Method for suppressing thrust fluctuation of linear motor, related equipment and medium |
| CN112234892A (en) * | 2020-09-21 | 2021-01-15 | 瑞声新能源发展(常州)有限公司科教城分公司 | Method for suppressing thrust fluctuation of linear motor, related equipment and medium |
| CN112234893A (en) * | 2020-09-21 | 2021-01-15 | 瑞声新能源发展(常州)有限公司科教城分公司 | Method for suppressing thrust fluctuation of linear motor, related equipment and medium |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE509586C2 (en) * | 1997-06-12 | 1999-02-15 | Lidkoeping Machine Tools Ab | Apparatus and method for compensating the deformation of a machine element and any supporting means |
| US6850398B2 (en) * | 2001-06-07 | 2005-02-01 | Xicor, Inc. | Feed forward programmable current controller |
| CN1259773C (en) * | 2004-01-18 | 2006-06-14 | 桂林星辰电力电子有限公司 | Compensate control method for AC servo motor moment disturbance |
| JP2005299813A (en) * | 2004-04-13 | 2005-10-27 | Mitsubishi Electric Corp | Magnetic supporting device |
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2006
- 2006-06-13 CN CNB2006100277062A patent/CN100388620C/en active Active
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103901904A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Motor position disturbance force calibration method |
| CN103901904B (en) * | 2012-12-28 | 2016-09-28 | 上海微电子装备有限公司 | A kind of motor position perturbed force calibration steps |
| CN104796061A (en) * | 2014-03-18 | 2015-07-22 | 珍妮科学股份公司 | Force calibration, force calculation and force limit methods for iron core linear motors |
| CN106100494A (en) * | 2016-05-20 | 2016-11-09 | 瑞声科技(新加坡)有限公司 | The drive system of linear electric machine and driving method thereof |
| CN109358492A (en) * | 2018-10-31 | 2019-02-19 | 电子科技大学 | A kind of photo-etching machine work-piece platform motion control method |
| CN111610715A (en) * | 2020-04-23 | 2020-09-01 | 清华大学 | Self-adaptive recursive feedforward control method of linear motion system |
| CN111610715B (en) * | 2020-04-23 | 2021-07-13 | 清华大学 | Self-adaptive recursive feedforward control method of linear motion system |
| CN112234890A (en) * | 2020-09-21 | 2021-01-15 | 瑞声新能源发展(常州)有限公司科教城分公司 | Method for suppressing thrust fluctuation of linear motor, related equipment and medium |
| CN112234892A (en) * | 2020-09-21 | 2021-01-15 | 瑞声新能源发展(常州)有限公司科教城分公司 | Method for suppressing thrust fluctuation of linear motor, related equipment and medium |
| CN112234893A (en) * | 2020-09-21 | 2021-01-15 | 瑞声新能源发展(常州)有限公司科教城分公司 | Method for suppressing thrust fluctuation of linear motor, related equipment and medium |
| WO2022056977A1 (en) * | 2020-09-21 | 2022-03-24 | 瑞声声学科技(深圳)有限公司 | Method for suppressing thrust fluctuation of linear motor, and related device and medium |
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| CN100388620C (en) | 2008-05-14 |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |