CN1895798A - Electrochemical cleaning method for liquid crystal display screen - Google Patents
Electrochemical cleaning method for liquid crystal display screen Download PDFInfo
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- CN1895798A CN1895798A CN 200610014442 CN200610014442A CN1895798A CN 1895798 A CN1895798 A CN 1895798A CN 200610014442 CN200610014442 CN 200610014442 CN 200610014442 A CN200610014442 A CN 200610014442A CN 1895798 A CN1895798 A CN 1895798A
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- 238000000034 method Methods 0.000 title claims abstract description 37
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- 239000010432 diamond Substances 0.000 claims abstract description 51
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- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 10
- 238000012856 packing Methods 0.000 claims description 7
- ZZVUWRFHKOJYTH-UHFFFAOYSA-N diphenhydramine Chemical compound C=1C=CC=CC=1C(OCCN(C)C)C1=CC=CC=C1 ZZVUWRFHKOJYTH-UHFFFAOYSA-N 0.000 claims description 2
- 229920000768 polyamine Polymers 0.000 claims description 2
- 229920005862 polyol Polymers 0.000 claims description 2
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- 238000005507 spraying Methods 0.000 abstract 1
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- 239000008367 deionised water Substances 0.000 description 15
- 229910021641 deionized water Inorganic materials 0.000 description 15
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 8
- 239000003795 chemical substances by application Substances 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 239000003643 water by type Substances 0.000 description 8
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- 239000007800 oxidant agent Substances 0.000 description 6
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 5
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- LDTRLQFRPHFLGA-UHFFFAOYSA-N 2-[bis(2-hydroxyethyl)amino]ethanol;decanedioic acid Chemical compound OCCN(CCO)CCO.OC(=O)CCCCCCCCC(O)=O LDTRLQFRPHFLGA-UHFFFAOYSA-N 0.000 description 1
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- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
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- Liquid Crystal (AREA)
- Detergent Compositions (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses an electrochemical cleaning method for a liquid crystal display screen, and aims to provide a cleaning method for the liquid crystal display screen, which can achieve a better cleaning effect by combining a diamond film and a cleaning agent, has the advantages of simple process, convenience in operation and long service life, and meets the requirement of environmental protection. The method comprises the following steps: cleaning the diamond film by matching with a cleaning agent; cleaning with a cleaning agent; cleaning a diamond film; carrying out ultrasonic rinsing with water twice; spraying; and drying to obtain the high-cleanness liquid crystal display screen. The cleaning agent comprises the following components in percentage by volume: 30-45% of amine alkali, 1-5% of nonionic surfactant and the balance of water. The diamond film structure in the cleaning method can control the oxidation strength according to the current, does not depend on the ultrasonic action and does not need to be heated. The cleaning agent is water-soluble cleaning agent, which can remove organic pollutants remained on the surface of the wafer and can also remove pollutants such as particles or metal ions on the surface.
Description
Technical field
The invention belongs to electron trade and clean field, particularly a kind of electrochemistry cleaning method that is applicable to LCDs.
Background technology
Along with the development of microelectric technique, market is also increasing to the demand of various electronic products.At present, be that the various flat-panel monitors of representative have obtained developing rapidly with LCD (LCD), 21st century will be the epoch of novel flat-plate Display Technique great development.Liquid crystal is a kind of liquid crystal, and it is the bar-shaped molecule of leaning on the type symmetry, and the chemical radicals with forceful electric power dipole moment and polarization easily constitutes, and is rendered as anisotropic liquid.Liquid crystal display has characteristics such as low-voltage, power consumption are little, is fit to be complementary with CMOS transistor (CMOS) integrated circuit, and therefore available chemical cell is done power supply, is used on the various portable displays.The demonstration body of liquid crystal itself is not luminous, but shows by the passive type of modulation ambient light, therefore can not stimulate eyes, be not easy to produce tired, and radiation low, the people is safe from harm, the output value of LCD accounts for 87% in the flat-panel monitor at present.After having poured into liquid crystal in the LCDs production process, requirement is cleaned for residual liquid crystal around sealing and in the crack, not only to clean the residual liquid crystal of removal and also will remove all contaminations such as particle, organic matter and metal ion, and can not destroy electrode and sealing compound.Therefore cleaning is one critical process in the LCDs production process.Cleaning performance directly influences the reliability and the yield rate of LCD.
Residual pollutant mainly includes residual liquid crystal, chips of glass, finger mark and other dust granules things etc. on the liquid crystal cell.There are two big insoluble problems in the LCD cleaning at present: the one, and the liquid crystal and the pollutant that remain in the crack are difficult to thorough removal; The 2nd, selected cleaning agent must satisfy environmental requirement at present.
The prior liquid crystal display cleaning agent mainly is divided into two kinds of half aqueous cleaning agent and aqueous cleaning agents.Half aqueous cleaning agent adopts two step ablutions, at first utilize leaning solvent to dissolve the liquid crystal that remains in liquid crystal display screen surfaces and the slit, and then adopt the aqua type cleaning agent to remove leaning solvent and the pollutions such as particle, fingerprint that remain in liquid crystal display screen surfaces and the slit.Leaning solvent in the half water base cleaning way, exist and damage the ozone layer, be discontented with problems such as toe ring guaranteed request, easy firing, cost height, operational hazards, simultaneously in the second step aqueous cleaning agent cleaning process, often be difficult to the leaning solvent that remains in liquid crystal display screen surfaces and the slit is removed fully, clean the rear surface and have cotton-shaped pollution.Water base cleaning method is to adopt water-soluble washing agent, utilizes the effect of emulsification, decomposition to cooperate ultrasonic wave to remove residual liquid crystal and other pollutants in liquid crystal display screen surfaces and the slit.This aqua type cleaning method, come with some shortcomings: at first, the aqua type cleaning agent is strong to the ultrasonication dependence, often can not remove liquid crystal residual in the LCDs slit fully, and aqua type cleaning agent sustainability is relatively poor, along with the increase cleaning performance of scavenging period constantly descends.In addition, its raffinate is handled and also there are a large amount of environmental issues in the discharging of residual reagent.
Simple cleaning agent cleans and also has following problems:
The one, simple cleaning agent cleans often need add oxidant in cleaning, as hydrogen peroxide, oxidant has certain solubility in solution, when liquid crystal content oxidizing intensity deficiency more for a long time, can cause cleaning not thorough, clean residual liquid crystal in the LCDs slit of back.
The 2nd, oxidant has certain life-span in solution, and along with the carrying out of cleaning, the oxidability of solution can descend thereupon, causes cleaning agent endurance poor.
Summary of the invention
The present invention is in order to overcome weak point of the prior art, provide a kind of and utilize diamond film to combine can to reach cleaning performance preferably, and technology is simple with cleaning agent, easy to operate, long service life satisfies the LCDs cleaning method of environmental requirement.
The present invention is achieved through the following technical solutions:
The cleaning method that utilizes the diamond film electrochemical effect to remove pollutant in liquid crystal display screen surfaces and the slit of the present invention, it is to be closed and can be played the electrolyte effect by the diamond film structure that can play the effect of oxidation Decomposition liquid crystal, and the cleaning agent that can remove LCD panel remained on surface material is formed jointly.The diamond film structure utilizes diamond film to make anode, graphite is made negative electrode, add electrolyte between the two poles of the earth, will produce a large amount of free hydroxys (OH), free oxygen base (O) and derivative hydrogen peroxide, ozone and oxygen at anode so, control its concentration by the control electric current then.Wherein cleaning agent is made up of kinds of surface activating agent and amine alkali.This method comprises the steps:
(1) diamond film cooperates cleaning agent to clean: in a groove, be anode with the diamond film, graphite is negative electrode, add cleaning agent between the two poles of the earth and add 8～15 times of water as electrolyte, with the LCDs gaily decorated basket of packing into, be immersed in wherein, room temperature was cleaned about 5～10 minutes.Above-mentioned cleaning agent by volume percentage is made up of following component: amine alkali 30%～45%, non-ionic surface active agent 1%～5%, the water of surplus.This step mainly is the oxidants such as hydroxyl free radical, oxygen radical, ozone, oxygen molecule and hydrogen peroxide that utilize diamond film to produce under the electric current and voltage effect, residual liquid crystal in liquid crystal display screen surfaces and the slit is carried out oxidation Decomposition, make it break away from LCDs.
(2) cleaning agent cleans: put into second groove with adding 8～15 times of water in the cleaning agent, and be heated to 50～60 ℃, the LCDs gaily decorated basket is taken out from a groove, put into two grooves, cooperate the ultrasonic wave effect to clean about 5～10 minutes.Above-mentioned cleaning agent by volume percentage is made up of following component: amine alkali 30%～45%, non-ionic surface active agent 1%～5%, the water of surplus.The main effect in this step is to utilize cleaning agent to reduce surface tension and strengthen the effect that quality is transmitted, and makes the liquid crystal after the oxidation Decomposition in time break away from LCDs, removes pollutants such as particle and impression of the hand simultaneously.
(3) diamond film cleans: in three-flute, be anode with the diamond film, graphite is negative electrode, adds entry between the two poles of the earth as electrolyte, and the LCDs gaily decorated basket is taken out from two grooves, puts into three-flute, and room temperature was cleaned about 5～10 minutes.The main effect in this step is an oxidation of utilizing diamond film to produce under the voltage and current effect, removes liquid crystal and the cleaning agent remain in wafer surface, makes no longer to have any pollutant in liquid crystal display screen surfaces and the slit.
(4) the ultrasonic rinsing of water: water is put into four grooves, be heated to 50～60 ℃, the LCD gaily decorated basket is taken out from three-flute, put into four grooves, carried out ultrasonic rinsing about 5～10 minutes.The main effect in this step is residual various materials in cleaning fluid crystal display screen surface and the slit, LCDs is residual product of meeting and cleaning agent after process diamond film electrochemical effect and cleaning agent cleaning, utilize the water ultrasonication to carry out rinsing, reach various residual purposes in thorough removal liquid crystal display screen surfaces and the slit.
(5) the ultrasonic rinsing of water: water is put into the 5th groove, be heated to 50～60 ℃, the LCD gaily decorated basket is taken out from four grooves, put into five grooves, carried out ultrasonic rinsing about 5～10 minutes.The main effect in this step is residual various materials in cleaning fluid crystal display screen surface and the slit, LCDs is residual product of meeting and cleaning agent after process diamond film electrochemical effect and cleaning agent cleaning, utilize the deionized water ultrasonication to carry out rinsing, reach various residual purposes in thorough removal liquid crystal display screen surfaces and the slit.
(6) spray: with temperature is that 50～60 ℃ deionized water sprays LCDs, removes surperficial various residual.The general time is 2～5 minutes.The main effect in this step is with the rinsing once more of pure water, removes the residual various materials of wafer surface in the spray process.
(7) oven dry: with hot blast or infrared the oven dry, the general time is 3～5 minutes.The main effect in this step is to remove at the water that cleans and the spray rear surface is adhered to, and reaches the purpose of thorough cleaning, obtains high clean LCDs.
In the employed cleaning agent, it is non-ionic surface active agent or polyol ester class non-ionic surface active agent that surfactant can adopt polyoxyethylene in the above-mentioned cleaning method.Polyoxyethylene is non-ly to comprise polyoxyethylene alkylphenol, polyoxyethylene fatty alcohol and polyoxyethylene ester from surfactant.Amine alkali is many hydroxyls polyamines and hydramine.Water comprises deionized water and distilled water, the deionization resistivity of water be 15～18,000,000 o'clock for best, deionized water resistivity is that 10～15,000,000 o'clock effects are comparatively desirable, can use deionized water or distilled water below 10,000,000 when less demanding.
Amine alkali is as pH value conditioning agent, hydroxyl slowly discharges in solution, play the effect of homogeneous corrosion, and according to the structural similarity principle that mixes, the ester class can be resolved into water-soluble acid and alcohol, can remove a part of organic pollution, and have complexing, can remove particle and metal ion pollution.
Non-ionic surface active agent reduces the surface tension of solution; strengthen penetrating power; cleaning agent can be spread in the surface and crack of LCD comprehensively; its hydrophilic group and hydrophobic group cooperatively interact; can pollutant picking-up in liquid crystal display surface and the crack will be adsorbed on; and form protective layer on the surface, prevent the pollutant second adsorption.
In order to reach best cleaning performance, obtain by experiment, the Control of Voltage at diamond film the two poles of the earth is about 15V, and electric current is between 30A～60A.
Operation principle of the present invention is: adopt diamond film electrochemical effect and water-soluble washing agent to be used.The diamond film structure can produce multiple oxidants such as dense free hydroxy, free oxygen base, hydrogen peroxide, ozone and oxygen, and liquid crystal is played good oxygenolysis.Water-soluble washing agent is dissolved in water fully, can serve as the electrolyte of diamond film electrochemical effect, can remove all contaminations that remains in liquid crystal display screen surfaces and the slit simultaneously.Follow-up on this basis diamond film cleans separately and ultrasonic water-washing process can be with cleaning agent and other removing residues that remain on the wafer.Obtain clean LCDs by spray and oven dry again.
In cleaning agent, add amine alkali, mix principle according to structural similarity can dissolved organic matter, the slow ionization of amine alkali hydroxyl in the aqueous solution, along with the carrying out of cleaning, hydroxyl has certain consumption, but amine alkali has good cushioning effect, can constantly replenish hydroxyl, guarantees the uniformity of cleaning.And can be have simultaneously realized that as pH value modulator, complexing agent, corrosion inhibiter, dispersant, pro-oxygenic agent potion uses more.Adopt elite non-ionic surface active agent can reduce surface tension in the cleaning agent, make cleaning agent can affact well in the slit of LCDs, thoroughly remove liquid crystal residual in the slit.
Amine alkali and non-ionic surface active agent can cooperatively interact, surfactant has hydroxyl stepless action in solution that the effect of sprawling can guarantee organic base, guarantee the high conformity of cleaning, the slit that the strong osmosis of while surfactant can make the hydroxyl of amine alkali be penetrated into LCDs closes between pollutant and the liquid crystal display, make pollutant break away from the surface, reach the purpose of removal.Can preferentially select the polyoxyethylene surfactant for use in order to obtain best cleaning performance, amine alkali and polyoxyethylene surfactant cooperatively interact and can reach better cleaning performance.
Diamond film structure in this cleaning method can be according to the Current Control oxidizing intensity, and does not rely on ultrasonication, does not need to heat.Cleaning agent is a water-soluble washing agent, not only can remove the organic pollution that remains on the wafer surface, can also remove pollutants such as surperficial particle or metal ion.
Superiority of the present invention is:
1, the cleaning method of the present invention multiple strong oxidizer that utilizes the diamond film electrochemical effect to be produced can decompose liquid crystal rapidly, makes it to break away from the surface.
2, can control the power of diamond film electrochemical effect according to the voltage between anode and the negative electrode, and can keep stable oxidability for a long time under the alive outside condition, both realize the cycle applications of cleaning agent, reduce cost again.
3, added elite surfactant in the cleaning agent, can reduce the surface tension of cleaning agent, strengthened the permeability of cleaning agent, LCDs has been had better cleaning effect.
4, the chemical reagent of selecting for use in the cleaning agent is free from environmental pollution, and is nonflammable, belongs to the non-material that damages the ozone layer, and satisfies environmental requirement.
5, select amine alkali in the cleaning agent for use, can improve the character of cleaning agent homogeneous corrosion erosion, guarantee the uniformity of cleaning.
6, the amine alkali in the cleaning agent belongs to organic matter, can be dissolved with organic pollutants according to the structural similarity principle that mixes.
7, the amine alkali in the cleaning agent also can reduce the surface tension in the solution.
8, surfactant of selecting for use in the cleaning agent and bleeding agent can finely must reduce the surface tension of cleaning agent, have advantages such as good water solubility, penetration be strong, pollution-free simultaneously.
9, the surfactant in the cleaning agent can strengthen the quality transmission, guarantees the uniformity of cleaning, can reduce the wafer surface roughness.
10, cleaning method technology of the present invention is simple, easy to operate.
The specific embodiment
Below in conjunction with specific embodiment to the detailed description of the invention.
Embodiment 1
By volume to get amine alkali be triethanolamine 30% to percentage, and non-ionic surface active agent is condensation product (JFC) 1%, 18 million deionized water 69% of oxirane and higher aliphatic, mixes that to make cleaning agent standby.
Diamond film cooperates cleaning agent to clean: in a groove, with the diamond film is anode, graphite is negative electrode, add above-mentioned cleaning agent between the two poles of the earth and add 8 times of 18,000,000 deionized water as electrolyte, with the LCDs gaily decorated basket of packing into, be immersed in wherein, the Control of Voltage at the two poles of the earth is at 10V, electric current is at 30A, and room temperature was cleaned about 5 minutes.
Cleaning agent cleans: put into second groove with adding 8 times of 18,000,000 deionized water in the above-mentioned cleaning agent, and be heated to 50 ℃, the LCDs gaily decorated basket is taken out from a groove, put into two grooves, cooperate the ultrasonic wave effect to clean about 5 minutes.
Diamond film cleans: in three-flute, be anode with the diamond film, graphite is negative electrode, add 18,000,000 deionized waters between the two poles of the earth as electrolyte, the LCDs gaily decorated basket is taken out from two grooves, put into three-flute, the Control of Voltage at the two poles of the earth is at 10V, and electric current is at 30A, and room temperature was cleaned about 5 minutes.
The ultrasonic rinsing of water: 18,000,000 deionized waters are put into four grooves, be heated to 60 ℃, the LCD gaily decorated basket is taken out from three-flute, put into four grooves, carried out ultrasonic rinsing about 5 minutes.
The ultrasonic rinsing of water: 18,000,000 deionized waters are put into the 5th groove, be heated to 60 ℃, the LCD gaily decorated basket is taken out from four grooves, put into five grooves, carried out ultrasonic rinsing about 5 minutes.
Spray: with temperature is that 60 ℃ 18,000,000 deionized waters spray LCDs, and the time is 2 minutes.
Oven dry: dry with hot blast, the time is 3 minutes.
The LCDs that adopts above-mentioned cleaning method to clean utilizes the spectrophotometer detection not have organic pollutants substantially through checking, having reached; Utilize observation by light microscope, do not have particle; Product percent of pass reaches more than 97%, obtains clean LCDs.
Embodiment 2
By volume to get amine alkali be THED tetrahydroxy ethylene diamine 40% to percentage, and non-ionic surface active agent is NPE 5%, 15 million deionized water 55%, mixes that to make cleaning agent standby.
Diamond film cooperates cleaning agent to clean: in a groove, with the diamond film is anode, graphite is negative electrode, add above-mentioned cleaning agent between the two poles of the earth and add 15 times of 15,000,000 deionized water as electrolyte, with the LCDs gaily decorated basket of packing into, be immersed in wherein, the Control of Voltage at the two poles of the earth is at 15V, electric current is at 60A, and room temperature was cleaned about 10 minutes.
Cleaning agent cleans: put into second groove with adding 15 times of 15,000,000 deionized water in the above-mentioned cleaning agent, and be heated to 50 ℃, the LCDs gaily decorated basket is taken out from a groove, put into two grooves, cooperate the ultrasonic wave effect to clean about 10 minutes.
Diamond film cleans: in three-flute, be anode with the diamond film, graphite is negative electrode, add 15,000,000 deionized waters between the two poles of the earth as electrolyte, the LCDs gaily decorated basket is taken out from two grooves, put into three-flute, the Control of Voltage at the two poles of the earth is at 15V, and electric current is at 60A, and room temperature was cleaned about 10 minutes.
The ultrasonic rinsing of water: 15,000,000 deionized waters are put into four grooves, be heated to 50 ℃, the LCD gaily decorated basket is taken out from three-flute, put into four grooves, carried out ultrasonic rinsing about 10 minutes.
The ultrasonic rinsing of water: 15,000,000 deionized waters are put into the 5th groove, be heated to 50 ℃, the LCD gaily decorated basket is taken out from four grooves, put into five grooves, carried out ultrasonic rinsing about 10 minutes.
Spray: with temperature is that 50 ℃ 15,000,000 deionized waters spray LCDs, and the time is 5 minutes.
Oven dry: dry with infrared, the time is 5 minutes.
The LCDs that adopts above-mentioned cleaning method to clean utilizes the spectrophotometer detection not have organic pollutants substantially through checking, having reached; Utilize observation by light microscope, do not have particle; Product percent of pass reaches more than 96%, obtains clean LCDs.
Embodiment 3
By volume to get amine alkali be diethanol amine 35% to percentage, and non-ionic surface active agent OPEO 3%, 10 million deionized water 60% mixes that to make cleaning agent standby.
Diamond film cooperates cleaning agent to clean: in a groove, with the diamond film is anode, graphite is negative electrode, add above-mentioned cleaning agent between the two poles of the earth and add 10 times of 10,000,000 deionization as electrolyte, with the LCDs gaily decorated basket of packing into, be immersed in wherein, the Control of Voltage at the two poles of the earth is at 10V, electric current is at 40A, and room temperature was cleaned about 6 minutes.
Cleaning agent cleans: put into second groove with adding 10 times of 10,000,000 deionization in the above-mentioned cleaning agent, and be heated to 55 ℃, the LCDs gaily decorated basket is taken out from a groove, put into two grooves, cooperate the ultrasonic wave effect to clean about 6 minutes.
Diamond film cleans: in three-flute, be anode with the diamond film, graphite is negative electrode, add 10,000,000 deionizations between the two poles of the earth as electrolyte, the LCDs gaily decorated basket is taken out from two grooves, put into three-flute, the Control of Voltage at the two poles of the earth is at 10V, and electric current is at 40A, and room temperature was cleaned about 6 minutes.
The ultrasonic rinsing of water: 10,000,000 deionizations are put into four grooves, be heated to 55 ℃, the LCD gaily decorated basket is taken out from three-flute, put into four grooves, carried out ultrasonic rinsing about 7 minutes.
The ultrasonic rinsing of water: 10,000,000 deionizations are put into the 5th groove, be heated to 60 ℃, the LCD gaily decorated basket is taken out from four grooves, put into five grooves, carried out ultrasonic rinsing about 7 minutes.
Spray: with temperature is that 55 ℃ 10,000,000 deionizations spray LCDs, and the time is 4 minutes.
Oven dry: dry with infrared, the time is 4 minutes, obtains clean LCDs.
Embodiment 4
By volume to get amine alkali be dihydroxy ethylenediamine 33% to percentage, non-ionic surface active agent peregal 0-20 2%, and distilled water 65% mixes that to make cleaning agent standby.
Diamond film cooperates cleaning agent to clean: in a groove, with the diamond film is anode, graphite is negative electrode, add above-mentioned cleaning agent between the two poles of the earth and add 12 times of distilled water as electrolyte, with the LCDs gaily decorated basket of packing into, be immersed in wherein, the Control of Voltage at the two poles of the earth is at 15V, electric current is at 45A, and room temperature was cleaned about 8 minutes.
Cleaning agent cleans: put into second groove with adding 12 times of distilled water in the above-mentioned cleaning agent, and be heated to 55 ℃, the LCDs gaily decorated basket is taken out from a groove, put into two grooves, cooperate the ultrasonic wave effect to clean about 8 minutes.
Diamond film cleans: in three-flute, be anode with the diamond film, graphite is negative electrode, add distilled water between the two poles of the earth as electrolyte, the LCDs gaily decorated basket is taken out from two grooves, put into three-flute, the Control of Voltage at the two poles of the earth is at 15V, and electric current is at 45A, and room temperature was cleaned about 8 minutes.
The ultrasonic rinsing of water: distilled water is put into four grooves, be heated to 52 ℃, the LCD gaily decorated basket is taken out from three-flute, put into four grooves, carried out ultrasonic rinsing about 8 minutes.
The ultrasonic rinsing of water: distilled water is put into the 5th groove, be heated to 58 ℃, the LCD gaily decorated basket is taken out from four grooves, put into five grooves, carried out ultrasonic rinsing about 8 minutes.
Spray: with temperature is that 57 ℃ distilled water sprays LCDs, and the time is 4 minutes.
Oven dry: dry with infrared, the time is 5 minutes.
The LCDs that adopts above-mentioned cleaning method to clean utilizes the spectrophotometer detection not have organic pollutants substantially through checking, having reached; Utilize observation by light microscope, do not have particle; Product percent of pass reaches more than 96%, obtains clean LCDs.
Embodiment 5
By volume to get amine alkali be hexahydroxy ethylenediamine 33% to percentage, and non-ionic surface active agent is an ethoxylated dodecyl alcohol 2%, and distilled water 65% mixes that to make cleaning agent standby.
Diamond film cooperates cleaning agent to clean: in a groove, with the diamond film is anode, graphite is negative electrode, add above-mentioned cleaning agent between the two poles of the earth and add 12 times of distilled water as electrolyte, with the LCDs gaily decorated basket of packing into, be immersed in wherein, the Control of Voltage at the two poles of the earth is at 15V, electric current is at 50A, and room temperature was cleaned about 9 minutes.
Cleaning agent cleans: put into second groove with adding 12 times of distilled water in the above-mentioned cleaning agent, and be heated to 57 ℃, the LCDs gaily decorated basket is taken out from a groove, put into two grooves, cooperate the ultrasonic wave effect to clean about 9 minutes.
Diamond film cleans: in three-flute, be anode with the diamond film, graphite is negative electrode, add distilled water between the two poles of the earth as electrolyte, the LCDs gaily decorated basket is taken out from two grooves, put into three-flute, the Control of Voltage at the two poles of the earth is at 15V, and electric current is at 50A, and room temperature was cleaned about 9 minutes.
The ultrasonic rinsing of water: distilled water is put into four grooves, be heated to 57 ℃, the LCD gaily decorated basket is taken out from three-flute, put into four grooves, carried out ultrasonic rinsing about 9 minutes.
The ultrasonic rinsing of water: distilled water is put into the 5th groove, be heated to 57 ℃, the LCD gaily decorated basket is taken out from four grooves, put into five grooves, carried out ultrasonic rinsing about 9 minutes.
Spray: with temperature is that 57 ℃ distilled water sprays LCDs, and the time is 4 minutes.
Oven dry: dry with hot blast, the time is 4 minutes
The LCDs that adopts above-mentioned cleaning method to clean utilizes the spectrophotometer detection not have organic pollutants substantially through checking, having reached; Utilize observation by light microscope, do not have particle; Product percent of pass reaches more than 96%, obtains clean LCDs.
Embodiment 6
Cleaning method is identical with embodiment 1, and cleaning agent wherein is consisting of of percentage by volume:
Amine alkali is MEA 40%, and non-ionic surface active agent is that polyoxyethylene is hard ester group APEO 2%, 8 million deionized water 58% in the non-ionic surface active agent, mixes and makes cleaning agent.
Embodiment 7
Cleaning method is identical with embodiment 1, and cleaning agent wherein is consisting of of percentage by volume:
Amine alkali is coconut oil diethanol amide 33%, and non-ionic surface active agent is lauric acid propylene glycol ester 2%, 18 million deionized water 65% in the polyoxyethylene ester class, mixes and makes cleaning agent.
Embodiment 8
Cleaning method is identical with embodiment 1, and cleaning agent wherein is consisting of of percentage by volume:
Amine alkali is decanedioic acid triethanolamine 33%, and non-ionic surface active agent is tridecyl APEO 2%, 8 million deionized water in the fatty alcohol polyethenoxy ether class, mixes and makes cleaning agent.
Although relate to a kind of method for cleaning liquid-crystal display screen electrochemically and carried out special description disclosed with reference to embodiment, embodiment described above is illustrative and not restrictive, under the situation that does not break away from the spirit and scope of the present invention, all variations and modification are all within the scope of the present invention.
Claims (5)
1, a kind of method for cleaning liquid-crystal display screen electrochemically is characterized in that, comprises the steps:
(1) diamond film cooperates cleaning agent to clean: in a groove, be anode with the diamond film, graphite is negative electrode, adds cleaning agent between the two poles of the earth and adds 8～15 times of water as electrolyte, with the LCDs gaily decorated basket of packing into, is immersed in wherein, and room temperature was cleaned 5～10 minutes; Described cleaning agent by volume percentage is made up of following component: amine alkali 30%～45%, non-ionic surface active agent 1%～5%, the water of surplus;
(2) cleaning agent cleans: put into second groove with adding 8～15 times of water in the cleaning agent, and be heated to 50～60 ℃, the LCDs gaily decorated basket is taken out from a groove, put into two grooves, cooperate the ultrasonic wave effect to clean about 5～10 minutes; Described cleaning agent by volume percentage is made up of following component: amine alkali 30%～45%, non-ionic surface active agent 1%～5%, the water of surplus;
(3) diamond film cleans: in three-flute, be anode with the diamond film, graphite is negative electrode, adds entry between the two poles of the earth as electrolyte, and the LCDs gaily decorated basket is taken out from two grooves, puts into three-flute, and room temperature was cleaned about 5～10 minutes;
(4) the ultrasonic rinsing of water: water is put into four grooves, be heated to 50～60 ℃, the LCD gaily decorated basket is taken out from three-flute, put into four grooves, carry out ultrasonic rinsing 5～10 minutes;
(5) the ultrasonic rinsing of water: water is put into the 5th groove, be heated to 50～60 ℃, the LCD gaily decorated basket is taken out from four grooves, put into five grooves, carry out ultrasonic rinsing 5～10 minutes;
(6) spray: with temperature is that 50～60 ℃ water sprays LCDs.
(7) oven dry.
2, the method for utilizing diamond film to remove the semiconductor wafer surface organic pollution according to claim 1 is characterized in that described non-ionic surface active agent is that polyoxyethylene is non-ionic surface active agent or polyol ester class non-ionic surface active agent.
3, method for cleaning liquid-crystal display screen electrochemically according to claim 1 is characterized in that, described amine alkali is many hydroxyls polyamines and hydramine.
4, method for cleaning liquid-crystal display screen electrochemically according to claim 1 is characterized in that, hot blast or infrared oven dry are adopted in oven dry.
5, method for cleaning liquid-crystal display screen electrochemically according to claim 1 is characterized in that, the Control of Voltage at diamond film the two poles of the earth is about 15V, and electric current is between 30A～60A.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101879509A (en) * | 2010-07-21 | 2010-11-10 | 河北工业大学 | Liquid crystal screen cleaning method |
| CN102412172A (en) * | 2011-11-01 | 2012-04-11 | 浙江光益硅业科技有限公司 | Cut/ground silicon wafer surface cleaning method |
| CN103537453A (en) * | 2013-08-20 | 2014-01-29 | 曾锡强 | Method for ultrasonic cleaning of polished sapphire substrate wafer |
| CN103752574A (en) * | 2014-02-13 | 2014-04-30 | 苏州众显电子科技有限公司 | Technology for utilizing optical cleaning agents to clean liquid crystal display screen substrate |
| CN105013755A (en) * | 2015-05-13 | 2015-11-04 | 湖北鸿创科技有限公司 | Pre-cleaning method used for pretreatment on liquid crystal display production line |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3590470B2 (en) * | 1996-03-27 | 2004-11-17 | アルプス電気株式会社 | Cleaning water generation method and cleaning method, and cleaning water generation device and cleaning device |
| TWI362415B (en) * | 2003-10-27 | 2012-04-21 | Wako Pure Chem Ind Ltd | Novel detergent and method for cleaning |
| CN100351361C (en) * | 2004-06-23 | 2007-11-28 | 比亚迪股份有限公司 | Water-based liquid-crystal cleaning agent |
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2006
- 2006-06-23 CN CNB2006100144427A patent/CN100528384C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101879509A (en) * | 2010-07-21 | 2010-11-10 | 河北工业大学 | Liquid crystal screen cleaning method |
| CN102412172A (en) * | 2011-11-01 | 2012-04-11 | 浙江光益硅业科技有限公司 | Cut/ground silicon wafer surface cleaning method |
| CN103537453A (en) * | 2013-08-20 | 2014-01-29 | 曾锡强 | Method for ultrasonic cleaning of polished sapphire substrate wafer |
| CN103537453B (en) * | 2013-08-20 | 2015-06-10 | 曾锡强 | Method for ultrasonic cleaning of polished sapphire substrate wafer |
| CN103752574A (en) * | 2014-02-13 | 2014-04-30 | 苏州众显电子科技有限公司 | Technology for utilizing optical cleaning agents to clean liquid crystal display screen substrate |
| CN105013755A (en) * | 2015-05-13 | 2015-11-04 | 湖北鸿创科技有限公司 | Pre-cleaning method used for pretreatment on liquid crystal display production line |
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