CN1888849A - Die for preparing electronic microscope investigation specimens and preparing method thereof - Google Patents
Die for preparing electronic microscope investigation specimens and preparing method thereof Download PDFInfo
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- CN1888849A CN1888849A CN 200510027286 CN200510027286A CN1888849A CN 1888849 A CN1888849 A CN 1888849A CN 200510027286 CN200510027286 CN 200510027286 CN 200510027286 A CN200510027286 A CN 200510027286A CN 1888849 A CN1888849 A CN 1888849A
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Abstract
The invention is concerned with the mold that prepares the testing sample of electron microscope and the producing method of the mold. The mold is: the glass template 1, the groove 2 for putting sample that forms at the central of the glass template 1. The producing method is: puts the cover board at the central of the glass template with the same size of the groove, scores the contour line of the cover board at the central of the glass mold, spreads the protecting layer out of the contour line of the glass mold, uses the eroding craftwork to form groove inside of the contour line of the glass mold.
Description
Technical field
The present invention relates to the mould of preparation test sample in the fabrication of semiconductor device, particularly the mould and the manufacture method thereof of preparation electron microscope detection sample.
Background technology
Usually to come test sample in the fabrication of semiconductor device, to determine proper technical conditions with for example transmission electron microscope.It is of crucial importance to prepare satisfactory electron microscope detection sample, the degree of accuracy height of electron microscope detection sample, and the preparation work of sample is difficulty too.
Current one of the most frequently used method of electron microscope detection sample for preparing is, boule wafer is sticked on the operator's console with paraffin, at first mechanical buffing, carry out mechanical lapping with fine emery powder paper then, particles of silicon carbide diameter on the sand paper is about 1 μ m, uses progressively ground sample of different waterproof abrasive paper and emery sand paper (the particles of silicon carbide diameter is from 15 μ m-1 μ m).The thickness of the boule wafer of preparation detection sample in use for electron microscope is 0.5cm-1.0cm, and the thickness of sample of making after the grinding is 10 μ m-15 μ m.
Grinding steps through above can obtain the sample of thickness less than 20 μ m at last.Having only thickness is that the sample of 10 μ m-15 μ m just is convenient to utilize the ion milling board that sample is carried out further reduction processing, is convenient to final sample by transmission electron microscope (TEM) imaging.Thickness of sample behind the mechanical reduction will directly determine the employed time of ion milling, and the observed result of transmission electron microscope and image quality, in order to obtain higher sample preparation efficient and better image quality, sample thickness is got over Bao Yuehao under the not cracked prerequisite of sample, and best thickness is below the 15 μ m.
The current the most frequently used method of electron microscope detection sample for preparing is that at first mechanical buffing is ground with fine emery powder paper then.This method is by operating personnel's manual operations, and what is called " paster " method that adopts is that boule wafer is pasted on the operator's console with paraffin usually, grinds then.In paster operation, blank sheet tilts easily, is not easy to reach desired levelness, and is too big if paster tilts, and can cause the sample became uneven, and the place that observe does not reach required thickness, even can shine into local thickness of sample and cross thin and cracked.And operating personnel need according to the end point of feeling to control grinding.Thick by the most sample of sample after grinding greater than 15 μ m, do not reach the optimum thickness (0.5cm-1.0cm) of requirement.Have only the thickness of sample of small part to meet the requirements, simultaneously, the quality of sample is subjected to artificial factor too big.
Whether operating personnel will be with just becoming skilled grinding personnel for a long time, ground also very difficult even the operating personnel that know a thing or two will determine sample.Sample can be crossed grinding usually, that is to say, has damaged sample, must prepare electron microscope detection sample again, and the current this method for preparing electron microscope detection sample is time-consuming, and it is very difficult to prepare satisfactory sample.
Summary of the invention
For the shortcoming that exists in the side that overcomes above-mentioned existing preparation electron microscope detection sample, the present invention is proposed.
According to a technical scheme of the present invention, provide the mould of a preparation electron microscope detection sample.
According to another technical scheme of the present invention, provide the manufacture method of the mould of preparation electron microscope detection sample.
According to technical scheme of the present invention, the mould of preparation electron microscope detection sample is a glass template, and the core of glass template forms the groove of setting-out product.The size of glass template is 25 * 25 * 4 (mm).The size of the setting-out product groove that the core of glass template forms is length 15mm * width 5mm * degree of depth 10-15 μ m, coated with paraffin on the surface of sample blank sheet, the sample blank sheet that is coated with paraffin on the surface is put in the groove of the setting-out product that glass template core forms, then, carry out mechanical buffing and grind with emery paper.Utilize paraffin that the sample blank sheet is pasted among the glass groove, carry out mechanical lapping when exceeding about 0.1mm, use emery paper instead and be ground to glass and flush, just can obtain qualified sample than glass sheet.Because used glass sheet surface is big more many than sample, thereby it is easier to be many than directly utilizing sample and carry out horizontal adjustment to carry out horizontal adjustment with glass sheet, and, because the glass surface area is big, the speed of its grinding can be slow more a lot of than sample, utilize the wear surface of glass to judge that grinding end is very simple something.Because be difficult to extremely perfection of horizontal adjustment, glass sheet and wear surface have certain inclination angle, when wear surface arrived the sample groove, whole process of lapping just can be through with.
Manufacture method according to the mould of the preparation electron microscope detection sample of another technical scheme of the present invention may further comprise the steps:
Step 1 is selected one and is of a size of, the glass plate 1 of 25mm * 25mm * 4mm;
Step 3 carves the outline line of cover plate in the center of glass plate 1 with the adamas icking tool;
Step 4, the outline line scope part in addition that carves cover plate in the center of glass plate 1 adds a baffle plate, and applies protective material on baffle plate, prevents that the part beyond the outline line scope of the groove corrosion process cover plate of carrying out subsequently is corroded;
Step 5; glass plate part in the cover plate outline line scope that carves with the center of reactive ion etching (RIE) method combining hydrogen oxidation potassium (KOH) solution corrosion method etching glass plate 1; form groove, remove the protective material on the glass template outside the groove at last.
Description of drawings
The accompanying drawing that comprises herein is used for understanding better the present invention, and accompanying drawing is included in the instructions, and an ingredient of book as an illustration, demonstrates embodiments of the invention in the accompanying drawing, with the word segment of instructions principle of the present invention is described.In the accompanying drawing:
Fig. 1 is the mould skeleton view by preparation electron microscope detection sample of the present invention;
Fig. 2 is the cut-open view by the mould of preparation electron microscope detection sample of the present invention;
Fig. 3 is in the mould manufacturing method by preparation electron microscope detection sample of the present invention, and the glass plate core is pasted the skeleton view of the glass template behind the cover plate;
Fig. 4 is in the mould manufacturing method by preparation electron microscope detection sample of the present invention, adds the skeleton view of the glass template after the coating on the glass plate
Fig. 5 is by the skeleton view that etches the glass mold of sample standing groove in the mould manufacturing method of preparation electron microscope detection sample of the present invention with the RIE corrosion in conjunction with the KOH corrosion
Embodiment
Below describe mould in detail referring to accompanying drawing by the preparation electron microscope detection sample of a technical scheme of the present invention, by the manufacture method of the mould of the preparation electron microscope detection sample of another technical scheme of the present invention.
[embodiment 1]
Fig. 1 is the mould skeleton view by preparation electron microscope detection sample of the present invention, and Fig. 2 is the die cut view by preparation electron microscope detection sample of the present invention.Referring to Fig. 1 and Fig. 2, be a glass template 1 by the mould of the preparation electron microscope detection sample of a technical scheme of the present invention, the core of glass template 1 forms the groove 2 of setting-out product.The size of glass template 1 is 25mm * 25mm * 4mm.The size of the setting-out product groove 2 that the core of glass template 1 forms is length 15mm * width 5mm * degree of depth 15 μ m.
When preparing sample by mould of the present invention, coated with paraffin on the raw glass plate surface of sample raw glass plate, the sample raw glass plate that is coated with paraffin on the surface is put in the groove of the setting-out product that glass template core forms, then, carry out mechanical buffing and grind with emery paper.
The control method of preparation operating process of sample and thickness of sample is to utilize paraffin that the sample blank sheet is pasted among the glass groove, carry out mechanical lapping when exceeding about 0.1mm than glass sheet, use emery paper instead and be ground to glass and flush, just can obtain qualified sample.Owing to utilized its surface area than the big many glass sheet of sample surfaces area, thereby it is easier to be many than directly utilizing sample and carry out horizontal adjustment to carry out horizontal adjustment with glass sheet, and because the glass surface area is big, the speed of its grinding can be slow more a lot of than sample, utilize the wear surface of glass to judge that grinding end is very simple something.Because be difficult to extremely perfection of horizontal adjustment, glass sheet and wear surface have certain inclination angle, when wear surface arrived the sample groove, whole process of lapping just can be through with.
[embodiment 2]
Fig. 3 is that the glass plate heart is partly pasted the skeleton view of the glass template behind the cover plate in the mould manufacturing method by preparation electron microscope detection sample of the present invention;
Fig. 4 is in the mould manufacturing method by preparation electron microscope detection sample of the present invention, adds the skeleton view of the glass template after the coating on the glass plate
Fig. 5 is by the skeleton view that etches the glass mold of sample standing groove in the mould manufacturing method of preparation electron microscope detection sample of the present invention with the RIE corrosion in conjunction with the KOH corrosion
Below describe manufacture method in detail referring to Fig. 3 to Fig. 5 by the mould of the preparation electron microscope detection sample of another technical scheme of the present invention.The manufacture method of mould comprises following processing step:
Step 1 is selected one and is of a size of, the glass plate 1 of 25mm * 25mm * 4mm;
Step 3 carves the outline line of cover plate in the center of glass plate 1 with the adamas icking tool;
Step 4, the part that carves in the center of glass plate 1 beyond the outline line scope of cover plate adds a baffle plate, and applies protective material on baffle plate, prevents that the part beyond the outline line scope of the process cover plate of the erosion grooves of carrying out subsequently is corroded;
Step 5; with reactive ion etching (RIE) combining hydrogen oxidation potassium (KOH) solution corrosion method; glass plate part in the cover plate outline line scope that the center of etching glass plate 1 carves forms groove 2, removes the protective material on the glass template outside the groove 2 at last.The groove size that forms is length 15mm * width 5mm * degree of depth 10-15 μ m.Corrode the groove 2 that can obtain 10-15 μ m in three hours, the RIE board is that diameter is the reaction chamber of 200mm (8 inches) silicon chip, once can prepare the nearly template more than 10 simultaneously.As not having reactive ion etching (RIE) board, the mode of then available chemical solution corrosion substitutes.
Factor affecting artificial when preparing electron microscope detection sample with mould of the present invention is little, processing ease, and prepared sample qualification rate height, thereby reduced total cost of production.
More than describe manufacture method in detail by the mould and the mould of preparation electron microscope detection sample of the present invention.But the invention is not restricted to detailed description herein.The technician of the industry should be appreciated that the present invention can implement with other form.Therefore, by whole technical schemes of the present invention, cited embodiment just is used to illustrate the present invention rather than restriction the present invention, and the present invention is not limited to the details of describing herein.The scope of protection of present invention is defined by appending claims.
Claims (5)
1, the mould of preparation electron microscope detection sample, it is characterized in that, mould is a glass template (1), the core of glass template (1) forms the groove (2) of setting-out product, the size of glass template (1) is 25 * 25 * 4 (mm), and the size of the setting-out product groove (2) that the core of glass template (1) forms is length 15mm * width 5mm * degree of depth 15 μ m.
2, the manufacture method of the mould of preparation electron microscope detection sample comprises following processing step:
Step 1 is selected a glass plate (1) that is of a size of 25 * 25 * 4 (mm);
Step 2 is placed a cover plate in the center of selected glass plate (1), and the size of cover plate is length 15mm * width 5mm;
Step 3 carves the outline line of cover plate in the center of glass plate (1) with the adamas icking tool;
Step 4, the part that carves in the center of glass plate (1) beyond the outline line scope of cover plate adds a baffle plate, and applies protective material on baffle plate, prevents that the part beyond the outline line scope of the process cover plate of the erosion grooves of carrying out subsequently is corroded;
Step 5; glass plate part in the cover plate outline line scope that carves with the center of reactive ion etching (RIE) method combining hydrogen oxidation potassium (KOH) solution corrosion method etching glass plate (1); form groove (2), remove the protective material on the glass template outside the groove (2) at last.
According to the mould manufacturing method of claim 2, it is characterized in that 3, the groove of formation (2) size is length 15mm * width 5mm * degree of depth 10-15 μ m.
According to the mould manufacturing method of claim 2, it is characterized in that 4, in the step 5, in conjunction with the KOH corrosion, corrosion can obtain the groove (2) of 10-15 μ m in three hours with reactive ion etching (RIE).
According to the mould manufacturing method of claim 4, it is characterized in that 5, the RIE board is the reaction chamber of 8 cun silicon chips, once can prepare the nearly template more than 10 simultaneously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100272863A CN100565173C (en) | 2005-06-29 | 2005-06-29 | The mould and the manufacture method thereof of preparation electron microscope detection sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100272863A CN100565173C (en) | 2005-06-29 | 2005-06-29 | The mould and the manufacture method thereof of preparation electron microscope detection sample |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1888849A true CN1888849A (en) | 2007-01-03 |
| CN100565173C CN100565173C (en) | 2009-12-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100272863A Expired - Fee Related CN100565173C (en) | 2005-06-29 | 2005-06-29 | The mould and the manufacture method thereof of preparation electron microscope detection sample |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102466578A (en) * | 2010-11-03 | 2012-05-23 | 中芯国际集成电路制造(上海)有限公司 | Preparation method of transmission electron microscope (TEM) sample |
| CN105136543A (en) * | 2015-09-27 | 2015-12-09 | 上海华力微电子有限公司 | Preparation method of TEM (Transmission Electron Microscope) sample |
| CN110850115A (en) * | 2019-10-18 | 2020-02-28 | 东南大学 | Preparation device and method suitable for atomic force microscope thermal regeneration asphalt sample |
-
2005
- 2005-06-29 CN CNB2005100272863A patent/CN100565173C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102466578A (en) * | 2010-11-03 | 2012-05-23 | 中芯国际集成电路制造(上海)有限公司 | Preparation method of transmission electron microscope (TEM) sample |
| CN105136543A (en) * | 2015-09-27 | 2015-12-09 | 上海华力微电子有限公司 | Preparation method of TEM (Transmission Electron Microscope) sample |
| CN110850115A (en) * | 2019-10-18 | 2020-02-28 | 东南大学 | Preparation device and method suitable for atomic force microscope thermal regeneration asphalt sample |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100565173C (en) | 2009-12-02 |
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20111123 |
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Effective date of registration: 20111123 Address after: 201203 No. 18 Zhangjiang Road, Shanghai Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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Granted publication date: 20091202 Termination date: 20190629 |