CN1888515A - Dynamic distributing system for standard gas - Google Patents
Dynamic distributing system for standard gas Download PDFInfo
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- CN1888515A CN1888515A CN 200610089000 CN200610089000A CN1888515A CN 1888515 A CN1888515 A CN 1888515A CN 200610089000 CN200610089000 CN 200610089000 CN 200610089000 A CN200610089000 A CN 200610089000A CN 1888515 A CN1888515 A CN 1888515A
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Abstract
The inventive system consists of a gas circuit part and an electrical control part. The gas circuit part includes a mixed gas chamber, a thermostatic water channel with a refrigerating source, a heating source and a water circulating pump and a gas-storage unit with penetration standard gas or diffusion standard gas inside. The electrical control part includes a mass flow controller for controlling the operation of the mass flow instrument, a PID self-adjusting instrument for controlling the operation of the thermostatic water channel and a central computer for controlling the operations of the mass flow controller, the PID self-adjusting instrument and the water circulating pump.
Description
Technical field
The present invention relates to a kind of dynamic compounding system of calibrating gas, be the preparation that dynamically realizes various calibrating gas by this air distributing device specifically, promptly the virgin gas with concentration known continuously mixes by mixer by constant ratio with diluent gas, thereby can continuously prepare and supply with certain density standard gas, or the bottle gas that will prepare discharges with certain flow.
Background technique
At present, there are two kinds of methods both at home and abroad: static distribution method and dynamic air-distributing method with virgin gas preparation low density standard gas.Static distribution method is that the virgin gas of a certain amount of gaseous state or steam attitude is added in the container of known volume, charges into diluent gas again, and mixing makes.The concentration of standard gas is learnt with dilution tolerance and vessel volume calculating according to adding virgin gas.But because some aerochemistry character is more active, chemical reaction may take place in long-time the contact with container wall.Simultaneously, container wall also has suction-operated, so can cause inaccurate or its concentration of preparation gas concentration with changing standing time, when particularly preparing low density standard gas, usually causes in the standard gas each set of dispense than there being bigger error.
For standard gas large usage quantity or the long experiment work of logical standard gas time, static distribution method can not meet the demands, and needs to adopt the dynamic air-distributing method.The dynamic air-distributing method is the virgin gas of concentration known continuously to be sent into mixer with diluent gas by constant ratio mix, thereby can continuously prepare and supply with certain density standard gas.The dynamic air-distributing method not only can provide a large amount of standard gas, and can obtain the standard gas of desired concn by the flow-rate ratio of regulating virgin gas and diluent gas, is particularly useful for preparing the standard gas of low density.But because the existing used instrument and equipment more complicated of dynamic air-distributing method, and purposes is single, and there is certain unstability in its dynamic air-distributing value, has therefore limited the extensive use of dynamic air-distributing method.
Summary of the invention
At the problem that prior art exists, the purpose of this invention is to provide the dynamic compounding system of a kind of standard gas preparation degree of accuracy height, stable working state.
For realizing purpose of the present invention, the dynamic compounding system of a kind of calibrating gas of the present invention is made of air path part and electric control system; Wherein, air path part comprises air mixing chamber, thermostatic water bath, raw material diluent gas input port, raw material standard gas input port, preparation back standard gas delivery outlet, thermostatic water bath is provided with refrigeration source, heating source, circulating water pump, be provided with osmosis type raw material standard gas or diffused raw material standard gas caisson in it, also be provided with the diluent gas inlet opening and the one-level mixed gas delivery outlet that link to each other for corresponding port on the caisson installed in it on the thermostatic water bath, in one-level mixed gas delivery outlet and pipeline that caisson links to each other, be provided with gas temperature sensor, raw material diluent gas input port links to each other with raw material diluent gas inlet opening on the air mixing chamber through the mass flow measuring device by pipeline one tunnel, another road is through control valve, the mass flow measuring device links to each other with diluent gas inlet opening on the thermostatic water bath, raw material standard gas input port is through pipeline, control valve, the mass flow measuring device links to each other with raw material standard gas inlet opening on the air mixing chamber, one-level mixed gas delivery outlet on the thermostatic water bath links to each other with one-level mixed gas inlet opening on the mixing chamber through pipeline, and the normal mixture delivery outlet on the mixing chamber links to each other with standard gas delivery outlet after the preparation through pipeline; Electric control system comprises that mass flow controller, PID are from adjusting gauge, central computer, wherein mass flow controller is controlled the work of described mass flow measuring device, PID from adjusting gauge according to described thermostatic water bath on the testing signal of gas temperature sensor the work of refrigeration source and heating source is controlled, guaranteeing the constant of one-level mixed gas temperature of being exported by the water temperature of regulating thermostatic water bath, central computer control of quality flow dontroller, PID are from the work of adjusting gauge and circulating water pump.
Further, also be provided with cooling-water temperature sensor and upper and lower level sensor in the described thermostatic water bath, these two kinds of sensors all join from adjusting gauge with described PID, and PID controls water temperature in the thermostatic water bath and water level respectively by water temperature and level sensor from adjusting gauge.
Further, the refrigeration source on the described thermostatic water bath is a semiconductor refrigerating sheet, and this semiconductor refrigerating sheet is provided with radiating fin and cooling fan.
Further, described osmosis type raw material standard gas caisson is a permeability tube.
Further, described diffused raw material standard gas caisson is a diffusing tube.
Further, be connected gas circuit with being connected the shared valve control unit of gas circuit between the raw material standard gas inlet opening on described raw material standard gas input port and the air mixing chamber between the diluent gas inlet opening on described raw material diluent gas input port and the thermostatic water bath, this valve control unit is made of two three-way diverter valves and a mass flow measuring device, first three-way diverter valve has two inlet openings and a delivery outlet, second three-way diverter valve has an inlet opening and two delivery outlets, the mass flow measuring device is connected between the first three-way diverter valve delivery outlet and the second three-way diverter valve inlet opening by pipeline, two inlet openings of first three-way diverter valve link to each other with raw material standard gas input port with raw material diluent gas input port respectively by pipeline, two delivery outlets of second three-way diverter valve by pipeline respectively with thermostatic water bath on the diluent gas inlet opening link to each other with raw material standard gas inlet opening on the air mixing chamber.
Further, also be disposed with filter and pressure regulator valve on the pipeline at described raw material diluent gas input port place, the above-mentioned two-way pipeline that links to each other with raw material diluent gas input port is all drawn from the output terminal of pressure regulator valve; Also be provided with pressure regulator valve on the pipeline at described raw material standard gas input port place, draw by the output terminal of pressure regulator valve equally with the downstream line that raw material standard gas input port links to each other.
Further, on the described air mixing chamber normal mixture delivery outlet through also being provided with drain on the pipeline that links to each other of standard gas delivery outlet after pipeline and the preparation.
Gas distribution system of the present invention can not only be prepared the standard gas of desired concn and flow with virgin gas, and chamber gas can be discharged according to the flow of setting, and has realized the multi-purpose purpose of a kind of instrument; At requiring the high characteristics of thermostatic bath temperature accuracy, adopted the fast PID temperature control technology of moulding, can make temperature in the thermostatic bath be controlled at system requirements ± 0.1 ℃; Adopt computer control, have good man computer interface, in use calculate immediately, systematic error is compensated automatically, thus the degree of accuracy that has improved setting value.
Description of drawings
Fig. 1 constitutes schematic representation for the present invention;
Fig. 2 is a thermostatic water bath structural representation among Fig. 1;
Fig. 3 is an air mixing chamber structural representation among Fig. 1;
Fig. 4 is an electric control system structural representation of the present invention;
Fig. 5 is a workflow diagram of the present invention.
Embodiment
The dynamic compounding system that Figure 1 shows that a kind of calibrating gas of the present invention constitutes schematic representation, and constituent element shown in each sequence number is distinct as follows among the figure:
1, raw material standard gas input port; 2, raw material diluent gas input port; 3, filter; 4, pressure regulator valve; 5, pressure regulator valve; 6, the first triplet commutation ball valve; 7, mass flow measuring device; 8, mass flow measuring device; 9, the second triplet commutation ball valve; 10, refrigeration source; 11, refrigeration source; 12, heating source; 13, cooling-water temperature sensor; 14, following level sensor; 15, thermostatic water bath; 16, diffusing tube; 17, go up level sensor; 18, air mixing chamber; 19, one-level mixture temperature sensor; 20, evacuation port; 21, preparation back standard gas delivery outlet; 22, mass flow controller; 23, PID is from adjusting gauge; 24, mass flow controller; 25, central computer.
As shown in Figure 1, the dynamic compounding system of a kind of calibrating gas of the present invention comprises air path part and electric control system; Wherein, air path part comprises air mixing chamber 18, thermostatic water bath 15, raw material diluent gas input port 2, raw material standard gas input port 1, preparation back standard gas delivery outlet 21.Thermostatic water bath 15 is provided with refrigeration source 10,11 and heating source 12, also be provided with cooling-water temperature sensor 13, last level sensor 17, following level sensor 14, diffused raw material standard gas caisson (not drawing separately) and diffusing tube 16 are installed in it, caisson that is assembled together and diffusing tube are provided with diluent gas inlet opening and one-level mixed gas delivery outlet, are provided with gas temperature sensor 19 near in the diffusing tube of one-level mixed gas delivery outlet.The pipeline at raw material diluent gas input port 2 places is provided with filter 3 and pressure regulator valve 4, pressure regulator valve 4 output terminals link to each other with raw material diluent gas inlet opening on the air mixing chamber 18 through mass flow measuring device 8 by pipeline one tunnel, and another road links to each other with an inlet opening of the first triplet commutation ball valve 6.Be provided with pressure regulator valve 5 equally on the pipeline at raw material standard gas input port 1 place, the delivery outlet of pressure regulator valve 5 links to each other by pipeline another inlet opening with the first triplet commutation ball valve 6.The delivery outlet of the first triplet commutation ball valve 6 links to each other through the inlet opening of mass flow measuring device 7 with the second triplet commutation ball valve 9, two delivery outlets of the second triplet commutation ball valve 9 by pipeline respectively with thermostatic water bath 15 on the diluent gas inlet opening link to each other with raw material standard gas inlet opening on the air mixing chamber 18.One-level mixed gas delivery outlet on the thermostatic water bath 15 links to each other with one-level mixed gas inlet opening on the mixing chamber 18 through pipeline, and the normal mixture delivery outlet on the mixing chamber 18 links to each other with standard gas delivery outlet 21 after the preparation through pipeline.
As shown in Figure 2, the refrigeration source 10,11 on the thermostatic water bath 15 is two groups of semiconductor refrigerating sheets, all has radiating fin and cooling fan on every group of semiconductor refrigerating sheet, and heating source 12 is an electric tube heater, also is provided with circulating water pump in the thermostatic water bath.
As shown in Figure 3, air mixing chamber 18 is the diaphragm type structure, be divided into 4 branch air mixing chambers that join successively by dividing plate in it, raw material standard gas inlet opening on the air mixing chamber 18, raw material diluent gas inlet opening and one-level mixed gas inlet opening all are arranged on an end (not illustrating respectively separately) of air mixing chamber, each minute that enters that each component gas in the air mixing chamber separates by dividing plate in air mixing chamber 18 can form spiral in the air mixing chamber, thereby reaches full and uniform mixing.
Referring to Fig. 4, electric control system of the present invention comprises mass flow controller 22,24, PID is from adjusting gauge 23, central computer 25, mass flow controller 22,24 respectively to mass flow rate device 7,8 work is controlled, the temperature data that PID detects according to cooling-water temperature sensor 13 and gas temperature sensor 19 from adjusting gauge 23 is controlled the refrigeration source on the thermostatic water bath 15 and the work of heating source, central computer 25 control of quality flow dontrollers 22,24, the work of PID circulating water pump in adjusting gauge 23 and thermostatic water bath, central computer 25 is simultaneously according to last, following level sensor 17,14 testing signal is controlled the water level in the thermostatic water bath 15, all sends corresponding alarm signal when the dilutional hyponatremia in the thermostatic water bath 15 or when very few.
As shown in Figure 5, during work, at first select the working method of gas distribution system of the present invention according to the character of standard source of the gas.
When the raw material standard source of the gas is the bottled source of the gas of gaseous state, raw material is diluted source of the gas and the raw material standard source of the gas joins with corresponding input port respectively, operate first, second commutation ball valve, the raw material diluent gas is sent into air mixing chamber 18 through mass flow measuring device 8, raw material standard gas is sent into air mixing chamber 18 through first, second ball valve and mass flow measuring device 7, at this moment, thermostatic water bath 15 is in off position.
When the raw material standard source of the gas is the diffused source of the gas, the caisson of this diffused standard source of the gas is packed in the thermostatic water bath 15, and the corresponding port on the caisson linked to each other with diluent gas inlet opening and diffusing tube 16 on the thermostatic water bath 15, operate first, second commutation ball valve, in two commutation ball valves and mass flow measuring devices were sent into caisson in the thermostatic water bath, at this moment raw material standard gas input port was in closed condition with one road raw material diluent gas.
When the raw material standard source of the gas is the osmosis type source of the gas, the caisson of this osmosis type standard source of the gas is packed in the thermostatic water bath 15, and the corresponding port on the caisson linked to each other with diluent gas inlet opening and one-level mixed gas delivery outlet on the thermostatic water bath 15, operate first, second commutation ball valve, in two commutation ball valves and mass flow measuring devices were sent into caisson in the thermostatic water bath, at this moment raw material standard gas input port was in closed condition with one road raw material diluent gas.
After choosing the working method of gas distribution system, set the control corresponding parameter according to the ratio requirement of required standard gas on central computer, control system is automatically carried out the preparation work of standard gas as required.
When the raw material standard source of the gas is diffused or osmosis type source of the gas, PID controls the work of thermostatic water bath 15 according to the instruction of central computer 25 from adjusting gauge 23, and the temperature data of temperature data of gathering according to gas temperature sensor 19 in the course of the work and cooling-water temperature sensor 13 feedbacks adjusts the work of thermostatic water bath refrigeration source and heating source constantly, to guarantee that diluent gas is exported with the constant temperature of osmosis type raw material standard gas or the mixed one-level mixed gas of diffused raw material standard gas in the thermostatic water bath.
Mass flow controller 22,24 instructions according to central computer 25, the work of control of quality flow device 7,8 respectively can be stablized the standard gas that output meets ratio requirement to guarantee gas distribution system.
Two mass flow controllers 22 shown in Figure 1 all link to each other with central computer 25 by the RS485 interface with 24, and PID links to each other with central computer 25 by the RS485 interface from adjusting gauge.Among Fig. 1 after preparation standard gas delivery outlet 21 places also be provided with drain 20, when also having residual air in the system, can will be harmful to residual air by this drain 20 and enter the harmful gas processing system or innocuous gas is entered atmosphere when wanting to stop the work of gas distribution system.
Claims (8)
1. the dynamic compounding system of a calibrating gas is characterized in that, is made of air path part and electric control system; Wherein, air path part comprises air mixing chamber, thermostatic water bath, raw material diluent gas input port, raw material standard gas input port, preparation back standard gas delivery outlet, thermostatic water bath is provided with refrigeration source, heating source, circulating water pump, be provided with osmosis type raw material standard gas or diffused raw material standard gas caisson in it, also be provided with the diluent gas inlet opening and the one-level mixed gas delivery outlet that link to each other for corresponding port on the caisson installed in it on the thermostatic water bath, in one-level mixed gas delivery outlet and pipeline that caisson links to each other, be provided with gas temperature sensor, raw material diluent gas input port links to each other with raw material diluent gas inlet opening on the air mixing chamber through the mass flow measuring device by pipeline one tunnel, another road is through control valve, the mass flow measuring device links to each other with diluent gas inlet opening on the thermostatic water bath, raw material standard gas input port is through pipeline, control valve, the mass flow measuring device links to each other with raw material standard gas inlet opening on the air mixing chamber, one-level mixed gas delivery outlet on the thermostatic water bath links to each other with one-level mixed gas inlet opening on the mixing chamber through pipeline, and the normal mixture delivery outlet on the mixing chamber links to each other with standard gas delivery outlet after the preparation through pipeline; Electric control system comprises that mass flow controller, PID are from adjusting gauge, central computer, wherein mass flow controller is controlled the work of described mass flow measuring device, PID from adjusting gauge according to described thermostatic water bath on the testing signal of gas temperature sensor the work of refrigeration source and heating source is controlled, guaranteeing the constant of one-level mixed gas temperature of being exported by the water temperature of regulating thermostatic water bath, central computer control of quality flow dontroller, PID are from the work of adjusting gauge and circulating water pump.
2. the dynamic compounding system of a kind of calibrating gas as claimed in claim 1, it is characterized in that, also be provided with cooling-water temperature sensor and upper and lower level sensor in the described thermostatic water bath, these two kinds of sensors all join from adjusting gauge with described PID, and PID controls water temperature in the thermostatic water bath and water level respectively by water temperature and level sensor from adjusting gauge.
3. the dynamic compounding system of a kind of calibrating gas as claimed in claim 1 is characterized in that, the refrigeration source on the described thermostatic water bath is a semiconductor refrigerating sheet, and this semiconductor refrigerating sheet is provided with radiating fin and cooling fan.
4. the dynamic compounding system of a kind of calibrating gas as claimed in claim 1 is characterized in that, described osmosis type raw material standard gas caisson is a permeability tube.
5. the dynamic compounding system of a kind of calibrating gas as claimed in claim 1 is characterized in that, described diffused raw material standard gas caisson is a diffusing tube.
6. the dynamic compounding system of a kind of calibrating gas as claimed in claim 1, it is characterized in that, be connected gas circuit with being connected the shared valve control unit of gas circuit between the raw material standard gas inlet opening on described raw material standard gas input port and the air mixing chamber between the diluent gas inlet opening on described raw material diluent gas input port and the thermostatic water bath, this valve control unit is made of two three-way diverter valves and a mass flow measuring device, first three-way diverter valve has two inlet openings and a delivery outlet, second three-way diverter valve has an inlet opening and two delivery outlets, the mass flow measuring device is connected between the first three-way diverter valve delivery outlet and the second three-way diverter valve inlet opening by pipeline, two inlet openings of first three-way diverter valve link to each other with raw material standard gas input port with raw material diluent gas input port respectively by pipeline, two delivery outlets of second three-way diverter valve by pipeline respectively with thermostatic water bath on the diluent gas inlet opening link to each other with raw material standard gas inlet opening on the air mixing chamber.
7. the dynamic compounding system of a kind of calibrating gas as claimed in claim 1, it is characterized in that, also be disposed with filter and pressure regulator valve on the pipeline at described raw material diluent gas input port place, the above-mentioned two-way pipeline that links to each other with raw material diluent gas input port is all drawn from the output terminal of pressure regulator valve; Also be provided with pressure regulator valve on the pipeline at described raw material standard gas input port place, draw by the output terminal of pressure regulator valve equally with the downstream line that raw material standard gas input port links to each other.
8. the dynamic compounding system of a kind of calibrating gas as claimed in claim 1 is characterized in that, the normal mixture delivery outlet is through also being provided with drain on the pipeline that links to each other of standard gas delivery outlet after pipeline and the preparation on the described air mixing chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100890009A CN100422628C (en) | 2006-07-28 | 2006-07-28 | Dynamic distributing system for standard gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100890009A CN100422628C (en) | 2006-07-28 | 2006-07-28 | Dynamic distributing system for standard gas |
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| CN1888515A true CN1888515A (en) | 2007-01-03 |
| CN100422628C CN100422628C (en) | 2008-10-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100890009A Expired - Fee Related CN100422628C (en) | 2006-07-28 | 2006-07-28 | Dynamic distributing system for standard gas |
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| CN101811006A (en) * | 2010-05-19 | 2010-08-25 | 陕西电力科学研究院 | Standard gas distributing instrument |
| CN101989068A (en) * | 2010-11-05 | 2011-03-23 | 北京七星华创电子股份有限公司 | Simulation process system and method based on quality flow controller |
| CN102580606A (en) * | 2012-02-29 | 2012-07-18 | 广东省职业病防治院 | Dynamic gas distribution instrument |
| CN102692481A (en) * | 2012-06-13 | 2012-09-26 | 国电环境保护研究院 | Mercury scale gas generating device |
| CN102039096B (en) * | 2009-10-16 | 2012-10-24 | 北京均方谱元科技有限公司 | System and method for dynamically distributing gases of volatile liquid under room temperature and normal pressure |
| CN102749421A (en) * | 2012-07-16 | 2012-10-24 | 北京雪迪龙科技股份有限公司 | Mercury standard gas generating device |
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| CN106621883A (en) * | 2016-12-28 | 2017-05-10 | 张晓燕 | Portable type multi-component gas diluting device |
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| CN111013415A (en) * | 2019-12-25 | 2020-04-17 | 江苏智闻智能传感科技有限公司 | Standard gas generation system based on temperature control |
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| FR2835443B1 (en) * | 2002-02-01 | 2004-03-05 | Commissariat Energie Atomique | METHOD AND DEVICE FOR MIXING GAS |
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| CN102039096B (en) * | 2009-10-16 | 2012-10-24 | 北京均方谱元科技有限公司 | System and method for dynamically distributing gases of volatile liquid under room temperature and normal pressure |
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| CN102749421A (en) * | 2012-07-16 | 2012-10-24 | 北京雪迪龙科技股份有限公司 | Mercury standard gas generating device |
| CN102841613A (en) * | 2012-08-29 | 2012-12-26 | 兰州理工大学 | Gas concentration control system in gas distribution process |
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| CN103644456A (en) * | 2013-12-04 | 2014-03-19 | 上海梦地仪器制造有限公司 | Sound velocity nozzle volume automatic air distributing system and control method thereof |
| CN106621883A (en) * | 2016-12-28 | 2017-05-10 | 张晓燕 | Portable type multi-component gas diluting device |
| CN107597016A (en) * | 2017-09-22 | 2018-01-19 | 杭州杭氧股份有限公司 | A kind of High-precision standard gas-dynamic mixing system and distributing precision control method |
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| CN111013415A (en) * | 2019-12-25 | 2020-04-17 | 江苏智闻智能传感科技有限公司 | Standard gas generation system based on temperature control |
| CN113375057A (en) * | 2021-06-07 | 2021-09-10 | 江苏省产品质量监督检验研究院 | Pressure volume automatic gas distribution system and control method thereof |
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