CN1861408A - Methods and apparatus for making color filter by discharging a filter material - Google Patents
Methods and apparatus for making color filter by discharging a filter material Download PDFInfo
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- CN1861408A CN1861408A CN 200610084126 CN200610084126A CN1861408A CN 1861408 A CN1861408 A CN 1861408A CN 200610084126 CN200610084126 CN 200610084126 CN 200610084126 A CN200610084126 A CN 200610084126A CN 1861408 A CN1861408 A CN 1861408A
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Abstract
To two-dimensionally uniformize optical characteristics of optical members such as light transmission characteristics of a color filter, color displaying characteristics of a liquid crystal device, light emitting characteristics of an EL(electroluminescence) light emitting face or the like. The method for manufacturing the color filter consists of manufacturing the same prepared by aligning a plurality of dot shaped filter elements on a substrate 12. While principally scanning the substrate 12 in X-direction with an inkjet head 22 having a nozzle row 28 composed of a plurality of nozzles 27 aligned in a row shape, filter materials are selectively discharged from a plurality of the nozzles 27 and filter elements 3 are formed on filter element regions 7. A plurality of the nozzles 27 are divided into a plurality of groups and the principal scanning is repeated two or more times by subsidiarily scanning the inkjet head 22 in Y-direction with a distance &delta so as to make these nozzle groups scan the same part of the substrate 12 in duplication.
Description
The application is that the name submitted to November 20 calendar year 2001 is called the dividing an application of Chinese patent application 01130306.9 of " manufacture method and the manufacturing installation of colour filter, liquid-crystal apparatus and EL device ".
Technical field
The present invention relates to be manufactured on the manufacture method and the manufacturing installation of employed colour filter in the Optical devices such as liquid-crystal apparatus.The invention still further relates to the manufacture method and the manufacturing installation of liquid-crystal apparatus with colour filter.The invention still further relates to the manufacture method and the manufacturing installation of the EL device that shows with the EL luminescent layer, relate to material is sprayed on the spraying method of the material on the object and the spray equipment of material.In addition, also relate to and being mounted with the made liquid-crystal apparatus of these manufacture methods or the electronic installation of EL device.
Background technology
In recent years, use display unit such as liquid-crystal apparatus, EL device widely in the display part of electronic installations such as mobile phone and portable computer.In addition, recently, the situation of carrying out panchromatic demonstration by means of display unit is many especially.Carry out panchromatic demonstration with liquid-crystal apparatus, for example can adopt being realized by the way of the light after the liquid crystal layer modulation by colour filter.And colour filter is on the surface of the substrate that is formed by glass, plastics etc., for example R (red), G (green), the versicolor point-like colour filter of B (indigo plant) identical permutation be in strip, triangle or inlay that the spread geometry of settings such as shape forms.
In addition, in the occasion of carrying out panchromatic demonstration with the EL device, for example be on the surface of the substrate that forms by glass, plastics etc., for example R (red), G (green), the versicolor point-like EL luminescent layer of B (indigo plant) are arranged in bar shaped, triangle or inlay the spread geometry of settings such as shape, clamp these EL luminescent layers and form pixel elements with pair of electrodes again, make this pixel elements send desired coloured light by the voltage that is added on this a pair of electrode at each such pixel elements control, thereby realize panchromatic demonstration.
In the prior art, when versicolor colour filter such as the R of colour filter, G, B unit is constituted figure, or when versicolor pixel elements such as the R of EL device, G, B is constituted figure, to adopt photoetching process known.Yet, when adopting this photoetching process, complex procedures, and also very big to the consumption of various coloured materials and photoresist etc., thereby cost up.
In order to address this problem, the method that the present invention proposes is, with ink-jet method filter material or EL luminescent material etc. with the point-like ejection, thereby form colour filter unit that point-like arranges or EL luminescent layer etc.
Referring now to Figure 22 (a),, claim the surface of motherboard 301 to be provided with a plurality of panel areas 302 again with the large-area substrates of formation such as glass, plastics; Shown in Figure 22 (b), then arrange a plurality of colour filter unit 303 in these panel area 302 inside with point-like, introduce how to form these colour filter units 303 now with ink-jet method.
In this occasion, for example shown in Figure 22 (c), have a plurality of nozzles 304 are lined up the row shape and formed nozzle rows 305, thereby constitute ink gun 306.This ink gun 306 is shown in arrow A 1 among Figure 22 (b) and A2, a panel area 302 is carried out repeatedly (being twice) main scanning in Figure 22, and during these main scannings, be filter material by from a plurality of nozzles, spraying printing ink selectively, on desirable position, form colour filter unit 303.
Colour filter unit 303 is by being arranged in bar shaped, triangle with shades of colours such as R.G.B, inlaying suitable spread geometries such as shape and form, therefore, spray treatment at the 306 ejection printing ink of ink gun shown in Figure 22 (b), be provided with separately corresponding to R, G, B three looks in advance and only spray ink gun 306 monochromatic among R, G, the B, use these ink guns 306 successively, just can on a motherboard 301, form the spread geometry of three looks such as R, G, B.
Yet with regard to ink gun 306, the ink ejection amount that constitutes a plurality of nozzles 304 of nozzle rows 305 has certain decentralization in general.For example, shown in Figure 23 (a), corresponding to the position of nozzle rows 305 two end portions, ink ejection amount is maximum; Take second place at central part; Centre position between two ends and central part, ink ejection amount are then minimum, promptly have the represented characteristics of inkjet of curve Q.
Therefore; forming colour filter unit 303 o'clock with ink gun 306 like that shown in the image pattern 22 (b); then shown in Figure 23 (b); usually can be at position P1 or central part P2 corresponding to ink gun 306 ends; even simultaneously in P1 and two positions of P2; form the darker striped of concentration, thereby cause the uneven problem of plane light transmission features of colour filter.
Summary of the invention
The present invention puts forward in view of there being the problems referred to above, its objective is that the optical characteristics of the optical components such as the characteristics of luminescence of colored display characteristic that the light transmission features that can make colour filter, liquid-crystal apparatus are provided, EL light-emitting area is able to the manufacture method and the manufacturing installation of the various optical components of uniformity in the plane.
(1) in order to achieve the above object, the present invention proposes a kind of manufacture method of colour filter, be used for being manufactured on the colour filter that a plurality of colour filter of arrangement unit forms on the substrate, it is characterized in that, comprising: will have the ink gun of arranging the nozzle rows that a plurality of nozzle Cheng Liezhuan form and the operation that the side in the aforesaid substrate moves along main scanning direction the opposing party; Spray filter material selectively from above-mentioned a plurality of nozzles, the operation of the above-mentioned colour filter of formation unit on aforesaid substrate; And a plurality of nozzle rows of described ink gun are divided into many groups, every group comprises a plurality of nozzles, and the side in above-mentioned ink gun and the aforesaid substrate is moved on above-mentioned sub scanning direction with the above-mentioned group of integral multiple length in length on the sub scanning direction the opposing party, make at least a portion in above-mentioned each group can scan the same section of aforesaid substrate on above-mentioned main scanning direction operation.
Manufacture method as according to this configuration colour filter, each colour filter unit in the colour filter is not that ink gun forms by single pass, but by the overlapping ink-jet of a plurality of nozzles that belongs to the different spray nozzles group to form predetermined thickness, therefore, even it is dispersed to suppose between a plurality of nozzles that ink ejection amount exists, also can prevent to produce between a plurality of colour filter unit dispersiveness of thickness.So the light transmission features of colour filter is kept uniformity in the plane.
Certainly,, both there is no need through adopting the such complicated step of photolithographic manufacture method because the manufacture method of colour filter of the present invention is a kind of method of using ink gun, can waste material yet.
In the manufacture method of the colour filter of said structure, make a side in above-mentioned ink gun and the substrate carry out subscan with above-mentioned nozzle sets integral multiple length of length on sub scanning direction and move the opposing party.Do like this, the same part of a plurality of nozzle sets overlapping scan aforesaid substrates, by the nozzle in each nozzle sets to the overlapping ink-jet of each color fildtering zone.
In addition, in the manufacture method of the colour filter of said structure, the said nozzle row can be to above-mentioned sub scanning direction tilted configuration.Nozzle rows forms by a plurality of nozzles are lined up the row shape.In this occasion, if make the configuration status of nozzle rows and the sub scanning direction keeping parallelism of ink gun, so, the interval from formed those colour filters units of the colour filter unit material of nozzle ejection between adjacent, that is colour filter unit spacing, just equal to form the spacing of a plurality of nozzles of nozzle rows.
Colour filter unit spacing equals injector spacing just, though there is above-mentioned advantage in this,, this situation is considerably less after all, and under normal conditions, present situation is colour filter unit's spacing and injector spacing and inequality mostly.Like this, in colour filter unit's spacing and injector spacing occasion inequality, as above-mentioned structure, can injector spacing be matched along the length and the colour filter unit spacing of sub scanning direction by the way of nozzle rows to ink gun sub scanning direction tilted configuration.In this case, the front and back displacement can be done in the position that constitutes each nozzle of nozzle rows on main scanning direction, to this, by changing from the time of each nozzle ejection colour filter unit material, just can supply with desired position to the ink droplet that each nozzle sprays.
In addition, in the manufacture method of the colour filter of said structure, the length that ink gun moves on sub scanning direction can be by following formula decision.If the length of said nozzle row is L, the number of the said nozzle group that is formed by above-mentioned cutting apart is n, and the said nozzle row are θ with the angle of above-mentioned sub scanning direction, just the length δ that then above-mentioned subscan is moved can be designated as:
δ≈(L/n)cosθ
According to such structure, ink gun can make a plurality of nozzles move by each nozzle sets along sub scanning direction.Consequently, for example consider to be divided in nozzle rows the occasion of four nozzle sets, the various piece on the substrate all can be done main scanning by four nozzle sets are overlapping.
Then, in the manufacture method of the colour filter of said structure, can also adopt control method not allow the plurality of nozzles ejection colour filter unit material of said nozzle row two end portions.As with reference to Figure 23 (a) illustrated, the ink-jet of common ink gun distributes, compare with other parts in the two end portions of nozzle rows, be vicissitudinous.For the ink gun with this ink-jet distribution character, if get rid of the some ink ejection amounts variations in nozzle rows two ends nozzle greatly, a plurality of nozzles that only use ink-jet to be evenly distributed so, just can make the thickness of colour filter unit reach uniformity in the plane.
In addition, if handle as described above, do not use the plurality of nozzles that is positioned at the nozzle rows two end portions, in this occasion, the length that the ink gun subscan is moved then can be by following formula decision.If do not allow the length of remainder is L after the plurality of nozzles of ejection above-mentioned printing ink having deducted two end portions among the said nozzle row, the number of the said nozzle group that is formed by above-mentioned cutting apart is n, the said nozzle row are θ with the angle of above-mentioned sub scanning direction, and the length δ that then above-mentioned subscan is moved can be designated as
δ≈(L/n)cosθ
Then, considering to utilize the colour filter of manufacture method manufacturing of the colour filter of said structure is to form by the arrangement that R (red), G (green), B (indigo plant) or C (dark blue), Y (Huang), M polychrome colour filter units such as (dark red) are done on the plane according to suitable figure.When making this colour filter, be that number according to used color is provided with ink gun respectively independently, nozzle rows in each ink gun only sprays the filter material of a kind of color in the multiple color, like this, just can use the ink gun of different colours to be achieved as follows operation successively respectively: " when making above-mentioned ink gun do subscan; repeatedly carry out above-mentioned main scanning repeatedly, " so that each nozzle sets in the said nozzle row is made overlapping scan to the same part of aforesaid substrate to an above-mentioned plate base.
In addition, the occasion that the colour filter of polychrome colour filter units such as above-mentioned R, G, B or C, Y, M is arranged in manufacturing, can also be installed in an ink gun inside to the versicolor multiple nozzle rows of ejection and make above-mentioned ink gun, like this, just can carry out following multi-color coloring operation simultaneously with above-mentioned ink gun: when making above-mentioned ink gun do subscan, repeatedly carry out above-mentioned main scanning repeatedly, so that each nozzle sets in the said nozzle row is made overlapping scan to the same part of aforesaid substrate.
(2) then, the invention provides a kind of manufacturing installation of colour filter, be used for being manufactured on the colour filter that a plurality of colour filter of arrangement unit forms on the substrate, it is characterized in that, comprise: ink gun, wherein contain a plurality of nozzles are lined up the nozzle rows that the row shape forms, this nozzle rows is divided into a plurality of groups, and every group comprises a plurality of nozzles; Supply with the ink-feeding device of filter material to this ink gun; The main scanning drive unit that a side in above-mentioned ink gun and the aforesaid substrate is moved along main scanning direction the opposing party; The subscan drive unit that a side in above-mentioned ink gun and the aforesaid substrate is moved along sub scanning direction the opposing party; Control is from the nozzle ejection control device of above-mentioned a plurality of nozzle ejection printing ink; Control the main scanning control device of above-mentioned main scanning drive unit work; And the subscan control device of controlling the work of above-mentioned subscan drive unit, make a side in above-mentioned ink gun and the aforesaid substrate with the length of the integral multiple of the length of above-mentioned group sub scanning direction, the opposing party is moved and carries out subscan, make that at least a portion in above-mentioned each group can scan the same section of aforesaid substrate on above-mentioned main scanning direction.
(3) then, the invention provides a kind of manufacture method of liquid-crystal apparatus, this liquid-crystal apparatus comprises that clamping a pair of substrate of liquid crystal and arrange the colour filter that a plurality of colour filter unit forms at least on a plate base, the manufacture method of this liquid-crystal apparatus is characterised in that, comprise: have a plurality of nozzles are lined up the nozzle rows that the row shape forms, this nozzle rows is divided into a plurality of groups, every group of ink gun that comprises a plurality of nozzles and form, the operation that the side in this ink gun and the aforesaid substrate is moved along main scanning direction the opposing party; Spray filter material selectively from above-mentioned a plurality of nozzles, the operation of the above-mentioned colour filter of formation unit on aforesaid substrate; And make a side in above-mentioned ink gun and the aforesaid substrate with the length of the integral multiple of the length of above-mentioned group sub scanning direction, the opposing party is moved and carries out subscan, make at least a portion in above-mentioned each group can scan the same section of aforesaid substrate on above-mentioned main scanning direction operation.
(4) then, the invention provides a kind of manufacturing installation of liquid-crystal apparatus, this liquid-crystal apparatus comprises that clamping a pair of substrate of liquid crystal and arrange the colour filter that a plurality of colour filter unit forms at least on a plate base, the manufacturing installation of this liquid-crystal apparatus is characterised in that, comprise: ink gun, contain a plurality of nozzles are lined up the nozzle rows that the row shape forms, this nozzle rows is divided into a plurality of groups, and every group comprises a plurality of nozzles; Supply with the ink-feeding device of filter material to this ink gun; The main scanning drive unit that a side in above-mentioned ink gun and the aforesaid substrate is moved along main scanning direction the opposing party; The subscan drive unit that a side in above-mentioned ink gun and the aforesaid substrate is moved along sub scanning direction the opposing party; Control is from the nozzle ejection control device of above-mentioned a plurality of nozzle ejection printing ink; Control the main scanning control device of above-mentioned main scanning drive unit work; And the subscan control device of controlling the work of above-mentioned subscan drive unit, make a side in above-mentioned ink gun and the aforesaid substrate with the length of the integral multiple of the length of above-mentioned group sub scanning direction, the opposing party is moved and carries out subscan, make that at least a portion in above-mentioned each group can scan the same section of aforesaid substrate on above-mentioned main scanning direction.
(5) then, the invention provides a kind of manufacture method of EL device, be used for being manufactured on the EL device that the pixel elements that is arranged with a plurality of each self-contained EL luminescent layer on the substrate forms, the manufacture method of this EL device is characterised in that, comprise: have a plurality of nozzles are lined up the nozzle rows that the row shape forms, this nozzle rows is divided into a plurality of groups, every group of ink gun that comprises a plurality of nozzles and form, the operation that the side in this ink gun and the aforesaid substrate is moved along main scanning direction the opposing party; Spray the EL luminescent material selectively from above-mentioned a plurality of nozzles, on aforesaid substrate, form the operation of above-mentioned EL luminescent layer; And make a side in above-mentioned ink gun and the aforesaid substrate with the length of the integral multiple of the length of above-mentioned group sub scanning direction, the opposing party is moved and carries out subscan, make at least a portion in above-mentioned each group can scan the same section of aforesaid substrate on above-mentioned main scanning direction operation.
(6) then, the invention provides a kind of manufacturing installation of EL device, be used for being manufactured on the substrate EL device that the pixel elements of arranging a plurality of each self-contained EL luminescent layer forms, the manufacturing installation of this EL device is characterised in that, comprise: ink gun, contain a plurality of nozzles are lined up the nozzle rows that the row shape forms, this nozzle rows is divided into a plurality of groups, and every group comprises a plurality of nozzles; Supply with the ink-feeding device of EL luminescent material to this ink gun; The main scanning drive unit that a side in above-mentioned ink gun and the aforesaid substrate is moved along main scanning direction the opposing party; The subscan drive unit that a side in above-mentioned ink gun and the aforesaid substrate is moved along sub scanning direction the opposing party; Control is from the nozzle ejection control device of above-mentioned a plurality of nozzle ejection printing ink; Control the main scanning control device of above-mentioned main scanning drive unit work; And the subscan control device of controlling the work of above-mentioned subscan drive unit, make a side in above-mentioned ink gun and the aforesaid substrate with the length of the integral multiple of the length of above-mentioned group sub scanning direction, the opposing party is moved and carries out subscan, make that at least a portion in above-mentioned each group can scan the same section of aforesaid substrate on above-mentioned main scanning direction.
Then, the invention provides a kind of control device of ink gun, when being arranged in the optical component that forms on the substrate with a plurality of color graphics, manufacturing uses, the control device of this ink gun is characterised in that, comprise: ink gun, have a plurality of nozzles are lined up the nozzle rows that the row shape forms, this nozzle rows is divided into a plurality of groups, and every group comprises a plurality of nozzles; Supply with the ink-feeding device of optics material to this ink gun; The main scanning drive unit that a side in above-mentioned ink gun and the aforesaid substrate is moved along main scanning direction the opposing party; The subscan drive unit that a side in above-mentioned ink gun and the aforesaid substrate is moved along sub scanning direction the opposing party; Control the main scanning control device of above-mentioned main scanning drive unit work; And the subscan control device of controlling the work of above-mentioned subscan drive unit, make a side in above-mentioned ink gun and the aforesaid substrate with the length of the integral multiple of the length of above-mentioned group sub scanning direction, the opposing party is moved and carries out subscan, make that at least a portion in above-mentioned each group can scan the same section of aforesaid substrate on above-mentioned main scanning direction.
(7) then, the invention provides a kind of material spraying method, be used for material is sprayed on the object, it is characterized in that, comprise: have a plurality of nozzles are lined up the nozzle rows that the row shape forms, the said nozzle row are divided into a plurality of groups, every group of shower nozzle that comprises a plurality of nozzles and form, the operation that the side in this shower nozzle and the above-mentioned object is moved along main scanning direction the opposing party; Make from above-mentioned a plurality of nozzles to the above-mentioned object operation of sprayed on material selectively; And make a side in above-mentioned shower nozzle and the above-mentioned object with the length of the integral multiple of the length of above-mentioned group sub scanning direction, the opposing party is moved and carries out subscan, make at least a portion in above-mentioned each group can scan the same section of above-mentioned object on above-mentioned main scanning direction operation.
(8) the present invention also provides a kind of material spray equipment, is used for material is sprayed on the object, it is characterized in that, comprising: shower nozzle, and contain a plurality of nozzles are lined up the nozzle rows that the row shape forms, this nozzle rows is divided into a plurality of groups, and every group comprises a plurality of nozzles; Supply with the material feed unit of above-mentioned material to above-mentioned shower nozzle; The main scanning driver element that a side in above-mentioned shower nozzle and the above-mentioned object is moved along main scanning direction the opposing party; The subscan driver element that a side in above-mentioned shower nozzle and the above-mentioned object is moved along sub scanning direction the opposing party; And control is from the nozzle ejection control module of above-mentioned a plurality of nozzle ejection above-mentioned materials, make a side in above-mentioned shower nozzle and the above-mentioned object with the length of the integral multiple of the length of above-mentioned group sub scanning direction, the opposing party is moved and carries out subscan, make that at least a portion in above-mentioned each group can scan the same section of above-mentioned object on above-mentioned main scanning direction.
In the control device of the ink gun of said structure, so-called " optical component " is meant colour filter, EL device etc.In addition, when optical component was colour filter, so-called " color graphics " was suitable for each colour filter unit of R, G, B.When optical component is the EL device, the luminescent layer of all kinds of " color graphics " then suitable R, G, B or hole injection layer etc.
Description of drawings
Fig. 1 is the floor map of the master operation of an embodiment of colour filter manufacture method among the present invention.
Fig. 2 is the floor map of the master operation of the another embodiment of colour filter manufacture method among the present invention.
Fig. 3 is the colour filter manufacture method floor map of the master operation of an embodiment again among the present invention.
Fig. 4 is the colour filter manufacture method floor map of the master operation of an embodiment again among the present invention.
Fig. 5 is embodiment of colour filter and as the plane of an embodiment of its basic mother substrate among the present invention.
Fig. 6 adopts the section that blocks along VI-VI line among Fig. 5 (a) partly to represent the schematic diagram of the manufacturing process of colour filter.
Fig. 7 is the exemplary plot of R, G in the colour filter, B three color pixel identical permutation figures.
Fig. 8 is the oblique view of an embodiment of major part ink discharge device of the various manufacturing installations such as manufacturing installation of EL device among the manufacturing installation of liquid-crystal apparatus in the manufacturing installation, the present invention of colour filter among the present invention and the present invention.
Fig. 9 is the oblique diagrammatic sketch of amplification of device major part among Fig. 8.
Figure 10 is the amplification oblique drawing of device major part ink gun among Fig. 9.
Figure 11 is an oblique view that becomes example of ink gun.
Figure 12 is the cut-away view of ink gun: (a) oblique view of partly cut-away, (b) sectional structure chart that blocks along J-J line in (a).
Figure 13 is the another plane that becomes example of ink gun.
Figure 14 is the block diagram that is used for the electric control system of control chart 8 ink discharge devices.
Figure 15 is the flow chart that control system is controlled among Figure 14.
Figure 16 is the ink gun oblique view of a change example again.
Figure 17 is the process chart of an embodiment of manufacture method for liquid crystal device among the present invention.
Figure 18 is with the made oblique view of a routine liquid-crystal apparatus under decomposing state of manufacture method for liquid crystal device among the present invention.
Figure 19 is the cross-sectional view of the liquid-crystal apparatus that blocks along IX-IX line among Figure 18.
Figure 20 is the process chart of an embodiment of EL device producing method among the present invention.
Figure 21 is the profile of the EL device corresponding with process chart among Figure 20.
Figure 22 is the schematic diagram of an example of existing colour filter manufacture method.
Figure 23 is the schematic diagram that is used for illustrating existing colour filter characteristic.
The specific embodiment
(first embodiment)
The manufacture method of colour filter and an embodiment of manufacturing installation thereof are described below.At first, before these manufacture methods of explanation and manufacturing installation, earlier the colour filter with manufacturings such as these manufacture methods is done an explanation.Fig. 5 (a) is the schematic diagram of planar structure of an embodiment of colour filter.In addition, the cross-section structure after Fig. 6 (d) then shows and blocks along the VI-VI line among Fig. 5 (a).
The forming process of the colour filter 1 of present embodiment is as follows: earlier a plurality of colour filter unit 3 is arranged in the point diagram shape on the surface of the square substrate 2 that is formed by glass, plastic or other material; then be arranged in the dot matrix shape in the present embodiment; then, shown in Fig. 6 (d), the stacked guard film 4 thereon.Have, what Fig. 5 (a) illustrated is exactly to have thrown off diaphragm 4 flat shape of the colour filter 1 of state later on again.
Forming colour filter unit 3 o'clock, forming the partition 6 of latticed figure earlier with lighttight resin material, burying with coloured material in a plurality of square region that are arranged in the dot matrix shape that are separated out by partition 6 again.In addition, these colour filter units 3 all are that the coloured material by a certain color in R (red), G (green), B (indigo plant) three looks forms separately, and these versicolor colour filters units 3 are then according to the pattern arrangement of setting.This spread geometry for example, is knownly arranged just like the bar shaped shown in Fig. 7 (a), inlays arrangement shown in Fig. 7 (b), also just like the rounded projections arranged shown in Fig. 7 (c) etc.
Bar shaped is arranged, and is to make the file of matrix all be furnished with identical color.Inlaying arrangement, is to make to be arranged in any three adjacent colour filter units of walking crosswise and be arranged on the file and to be furnished with R, G, three kinds of colors of B.Colour filter unit in the rounded projections arranged is interconnected, and any three adjacent colour filter units all are furnished with R, G, three kinds of colors of B.
The size of colour filter 1 such as be 1.8 inches.The size of a colour filter unit 3 such as be 3 μ m * 100 μ m.Interval between each colour filter unit 3, the first spacing of promptly so-called colour filter, such as be 75 μ m.
The colour filter in the present embodiment 1 when carrying out the optics important document of panchromatic demonstration, be that R, G, three colour filter units 3 of B are formed a pixel as a unit, make light selectively by a certain colour filter unit or their certain combination among R, G in the pixel, the B, just can carry out panchromatic demonstration.At this moment, the partition 6 that is formed by light tight resin plays black matrix.
Above-mentioned colour filter 1 such as be to cut down from one shown in Fig. 5 (b) large-area mother substrate 12.Particularly, formed the figure of a colour filter 1 before this on the surface separately in the zone 11 of a plurality of settings formation colour filters in mother substrate 12, follow at these colour filters and form the groove of the periphery formation in zone 11, along these grooves mother substrate 12 cut-outs are formed colour filter 1 one by one at last for cut-out usefulness.
The manufacture method and the manufacturing installation of the colour filter 1 shown in the shop drawings 5 (a) are described below.
Fig. 6 shows the schematic diagram of process sequence of the manufacture method of colour filter 1.Earlier make partition 6 with lighttight resin material on the surface of mother substrate 12, they are looked in the direction of arrow B and form latticed figure.The checkerwork cell part 7 of this latticed figure is exactly the zone of colour filter to be formed unit 3, or claims color fildtering zone.The planar dimension that the color fildtering zone one by one 7 that is formed by this partition 6 is looked along the arrow B direction for example is about 30 μ m * 100 μ m.
Partition 6 has the effect that stops the first material of the colour filter that offers color fildtering zone 7 to flow, and the effect of black matrix is arranged simultaneously.In addition, partition 6 can adopt patterning process formation arbitrarily, such as forms with photoetching process, can also fire with the heater heating in case of necessity to form.
Form after the partition 6, shown in Fig. 6 (b), supply with the drop 8 of colour filter unit material to each color fildtering zone 7, thereby bury material 13 with colour filter unit to each color fildtering zone 7.In Fig. 6 (b), the colour filter of symbol 13R represents that R is arranged (red) look unit material, the colour filter unit material of symbol 13G represents that G is arranged (green) look, the colour filter unit material of symbol 13B represents that B is arranged (indigo plant) look.
As in each color fildtering zone 7, having filled the colour filter unit material of scheduled volume, then mother substrate 12 is heated to such as 70 ℃ with heater, evaporate the solvent in the colour filter unit material.After solvent evaporated, shown in Fig. 6 (c), the volume of colour filter unit material 13 reduced, and also becomes smooth simultaneously.Reduce too much as fruit volume, so, also need to supply with repeatedly colour filter unit material drop and and heat this drop, until obtaining sufficient colour filter thickness.Through above processing, only stay the rete of the solid constituent of colour filter unit material at last, so just formed desirable versicolor colour filter unit 3.
Through after above operation formed colour filter unit 3, in order to make these colour filters unit 3 bone dries, also will be under the temperature of regulation the heat treated official hour.After this, utilize again suitable method such as tumbling barrel process, rolling method, peel off method or ink-jet method etc. and form diaphragms 4.This diaphragm 4 is used for protecting colour filter unit 3 etc., simultaneously in order to make the having an even surface of colour filter 1.
Fig. 8 shows an embodiment of the ink discharge device that is used for supplying with and handle colour filter unit material.The effect of this ink discharge device 16 is a certain color among R, G, the B, such as the colour filter of R look unit material, as the droplet of ink spraying and attached to mother substrate 12[referring to Fig. 5 (b)] in each colour filter form on the desired location in the district 11.Spraying G look colour filter unit's material and the used ink discharge device of spraying B look colour filter unit's material also will be prepared respectively, but because their structure is same as shown in Figure 8, have not just explained in addition.
As shown in Figure 8, ink discharge device 16 includes: the ink gun assembly 26 that ink gun 22 is housed, the ink gun position control 17 of the position of control ink gun 22, the substrate position control device 18 of the position of control mother substrate 12, the main scanning drive unit 19 that 22 pairs of mother substrates 12 of ink gun are moved do main scanning, the subscan drive unit 21 that 22 pairs of mother substrates 12 of ink gun are moved do subscan, mother substrate 12 is supplied to the substrate feedway 23 of the job position of setting in the ink discharge device 16, in addition, also include the control device 24 of the integral body of ink discharge device 16 being carried out control.
Ink gun position control 17, substrate position control device 18, the main scanning drive unit 19 that 22 pairs of mother substrates 12 of ink gun are moved do main scanning also have subscan drive unit 21, and they all are installed on the pedestal 9.In addition, as required, available cover 14 gets up these device covers.
The position of ink gun 22 is configured to stretch with the direction that main scanning direction X intersects to its nozzle rows 28, during this main scanning direction X translation, spray colour filter unit material selectively from its a plurality of nozzles 27 as printing ink, make colour filter unit material attached to mother substrate 12[referring to Fig. 5 (b)] in assigned address.And, by making the distance of ink gun 22, just can the main scanning position of ink gun 22 be offset with the interval of setting along one section setting of sub scanning direction Y translation.
Interconnect through path 38 between a plurality of black chambers 33 and the liquid storage tank 34.
Suitable position at oscillating plate 31 has an ink supply aperture 36, and this ink supply aperture 36 is connected with ink-feeding device 37.The a certain color that this ink-feeding device 37 is supplied with among R, G, the B to ink supply aperture 36, such as the material M of the colour filter of R look unit.The material M of colour filter unit that is supplied to is full of liquid storage tank 34 earlier, is full of black chamber 33 via path 38 then.
The nozzle 27 that the material M of colour filter unit from black chamber 33 is sprayed with jet-like is set on nozzle plate 29.And the back side in the side of the formation of oscillating plate 31 China ink chamber 33 makes it to install with printing ink press body 39 corresponding to this China ink chamber 33.Shown in Figure 12 (b), this printing ink press body 39 includes piezoelectric element 41 and clamps its pair of electrodes 42a and 42b.By electrode 42a and 42b are switched on, it is outstanding laterally that piezoelectric element 41 will be done flexural deformation as shown by arrow C like that, thereby the volume of black chamber 33 is increased.So the material M of colour filter unit that just has the volume part that has been equivalent to increase flows into black chamber 33 from liquid storage tank 34 through path 38.
Then, when stopping to piezoelectric element 4 energisings, this piezoelectric element 41 and oscillating plate just revert to original shape together.Therefore, because black chamber 33 also returns to original volume, the pressure of the material M of the colour filter of 33 inside, black chamber unit rises, just from nozzle 27 to mother substrate 12[referring to Fig. 5 (b)] the material M of colour filter unit of ejection drop 8 forms.In addition, at the peripheral part of nozzle 27,, for example also be provided with by what Ni-tetrafluoroethene eutectoid coating constituted and scold China ink layer 43 in order to prevent that drop 8 offset directions from dispersing or unfavorable phenomenon such as the hole plug of nozzle 27 takes place.
As can be seen from Figure 9, ink gun position control 17 has: make α motor 44 that ink gun 22 does in the plane to rotate, make the β motor 46 that ink gun 22 rotates around the axis swing that is parallel to sub scanning direction Y, the γ motor 47 that ink gun 22 is rotated around the axis swing that is parallel to main scanning direction X, make ink gun 22 at the parallel mobile Z motor 48 of above-below direction in addition.
As seen from Figure 9, the control device of substrate position shown in Fig. 8 18 comprises the platform 49 that loads mother substrate 12 and makes this platform 49 make the θ motor 51 that rotates in the plane as arrow theta indicates.In addition, as shown in Figure 9, the main scanning drive unit 19 shown in Fig. 8 comprises the slide block 53 of the guide rail 52 that extends along main scanning direction X and built-in linear motor by pulsed drive.When built-in linear motor was worked, slide block 53 was just done translation along 52 couples of main scanning direction X of guide rail.
In addition, as shown in Figure 9, the subscan drive unit 21 shown in Fig. 8, comprise along sub scanning direction Y extend guide rail 54 and the slide block 56 of built-in linear motor by pulsed drive.When built-in linear motor was worked, slide block 56 was just done translation along 54 couples of sub scanning direction Y of guide rail.
The linear motor of the pulsed drive in slide block 53 and the slide block 56, the rotational angle of its output shaft of pulse enable signal that can be by supplying with this motor is subjected to accurate control, so the position on sub scanning direction Y etc. also can both be subjected to the control of high precision to the ink gun of being supported by slide block 53 22 in position on the main scanning direction X and platform 49.
And the position of ink gun 22 and platform 49 is not limited to control with pulse motor, also can adopt the FEEDBACK CONTROL of servomotor or other arbitrarily control method realize this Position Control.
As shown in Figure 8, below the track of the ink gun 22 that under driving, moves,, be provided with pressing device 36 and cleaning device 77 at subscan drive unit 21 1 side positions do main scanning by main scanning drive unit 19.In addition, be provided with electronic balance 78 at opposite side.Cleaning device 77 is used for cleaning ink gun 22.Electronic balance 78 is used for measuring one by one the weight of the ink droplet that each nozzles 27 (referring to Figure 10) are sprayed in the ink gun 22.As for pressing device 76, then be used for being in armed state following time and prevent nozzle 27 (referring to Figure 10) drying at ink gun 22.
On the next door of ink gun 22, also be provided with this ink gun 22 and make the whole ink gun that moves video camera 81.In addition, be arranged on the video camera 82 that the bracing or strutting arrangement (not drawing among the figure) on the pedestal 9 is used in order to supporting substrate, it is configured on the position that can photograph mother substrate 12.
Ink gun position control 17 shown in Fig. 8, substrate position control device 18, main scanning drive unit 19, subscan drive unit 21, drive piezoelectric element 41[in the ink gun 22 in addition referring to Figure 12 (b)] various devices such as driver of ink-jet head 72, as shown in figure 14, all be connected to CPU69 through input/output interface 73 and bus 74.In addition, various devices such as substrate feedway 23, input unit 67, display 68, electronic balance 78, cleaning device 77 and pressing device 76 also all are connected to CPU69 through input/output interface 73 and bus 74.
CUP69 carries out control according to the program software that is stored in the memory 71, so that printing ink that is colour filter unit material is sprayed on the precalculated position on mother substrate 12 surfaces, it has concrete function and realizes part, as cleaning arithmetic section for realizing that cleaning treatment is carried out computing, be the gland arithmetic section of realizing that gland is handled, realize the gravimetry arithmetic section that gravimetry carries out computing for finishing, and describe the arithmetic section of describing that colour filter unit material carries out computing by ink-jet with electronic balance 78 (referring to Fig. 8).
If segmented describing arithmetic section again, various function arithmetic sections have then been comprised again, as for ink gun 22 is positioned at describe initial position describe the original position arithmetic section, move the main scanning control arithmetic section that carries out s operation control for making ink gun 22 do scanning according to predetermined speed along main scanning direction X, for making mother substrate 12 carry out the subscan control arithmetic section of s operation control along predetermined subscan amount of sub scanning direction Y skew, and for making the some nozzle operation in a plurality of nozzles 27 in the ink gun 22, ejection printing ink that is colour filter unit's material and carry out the nozzle ejection control arithmetic section of s operation control, or the like.
Have again, though used CPU69 to realize above-mentioned various functions in the present embodiment by means of software, if to realize above-mentioned various functions without the independent electronic circuit of CPU, so, it also is possible using such electronic circuit.
Below, the work of the ink discharge device of being made up of said structure 16 is described according to flow chart shown in Figure 15.
In case the operator connects power initiation ink discharge device 16, at first in step S1, carry out initial setting.Particularly, be set at the original state of devices such as being predetermined ink gun assembly 26, substrate feedway 23 and control device 24 exactly.
Then, when the gravimetry commutator pulse arrives (step S2 is YES), main scanning drive unit 19 among Fig. 9 just makes ink gun assembly 26 move to the position (step S3) at electronic balance 78 places among Fig. 8, measures from the quantity of ink (step S4) of nozzle 27 ejections with electronic balance 78.Then, at the characteristics of inkjet of nozzle 27, regulate the voltage (step S5) that is added on each nozzle 27 corresponding piezoelectric elements 41.
Again next, if there is the commutator pulse of cleaning to arrive (step S6 is YES), main scanning drive unit 19 just makes ink gun assembly 26 move to the position (step S7) at cleaning device 77 places, cleans ink gun 22 (step S8) by this cleaning device 77.
If there is not the gravimetry commutator pulse, also do not clean commutator pulse and arrive (step S2 and step S6 are NO), perhaps these two processing procedures all finish, and so just enter step S9, make substrate feedway 23 work among Fig. 8, mother substrate 12 is supplied to platform 49.Particularly, inhale pad 64 and attract mother substrates 12 and make it to keep in 57 from the substrate resettlement section earlier, then, lifting shaft 61, the first arm 62 and second arm 63 are moved, mother substrate 12 is carried to platform 49, presses the alignment pin 50 (Fig. 9) that in advance platform 49 is set in suitable position then.Have again, for preventing mother substrate 12 dislocation on the platform 49, methods such as the most handy air attraction.Mother substrate 12 is fixed on the platform 49.
Then, the video camera of using by means of substrate among Fig. 8 82 is observed mother substrate 12 on one side, the output shaft of θ motor 5 among Fig. 9 is rotated by minute angle unit, do to rotate in the plane with minute angle unit, thereby make mother substrate location (step S10) so as to making platform 49.Then, the video camera of using by means of ink gun among Fig. 8 81 is observed mother substrate 12 on one side, determine the position (step S11) that ink gun 22 begins to describe by computing on one side, then, main scanning drive unit 19 and subscan drive unit 21 are suitably worked, ink gun 22 is moved to describe original position (step S12).
At this moment, shown in position among Fig. 1 (a), the sub scanning direction Y that ink gun 22 is configured to 28 pairs of ink guns 22 of nozzle rows has an inclination angle [theta].This is because in common ink discharge device, interval between the adjacent nozzle 27 is that the interval that the adjacent in other words colour filter unit of the interval between injector spacing and the adjacent colour filter unit 3 forms between the district 7 is a colour filter unit spacing, also inequality as a rule, make ink gun 22 when main scanning direction X moves, doing such disposal and can make the size component of injector spacing on sub scanning direction Y equal colour filter unit spacing geometrically.
As take the step S12 of Figure 15, and ink gun 22 is placed describe original position, then ink gun 22 just is placed in the position (a) among Fig. 1.After this, in the step S13 of Figure 15, beginning is carried out main scanning along main scanning direction X, begins ink-jet simultaneously.Particularly, main scanning drive unit 19 among Fig. 9 is started working, making ink gun 22 carry out orthoscopic scanning along the main scanning direction X among Fig. 1 with constant speed moves, in such moving process, should be when nozzle 27 arrival by the corresponding color fildtering zone 7 of its ink supply, it is that colour filter unit material is from these nozzle 27 ejections that printing ink is just arranged.
Have, ink ejection amount at this moment is not the quantity of the volume of whole landfill color fildtering zones 7 again, has only the part of this total amount, then is the amount of total amount 1/4 in the present embodiment.This be because, also to introduce as the back, each color fildtering zone 7 is not to get with regard to landfill by 27 ink-jets of nozzle, but has passed through n time overlapping ink-jet, be exactly in the present embodiment through four overlapping ink-jet ability landfills whole volumes.
After the intact delegation of 22 pairs of mother substrate 12 main scannings of ink gun (step S14 is YES), can oppositely move back to original position (a) (step S15).And ink gun 22 also is subjected to the driving of subscan drive unit 21, moves a predetermined subscan amount δ (step S16) along sub scanning direction Y.
In the present embodiment, CPU69 is divided into a plurality of groups of n to a plurality of nozzles 27 that form the nozzle rows 28 of ink gun 22 among Fig. 1 on principle.In the present embodiment, n=4 that is to say, is the length that is formed by 180 nozzles 27 that the nozzle rows 28 of L is divided into four groups.Like this, a nozzle sets is that L/4 is determined by the length L/n that comprises 180/4=45 nozzle 27 just.Above-mentioned subscan amount δ is set to the projection of said nozzle group length L/4 on sub scanning direction, i.e. (L/4) cos θ.
Therefore, the ink gun 22 of original position (a) is got back to by intact delegation in main scanning, as shown in fig. 1, move to position (b) along sub scanning direction Y translation one segment distance δ.Have, in Fig. 1, the position of depicting (a) and position (b) has a little displacement to main scanning direction X again, and this is the technique of painting of taking for convenience of explanation, and in fact, position (a) and position (b) is in same position to main scanning direction.
The ink gun 22 that has moved to position (b) by subscan carries out the main scanning of step S13 repeatedly and moves and ink-jet.When carrying out this main scanning and move, colour filter forms the ink-jet first time that the scan line that is positioned at secondary series in the district 11 is accepted first group of nozzle sets on mother substrate 12, meanwhile, the scan line that is positioned at first row is but accepted the from the beginning ink-jet second time of several second nozzle sets.
After this, (c)～position (k) moves do subscan ink gun 22 repeatedly in the position, moves do main scanning repeatedly and ink-jet (step S13～step S16) simultaneously, so as to finishing the China ink that is coated with of the row in the colour filter formation district 11 on the mother substrate 12 handled.In the present embodiment, because being divided into four groups according to nozzle rows 28 decides subscan amount δ, so, row in the above-mentioned colour filter formation district 11 are being carried out main scanning and subscan at the end, each color fildtering zone 7 all receives the inkjet process one by one of four nozzle sets, total receives inkjet process four times, and just finally receiving by the determined full dose printing ink of its total measurement (volume) is colour filter unit material.
Like this, after the row termination ink-jet of one in the colour filter section 11, ink gun 22 is moved to the original position (step S19) of the colour filter section 11 of next column under the driving of subscan drive unit 21, then, equally the colour filter of these row is formed district 11 and carry out main scanning, subscan and ink-jet repeatedly, form (the step S13～S16) of formation colour filter unit in the district 7 in colour filter unit at last.
Thereafter, formed among R, G, the B for example colour filter unit 3 of R look (step S18 is YES) of a certain color as all colour filters in the mother substrate 12 being formed district 11, then enter step S20, the mother substrate of handling 12 is delivered to the outside by substrate feedway 23 or other Handling devices.
After this, short of operator sends the instruction (step S21 is NO) that processing finishes, and then gets back to step S2, again another mother substrate 12 is carried out the ink-jet operation of R look.
If the operator sends the instruction (step S21 is YES) of the end of job, CPU69 then is transported to the ink gun among Fig. 8 22 position at pressing device 76 places, carries out gland by 76 pairs of ink guns of this pressing device 22 and handles (step S22).
According to above step first kind of color after for example the R look carries out composition in having finished with the R, the G that constitute colour filter, B three looks, again mother substrate 12 is transported to for example ink discharge device 16 of the colour filter unit material of G look of second kind of color forming among R, G, the B, carry out G look composition, at last, also to be transported to for example ink discharge device 16 of the colour filter unit material of B look of the third color of forming among R, G, the B to mother substrate 12, carry out B look composition.By these operations, the result has just made mother substrate 12 finished products, is formed with a plurality of colour filter 1[Fig. 5 (a) above it], and desirable R, the G that forms according to arrangements such as bar patterns, the point of B three looks are arranged on the colour filter 1.This mother substrate 12 is cut into each colour filter form district 11, just can obtain many single colour filters 1.
Have again, do colored the demonstration if this colour filter 1 is used for liquid-crystal apparatus, also need be in its surperficial multilayer electrode and alignment films etc.In this case, if before multilayer electrode and alignment films, just mother substrate 12 is cut into colour filter 1 one by one, will make the operation that formed electrode etc. the afterwards very trouble that becomes.Therefore, in this case, preferably after finishing colour filter 1 on the mother substrate 12, immediately mother substrate 12 is not cut, but after having finished the additional process of necessity such as forming electrode and formation alignment films, just mother substrate 12 cuttings are come.
As mentioned above, if adopt the manufacture method and the manufacturing installation of the colour filter in the present embodiment, each colour filter unit 3 in the colour filter 1 shown in Fig. 5 (a) is not that a main scanning by ink gun 22 (referring to Fig. 1) just forms, each independent colour filter unit 3 all receive n time of a plurality of nozzles 27 of belonging to the different spray nozzles group-be in the present embodiment four times-overlapping ink-jet just formed the thickness of being scheduled to.Therefore, even suppose the dispersiveness that exists ink ejection amount between a plurality of nozzles 27, also can prevent to produce between each colour filter unit 3 the thickness dispersiveness.So, the light transmission features of colour filter just can keep uniformity on whole plane.
Self-evident, owing to be to utilize the ink-jet of ink gun 22 to form colour filter unit 3, just needn't experience the such complicated procedures of forming of manufacture method such as adopting photoetching process in the manufacture method of present embodiment, also avoided the waste of material.
But, the ink ejection amount of a plurality of nozzles 27 of the nozzle rows 28 of formation ink gun 22, its distribution is uneven, this did explanation in conjunction with Figure 23 (a).And particularly at nozzle rows 28 several nozzles 27 near end positions, 10 of each end nozzles 27 for example, ink ejection amount is especially bigger than normal, addresses above.So, if used ink ejection amount, so, just can not look to obtaining the ink-jet film of uniformity that is the thickness of colour filter unit than the big a lot of nozzle of other nozzles.
Therefore, desirable way as shown in figure 13, be to preestablish not make several that in forming a plurality of nozzles 27 of nozzle rows 28, be positioned at nozzle rows 28 two end portions E-for example about 10-ink-jet, and only the nozzle 27 of remaining part F is divided into some groups, such as four groups, carry out subscan with this nozzle sets unit then and move.
In this 1st embodiment, what make partition 6 uses is lighttight resin material, also can use the resin material of printing opacity to make printing opacity partition 6 in fact.In a kind of occasion in back, only need be at the correspondence position between per two colour filter units, for example on partition 6 or below, be provided with the metal film or the resin material of light-proofness separately, to form black matrix.But, form partition 6, just black matrix needn't be set with the translucent resin material.
In addition, in this 1st embodiment, as colour filter unit, employing be R, G, B, in fact, be not limited to R, G, B, for example, also might as well adopt for example M (dark blue), Y (Huang), M (dark red).In a kind of occasion in back, just do not use the colour filter unit material of R, G, B yet, and to use instead have C, Y, the colour filter of M look unit material.
Have, in this 1st embodiment, partition 6 usefulness photoetching processes form, but also can be the same with colour filter, form partition 6 with ink-jet method again.
(the 2nd embodiment)
Fig. 2 schematically expresses in another embodiment of the manufacture method of colour filter of the present invention and manufacturing installation, and each colour filter unit how to form in the district 11 with ink gun 22 colour filter on mother substrate 12 forms district's 7 spraying printing ink that is colour filter unit material.
The summary operation of being carried out in the present embodiment is identical with the operation shown in Fig. 6; The ink discharge device that ink-jet is used is also identical in mechanism with the device shown in Fig. 8.And the CPU69 among Figure 14 is divided into the n group to a plurality of nozzles 27 that form nozzle rows 28 on principle, for example four groups, and then corresponding to the length L/n of each nozzle sets in other words L/4 decide subscan amount δ, this point also situation with Fig. 1 is identical.
The difference of present embodiment and previous embodiment shown in Figure 1 is, to the program software change in the memory 71 that is stored in Figure 14, specifically, to main scanning control computing and subscan control computing change by CPU69 carried out.
More specifically get on very well, in Fig. 2, ink gun 22 is after scanning mobile end along main scanning direction X, do not move back to original position, but be controlled behind the main scanning mobile end carrying out toward the direction, move an amount of movement δ who is equivalent to a nozzle sets along sub scanning direction Y immediately, move to position (b), after this, again along main scanning direction X towards scanning mobilely in the opposite direction with above-mentioned side, get back to the reposition that on sub scanning direction Y, departs from original position (a) segment distance δ (b ').Have again, during these two certainly during from position (a) to position (b) carries out main scanning and during (b ') carries out main scanning from position (b) to the position, all can have printing ink to spray selectively from a plurality of nozzles 27.
In other words, in the present embodiment, ink gun 22 does not inject homing action therebetween when carrying out main scanning and subscan, and the two is replacing continuously and is carrying out, and so, owing to saved homing action institute's time spent, the whole working time is shortened.
(the 3rd embodiment)
Fig. 3 schematically expresses in the another embodiment of the manufacture method of colour filter of the present invention and manufacturing installation, how to form each colour filter unit formation district 7 spraying printing ink that is colour filter unit material in the district 11 with ink gun 22 colour filter on mother substrate 12.
The summary operation of being carried out in the present embodiment is identical with the operation shown in Fig. 6; The ink discharge device that ink-jet is used is also identical in mechanism with the device shown in Fig. 8.And the CPU69 among Figure 14 is divided into the n group to a plurality of nozzles 27 that form nozzle rows 28 on principle, and for example four groups, this point also situation with Fig. 1 is identical.
The difference of present embodiment and first embodiment shown in Figure 1 is, in the step S 12 of Figure 15, when ink gun 22 is set on the mother substrate 12 describe original position the time, the orientation of ink gun 22 is to make the bearing of trend of its nozzle rows 28 parallel with sub scanning direction Y, shown in position among Fig. 3 (a).When the injector spacing in the nozzle head 22 equated with the first spacing of the colour filter on the mother substrate 12, such nozzle arrangement structure was favourable structure.
In the present embodiment, ink gun 22 also is to move do main scanning along main scanning direction X from original position (a) to terminal location (k), then get back to original position, move do subscan with an amount of movement δ along sub scanning direction Y more at last, operation so repeatedly, simultaneously spraying printing ink selectively from a plurality of nozzles 27 during carrying out main scanning and moving is colour filter unit material, and the colour filter unit that colour filter forms in the district 11 on mother substrate 12 forms the first materials of district's 7 coating colour filters thus.
Have, in the present embodiment, because the set positions of mouth mouth row 28 is parallel with sub scanning direction Y, subscan amount of movement δ just is set at the length L/n of the nozzle sets after equaling to cut apart, i.e. L/4 again.
(the 4th embodiment)
Fig. 4 schematically illustrates out in the another embodiment of the manufacture method of colour filter of the present invention and manufacturing installation, how to form each colour filter unit formation district 7 spraying printing ink that is colour filter unit material in the district 11 with ink gun 22 colour filter on mother substrate 12.
The summary operation of being carried out in the present embodiment is identical with the operation shown in Fig. 6; The ink discharge device that ink-jet is used is also identical in mechanism with the device shown in Fig. 8.And the CPU69 among Figure 14 is divided into the n group to a plurality of nozzles 27 that form nozzle rows 28 on principle, and for example four groups, this point also situation with Fig. 1 is identical.
The difference of present embodiment and first example shown in Figure 1 is, in the step S12 of Figure 15, when ink gun 22 is set on the mother substrate 12 describe original position the time, the orientation of ink gun 22 is to make the bearing of trend of its nozzle rows 28 parallel with sub scanning direction Y, shown in Fig. 4 (a); Also be with the embodiment of Fig. 2 the same, ink gun 22 does not inject homing action therebetween when carrying out main scanning and subscan, and the two is replacing continuously and is carrying out.
Have again, at present embodiment shown in Figure 4 with on shown in Figure 3 among embodiment, because main scanning direction X is to nozzle rows 28 rectangular directions, as shown in figure 11, be provided with two row nozzle rows 28 along main scanning direction X, so two nozzles 27 that are stated from same main scanning line can be supplied with colour filter unit material to a color fildtering zone 7.
(the 5th embodiment)
Figure 16 shows used ink gun 22A in an embodiment again of the manufacture method of colour filter of the present invention and manufacturing installation.The difference of the ink gun 22 shown in this ink gun 22A and Figure 10 is, nozzle rows 28R with ejection R color ink, the nozzle rows 28B of the nozzle rows 28G of ejection G color ink and ejection B color ink three kinds of nozzle rows altogether forms an ink gun 22A, and these three kinds of nozzle rows all are provided with the ink-jet system shown in Figure 12 (a) and Figure 12 (b) separately: the ink-feeding device 37R of R look is connected to ink-jet system corresponding to R chromatic nozzle row 28R, the ink-feeding device 37G of G look is connected to ink-jet system corresponding to G chromatic nozzle row 28G, the ink-feeding device 37B of B look is connected to ink-jet system corresponding to B chromatic nozzle row 28B.
The summary operation of being carried out is identical with the operation shown in Fig. 6 in an embodiment; The ink discharge device that ink-jet is used, also basic identical with the device shown in Fig. 8.In addition, CPU69 among Figure 14 is divided into the n group to a plurality of nozzles 27 that form nozzle rows 28R, 28G and 28B on principle, and for example four groups, to each such nozzle sets, make ink gun 22A carry out subscan with subscan amount of movement δ, this point also situation with Fig. 1 is identical.
In the embodiment shown in fig. 1,22 of ink guns are provided with a kind of nozzle rows 28,, must prepare ink gun 22 as shown in Figure 8 respectively by R, G, three kinds of colors of B if will form the colour filter of forming by R, G, three kinds of colors of B.Different therewith is that when use had the ink gun 22A of structure shown in Figure 16, ink gun 22A carries out a main scanning along main scanning direction X can spray R, G, three kinds of colors of B simultaneously to mother substrate 12, so it is just enough only to prepare an ink gun 22A.And, consistent by the spacing that makes color fildtering zone on interval and the mother substrate between the three chromatic nozzles row, can spray R, G, three kinds of colors of B simultaneously.
(the 6th embodiment)
Figure 17 shows an embodiment of the manufacture method of liquid-crystal apparatus among the present invention.Figure 18 shows an embodiment of the liquid-crystal apparatus of making according to this manufacture method.Figure 19 shows the cross-section structure that blocks this liquid-crystal apparatus along IX-IX line among Figure 18.Before the manufacture method and manufacturing installation of this liquid-crystal apparatus of explanation, at first giving one example illustrates with the made liquid-crystal apparatus of this manufacture method.And the liquid-crystal apparatus of present embodiment belongs to the liquid-crystal apparatus that carries out the colored Transflective mode that shows with the simple matrix mode.
In Figure 18, can form liquid-crystal apparatus 101 by following operation: the semiconductor chip IC103a and the IC103b that will be used for driving liquid crystal are installed on the liquid crystal panel 102, to be connected on the liquid crystal panel 102 as the FPC (flexible print circuit) 104 of wiring connection important document, and lighting device 106 also is set as backlight at the dorsal part of liquid crystal panel 102.
As shown in figure 19, the panel-shaped base body material 111a that makes such as useful clear glass of the first substrate 107a or transparent plastic.On the inner surface (uper side surface among Figure 19) of this matrix material 111a, being formed with reflectance coating 112, being laminated with dielectric film 113 on it, is the first electrode 114a above again, looking in the direction of arrow D is bar shaped (referring to Figure 18), the top again alignment films 116a that forms.In addition, at the outer surface (downside surface among Figure 19) of matrix material 111a, attach polarizer 117a with methods such as stickups.
In Figure 18, in order to represent the arranging situation of the first electrode 114a clearlyer, it is much wide that the gap ratio actual conditions of those electrode strips are wanted, and therefore the bar number of the first electrode 114a that draws seldom, but in fact, on matrix material 111a, be formed with many strip electrodes bar of Duoing than the first electrode 114a.
As shown in figure 19, the panel-shaped base body material 111b that makes such as also useful clear glass of the second substrate 107b or transparent plastic.On the inner surface (downside surface among Figure 19) of this matrix material 111b, be formed with colour filter 118, form the second electrode 114b on it again, looking along arrow D direction is bar shaped, and with the above-mentioned first electrode 114a quadrature (referring to Figure 18), also be formed with alignment films 116b thereon.
In addition, the outer surface (uper side surface among Figure 19) at matrix material 111b also is pasted with polarizer 117b with methods such as stickups
In Figure 18, in order more clearly to express the arranging situation of the second electrode 114b, situation with the first electrode 114a is the same, it is much wide that the gap ratio actual conditions of those electrode strips are wanted, thereby the bar number of the second electrode 114b that draws seldom, but in fact, on matrix material 111b, be formed with many strip electrodes bar of Duoing than the second electrode 114b.
As shown in figure 19, surrounded in the gap, that is in so-called box crack, enclosed for example STN (supertwist is to row) liquid crystal L by the first substrate 107a, the second substrate 107b and encapsulant 108.Also be distributed with a large amount of small spherical liners 119 on the inner surface of the first substrate 107a or the second substrate 107b, these liners 119 are present in can play the effect that keeps the thick uniformity of this box in the box crack.
The two makes orthogonal arrangement the first electrode 114a and the second electrode 114b, therefore, looks along the direction of arrow D among Figure 19, and their crossover arrangement becomes lattice-like.And each crosspoint of this lattice-like constitutes a pixel elements.D looks along arrow, and colour filter 118 is by R (red), G (green), B (indigo plant) element arrangements of all kinds are become certain figure, for example bar pattern, triangular pattern or inlay that shape figure etc. forms.An above-mentioned pixel elements is corresponding to each look in R, G, B three looks, and R, G, B three colour primitive elements constitute a pixel as a unit.
Thereby by making a plurality of pixel elements that are arranged in lattice-like make pixel luminous selectively, just have images such as literal, numeral in the outside of the second substrate 107b of liquid crystal panel 102 and show.Doing the zone that image is shown like this is effective pixel region, and the rectangle plane zone that is marked by arrow V in Figure 18 and Figure 19 then is effective viewing area.
In Figure 19, reflectance coating 112 is formed by APC alloy, AL reflectorized materials such as (aluminium), forms opening 121 in the position corresponding to each pixel elements in the first electrode 114a and the second electrode 114b crosspoint.As a result, look the also the same lattice-like that is arranged in of opening 121 with pixel elements along the direction of arrow D among Figure 19.
The first electrode 114a and the second electrode 114b for example can be formed by transparent conductive material ITO.In addition, alignment films 116a and 116b form the uniform rete of thickness by the coating polyimide resin.These alignment films 116a and 116b pass through friction treatment, have determined the initial orientation of liquid crystal molecule on the first substrate 107a and the second substrate 107b surface thus.
In Figure 18, the first substrate 107a comes compared with the second substrate 107b, and it is big that area is wanted, and when the two was fit together with encapsulant 108, the first substrate 107a had the extension 107c that stretches out the second substrate 107b outside.And, on the extension 107c of this substrate, form the lead-in wire 114c that extends out from the first electrode 114a according to suitable figure, the lead-in wire 114d of the second electrode 114b conducting on the electric conductor 109 (referring to Figure 19) through being present in encapsulant 108 inside and the second substrate 107b, with the input salient point of the IC103a that is used for driving liquid crystal is the metal line 114e that input terminal is connected, and the various wirings such as metal line 114f that are connected with the input salient point of the IC103b that is used for driving liquid crystal.
In the present embodiment, the lead-in wire 114c that extends out from the first electrode 114a and connect the lead-in wire 114d of the second electrode 114b, all be to use with these electrode identical materials ITO be that conductive oxide forms.In addition, the wiring that is used for driving input one side of the IC103a of liquid crystal and IC103b is the metal material that metal line 114e and 114f then use low-resistance value, and for example the APC alloy forms.The APC alloy mainly contains Ag, the also subsidiary alloy that Pd and Cu are arranged, for example, the alloy that constitutes by Ag98%, Pd1% and Cu%.
In the present embodiment, drive IC103a that liquid crystal uses and IC103b are installed to substrate extension 107c by means of ACF (anisotropic conductive film) 122 bondings surface.That is to say that in the present embodiment, liquid crystal panel is to be directly installed on structure on the substrate with semiconductor chip, promptly so-called COG (chip bonding is on glass) mode forms.In the mounting structure of this COG type, the conducting particles that contains by means of ACF122 inside, couple together with metal line 114e and 114f conduction driving IC103a that liquid crystal uses and the input salient point of IC103b, drive IC103a that liquid crystal uses and the output salient point of IC103b and couple together with lead-in wire 114c and 114d conduction.
As shown in figure 18, FPC104 comprises flexible resin film 123, the circuit 126 and the metal line terminal 127 that constitute by comprising chip part 124.Welding of circuit 126 usefulness or other electrically conductive connection method are directly installed on the resin film 123.And metal line terminal 127 usefulness APC alloys, Cr, Cu or other conductive materials form.Form the part of metal line terminal 127 among the FPC104, couple together by the part that forms metal line 114e and 114f among the ACF122 and the first substrate 107a.And being used for of the conducting particles that contains by means of ACF122 inside realized the conductive communication of the metal line terminal 127 of the metal line 114e of substrate one side and 114f and FPC one side.
In the edge of the opposite side of FPC104, be formed with and the outside terminal 131 that is connected, the external circuit that does not draw among this external connection terminals 131 and the figure is connected.Then, the signal that transmits according to this external circuit drives IC103a and the IC103b that is used for driving liquid crystal, and the side in the first electrode 114a and the second electrode 114b provides sweep signal and provides data-signal to the opposing party.So, the pixel elements of arranging the lattice-like that forms in effective viewing area V makes pixel elements separately be subjected to Control of Voltage, thereby the orientation of liquid crystal L is controlled by pixel elements separately.
As shown in figure 19, diffusion disk 133 on the light-emitting face 132b that the lighting device 106 that plays so-called effect backlight in Figure 18 includes the light conductor 132 that is made of acrylic resin etc., be arranged on this light conductor 132, be arranged on the reflector plate 134 on the light-emitting face 132b opposing face of light conductor 132, and as the LED (light emitting diode) 136 of light emitting source.
LED136 is subjected to LED substrate 137 and supports, and this LED substrate 137 for example is installed on light conductor 132 integrally formed support sections (not drawing among the figure).By LED substrate 137 being installed in the desired location of support section, LED136 can be placed position towards the side sensitive surface 132a of light conductor 132.What symbol 138 marked is the padded coaming that is used for cushioning the impact that is added on liquid crystal panel 102.
When LED136 is luminous, its light enters and is imported into light conductor 132 inside from sensitive surface 132a, while propagate be subjected to the reflection of reflector plate 134 and light conductor 132 walls during, shine outside through diffusion disks 133 with the form of planar light from light-emitting face 132.
Because the liquid-crystal apparatus 101 in the present embodiment has above structure, in the enough bright occasion of exterior light such as sunshine, room light, as shown in figure 19, these exterior light enter liquid crystal panel 102 inside from the second substrate 107b, one side, there by liquid crystal L with after reflectance coating 112 reflection offers liquid crystal L again.Liquid crystal L be subjected to orientation control on each R, G, B pixel elements, thereby the light that offers liquid crystal L is modulated on each pixel elements also under the effect of its electrode 114a of clamping and 114b.By means of this modulation produce can be by polarizer 117b light with can not be by its light, so, just demonstrate images such as literal, numeral to the outside of liquid crystal panel 102.What at this moment carry out is that reflection-type shows.
On the other hand, in the occasion that can't obtain sufficient exterior light, LED136 is luminous, from the light-emitting face 132b exit plane light of light conductor 132.These light offer liquid crystal L by the opening 121 that forms on reflectance coating 112.At this moment, the situation that shows with reflection-type is the same, and the light that is provided is subjected to being orientated the modulation of controlled liquid crystal L on each pixel elements, thereby demonstrates image to the outside.What at this moment carry out is that transmission-type shows.
Liquid-crystal apparatus 101 with said structure for example just can adopt manufacture method shown in Figure 17 to make.In this manufacture method, the series of processes from operation P1 to operation P6 all belongs to the operation that forms the first substrate 107a, and the series of processes from operation P11 to operation P14 then belongs to the operation that forms the second substrate 107b.First substrate formation operation and second substrate formation operation are normally independently carried out respectively.
Illustrate that first first substrate forms operation.At first on the large-area raw material mother substrate that forms with transparent glass, light-passing plastic etc., form the reflectance coating 112 of a plurality of parts of liquid crystal panel 102 with photoetching process etc., then form dielectric film 113 (operation P1) with the one-tenth embrane method of knowing thereon, then, adopt photoetching process etc. to form the first electrode 114a and wiring 114c, 114d, 114e and 114f (operation P2).
Next, form alignment films 116a (operation P3) with methods such as coating or printings on the first electrode 114a, this alignment films 116a passes through friction treatment again, the initial orientation (operation P4) of decision liquid crystal.Next, for example adopt serigraphy one class methods to form the close material 108 (operation P5) of penetrating of some annulars, be sprinkled into spherical liner 119 (operation P6) thereon again.By above operation, just formed large-area first mother substrate, a plurality of panel figures on the first substrate 107a of liquid crystal panel 102 are arranged above it.
Form outside the operation at above-mentioned first substrate, also carry out second substrate and form operation (the operation P11 among Figure 17～operation P14).At first prepare the large tracts of land raw material mother substrate made with transparent glass, light-passing plastic and so on material, form the colour filter 118 (operation P11) of a plurality of parts of liquid crystal panel 102 in its surface.The operation that forms these colour filters is to adopt the manufacture method shown in Fig. 6 to carry out.In this manufacture method, formation R, G, B colour filter of all kinds unit have adopted the ink discharge device 16 among Fig. 8, process according to the method for the control ink gun shown in Fig. 1, Fig. 2, Fig. 3 or Fig. 4 etc.About the manufacture method of these colour filters and the method for control ink gun, identical with the content that has illustrated before this, repeat no more here.
Shown in Fig. 6 (d), at mother substrate 12 is to form on the raw material mother substrate after colour filter 1 is colour filter 118, then just form the second electrode 114b (operation P12) with photoetching process, then adopt methods such as coating or printing to form alignment films 116b (operation P13) again, at last this alignment films 116b is carried out friction treatment, with the initial orientation (operation P14) of decision liquid crystal.By above operation, just formed large-area second mother substrate, a plurality of panel figures on the second substrate 107b of liquid crystal panel 102 are arranged above it.
After making large-area first mother substrate and second mother substrate by above operation, these mother substrates by clamping encapsulant 108 therebetween after contraposition, fit together mutually (operation P21).So just made a plurality of faceplate parts that comprise liquid crystal panel, these faceplate parts are formed on the macaroni plate structure of not enclosing under the mesomorphic state.
Then, form the scribing groove, promptly, panel construction is broken into two with one's hands (operation P22) with this groove as benchmark again for the groove that cuts off usefulness in the precalculated position of Manufactured macaroni plate structure.The liquid crystal that has so just formed the encapsulant 108 of each liquid crystal panel part injects the so-called strip macaroni plate structure that is in the state of exposing with opening 110 (referring to Figure 18).
After this, the opening 110 that injects usefulness by these liquid crystal that expose is injected into each liquid crystal panel inside partly to liquid crystal L, with resin etc. each liquid crystal injecting port 110 is shut (operation P23) again.It for example is to store liquid crystal in hold-up vessel that common liquid crystal injects processing, the hold-up vessel and the strip macaroni plate structure of storing this liquid crystal are put into vacuum chamber, after being pumped into vacuum state, vacuum chamber in vacuum chamber, strip macaroni plate structure is immersed in the liquid crystal, then, exit to atmospheric pressure to vacuum chamber.At this moment, macaroni plate structure inside is in vacuum state, and liquid crystal just is imported into macaroni plate structure inside by the liquid crystal injection with opening under atmospheric effect.Liquid crystal can adhere to some liquid crystal on the liquid crystal panel structure after injecting, and therefore, the strip panel after injection is handled through liquid crystal also will be accepted to clean and handle at operation P24.
After this, forming the scribing groove to having injected on the strip motherboard structure that liquid crystal and cleaning finish by the precalculated position, is benchmark cut growth strip panel with this scribing groove again, cuts out a plurality of liquid crystal panels (operation P25) thus more one by one.On each liquid crystal panel 102 of making like this, as shown in figure 18, install respectively and drive IC103a and the IC103b that liquid crystal is used, install as lighting device backlight 106, reconnect FPC104, just finished required liquid-crystal apparatus 101 (operation P26) at last.
The manufacture method of liquid-crystal apparatus described above and manufacturing installation especially in the stage of making colour filter, have following feature.That is: each colour filter unit 3 in the colour filter among the colour filter 1 shown in Fig. 5 (a) that is Figure 19 118, be not that ink gun 22 (referring to Fig. 1) is only made main scanning X and just formed, but receive n time-for example four times of a plurality of nozzles 27 of belonging to the different spray nozzles group-overlapping ink-jet just formed the thickness of being scheduled to.Therefore, though suppose a plurality of nozzles 27 each other ink ejection amount exist dispersedly, also can avoid producing the dispersiveness of thickness between a plurality of colour filter unit 3, thereby can make the light transmission features uniformity of colour filter.So, in the liquid-crystal apparatus of Figure 19, can obtain not having the bright-coloured colour of unevenness of tint phenomenon to show.
And, in the manufacture method and manufacturing installation of the liquid-crystal apparatus of present embodiment,, form colour filter unit 3 by the ink-jet of adopting ink gun 22 owing to used ink discharge device shown in Figure 8 16, thereby needn't there be the waste of material through adopting the such complicated procedures of forming of photoetching process yet.
(the 7th embodiment)
Figure 20 has provided an embodiment of the manufacture method of EL device among the present invention.Figure 21 has then represented the master operation of this manufacture method and the major profile structure of the final EL device that obtains.Shown in Figure 21 (d), on transparency carrier 204, form pixel electrode 202, between each pixel electrode 202, form some embankments 205, they are looked from the direction of arrow G and are latticed, in these latticed recesses, form hole injection layer 220, in each latticed recess, form R look luminescent layer 203R, G look luminescent layer 203G and B look luminescent layer 203B, look from the direction of arrow G, they are predetermined arrangements such as bar shaped arrangement, on them, form opposite electrode 213 again, thereby formed EL device 201.
As (Thin Film Diode: thin film diode) two ends type active component such as element drives the occasion of pixel electrodes 202, and above-mentioned opposite electrode 213 is looked from the direction of arrow G and formed bar shaped with TFD.Thin film transistor (TFT)) etc. in that (Thin Film Transistor: the three terminal type active component drives the occasion of pixel electrode 202, and then above-mentioned opposite electrode 213 just forms single face electrode with TFT.
Formed a pixel elements by the zone of each pixel electrode 202 and each opposite electrode 213 the two clamping, the pixel elements of R, G, B three looks is formed a unit, forms a pixel.Flow through the electric current of each pixel elements by control, can make in a plurality of pixel elements desirable pixel elements luminous selectively, so just demonstrate desirable full-colour image in arrow H direction.
Above-mentioned EL device 201 for example can adopt the manufacture method shown in Figure 20 to make.
That is, at operation P51, shown in Figure 21 (a), on the surface of transparency carrier 204, form TFD element or TFT element one class active component earlier, then form pixel electrode 202 again.As for the formation method, can adopt for example photoetching process, vacuum deposition method, sputtering method or pyrosol method etc.Material as pixel electrode then has the composite oxides of ITO (tin indium oxide), tin oxide, indium oxide and zinc oxide etc.
Then, at operation P52, shown in Figure 21 (a), with the patterning process of knowing, such as photoetching process, forming partition is embankment 205.With these embankment 205 landfills between each transparency electrode 202.Thereby can improve contrast, prevent the luminescent material colour mixture and prevent from light leak between pixel and the pixel.As the material of embankment 205,, there is no particular restriction as long as the solvent of EL material is had corrosion resistance, but, preferably want to carry out the fluorination treatment of carbon fluorine gas plasma treatment, for example, organic materials such as acrylic resin, epoxy resin, light-sensitive polyimide preferably.
Next, before the printing ink that the spraying hole injection layer is used, substrate 204 is carried out the continuumpiston of oxygen and carbon fluorine gas plasma and handle (operation P53).By such processing, make polyimide surface have repellency, make ITO surface possess hydrophilic property, thereby can control the adhesional wetting of this side of substrate, make ink-jet drop can constitute fine figure.Produce the device of plasma, can be used in the device that produces plasma in the atmosphere equally with the device that produces plasma in a vacuum.
Then, in operation P54, shown in Figure 21 (a), the printing ink that the ink gun 22 ejection hole injection layers of the ink discharge device 16 from Fig. 8 are used carries out the composition spraying on each pixel electrode 202.Concrete ink gun control method adopts Fig. 1, Fig. 2, Fig. 3 or method shown in Figure 4.After the spraying, under the condition of vacuum (1torr), room temperature and 20 minutes, remove desolvate (operation P55) again.After this, also in atmosphere,, just form the immiscible hole injection layer of using with luminescent layer 220 (operation P56) of printing ink at last 20 ℃ temperature (on hot plate) heat treatment 10 minutes.Thickness is 40nm.
Next, in operation P57, shown in Figure 21 (b), the printing ink that printing ink that the R luminescent layer is used in the spraying of employing ink-jet method on the hole injection layer 220 in each color fildtering zone and G luminescent layer are used.Here, the printing ink that each luminescent layer is used is ink gun 22 ejections of the ink discharge device from Fig. 8 16 also, and in addition, the controlling party rule of ink gun is according to the method shown in Fig. 1, Fig. 2, Fig. 3 or Fig. 4.Adopt ink-jet method can easily and in the short time, construct fine figure.And, can also change thickness by concentration and the ink ejection amount that changes solid constituent in the ink component.
After spraying the printing ink that luminescent layer uses, under the condition of vacuum (1toll), room temperature and 20 minutes, remove desolvate (operation P58), then in nitrogen atmosphere, carry out 150 ℃ of heat treatments of four hours again, make it conjugation, form R look luminescent layer 203R and G look luminescent layer 203G (operation P59).Thickness is 50nm.Be insoluble to solvent by the luminescent layer behind the heat treatment conjugation.
And, before forming luminescent layer, can carry out the continuumpiston processing of oxygen and carbon fluorine gas plasma to hole injection layer 220.Through such processing, on hole injection layer 220, can form fluoride layer, improve the hole injection efficiency by improving ionization potential, provide luminous efficiency high organic El device at last.
Then, in operation P60, shown in Figure 21 (c), B look luminescent layer 203B is overlapped to form on R look luminescent layer 203R, the G look luminescent layer 203G and hole injection layer 220 in each pixel elements.So, not only form R, G, B three primary colors, but also filled and led up the step between R look luminescent layer 203R and G look luminescent layer 203G and the embankment 205, obtained smooth surface.Thus, can prevent from effectively to be short-circuited between the upper/lower electrode.By adjusting the thickness of B look luminescent layer 203B, the stepped construction of B look luminescent layer 203B and R look luminescent layer 203R and G look luminescent layer 203G plays a part electronics and injects transport layer, can not send B coloured light.
Forming the method for above-mentioned B look luminescent layer 203B, for example, can be the common tumbling barrel process that belongs to wet method, perhaps can be the same with the method for G look luminescent layer 203G with forming R look luminescent layer 203R, adopt ink-jet method.
Again, in operation P61, shown in Figure 21 (d), by forming opposite electrode 213, just made needed EL device 201.At opposite electrode 213 is the occasion of face electrode, for example can adopt Mg, Ag, Al or Li etc. as material, adopts evaporation, sputtering method etc. to become embrane method to form.In addition, be the occasion of strip electrode at opposite electrode 213, so, will use photoetching process one class patterning process and form the electrode layer of film forming.
When manufacture method that adopts EL device described above and manufacturing installation, method as the control ink gun, adopted Fig. 1, Fig. 2, control method shown in Fig. 3 or Fig. 4 etc., therefore, hole injection layer 220 and R among Figure 21 in each pixel elements, G, B luminescent layer 203R of all kinds, 203G and 203B, be not that ink gun 22 (referring to Fig. 1) only carries out main scanning X and just forms, hole injection layer in pixel elements and/or luminescent layer of all kinds all be receive n time-for example four times of a plurality of nozzles 27 of belonging to the different spray nozzles group-overlapping ink-jet just reach predetermined thickness.So, exist the dispersiveness of ink ejection amount each other even suppose a plurality of nozzles 27, also can prevent to produce the dispersiveness of thickness between a plurality of pixel elements, thereby the luminous distribution character of EL device light-emitting area is kept uniformity in the plane.So, in the EL device 201 of Figure 21 (d), can obtain not having the bright-coloured colour of unevenness of tint phenomenon to show.
And, in the manufacture method and manufacturing installation of the EL of present embodiment device, owing to adopted the ink discharge device 16 shown in Fig. 8, by adopting ink gun 22 ink-jets formation R, the versicolor pixel elements of G, B, thereby needn't there be the waste of material through adopting the such complicated procedures of forming of photoetching process yet.
(other embodiment)
Enumerate some preferred embodiments above the present invention has been described, yet the present invention is not limited to these embodiment, also can in the described invention scope of claim, many variations be arranged.
For example, in the manufacturing installation of Fig. 8 and colour filter shown in Figure 9, be that ink gun 22 is moved along main scanning direction X, be substrate 12 is moved and to realize the subscan of 22 pairs of substrates 12 of ink gun by subscan drive unit 21, in fact also can be conversely, carry out main scanning by substrate 12 mobile, carry out subscan by ink gun 22 mobile.
And, in the above-described embodiments, used the ink gun of structure with the flexural deformation ejection printing ink that utilizes piezoelectric element, also can use the ink gun of other arbitrary structures in fact.
And in the above-described embodiments, what provide as example all is the modal structure of main scanning direction and sub scanning direction quadrature, and in fact, the relation between main scanning direction and the sub scanning direction is not limited to orthogonality relation, also can be arbitrarily angled intersection.
And, in the above-described embodiments, though manufacture method and manufacturing installation with the manufacture method of the manufacture method of colour filter and manufacturing installation, the brilliant device of filter and manufacturing installation, EL device are that example is illustrated, the present invention is not limited to these in fact, might be used for making up on object all industrial technology departments of Micropicture.
For example, can enumerate formation method of various semiconductor elements (thin film transistor (TFT), thin film diode etc.), various wiring figure, dielectric film or the like, as an example of its range of application.
As material from the ink gun ejection, can do all selections according to the important document that on objects such as substrate, forms, for example, except above-mentioned printing ink and EL luminescent material, can also enumerate conductive materials such as quartz glass precursor, metallic compound, dielectric substance or semi-conducting material etc. as an one example.
And, in the above-described embodiments, though for being called " ink gun " for simplicity, but much less, being not limited to printing ink from the ejecta of this ink gun ejection, for example can also be various materials such as conductive material, dielectric substance or semi-conducting material such as above-mentioned EL luminescent material, quartz glass precursor, metallic compound.The liquid-crystal apparatus and the EL device that adopt the manufacture method in the foregoing description to make all can be loaded into for example display part of electronic installation such as mobile phone, portable computer.
[effect of invention]
As adopt the manufacture method and the manufacturing installation of colour filter of the present invention, then each colour filter unit in the colour filter is not that the ink gun run-down forms, each colour filter unit all is that the overlapping ink-jet that receives a plurality of nozzles that belong to the different spray nozzles group just reaches predetermined thickness, therefore, exist the dispersiveness of ink ejection amount each other even suppose a plurality of nozzles, also can prevent to produce the dispersiveness of thickness between a plurality of colour filter unit, thereby the light transmission features of colour filter is planar kept uniformity.
And the present invention needn't not have the waste of material through adopting the such complicated procedures of forming of photoetching process owing to be to use the method for ink gun yet.
And, as adopt the manufacture method and the manufacturing installation of liquid-crystal apparatus of the present invention, then in the stage of making colour filter, each colour filter unit in the colour filter is not that the ink gun run-down forms, the overlapping ink-jet that each colour filter unit all receives a plurality of nozzles that belong to the different spray nozzles group just reaches predetermined thickness, therefore, exist the dispersiveness of ink ejection amount each other even suppose a plurality of nozzles, also can prevent to produce the dispersiveness of thickness between a plurality of colour filter unit, thereby the light transmission features of colour filter is planar kept uniformity.Its result can obtain not having the bright-coloured coloured image of unevenness of tint phenomenon.
And, as adopt the manufacture method and the manufacturing installation of EL device of the present invention, then R, G, the B luminescent layer of all kinds in each pixel elements is not that an ink gun main scanning once forms, and these versicolor luminescent layers are that the overlapping ink-jet that receives a plurality of nozzles that belong to the different spray nozzles group just reaches predetermined thickness.Therefore, exist the dispersiveness of ink ejection amount each other even suppose each nozzle, also can prevent to produce the dispersiveness of thickness between a plurality of pixel elements, thereby, the luminous distribution character of EL device light-emitting area is planar kept uniformity, consequently, can obtain not having the bright-coloured coloured image of unevenness of tint phenomenon.
And in the manufacture method and manufacturing installation of EL device of the present invention, owing to be to use the ink gun ink-jet to form R, G, B pixel elements of all kinds, there is no need does not have the waste of material through adopting the such complicated procedures of forming of photoetching process yet.
And, as adopt ink gun control device of the present invention, then each color graphics is not that the ink gun run-down forms, each color graphics all be receive belong to the different spray nozzles group a plurality of nozzles repeatedly ink-jet just reach predetermined thickness, therefore, even a plurality of nozzle sets exist the dispersiveness of ink ejection amount each other, also can prevent to produce the dispersiveness of thickness between a plurality of color graphics, thereby the optical characteristics of color graphics is able to keep uniformity in the plane of optical component.
Therefore, in the colour filter as optical component, can form R, G, the B colour filter of all kinds unit as color graphics, it planar has the thickness of uniformity.And, in EL element, can form R, G, B luminescent layer and hole injection layer as color graphics as optical component, they planar have the thickness of uniformity.
Claims (16)
1. a material jet method is used for material is ejected on the object, it is characterized in that:
Comprise that the ink gun and the side in the above-mentioned object that will have the nozzle rows of having arranged a plurality of nozzles move the operation of at least one the nozzle ejection material from above-mentioned a plurality of nozzles simultaneously to the opposing party along main scanning direction,
In above-mentioned operation, the feasible nozzle that is positioned at the end of said nozzle row of control does not spray above-mentioned material.
2. material jet method as claimed in claim 1 is characterized in that:
The feasible a plurality of nozzles that are positioned at the end of said nozzle row of control do not spray above-mentioned material.
3. material jet method as claimed in claim 2 is characterized in that, also comprises:
Suppose that the said nozzle row are divided into a plurality of groups,
Make the side in above-mentioned ink gun and the above-mentioned object carry out subscan, so that each the above-mentioned group operation that can scan the same section of above-mentioned object along above-mentioned main scanning direction to the opposing party.
4. material jet method as claimed in claim 1 is characterized in that:
Suppose that the said nozzle row are divided into n nozzle sets,
If make that the length of remaining part is L behind the nozzle that does not spray above-mentioned material in that deduction is controlled among the said nozzle row, the number of said nozzle group is n, and when the angle of said nozzle row and above-mentioned sub scanning direction was θ, then above-mentioned subscan amount of movement δ was
δ(L/n)cosθ。
5. material jet method as claimed in claim 1 is characterized in that:
Above-mentioned ink gun is set up a plurality of, and the nozzle rows from each ink gun sprays different material mutually simultaneously.
6. material jet method as claimed in claim 1 is characterized in that:
Above-mentioned ink gun is provided with a plurality of said nozzle row, simultaneously from the mutual different material of each said nozzle row ejection.
7. material blowoff, it has the nozzle rows of having arranged a plurality of nozzles, at least one nozzle ejection material from these a plurality of nozzles, the above-mentioned material blowoff is characterised in that:
Be provided with the ejection control device, control is from said nozzle ejection material;
The feasible nozzle that is positioned at the end of said nozzle row of above-mentioned ejection control device control does not spray above-mentioned material.
8. material blowoff as claimed in claim 7 is characterized in that:
The feasible a plurality of nozzles that are positioned at the end of said nozzle row of above-mentioned ejection control device control do not spray above-mentioned material.
9. the manufacture method of a colour filter is used for being manufactured on the colour filter that a plurality of colour filter of arrangement unit forms on the substrate, and the manufacture method of above-mentioned colour filter is characterised in that:
Comprise that the ink gun and the side in the aforesaid substrate that will have the nozzle rows of having arranged a plurality of nozzles move the operation of at least one the nozzle ejection filter material from above-mentioned a plurality of nozzles simultaneously to the opposing party along main scanning direction,
In above-mentioned operation, the feasible nozzle that is positioned at the end of said nozzle row of control does not spray above-mentioned filter material.
10. the manufacturing installation of a colour filter, it has the nozzle rows of having arranged a plurality of nozzles, at least one nozzle ejection filter material from these a plurality of nozzles, the manufacturing installation of above-mentioned colour filter is characterised in that:
Be provided with the ejection control device, control is from said nozzle ejection filter material;
The feasible nozzle that is positioned at the end of said nozzle row of above-mentioned ejection control device control does not spray above-mentioned filter material.
The a pair of substrate of liquid crystal and arrange the colour filter that a plurality of colour filter unit forms at least on a plate base 11. the manufacture method of a liquid-crystal apparatus, this liquid-crystal apparatus have clamping, the manufacture method of above-mentioned liquid-crystal apparatus is characterised in that:
Comprise that the ink gun and the side in the aforesaid substrate that will have the nozzle rows of having arranged a plurality of nozzles move the operation of at least one the nozzle ejection filter material from above-mentioned a plurality of nozzles simultaneously to the opposing party along main scanning direction,
In above-mentioned operation, the feasible nozzle that is positioned at the end of said nozzle row of control does not spray above-mentioned filter material.
12. the manufacturing installation of a liquid-crystal apparatus, it has the nozzle rows of having arranged a plurality of nozzles, at least one the nozzle ejection filter material from these a plurality of nozzles, and the manufacturing installation of above-mentioned liquid-crystal apparatus is characterised in that:
Be provided with the ejection control device, control sprays above-mentioned filter material from said nozzle;
The feasible nozzle that is positioned at the end of said nozzle row of above-mentioned ejection control device control does not spray above-mentioned filter material.
Form 13. the manufacture method of an EL device, this EL device are the pixel elements of arranging a plurality of EL of comprising luminescent layers on substrate, the manufacture method of above-mentioned EL device is characterised in that:
Comprise that the ink gun and the side in the aforesaid substrate that will have the nozzle rows of having arranged a plurality of nozzles move the operation of at least one the nozzle ejection EL luminescent material from above-mentioned a plurality of nozzles simultaneously to the opposing party along main scanning direction,
In above-mentioned operation, the feasible nozzle that is positioned at the end of said nozzle row of control does not spray above-mentioned EL luminescent material.
14. the manufacturing installation of an EL device, it has the nozzle rows of having arranged a plurality of nozzles, at least one the nozzle ejection EL luminescent material from these a plurality of nozzles, and the manufacturing installation of above-mentioned EL device is characterised in that:
Be provided with the ejection control device, control is from said nozzle ejection EL luminescent material;
The feasible nozzle that is positioned at the end of said nozzle row of above-mentioned ejection control device control does not spray above-mentioned EL luminescent material.
15. an electronic equipment, it has assembled the liquid-crystal apparatus that uses the manufacture method manufacturing of the liquid-crystal apparatus described in the claim 11.
16. an electronic equipment, it has assembled the EL device that uses the manufacture method manufacturing of the EL device described in the claim 13.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000354543 | 2000-11-21 | ||
| JP354543/00 | 2000-11-21 | ||
| JP294725/01 | 2001-09-26 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011303069A Division CN1264678C (en) | 2000-11-21 | 2001-11-20 | Color filtering piece, liquid crystal deivce, and EL device making method and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1861408A true CN1861408A (en) | 2006-11-15 |
Family
ID=37388978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610084126 Pending CN1861408A (en) | 2000-11-21 | 2001-11-20 | Methods and apparatus for making color filter by discharging a filter material |
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| Country | Link |
|---|---|
| CN (1) | CN1861408A (en) |
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2001
- 2001-11-20 CN CN 200610084126 patent/CN1861408A/en active Pending
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