CN1858201A - Controling device and method for polymerase chain reaction chip array - Google Patents
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Abstract
本发明公开了一种聚合酶链式反应芯片阵列的控制装置及控制方法。PCR芯片内部无加热器和传感器,将芯片以阵列形式置于换热器上表面。四个储液箱分别存储相应温度的液体,由循环泵、八只电磁阀使相应温度的液体在换热器内循环,使各芯片温度接近反应所需温度。在芯片阵列上方设置柔性印刷电路板,在该板上制作与各个芯片相对应的各加热器与传感器,以完成各个芯片温度的动态微调。将换热器上表面划分为若干温区,在每个温区选择一个芯片作为样板芯片,内置温度传感器并充满液体,以其测量值作为反馈信号同时控制该温区所有芯片,由计算机通过接口电路实施前馈—串级控制、统计过程。
The invention discloses a control device and a control method of a polymerase chain reaction chip array. There are no heaters and sensors inside the PCR chip, and the chip is placed on the upper surface of the heat exchanger in the form of an array. The four liquid storage tanks respectively store the liquid of corresponding temperature, and the circulating pump and eight solenoid valves make the liquid of corresponding temperature circulate in the heat exchanger, so that the temperature of each chip is close to the temperature required for the reaction. A flexible printed circuit board is arranged above the chip array, and heaters and sensors corresponding to each chip are fabricated on the board to complete dynamic fine-tuning of the temperature of each chip. Divide the upper surface of the heat exchanger into several temperature zones, select a chip in each temperature zone as a sample chip, build a temperature sensor and fill it with liquid, use its measured value as a feedback signal to simultaneously control all chips in the temperature zone, and the computer through the interface The circuit implements feedforward-cascade control and statistical process.
Description
技术领域technical field
本发明涉及一种生物芯片的控制装置及控制方法,尤其涉及一种聚合酶链式反应芯片(polymerase chain reaction chips,PCR芯片)阵列的控制装置及控制方法。The present invention relates to a control device and a control method of a biochip, in particular to a control device and a control method of a polymerase chain reaction chip (polymerase chain reaction chips, PCR chip) array.
背景技术Background technique
聚合酶链式反应属于体外快速扩增特异性DNA片断的酶学方法,广泛应用于分子生物学的各个领域。它的基本原理是利用DNA聚合酶依赖于DNA模板的特征,在体外用一对与待扩增的DNA片断两侧序列互补的引物诱发聚合反应,该链DNA先经过高温变性(典型温度为95℃),然后在低温(典型温度55℃)与引物退火,再在中温(典型温度72℃)进行延伸。此过程反复循环进行,一般需20-40个周期,特异性DNA数量获得指数规律的倍增,便于进一步对DNA分子进行分析检测。目前通用的设备是台式PCR扩增仪,可对数十个样品同时进行扩增,进行一次扩增试验需数小时。Polymerase chain reaction is an enzymatic method for rapidly amplifying specific DNA fragments in vitro, and is widely used in various fields of molecular biology. Its basic principle is to use DNA polymerase to rely on the characteristics of DNA templates to induce polymerization in vitro with a pair of primers complementary to the sequences on both sides of the DNA fragment to be amplified. °C), then anneal to the primer at low temperature (typical temperature 55 °C), and then extend at medium temperature (typical temperature 72 °C). This process is repeated in cycles, usually 20-40 cycles, and the amount of specific DNA is multiplied exponentially, which is convenient for further analysis and detection of DNA molecules. The current general-purpose equipment is a desktop PCR amplification instrument, which can simultaneously amplify dozens of samples, and it takes several hours to perform an amplification test.
随着微机电系统技术的兴起,建立在半导体和微细加工技术基础上的PCR芯片已成为研究热点。由于PCR芯片体积微小、质量极小、比表面积大,可从本质上弥补台式PCR扩增仪的不足,达到升降温速率高(可达每秒十几度)、循环周期短、温控精度高、动态重复性好的目的。一般使用PCR芯片可在30分钟内完成一次扩增试验。PCR芯片的另一个突出优点是可节省珍贵样品,所需样品仅为数微升至数十微升。《微系统设计》((美)森图里亚(Senturia,S.D.)著;刘泽文等译,电子工业出版社,2004)阐述了PCR芯片的两个大类,一类为连续流动式PCR芯片(或称为空域式PCR芯片),另一类为微反应槽PCR芯片(或称为时域式PCR芯片、批量式PCR芯片),两类PCR芯片各有自己的优势,至于哪一类在未来的市场中占据主导地位现在尚未可知。本发明针对微反应槽PCR芯片。With the rise of MEMS technology, PCR chips based on semiconductor and microfabrication technology have become a research hotspot. Due to the small volume, extremely small mass and large specific surface area of the PCR chip, it can essentially make up for the shortcomings of the desktop PCR amplification instrument, achieving high heating and cooling rates (up to more than ten degrees per second), short cycle times, and high temperature control accuracy. , The purpose of good dynamic repeatability. Generally, a PCR chip can be used to complete an amplification test within 30 minutes. Another outstanding advantage of the PCR chip is that it can save precious samples, and the required samples are only a few microliters to tens of microliters. "Microsystem Design" ((US) Senturia (Senturia, S.D.); Translated by Liu Zewen, Electronic Industry Press, 2004) describes two major categories of PCR chips, one is continuous flow PCR chips ( or airspace-type PCR chip), and the other type is micro-reaction tank PCR chip (or time-domain PCR chip, batch-type PCR chip). The two types of PCR chips each have their own advantages. The dominant position in the market is currently unknown. The invention is aimed at micro-reaction tank PCR chip.
《微系统设计》还阐述了一种微反应槽PCR芯片的温度控制方法,它将加热器、传感器集成在芯片内部,从本质上解决了宏观温度参数的大惯性、大滞后问题。但芯片结构复杂、生产工序多、生产成本高、成品率低,致使芯片价格高,且一般每次只能扩增一个或几个样品,现阶段难以大范围替代常规PCR扩增仪;《Sensors and Actuators B》2000年第九期“A rapidmicro-polymerase chain reaction system for hepatitis C virus amplification”一文公开了另一种微反应槽PCR芯片的温度控制方法及控制装置,其芯片本身不含加热器、传感器,而是由外部的温控装置完成一只芯片的PCR温度循环。所用加热、制冷器件为Peltier器件,温度控制策略为比例——积分——微分控制,即PID控制。这种PCR芯片结构简单,简化了生产工艺,降低了生产成本,同时也提高了芯片的成品率和可靠性。但由于只依靠外部宏观意义上的温控装置,虽然芯片自身的热容量很低、比表面积很高,但由于外部温控装置的大惯性、大滞后仍存在,温度控制的快速性、精确性都受到限制,升、降温速率分别为4℃/s、2.2℃/s,且每次也仅能进行一个芯片的温度循环,与常规PCR扩增仪相比尚缺乏明显优势,上述问题的存在是微反应槽PCR芯片尚未得到大规模推广的重要原因之一。"Microsystem Design" also describes a temperature control method for micro-reaction tank PCR chips, which integrates heaters and sensors inside the chip, which essentially solves the problem of large inertia and large hysteresis of macroscopic temperature parameters. However, the complex structure of the chip, many production processes, high production cost, and low yield rate lead to high chip prices, and generally only one or a few samples can be amplified at a time. At this stage, it is difficult to replace conventional PCR amplification instruments on a large scale; "Sensors and Actuators B, the ninth issue of 2000, "A rapidmicro-polymerase chain reaction system for hepatitis C virus amplification", discloses another temperature control method and control device for PCR chips in micro-reaction tanks. The chip itself does not contain heaters, Instead, the PCR temperature cycle of a chip is completed by an external temperature control device. The heating and cooling devices used are Peltier devices, and the temperature control strategy is proportional-integral-derivative control, that is, PID control. The PCR chip has a simple structure, simplifies the production process, reduces the production cost, and improves the yield and reliability of the chip. However, due to only relying on the external temperature control device in the macroscopic sense, although the heat capacity of the chip itself is very low and the specific surface area is high, due to the large inertia and large hysteresis of the external temperature control device, the speed and accuracy of temperature control are still low. Limited, the heating and cooling rates are 4°C/s and 2.2°C/s respectively, and only one chip can be cycled each time. Compared with conventional PCR amplification instruments, it still lacks obvious advantages. The existence of the above problems is One of the important reasons why micro-reaction tank PCR chips have not been widely promoted.
发明内容Contents of the invention
本发明的目的就是为了解决现有微反应槽PCR芯片在温度控制方面存在的问题。本发明提供一种新的控制方法并依据此方法形成控制装置,使多只本身不含加热器、传感器的低成本微反应槽PCR芯片同时受到快速、精确的温度控制。The purpose of the present invention is to solve the problems existing in the temperature control of the existing micro-reaction tank PCR chip. The invention provides a new control method and forms a control device according to the method, so that multiple low-cost micro-reaction tank PCR chips which do not contain heaters and sensors are subjected to rapid and accurate temperature control at the same time.
为实现上述目的,本发明采用了如下技术方案:一种聚合酶链式反应芯片阵列的控制装置,它包括换热器,在换热器上表面放置带有至少一个微腔的聚合酶链式反应芯片,即PCR芯片,其特征是:所述PCR芯片有多个,它们在换热器上表面构成PCR芯片阵列;在PCR芯片阵列上方设置柔性印刷电路板,在柔性印刷电路板上制作有与芯片阵列相对应的加热器及传感器阵列;同时,换热器上表面划分为若干温区,每个温区对应PCR芯片阵列中的一组PCR芯片,在每个温区内选择一个PCR芯片作为测控样板芯片,在样板芯片微腔内放置微型温度传感器并充满与PCR反应液具有近似热学特性的液体;各样板芯片内的温度传感器、柔性印刷电路板上的加热器及传感器阵列等电气部件分别通过接口电路与计算机控制系统连接。In order to achieve the above object, the present invention adopts the following technical scheme: a control device for a polymerase chain reaction chip array, which includes a heat exchanger, and a polymerase chain reaction chip with at least one microcavity is placed on the upper surface of the heat exchanger. The reaction chip, namely the PCR chip, is characterized in that: there are multiple PCR chips, and they form a PCR chip array on the upper surface of the heat exchanger; a flexible printed circuit board is arranged above the PCR chip array, and a flexible printed circuit board is made on the flexible printed circuit board. A heater and sensor array corresponding to the chip array; at the same time, the upper surface of the heat exchanger is divided into several temperature zones, each temperature zone corresponds to a group of PCR chips in the PCR chip array, and a PCR chip is selected in each temperature zone As a sample chip for measurement and control, place a miniature temperature sensor in the microcavity of the sample chip and fill it with a liquid that has similar thermal properties to the PCR reaction solution; electrical components such as temperature sensors in each sample chip, heaters on flexible printed circuit boards, and sensor arrays They are respectively connected with the computer control system through the interface circuit.
所述柔性印刷电路板上制有多个由加热器及传感器构成的单元,每个单元对应一个PCR芯片,这些单元构成一个与PCR芯片阵列相对应的加热器及传感器阵列;柔性印刷电路板安置在PCR芯片阵列的上方并与各PCR芯片相接触。The flexible printed circuit board is formed with a plurality of units composed of heaters and sensors, each unit corresponds to a PCR chip, and these units form a heater and sensor array corresponding to the PCR chip array; the flexible printed circuit board is arranged Above the PCR chip array and in contact with each PCR chip.
所述换热器内为流动的换热媒质,换热器是导热材料和隔热材料的组合体,底部及换热媒质出入口为隔热材料,其余为导热材料,且导热材料形成若干沟槽与换热媒质接触;换热器上表面分为若干个温区,以确保每个温区上表面温度的均匀性在一定允许范围内;在每个温区的流体入口处设置至少一个温度传感器;每个温区的换热器上表面对应若干只PCR芯片,其中一只为测控样板芯片而其余为实际进行PCR反应的芯片;换热器通过管道与四个储液箱、循环泵连接,管道上设有八个电磁阀,四个储液箱内分别设有温度传感器、加热元件或制冷元件,这些电气元件均通过接口电路与计算机控制系统连接,各电磁阀在计算机控制下进行通断切换,使相应储液箱内的换热媒质通过换热器进行循环,换热器表面温度迅速达到需要的数值。The inside of the heat exchanger is a flowing heat exchange medium, the heat exchanger is a combination of heat conduction material and heat insulation material, the bottom and the inlet and outlet of the heat exchange medium are heat insulation materials, and the rest are heat conduction materials, and the heat conduction material forms several grooves In contact with the heat exchange medium; the upper surface of the heat exchanger is divided into several temperature zones to ensure that the temperature uniformity of the upper surface of each temperature zone is within a certain allowable range; at least one temperature sensor is set at the fluid inlet of each temperature zone The upper surface of the heat exchanger in each temperature zone corresponds to a number of PCR chips, one of which is a sample chip for measurement and control and the rest are chips for actually performing PCR reactions; the heat exchanger is connected to four liquid storage tanks and circulation pumps through pipelines, There are eight solenoid valves on the pipeline, and the four liquid storage tanks are respectively equipped with temperature sensors, heating elements or refrigeration elements. These electrical elements are connected to the computer control system through the interface circuit, and each solenoid valve is turned on and off under the control of the computer. Switching, so that the heat exchange medium in the corresponding liquid storage tank circulates through the heat exchanger, and the surface temperature of the heat exchanger quickly reaches the required value.
一种聚合酶链式反应芯片阵列的控制方法,该方法为:A method for controlling a polymerase chain reaction chip array, the method comprising:
在换热器上表面放置若干带有微腔但不含加热器、传感器的PCR芯片,形成阵列;将带有由加热器及传感器单元所组成的阵列的柔性印刷电路板放置在PCR芯片阵列上方并与之接触,各加热器及传感器单元与各PCR芯片一一对应;Place a number of PCR chips with microcavities but without heaters and sensors on the upper surface of the heat exchanger to form an array; place a flexible printed circuit board with an array of heaters and sensor units on top of the PCR chip array And in contact with it, each heater and sensor unit corresponds to each PCR chip one by one;
在计算机控制系统的作用下,各PCR芯片通过换热器上表面获得接近聚合酶链式反应理想温度值的温度;计算机控制系统采集各温区换热器入口处换热媒质温度、样板芯片上表面温度、样板芯片内部液体温度,实施前馈—串级复合控制策略,控制柔性印刷电路板上相应的加热器,对相应PCR芯片加热,使其获得准确的温度值;Under the action of the computer control system, each PCR chip obtains a temperature close to the ideal temperature value of the polymerase chain reaction through the upper surface of the heat exchanger; the computer control system collects the temperature of the heat exchange medium at the entrance of the heat exchanger in each temperature zone, the The surface temperature and the temperature of the liquid inside the prototype chip implement a feedforward-cascade composite control strategy to control the corresponding heater on the flexible printed circuit board and heat the corresponding PCR chip to obtain an accurate temperature value;
同时采集各芯片上表面温度与其样板芯片上表面温度的差,实施统计过程控制,以监测各芯片接触热阻是否处于正常状态。At the same time, the difference between the upper surface temperature of each chip and the upper surface temperature of the model chip is collected, and statistical process control is implemented to monitor whether the contact thermal resistance of each chip is in a normal state.
所述前馈—串级控制方式为:换热器内各温区入口换热媒质温度检测信号输入给计算机控制系统,该信号在计算机系统内部一方面经由软件形成的给定信号发生器变换后作为同样是由软件形成的主控制器的设定信号;另一方面经由软件形成的动态前馈环节与该主控制器的输出信号相综合;同时检测各样板芯片上表面温度信号作为相应温区副控制器的反馈信号形成内环,副控制器亦由软件形成;将各样板芯片内部液体的温度作为相应温区主控制器的反馈信号形成外环;副控制器输出信号经功率放大后同时施加于该组PCR芯片所对应的柔性印刷电路板上的各个加热器,以完成各PCR芯片温度的精确控制。The feed-forward-cascade control method is as follows: the temperature detection signal of the heat exchange medium at the entrance of each temperature zone in the heat exchanger is input to the computer control system, and the signal is transformed by a given signal generator formed by software on the one hand inside the computer system. As the setting signal of the main controller also formed by software; on the other hand, the dynamic feedforward link formed by software is integrated with the output signal of the main controller; at the same time, the temperature signal on the surface of each sample chip is detected as the corresponding temperature zone The feedback signal of the sub-controller forms an inner loop, and the sub-controller is also formed by software; the temperature of the liquid inside each sample chip is used as the feedback signal of the main controller in the corresponding temperature zone to form an outer loop; the output signal of the sub-controller is amplified by power and simultaneously Applied to each heater on the flexible printed circuit board corresponding to the group of PCR chips, so as to complete the precise control of the temperature of each PCR chip.
所述统计过程控制为,以芯片上表面温度与该芯片所处温区样板芯片上表面温度的差作为监控参数,进行单值—移动极差控制,即对芯片上表面与柔性印刷电路板之间接触热阻的分散性进行了统计过程控制,间接对芯片上、下表面接触压力的分散性进行统计过程控制,相当于对芯片下表面与换热器之间接触热阻的分散性也进行了统计过程控制;当系统工作在统计受控状态下时,可认为各芯片接触热阻的分散性在允许范围之内,样板芯片具有充分的代表性;当由于异常因素的影响而使某芯片监控参数脱离了统计受控状态时,则认为该芯片的接触热阻明显偏离了正常值,样板芯片不再具备对该芯片的代表性,计算机系统给出相应警示。The statistical process control is to use the difference between the upper surface temperature of the chip and the upper surface temperature of the sample chip in the temperature zone where the chip is located as a monitoring parameter to perform single-value-moving range control, that is, to control the difference between the upper surface of the chip and the flexible printed circuit board. Statistical process control is carried out on the dispersion of the indirect contact thermal resistance, and the statistical process control is carried out indirectly on the dispersion of the contact pressure on the upper and lower surfaces of the chip, which is equivalent to the dispersion of the contact thermal resistance between the lower surface of the chip and the heat exchanger. Statistical process control is achieved; when the system is working under statistical control, it can be considered that the dispersion of the contact thermal resistance of each chip is within the allowable range, and the sample chip is fully representative; when a chip is affected by abnormal factors When the monitoring parameters are out of the statistically controlled state, it is considered that the contact thermal resistance of the chip has deviated significantly from the normal value, and the sample chip is no longer representative of the chip, and the computer system will give a corresponding warning.
本发明的有益结果是:将若干PCR芯片放置在一个特殊设计的换热器上表面,形成阵列;以某种合适的液体(如纯净水)为换热媒质,由循环泵、电磁阀控制,根据需要使相应温度的换热媒质在换热器内循环;系统含有四个储液容器,其中三个容器内的液体温度分别被控制在与聚合酶链式反应三个特征温度(55℃、72℃、95℃)相对应的温度上;第四个容器内储存冷却液,用于加快从高温变性到低温退火的降温过程。对于每个微反应槽PCR芯片设置一个加热及传感单元,以便对各个PCR芯片提供精确、快速的温度控制,各加热及传感单元制作在同一张柔性印制板上;根据对换热器表面温度的均匀性和精度要求将换热器上表面进行合理分区,认为每个小区域内的温度是相同的,称其为一个等温区。在每个等温区中,选择位于中间的PCR芯片作为测控样板芯片,在其微槽中放置一支微型温度传感器(如微型热电偶)并充满某种与PCR反应液具有相近热学特性的液体(如蒸馏水),认为在加热器及传感器加热单元输入电功率相同的情况下等温区各芯片内液体温度相同。测控样板芯片内不进行聚合酶链式反应,聚合酶链式反应在其余芯片内完成,但这些芯片内不放置微型温度传感器。当进行不同类型或不同批次的聚合酶链式反应时,只需更换其余芯片,不需更换测控样板芯片,测控样板芯片可视为测控系统的固有配置。测控样板芯片概念的提出,不仅简化了芯片测温传感器的配置和与之相应的某些操作,而且由于它是测控系统的固定配置从而使人们有条件对其精确标定;计算机自动采集各测控样板芯片的温度,按预定的控制策略形成各个控制输出,该输出不但施加于相应的测控样板芯片,而且同时施加于与该样板芯片处于同一等温区的其它芯片。系统主要特点为“宏观温度调控、微观温度校正、利用样板芯片、形成复合控制”。The beneficial results of the present invention are as follows: a number of PCR chips are placed on the upper surface of a specially designed heat exchanger to form an array; some suitable liquid (such as pure water) is used as the heat exchange medium, controlled by a circulation pump and a solenoid valve, The heat exchange medium of the corresponding temperature is circulated in the heat exchanger according to the needs; the system contains four liquid storage containers, and the liquid temperature in the three containers is respectively controlled at the three characteristic temperatures of the polymerase chain reaction (55°C, 72°C, 95°C); the cooling liquid is stored in the fourth container, which is used to speed up the cooling process from high temperature denaturation to low temperature annealing. A heating and sensing unit is provided for each micro-reaction tank PCR chip to provide accurate and fast temperature control for each PCR chip, and each heating and sensing unit is fabricated on the same flexible printed board; according to the heat exchanger The uniformity and accuracy of the surface temperature require that the upper surface of the heat exchanger be reasonably partitioned, and the temperature in each small area is considered to be the same, which is called an isothermal area. In each isothermal zone, select the PCR chip located in the middle as the measurement and control sample chip, place a miniature temperature sensor (such as a miniature thermocouple) in its microgroove and fill it with a liquid that has similar thermal properties to the PCR reaction solution ( Such as distilled water), it is considered that the temperature of the liquid in each chip in the isothermal zone is the same under the condition that the input electric power of the heater and the sensor heating unit is the same. The polymerase chain reaction is not carried out in the measurement and control sample chip, and the polymerase chain reaction is completed in the remaining chips, but no miniature temperature sensors are placed in these chips. When carrying out different types or different batches of polymerase chain reaction, only the rest of the chips need to be replaced, and there is no need to replace the measurement and control sample chip. The measurement and control sample chip can be regarded as an inherent configuration of the measurement and control system. The concept of the measurement and control sample chip not only simplifies the configuration of the chip temperature sensor and some corresponding operations, but also enables people to accurately calibrate it because it is a fixed configuration of the measurement and control system; the computer automatically collects each measurement and control sample The temperature of the chip forms each control output according to a predetermined control strategy, and the output is not only applied to the corresponding measurement and control sample chip, but also applied to other chips in the same isothermal zone as the sample chip. The main features of the system are "macroscopic temperature control, microscopic temperature correction, use of model chips, and formation of composite control".
附图说明Description of drawings
图1为本发明的结构示意图;Fig. 1 is a structural representation of the present invention;
图2为内部不含加热器、传感器的微反应槽PCR芯片示意图;Fig. 2 is the schematic diagram of the micro-reaction tank PCR chip without heater and sensor inside;
图3为基于柔性PCB板的加热器及传感器单元结构示意图;Fig. 3 is a structural schematic diagram of a heater and a sensor unit based on a flexible PCB;
图4为一种基于工控机的PCR芯片阵列温度控制系统硬件配置;Fig. 4 is a kind of hardware configuration of PCR chip array temperature control system based on industrial computer;
图5为专用换热器上一个温区的结构示意图;Fig. 5 is a structural schematic diagram of a temperature zone on the special heat exchanger;
图6为图5的剖面示意图;Figure 6 is a schematic cross-sectional view of Figure 5;
图7为芯片的前馈—串级复合控制框图。Fig. 7 is a feedforward-cascade compound control block diagram of the chip.
其中,1、换热器,2、柔性印刷电路板,3、PCR芯片,4、循环泵,5、储液箱,6、电磁阀,7、加热器,8、传感器。Among them, 1. Heat exchanger, 2. Flexible printed circuit board, 3. PCR chip, 4. Circulation pump, 5. Liquid storage tank, 6. Solenoid valve, 7. Heater, 8. Sensor.
具体实施方式Detailed ways
下面结合附图和实施例对本发明进一步详细的说明。The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
图1中,PCR芯片3成阵列的放置在换热器1上表面,芯片阵列上方覆盖柔性印刷电路板2,换热器1通过管路与循环泵4、四个储液箱5连接,在管路上还设有八个电磁阀6。In Fig. 1, the
PCR芯片3设计如图2所示。它的基片以硅材料制作。硅具有良好的导热性能,其热导率高达1.57W/(cm·℃)。在PCR芯片3上制作两个相同的蛇形微槽,其尺寸为宽1200μm,深200μm,长105mm,容积各为25μL。蛇形微槽有利于反应液的加载、卸载和芯片的清洗。基片上方为玻璃盖片,在玻璃盖片上制作四个直径1mm的小孔,作为反应液加载、卸载的出入口。利用毛细管原理进行反应液的加载,利用压缩空气进行反应液的卸载。反应过程中进出口用石蜡油密封。上述芯片微细加工过程简述如下:2英寸硅片用热氧化方法形成1μm的氧化层,然后用紫外光曝光光刻和HF在氧化层上形成微反应槽的图形,再用KOH各向异性湿法腐蚀方法在硅片上腐蚀出200μm深的微反应槽;在0.6mm厚PYREX玻璃盖片上用YH-D4030型激光雕刻机于相应位置打进出口孔;基片、盖片图形对准,在400℃、800V下进行阳极键合,从而形成微反应槽PCR芯片。芯片内部不含加热元件、制冷元件、传感元件,于是成本得以降低。The design of the
柔性印刷电路板2上的加热器及传感器阵列的一个单元如图3所示。柔性印刷电路板2采用软性基材制成,其主要特点是可弯曲折叠,能方便的在三维空间安装,配线一致性好。采用与换热器1上表面几何尺寸相对应的一张单面柔性印刷电路板,利用其上铜箔具有一定阻值且该阻值与温度有确切对应关系的原理在该板与每个芯片所对应的位置制作加热及传感单元。由于加热器7需要根据温度控制的要求从电源吸取相应的电功率,不可避免的存在自热效应,并且该自热效应的大小是波动的,如果将加热器7同时作为温度传感器使用,其测温精度势必要受自热效应的影响。为此将加热器7与传感器8分别设计,传感器8只需5mA恒流源激励,而加热器7工作电流最大可达300mA。柔性印刷电路板金属箔线的横截面尺寸皆为宽55um、厚35um。在20℃时每个加热器7阻值约3.3欧姆,每个传感器8的阻值约为6.5欧姆。将柔性印刷电路板2安置在PCR芯片3阵列的上方并与其相接触,以便提供针对各芯片的温度校正。使用弹性元件和导热绝缘胶用以保证柔性印刷电路板上各加热器7及传感器8与各PCR芯片3之间良好的热接触,接触热阻的分散性被限制在可接受的范围内。由于目前有成熟的柔性PCB板生产技术,各加热及传感单元的一致性能够得到保证。柔性印刷电路板基材导热系数低,由它所带来的各加热器之间、各芯片之间的相互耦合可忽略不计。A unit of the heater and sensor array on the flexible printed
基于工控机的计算机控制系统硬件配置如图4所示。宏观的集中温度控制装置由一台PC总线工业控制计算机、若干相应的接口板卡、8个直动式电磁阀6、一个循环泵4、4个2L储液箱5、一个高效换热器1组成。储液箱内的换热媒质为纯净水。其中3个储液箱各内置500W电加热丝和K型热电偶温度传感器,由PC总线工业控制计算机将其温度分别控制在与PCR反应进程高温变性、低温退火、中温延伸三个特征温度相对应的温度上。第四个储液箱5储存冷却水,以保证换热器1能迅速降温。可使用人工加冰方法形成冰水混合物,也可以利用一个小型压缩机实现。工业控制计算机根据PCR芯片3反应进程的需要,通过接口板卡,不断的控制8个电磁阀6,使相应水箱的水通过换热器1进行循环,换热器1表面温度迅速达到相应的数值。通过对储液箱5温度的控制,使换热器1上表面稳态温度比芯片所需温度低2℃-3℃,差额由各芯片上方的加热器7补充。由于各加热器7只需提供2℃-3℃的温升,因此芯片温度控制的精确性、快速性就比较容易实现。各加热器7也是由同一台计算机控制的。PC总线工业控制机系统由主机、CRT、两块2组8路智能式热电偶输入模板IPC5455、四块光电隔离32路8位A/D板IPC5482、一块32路光电隔离开关量输出模板IPC5373及自制的电阻式温度传感器信号调理板、固态继电器板组成。The hardware configuration of the computer control system based on the industrial computer is shown in Figure 4. The macroscopic centralized temperature control device consists of a PC bus industrial control computer, several corresponding interface boards, 8 direct-acting
图5、图6中,换热器1换热速率应与PCR芯片3的热传导时间常数相适应,而且要有较好的温度均匀性。换热器1上表面为放置PCR芯片3的有效换热面,采用热导率高的紫铜材料,在紫铜材料上开若干个贯通槽以便扩展换热面积、减小紫铜质量、提高其换热速率。为减小热量损失、确保换热速率,换热器的其余部分(底部、出入口等)采用热导率低的塑料材料。流体在换热器中的有效路径长约为2米,宽约60毫米。经红外线热像仪检测,换热器表面升温速率可达12℃/s,降温速率可达10℃/s,同一温度流体稳定循环时换热器表面温度极差在2.0℃以内。但在两种温度流体交替的动态过程中,由于流体的传输滞后,换热器表面温度极差可高达9.3℃,为此将换热器表面根据其动态温度分布划分为12个温区,图6为一个温区的结构示意图,经反复试验在动态过程中每个温区内的温度极差可确保小于0.7℃。在每个温区的流体入口处设K型热电偶温度传感器一只,它在测出该温区流体入口温度的同时也测出了上一个温区的流体出口温度。每个温区换热器上表面可装设10只PCR芯片,则总共可设置120只PCR芯片,其中12只为测控样板芯片,设置在图5中阴影部分所示位置,108只为实际进行PCR反应的芯片。In Fig. 5 and Fig. 6, the heat transfer rate of the
图7为芯片的前馈—串级复合控制策略示意图。对每一个PCR芯片内的反应液而言,存在两个控制输入,第一个为水经换热器、硅基片再到反应液,它由计算机根据PCR进程控制泵、阀自动形成;第二个为柔性PCB板上的加热器、玻璃盖片再到反应液。升温过程中PCR芯片所需能量的绝大部分来自换热器,加热器7只提供极少部分,起“校正”、“拾遗补缺”的作用;降温过程中PCR芯片储存的能量基本从换热器再经水散发。对每一只PCR芯片本身而言,第一个输入实际上是可测而不可控的,只有第二个输入可控,但第二个输入又必须与第一个输入相适应、相协调。为此在控制策略的处理上,人为的将双输入系统看成是单输入系统,将第一个输入看成是“干扰”,但芯片的温度给定信号由第一个控制输入与PCR进程共同产生,应用串级—前馈复合控制策略,对芯片进行PCR温度控制,形成温度随动系统。例如,当计算机检测到某个等温区换热器水温开始由72℃升温时,说明芯片的中温延伸阶段已经结束,应该尽快进入高温变性阶段,因此立刻将该等温区芯片温度的给定值设为95℃。之所以不同时改变系统中所有芯片的温度设定值,是因为水在换热器中的流动存在着传输滞后。图7中给定信号发生器、主回路控制器、副回路控制器、动态前馈环节、PWM发生器等皆由计算机通过软件实现。系统的控制目标是各等温区芯片温度要“快、准、稳”的跟踪其给定温度。由于给定温度在循环改变着,因此这是一个随动系统。串级控制系统的内环为芯片上表面温度控制环,外环为芯片内部液体温度控制环。从副回路控制器输出到芯片3上表面温度的传递函数结构取为:Fig. 7 is a schematic diagram of the feedforward-cascade composite control strategy of the chip. For the reaction solution in each PCR chip, there are two control inputs, the first is water passing through the heat exchanger, silicon substrate and then to the reaction solution, which is automatically formed by the computer according to the PCR process to control the pump and valve; the second The two are the heater on the flexible PCB board, the glass cover and the reaction solution. During the heating process, most of the energy required by the PCR chip comes from the heat exchanger, and the
其中T1为加热器及其与芯片之间界面热阻、热容的综合反映,τ1由加热器与芯片交界面热传输滞后,K1为加热器电功率与界面温度之间的静态放大系数。从芯片3上表面温度到芯片样品温度的传递函数结构取为:Among them, T 1 is a comprehensive reflection of the thermal resistance and heat capacity of the interface between the heater and the chip, τ 1 is the heat transfer lag at the interface between the heater and the chip, and K 1 is the static amplification factor between the electric power of the heater and the interface temperature . The transfer function structure from the upper surface temperature of the
其中T2为芯片自身热惯性和样品热惯性的综合反映;芯片硅结构部分的传输滞后为毫秒级,可以忽略,因此τ2包括芯片玻璃盖片的热传输滞后、样品的热传输滞后和样品温度的检测滞后,K2为静态放大系数。从换热器各等温区入口换热媒质温度到芯片内液体温度的传递函数结构取为:Among them, T 2 is a comprehensive reflection of the thermal inertia of the chip itself and the thermal inertia of the sample; the transmission delay of the silicon structure part of the chip is at the millisecond level, which can be ignored, so τ 2 includes the thermal transmission delay of the chip glass cover, the thermal transmission delay of the sample and the sample The detection of temperature is hysteresis, and K2 is the static amplification factor. The transfer function structure from the temperature of the heat exchange medium at the inlet of each isothermal zone of the heat exchanger to the temperature of the liquid in the chip is taken as:
其中T3为换热器时间常数。芯片硅结构部分的传输滞后为毫秒级,可以忽略;换热器水温的检测滞后与样品温度的检测滞后互相抵消,故可认为τ3仅包括水在换热器内的传输滞后、换热器本身的热传输滞后、换热器与芯片交界面传输滞后、芯片样品的热传输滞后。经阶跃响应法测试,T1=0.5s,T2=3.1s,T3=1.1s,τ1=0.1s,τ2=1.1s,τ3=1.36s。据此可确定动态前馈环节的传递函数和主、副控制器的结构及大致参数。主、副控制器的具体参数最终靠现场整定完成。内环时间常数、时滞都很小,工作速度快,形成对主控制器输出信号的快速随动系统,使芯片上表面温度迅速达到所需要的值,而且能快速消除进入副环的各种扰动,对芯片上表面难免存在的接触热阻、热容波动具有较强的鲁棒性;芯片下表面是芯片热能的主要传输界面,其对芯片的影响最终体现在芯片内部液体温度的变化上,这种变化与给定信号的变化趋势是一致的,客观上分担了串级控制系统外环的绝大部分任务。芯片温度的最终准确控制由串级控制系统的外环完成。where T3 is the heat exchanger time constant. The transmission lag of the silicon structure part of the chip is at the millisecond level, which can be ignored; the detection lag of the water temperature of the heat exchanger and the detection lag of the sample temperature cancel each other out, so it can be considered that τ3 only includes the transmission lag of water in the heat exchanger, the heat exchanger The heat transfer lag of itself, the transfer lag of the interface between the heat exchanger and the chip, and the heat transfer lag of the chip sample. Tested by the step response method, T 1 =0.5s, T 2 =3.1s, T 3 =1.1s, τ 1 =0.1s, τ 2 =1.1s, τ 3 =1.36s. Based on this, the transfer function of the dynamic feed-forward link and the structure and approximate parameters of the main and auxiliary controllers can be determined. The specific parameters of the main and auxiliary controllers are finally completed by on-site setting. The time constant and time lag of the inner loop are very small, and the working speed is fast, forming a fast follow-up system for the output signal of the main controller, so that the temperature of the upper surface of the chip can quickly reach the required value, and can quickly eliminate various Disturbance has strong robustness to the contact thermal resistance and heat capacity fluctuations that inevitably exist on the upper surface of the chip; the lower surface of the chip is the main transmission interface of the chip's thermal energy, and its impact on the chip is finally reflected in the change of the liquid temperature inside the chip , this change is consistent with the change trend of the given signal, and objectively shares most of the tasks of the outer loop of the cascade control system. The final accurate control of chip temperature is done by the outer loop of the cascade control system.
每个PCR芯片都受到其下方换热器和上方加热器两方面的作用,以上的分析过程认为每个换热器等温区中的所有芯片的传热过程完全相同,忽略了客观上存在的各种分散性。在诸多分散性中以芯片上、下表面接触热阻的分散性影响最大,而芯片上、下表面接触热阻的分散性直接受接触压力分散性的影响。接触压力是由机械弹性结构产生的,其均匀性由机械结构的科学设计和精密制造予以保证。但在实际使用过程中各芯片的接触压力难免存在微小的随机波动,这种微小的随机波动对芯片的聚合酶链式反应过程不造成明显影响,处于允许范围之内,可视为背景噪声,不必予以理会。需要防止的是由于操作不当或设备机械结构故障而造成的各芯片接触压力的明显不均匀,它将破坏样板芯片的代表性,造成聚合酶链式反应的失败。为此采用间接参数构成各芯片接触压力的监督控制。将换热器等温区各芯片与柔性印刷电路板板之间交界面温度(亦即芯片上表面温度)的分散性纳入统计过程控制,既可随时发现可能出现的接触压力的不正常波动。统计过程控制是一种产品质量控制的重要方法,其基本观点是:产品质量受随机因素和异常因素两类影响,随机因素是客观存在、不可避免的,但它对产品质量影响较小,而且服从一定的统计分布规律。异常因素并不总是存在,但对产品质量影响较大。当异常因素不存在时,产品质量只受随机因素的影响,质量参数服从统一分布,在接受范围之内,称工艺过程处于统计受控状态;而当异常因素出现时,产品质量发生巨大波动,不再服从原来的统计分布规律,称产品质量不处于统计受控状态。一旦这种情况出现,应立即做出相应处理,使产品质量恢复到统计受控状态。统计控制的作用是根据数理统计理论,对连续采集的工艺参数数据进行定量的统计分析,以判断工艺过程是否处于统计受控状态。当出现过程能力下降、过程失控或有失控倾向时,立即发出警报,以便及时查找、排除异常因素,使工艺过程一直处于统计受控状态。统计过程控制技术起到了“事前预防”出现大批不合格品的作用。根据本系统的具体情况,以各芯片上表面温度与样板芯片上表面温度的差作为监控参数,选择单值——移动极差控制图对以上共计108个温差参数进行统计过程控制,实质上也就是对各等温区内部各芯片接触压力的分散性进行统计过程控制,近似等价于对芯片上、下表面接触热阻的分散性进行统计过程控制。Each PCR chip is affected by both the heat exchanger below it and the heater above it. The above analysis process considers that the heat transfer process of all chips in the isothermal zone of each heat exchanger is exactly the same, ignoring the objective existence of each chip. kind of dispersion. Among the many dispersions, the dispersion of the contact thermal resistance on the upper and lower surfaces of the chip has the greatest influence, and the dispersion of the contact thermal resistance on the upper and lower surfaces of the chip is directly affected by the dispersion of the contact pressure. The contact pressure is generated by the mechanical elastic structure, and its uniformity is guaranteed by the scientific design and precision manufacturing of the mechanical structure. However, in the actual use process, the contact pressure of each chip inevitably has small random fluctuations. This small random fluctuation has no obvious impact on the polymerase chain reaction process of the chip, which is within the allowable range and can be regarded as background noise. Don't bother. What needs to be prevented is the obvious uneven contact pressure of each chip caused by improper operation or equipment mechanical structure failure, which will destroy the representativeness of the sample chip and cause the failure of the polymerase chain reaction. For this purpose, indirect parameters are used to form the supervisory control of the contact pressure of each chip. Incorporating the dispersion of the temperature at the interface between each chip in the isothermal zone of the heat exchanger and the flexible printed circuit board (that is, the surface temperature on the chip) is included in the statistical process control, which can detect possible abnormal fluctuations in contact pressure at any time. Statistical process control is an important method of product quality control. Its basic point of view is: product quality is affected by two types of random factors and abnormal factors. Random factors exist objectively and are inevitable, but they have little impact on product quality, and obey a certain statistical distribution law. Abnormal factors do not always exist, but have a greater impact on product quality. When the abnormal factors do not exist, the product quality is only affected by random factors, and the quality parameters obey the uniform distribution. Within the acceptable range, the process is said to be in a statistically controlled state; and when the abnormal factors appear, the product quality fluctuates greatly. It no longer obeys the original statistical distribution law, saying that the product quality is not in a statistically controlled state. Once this situation occurs, it should be dealt with immediately to restore the product quality to a statistically controlled state. The function of statistical control is to conduct quantitative statistical analysis on the continuously collected process parameter data according to the theory of mathematical statistics, so as to judge whether the process is in a state of statistical control. When the process capability declines, the process is out of control or tends to be out of control, an alarm will be issued immediately, so that abnormal factors can be found and eliminated in time, so that the process can always be in a statistically controlled state. Statistical process control technology has played the role of "preventing" a large number of substandard products. According to the specific situation of this system, the difference between the upper surface temperature of each chip and the upper surface temperature of the model chip is used as the monitoring parameter, and the single value-moving range control chart is selected to perform statistical process control on the above 108 temperature difference parameters, which is essentially It is to carry out statistical process control on the dispersion of the contact pressure of each chip inside each isothermal zone, which is approximately equivalent to carrying out statistical process control on the dispersion of the contact thermal resistance of the upper and lower surfaces of the chip.
设在统计受控状态下,第i个等温区第j个芯片上界面温度xij(i=1,2,…12;j=1,2,…9)与相应等温区样板芯片上界面温度xi的差xij-xi服从分布N(μij,σij 2)。经机理分析和实验验证,发现μij≈0,σij≈σ2。即各温差参数的分布规律近似一致,为N(0,σ2)。选择第i个等温区第j个芯片,提取xij-xi的连续n个样本数据xijk-xik(k=1,2,…n),则移动极差定义为:Assuming that in the state of statistical control, the interface temperature x ij (i=1, 2, ... 12; j = 1, 2, ... 9) of the j-th chip in the i-th isothermal zone and the interface temperature of the sample chip in the corresponding isothermal zone The difference x ij -xi of x i obeys the distribution N(μ ij , σ ij 2 ). Through mechanism analysis and experimental verification, it is found that μ ij ≈0 and σ ij ≈σ 2 . That is to say, the distribution law of each temperature difference parameter is approximately the same, which is N(0, σ 2 ). Select the jth chip in the i-th isothermal zone, and extract n consecutive sample data x ijk -xi ik (k=1, 2,...n) of x ij -xi i , then the moving range is defined as:
Rsk=|(xijk-xik)-(xij(k+1)-xi(k+1))|,k=1,2,…n-1 (4)R sk =|(x ijk -x ik )-(x ij(k+1) -x i(k+1) )|, k=1, 2,...n-1 (4)
而平均移动极差为and the average moving range is
由于各芯片温差参数的分布规律近似一致,因此在统计受控状态下从第i个等温区第j个芯片获取的平均移动极差 适用于所有芯片。系统在工作时,实时采集各温度数据并作上述运算,但并不需要再CRT上实时打点作图,单值--移动极差控制图隐含在系统的工作过程中。在控制图数据点随机排列的情况下,若符合下列条件之一,则可判定系统工作在统计受控状态下,各芯片接触热阻是均匀的,样板芯片具有充分的代表性:Since the distribution law of the temperature difference parameters of each chip is approximately the same, the average moving range obtained from the jth chip in the i-th isothermal zone under statistical control Applies to all chips. When the system is working, it collects temperature data in real time and performs the above calculations, but it does not need to do real-time drawing on the CRT, and the single value-moving range control chart is implicit in the working process of the system. In the case where the data points of the control chart are randomly arranged, if one of the following conditions is met, it can be determined that the system is working under statistical control, the contact thermal resistance of each chip is uniform, and the sample chip is fully representative:
(1)连续25个数据点,界外点数d=0;(1) 25 consecutive data points, the number of out-of-bounds points d=0;
(2)连续35个数据点,界外点数d≤1;(2) 35 consecutive data points, the number of out-of-bounds points d≤1;
(3)连续100个数据点,界外点数d≤2;(3) 100 consecutive data points, the number of out-of-bounds points d≤2;
当出现下列情况之一,即可判定系统受到异常因素的影响,脱离了统计受控状态,相应芯片的接触热阻明显偏离了正常值,样板芯片不再具备对该芯片的代表性,计算机系统给出相应警示:When one of the following situations occurs, it can be determined that the system is affected by abnormal factors and is out of statistical control. The contact thermal resistance of the corresponding chip obviously deviates from the normal value. The sample chip is no longer representative of the chip. Give corresponding warnings:
(1)数据点出界或压界就判异;(1) If the data point is out of bounds or under the bounds, it will be judged;
(2)界内点排列不随机就判异。包括点子屡屡接近控制界限、点子在控制中心线单侧成链、点子做周期性变化等。(2) If the arrangement of points within the bounds is not random, it will be judged differently. Including ideas repeatedly approaching the control limit, ideas forming a chain on one side of the control center line, ideas making periodic changes, etc.
通过引入统计过程控制,使样板芯片的代表性处于系统自身的实时监控之下,虽然实际进行聚合酶链式反应的PCR芯片自身不含温度传感器,但系统能够保证对它们的温度控制精度。Through the introduction of statistical process control, the representativeness of the sample chip is under the real-time monitoring of the system itself. Although the actual PCR chip itself does not contain a temperature sensor, the system can guarantee the accuracy of its temperature control.
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