CN1822150A - Super resolution digital optic disc of super lens film structure - Google Patents
Super resolution digital optic disc of super lens film structure Download PDFInfo
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- CN1822150A CN1822150A CNA2006100182819A CN200610018281A CN1822150A CN 1822150 A CN1822150 A CN 1822150A CN A2006100182819 A CNA2006100182819 A CN A2006100182819A CN 200610018281 A CN200610018281 A CN 200610018281A CN 1822150 A CN1822150 A CN 1822150A
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Abstract
This invention relates to a super resolution digital disk of a super lens film structure including a super lens film and a base characterizing in including a medium layer too, they are the medium layer/super lens film/base orderly, in which, said medium is made of SiN or ZnS-SiO< 2 >, the super lens film is an alloy film of Ag, Au or Ag(x)Au(1-x), in which, x varies between 0 and 1, the base includes pits smaller than 380nm and the smallest size of the pit is 200nm, which utilizes an optical head with the laser length of 650nm and numerical value aperture of 0.60 to realize dynamical reading over 200nm information pits, the volume of the single face single layer reaches to 12-15GB and double-face single-layer reaches to 25-30GB.
Description
Technical field
The invention belongs to optical storage field in the infotech, is a kind of super resolution digital optical disc of super lens membrane structure, mainly is applicable to read-only ruddiness super resolution digital optical disc, and multiple uses such as audio frequency, video can be arranged.
Background technology
The CD that the fast development of infotech requires to be used for information stores must possess superelevation storage density and ultrafast access rate, and this just requires the size of the measuring point in the CD more and more littler.Yet, along with reducing of measuring point size, requirement is used for also corresponding the reducing of spot size that measuring point is read, adopt existing optical system but to be difficult to read so small measuring point, because the measuring point size is less than the resolution of reading hot spot, the signal that will occur a plurality of measuring point in the hot spot, this just requires to adopt short wavelength's the laser and the optical head of high-NA, but because the restriction of the numerical aperture of diffraction of light limit effect and optical head, even that reads spot size reduces that to transfer to purple light from present blue light also be several times relation, and the increase of optical head numerical aperture is the greatly cost that adds with the distortion that reduces and cause owing to excentricity of depth of focus.Therefore it is very limited adopting the numerical aperture that increases optical head and reducing the size that optical maser wavelength reduces to read hot spot, so the research diameter has very important using value and meaning less than the reading of measuring point (super-resolution measuring point) of the diffraction of light limit, this also has very big actual application prospect for the read-only disc of realizing ultra-high capacity simultaneously.Yasuda etc. adopt the film layer structure of " PC substrate/dielectric layer/reflection horizon/dielectric layer/mask layer/dielectric layer " to realize (the Kouichi Yasuda that reads of super-resolution measuring point first in read-only disc, Masumi Ono and Katsuhisa Aratani et al.Premastered OpticalDisk by Super-resolution.Jpn.J.Appl.Phys., 1993,32 (11B): 52105213), they change compact disk structure had both been realized read-only ultra-resolution CD-disc for " PC substrate/contrast enhancing layer/dielectric layer/mask layer/dielectric layer/reflection horizon/dielectric layer " line density raising subsequently, realized increase (the Yutaka K of its track density again, Kouichi Y, Masumi O et al., Jpn.J.Appl.Phys., 1996,35part.1B 423-428).The read-only ultra-resolution CD-disc that Yihong Wu etc. propose " PC substrate/dielectric layer/last mask layer/following mask layer/reflection horizon/dielectric layer " two mask layer structures in theory obtains (the Yihong Wu that reads of super-resolution measuring point, Hock Khoo and Takuyo Kogure et al.Read-only Optical disk with Super-resolution, Appl.Phys.Lett.1994,64 (24): 3225-3227).It is that the numerical aperture of 632.8nm, optical head is the reading of super-resolution information point of having realized being of a size of 380nm on 0.40 the device in optical maser wavelength that Jingsong Wei and Fuxi Gan adopts the super-resolution reflecting film structure.(Jingsong?Wei?and?Fuxi?Gan，“Novel?approach?to?super-resolution?pits?readout”，Opt.Eng.(Lett)41(9)，2073-2074(2002)。Yet the measuring point size that above compact disk structure is read is only about the diffraction of light limit, and our task is further to read littler measuring point and obtain higher signal to noise ratio (S/N ratio), makes information measuring point on the CD less than 380nm.
Summary of the invention
In order to read in the read-only disc information measuring point less than 380nm, the present invention proposes a kind of super resolution digital optical disc of super lens membrane structure, in optical maser wavelength is that 650nm, numerical aperture are to realize the measuring point size on 0.60 the dynamic apparatus in 200nm and above reading thereof, and the size of this measuring point is much smaller than the resolution of dynamic checkout unit.
Technical solution of the present invention is:
A kind of super resolution digital optical disc of super lens membrane structure comprises super lens film 2 and dish base 3, it is characterized in that: also have dielectric layer 1, they are followed successively by dielectric layer 1/ super lens film 2/ dish base 3, and dielectric layer 1 is silicon nitride SiN or ZnS-SiO
2 Super lens film 2 is Ag, Au or Ag (x) Au (1-x) alloy firm, and wherein the x value changes between 0-1; Dish base 3 has the hole point, and the hole spot size is less than 380nm, and the minimum pit spot size is at 200nm.Owing to adopted said structure, compare with technology formerly and to have premium properties such as simple in structure, that preparation cost is cheap and technology controlling and process is easy.Its mechanism is under the effect of reading laser beam, because the super lens film is made up of noble metal, covered dielectric layer 1 on it again, can inspire surface plasma wave at the interface at dielectric layer 1/ super lens film 2, surface plasma wave is owing to propagate along the surface, and wave vector is big, wavelength is short, when running into the information measuring point, it will be scattered and be coupled into propagates light, realize dynamically reading of littler super-resolution measuring point by surveying this propagates light.
The super resolution digital optical disc of aforesaid super lens membrane structure is characterized in that Ag, Au that described super lens film 2 is used or the thickness range 5-500nm of Ag (x) Au (1-x) alloy film material.In the 5-500nm interval, has the signal to noise ratio (S/N ratio) of reading height, the stable premium properties that waits of optical disc property.
The super resolution digital optical disc of aforesaid super lens membrane structure is characterized in that silicon nitride SiN or the ZnS-SiO of dielectric layer 1 by thickness 10-500nm
2Constitute, thickness range is 10-500nm.In the 10-500nm interval, has the signal to noise ratio (S/N ratio) of reading height, the stable premium properties that waits of optical disc property.
The super resolution digital optical disc of aforesaid super lens membrane structure is characterized in that described dish base 3 used materials are polycarbonate or K9 glass, and the thickness of dish base is 0.6-1.2mm.The dish base useful polycarbonate of 3 materials that can use or K9 glass or common quartz glass, select that polycarbonate or K9 glass have that the performance of reading is good for use, material source easily, with premium properties such as conventional optical disc compatibility.
Technique effect of the present invention:
Compare with previous technology, dielectric layer 1 is a protective seam in the super resolution digital optical disc of super lens membrane structure of the present invention, and combines the size that is used to reduce to read hot spot with super lens thin layer 2.In optical maser wavelength is that the numerical aperture of 650nm, optical head is can realize that the pits spot size is 200nm and reading more than the 200nm under 0.60 the dynamic test system.The single-surface single-layer capacity of this read-only disc reaches 12-15GB, and the capacity of two-sided individual layer reaches 25-30GB.
Description of drawings
Fig. 1, the structural representation of the embodiment of the invention.
Fig. 2, the Dynamic Signal oscillograph figure that obtains as the super lens film as dielectric layer, Ag with SiN.
Fig. 3 makes the dynamic read output signal spectrogram that the super lens film obtains with SiN as dielectric layer, Au.
Fig. 4, with SiN as dielectric layer, Ag
0.5Au
0.5The read output signal spectrogram that the super lens film obtains.
Fig. 5 is with ZnS-SiO
2As dielectric layer, Ag makes the spectrogram of the read output signal that the super lens film obtains.
Fig. 6 is with ZnS-SiO
2As dielectric layer, Au makes the spectrogram of the read output signal that the super lens film obtains.
Fig. 7 is with ZnS-SiO
2As dielectric layer, Ag
0.5Au
0.5Make the spectrogram of the signal that the super lens film obtains.
Fig. 8, SiN film thickness and the relation of reading signal to noise ratio (S/N ratio).
Fig. 9, ZnS-SiO
2Film thickness and the relation of reading signal to noise ratio (S/N ratio).
Figure 10, Ag film thickness and the relation of reading signal to noise ratio (S/N ratio).
Figure 11, Au film thickness and the relation of reading signal to noise ratio (S/N ratio).
Figure 12, Ag
0.5Au
0.5Film thickness and the relation of reading signal to noise ratio (S/N ratio).
Embodiment
Embodiments of the invention are " the read-only ruddiness super-resolution of super lens membrane structure is used optical digital disk more ", as shown in Figure 1, comprise dielectric layer 1, super lens thin layer 2 and dish base 3.Dielectric layer 1 is used to protect super lens thin layer 2, and combines the size that is used to reduce to read hot spot with super lens thin layer 2, and dish base 3 is used for prefabricated information point, and the information point size is at 200nm.
Dielectric layer 1 in the embodiment of the invention is by silicon nitride or the ZnS-SiO of thickness 10-500nm
2Constitute. according to the concrete condition value of implementing, yet, not all right when being lower than 10nm, because high-quality film preparation is relatively more difficult under this thickness; Also not all right when being higher than 500nm, because preparation cost is improved, read output signal descends on the other hand.The thickness of the material that super lens thin layer 2 is used is Ag, Au or Ag (x) Au (1-x) alloy firm of 5-500nm, according to the concrete condition value of implementing, then not all right when being lower than 5nm, because high-quality film preparation is relatively more difficult under this thickness, reduce the signal to noise ratio (S/N ratio) of reading of CD simultaneously, also not all right when being higher than 500nm, because under this thickness, there has not been the surface plasma wave effect, can not realize dynamically reading of super-resolution information point.Dielectric layer 1, super lens thin layer 2 and dish base 3 are united the super resolution digital optical disc that constitutes the super lens membrane structure, see Fig. 1.
Dielectric layer 1 of the present invention can be by SiN (x) or ZnS (x)-SiO
2(1-x) constitute, super lens film 2 can be by Ag (x), Au (1-x) or Ag (x) Au (1-x) alloy composition (annotate: parameter x can be got the arbitrary value between 0 and 1).Below in conjunction with example the present invention and effect thereof are described further:
Be to be that the hole point of 200nm is as information point with the prefabricated diameter of method of compacting on the polycarbonate substrate of 0.6mm at thickness.The read-only ruddiness super-resolution of super lens membrane structure uses the preparation process of optical digital disk as follows more: adopt magnetically controlled sputter method (sputtering pressure 1.0 * 10
-4Pa), plating successively on compact disc substrate: noble metal film layer 2 and dielectric layer 1, wherein dielectric layer 1 is the SiN film of 80nm for thickness, noble metal film layer 2 is the thick Ag super lens film of 40nm.The laser instrument that detects signal equipment therefor in the CD is that wavelength is the semiconductor laser of 650nm, the numerical aperture of used optical head is 0.60, the diameter that calculates the halfwidth of hot spot according to the diffraction of light limit formula is 600nm, considerably beyond hole spot diameter 200nm.Test the read-only ruddiness super-resolution of the super lens membrane structure in this experiment and use optical digital disk more, then obtained oscilloscope signal shown in Figure 2, this explanation the present invention " the read-only ruddiness super-resolution of super lens membrane structure is used optical digital disk more " can be that the numerical aperture of 650nm, optical head is to realize pits spot size reading at 200nm on 0.60 the dynamic apparatus in optical maser wavelength.With SiN as dielectric layer, the spectrogram 3 of the dynamic read output signal that Au obtains as the super lens thin layer.With SiN as dielectric layer, Ag
0.5Au
0.5The spectrogram 4 of the dynamic read output signal that obtains as the super lens thin layer.With ZnS-SiO2 as dielectric layer, the spectrogram 5 of the dynamic read output signal that Ag obtains as the super lens thin layer.With ZnS-SiO2 as dielectric layer, the spectrogram 6 of the dynamic read output signal that Au obtains as the super lens thin layer.With ZnS-SiO
2As dielectric layer, Ag
0.5Au
0.5The spectrogram 7 of the dynamic read output signal that obtains as the noble metal film layer.
Change above-mentioned SiN film or ZnS-SiO
2Film thickness obtains Fig. 8 and the dynamic read output signal shown in Figure 9 and the relation of film thickness, and its pass is the increase along with film thickness, and its signal to noise ratio (S/N ratio) increases earlier and reduces.SiN film or ZnS-SiO
2Film thickness is when the 200nm left and right sides, and signal to noise ratio (S/N ratio) reaches maximal value.
Change Ag film or Au film or Ag
0.5Au
0.5The thickness of film obtains Figure 10, Figure 11, the relation of reading signal to noise ratio (S/N ratio) and film thickness shown in Figure 12, and its pass is the increase along with film thickness, and its signal to noise ratio (S/N ratio) increases earlier and reduces.The Ag film, Au film, Ag
0.5Au
0.5The thickness of film is respectively at 300nm, 220nm, and during the 320nm left and right sides, signal to noise ratio (S/N ratio) reaches maximal value.
In sum, adopting " the read-only ruddiness super-resolution of super lens membrane structure is used optical digital disk more " of the present invention, is that the numerical aperture of 650nm, optical head is can realize that the pits spot size is in 200nm and above reading thereof on 0.60 the dynamic apparatus in optical maser wavelength.
Claims (4)
1, a kind of super resolution digital optical disc of super lens membrane structure comprises super lens film 2 and dish base 3, it is characterized in that: also have dielectric layer 1, they are followed successively by dielectric layer 1/ super lens film 2/ dish base 3, and dielectric layer 1 is silicon nitride SiN or ZnS-SiO
2Super lens film 2 is Ag, Au or Ag (x) Au (1-x) alloy firm, and wherein the x value changes between 0-1; Dish base 3 has the hole point, and the hole spot size is less than 380nm, and the minimum pit spot size is at 200nm.
2, the super resolution digital optical disc of super lens membrane structure as claimed in claim 1 is characterized in that Ag, Au that described super lens film (2) is used or the thickness range 5-500nm of Ag (x) Au (1-x) alloy film material.
3, the super resolution digital optical disc of super lens membrane structure as claimed in claim 1 or 2 is characterized in that silicon nitride SiN or the ZnS-SiO of dielectric layer (1) by thickness 10-500nm
2Constitute, thickness range is 10-500nm.
4, the super resolution digital optical disc of super lens membrane structure as claimed in claim 3 is characterized in that described dish base (3) used material is polycarbonate or K9 glass, and the thickness of dish base is 0.6-1.2mm.
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| CNB2006100182819A CN100388373C (en) | 2006-01-23 | 2006-01-23 | Super resolution digital optic disc of super lens film structure |
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| CNB2006100182819A CN100388373C (en) | 2006-01-23 | 2006-01-23 | Super resolution digital optic disc of super lens film structure |
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| CN1822150A true CN1822150A (en) | 2006-08-23 |
| CN100388373C CN100388373C (en) | 2008-05-14 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008009931A1 (en) * | 2006-07-19 | 2008-01-24 | University Of Southampton | An optical system and method for sub-wavelength energy concentration |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990042064A (en) * | 1997-11-25 | 1999-06-15 | 윤종용 | Phase Change Optical Disks with Precious Metal Reflective Layers |
| CN1542788A (en) * | 2003-11-07 | 2004-11-03 | 中国科学院上海光学精密机械研究所 | Super resolution reflecting film arrangement |
| CN1632869A (en) * | 2004-12-21 | 2005-06-29 | 中国科学院上海光学精密机械研究所 | High-density enhancement type recordable multipurpose digital optical disk |
| CN1632870A (en) * | 2004-12-21 | 2005-06-29 | 中国科学院上海光学精密机械研究所 | High-density enhancement type read-only digital optical disk |
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- 2006-01-23 CN CNB2006100182819A patent/CN100388373C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008009931A1 (en) * | 2006-07-19 | 2008-01-24 | University Of Southampton | An optical system and method for sub-wavelength energy concentration |
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Owner name: SHANGHAI OPTICS AND PRECISION MECHANICS INSTITUTE Free format text: FORMER OWNER: SHANGHAI OPTICS AND PRECISION MECHANICS INSTITUTE, CHINESE ACADEMY OF SCIENCES; ZHA LI Effective date: 20080905 |
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Effective date of registration: 20080905 Address after: Shanghai 800-211 post office mailbox: 201800 Co-patentee after: Wuhan Guanggu Gaoqing Technology Development Co., Ltd. Patentee after: Shanghai Institute of Optics and Fine Mechanics.CAS, Chinese Academy of Sciences Address before: Shanghai 800-211 post office mailbox: 201800 Co-patentee before: Cha Li Patentee before: Shanghai Institute of Optics and Fine Mechanics.CAS, Chinese Academy of Sciences |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080514 Termination date: 20170123 |
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| CF01 | Termination of patent right due to non-payment of annual fee |