CN1815873A - Digital adjustable double-ring motor controller for photoetching machine and digital adjusting method - Google Patents
Digital adjustable double-ring motor controller for photoetching machine and digital adjusting method Download PDFInfo
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- CN1815873A CN1815873A CNA2006100231552A CN200610023155A CN1815873A CN 1815873 A CN1815873 A CN 1815873A CN A2006100231552 A CNA2006100231552 A CN A2006100231552A CN 200610023155 A CN200610023155 A CN 200610023155A CN 1815873 A CN1815873 A CN 1815873A
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Abstract
The method also includes digital adjustment part connected to circuit of double loop. The digital adjustment part connects to each gain parameter control and integral parameter control in double loop in order to digitally adjust gain parameter, integral parameter, and feedback gain in current loop and speed loop. Using selection of resistor network of D/A conversion chip adjusts gain parameter and feedback gain parameter. Using of selection switch to select different numerical value of resistance implements digital adjustment. Thus, accurate adjustment can be obtained for parameters of servo loop. The invention provides wider adjustment range.
Description
Technical field
The invention belongs to Motor Control Field, relate in particular to the digital adjustable DC motor controller of the twin nuclei in the mask aligner SERVO CONTROL.
Background technology
Photoetching is the operation of most critical in the ic processing, so mask aligner is the equipment of most critical in the ic processing.
The basic principle of at present more advanced advanced scanning projecting photoetching machine is seen Fig. 1 and Fig. 2, and Fig. 1 is image field and slit exposure area schematic, and zone 10 is an image field, and its scope is greater than common step and repeat lithography machine, and step and repeat lithography machine image field is generally 22*22mm
2, step-by-step scanning photo-etching device can reach 26*33mm
2, zone 11 is the slit exposure zone shown in the shade.Fig. 2 is the advanced scanning projecting photoetching machine working state schematic representation, step-by-step scanning photo-etching device is when carrying out exposure scanning, at first will treat on the silicon chip 27 that exposed areas moves to the below of lens 22, silicon slice placed is on work stage 21, and the motion that remains a constant speed in exposure process.The mask 26 on this motion and the mask platform 23 and the motion parts of scanning slit unit 24 in time be strict synchronism on the position, silicon chip surface remains in exposure process in the best focal plane of lens 22 always simultaneously.When illuminator 25 arrives assigned address in work stage 21 and mask platform 23 with command speed, by synchronous triggering and the light dosage 28 that provides exposure required is provided.
The step-by-step scanning photo-etching device system can be divided into frame system, projection lens system, illuminator, light-source system, workbench mask platform system, Automatic Alignment System, focusing and leveling system, slice, thin piece transmission system, mask plate store and transmission system, environmental control system, phase shift mask, complete machine control system, and the complete machine software systems.Wherein, the leveling and focusing system is used to measure the distance of interior multiple spot of exposure field and camera lens and regulate, and keeps the vertical control precision of silicon chip face and focal plane.Step-by-step scanning photo-etching device leveling and focusing system is positioned at work stage and mask stage part, with the work stage is example, its basic structure as shown in Figure 3, optical lens 1 is an immobilising device, work stage 2 need be carried out horizontal movement and catenary motion, the main effect of leveling and focusing system is carried out catenary motion by three linear electric motors 4 exactly, guarantee silicon wafer horizontal and be in the focal plane of optical lens 1, position transducer is sent to controller integrated circuit board 5 with positional information, the controller integrated circuit board is sent to host computer 6 with positional information then, host computer 6 is issued to controller integrated circuit board 5 with the motor set point after calculating, make three motors move respectively, constitute a complete kinetic control system.
Because the catenary motion of work stage 2 has determined whether silicon chip is in optical lens imaging focal plane, thereby has directly determined to place the silicon wafer exposure quality of work stage.For 100nm or more high-precision mask aligner, guaranteeing that work stage is in needs the leveling and focusing servo system to have high required precision in the focal plane.
Summary of the invention
The technical issues that need to address of the present invention are to provide a kind of servo-controlled digital adjustable double-ring multiaxis DC motor controller of mask aligner that is used for, with realized to rotating speed and electric current accurate adjusting, to the accurate location in control of the motor-driven of multiaxial motion system and the mask aligner leveling and focusing system.
Technical scheme of the present invention is:
Comprise current loop circuit and speed ring circuit, it is characterized in that,, the gain parameter P of described electric current loop and speed ring, integral parameter I and feedback oscillator are digital regulated, and wherein gain parameter is selected to regulate by the resistor network that digital-to-analogue transforms chip.
As improvement of the present invention, described current loop circuit comprises: comparator, lead-lag link, gain link, integral element, current sensor, feedback oscillator link and feedback filtering link, gain link and integral element constitute the PI controller, comparator, lead-lag link, gain link, integral element, current sensor connect successively, and current sensor by the series connection the feedback oscillator link and the feedback filtering link with the signal back comparator.
As improvement of the present invention, described speed ring circuit comprises: comparator, gain link, integral element, feedback oscillator link, feedback filtering link, gain link and integral element constitute the PI controller equally, comparator, gain link and integral element are connected successively, and the feedback oscillator link by current loop circuit and series connection, feedback filtering link are with the signal back comparator then.
As improvement of the present invention, also be provided with signal input and output link in the controller, can be by detecting controller obtains controller to the response of injecting noise signal transfer function, transfer function is by the decision of the relation of output signal in the system and input signal, by to input signal and output signal signal amplitude and the phase relation characteristic that can describe out system in a band frequency scope, the noise of injection can be white noise or swept-frequency signal.The testable transfer function of controller comprises speed ring open-loop transfer function, electric current loop open-loop transfer function and speed ring closed loop transfer function, and electric current loop closed loop transfer function.
As improvement of the present invention, controller is integrated in the single controller integrated circuit board with former a plurality of controllers.In mask aligner leveling and focusing system, catenary motion mainly is as actuator by three linear electric motors (as shown in Figure 3).Because the complexity of mask aligner system and highly integrated, thereby the module of same function need be integrated together.
Another technical problem that the present invention need solve is to provide a kind of implementation method of above-mentioned digital adjustable double-ring multiaxis DC motor controller.
Concrete technical scheme may further comprise the steps:
1) controller receives the transmitting order to lower levels from host computer, and judges whether mode of operation, if normal mode of operation then enters the test of servo loop transfer function, if normal operating conditions is then carried out next step;
2) host computer issues controller parameter information, and the controller board clamping receives orders the back after definite controller is in normal mode of operation, judges whether controller parameter changes, if generation conversion, then controller parameter is handed down to controller circuitry,, carries out next step if do not change;
3) the controller integrated circuit board judges that whether the set point of speed ring changes, if do not change, then returns the first step; If change, then carry out next step;
4) host computer issues the position transducer sample command, after the controller board clamping receives orders, sensor information is sampled, to send out on the information that sample then, host computer is according to the positional information of receiving, calculate next rotating speed constantly of motor, and the speed ring set point is handed down to controller circuitry;
5) the speed ring set point has been broken the balance of speed ring, make speed ring and electric current loop make corresponding adjusting, speed ring adjuster unsaturation even, given speed set point Usn, obtain velocity deviation value Uen, this moment, Uen was not 0, speed ring integral element works, and Usi increases, thereby electric current loop also obtains deviate Uei, proportional integral by electric current loop is regulated, electric moter voltage is risen, and the increase of motor speed increases Un, and motor speed Un finally is increased to given speed set point Usn and equates, because electric current loop deviation Uei finally is 0, need to make Usi to move back saturation history under the situation that motor load does not change, promptly speed ring has to a certain degree overshoot, and the adjusting of controller finally makes motor speed Un equate with given speed set point Usn, be that the velocity deviation value is 0 again, thereby entire controller reach new balance.
The invention has the beneficial effects as follows, because electric current loop and speed ring all adopt PI polyphone regulative mode, and P parameter and I parameter and feedback oscillator parameter programmable regulating, avoided parameter regulation loaded down with trivial details of traditional potentiometer or toggle switch, make the servo loop parameter can obtain accurate adjusting, wideer adjustable range has been arranged; Controller has the on-line testing function simultaneously, has had reliable foundation for understanding system performance and further improving controller architecture.In addition a plurality of PI controllers are integrated in single integrated circuit board, logical signal (data wire, clock line, enable signal etc.) is shared, compares with not integrated a plurality of controller modules, has reduced the control signal of driver; External interface is simplified, and only needs the interface with host computer to get final product, and has simplified the complicated connecting line with host computer; A plurality of controllers are integrated in same integrated circuit board, make each controller have identical electrical characteristic, and, be easier to realize driven in synchronism to a plurality of actuators.Thereby realize motor-driven control, be applicable to the accurate location in the mask aligner leveling and focusing system the multiaxial motion system.
Description of drawings
Fig. 1: step-by-step scanning photo-etching device exposure image field and scanning slit;
Fig. 2: advanced scanning projecting photoetching machine exposure scanning basic principle;
Fig. 3: step-by-step scanning photo-etching device leveling and focusing system basic structure;
Fig. 4: leveling and focusing system dicyclo controller basic structure;
Fig. 5: electric current loop structure;
Fig. 6: speed ring structure;
Fig. 7: the DAC resistor network structure in the gain-adjusted;
Fig. 8: controller gain is regulated isoboles;
Fig. 9: the controller integration is regulated isoboles;
Figure 10: control firmware algorithm basic procedure.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is elaborated.
The basic structure of dicyclo controller is electric current loop in the frame of broken lines as shown in Figure 4, and tiltedly arrow represents that corresponding parameter can be digital regulated.The adjusting of speed loop makes dc motor speed n follow set point Usn and changes, and owing to adopted the proportional integral adjusting, makes and the steady-state speed floating can play the anti-interference effect to the motor load disturbance.The adjusting of current loop can play timely anti-interference effect to the line voltage disturbance; in the rotational speed regulation process, make current of electric follow its given voltage U si and change, and when current of electric during excessive or motor rotation blockage; in time restriction armature supply maximum plays protective effect fast and safely.
Electric current loop structure (as shown in Figure 5) comprising: comparator 1, lead-lag link 2, gain link 3, integral element 4, current sensor 5, feedback oscillator link 6, feedback filtering link 7.Comparator obtains voltage deviation Uei, when motor load increases by the comparison to speed ring input voltage Usi and feedback current Ui, it is big that Ui becomes, cause that greatly motor speed Un descends because motor torque becomes, make Uen become big, by replenishing of Uen, make electric current loop input Usi become big, finally make electric current loop stable, promptly Uei is 0, and the integral action of Uei is accelerated motor speed simultaneously, final Un=Usn, speed ring obtains balance.Lead-lag filtering is in order to improve phase margin, to improve the stability of loop.Gain link and integral element have constituted the PI link.Current sensor can feed back the operating current size of motor, to constitute the feedback loop of electric current loop.The feedback oscillator link has programmable features, selects different yield values by digital programmable, can obtain that the different motor of maximum current is carried out electric current and limit, and has increased the flexibility of controller.But the alternating component of feedback filtering link filtering motor feedback, the noise of reduction circuit.
Speed ring structure (as shown in Figure 6) comprising: comparator 8, gain link 9, integral element 10, feedback oscillator link 11, feedback filtering link 12.Gain link and integral element constitute the PI controller equally, make controller promptly bring into play the rapidity that ratio is regulated, and bring into play the floating characteristic that integration is regulated again, can satisfy the required precision of mask aligner leveling and focusing system.When operate as normal, if speed ring adjuster unsaturation, given speed set point Usn, obtain velocity deviation value Uen, this moment, Uen was not 0, speed ring integral element works, and Usi increases, thereby electric current loop also obtains deviate Uei, proportional integral by electric current loop is regulated, electric moter voltage is risen, and the increase of motor speed increases Un, because electric current loop deviation Uei finally is 0, under the situation that motor load does not change, need to make Usi to move back saturation history, that is to say that speed ring has overshoot to a certain degree, the adjusting of controller finally makes Usn equate with Un.
Controller parameter of the present invention is that numeral is adjustable, is embodied in:
1. the adjusting of gain parameter is that resistor network by DAC chip (analog-digital chip) is selected to realize, the internal structure of chip as shown in Figure 7, promptly adjustable equivalent electric circuit, resistor network V to the P parameters number
INWith I
OUTBetween equivalent resistance by the adjusting of programming of DAC chip.Equivalent electric circuit after its composition link as shown in Figure 8, Output Voltage Formula is:
Fig. 8 is the equivalent electric circuit of DAC chip (analog-digital chip), R2 is the internal reference resistance of this chip, R1 is the resistor network among the DAC, by digital programmable to this chip, can realize change to R1, and owing to adopted the internal resistance of chip, reduced the error that discrete device brings, can access more accurate gain adjusting; Adopt digital programmable can make R1 have bigger excursion, improved the flexibility that ratio is regulated.
2. the equivalent regulating circuit of integral parameter as shown in Figure 9, i.e. the equivalent electric circuit that the I parameters number is regulated.MUX is the analog selection switch among the figure, also available transistor or field effect transistor substitute, by digital control analog selection switch, can select the resistance of different resistances, as R2, R3, R4, R5 among the figure,, thereby realize the digital regulated of I parameter by selection to different resistance, and obtain accurate integration time constant, formula is:
τ＝R*C1
(formula 1-2)
R is resistance R 2., R3., R4 or the R5 of analog selection switch correspondence in the formula, in the bracket is the limit value of integration time constant, wherein, E is the amplitude of step signal, τ is an integration time constant, its size has determined the speed of integrating rate, the maximum output voltage U during owing to operational amplifier 5V power supply
OmaxBe finite value (U
OmaxAbout=± 4.7V), therefore,, then also do not reach before predetermined time of integration of the t if the value of τ is too little, amplifier is saturated, and output voltage waveforms can serious distortion.So the value of τ must satisfy the qualifications among the formula formula 1-2.The output end voltage of integrating circuit is:
Reliability when controller of the present invention has fully guaranteed real work.Because mask aligner is made of paralysis even damage that any one link breaks down and all may cause whole system a plurality of subsystems.Thereby, guarantee reliability of system operation and realize that the on-line monitoring of motion is the indispensable factor of system.Controller as directly being connected with actuator more needs to fully take into account reliability factor.The present invention makes host computer can obtain the operating state of controller in real time by the sampling to the controller operating state, and these states comprise motor working current, motor operating voltage, speed ring and electric current loop deviation and circuit working temperature.Like this, when motor load during excessive or motor rotation blockage, host computer can in time be made judgement by current of electric information, circuit working temperature information and other abnormal information, makes motor make the anxious action that stops by disconnecting relay, guarantees that controller and motor are not damaged.
Controller of the present invention has the on-line testing function.Signal input and signal output element in controller, have been inserted, thereby by detecting controller to injecting the response of noise signal, can obtain the transfer function of controller, like this, have reliable foundation for understanding system performance and further improving controller architecture.The testable transfer function of controller comprises speed ring open-loop transfer function, electric current loop open-loop transfer function and speed ring closed loop transfer function, and electric current loop closed loop transfer function.
Controller of the present invention is integrated in the single controller integrated circuit board with a plurality of controllers.In mask aligner leveling and focusing system, catenary motion mainly is as actuator by three linear electric motors (as shown in Figure 3).Because the complexity of mask aligner system and highly integrated, thereby the module of same function need be integrated together.Except satisfying the integrated demand of mask aligner, a plurality of controllers are integrated into single integrated circuit board also have following function:
1. logical signal (data wire, clock line, enable signal etc.) is shared, compares with not integrated a plurality of controller modules, has reduced the control signal of driver.
2. external interface is simplified, and only needs the interface with host computer to get final product, and has simplified the complicated connecting line with host computer.
3. a plurality of controllers are integrated in same integrated circuit board, make each controller have identical electrical characteristic, and, be easier to realize driven in synchronism to a plurality of actuators.
The controller mode of operation comprises two kinds of normal mode of operation and diagnostic modes, and the selection of pattern also is by programmed settings, and mode of operation is the normal operating conditions of controller, and diagnostic mode is used for the transfer function of test loop.
During operate as normal, the interface of controller comprises that speed ring is set interface and servo parameter is set interface, when host computer after controller integrated circuit board downloading speed set point and servo parameter value, fpga chip in the controller integrated circuit board can issue data from the trend controller, make controller have relevant parameters, FPGA firmware flow process as shown in figure 10.
In addition, the controller integrated circuit board also comprises position sampling circuit, diagnostic circuit and controller state sample circuit etc.
As shown in Figure 3, in the mask aligner leveling and focusing system, host computer at first issues controller parameter to the controller integrated circuit board, after the controller integrated circuit board receives orders, the servo controller parameter is issued, make the dicyclo controller finish parameter (comprise speed ring and electric current loop PI parameter, and speed ring and electric current loop feedback oscillator parameter) setting, controller has obtained corresponding response characteristic.Then, host computer issues the position transducer sampled signal, after the controller integrated circuit board receives orders, samples according to firmware algorithm flow process location information, and will issue host computer on the position sampling information.Host computer calculates the speed setting value of next moment direct current machine and is handed down to the controller integrated circuit board according to motion control arithmetic, after newer command is received in the controller board clamping, the speed ring set point is upgraded, and makes the rotary speed movement of motor with correspondence.Concrete steps are as follows:
Step1: the host computer transmitting order to lower levels makes the controller board card enter mode of operation.
Step2: host computer issues controller parameter information, after the controller board clamping receives orders, according to flow process shown in Figure 9, after definite controller is in normal mode of operation, determine controller parameter and change, so, controller parameter is handed down to controller circuitry according to firmware algorithm.
Step3: host computer issues the position transducer sample command, after the controller board clamping receives orders, according to flow process shown in Figure 10, sensor information is sampled, and will send out on the information that sample then.
Step4: host computer calculates next rotating speed constantly of motor according to the positional information of receiving, and the speed ring set point is issued; The controller integrated circuit board determines the speed ring set point and changes, and according to Figure 10 flow process, the downloading speed set point is given controller circuitry.
Step5: the speed ring set point has been broken the balance of speed ring, make speed ring and electric current loop make corresponding adjusting, speed ring adjuster unsaturation even, given speed set point Usn, obtain velocity deviation value Uen, this moment, Uen was not 0, speed ring integral element works, Usi increases, thereby electric current loop also obtains deviate Uei, regulates by the proportional integral of electric current loop, and electric moter voltage is risen, the increase of motor speed increases Un, motor speed Un finally is increased to given speed set point Usn and equates, because electric current loop deviation Uei finally is 0, needs to make Usi to move back saturation history under the situation that motor load does not change, that is to say, speed ring has overshoot to a certain degree, and the adjusting of controller finally makes motor speed Un equate with given speed set point Usn, and promptly the velocity deviation value is 0 again, so final entire controller reaches new balance.
Though disclose the preferred embodiments of the present invention, those skilled in the art will appreciate that under the situation that does not deviate from disclosed scope of the present invention in claims any various modifications, interpolation and replacement all belong to protection scope of the present invention.
Claims (11)
1. digital adjustable double-ring motor controller that is used for mask aligner, comprise current loop circuit and speed ring circuit, thereby formation dicyclo PI controller, it is characterized in that, also comprise the digital regulated part that is connected with the dicyclo circuit, each gain parameter and integral parameter control connection in digital regulated part and the dicyclo, so that the gain parameter of described electric current loop and speed ring, integral parameter and feedback oscillator are digital regulated, wherein gain parameter and feedback oscillator parameter are selected to regulate by the resistor network that digital-to-analogue transforms chip, and that storage gain selects the resistance of different resistances to realize by selector switch is digital regulated.
2. controller as claimed in claim 1, it is characterized in that, described current loop circuit comprises: comparator, lead-lag link, gain link, integral element, current sensor, feedback oscillator link and feedback filtering link, gain link and integral element constitute the PI controller, comparator, lead-lag link, gain link, integral element, current sensor connect successively, and current sensor by the series connection the feedback oscillator link and the feedback filtering link with the signal back comparator.
3. controller as claimed in claim 1, it is characterized in that, described speed ring circuit comprises: comparator, gain link, integral element, feedback oscillator link, feedback filtering link, gain link and integral element constitute P worker's controller, comparator, gain link and integral element are connected successively, and the feedback oscillator link by current loop circuit and series connection, feedback filtering link are with the signal back comparator then.
4. controller as claimed in claim 1 is characterized in that, also is provided with signal input and output link in the described controller, by detecting controller obtains controller to the response of injecting noise signal transfer function.
5. controller as claimed in claim 4 is characterized in that, the noise of described injection can be white noise or swept-frequency signal.
6. controller as claimed in claim 1 is characterized in that this controller is integrated in a plurality of controllers on the single controller integrated circuit board.
7. controller as claimed in claim 1, it is characterized in that this controller mode of operation comprises normal mode of operation and diagnostic mode, the selection of pattern is by programmed settings, mode of operation is the normal operating conditions of controller, and diagnostic mode is used for the transfer function of test loop.
8. controller as claimed in claim 7 is characterized in that, when being in normal mode of operation, the interface of controller comprises that speed ring is set interface and servo parameter is set interface.
9. digital adjustable method that is used for the digital adjustable double-ring motor controller of mask aligner is characterized in that may further comprise the steps:
1) controller receives the transmitting order to lower levels from host computer, and judges whether mode of operation, if diagnostic mode then enters the test of servo loop transfer function, if normal operating conditions is then carried out next step;
2) host computer issues controller parameter information, and the controller board clamping receives orders the back after definite controller is in normal mode of operation, judges whether controller parameter changes, if generation conversion, then controller parameter is handed down to controller circuitry,, carries out next step if do not change;
3) the controller integrated circuit board judges that whether the set point of speed ring changes, if do not change, then returns the first step; If change, then carry out next step;
4) host computer issues the position transducer sample command, after the controller board clamping receives orders, sensor information is sampled, to send out on the information that sample then, host computer is according to the positional information of receiving, calculate next rotating speed constantly of motor, and the speed ring set point is handed down to controller circuitry;
5) the speed ring set point has been broken the balance of speed ring, make speed ring and electric current loop make corresponding adjusting, speed ring adjuster unsaturation even, given speed set point (Usn), obtain velocity deviation value (Uen), (Uen) is not 0 at this moment, speed ring integral element works, (Usi) increase, thereby electric current loop also obtains deviate (Uei), proportional integral by electric current loop is regulated, electric moter voltage is risen, and the increase of motor speed increases (Un), and motor speed (Un) finally is increased to given speed set point (Usn) and equates, because electric current loop deviation (Uei) finally is 0, need to make (Usi) to move back saturation history under the situation that motor load does not change, promptly speed ring has to a certain degree overshoot, and the adjusting of controller finally makes motor speed (Un) equate with given speed set point (Usn), be that the velocity deviation value is 0 again, thereby entire controller reach new balance.
10. the adjustable method of numeral as claimed in claim 9 is characterized in that, also can comprise step: monitor motor-drive circuit in real time with current sensor, temperature sensor, satisfy the requirement that host computer shows electric machine operation state and data processing in real time;
11. the adjustable method of numeral as claimed in claim 9, it is characterized in that, also can comprise: when motor load during excessive or motor rotation blockage, host computer is in time made judgement by current of electric information, circuit working temperature information and other abnormal information, makes motor make the anxious action that stops by disconnecting relay.
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| CN101995870A (en) * | 2010-11-18 | 2011-03-30 | 海南大学 | Forward channel random network time-delay compensation method for network cascade control system |
| CN102033534A (en) * | 2010-11-18 | 2011-04-27 | 海南大学 | Method for compensating for varying network time delay in external feedback and inner loop network paths of network cascade control system |
| CN102033529B (en) * | 2010-11-18 | 2014-01-08 | 海南大学 | Method for compensating for unknown network time delay in forward path of network cascade control system |
| CN102033534B (en) * | 2010-11-18 | 2014-01-08 | 海南大学 | Method for compensating for varying network time delay in external feedback and inner loop network paths of network cascade control system |
| CN106647339A (en) * | 2015-10-28 | 2017-05-10 | 株式会社安川电机 | Servo system and servo controller |
| CN107994886A (en) * | 2016-10-27 | 2018-05-04 | 北京遥感设备研究所 | A kind of pulse width modulated power amplifier current loop circuit |
| CN106840665A (en) * | 2017-04-06 | 2017-06-13 | 南京工程学院 | The method of testing of small-sized dual input reducing gear test system |
| CN106840665B (en) * | 2017-04-06 | 2019-08-02 | 南京工程学院 | The test method of small-sized dual input speed reducer structure |
| CN110286612A (en) * | 2018-03-19 | 2019-09-27 | 发那科株式会社 | Control device |
| CN110286612B (en) * | 2018-03-19 | 2021-06-18 | 发那科株式会社 | Control device |
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