CN1808284A - Serial data transmission system with multiple acquisition channels and control method thereof - Google Patents
Serial data transmission system with multiple acquisition channels and control method thereof Download PDFInfo
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- CN1808284A CN1808284A CN 200610023681 CN200610023681A CN1808284A CN 1808284 A CN1808284 A CN 1808284A CN 200610023681 CN200610023681 CN 200610023681 CN 200610023681 A CN200610023681 A CN 200610023681A CN 1808284 A CN1808284 A CN 1808284A
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Abstract
The invention discloses a multi-channel serial data transmission system and the control method. The invention comprises: plural analog digital converter are connected with controller via serial data lines and control lines, slave controller and main controller are connected via bi-direction serial lines. A special serial communication protocol is defined between the main controller and the slave controller.
Description
Technical field
The invention belongs to SIC (semiconductor integrated circuit) photoetching production field, relate in particular to a kind of serial data transmission structure and control method of many acquisition channels.
Background technology
As everyone knows, a large amount of sensor devices is installed on the litho machine, and is installed in different places,, often need to take effective method in order accurately to obtain the information of these sensors according to the working condition of reality.
Existing data acquisition technology generally is to use a data collecting card that contains many acquisition channels to carry out data acquisition, and the data after the collection are passed to other data handling system by certain bus.This requirement, data collecting card and data handling system are supported this bus, the position of placement is more concentrated.There are 2 deficiencies in this method, and at first data collecting card will be supported this bus, and this has strengthened the complicacy of hardware design to a certain extent, distance between possible in addition sensor and the data collecting card is far away, line is longer, and this can influence the precision of input signal, i.e. the precision that influence is gathered.
Summary of the invention
One of technical issues that need to address of the present invention are to provide a kind of serial data transmission system of many acquisition channels, to alleviate the complicacy of data collecting card hardware design, strengthen acquisition precision.
Described technical scheme is characterised in that and comprises:
A plurality of analog to digital converters carry out analog to digital conversion to multiple signals;
Master controller sends order to slave controller, receives the serial data that slave controller sends
And slave controller, receive the order of master controller, remove to control a plurality of analog to digital converters and carry out analog to digital conversion, obtain the digital signal after the conversion, and the mode of the data serial of many acquisition channels is issued master controller;
A plurality of analog to digital converters are connected with control line by serial data line with slave controller, and slave controller is connected by the bidirectional linked list line with master controller.
In order to realize the serial data transmission control of many acquisition channels, the serial communication protocol regulation between master controller and the slave controller is as follows:
(a) master controller and slave controller are half-duplex operation;
(b) master controller only sends order and triggers two kinds of signals to slave controller, and sending command signal is to set the mode of operation of slave controller, sends trigger pip and is the notice slave controller and remove to control multichannel analog to digital converter and carry out analog to digital conversion;
(c) slave controller receives only order and the trigger pip that master controller sends, slave controller is after receiving command signal, slave controller is provided with internal work pattern (diagnostic work pattern according to the order that receives, normal mode of operation), again this order is sent back to master controller, if slave controller is to receive trigger pip under the diagnostic work pattern, the diagnostic data that it can configure inside is issued master controller, if slave controller is to receive trigger pip under normal mode of operation, slave controller will be controlled analog to digital converter and carry out analog to digital conversion, and the data after will changing are issued master controller;
(d) master controller can receive the order of beaming back from slave controller after sending command signal, and carries out verification, and master controller can receive the multichannel data after diagnostic data or the actual analog to digital conversion after sending trigger pip;
(e) master controller transmission baud rate equates with slave controller reception baud rate, and master controller receives baud rate and equates with the baud rate that slave controller sends; The reception baud rate is 125kbps, and described transmission baud rate is 500kbps
Another technical matters that the present invention need solve is to provide a kind of serial data transmission control method of many acquisition channels.
Appropriate technical solution may further comprise the steps:
(a) after hardware powered on, master controller, slave controller carried out initialization, and master controller is in the wait transmit status, and slave controller is in the wait accepting state;
(b) master controller sends command signal (it is the diagnostic work pattern that slave controller is set), and after sending, master controller is in the state that receives return command of waiting for;
(c) slave controller receives command signal, is set to the diagnostic work pattern according to command signal;
(d) slave controller sends back to master controller with the command signal that receives, and enters the wait accepting state;
(e) master controller receives the command signal of returning, and the command signal that receives is carried out verification, if check errors then carries out error handling processing, verification is correct, and master controller is prepared to continue to send;
(f) master controller sends trigger pip, enters the wait accepting state;
(g) slave controller receives trigger pip under the diagnostic work pattern, and the built in diagnostics data are issued master controller, and slave controller enters the wait accepting state;
(h) master controller receives diagnostic data, and diagnostic data is carried out verification,, if verification is correct, master controller is prepared to continue to send;
(i) master controller sends command signal (it is normal mode of operation that slave controller is set), and after sending, master controller is in the state that receives return command of waiting for;
(j) slave controller receives command signal, is set to normal mode of operation according to command signal;
(k) slave controller sends back to master controller with the command signal that receives, and enters the wait accepting state;
(l) master controller receives the command signal of returning, and the command signal that receives is carried out verification, if check errors then carries out error handling processing, verification is correct, and master controller is prepared to continue to send;
(m) master controller sends trigger pip, enters the wait accepting state;
(n) slave controller receives trigger pip under normal mode of operation, will control multichannel analog to digital converter simultaneously and carry out analog to digital conversion;
(o) multi-channel data of slave controller after with analog to digital conversion issued master controller;
(p) master controller receives multichannel data, and data are carried out verification, if check errors then carries out error handling processing, if verification is correct, master controller is prepared to continue to send;
(q) repeating step (m) is to step (p), and promptly master controller sends out a trigger pip and gives slave controller, can receive the data of the acquisition channel more than a group that is sent by slave controller.
The invention has the beneficial effects as follows, compared with prior art, because data collecting card can be main hardware configuration with slave controller and a plurality of analog to digital converter, alleviated the complicacy of data collecting card hardware, the number of analog to digital converter can increase, and is beneficial to later expansion, in addition, data collecting card can be placed near the sensor, has strengthened the raising of signals collecting precision.And master controller is connected with slave controller by string line, and layout just can be considered according to the complete machine whole removing in position of integrated circuit board under it.
Description of drawings
Fig. 1 is a hardware configuration synoptic diagram of the present invention;
Fig. 2 is the master controller workflow diagram;
Fig. 3 is the slave controller workflow diagram.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is elaborated.
As shown in Figure 1, the serial data transmission system of many acquisition channels comprises a plurality of analog to digital converters, master controller, and slave controller, simulating signal at first enters a plurality of analog to digital converters and each analog to digital converter in a plurality of analog to digital converter passes to slave controller by its serial output interface with data, and slave controller is by the conversion of control line control analog to digital converter.Slave controller is connected with the master controller bidirectional linked list.
Below in conjunction with Fig. 2, Fig. 3 many acquisition channels serial data transmission system of the present invention and the application of control method in litho machine coaxial alignment process are described.
Need to obtain two class data messages in the coaxial alignment process of litho machine, a class is the positional information of work stage, another kind of intensity signal, and positional information is corresponding one by one with the light intensity letter.After work stage is finished the single pass motion, to obtain positional information and with positional information intensity signal one to one, by this two category information is carried out data processing and match computing, in the time of can calculating the light intensity maximum, pairing positional information, promptly find alignment point, finished the coaxial alignment process.
Because coaxillay aligned data processing and The Fitting Calculation unit are in the aligning cabinet of a special use, the sensor that the multichannel light intensity signal changes into electric signal then is distributed on the work stage, it is far away to aim at cabinet and sensor distance, if analog to digital converter is placed in the aligning cabinet, electric signal after the sensor conversion is aimed in the cabinet through directly being linked into after amplifying again, carry out analog to digital conversion again, make the Path too long of simulating signal process, signal decay itself, also increase simultaneously the annoyance level of outer bound pair simulating signal, reduced the signals collecting precision.When increasing several sensors again, also to increase sensor accordingly to the line number of aiming at cabinet, be unfavorable for the expansion of hardware.
According to the present invention, at first, hardware powers on, and master controller, slave controller will carry out initialization, and this moment, master controller was in the wait transmit status, and slave controller is in the wait accepting state;
It is the diagnostic work pattern so that slave controller to be set that master controller sends command signal, and after sending, master controller promptly is in the state that receives return command of waiting for;
Slave controller receives command signal, both can be set to the diagnostic work pattern according to command signal;
Slave controller sends back to master controller with the command signal postscript that receives then, oneself enters the wait accepting state;
After receiving the command signal of returning when master controller, and then will carry out verification to the command signal that receives, if check errors then carries out error handling processing, if verification is correct, master controller is prepared to continue to send;
In this step, what master controller sent is trigger pip, and enters the wait accepting state;
And slave controller receives trigger pip under the diagnostic work pattern, just the built in diagnostics data is issued master controller, oneself enters the wait accepting state;
Master controller can carry out verification to diagnostic data after receiving the diagnostic data of slave controller transmission, if check errors then carries out error handling processing, if verification is correct, master controller is then prepared to continue to send;
It is normal mode of operation so that slave controller to be set that master controller sends command signal, and after sending, master controller is in the state that receives return command of waiting for;
Slave controller receives and makes signal, is set to normal mode of operation according to command signal;
Slave controller sends back to master controller with the command signal that receives, and enters the wait accepting state;
Master controller receives the command signal of returning, and the command signal that receives is carried out verification, if check errors then carries out error handling processing, if verification is correct, master controller is prepared to continue to send;
Master controller sends trigger pip, enters the wait accepting state;
Slave controller receives trigger pip under normal mode of operation, will control multichannel analog to digital converter simultaneously and carry out analog to digital conversion;
The multi-channel data of slave controller after with analog to digital conversion issued master controller;
Master controller receives multichannel data, and data are carried out verification, if check errors then carries out error handling processing, if verification is correct, master controller is prepared to continue to send;
Repeat " master controller sends trigger pip; enter and wait for accepting state " step to " master controller receives multichannel data; data are carried out verification; if verification is correct; master controller is prepared to continue to send " step, be that master controller sends out a trigger pip to slave controller, can receive the data of the acquisition channel more than a group that sends by slave controller.
After master controller obtains serial data, can offer data processing and the match unit of aiming at cabinet inside again and use, carry out the calculating of alignment point, finish the coaxial alignment process at last.
Though disclose the preferred embodiments of the present invention, those skilled in the art will appreciate that under the situation that does not deviate from disclosed scope of the present invention in claims any various modifications, interpolation and replacement all belong to protection scope of the present invention.
Claims (8)
1. the serial data transmission system of acquisition channel more than a kind is characterized in that comprising:
A plurality of analog to digital converters carry out analog to digital conversion to multiple signals;
Master controller, send order to slave controller, receive serial data and slave controller that slave controller sends, receive the order of master controller, remove to control a plurality of analog to digital converters and carry out analog to digital conversion, obtain the digital signal after the conversion, and the mode of the data serial of many acquisition channels is issued master controller;
A plurality of analog to digital converters are connected with control line by serial data line with slave controller, and slave controller is connected by the bidirectional linked list line with master controller.
2. serial data transmission system as claimed in claim 1 is characterized in that: described master controller and slave controller are half-duplex operation.
3. serial data transmission system as claimed in claim 1 is characterized in that: master controller only sends order and triggers two kinds of signals to slave controller.
4. serial data transmission system as claimed in claim 1 is characterized in that: master controller sends baud rate and equates with slave controller reception baud rate, and master controller receives baud rate and equates with the baud rate that slave controller sends.
5. serial data transmission system as claimed in claim 4 is characterized in that: described reception baud rate is 125kbps, and described transmission baud rate is 500kbps.
6. the serial data transmission control method of acquisition channel more than a kind is characterized in that may further comprise the steps:
(a) the serial data transmission system hardware of many acquisition channels powers on, and master controller, slave controller carry out initialization, and master controller is in the wait transmit status, and slave controller is in the wait accepting state;
(b) master controller sends command signal, and it is the diagnostic work pattern that slave controller is set, and after sending, master controller is in the state that receives return command of waiting for;
(c) slave controller receives command signal, is set to the diagnostic work pattern according to command signal;
(d) slave controller sends back to master controller with the command signal that receives, and enters the wait accepting state;
(e) master controller receives the command signal of returning, and the command signal that receives is carried out verification, if check errors then carries out error handling processing, if verification is correct, master controller is prepared to continue to send;
(f) master controller sends trigger pip, enters the wait accepting state;
(g) slave controller receives trigger pip under the diagnostic work pattern, and the built in diagnostics data are issued master controller, and slave controller enters the wait accepting state;
(h) master controller receives diagnostic data, and diagnostic data is carried out verification, if check errors then carries out error handling processing, if verification is correct, master controller is prepared to continue to send;
(i) master controller sends command signal, and it is normal mode of operation that slave controller is set, and after sending, master controller is in the state that receives return command of waiting for;
(j) slave controller receives command signal, is set to normal mode of operation according to command signal;
(k) slave controller sends back to master controller with the command signal that receives, and enters the wait accepting state;
(l) master controller receives the command signal of returning, and the command signal that receives is carried out verification, if check errors then carries out error handling processing, if verification is correct, master controller is prepared to continue to send;
(m) master controller sends trigger pip, enters the wait accepting state;
(n) slave controller receives trigger pip under normal mode of operation, will control multichannel analog to digital converter simultaneously and carry out analog to digital conversion;
(o) multi-channel data of slave controller after with analog to digital conversion issued master controller;
(p) master controller receives multichannel data, and data are carried out verification, if check errors then carries out error handling processing, if verification is correct, master controller is prepared to continue to send;
(q) repeating step (m) is to step (p), and promptly master controller sends out a trigger pip and gives slave controller, can receive the data of the acquisition channel more than a group that is sent by slave controller.
7. serial data transmission control method as claimed in claim 6 is characterized in that master controller sends baud rate and equates that with slave controller reception baud rate master controller receives baud rate and equates with the baud rate that slave controller sends.
8. serial data transmission control method as claimed in claim 7 is characterized in that described reception baud rate is 125kbps, and described transmission baud rate is 500kbps.
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| CN 200610023681 CN1808284A (en) | 2006-01-26 | 2006-01-26 | Serial data transmission system with multiple acquisition channels and control method thereof |
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| CN 200610023681 CN1808284A (en) | 2006-01-26 | 2006-01-26 | Serial data transmission system with multiple acquisition channels and control method thereof |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010060256A1 (en) * | 2008-11-25 | 2010-06-03 | 上海神曦太阳能科技有限公司 | Method for digital signal transmission between solar acquisition array controllers |
| CN101105691B (en) * | 2007-05-23 | 2010-12-01 | 深圳市合信自动化技术有限公司 | Input and output enlargement module and programmable controller system |
| CN101645054B (en) * | 2009-08-25 | 2011-07-13 | 中兴通讯股份有限公司 | Data acquisition card, extension control system and method thereof |
| CN102866639A (en) * | 2011-06-24 | 2013-01-09 | 特科－西屋发动机公司 | Providing multiple communication protocols for a control system |
| CN104079893A (en) * | 2014-07-21 | 2014-10-01 | 北京剑邦科技有限公司 | Multichannel image capture and storage system |
| CN105843195A (en) * | 2016-05-24 | 2016-08-10 | 中国科学院长春光学精密机械与物理研究所 | Power-on control system for multiple controllers |
| CN108446243A (en) * | 2018-03-20 | 2018-08-24 | 上海奉天电子股份有限公司 | A kind of two-way communication and system based on Serial Peripheral Interface (SPI) |
| CN110967943A (en) * | 2019-11-28 | 2020-04-07 | 中国科学院微电子研究所 | Photoelectric detector for focus-adjusting and leveling system of photoetching machine and use method thereof |
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2006
- 2006-01-26 CN CN 200610023681 patent/CN1808284A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101105691B (en) * | 2007-05-23 | 2010-12-01 | 深圳市合信自动化技术有限公司 | Input and output enlargement module and programmable controller system |
| WO2010060256A1 (en) * | 2008-11-25 | 2010-06-03 | 上海神曦太阳能科技有限公司 | Method for digital signal transmission between solar acquisition array controllers |
| CN101645054B (en) * | 2009-08-25 | 2011-07-13 | 中兴通讯股份有限公司 | Data acquisition card, extension control system and method thereof |
| CN102866639A (en) * | 2011-06-24 | 2013-01-09 | 特科－西屋发动机公司 | Providing multiple communication protocols for a control system |
| CN102866639B (en) * | 2011-06-24 | 2017-07-18 | 特科－西屋发动机公司 | A kind of control system that multiple communication protocols are provided |
| CN104079893A (en) * | 2014-07-21 | 2014-10-01 | 北京剑邦科技有限公司 | Multichannel image capture and storage system |
| CN105843195A (en) * | 2016-05-24 | 2016-08-10 | 中国科学院长春光学精密机械与物理研究所 | Power-on control system for multiple controllers |
| CN105843195B (en) * | 2016-05-24 | 2019-02-01 | 中国科学院长春光学精密机械与物理研究所 | The upper electric control system of multi-controller |
| CN108446243A (en) * | 2018-03-20 | 2018-08-24 | 上海奉天电子股份有限公司 | A kind of two-way communication and system based on Serial Peripheral Interface (SPI) |
| CN110967943A (en) * | 2019-11-28 | 2020-04-07 | 中国科学院微电子研究所 | Photoelectric detector for focus-adjusting and leveling system of photoetching machine and use method thereof |
| CN110967943B (en) * | 2019-11-28 | 2022-02-08 | 中国科学院微电子研究所 | Photoelectric detector for focus-adjusting and leveling system of photoetching machine and use method thereof |
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Owner name: SHANGHAI MICROELECTRONIC EQUIPMENT CO., LTD.; APP Free format text: FORMER OWNER: SHANGHAI MICROELECTRONIC EQUIPMENT CO., LTD. Effective date: 20070727 |
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Effective date of registration: 20070727 Address after: 201203 Zhangjiang East Road, Zhangjiang hi tech park, Shanghai, No. 1525 Applicant after: Shanghai Micro Electronics Equipment Co., Ltd. Co-applicant after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Address before: 201203 Zhangjiang East Road, Zhangjiang hi tech park, Shanghai, No. 1525 Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. |
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Open date: 20060726 |