CN1801612A - Lamb-wave high-frequency resonator - Google Patents
Lamb-wave high-frequency resonator Download PDFInfo
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- CN1801612A CN1801612A CN200610000366.4A CN200610000366A CN1801612A CN 1801612 A CN1801612 A CN 1801612A CN 200610000366 A CN200610000366 A CN 200610000366A CN 1801612 A CN1801612 A CN 1801612A
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- 239000010453 quartz Substances 0.000 claims abstract description 62
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 62
- 235000019687 Lamb Nutrition 0.000 claims abstract description 40
- 230000014509 gene expression Effects 0.000 claims description 75
- 239000000758 substrate Substances 0.000 abstract description 24
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000008878 coupling Effects 0.000 description 50
- 238000010168 coupling process Methods 0.000 description 50
- 238000005859 coupling reaction Methods 0.000 description 50
- 238000010606 normalization Methods 0.000 description 16
- 238000010897 surface acoustic wave method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 230000000644 propagated effect Effects 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001869 rapid Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Abstract
To provide a Lamb-wave high-frequency resonator which obtains high frequency waves, has excellent frequency temperature characteristics and can reduce its manufacturing cost.The Lamb-wave high-frequency resonator 1 includes an interdigital IDT electrode 20 for exciting a Lamb wave on one main surface of a quartz substrate 10, the IDT electrode 20 is formed such that the cut angle of the quartz substrate 10 and the direction of propagation of the Lamb wave are expressed in Euler angles (0, [theta], 0), relation between thickness t of the quartz substrate 10 and the wavelength [lambda] is set within a range to be expressed as 0<t/[lambda]<=3, six regions are set in the range and in the first range among them, an angle [theta] is set within a range of 132.8[deg.]<=[theta]<=178[deg.] and t/[lambda] is set within a range of 1.1<=t/[lambda]<=3.
Description
Technical field
The present invention relates to a kind of Lamb wave (lamb wave) type high-frequency reonsator, the quartz base plate of (0, θ, the 0) expression that is specifically related to have the Eulerian angles utilized and the direction of propagation and the lamb-wave high-frequency resonator that constitutes by the IDT electrode.
Background technology
In the past, as high-frequency reonsator, with the surface acoustic wave element that uses R wave (Rayleigh wave), SH ripple with use the lamb wave type resonator of Lamb wave (Lamb wave) to be representative.As their substrate, adopt the ST cutting quartz of R wave, the STW cutting quartz of SH ripple, in addition as the high-frequency reonsator that has adopted Lamb wave, it is quartzy to adopt AT to cut.
For example, the surface being called as the quartzy quartz base plate of ST cutting is formed with the Rayleigh wave mode surface acoustic wave element of IDT (interdigital transducer) electrode by known (for example, with reference to non-patent literature 1) at Z ' direction of principal axis.
And as SH wave mode surface acoustic wave element, propagating the direction of propagation that makes surface acoustic wave is that the quartzy surface acoustic wave element of 90 shear waves of spending that has been offset of ST cutting is also by known (for example, with reference to patent documentation 1) with respect to STW cutting quartz.
In addition, following lamb-wave high-frequency resonator also by known (for example, with reference to non-patent literature 2 and patent documentation 2): form the IDT electrode on the surface of AT cutting quartz base plate, in the bulk wave (Bulk wave) of quartz base plate internal communication uses resonator in the mode of the Lamb wave that the top and bottom of quartz base plate interreflection is propagated, the thickness H of this quartz base plate and the wavelength X of Lamb wave utilize 0＜2H/ λ≤10 to represent.
[non-patent literature 1] letter is learned skill Reported TECHNIALCALREPORT OF IEICE.US99-20 (199-06) 37 pages～42 pages, " limited factors method The is resolved with い elastic surface wave cycle-temperature characterisitic ", the heavy man of tetragrammaton.
2004, the 93～96 pages of [non-patent literature 2] the 33rd time EM シ Application Port ジ ウ system, respectful man of virtue and ability in river in " ラ system wave mode elastic surface wave sub-prime substrate ", hundred rapids refined it, wall tail province department.
[patent documentation 1] Japanese patent laid-open 10-233645 communique (the 3rd～6 page, Fig. 1).
[patent documentation 2] Japan Patent spy opens the 2003-258596 communique.
According to this non-patent literature 1, in the scope of temperature range-40 ℃～90 ℃, the frequency temperature variation is about 140ppm, though shown good frequency-temperature characteristic as surface acoustic wave element, as requiring high-precision resonator then not talkative enough.And the theoretical value of phase velocity is about 3100m/s, is difficult to corresponding with high frequency band.
And according to patent documentation 1, this surface acoustic wave device is the end face reflection surface wave device that utilizes the SH ripple, and the frequency temperature variation is 254ppm in the scope of temperature range-40 ℃～90 ℃, and the well known frequencies temperature characterisitic is quartzy poorer than aforesaid ST cutting.And, use density than the big tantalum of aluminium or tungsten as electrode material, though improved frequency-temperature characteristic, it is big that resistance loss becomes, the problem that exists phase velocity to reduce in addition.
In addition, according to patent documentation 2, thickness by using quartz base plate is AT cutting quartz base plate below 5 wavelength with respect to the wavelength of elastic wave, make frequency-temperature characteristic good, be suitable for high frequencyization, but according to non-patent literature 2, it is quartzy identical with aforesaid ST cutting that the secondary temperature coefficient shows as, frequency-temperature characteristic under temperature range-40 ℃～90 ℃ is about 320ppm, is far from being that it is quartzy to be better than the ST cutting, can't say and satisfy requirement.
Summary of the invention
The objective of the invention is provides a kind of lamb-wave high-frequency resonator solving aforementioned problems as its aim, and it can realize high frequencyization, frequency-temperature characteristic is good and can reduce manufacturing cost.
Lamb-wave high-frequency resonator of the present invention, on an interarea of quartz base plate, has the broach shape IDT electrode that is used to encourage Lamb wave, it is characterized in that the direction of propagation that cuts out angle and described Lamb wave of described quartz base plate was (0, θ, 0) when described IDT electrode was formed and represents mode according to Eulerian angles.
According to the present invention, the Lamb wave that use is propagated at the top and bottom of quartz base plate interreflection, can realize high frequencyization, and form the direction of propagation of quartz base plate and Lamb wave with Eulerian angles (0, θ, 0), so cutting angle is simple, can easily make quartz base plate, reduce manufacturing cost.
And, in the present invention, preferably when the thickness of described quartz base plate being made as t, when the wavelength of described Lamb wave is made as λ, the relation of thickness t and wavelength X being set in the scope of utilizing 0＜t/ λ≤3 expressions.
Wherein, t/ λ is called as the normalization substrate thickness.
Concrete condition will illustrate in the execution mode of back, and the quartz base plate of Eulerian angles (0, θ, 0) has a plurality of vibration modes (mode).When the thickness of quartz base plate increases, the frequency band of these various patterns becomes approaching, thereby be easy to generate the pattern combination, but, normalization substrate thickness t/ λ is set at appropriate value smaller or equal to 3 herein, thereby be difficult for the combination of generation pattern, can select single-mode, it is stable and can the effect corresponding with high frequency to have frequency characteristic.
And preferably angle θ is set in the relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave in the scope of utilizing 1.1≤t/ λ≤3 expressions in utilizing the scope that 132.8 degree≤θ≤178 kilsyth basalts show.
And preferably described angle θ is set in the relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave in the scope of utilizing 2.08≤t/ λ≤2.82 expressions in utilizing the scope that 4 degree≤θ≤57.5 kilsyth basalts show.
And preferably described angle θ is set in the relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave in the scope of utilizing 0.975≤t/ λ≤2.025 expressions in utilizing the scope that 6 degree≤θ≤33 kilsyth basalts show.
And preferably described angle θ is set in the relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave in the scope of utilizing 0.176≤t/ λ≤1.925 expressions in utilizing the scope that 35 degree≤θ≤47.2 kilsyth basalts show.
And preferably described angle θ is set in the relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave in the scope of utilizing 2.878≤t/ λ≤3 expressions in utilizing the scope that 2.7 degree≤θ≤16 kilsyth basalts show.
And preferably described angle θ is set in the relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave in the scope of utilizing 0.375≤t/ λ≤1.06 expressions in utilizing the scope that 116 degree≤θ≤122.1 kilsyth basalts show.
Concrete condition will illustrate in the execution mode of back, according to quartz base plate cut out angle and elasticity direction of wave travel, be the stability of angle θ, substrate thickness t in the Eulerian angles (0, θ, 0) and the wavelength X frequency-temperature characteristic that restricts lamb-wave high-frequency resonator, frequency band, excitation.Satisfy aforesaid relational expression by making them, can realize being better than quartzy, the quartzy frequency-temperature characteristic of ST cutting of STW cutting of aforesaid prior art, can be corresponding to high frequency band, and can improve the electromechanical coupling factor (K of the launching efficiency of expression quartz base plate
2), so the lamb-wave high-frequency resonator that easy excitation can be provided, have stable frequency characteristics.
Description of drawings
Fig. 1 is the stereogram of the schematic configuration of the lamb-wave high-frequency resonator that relates to of expression embodiments of the present invention.
Fig. 2 is the profile along the A-A section of Fig. 1 of the lamb-wave high-frequency resonator that relates to of expression embodiments of the present invention.
Fig. 3 is the key diagram that cuts out the orientation of the quartz base plate that relates to of expression embodiments of the present invention.
Fig. 4 is the curve chart of a part of the relation of the expression normalization substrate thickness t/ λ that relates to of embodiments of the present invention and phase velocity.
Fig. 5 is a curve chart of representing phase velocity, angle θ that embodiments of the present invention relate to and the relation of standardizing substrate thickness t/ λ.
Fig. 6 is the curve chart of the relation of the expression temperature that relates to of embodiments of the present invention and frequency temperature deviation.
Fig. 7 is the key diagram in the zone that can realize of the lamb-wave high-frequency resonator that relates to of expression embodiments of the present invention.
Fig. 8 is the curve chart of the relation of the Eulerian angles in the 1st zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Fig. 9 is the curve chart of the relation of the t/ λ in the 1st zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 10 is the Eulerian angles and the electromechanical coupling factor K in the 1st zone that relates to of expression embodiments of the present invention
2The curve chart of relation.
Figure 11 is the t/ λ and the electromechanical coupling factor K in the 1st zone that relates to of expression embodiments of the present invention
2The curve chart of relation.
Figure 12 is the curve chart of the relation of the Eulerian angles in the 2nd zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 13 is the curve chart of the relation of the t/ λ in the 2nd zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 14 is the curve chart of the relation of the Eulerian angles in the 3rd zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 15 is the curve chart of the relation of the t/ λ in the 3rd zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 16 is the curve chart of the relation of the Eulerian angles in the 4th zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 17 is the curve chart of the relation of the t/ λ in the 4th zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 18 is the curve chart of the relation of the Eulerian angles in the 4th zone that relates to of expression embodiments of the present invention and phase velocity.
Figure 19 is the curve chart of the relation of the t/ λ in the 4th zone that relates to of expression embodiments of the present invention and phase velocity.
Figure 20 is the curve chart of relation of Eulerian angles, phase velocity and the frequency temperature variation in the 4th zone that relates to of expression embodiments of the present invention.
Figure 21 is Eulerian angles, the electromechanical coupling factor K in the 4th zone that relates to of expression embodiments of the present invention
2Curve chart with the relation of frequency temperature variation.
Figure 22 is the curve chart of relation of t/ λ, phase velocity and the frequency temperature variation in the 4th zone that relates to of expression embodiments of the present invention.
Figure 23 is t/ λ, the electromechanical coupling factor K in the 4th zone that relates to of expression embodiments of the present invention
2Curve chart with the relation of frequency temperature variation.
Figure 24 is the curve chart of the relation of the Eulerian angles in the 5th zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 25 is the curve chart of the relation of the t/ λ in the 5th zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 26 is the curve chart of the relation of the Eulerian angles in the 6th zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 27 is the curve chart of the relation of the t/ λ in the 6th zone that relates to of expression embodiments of the present invention and frequency temperature variation.
Figure 28 is the curve chart of relation of Eulerian angles, t/ λ and the phase velocity in the 6th zone that relates to of expression embodiments of the present invention.
Figure 29 is the curve chart of relation of t/ λ, Eulerian angles and the phase velocity in the 6th zone that relates to of expression embodiments of the present invention.
Figure 30 is the curve chart of relation of Eulerian angles, phase velocity and the frequency temperature variation in the 6th zone that relates to of expression embodiments of the present invention.
Figure 31 is Eulerian angles, the electromechanical coupling factor K in the 6th zone that relates to of expression embodiments of the present invention
2Curve chart with the relation of frequency temperature variation.
Figure 32 is the curve chart of relation of t/ λ, phase velocity and the frequency temperature variation in the 6th zone that relates to of expression embodiments of the present invention.
Figure 33 is t/ λ, the electromechanical coupling factor K in the 6th zone that relates to of expression embodiments of the present invention
2Curve chart with the relation of frequency temperature variation.
Symbol description
1 lamb-wave high-frequency resonator; 10 quartz base plates; 20 IDT electrodes; 21 input IDT electrodes; 22 GND IDT electrodes; 25,26 reflectors.
Embodiment
Below, with reference to the description of drawings embodiments of the present invention.
Fig. 1～Fig. 3 represents the lamb-wave high-frequency resonator that embodiments of the present invention 1 relate to.Phase velocity and normalization substrate thickness t/ λ and Eulerian angles (0 have been shown among Fig. 4, Fig. 5, θ, 0) relation of the θ in has illustrated the relation of frequency temperature deviation and temperature among Fig. 6, Fig. 7 is the key diagram in the zone that can realize of expression lamb-wave high-frequency resonator of the present invention.In addition, Fig. 8～Figure 11 is the curve chart of the characteristic in its 1st zone of expression, Figure 12, the 13rd, the curve chart of the characteristic in expression the 2nd zone, Figure 14, the 15th, the curve chart of the characteristic in expression the 3rd zone, Figure 16～Figure 23 is the curve chart of the characteristic in expression the 4th zone, Figure 24, the 25th, the curve chart of the characteristic in expression the 5th zone, Figure 26～Figure 33 are the curve charts of the characteristic in expression the 6th zone.
(execution mode 1)
The lamb-wave high-frequency resonator of embodiments of the present invention has been shown among Fig. 1, Fig. 2.Fig. 1 is the stereogram of expression schematic configuration, and Fig. 2 is the profile of expression along the A-A section of Fig. 1.In Fig. 1, Fig. 2, this lamb-wave high-frequency resonator 1 is made of quartz base plate 10, the IDT electrode 20 that is formed at the broach shape on the interarea of quartz base plate 10.
The direction of propagation that cuts out angle and Lamb wave on the surface of quartz base plate 10 is set in the scope of utilizing Eulerian angles (0, θ, 0) expression.About the thickness t of this quartz base plate 10, when the wavelength of the Lamb wave of being propagated was made as λ, normalization substrate thickness t/ λ was set in the scope of utilizing 0＜t/ λ≤3 expressions.
The IDT electrode 20 of broach shape is made of the aluminium electrode, on the surface of quartz base plate 10, forms, constitutes reflector 25, input IDT electrode 21 and GND (ground connection) IDT electrode 22, reflector 26 successively in the X-direction of quartz base plate.
Input IDT electrode 21 and GND IDT electrode 22 form mutual insertion electrode and refer to sheet, for example form electrode and refer to that the width of sheet is that λ/4, electrode refer to that the width between sheet is λ/4.Therefore, when with input IDT electrode 21 being example when describing, utilize λ to set electrode and refer to that sheet 21A and electrode refer to the spacing of sheet 21B.The electrode of reflector 25,26 refers to that sheet also sets according to identical relation.
By be input to the drive signal of input IDT electrode 21 with assigned frequency, quartz base plate 10 is energized, and this elastic wave that is energized is towards the X-direction of quartz base plate 10, in the face internal reflection at the positive back side of quartz base plate 10 on one side propagate on one side.The elastic wave of propagating is like this called Lamb wave.And this Lamb wave is reflected by reflector 25,26.Therefore, the electrode of the outer end of input IDT electrode 21 refer to sheet (left end among the figure) and reflector 25 distance, and the electrode of the outer end of input IDT electrode 21 refer to that the sheet (right-hand member among the figure) and the interval of reflector 26 are set to (1/2) n λ (n is an integer), be set so that reflected wave is consistent with the drive signal phase place with the frequency of stipulating.
Fig. 3 shows the orientation that cuts out of quartz base plate 10.Quartz base plate 10 be by the X-axis that is called as the electricity axle, be called as mechanical axis Y-axis, be called as the thin plate that the face of the Z axle of optic axis constitutes, the orientation that cuts out of the quartz base plate 10 in the present embodiment is to make the rotary Y cutting of the lucky anglec of rotation θ arrival of the Z axle Z ' of thickness direction cut quartz, cut out and make that length direction is an X-axis in the drawings, Width is Y ', and thickness direction is Z '.
Below, the theoretical value of the major parameter that relates to for present embodiment utilizes the relation of curve representation and each autocorrelative key element to describe.
Fig. 4 is the curve chart of a part of the relation of expression normalization substrate thickness t/ λ and phase velocity.In Fig. 4, transverse axis is represented t/ λ, and the longitudinal axis is represented phase velocity (m/s).Herein, example the lamb-wave high-frequency resonator of Eulerian angles (0,140,0).According to Fig. 4, show and have a plurality of patterns in this lamb-wave high-frequency resonator, along with normalization substrate thickness t/ λ becomes big, phase velocity under each pattern is collected in the scope of phase velocity 3000 (m/s)～6000 (m/s), and is particularly intensive in the scope of 5000 (m/s)～6000 (m/s).
Under the intensive situation of such pattern, be easy to generate the pattern combination, think can not obtain desired pattern or phase velocity changes easily.Therefore, by being set at t/ λ≤3, can avoid the scope that is easy to generate the pattern combination.
And, according to this curve chart, show the high more trend of the more little then phase velocity of t/ λ, in t/ λ≤3 o'clock, having more phase velocity is the above patterns of 6000 (m/s).Because phase velocity utilizes amassing of frequency and wavelength to represent, can be corresponding to the situation of high frequency so show this lamb-wave high-frequency resonator.
Below, the relation of phase velocity and Eulerian angles (0, θ, 0) is described.
Fig. 5 is the curve chart of the relation of expression phase velocity, angle θ and normalization substrate thickness t/ λ.In Fig. 5, transverse axis is represented angle θ, and the longitudinal axis is represented phase velocity., normalization substrate thickness t/ λ is set at 7 kinds of t/ λ between 0.5～4 herein, shows the theoretical value of the phase velocity of each t/ λ.
Show following trend according to Fig. 5, that is: in the value of t/ λ less than 0.8 o'clock, along with angle θ becomes big, phase velocity uprises, at t/ λ greater than 1.2 o'clock, along with angle θ becomes big, the phase velocity step-down.
But, no matter be which normalization substrate thickness, when Eulerian angles (0, θ, 0) are being utilized in the scope of the represented angle θ of curve, can obtain than the high phase velocity of phase velocity 5000m/s that is regarded as boundary in the STW type, in addition, smaller or equal to 0.8 o'clock, can obtain to be regarded as the above phase velocity of 7000m/s of high-frequency region at t/ λ.
Below, with reference to the frequency-temperature characteristic of the lamb-wave high-frequency resonator of description of drawings present embodiment.
Fig. 6 is the curve chart of the relation of expression temperature and resonance frequency.In Fig. 6, transverse axis is represented temperature (unit: ℃), and the frequency the when longitudinal axis represents that temperature is 25 ℃ is as the frequency temperature deviation (unit: ppm) under the situation of centre frequency.The lamb-wave high-frequency resonator that compares θ=140 degree of present embodiment, aforesaid prior art by ST cutting quartzy (simply being expressed as the ST type later on), and STW cutting quartzy (simply being expressed as the STW type later on) R wave, the SH type surface acoustic wave element that constitute and the frequency temperature deviation of lamb wave type resonator in-40 ℃～90 ℃ scopes that constitutes by AT cutting quartzy (simply being expressed as the AT type later on).
According to Fig. 6, in-40 ℃～90 ℃ temperature range, the frequency temperature variation of the lamb-wave high-frequency resonator of present embodiment (among the figure, Lamb wave (θ=140 °)) is 30ppm, is minimum, has shown good frequency-temperature characteristic.In the lamb-wave high-frequency resonator 1 of ST type, STW type, present embodiment, the highest position (summit temperature) of frequency on the conic section of the variation of expression frequency temperature deviation is positioned near 20 ℃ of the normal temperatures under the actual environment for use, and in the AT type (among the figure, be Lamb wave (AT cutting)) in then be positioned near-25 ℃, except the frequency temperature variation is big, can also predict that it is difficult to use.
The frequency temperature deviation, the phase velocity (frequency band) that cut out the lamb-wave high-frequency resonator 1 that angle θ, substrate thickness t in angle and the Eulerian angles (0, θ, 0) and wavelength X restrict present embodiment according to quartz base plate.Show the zone in the zone of phase velocity that obtaining of calculating in theory should realize in the present invention, frequency-temperature characteristic herein.
Fig. 7 is the key diagram that expression has the zone of the characteristic that lamb-wave high-frequency resonator of the present invention can realize.Transverse axis is represented Eulerian angles, the longitudinal axis is represented t/ λ, can obtain the characteristic that can be achieved as follows a plurality of zones (the 1st～the 6th zone) as the characteristic that should realize among the present invention, that is: phase velocity is 5000m/s, more than-40 ℃～frequency temperature variation in the scope below+90 ℃ is quartzy littler and less than 250ppm than the STW cutting, and the electromechanical coupling factor (K of the launching efficiency of expression quartz base plate
2) more than or equal to 0.02%.
In the scope that the value of Eulerian angles or t/ λ is close, there is different zones herein.For example, the 2nd zone, the 3rd zone, the 4th zone, the 5th zone that has Fig. 7 to represent.Measurable to the zone that has the combination that is easy to generate vibration mode at these regional boundaries, the 2nd zone～the 5th zone is independent respectively to be existed.
Below, with reference to each above-mentioned zone of description of drawings.
Fig. 8 is the curve chart of the relation of the angle θ in the frequency temperature variation of lamb-wave high-frequency resonator 1 in expression the 1st zone and the Eulerian angles (0, θ, 0).On this curve chart, with the situation illustration of t/ λ=2.2 present embodiment.In Fig. 8, transverse axis is represented angle θ, and the longitudinal axis is represented the frequency temperature variation.On this curve chart, in order relatively to show the frequency temperature variation of ST type, STW type, the frequency temperature variation of ST type is about 140ppm, and the STW type is about 254ppm, may not can be described as the level that meets the demands.
In the 1st zone, the frequency temperature variation changes because of angle θ, in order to make it less than the STW type, as long as be set in the scope of 132.8 degree≤θ≤178 degree, in order to make it, as long as be set in the scope of 133.5 degree≤θ≤177.5 degree less than the ST type.
Below, the relation of the thickness of frequency temperature variation in-40 ℃～90 ℃ scopes and quartz base plate is described.As previously described, the thickness of quartz base plate is subjected to the restriction with the relation of the frequency of Lamb wave, so be expressed as normalization substrate thickness t/ λ.
Fig. 9 is the curve chart of the relation of the frequency temperature variation of lamb-wave high-frequency resonator in expression the 1st zone and normalization substrate thickness t/ λ (after, be expressed as t/ λ sometimes briefly).In this curve chart, with the situation illustration of angle θ=140 degree present embodiment.In Fig. 9, transverse axis is represented t/ λ, and the longitudinal axis is represented the frequency temperature variation.
The frequency temperature variation changes because of t/ λ, in the 1st zone, in order to make it less than the STW type, as long as be set in the scope of 1.1≤t/ λ≤3, in order to make it less than the ST type, as long as be set in the scope of 1.1≤t/ λ≤2.9.
Below, the electromechanical coupling factor K of the lamb-wave high-frequency resonator of present embodiment is described
2Relation with angle θ, t/ λ.
Figure 10 is expression electromechanical coupling factor K
2And the curve chart of the relation of the angle θ in the Eulerian angles (0, θ, 0).In Figure 10, transverse axis is represented Eulerian angles (0, θ, 0), and the longitudinal axis is represented electromechanical coupling factor K
2(unit: %).When t/ λ is 1～3 scope, set the value of 7 kinds of t/ λ, the electromechanical coupling factor K when all thickness is shown herein,
2Theoretical value.
In addition, the phase velocity of establishing when the quartz base plate surface opened a way on electricity is Vf, and establishing quartz base plate surface phase velocity during short circuit on electricity is Vs, electromechanical coupling factor K
2Be represented as K
2=2 (Vf-Vs)/Vf, K
2The big more easy more excitation of value, this is well-known.
According to Figure 10, at first show the thin more then electromechanical coupling factor of the thickness t K of quartz base plate
2Big more situation.And, also show the electromechanical coupling factor K that diminishes along with angle θ
2Become big trend.Herein, with reference to the relation (with reference to Fig. 8) of aforesaid angle θ and frequency temperature variation, be in the scopes of 130 degree～180 degree, in the value of each the t/ λ that sets in the scope of angle θ, existence can obtain the point of following angle θ, and this angle θ makes electromechanical coupling factor K
2Can obtain value more than or equal to 0.02%.At electromechanical coupling factor K
2More than or equal to 0.02% o'clock, the lamb-wave high-frequency resonator of present embodiment can obtain sufficient drive characteristic.
Below, the electromechanical coupling factor K of the lamb-wave high-frequency resonator of present embodiment is described
2Relation with normalization substrate thickness t/ λ.
Figure 11 is expression electromechanical coupling factor K
2Curve chart with the relation of t/ λ.In Figure 11, transverse axis is represented t/ λ, and the longitudinal axis is represented electromechanical coupling factor K
2(unit: %)., set 6 kinds of angles that angle θ is cut apart according to per 10 degree herein in the scope of 130 degree～180 degree, show the electromechanical coupling factor K of all angles θ
2Theoretical value.
According to Figure 11, at first show the more little electromechanical coupling factor K of angle θ
2Big more trend.And, also show the electromechanical coupling factor K that diminishes along with t/ λ
2Become big trend.Herein, relation (with reference to Fig. 9) with reference to aforesaid t/ λ and frequency temperature variation, the scope that roughly is better than the STW type at the scope setpoint frequency temperature change amount of t/ λ i.e. the scope of 1.1≤t/ λ≤3, show in this scope, and in angle θ is the scope of 130 degree～180 degree, there is electromechanical coupling factor K
2Point more than or equal to 0.02.
Below, the 2nd zone is described.
Figure 12, Figure 13 are the curve charts of the relation of the relation of the angle θ in the expression frequency temperature variation in the 2nd zone and the Eulerian angles (0, θ, 0) and frequency temperature variation and t/ λ.Herein, the scope that frequency-temperature characteristic is better than the θ in the Eulerian angles (0, θ, 0) of STW cutting quartzy (the frequency temperature variation is little) is that 4 degree≤θ≤57.5 are spent, and the scope of t/ λ is 2.08≤t/ λ≤2.82.
Below, the 3rd zone is described.
Figure 14, Figure 15 are the curve charts of the relation of the relation of the angle θ in the expression frequency temperature variation in the 3rd zone and the Eulerian angles (0, θ, 0) and frequency temperature variation and t/ λ.In the 3rd zone, the scope that frequency-temperature characteristic is better than the quartzy θ of STW cutting is 6 degree≤θ≤33 degree, and the scope of t/ λ is 0.975≤t/ λ≤2.025.
Though omitted diagram and detailed description, in the 2nd zone and the 3rd zone, in the scope of above-mentioned Eulerian angles and t/ λ, also exist phase velocity herein, more than or equal to 5000m/s, electromechanical coupling factor K
2Point more than or equal to 0.02.
Below, with reference to Figure 16～Figure 23 the 4th zone is described.
Figure 16, Figure 17 are the curve charts of the relation of the relation of the angle θ in the expression frequency temperature variation in the 4th zone and the Eulerian angles (0, θ, 0) and frequency temperature variation and t/ λ.In the 4th zone, the scope that frequency-temperature characteristic is better than the quartzy angle θ of STW cutting is 35 degree≤θ≤47.2 degree, and the scope of t/ λ is 0.176≤t/ λ≤1.925.
In addition, describe angle θ in the 4th zone and t/ λ and phase velocity, frequency temperature variation, electromechanical coupling factor K in detail
2Relation separately.
Figure 18 represents the angle θ in the Eulerian angles (0, θ, 0) and the relation of phase velocity.T/ λ set for 6 grades in 0.2～2.0 the scope, the phase velocity when utilizing each t/ λ of graphical representation herein.According to Figure 18, under all situations except the situation of t/ λ=2.0, when each t/ λ, all can in being the scopes of 30 degree～50 degree, angle θ obtain the phase velocity more than the 5000m/s.
And Figure 19 represents the relation of t/ λ and phase velocity.Angle θ in the Eulerian angles (0, θ, 0) is set for 5 grades in the scopes of 30 degree～50 degree, the phase velocity when utilizing graphical representation all angles θ.According to Figure 19, the deviation of the phase velocity during all angles θ is all less, all can obtain the phase velocity more than the 5000m/s in t/ λ is most of scope of 0.2～2.
Below, Eulerian angles, t/ λ and phase velocity, frequency temperature variation, electromechanical coupling factor K are described
2Relation.
Figure 20 represents the relation of angle θ in the Eulerian angles (0, θ, 0) and phase velocity, frequency temperature variation.T/ λ is made as 1.7 herein.According to Figure 20, showing the frequency temperature variation is 35 degree≤θ≤47.2 degree (also with reference to Figure 16) less than the scope that STW cuts quartzy θ, can obtain the phase velocity more than the 5000m/s in this scope.
Figure 21 represents Eulerian angles and electromechanical coupling factor K
2, the frequency temperature variation relation.According to Figure 21, the frequency temperature variation is that (also with reference to Figure 16) spent in 35 degree≤θ≤47.2 less than the scope of the angle θ in the quartzy Eulerian angles of STW cutting (0, θ, 0), in this scope, and electromechanical coupling factor K
2Substantially exceed as 0.02 of benchmark.In the scope of angle θ is 32.5 degree≤θ≤47.2 when spending, electromechanical coupling factor K
2More than or equal to 0.03, be 34.2 degree≤θ≤47.2 when spending in the scope of angle θ, electromechanical coupling factor K
2More than or equal to 0.04, be 36 degree≤θ≤47.2 when spending in the scope of angle θ, electromechanical coupling factor K
2More than or equal to 0.05.
Figure 22 represents the relation of t/ λ and phase velocity, frequency temperature variation.According to Figure 22, the frequency temperature variation is 0.176≤t/ λ≤1.925 (also with reference to Figure 17) less than the scope of the quartzy t/ λ of STW cutting, can obtain the phase velocity more than the 5000m/s in the most of scope in this scope.In the scope of this t/ λ, the more little phase velocity of t/ λ is high more, can obtain high frequency band.
Below, t/ λ and electromechanical coupling factor K are described
2, the frequency temperature variation relation.
Figure 23 represents t/ λ and electromechanical coupling factor K
2, the frequency temperature variation relation.According to Figure 23, the frequency temperature variation is 0.176≤t/ λ≤1.925 (also with reference to Figure 17,22) less than the scope of the quartzy t/ λ of STW cutting, in the most of scope in this scope, and electromechanical coupling factor K
2Can obtain value more than or equal to 0.02.In this t/ λ approaches 1 scope, can obtain electromechanical coupling factor K
2High zone more than or equal to 0.05.
Below, with reference to Figure 24,25 explanations the 5th zone.
Figure 24, the 25th, the curve chart of the relation of the angle θ in expression frequency temperature variation in the 5th zone and the Eulerian angles (0, θ, 0) and the relation of frequency temperature variation and t/ λ.In the 5th zone, the scope that frequency-temperature characteristic is better than the quartzy angle θ of STW cutting is 2.7 degree≤θ≤16 degree, and the scope of t/ λ is 2.878≤t/ λ≤3.
Below, with reference to Figure 26～Figure 33 the 6th zone is described.
Figure 26, the 27th, the curve chart of the relation of the angle θ in expression frequency temperature variation in the 6th zone and the Eulerian angles (0, θ, 0) and the relation of frequency temperature variation and t/ λ.In the 6th zone, the scope that frequency-temperature characteristic is better than the quartzy angle θ of STW cutting is 116 degree≤θ≤122.1 degree, and the scope of t/ λ is 0.375≤t/ λ≤1.06.
In addition, describe angle θ in the 6th zone and t/ λ and phase velocity, frequency temperature variation, electromechanical coupling factor K in detail
2Relation separately.
Figure 28 represents the angle θ in the Eulerian angles (0, θ, 0) and the relation of phase velocity., t/ λ is set for 5 grades herein in 0.2～1.2 scope, the phase velocity when utilizing each t/ λ of graphical representation.According to Figure 28, when each t/ λ, all can in being the scopes of 110 degree～130 degree, angle θ obtain the phase velocity more than the 5000m/s.
And Figure 29 represents the relation of t/ λ and phase velocity.The angle θ of Eulerian angles is set for 5 grades, the phase velocity when utilizing graphical representation all angles θ in the scope of 110 degree～130 degree.According to Figure 29, the deviation of the phase velocity during all angles θ is all less, can obtain the phase velocity more than the 5000m/s in t/ λ is 0.2～1.2 scope.T/ λ less than 0.4 zone in, can obtain high phase velocity.
Below, Eulerian angles and t/ λ and phase velocity, frequency temperature variation, electromechanical coupling factor K are described
2Relation.
Figure 30 represents the relation of angle θ in the Eulerian angles (0, θ, 0) and phase velocity, frequency temperature variation.According to Figure 30, showing the frequency temperature variation is 116 degree≤θ≤122.1 degree (also with reference to Figure 26) less than the scope that STW cuts quartzy angle θ, can obtain the phase velocity more than the 5000m/s in this scope.
Figure 31 represents Eulerian angles and electromechanical coupling factor K
2, the frequency temperature variation relation.According to Figure 31, the frequency temperature variation is that electromechanical coupling factor K in this scope is spent in 116 degree≤θ≤122.1 less than the scope of the angle θ in the quartzy Eulerian angles of STW cutting (0, θ, 0)
2More than or equal to 0.05, substantially exceed as 0.02 of benchmark, can be described as the zone of easy excitation.
Figure 32 represents the relation of t/ λ and phase velocity, frequency temperature variation.According to Figure 32, the frequency temperature variation is 0.375≤t/ λ≤1.06 (also with reference to Figure 17) less than the scope of the quartzy t/ λ of STW cutting, can obtain the phase velocity more than the 5000m/s in the most of scope in this scope.In the scope of this t/ λ, the more little phase velocity of t/ λ is high more, can obtain high frequency band.
Below, t/ λ and electromechanical coupling factor K are described
2, the frequency temperature variation relation.
Figure 33 represents t/ λ and electromechanical coupling factor K
2, the frequency temperature variation relation.According to Figure 33, the frequency temperature variation is 0.375≤t/ λ≤1.06 (also with reference to Figure 27) less than the scope of the quartzy t/ λ of STW cutting, and having in this scope can be at electromechanical coupling factor K
2Scope in obtain zone more than or equal to 0.02 value.In 0.62≤t/ λ≤1.06 o'clock, electromechanical coupling factor K
2More than or equal to 0.03, in 0.67≤t/ λ≤1.06 o'clock, electromechanical coupling factor K
2More than or equal to 0.04, in 0.71≤t/ λ≤1.06 o'clock, electromechanical coupling factor K
2More than or equal to 0.05.
Therefore,, as shown in Figure 4,, then be difficult for the combination of generation pattern, have the effect of the Lamb wave that can select stable phase velocity zone if a normalization substrate thickness t/ λ is set at the appropriate value smaller or equal to 3 according to aforementioned embodiments.
And according to this curve chart, by normalization substrate thickness t/ λ is set at smaller or equal to 3, can have more phase velocity is the pattern of the above high-frequency band of 5000m/s, can optionally obtain desired phase velocity (frequency).
And, according to present embodiment, with based on the resonator of the SH ripple of the R wave of former ST type, STW type, compare based on the resonator of the Lamb wave of AT type, the lamb-wave high-frequency resonator that frequency temperature variation with respect to variations in temperature is little, have good temperature characterisitic can be provided.And, because the summit temperature of frequency temperature deviation is being regarded as near 20 ℃ of normal temperature, so can obtain good temperature characterisitic in practical application.
And, in aforesaid the 1st zone～the 6th zone, can make the frequency temperature variation less than the STW type, can obtain good frequency-temperature characteristic, can set high electromechanical coupling factor K in addition
2, the lamb-wave high-frequency resonator of easy excitation can be provided.
And, in the present invention, form quartz base plate with Eulerian angles (0, θ, 0), so cutting angle is simple, can get broad to the width setup of angle θ and normalization substrate thickness t/ λ, can in desired band, optionally set desired temperature characterisitic, frequency characteristic, so have easy manufacturing, can improve rate of finished products, can reduce the effect of manufacturing cost.
In each of aforementioned 6 zones, can obtain the phase velocity of high-frequency region, good frequency-temperature characteristic, higher electromechanical coupling factor K
2, particularly in the 1st zone, can in the scope of broad, obtain to satisfy the scope of the angle θ in the Eulerian angles (0, θ, 0) of above-mentioned condition and the scope of t/ λ, but enlarge the options of making.
And, in the 4th zone, can obtain high phase velocity (high frequency) zone and high electromechanical coupling factor K
2, in the 6th zone, can obtain high electromechanical coupling factor K
2
In the present invention, as described above, though angle θ and t/ λ according to Eulerian angles restrict each characteristic, but with as the characteristic of its target with create conditions corresponding, in the scope in aforesaid the 1st zone～the 6th zone, can select arbitrarily, the lamb-wave high-frequency resonator with desired superperformance can be provided.
In addition, the invention is not restricted to aforementioned embodiments, the distortion in the scope that can realize target of the present invention, improvement etc. are also included among the present invention.
For example, in aforesaid execution mode, be provided with reflector 25,26, but also can adopt end face reflection type structure with these reflectors.
Therefore, according to aforementioned embodiments, can provide and can realize high frequencyization, frequency-temperature characteristic is good and lamb-wave high-frequency resonator that can reduce manufacturing cost.
Claims (8)
1. lamb-wave high-frequency resonator has the IDT electrode of the broach shape that is used to encourage Lamb wave on an interarea of quartz base plate, it is characterized in that,
The direction of propagation that cuts out angle and described Lamb wave that described IDT electrode is formed described quartz base plate when representing mode according to Eulerian angles is (0, θ, 0).
2. lamb-wave high-frequency resonator according to claim 1 is characterized in that,
When the thickness of described quartz base plate being made as t, when the wavelength of described Lamb wave is made as λ, the relation of thickness t and wavelength X being set in the scope of utilizing 0＜t/ λ≤3 expressions.
3. lamb-wave high-frequency resonator according to claim 1 is characterized in that,
Described angle θ in utilizing the scope that 132.8 degree≤θ≤178 kilsyth basalts show,
The relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave is set in the scope of utilizing 1.1≤t/ λ≤3 expressions.
4. lamb-wave high-frequency resonator according to claim 1 and 2 is characterized in that,
Described angle θ in utilizing the scope that 4 degree≤θ≤57.5 kilsyth basalts show,
The relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave is set in the scope of utilizing 2.08≤t/ λ≤2.82 expressions.
5. lamb-wave high-frequency resonator according to claim 1 and 2 is characterized in that, described angle θ in utilizing the scope that 6 degree≤θ≤33 kilsyth basalts show,
The relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave is set in the scope of utilizing 0.975≤t/ λ≤2.025 expressions.
6. lamb-wave high-frequency resonator according to claim 1 and 2 is characterized in that, described angle θ in utilizing the scope that 35 degree≤θ≤47.2 kilsyth basalts show,
The relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave is set in the scope of utilizing 0.176≤t/ λ≤1.925 expressions.
7. lamb-wave high-frequency resonator according to claim 1 and 2 is characterized in that, described angle θ in utilizing the scope that 2.7 degree≤θ≤16 kilsyth basalts show,
The relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave is set in the scope of utilizing 2.878≤t/ λ≤3 expressions.
8. lamb-wave high-frequency resonator according to claim 1 and 2 is characterized in that, described angle θ in utilizing the scope that 116 degree≤θ≤122.1 kilsyth basalts show,
The relation of the wavelength X of the thickness t of described quartz base plate and described Lamb wave is set in the scope of utilizing 0.375≤t/ λ≤1.06 expressions.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101953072B (en) * | 2007-10-22 | 2014-07-30 | 国立科学研究中心 | Lamb wave resonator |
| CN105337586A (en) * | 2015-12-03 | 2016-02-17 | 天津大学 | Lamb wave resonator |
| CN105393455A (en) * | 2013-06-28 | 2016-03-09 | 大河晶振科技有限公司 | Elastic wave device |
| CN106053595A (en) * | 2016-05-13 | 2016-10-26 | 中国科学院苏州生物医学工程技术研究所 | Lamb wave sensor with high quality factor |
| CN107421655A (en) * | 2017-07-05 | 2017-12-01 | 中国科学院苏州生物医学工程技术研究所 | A kind of even order Lamb wave generating means and system for detecting temperature |
-
2006
- 2006-01-06 CN CNB2006100003664A patent/CN100477514C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101953072B (en) * | 2007-10-22 | 2014-07-30 | 国立科学研究中心 | Lamb wave resonator |
| CN105393455A (en) * | 2013-06-28 | 2016-03-09 | 大河晶振科技有限公司 | Elastic wave device |
| CN105393455B (en) * | 2013-06-28 | 2017-04-12 | 大河晶振科技有限公司 | Elastic wave device |
| US9800225B2 (en) | 2013-06-28 | 2017-10-24 | River Eletec Corporation | Elastic wave device |
| CN105337586A (en) * | 2015-12-03 | 2016-02-17 | 天津大学 | Lamb wave resonator |
| CN105337586B (en) * | 2015-12-03 | 2018-04-17 | 天津大学 | Lamb wave resonator |
| CN106053595A (en) * | 2016-05-13 | 2016-10-26 | 中国科学院苏州生物医学工程技术研究所 | Lamb wave sensor with high quality factor |
| CN106053595B (en) * | 2016-05-13 | 2019-08-27 | 中国科学院苏州生物医学工程技术研究所 | Lamb wave sensor with high quality factor |
| CN107421655A (en) * | 2017-07-05 | 2017-12-01 | 中国科学院苏州生物医学工程技术研究所 | A kind of even order Lamb wave generating means and system for detecting temperature |
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| CN100477514C (en) | 2009-04-08 |
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