CN1786969A - Data generating system, patterning data generating apparatus, method of generating patterning data and storage medium carrying patterning data - Google Patents
Data generating system, patterning data generating apparatus, method of generating patterning data and storage medium carrying patterning data Download PDFInfo
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Abstract
In a data generating system, a basic pattern generating part (2331) generates patterning data having a basic pattern data block into which basic pattern CAD data is converted and a correct rule adding part (3332) adds a correct rule obtained from a database (3142) on the basis of a rule adding index indicating a patterning condition and an object pattern element to the above patterning data as a correct rule data block, to automatically generate the patterning data. As a result, it is possible to increase the efficiency of designing a pattern as compared with a case where an operator corrects data indicating of each of pattern elements in the basic pattern data block one by one. It is further possible to easily make a change in basic structure of a pattern and a fine change of pattern in accordance with a patterning operation.
Description
Technical field
The present invention relates to a kind of data generation system, cartographic data that is used to generate cartographic data and generate equipment, generate the method for cartographic data and the storage medium of carrying cartographic data, this cartographic data is used for forming geometric scheme in the process of making printed circuit board (PCB), Semiconductor substrate, flat-panel screens etc. on substrate.
Background technology
As by light shining at printed circuit board (PCB), Semiconductor substrate, going up the method that the photosensitive material that forms writes down geometric scheme such as (after this being called " substrate ") such as the flat-panel screens of plasma scope or LCD, photomask glass substrate, knownly be useful on the method for mask pattern being transferred to photosensitive material, and be used for by scanning the method for direct recording figure forming and the light beam after irradiation modulation on the photosensitive material.
For example under the situation that is used for the TFT of LCD (thin film transistor (TFT)) panel, form mask with the formation pattern based on the position of expression pattern element such as device, wiring etc. and the cartographic data of shape, and light shine the photosensitive material of coated substrate with recording figure forming through mask.
In the design of this mask pattern, at first design fully realizes the required basic pattern shape of pre-determined characteristics, then revises the basic pattern shape according to the characteristic of manufacturing equipment, thus the actual used pattern form of mask that forms of design.For example, disclose a kind of technology that the basic pattern shape is revised of being used among the Japanese kokai publication hei communique No.2001-125251, it is used for the optical proximity effect that the pattern that causes owing to the interference through the light of the adjacent domain of the mask of broken line design writing down on substrate deforms is compensated.
In this design, sometimes in design department, carry out the design of basic pattern shape, in manufacturing sector, carry out in reality is made the design of the pattern form that will use, therefore, aspect the design efficiency improvement, there is restriction, such as the repetitive operation that causes owing to the uncertain design part of in these departments, sharing.In addition, because their designed use is different in these departments, be difficult to check therefore whether the pattern form that finally designs satisfies the restriction in these department's designs in manufacturing sector.
The cartographic data of the pattern form of the final design of expression only has about such as the position of pattern elements such as device, wiring and the information of shape, and do not have about the basic pattern shape what kind of is, which restriction in why will revising, design or make causes any information of described correction etc.Therefore, the figure and the file that need in generating the process of cartographic data, use just, so that obtain about the basic pattern shape, cause the information of the restriction revised etc., increased the required time of the information of obtaining thus, and suppressed the mutual understanding in design and manufacture process.
When carrying out new design according to the characteristic of manufacturing equipment, change design or revising design, be not only obtain about required long period of information of design and repeated attempt and wrong required possible time all can corresponding increase design time, thereby being difficult to realize designing changes the robotization that waits in the processing.
Summary of the invention
The present invention aims to provide a kind of data generation system, be used for being created on the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens and on substrate, form the used cartographic data of geometric scheme, and fundamental purpose of the present invention is to improve the efficient of layout, and its another purpose is to change design easily.
System of the present invention is a kind of data generation system, is used for being created on the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens and forms the used cartographic data of geometric scheme on substrate.This system comprises: basic pattern generates parts, and it is used to generate the data of expression basic pattern, thereby generates the cartographic data that has as the described data of basic pattern data block, and wherein this basic pattern is the set of diagrams case element of arranging on the substrate; And modification rule adds parts, it is used for adding the modification rule data block to cartographic data, and this modification rule data block is represented according to the composite type of the single pattern element type that comprises in the basic pattern or a plurality of pattern elements the modification rule that obtains in the drawing operation.By system of the present invention, can improve the efficient of layout, and can further easily change design.
According to a preferred embodiment of the present invention, this system comprises that also modification rule changes parts, and it is used to be independent of the basic pattern data block and changes the modification rule of being represented by the modification rule data block.Can not change basic pattern thus by only changing modification rule and respond the change of creating conditions etc. fast.
According to another preferred embodiment of the present invention, modification rule adds parts and is independent of the basic pattern data block and adds the modification rule data block, with it as the data block of describing in the cartographic data.Can easily basic pattern and modification rule be distinguished mutually thus, thus the change of responsive corrections rule fast.
According to another preferred embodiment of the present invention, this system also comprises the memory unit that is used for stored data base, wherein this database is the set of a plurality of data elements, each data element all is associated modification rule with keyword message, described keyword message comprises the composite type and the drawing condition of single pattern element type or a plurality of pattern elements; And in this system, this modification rule adds parts and extracts the modification rule related with keyword message from database, this keyword message comprises the composite type and the predetermined drawing condition of single pattern element type contained in the basic pattern or a plurality of pattern elements, and this modification rule is added in the cartographic data.Can reduce the modification rule required time of data block that generates thus.
According to a scheme of the present invention, described system is a kind of data generation system, be used for being created on the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens and on substrate, form the used cartographic data of geometric scheme, and this system comprises: the basic pattern by the design division management generates equipment, it is used to generate the data of expression basic pattern, thereby generate the cartographic data that has as the described data of basic pattern data block, wherein this basic pattern is the set of diagrams case element of arranging on the substrate; And generating equipment by the cartographic data of pattern mapping agency management, it is used for the modification rule data block added to by basic pattern and generates the cartographic data that equipment receives via communication network, and generates and revise the back pattern data.In this system, basic pattern generation equipment comprises: modification rule adds parts, it is used for adding the modification rule data block to cartographic data, and this modification rule data block is represented the modification rule that obtains according to the composite type of single pattern element type contained in the basic pattern or a plurality of pattern elements in the drawing operation; And data generate parts after revising, it is used for by one of combination of one or more pattern element of the modification rule of specifying and the modification rule data block is represented a plurality of pattern elements related, that represented by the basic pattern data block, and revise a combination of a specified pattern element or specified a plurality of pattern elements according to modification rule, generate pattern data after the correction that is used to chart.
The present invention also aims to provide a kind of cartographic data and generates equipment, is used for being created on the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens and forms the used cartographic data of geometric scheme on substrate.This equipment comprises: modification rule adds parts, it is used for adding the modification rule data block to cartographic data, this cartographic data has the data as the expression basic pattern of basic pattern data block, described basic pattern is the set of diagrams case element of arranging on the substrate, and wherein this modification rule data block is represented the modification rule that obtains according to the composite type of the single pattern element type that comprises in the basic pattern or a plurality of pattern elements in the drawing operation; And data generate parts after revising, it is used for by one of combination of one or more pattern elements of the modification rule of specifying and the modification rule data block is represented a plurality of pattern elements related, that represented by the basic pattern data block, and revise a combination of a specified pattern element or specified a plurality of pattern elements according to modification rule, generate pattern data after the correction that is used to chart.Preferably, this equipment also comprises the charge information parts, provides information via communication network to predetermined counting equipment when it is used for after correction data and generates parts and revise.
The present invention also aims to provide a kind of method that generates cartographic data, and this cartographic data is used for forming geometric scheme in the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens on substrate; And provide a kind of computer-readable recording medium that carries this cartographic data.
From the following specific descriptions of in conjunction with the accompanying drawings the present invention being carried out, it is more obvious that these and other objects of the present invention, characteristics, scheme and advantage will become.
Description of drawings
Fig. 1 is the structural drawing that illustrates according to the data generation system of first preferred embodiment;
Fig. 2 illustrates the pie graph that cartographic data generates equipment;
Fig. 3 illustrates the function formation block diagram that basic pattern generates equipment and cartographic data generation equipment;
Fig. 4 is the structural drawing that database is shown;
Fig. 5 is the structural drawing that data element is shown;
Fig. 6 A and 6B are the process flow diagrams that the operations flows of data generation system is shown;
Fig. 7 is the view that basic pattern is shown;
Fig. 8 is the view that basic pattern CVD data are shown;
Fig. 9 and 10 is views that cartographic data is shown;
Figure 11 is the process flow diagram that the operations flows that is used to obtain modification rule is shown;
Figure 12 is the view that search key is shown;
Figure 13 is the view that cartographic data is shown;
Figure 14 is the process flow diagram that the operations flows that is used to obtain modified value is shown;
Figure 15 is the view that Relational database is shown;
Figure 16 is the view that video data is shown;
Figure 17 is the view that basic pattern is shown and revises the back pattern;
Figure 18 illustrates the view of revising the back data;
Figure 19 is the enlarged drawing that the pattern element of basic pattern is shown;
Figure 20 is the view that the modification rule data block is shown;
Figure 21 is the view that Relational database is shown;
Figure 22 is the view that broken line is shown and revises the back broken line;
Figure 23 illustrates according to second preferred embodiment, and the basic pattern in data generation system generates the functional block diagram of equipment and other formation;
Figure 24 is the structural drawing that data element is shown;
Figure 25 is the process flow diagram of a part that the operations flows of data generation system is shown;
Figure 26 is the view that cartographic data is shown; And
Figure 27 is that the function that data generating apparatus is shown constitutes block diagram.
Embodiment
Fig. 1 is the structural drawing of data generation system 1 that is used to generate cartographic data that illustrates according to first preferred embodiment of the invention.Cartographic data is to be used for forming geometric scheme in manufacturing printed circuit board (PCB), Semiconductor substrate, the flat-panel screens such as plasma scope or LCD, photomask glass substrate when (after this being called " substrate ") on arbitrary these substrates.
In mapping agency 3, cartographic data generates equipment 3 and is connected to the drafting machine 32 that is used to chart.Communication network 9 is the LAN of intra-company, WAN, internet etc., and under the situation about communicating on the internet, information to be transmitted all is encoded.In data generation system 1, in mapping agency 3, use cartographic data to generate equipment 31 and charge, and by the information of 22 management of the server in the design department 2 about chargeing.In other words, server 22 is as the counting equipment in the data generation system 1.Design department 2 can belong to a company or can belong to different companies with mapping agency 3.
Fig. 2 illustrates the pie graph that cartographic data generates equipment 31.Cartographic data generates equipment 31 and has the structure of similar plain edition computing machine, wherein be used to carry out various calculating CPU311, the pending program of storage and as the RAM312 of the workspace of various calculating, be used to store base program ROM313, be used for storing various information hard disk 314, be used for showing the display 315 of various information and being connected mutually with input block 316 the mouse such as keyboard to the operator.Hard disk 314 storages are treated to generate program 3141 and the database 3142 that equipment 31 is carried out by cartographic data.In other words, hard disk 314 is as the memory unit of stored data base 3142.Basic pattern generates equipment 21 owing to have with cartographic data shown in Figure 2 and generate the identical formation of equipment 31, promptly comprises CPU, RAM, ROM, hard disk, display and input block, and is therefore not shown in the drawings.Basic pattern generates hard disk in the equipment 21 and does not store the database corresponding with database 3142.
Fig. 3 is the program that illustrates according to the hard disk stored, generates equipment 21 and cartographic data in basic pattern and generates in the equipment 31 (referring to Fig. 2) the function that the calculating by execution such as CPU realizes and the block diagram of other function formation.In Fig. 3, the block that is centered on by a dot-and-dash line 210 is represented to generate the function that equipment 21 is realized by basic pattern in the design department 2, and represents that by the block that two dot-and-dash lines 310 center on cartographic data in the mapping agency 3 generates the function of equipment 31 and constitutes.In Fig. 3, the Data Receiving parts 231, data unit 232 and the design data that generate in the equipment 21 in basic pattern generate parts 233, and generate Data Receiving parts 331, data output section part 332, display control unit spare 3321, cartographic data in the equipment 31 at cartographic data generate parts 333, data base administration parts 334 and charge information parts 335 corresponding to the function that is realized by CPU etc. in these equipment.
In data generation system 1, constitute the unit by these and generate cartographic data.Cartographic data comprises basic pattern (basic pattern is to realize the required minimum pattern of intended purpose of substrate) and rule (after this, be called " modification rule "), wherein this basic pattern be the set of diagrams case element on substrate, arranged (promptly, fundamental figure such as some circles and straight line and so on), this rule is the basic pattern of acquisition in being used for operating according to the actual drawing of composite type correction of the contained pattern element type of basic pattern or a plurality of pattern elements.
Design data generates parts 233 to be had basic pattern and generates parts 2331, and it is as generate in the equipment 21 functional part of being realized by CPU etc. in basic pattern; And cartographic data generation parts 333 have index interpolation parts 3331, modification rule adds parts 3332, correction back data generation parts 3333, final data generation parts 3334 and modification rule and changes parts 3335, the functional part that their conducts are realized by (referring to Fig. 2) such as CPU311.Data base administration parts 334 have Data Update parts 3341 and data extract parts 3342, and they are as the functional part by realizations such as CPU311.After a while in detail these functions will be described in detail.
Fig. 4 is the structural drawing that the database of storing in the hard disk 314 of cartographic data generation equipment 31 3142 is shown.Database 3142 is set of a plurality of data elements 10 shown in Figure 5, and each data element 10 comprises the data element ID101 that is used for the recognition data element, the keyword message 102 that is used for the retrieve data element, the modification rule 103 related with keyword message 102 and as the rule type 1030 of the identifier of the type of expression modification rule 103.Keyword message 102 comprises: drawing condition 1021, the predetermined various conditions (typically as drafting machine 32 (referring to Fig. 1) type) about drawing of its expression; And object pattern element 1022, this object pattern element 1022 is to be illustrated in the identifier such as the composite type of the type of a pattern element of device and wiring etc. or a plurality of pattern elements of having used modification rule 103 in the pattern.Following discussion is that the information of the type of supposition drawing condition 1021 expression drafting machines 32 is carried out.Modification rule 103 is rules of determining according to the restriction in the intrinsic processing such as manufacturing of mapping agency 3, and is managed separately by mapping agency 3.
The Data Receiving parts 331 that generate in the equipment 31 at cartographic data receive the cartographic data that generates equipment 21 transmissions from basic pattern, and cartographic data generates parts 333 and revises the cartographic data that Data Receiving parts 331 receive, and revises back data and final data thereby generate.Generate cartographic data that parts 333 revise etc. by 332 outputs of data output section part by cartographic data, and show according to needing to go up at display 315 (referring to Fig. 1) by display control unit spare 3321.
Generate at cartographic data and extract modification rule used when generating parts 333 and revise cartographic datas in the database 3142 that the data base administration parts 334 in the equipment 31 stores from hard disk 314, and the modification rule that extracts is outputed to cartographic data generation parts 333 by cartographic data.Data base administration parts 334 come more new database 3142 according to the input that is used for the data updated element.
Fig. 6 A and 6B illustrate the process flow diagram that data generation system 1 is used to generate cartographic data, revises the operations flows of back data and final data.Below with the object lesson of the operation of data of description generation system 1.Below discussion will generate equipment 21, a server 22 and a cartographic data at basic pattern on the data generation system 1 of Fig. 1 and generate equipment 31 and carry out.
In first illustrative example, for basic pattern with three electrodes and the wiring that is connected these electrodes, to discuss at the operations flows that is used to generate cartographic data, revises back data and final data, and wherein consider in that the wiring meeting attenuates in the actual drawing of carrying out on the substrate by being etched in (width of the wiring that forms on substrate can become less than the phenomenon that is input to the wiring design width that is used for carrying out etched equipment according to the characteristic of equipment etc.) and carry out width compensation at the aforesaid operations butted line.
Fig. 7 is the view that basic pattern 8 is shown, and this basic pattern 8 is the bases by the cartographic data of data generation system 1 generation; And Fig. 8 is the view that cad data (after this being called " basic pattern cad data ") 90 is shown, and this cad data is represented the shape of basic pattern 8.As shown in Figure 7, basic pattern 8 has the annulus 81-83 that represents electrode and representative and connects the straight line 84,85 of wiring of these electrodes as pattern element.The two ends of straight line 84 are annulus 81,82, and the two ends of straight line 85 are annulus 82 and 83.In the basic pattern cad data 90 of Fig. 8, the block that is centered on by a dot-and-dash line 810 to 850 is represented the annulus 81 to 83 and the straight line 84,85 of polar plot form respectively.
Although for ease of understanding simple basic pattern 8 shown in Figure 7, basic pattern 8 can not only have annulus and straight line, can also have other fundamental figure such as point, polygon, broken line, SPL and Bezier as pattern element.In the basic pattern cad data 90 of Fig. 8, these pattern elements can represent with the polar plot form, perhaps are expressed as to show the data as the address of external reference such as other graphic file, view data.
Basic pattern cad data 90 can comprise show each pattern element specific descriptions (for example, the geometric manipulations of the bending of broken line, the live width of the starting point of figure and terminal point under the situation that the figure live width changes gradually, and the amplification of pattern element, dwindle or rotate) data, the data that show relation between a plurality of layers that wherein record pattern element, the data that show the effective coverage (only the pattern element that exists is as the element that constitutes pattern) in the coordinate space that wherein records pattern element in this zone, or other data (after this data that are associated with pattern element are called " associated data ").Alternatively, these associated datas can be used as other data related with basic pattern cad data 90 and handle.Except the descriptor format shown in Fig. 8, basic pattern cad data 90 can be described as other form (for example GERBER form, GDS II etc.).
Generating in the process of cartographic data by data generation system 1, at first, the Data Receiving parts 231 that generated in the equipment 21 by basic pattern shown in Figure 3 receive basic pattern cad data 90, and send it to design data generation parts 233 (step S11).Subsequently, the basic pattern generation parts 2331 of design data generation parts 233 convert the descriptor format of basic pattern cad data 90 to XML (extend markup language), to generate cartographic data 91, this cartographic data 91 has the basic pattern data block 911 of expression basic pattern 8, (step S12) as shown in Figure 9.In Fig. 9, the declarative data block of not shown XML version and file type declarative data block (other figure also is like this).
As shown in Figure 9, the annulus 81 to 83 of Fig. 7 all defines with masurium " circle ", and have these attributes, " figureId " of identification icon element for example, represent the X coordinate figure of its central point and " cx " and " cy " of Y coordinate figure respectively, and " diameter " that represent its diameter.Straight line 84 and 85 all defines with masurium " line ", and have these attributes, " figureId " of identification icon element for example, represent the X coordinate figure of its starting point and " sx " and " sy " of Y coordinate figure respectively, represent the X coordinate figure of its terminal point and " ex " and " ey " of Y coordinate figure respectively, and " width " that represent its live width.
Generating cartographic data 91 that parts 2331 generate by the basic pattern of Fig. 3 is generated data unit 232 in the equipment 21 by basic pattern and sends to cartographic data via communication network 9 (referring to Fig. 1) and generate equipment 31 (step S13).Generate in the equipment 31 at cartographic data, only represent that the cartographic data 91 of basic pattern is received by Data Receiving parts 331, and be sent to cartographic data generation parts 333.
After cartographic data 91 being sent to cartographic data generation parts 333, the object pattern element of the single pattern element type of the drawing condition of expression drafting machine 32 (referring to Fig. 1) and expression application modification rule or the composite type of a plurality of pattern elements is received by the Data Receiving parts 331 that cartographic data generates equipment 31, and is sent to cartographic data generation parts 333.These data are to be ready to use in the data of modification rule being added to basic pattern data block 911, are called " rule is added index " subsequently.
Subsequently, as shown in figure 10, index interpolation parts 3331 add index 912 with rule and add cartographic data 91 (step S21) to.Add in the index 912 in the rule that XML describes, the drafting machine 32 that its " plantId " is " A1 " is designated as the drawing condition, and the pattern element that its " figureType " is " line " is designated as the object pattern element.Generate in the equipment 31 at cartographic data, add index 912 based on the rule of adding basic pattern data block 911 to, modification rule adds parts 3332 and obtains modification rule (step S22) from data block 3142.
Figure 11 illustrates cartographic data to generate the process flow diagram that equipment 31 is used for obtaining at step S22 the operations flows of modification rule.Figure 12 is the view that the search key 40 that is used to obtain modification rule is shown.When obtaining modification rule, at first, the modification rule that cartographic data generates parts 333 adds parts 3332 (referring to Fig. 3) from rule interpolation index 912 (referring to Figure 10) extraction drawing condition 401 (" plantId "=" A1 ") and object pattern element (" figureType "=" line "), and these data are as the search key 40 (step S221) of Figure 12.
The search key 40 that is added parts 3332 extractions by modification rule is received by the data base administration parts 334 of Fig. 3, and is sent to data extract parts 3342 (step S222).Subsequently, come search database 3142 based on search key 40, and data extract parts 3342 extract modification rule 103 related with the keyword message 102 (referring to Fig. 5) that comprises search key 40 and rule type 1030 (step S223) from database 3142.By data base administration parts 334 modification rule 103 that extracted and rule type 1030 are outputed to the modification rule that cartographic data generates parts 333 and add in the parts 3332, thereby finish obtain (the step S224) of modification rule 103.Thus obtained modification rule 103 be the drafting machine 32 that is used to chart intrinsic modification rule 103.
After the obtaining of the modification rule 103 of finishing Fig. 5, adding parts 3332 by modification rule adds the modification rule 103 that obtains rule type 1030 and the object pattern element 1022 together with correspondence in the cartographic data 91 to, as modification rule data block 913, (Fig. 6 B: step S23) as shown in figure 13.In cartographic data 91, add the modification rule data block 913 that has as the rule type 1030 and the object pattern element 1022 (i.e. " ruleId " and " figureType ") of attribute, describe the data block of (adding under the state of index 912 no mutual relation of inclusion) as being independent of basic pattern data block 911 and rule interpolation index 912 in modification rule data block 913 and basic pattern data block 911 and rule.In cartographic data 91, similar with basic pattern data block 911 and rule interpolation index 912, with XML modification rule data block 913 is described.If cartographic data 91 comprises a plurality of basic pattern data blocks 911, rule and adds index 912 and modification rule data block 913, can alternately describe these data blocks.Contained modification rule need not be confined to the intrinsic modification rule of drafting machine in the modification rule data block 913, and for example can be the design rule that not influenced by device characteristics, the manufacturing rule that on substrate, in the manufacturing actual pattern a plurality of equipment is had, or the like.
As shown in figure 13, modification rule data block 913 comprises modification rule 103, " ruleId " of its expression rule type is " b1 ", and " figureType " of indicated object pattern element type be " line " (after this, by using " ruleId " value, this modification rule is called " correct ruleb1).Modification rule b1 is the rule that is used for revising according to the wiring length that pattern is represented by straight line the wiring width.
After adding modification rule data block 913 to cartographic data 91, generate the modified value that parts 3333 (referring to Fig. 3) obtain the required use of correction by revising the back data, pattern data (after this, being called " revising the back data ") (step S24) after the correction that is used to chart that these correction back data generation parts 3333 generations get via the correction of basic pattern data block 911.Figure 14 is the process flow diagram that the operations flows that is used to obtain modified value (the correction width of wiring just) is shown.At first, appointment by the combination of some pattern elements in each pattern element of the basic pattern data block in the cartographic data 91 911 expression or these pattern elements as the object (step S241) that is used to revise, these pattern elements and its combination is corresponding to the modification rule b1 by 913 expressions of modification rule data block, is the straight line 84 and 85 (referring to Fig. 7) by the pattern element of attribute " figureType " expression of modification rule b1 specifically.Subsequently, the Processing Algorithm of using modification rule b1 to obtain straight line 84 and 85 length (step S242) separately from the coordinate figure of starting point and terminal point.
Figure 15 is the form bar1 that illustrates with the related Relational database foo1 of modification rule b1 and/or drawing condition (that is, its " plantId " be " A1 " drafting machine 32).Revise the back data and generate parts 3333 based on the length of the straight line 84 that obtains at step S242 and the form barl (being equally applicable to straight line 85) of Figure 15, the correction width (" value ") that obtains the wiring of being represented by straight line 84 is as " dbValue " (the step S243) in modification rule data block 913 (referring to Figure 13).If in modification rule, described modified value in advance, execution in step S24 not then.
After obtaining the correction width, revise the back data and generate the part of parts 3333, generate data 92 (after this being called " video data 92 ") (Fig. 6 B: step S25) with pattern after generating the correction that is used to show as shown in figure 16 according to expression straight line 84 in the modification rule b1 correction basic pattern data block 911 and 85.As shown in figure 16, in video data 92, the correction width that will obtain according to the modification rule b1 value of " deltawidth " expression (in the Figure 16 by) add in each part of the expression straight line 84 in the basic pattern data block 911 in the cartographic data 91 and 85, thereby distinguish with the original width (in Figure 16) of straight line 84 and 85 by the value of " width " expression.Similar with cartographic data 91, with XML video data 92 is described.Come the entity part of correction algorithm that basic pattern data block 911 is revised not illustrate in the drawings according to modification rule.
Generate in the equipment 31 at cartographic data, to generate parts 333 from cartographic data by the video data 92 that data generation parts 3333 after the correction of Fig. 3 generate and be sent to data output section part 332, and its pattern form will be presented at display 315 (referring to Fig. 2) upward (step S26) by data output section part 332.Figure 17 is the enlarged drawing that is illustrated in the part of the pattern that shows on the display 315.Generate in the equipment 31 at cartographic data, by output by the data output section part 332 of display control unit spare 3321 control, as shown in figure 17, with basic pattern 8 (annulus 82 in Figure 17 and straight line 84,85), revise back pattern 8a (annulus 82 in Figure 17 and straight line 84a, 85a) and basic pattern 8 and revise afterwards the difference 8b between the pattern 8a (it is corresponding to the dash area among Figure 17, and after this be called " correction ") and be presented on the display 315.Can optionally show any among basic pattern 8 and the correction back pattern 8a.
When display pattern on display 315, the operator checks basic pattern 8, revises the outward appearance (step S27) of back pattern 8a and correction 8b.Do not have intended shape if revise back pattern 8a, then Data Receiving parts 331 receptions by Fig. 3 are used to change the data (after this being called " change data ") of correction, and send it to cartographic data generation parts 333.Generate in the parts 333 at cartographic data, modification rule changes parts 3335 irrespectively change cartographic data 91 with basic pattern data block 911 based on changing data modification rule data block 913 (step S271).Particularly, the correction width that obtains among the step S24 is changed into by the new correction width that changes data representation.After the modification rule that changes by 913 expressions of modification rule data block, turn back to step S25, generate video data 92 once more, and on display 315, show basic pattern 8, revise back pattern 8a and correction 8b (step S25 and S26).In step S271, may there be following change in content according to changing data: the modification rule that obtains new modification rule, the modification rule data block 913 from database 3142 is substituted by new modification rule, or the like.
When pattern 8a obtains intended shape after revising (step S27), revise the part of (it is as being designated as the pattern element of revising object) of expression straight line 84,85 in the basic pattern data block 911 together according to the modification rule in the modification rule data block 913, with data 93 (step S28) after the generation correction as shown in figure 18.As shown in figure 18, generate and revise back data 93, according to modification rule b1 the data of expression straight line 84,85 in the basic pattern data block 911 are carried out the data of correction result as expression.In other words, after correction, in the data 93, do not distinguish the shape that pattern element is described on ground mutually with basic configuration (being expressed as the shape of basic pattern 8) with according to the revised part of modification rule.With XML correction back data 93 are described.
Generate in the equipment 31 at cartographic data, when 3333 pairs of cartographic datas 91 of data generation parts after the correction of Fig. 3 were revised with generation correction back data 93, data generation parts 3333 were to charge information parts 335 transmission prearranged signalss after revising.Then, the charge information parts 335 that receive signal will be sent to (referring to Fig. 1) (step S29) in the server 22 in the design department 2 about the information of using cartographic data to generate equipment 31 via communication network 9.Server 22 upgrades the charge information that generates the operating position of equipment 31 about cartographic data based on the information from charge information parts 335.
Generate in the equipment 31 at cartographic data, generate parts 3334 by final data and generate final data (step S30) based on revising back data 93.Substituting in the process of generation correction back data 93 or in the process of data 93 after generation is revised, can in the process of generation final data, provide the information that generates by charge information parts 335 about cartographic data generation equipment 31 operating positions.In this case, with similar in the above-mentioned situation, final data generates parts 3334 and when generating final data prearranged signals is sent to charge information parts 335, and charge information parts 335 provide the information that generates equipment 31 operating positions about cartographic data via communication network 9 to server 22.
The final data that final data is generated parts 3334 generations is sent to drafting machine 32 (referring to Fig. 1), and forms actual pattern in last treatment step on substrate.Chart based on the final data that after the correction of basic pattern 8 being carried out in order to compensate the wiring width, generates.As a result, prevented wiring owing to device characteristics etc. attenuate, and can form suitable pattern.
In data generation system 1, add index 912 about treating the rule of in the step S21 of Fig. 6 B, adding cartographic data 91 to, can respectively polytype pattern element be appointed as the object pattern element, and the multiple combination of a plurality of pattern elements can be appointed as the object pattern element.In step S22 and S23, can from database 3142, obtain polytype modification rule, and it is added in the cartographic data 91 as modification rule data block 913.Needn't always in the generative process of step S28 data 93 after correction, revise basic pattern data block 911 together, but can in the generative process of step S30, revise, if the more effective words of the latter at final data.In this case, revise back data 93 and have the modification rule relevant as modification rule data block 913 with some corrections of in the process that generates final data, carrying out.
In data generation system 1,, carry out the renewal of database 3142 according to carrying out under the situation of design at the substrate that plan utilization new equipment on it etc. is charted.In the renewal of database 3142, after making prototype etc., import more new data by input block 316 (referring to Fig. 2), and send it to the Data Update parts 3341 of data base administration parts 334 as shown in Figure 3.Subsequently, Data Update parts 3341 are based on renewal data search database 3142, and more new data is added to new data element, perhaps based on upgrading the data element that Data Update has existed.
As mentioned above, in data generation system 1, comprising basic pattern by design department 2 management generates basic pattern that equipment 21 generates and counts the cartographic data 91 of storehouse piece 911 and be sent to mapping agency 3, and comprise and generate equipment 31 with intrinsic drawing condition (for example type of drafting machine 32) the corresponding modification rule of mapping agency 3 and the modification rule data block 913 of the object pattern element cartographic data by mapping agency 3 management and add basic pattern data block 911 to, comprise the cartographic data 91 of modification rule data block 913 with automatic generation.Because the cartographic data 91 after generating comprises basic pattern data block 911 and modification rule data block 913, therefore can specify basic pattern and the modification rule that is used to chart respectively.The result, compare the data conditions that the operator revises each pattern element in the expression basic pattern data block 911 one by one, the efficient of layout be can improve, thereby can further the basic structure of pattern (being basic pattern 8) and the meticulous change of carrying out pattern be changed according to drawing processing ease ground.
Generate in the equipment 31 at cartographic data, since with modification rule data block 913 add in the cartographic data 91 as with the data blocks of basic pattern data block 911 descriptions independently of one another, therefore can be easy to distinguish basic pattern data block 911 and modification rule data block 913, and the change of responsive corrections rule fast.In modification rule data block 913, because the identifier of expression rule type and object pattern element type is provided for each modification rule, even therefore in modification rule data block 913, contain a plurality of modification rules, also can effectively retrieve the modification rule for the treatment of change in the change operation of modification rule.This just can respond fast because the change in pattern that the variation of creating conditions etc. brings.The identifier that offers each modification rule in the modification rule data block 913 can be any type in the composite type of rule type, single pattern element type to be revised or a plurality of pattern elements to be revised.
Cartographic data at data generation system 1 generates in the equipment 31, does not change modification rule data block 913 because modification rule parts 3335 only do not change basic pattern by revising modification rule, be independent of basic pattern data block 911, so can respond the change of creating conditions etc. fast.By change drafting machine the modification rule in the intrinsic modification rule data block 913, can not change basic pattern and generate the cartographic data that is suitable for each equipment.
Generate in the equipment 31 at cartographic data, extract the modification rule that is used to revise basic pattern owing to add parts 3332 from database 3142 by modification rule, generate the required time of modification rule data block 913 so can reduce, reduce generating cartographic data 91 required times thus.Data generate in the parts 3333 after correction, by specify with basic pattern data block 911 outside modification rule data block 913 in the corresponding single pattern element of modification rule or the combination of a plurality of pattern elements, and revise specified pattern element or combination according to modification rule, can realize revising the automatic generation of back data 93 fast.Thus, in cartographic data generates equipment 31, can easily generate, and improve the efficient of layout as data 93 after the correction of the pattern data of revising according to drawing condition etc.
Generate in the equipment 31 at cartographic data, because basic pattern, the correction of revising back pattern and expression basic pattern and the difference of revising the back pattern are presented on the display 315 by data output section part 332, so can easily grasp pattern form before revising and the difference after revising.As a result, can easily check revised pattern form.
In data generation system 1, because the basic pattern data block 911 in the cartographic data 91, rule interpolation index 912 and modification rule data block 913 are with identical descriptive language description, so the processing of cartographic data 91 becomes easier.Because XML has the descriptor format of wide region adaptability especially and at Excellence in Performance aspect the adaptability of data communication etc., so XML is adapted to describe cartographic data 91.Cartographic data 91 also can be described with PDF (Portable Document format), and PDF is the same with XML, has the adaptable descriptor format of wide region and at Excellence in Performance aspect the adaptability of data communication etc.
Cartographic data at data generation system 1 generates in the equipment 31, when generating parts 3334 based on the 93 generation final datas of data after revising by data generation parts 3333 correction cartographic datas 91 after revising and/or by final data, 335 generations of charge information parts generate the information of equipment 31 about using cartographic data.As a result, the use of cartographic data generation equipment 31 is suitably charged.
In data generation system 1; because under design department 2 and mapping agency 3 belong to different situations such as company; can under design part 2 is openly notified the condition of characteristic of drawing condition such as drafting machine 32, in mapping agency 3, not obtain final data, therefore can protect information to spread out of the company outside about drafting machine 32 grades of mapping agency 3.Under the situations such as cartographic data 91 that the external staff who does not belong to the client obtains generating in the design department 2,, therefore can strengthen confidentiality about the design information of drawing because he can't obtain final data under the situation of not using cartographic data generation equipment 31.
Next, with reference to Figure 19 and other figure, will discuss about generate second illustrative example of cartographic data, correction back data and final data by data generation system 1.Figure 19 is the enlarged drawing that illustrates as the broken line 86 of a pattern element of basic pattern, and wherein basic pattern is the basis of cartographic data.In data generation system 1,, generate the cartographic data of the photomask that is used on Semiconductor substrate, charting based on the basic pattern that contains broken line 86.Part corresponding to broken line 86 on the photomask is a photic zone, and utilizes the light that passes photomask to write down gate pattern on the resist layer on the Semiconductor substrate.The vertical element that constitutes broken line 86 is joined at the place, right angle each other.
As shown in figure 19, because broken line 86 has many places bending 861, so, then can produce optical proximity effect at crooked 861 contiguous place if form the photic zone of photomask with this shape, that is, because the interference of the light by photic zone located adjacent one another can make the pattern that writes down on the substrate deform.In data generation system 1, operation to the step S11 to S30 of the cad data execution graph 6A of the basic pattern that comprises broken line 86 and Fig. 6 B, to generate cartographic data, to revise back data and final data, wherein these data are revised in order to suppress optical proximity effect.Below, will discuss at the operation of data generation system 1.
In data generation system 1, at first, the basic pattern cad data of representing the shape of broken line 86 with the polar plot form is received by the Data Receiving parts 231 that basic pattern shown in Figure 3 generates equipment 21, and is sent to design data generation parts 233 (step S11).Subsequently, basic pattern generates parts 2331 and generates the cartographic data of describing with XML (step S12) according to the basic pattern cad data, and the data unit 232 of basic pattern generation equipment 21 sends to cartographic data generation equipment 31 (referring to Fig. 1) (step S13) via communication network 9 with cartographic data.In the following discussion, other data are also described with XML.
Generate in the equipment 31 at cartographic data, cartographic data is received by Data Receiving parts 331, and is sent to cartographic data generation parts 333, and by index interpolation parts 3331 rule is added index and add (step S21) in the cartographic data to.Subsequently, add index based on the rule of adding cartographic data to, add parts 3332 by modification rule and from database 3142, obtain modification rule (step S22), and add the modification rule that obtains to cartographic data as modification rule data block 913a (step S23) shown in Figure 20.
As shown in figure 20, modification rule data block 913a comprises such modification rule, " ruleId " of its expression rule type is " c1 ", " figureType " of indicated object pattern element type be " polyline " (broken line) (after this, by using " ruleId " value, this modification rule is called " modification rule c1 ").Modification rule c1 is a kind of optical proximity effect that produces for the knee (" turning ") that is suppressed at the pattern element of being represented by broken line and the rule revised.
After adding modification rule data block 913a to cartographic data, revise the back data and generate parts 3333 from one of combination of one of that represent by the basic pattern data block of cartographic data, corresponding a plurality of pattern elements or a plurality of pattern elements with the modification rule c1 that represents by modification rule data block 913a, that is, as broken line 86 (referring to Figure 18) by the pattern element of the attribute " figureType " of modification rule c1 expression.Subsequently, from coordinate figure of the broken line 86 represented by the basic pattern data block etc. the correction object is appointed as in the bending 861 of broken line 86.
Figure 21 is that the figure that the form bar2 of the Relational database foo2 related with the drawing condition of modification rule c1 and/or rule interpolation index is shown revises back data generation parts 3333.Revise back data generation parts 3333 and obtain correction length and revise width (" value "), as " dbValueL " among the modification rule data block 913a and " dbValueW " (step S24) based on the key word " L " of Figure 20 and the form bar2 of " W " and Figure 21.
After obtaining correction length and correction width, revise back data generation parts 3333 and revise the part of representing the basic pattern data block of broken line 86 in the cartographic data, to generate video data (step S25) according to modification rule c1.Based on video data, the display 315 (referring to Fig. 2) that generates equipment 31 at cartographic data is gone up the pattern form (step S26) that shows as shown in figure 22.Generate in the equipment 31 at cartographic data, as shown in figure 22, on display 315, show broken line 86, revise back broken line 86a and broken line 86 and the difference 86b (after this it be called " correction " corresponding to the dash area among Figure 22) that revises back broken line 86a.The length of the correction 86b that is represented by Reference numeral " L " and " W " in Figure 22 and width are respectively correction length and the correction width that obtains at step S24.Can optionally show any among broken line 86 and the correction back broken line 86a.
When display pattern on display 315, the operator checks broken line 86, revises the outward appearance (step S27) of back broken line 86a and correction 86b.Do not have the shape of expectation if revise back broken line 86a, then generate Data Receiving parts 331 in the equipment 31 and receive and change data, and change that parts 3335 are independent of the basic pattern data block and the modification rule data block 913a (step S271) that changes cartographic data shown in Figure 20 by modification rule by cartographic data.After changing the modification rule represent by modification rule data block 913a, turn back to step S25, generate video data once more, and on display 315, show broken line 86, revise back broken line 86a and correction 86b (step S25 and S26).
When broken line 86a obtains intended shape (step S27), revise the part of representing broken line 86 in the basic pattern data block together according to the modification rule among the modification rule data block 913a, revise back data (step S28) to generate.Then, charge information parts 335 send about using cartographic data to generate the information (step S29) of equipment 31 via the server 22 (referring to Fig. 1) of communication network 9 in design department 2.Server 22 upgrades the charge information that generates the operating position of equipment 31 about the cartographic data in the mapping agency 3 based on the information from charge information parts 335.
Generate in the equipment 31 at cartographic data, generate parts 3334 by final data and generate final data (step S30) based on revising the back data.Replacement can provide in the process that generates final data by what charge information parts 335 sent and generate the information of the operating position of equipment 31 about cartographic data in process that generate to revise back data 93 or except in generating the process of revising back data 93.
Afterwards, final data is sent to drafting machine 32 (referring to Fig. 1), and in treatment step subsequently, on substrate, form pattern.Chart based on the final data that after the bending 861 of the broken line 86 in order to suppress optical proximity effect is revised, generates.As a result, suppressed because the flexural deformation in the pattern that the interference of light causes, and can form suitable pattern.
As mentioned above, in data generation system 1,, can generate such cartographic data 91 automatically, wherein add modification rule data block 913a to basic pattern data block 911 with similar in first illustrative example.In cartographic data 91, because the basic pattern and the modification rule that are used to chart can be specified respectively, therefore compare the data conditions that the operator revises each pattern element in the expression basic pattern data block 911 one by one, can improve the efficient of layout, thereby further can be easily according to the basic structure of drawing operation change pattern (that is, basic pattern 8) and the meticulous change of carrying out pattern.In addition, owing to generate equipment 31 (in other words according to modification rule data block 913a by cartographic data, drawing condition according to mapping agency 3) revises cartographic data 91, therefore can easily generate and revise back data 93, thereby further improve the efficient of layout.
Figure 23 illustrates the functional block diagram that generates equipment and other formation according to the basic pattern of second preferred embodiment in data generation system.The data generation system of second preferred embodiment has identical formation shown in Figure 1 basically, the difference of the system of itself and Fig. 1 is, basic pattern generates the function that equipment 21 realizations are centered on by the dot-and-dash line 210a among Figure 23, rather than the function that is centered on by the dot-and-dash line 210 among Fig. 3, and basic pattern generates hard disk 214 stored data bases 2142 in the equipment 21.Cartographic data in the data generation system of second preferred embodiment generates equipment 31 to have and Fig. 2, structure and function identical construction and function shown in Figure 3, and it is represented by identical Reference numeral in the following discussion.
As shown in figure 23, design data generates parts 233 and has basic pattern generation parts 2331, index interpolation parts 2332 and modification rule interpolation parts 2333, generate in the equipment 21 functional part of realizing by CPU etc. as basic pattern, and data base administration parts 234 have Data Update parts 2341 and data extract parts 2342.
Database 2142 generates the database of storing in the hard disk 314 of equipment 31 3142 (referring to Fig. 4) just as cartographic data, it is the set of a plurality of data element 10a as shown in figure 24, and each data element 10a comprises the data element ID101 that is used for the recognition data element, the keyword message 102 that is used for the retrieve data element, with irrelevant modification rule (after this being called " design modification the rule ") 103a that is used to revise basic pattern in the layout stage of the characteristic of drafting machine 32 (referring to Fig. 1) as with the design rule of the related basic pattern of keyword message, and rule type 1030, it is as the identifier of the type of expression design modification rule 103a.Keyword message 102 comprises object pattern element 1022, this object pattern element 1022 is a kind of identifiers, be illustrated in used in the pattern design modification rule 103a such as the type of a pattern element of device and wiring etc. or the composite type of a plurality of pattern elements.
Figure 25 is the process flow diagram that illustrates according to the part of the operations flows of the data generation system of second preferred embodiment.In the data generation system of second preferred embodiment, between the step S12 and S13 of the operation of the data generation system shown in Fig. 6 A 1, generate equipment 21 by basic pattern and carry out the operation of the step S31 to S36 of Figure 25.In the data generation system of second preferred embodiment,, generate the cartographic data, correction back data and the final data that the wiring in the basic pattern of Fig. 7 have been carried out width compensation with similar in first preferred embodiment.The operation of the data generation system of second preferred embodiment is discussed with reference to Figure 23-25 and other figure below.Because before the step S31 to S36 of Figure 25 and operation afterwards (promptly, the step S11 of Fig. 6 A and S12, the step S21 to S30 of the step S13 of Fig. 6 A and Fig. 6 B) identical with those operations of the data generation system 1 of first preferred embodiment, therefore simplify its explanation.
In the data generation system of second preferred embodiment, at first, generate equipment 21 by basic pattern and receive basic pattern cad data 90 (referring to Fig. 8), and basic pattern generation parts 2331 convert the descriptor format of basic pattern cad data 90 to XML, have the cartographic data 91 (referring to Fig. 9) (Fig. 6 A: step S11 and S12) of basic pattern data block 911 with generation.Subsequently, the Data Receiving parts 231 that generated equipment 21 by basic pattern receive the object pattern element 1022 of having used design modification rule 103a, and send it to design data and generate parts 233, add parts 2332 by index then adds in the cartographic data 91 it as rule interpolation index 912a, (step S31) as shown in figure 26 to.Next, modification rule adds parts 2333 and extracts object pattern element 1022 from cartographic data 91, and the object pattern element that is extracted is with acting on from the search key (step S32) of database 2142 retrieval design modification rule 103a.
Data extract parts 2342 by data base administration parts 234 receive the search key (step S33) that is added parts 2333 extractions by modification rule.Generate in the equipment 21 in basic pattern, data extract parts 2342 are based on search key search database 2142, and extract design modification regular 103a and the rule type 1030 (step S34) related with the keyword message 102 that comprises search key from database 2142.
By data base administration parts 234 design modification rule of being extracted and the rule type that is extracted are outputed to the modification rule interpolation parts 2333 that design data generates parts 233, to finish obtain (the step S35) of design modification rule 103a.Before cartographic data 91 being sent to cartographic data generation equipment 31, thus obtained design modification rule 103a is added in the cartographic data 91 as design modification regular data piece 913b, (step S36) as shown in figure 26 by modification rule interpolation parts 2333 together with the rule type 1030 and the object pattern element 1022 of correspondence.The data unit 232 that is generated equipment 21 by basic pattern sends to cartographic data via communication network 9 with the cartographic data 91 that has added design modification rule 103a and generates equipment 31 (referring to Fig. 1) (Fig. 6 A: step S13).
Generate equipment 31 reception cartographic datas 91 by cartographic data after, similar with first illustrative example, by the formation of Fig. 3 rule is added index 912 (referring to Figure 13) and add cartographic data (Fig. 6 B: step S21) to, to obtain modification rule shown in Figure 4 103 (, after this being called " drawing modification rule 103 ") (step S22) in order to distinguish with design modification rule 103a.
Add the drawing modification rule 103 that obtains to cartographic data 91 as modification rule data block 913 (referring to Figure 13: after this be called " drawing modification rule data block 913 ") so that distinguish with design modification regular data piece 913b, and after foundation need have been obtained modified value, utilize the drawing modification rule 103 of the design modification rule 103a of design modification regular data piece 913b and drawing modification rule data block 913 to revise the basic pattern data block 911 of cartographic data 91, to generate video data 92 (referring to Figure 15) (step S23 to S25).Subsequently, video data 92 is sent to data output section part 332, and is presented on the display 315 (referring to Fig. 2), checks the outward appearance of basic pattern 8, correction back pattern 8a and correction 8b thereupon.
Do not have the shape of expectation if revise back pattern 8a, then be independent of basic pattern data block 911 and design modification regular data piece 913b and change drawing modification rule data block 913 (step S271), and (step S25 and S26) such as back pattern 8a revised in demonstration on display 315.When revising the shape (step S27) that back pattern 8a obtains expecting, generate parts 3333 and revise the basic pattern data block 911 of cartographic data 91 together by revising the back data, revise back data 93 (step S28) to generate according to design modification rule 103a and drawing modification rule 103.
In the data generation system of second preferred embodiment, when generating correction back data 93 by cartographic data generation equipment 31, charge information parts 335 provide about using cartographic data to generate the information of equipment 31, and the charge information that the server in the design department 2 22 upgrades in the mapping agency 3 generates final data (step S29 and S30) based on revising back data 93 afterwards.Replacement is in process that generate to revise back data 93 or generating outside the process of revising back data 93, the information that can provide 335 that send by the charge information parts in the process that generates final data, generates equipment 31 operating positions about cartographic data.
As mentioned above, in the data generation system of second preferred embodiment, because generating equipment 21, basic pattern adds design modification rule 103a in the design department 2 basic pattern data block 911, therefore can in design department 2, manage part correction (in other words, design modification rule 103a and drawing conditional independence) for basic pattern 8.As a result, in design department 2 and mapping agency 3, can both suitably generate data 93 and final data after the correction of satisfying design limit condition (that is, design modification rule 103a and drawing modification rule 103).Because design modification rule 103a is described separately with basic pattern data block 911, thus can be in mapping agency 3 the comprehensible intention of in design department 2, revising.
In the data generation system of second preferred embodiment,, generate automatically wherein and add drawing modification rule data block 913 cartographic data 91 of basic pattern data block 911 to similar in the data generation system 1 of first preferred embodiment.In cartographic data 91,, therefore can improve the efficient of layout, and carry out the meticulous change of pattern easily owing to basic pattern and the modification rule that can specify respectively in the drawing.In addition, revise back data 93 easily to generate, therefore can improve the efficient of layout owing to revise cartographic data 91 according to the drawing condition in the mapping agency 3.
Although the preferred embodiments of the present invention have been discussed above, the present invention is not limited to above preferred embodiment, but allows various changes.
For example, cartographic data 91, video data 92 and revise back data 93 can with SGML for example SGML (standard generalized markup language) and HTML (supertext SGML) or page-description language for example PostScript describe, perhaps also can describe with other various descriptive languages.
From simplifying the viewpoint of data processing, although the data block of cartographic data 91, video data 92 and correction back data 93 (for example, the basic pattern data block 911 of cartographic data 91, rule are added index 912 and modification rule data block 913) be preferably and should describe with identical descriptive language, but these data blocks also can be described with the descriptive language separately or the descriptor format that are easy to data processing according to content separately.For example, can have such situation, wherein modification rule data block 913 is described with XML, and in basic pattern data block 911, the identifier and the title of expression pattern element type are described with scale-of-two and ASCII character respectively.
In data generation system, if the data capacity of cartographic data 91 greatly (for example becomes, the pattern element quantity change that comprises in basic pattern 8 is big or the like), then can there be such situation, the identifier (i.e. " ruleId ") of wherein only representing the modification rule type is added in the cartographic data 91 as modification rule data block 913 or 913a or design modification rule database piece 913b, and when revising basic pattern data block 911, will corresponding to the modification rule of " ruleId " from database 3142 or 2142 sequence calls to internal memory.Being not necessarily limited to be added to the modification rule 103 of cartographic data 91 is a modification rule that extracts from database 3142, and can be through the direct modification rules of input of input block 316 by the operator.This is equally applicable to be added to the design modification rule 103a in the basic pattern generation equipment 21 of the data generation system of second preferred embodiment.
If in the cartographic data generation equipment 31 of data generation system, do not check, then can omit the operation (inspection of the generation of video data, the demonstration of pattern form, correction back pattern) of the step S25 to S27 of Fig. 6 B to revising the back pattern.
In data generation system, can realize that generating cartographic data in the equipment 31 with cartographic data generates the corresponding function of parts 333 by other data generating apparatus that is provided with on the communication network 9.In this case, in mapping agency 3, the operator uses cartographic data to generate equipment 31 as the terminal that is linked into above-mentioned other data generating apparatus via communication network 9, generates thus and revises back data 93 and final data.In mapping agency 3, carry out generating the management, renewal etc. of database 3142 of hard disk 314 stored of equipment 31 at cartographic data.
In data generation system, can provide and manage the server 22 that charge information is managed in the department except design department 2.If design department 2 belongs to identical company and do not need accounting management with mapping agency 3, then can omit server 22 and charge information parts 335 in the cartographic data generation equipment 31.
Can realize generating the function of equipment 21 and 31 realizations of cartographic data generation equipment by single data generating apparatus by the basic pattern that is connected to communication network 9 in the data generation system.Figure 27 is the block diagram that the function of above-mentioned data generating apparatus and other formation is shown.In Figure 27, with the function of the data generation system 1 of Fig. 3 with constitute those identical functions of element and constitute element and represent by identical Reference numeral.
Data generating apparatus has the data base administration parts 334 that the data that are used to generate cartographic data etc. generate parts 113 and are used to manage the database 3142 of hard disk 314 stored.Data generate parts 113 to be had basic pattern generation parts 2331, index interpolation parts 3331, modification rule interpolation parts 3332, revises back data generation parts 3333, final data generation parts 3334 and modification rule change parts 3335, and data base administration parts 334 have Data Update parts 3341 and data extract parts 3342.
In data generating apparatus, with similar in data generation system 1, receive basic pattern cad data 90 (referring to Fig. 8) by Data Receiving parts 231, and generate parts 113 and data base administration parts 334 generation cartographic datas 91 (referring to 13) by data, this cartographic data 91 has basic pattern data block 911, the rule described with XML and adds index 912 and modification rule data block 913.Subsequently, video data 92 (referring to Figure 16) is generated and is sent to data output section part 332, and its pattern form is being presented on the display of data generating apparatus under the control of display control unit spare 3321.According to after needing to change modification rule data block 913, revise basic pattern data block 911 according to the modification rule in the modification rule data block 913, revise back data 93 (referring to Figure 18) to generate, generate final data based on revising back data 93 then.
Although illustrated and described the present invention particularly, foregoing description all is illustrative and nonrestrictive in all respects.Therefore it should be understood that under the condition that does not depart from the scope of the present invention, can carry out multiple remodeling and variation the present invention.
Claims (23)
1. a data generation system is used for being created on the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens and forms the used cartographic data of geometric scheme on substrate, and this data generation system comprises:
Basic pattern generates parts, and it is used to generate the data of expression basic pattern, thereby generates the cartographic data that has as the described data of basic pattern data block, and wherein this basic pattern is the set of diagrams case element of arranging on the substrate; And
Modification rule adds parts, it is used for adding the modification rule data block to described cartographic data, and described modification rule data block is represented according to the composite type of the single pattern element type that comprises in the described basic pattern or a plurality of pattern elements the modification rule that obtains in the drawing operation.
2. data generation system as claimed in claim 1 also comprises:
Modification rule changes parts, and it is used to be independent of described basic pattern data block and changes the modification rule of being represented by described modification rule data block.
3. data generation system as claimed in claim 1, wherein
Described modification rule adds parts and is independent of described basic pattern data block and adds described modification rule data block, with it as the data block of describing in the described cartographic data.
4. data generation system as claimed in claim 1 also comprises:
The memory unit that is used for stored data base, wherein this database is the set of a plurality of data elements, each data element all is associated modification rule with keyword message, described keyword message comprises the composite type and the drawing condition of single pattern element type or a plurality of pattern elements
Wherein said modification rule adds parts and extracts the modification rule related with keyword message from described database, this keyword message comprises the composite type and the predetermined drawing condition of single pattern element type contained in the described basic pattern or a plurality of pattern elements, and described modification rule is added in the described cartographic data.
5. data generation system as claimed in claim 1 also comprises:
Revise the back data and generate parts, it is used for by one of combination of one or more pattern element of the modification rule of specifying and described modification rule data block is represented a plurality of pattern elements related, that represented by described basic pattern data block, and revise a combination of a specified pattern element or specified a plurality of pattern elements according to described modification rule, generate pattern data after the correction that is used to chart.
6. data generation system as claimed in claim 1 also comprises:
Output block, it is used for by one of combination of one or more pattern element of the modification rule of specifying and described modification rule data block is represented a plurality of pattern elements related, that represented by described basic pattern data block, and revise a combination of a specified pattern element or specified a plurality of pattern elements according to described modification rule, generate pattern data after the correction that is used to show; And pattern is exported described basic pattern and the described difference of revising between the pattern of back after described basic pattern that is used to show or described correction.
7. a data generation system is used for being created on the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens and forms the used cartographic data of geometric scheme on substrate, and this data generation system comprises:
Basic pattern by the design division management generates equipment, and it is used to generate the data of expression basic pattern, thereby generates the cartographic data that has as the described data of basic pattern data block, and wherein this basic pattern is the set of diagrams case element of arranging on the substrate; And
The cartographic data of being managed by the mapping agency of described pattern generates equipment, and it is used for adding the modification rule data block to received via communication network by described basic pattern generation equipment described cartographic data, and generates correction back pattern data,
Wherein said basic pattern generation equipment comprises:
Modification rule adds parts, it is used for adding the modification rule data block to described cartographic data, and described modification rule data block is represented according to the composite type of the single pattern element type that comprises in the described basic pattern or a plurality of pattern elements the modification rule that obtains in the drawing operation; And
Revise the back data and generate parts, it is used for by one of combination of one or more pattern element of the modification rule of specifying and described modification rule data block is represented a plurality of pattern elements related, that represented by described basic pattern data block, and revise a combination of a specified pattern element or specified a plurality of pattern elements according to described modification rule, generate pattern data after the correction that is used to chart.
8. data generation system as claimed in claim 7, wherein
Described basic pattern generates equipment and comprises that also another modification rule adds parts, and its another modification rule that was used for before described cartographic data is sent to described cartographic data generation equipment being used to revise described basic pattern adds described cartographic data to.
9. a cartographic data generates equipment, is used for being created on the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens and forms the used cartographic data of geometric scheme on substrate, and this cartographic data generation equipment comprises:
Modification rule adds parts, it is used for adding the modification rule data block to cartographic data, this cartographic data has the data as the expression basic pattern of basic pattern data block, described basic pattern is the set of diagrams case element of arranging on the substrate, and wherein said modification rule data block is represented according to the composite type of the single pattern element type that comprises in the described basic pattern or a plurality of pattern elements the modification rule that obtains in the drawing operation; And
Revise the back data and generate parts, it is used for by one of combination of one or more pattern element of the modification rule of specifying and described modification rule data block is represented a plurality of pattern elements related, that represented by described basic pattern data block, and revise a combination of a specified pattern element or specified a plurality of pattern elements according to described modification rule, generate pattern data after the correction that is used to chart.
10. cartographic data as claimed in claim 9 generates equipment, also comprises:
The memory unit that is used for stored data base, wherein this database is the set of a plurality of data elements, each data element all is associated modification rule with keyword message, described keyword message comprises the composite type and the drawing condition of single pattern element type or a plurality of pattern elements
Wherein said modification rule adds parts and extracts the modification rule related with keyword message from described database, this keyword message comprises the composite type and the predetermined drawing condition of single pattern element type contained in the described basic pattern or a plurality of pattern elements, and described modification rule is added in the described cartographic data.
11. cartographic data as claimed in claim 9 generates equipment, also comprises:
The charge information parts, it is used for providing information via communication network to predetermined counting equipment when data generation parts in described correction back are revised.
12. cartographic data as claimed in claim 9 generates equipment, also comprises:
The charge information parts, it is used for providing information via communication network to predetermined counting equipment when generating the final data that is used to chart based on described correction back pattern data.
13. a method that generates cartographic data, described cartographic data are used for forming geometric scheme in the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens on substrate, described method comprises the following steps:
A) generate the data of expression basic pattern, thereby generate the cartographic data that has as the described data of basic pattern data block, wherein this basic pattern is the set of diagrams case element of arranging on the substrate; And
B) the modification rule data block is added in the described cartographic data, described modification rule data block is represented according to the composite type of the single pattern element type that comprises in the described basic pattern or a plurality of pattern elements the modification rule that obtains in the drawing operation.
14. the method for generation cartographic data as claimed in claim 13 also comprises the following steps: between described step a) and described step b)
Extract the modification rule related from database with keyword message, described keyword message comprises the single pattern element type that comprises in the described basic pattern or the composite type and the predetermined drawing condition of a plurality of pattern elements, described database is the set of a plurality of data elements, each data element all is associated modification rule with keyword message, described keyword message comprises the composite type and the drawing condition of single pattern element type or a plurality of pattern elements.
15. the method for generation cartographic data as claimed in claim 13 also comprises the following steps: after described step b)
One of combination of one or more pattern element by the modification rule of specifying and described modification rule data block is represented a plurality of pattern elements related, that represent by described basic pattern data block, and revise a combination of a specified pattern element or specified a plurality of pattern elements according to described modification rule, generate pattern data after the correction that is used to chart.
16. a method that generates cartographic data, described cartographic data are used for forming geometric scheme in the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens on substrate, described method comprises the following steps:
The modification rule data block is added in the cartographic data, this cartographic data has the data as the expression basic pattern of basic pattern data block, described basic pattern is the set of diagrams case element of arranging on the substrate, and wherein said modification rule data block is represented according to the composite type of the single pattern element type that comprises in the described basic pattern or a plurality of pattern elements the modification rule that obtains in the drawing operation; And
One of combination of one or more pattern element by the modification rule of specifying and described modification rule data block is represented a plurality of pattern elements related, that represent by described basic pattern data block, and revise a combination of a specified pattern element or specified a plurality of pattern elements according to described modification rule, generate pattern data after the correction that is used to chart.
17. a computer-readable recording medium that carries cartographic data, this cartographic data are used for forming geometric scheme in the process of making printed circuit board (PCB), Semiconductor substrate or flat-panel screens on substrate, wherein said cartographic data comprises:
The basic pattern data block, it represents basic pattern, this basic pattern is the set of diagrams case element of arranging on the substrate; And
The modification rule data block, the modification rule that its expression is obtained in the drawing operation according to the composite type of the single pattern element type that comprises in the described basic pattern or a plurality of pattern elements.
18. storage medium as claimed in claim 17, wherein
Described modification rule data block in described cartographic data comprises the intrinsic modification rule of equipment that is used to chart.
19. storage medium as claimed in claim 17, wherein
Modification rule in described modification rule data block adds identifier, and this identifier is represented the modification rule type or used the type of single pattern element of modification rule or the composite type of a plurality of pattern elements.
20. storage medium as claimed in claim 17, wherein
Described basic pattern data block in described cartographic data is described with identical descriptive language with described modification rule data block.
21. storage medium as claimed in claim 20, wherein
Described basic pattern data block in described cartographic data and described modification rule data block are described with SGML or page-description language.
22. storage medium as claimed in claim 17, wherein
Described basic pattern data block and described modification rule data block in described cartographic data are described as independent data block.
23. storage medium as claimed in claim 17, wherein
Described modification rule data block in described cartographic data comprises the modification rule that is used for revising according to the length of wiring the width of wiring described in the pattern.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004354127 | 2004-12-07 | ||
| JP2004354127A JP2006162954A (en) | 2004-12-07 | 2004-12-07 | Pattern formation data |
| JP2004354129 | 2004-12-07 | ||
| JP2004354128 | 2004-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1786969A true CN1786969A (en) | 2006-06-14 |
Family
ID=36665055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510124881 Pending CN1786969A (en) | 2004-12-07 | 2005-11-23 | Data generating system, patterning data generating apparatus, method of generating patterning data and storage medium carrying patterning data |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2006162954A (en) |
| CN (1) | CN1786969A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104978755A (en) * | 2014-04-10 | 2015-10-14 | 新日铁住金系统集成株式会社 | Raph generating device, graph generating method and graph generating program |
| CN109558620A (en) * | 2017-09-11 | 2019-04-02 | 应用材料以色列公司 | Generate the method and its system of inspection scheme |
| CN110488567A (en) * | 2018-05-10 | 2019-11-22 | 长鑫存储技术有限公司 | Light shield apparatus |
| US11016736B2 (en) | 2018-07-12 | 2021-05-25 | Applied Materials, Inc. | Constraint programming using block-based workflows |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4553153B2 (en) * | 2007-03-06 | 2010-09-29 | 日本電気株式会社 | Circuit graphic generation apparatus and generation method |
| JP4877557B2 (en) * | 2008-04-23 | 2012-02-15 | Ｎｅｃアクセステクニカ株式会社 | Data conversion apparatus, CAD system, automatic data creation method used therefor, and program thereof |
-
2004
- 2004-12-07 JP JP2004354127A patent/JP2006162954A/en not_active Abandoned
-
2005
- 2005-11-23 CN CN 200510124881 patent/CN1786969A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104978755A (en) * | 2014-04-10 | 2015-10-14 | 新日铁住金系统集成株式会社 | Raph generating device, graph generating method and graph generating program |
| CN104978755B (en) * | 2014-04-10 | 2018-10-02 | 新日铁住金系统集成株式会社 | Figure generating means, drawing generating method and computer read/write memory medium |
| CN109558620A (en) * | 2017-09-11 | 2019-04-02 | 应用材料以色列公司 | Generate the method and its system of inspection scheme |
| CN110488567A (en) * | 2018-05-10 | 2019-11-22 | 长鑫存储技术有限公司 | Light shield apparatus |
| US11016736B2 (en) | 2018-07-12 | 2021-05-25 | Applied Materials, Inc. | Constraint programming using block-based workflows |
| TWI739111B (en) * | 2018-07-12 | 2021-09-11 | 美商應用材料股份有限公司 | Method, system, and computer-readable medium for constraint programming using block-based workflows |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006162954A (en) | 2006-06-22 |
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