CN1784519A - Plasma treatment apparatus and method - Google Patents

Plasma treatment apparatus and method Download PDF

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Publication number
CN1784519A
CN1784519A CN 200480012142 CN200480012142A CN1784519A CN 1784519 A CN1784519 A CN 1784519A CN 200480012142 CN200480012142 CN 200480012142 CN 200480012142 A CN200480012142 A CN 200480012142A CN 1784519 A CN1784519 A CN 1784519A
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China
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electrode
plasma
separates
gas
gas permeability
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CN 200480012142
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CN100359087C (en
Inventor
尼尔·芬恩
拉迪斯拉弗·柯维兹
朱尔格·舒茨
安东尼·法默尔
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Commonwealth Scientific and Industrial Research Organization CSIRO
Australian Wool Innovation Ltd
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Commonwealth Scientific and Industrial Research Organization CSIRO
Australian Wool Innovation Ltd
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Abstract

A plasma treated gas permeable material is produced by applying an alternating voltage between spaced electrodes, at least one of which is covered with a dielectric barrier and at least one of which comprises a plurality of discrete electrode segments, to generate plasma microdischarges between the spaced electrodes. A gas permeable material is passed between or adjacent to the spaced electrodes. A gas is moved between the electrode segments into and through the space between the electrodes and through the gas permeable material. The gas flows over plasma generation surfaces of the respective electrode segments and is moved at a rate whereby the gas flow between the spaced electrodes is turbulent and so randomises the plasma microdischarges and disperses plasma products that would otherwise give rise to burning instabilities in the gas permeable material, whereby the randomized plasma microdischarges provide a generally uniform plasma treatment of the gas permeable material. Also disclosed is an apparatus for laying out the process.

Description

Apparatus for processing plasma and method
Technical field
The present invention relates to a kind of method and apparatus of Cement Composite Treated by Plasma of gas permeability material, for example: fibrous material.The present invention is particularly useful when being used to handle wool.
Background technology
Plasma is widely used in material processed to change the surface characteristic of material.Usually, quite useful in this processing in the equally distributed place of material surface.When being used for wool fibre, Cement Composite Treated by Plasma is used for the lipid layer on oxidized fibre surface.The oxidation of lipid layer can make wool fibre more can accept follow-up surface treatment, and for example: shrinkproof water treatment and resistance balling-up are handled.
Remove lipid layer and can also increase frictional force between the fiber.Can more help spinning process like this, few more good more because spinning requirement is reeled.The coiling of reduced levels can improve the yarn efficient of spinning, thereby can make downstream process move sooner, thereby increases output.In addition, compare with the higher yarn of reeling, the texture that yarn presented of low-level coiling is more soft, thereby compares with the yarn of being reeled by height, more helps being used for the desired more soft clothes in production market.
The Cement Composite Treated by Plasma that wool or other fibrous material are carried out must provide uniform surface treatment to guarantee that material more can be that the downstream processes on the production line is accepted.If the surface of material does not have uniform treatment, downstream process just can not reach the designed effect that reaches so, will produce substandard products.
Cement Composite Treated by Plasma be on the other hand wool and other fibrous material easily in Cement Composite Treated by Plasma by localized burn.In addition, when production line was taken in the continuous supply of requirement material, this did not wish to take place very much.The generation of localized burn when therefore, best Cement Composite Treated by Plasma should minimum material be handled.
Some existing processing materials comprise that with the plasma generation technology voltage and the frequency that adjustment applies obtains to stablize, uniform plasma.This type of plasma produces being higher than or being lower than under the gas pressure of atmospheric pressure usually.Recently, the development of the Cement Composite Treated by Plasma technology of carrying out under atmospheric pressure comprises uses expensive inert gas to send uniform aura with making plasma stability, and it is suitable for the surface treatment of material.Be higher than or be lower than atmospheric pressure Cement Composite Treated by Plasma and comprise that the Cement Composite Treated by Plasma of inert gas is all less feasible economically because of its cost.Correspondingly, in air, become the focus of interest with the Cement Composite Treated by Plasma of under atmospheric pressure, carrying out.
People such as Roth (Roth et al) point out in United States Patent (USP) 5403453, produce uniform aura and release electro-plasma under an atmospheric pressure, wherein are trapped between the electrode by the ion that produces with electrical breakdown helium and/or air.Roth points out that the ion trapping has increased the life-span of plasma intermediate ion, thereby causes lower electrical breakdown thresholding and glow discharge uniformly.People (Gherardi et al) such as Gherardi has also proposed similar theory in United States Patent (USP) 6299948, and this patent is awarded and given L ' Air Liquide.According to people's such as Roth theory, such trapping can obtain by apply the radio frequency alternating electric field between the electrode that separates.Electrode spacing when people such as Roth have provided the trapping of generation ion, the relation between electrode voltage and the frequency that applies.
International monopoly publication WO 02/094455 has disclosed a kind of Cement Composite Treated by Plasma of carrying out under atmospheric pressure, wherein by introducing air-flow on the inclined-plane of vertical symmetry, and distribute at elongated releasing obtained the space homogeneous on the electrode little electricity of releasing.The structure of relative complex comprises a plurality of passages of drawing from the distribution of gas chamber.
United States Patent (USP) 5403453 has been described under a kind of about atmospheric pressure, preferably is higher than the plasma treatment station that is used for polymer belt (strip) of atmospheric pressure a little, and wherein gas blows out in one group of hole of one from the plate electrode at the interval of a pair of sealing.Utilize disorderly high speed to transmit the formation that gas postpones and destroy thread discharge.
An object of the present invention is to provide the Cement Composite Treated by Plasma technology of improvement, to be used to handle the gas permeability material.
Summary of the invention
The inventor recognizes that the uneven reason of plasma is the survival ion of generation in the previous plasma generation cycle under the normal atmosphere (An), thereby has caused electrical breakdown to be concentrated by these ions, for example: at identical point.Normal dielectric barrier layer is released electro-plasma and is littlely released electric body and forms each lasting several nanosecond by a plurality of.Drive plasma by the high pressure that alternately changes between the electrode.The alternating voltage plasma of each half period is all released the outburst of electric body and is produced by little.Be not easy under normal conditions to disperse from each little ion of releasing electric body, and compare with ambient gas and to have lower resistance, cause that little electricity of releasing is repeatedly same local the generation.This has become the non-constant of handling of uniformity with regard to good fortune, can not use all available gases to generate useful chemical composition by plasma.
Further, little localization of releasing electric body has increased the unsettled possibility of generation high temperature in plasma, the pending material of therefore can burning.What seem this situation is owing to the local cause that discharges of the plasma of special chemical substance on the material surface, wherein has the pollutant of high concentration.The generation of these chemical substances has changed the character of plasma, thereby causes energy of plasma in the too much absorption of part and the quick rising of temperature.Little localization of releasing electric body can cause two effects.The first, the ion static with respect to electrode caused the little localization of releasing electric body of plasma between the electrode, and makes surface treatment become inhomogeneous, and effect is also not too obvious.The second, ion and in the gas permeability material, caused the plasma localization of relative material with respect to the trapping of the plasma material accessory substance of electrode movement, thus cause the material burn.
Further recognize, plasma little localization of releasing electric body stoped when producing plasma the full dose utilization of obtainable gas, thereby limited the concentration of active component, these active components help improving the surface chemistry of material.
Therefore, the present invention has used air blast by the gas permeability material, and voltage alternating in the cycle and between, by dispersing and/or remove between the electrode or the ion in the gas permeability material and unwanted chemical substance stop the little formation of releasing electric body localization of plasma.Therefore, the present invention can provide evenly, effective Cement Composite Treated by Plasma, wherein used voltage, and frequency and electrode spacing parameter are outside the scope of Roth theory provision.But the dielectric barrier layer even, effectively Cement Composite Treated by Plasma use filament shape random distribution that embodiments of the invention provided is released electro-plasma, and the pending material of can not burning; Rather than as Roth and the uniform glow discharge of other people described generations.
First aspect the invention provides a kind of method of gas permeability material of production Cement Composite Treated by Plasma, may further comprise the steps:
(a) produce that plasma is little releases electric body between with the electrode that is separating applying alternating voltage between the electrode that separates, have at least on one in the electrode that separates to be coated with dielectric barrier layer, and at least one comprises the electrode section of a plurality of separation;
(b) between the described electrode that separates or near by the gas permeability material; With
(c) between described electrode section, feed gas, make it to enter and by space and gas permeability material between the electrode, the surface takes place in the plasma that gas flows through the respective electrode section, and flow with particular rate, thereby guarantee that the air-flow between the electrode that separates is in turbulent condition, thereby making that plasma is little releases electric body randomization, and makes the product of plasma spread out, otherwise these products can cause the unstability of burning in the gas permeability material.
Randomized thus plasma is little releases electric body provides equally distributed Cement Composite Treated by Plasma for the gas permeability material.
Be appreciated that in the space between electrode and disperse and/or to remove the static survival ion of comparative electrode by gas.Further, the ion of gas permeability material capture is by dispersing gas and/or remove by material.Therefore, the plasma that next time produces is little releases electric body and can not release electric body and repeat on same point with former plasma is little.Therefore randomized plasma is little releases electric body also provides time averaging homogeneous plasma, and this plasma is suitable for handling equably the surface of gas permeability material.Correspondingly, the surface characteristic uniformity of the gas permeability material of Chu Liing is better in this way, and the little electric body burn of releasing of the plasma that is unlikely localized.
In a preferred embodiment, gas moves on the direction of traversing gas permeability material passage between the electrode that separates.
In special preferred embodiment, can make processing method become more convenient by following step: between electrode, to apply voltage with the certain frequency alternation, make it possible to disperse and/or remove the plasma byproducts in the flowing gas, otherwise these accessory substances can cause the little localization of releasing electric body of plasma.Can use any frequency, but the frequency range that the typical case uses be 1kHz to 20kHz, preferred frequency range is that 1kHz is to 5kHz.
As additional advantage, flowing gas not only can be removed ion, can also remove harmful plasma byproducts, for example: O 3And NO 2
The gas of Shi Yonging can be any gas that electrical breakdown produces plasma that is suitable in the method, for example: and inert gas or the gas of not having an effect with material, but air is preferred.In addition, the pressure of used gas can be higher than atmospheric pressure in this method, also can be lower than atmospheric pressure.Advantageously, gas pressure is an atmospheric pressure.
The exemplary voltages scope that is applied between the electrode that separates is that 10kV is to 25kV.
According to the content of first aspect, the present invention further provides the equipment of the plasma that is used to handle the gas permeability material, this equipment comprises:
(a) electrode that separates wherein has at least one to be coated with dielectric barrier layer, and has an electrode section that comprises a plurality of separation at least;
(b) be used for applying the equipment of alternating voltage between the described electrode that separates, plasma is little releases electric body to produce between the described electrode that separates;
(c) be used between the described electrode that separates or near the means that play a role of the passage of gas permeability material; With
(d) be used for and feed gas between the described electrode section and to make it means by passage between the aforesaid electrode and gas permeability material, gas flows through the plasma generation surface of each electrode section, and move with certain speed, thereby the air-flow between the electrode that separates is in disturbance state, therefore the plasma that makes is little releases electric body randomization, and disperse the product of plasma, otherwise these products will cause the unstability of burning in the gas permeability material;
Thus, randomizedly littlely release electric body and can provide the overall uniform Cement Composite Treated by Plasma for the gas permeability material.
Voltage applies means and preferably applies certain frequency electrode, and this makes it possible to disperse and/or remove plasma byproducts from mobile gas, and these accessory substances can cause the little localization of releasing electric body of plasma; Can adopt any frequency, but the frequency range that the typical case uses can be 1kHz to 20kHz, and preferred frequency range is that 1kHz is to 5kHz.
Advantageously electrode is spaced allowing the relative motion of material therebetween, and can produce the required minimum power of plasma.Preferably, the scope of electrode spacing be 2mm to 10mm, most preferably be about 4mm.
In a preferred embodiment, the electrode preferred shape that separates allows gas to pass through the gas permeability material on the direction of traversing material passage direction between the described spaced-apart electrodes.
Particularly, first electrode in the electrode that separates is breathed freely, and is preferably latticed.
The adjacent about 0.5mm of separate mesh electrode section preferred interval is to 2mm.
The means of opening the gas passage in the gas permeability material can comprise a rotatable cylinder (drum), the curved surface of cylinder comprises first electrode, second electrode comprises the electrode section of described separation, these electrode sections make the gas permeability material shelf on first electrode between first and second electrodes around the cylinder concentric arrangement thus.
No matter equipment of the present invention aspect above-mentioned that, all be particularly suitable for fibrous material and textiles, for example: wool, the particularly processing of wool strip.
In a second aspect of the present invention, the invention provides the electrode that is used to make plasma generation, this electrode comprises:
(a) conducting element;
(b) dielectric cap around the conducting element; With
(c) liquid conducting medium, it connects conducting element and dielectric cap, thus the even contact of liquid medium formation and dielectric cap.
Liquid medium is preferably between conducting element and dielectric cap.Dielectric cap preferably fully around or surround conducting element, for example so that the latter forms the core of electrode.
Even contact between liquid medium and the dielectric cap has guaranteed that electric current is evenly distributed in the surface of dielectric cap.This promotes the electrical breakdown randomization of the gas between the electrode, thereby obtains more uniform plasma.The electric field at spike point place is concentrated in this electrode structure of also having avoided not expected, and electrode structure Tipping Center peak dot place electric field is concentrated the probability that increases electrical breakdown.When using dielectric media, this is a particular importance, is coupled to the maximizing efficiency of plasma in order to make electric field energy, preferably uses dielectric media.Fluid conductors also helps the even distribution of heat in the electrode, thereby thermal stress is minimized.
Fluid conductors can be transparent, therefore can observe and/or optical measurement by the article on plasma body, and this is impossible with traditional electrode.
As preferably, the electrical conductivity of liquid medium is one and relies on the controlled variable that composition changes.
Though the electrode of second aspect present invention can be an Any shape, preferably elongated can be columniform also.
Description of drawings
Below by example, with reference to the accompanying drawings, the preferred embodiments of the present invention are described.
Fig. 1 is the schematic cross-section according to the apparatus for processing plasma of the preferred embodiment of the present invention, and it particularly is suitable for handling the wool strip;
Fig. 2 is the sectional view that an equipment part is amplified among Fig. 1;
Fig. 3 is the perspective illustration that the equipment among Fig. 1 is removed second electrode;
Fig. 4 is the imperfect perspective view of the second electrode partial cross section;
Fig. 5 is the perspective view of the replaceable layout of second electrode; With
Fig. 6 is the sectional view according to the apparatus for processing plasma of alternative embodiment of the present invention.
The specific embodiment
At first see figures.1.and.2, apparatus for processing plasma 30 comprises a hollow, rotatable cylinder 40 as can be seen, first electrode that has the form with mesh electrode 60 to form on the crooked outer surface of cylinder 40 on it.Equipment 30 further comprises one second electrode, and it forms a plurality of stick electrode 70, and these stick electrode outwards separate radially from mesh electrode 60.
Mesh electrode 60 comprises coarse grids 62, the fine grid blocks 64 above it supports.Fine grid blocks 64 forms the position by the potential plasma that big array is provided and stops the little localization of releasing electric body of plasma, compare with coarse grids 62, the potential plasma that wherein reduces quantity forms the position will cause usually that plasma is little releases electric body localization.
As shown in Fig. 1 and Fig. 3, tubular core 44 and wedge shaped baffle 42 are arranged on the cylinder 40, wedge shaped baffle 42 extends to the periphery of cylinder 40 from core.Core 44 extends through cylinder 40, and has opening 46 to allow the hollow inside that flows to core 44 of gas from cylinder 40.Core 44 is fixed on the aspirator 50 by the form of pipeline 48 with industrial air blast.Also have, motor 52 driving wheels 54, wheel 54 can meshing drivingly cylinder 40 so that cylinder 40 relative stick electrode 70 rotate.
The gas permeability material is wool strip (wool silver) 56 in this example, by roller 58 from the raw material source feed to equipment 30.Wool 56 is sent to the space between mesh electrode 60 and the stick electrode 70, and wherein wool 56 is subjected to Cement Composite Treated by Plasma.At last, the wool of handling 56 leaves this space and is sent in the downstream equipment by roller 58.
Though the Cement Composite Treated by Plasma that material is suitable depends on the time of staying of material in plasma, but provide the suitable Cement Composite Treated by Plasma of use equipment 30, wherein stick electrode 70 covers the surface of the 0.8m of cylinder 40 to 1m, and cylinder 40 makes wool strip 56 pass through equipment 30 with the speed of about 20m/min with certain speed rotation.
In operation, aspirator 50 draw gas, preferably the air under the environment atmospheric pressure between the stick electrode 70 makes it the space by stick electrode 70 and mesh electrode 60, and enter in cylinder 40 hollow by mesh electrode 60, enter tubular core 44 via opening 46 then.If not, also can use interchangeable gas, for example inert gas.Though preferred gas pressure is an environment atmospheric pressure, also can use the pressure that is higher or lower than environment atmospheric pressure.The detail of the air-flow between stick electrode 70 and the mesh electrode 60 will go through in the part of back.
Along with wool 56 contacts with mesh electrode 60, flow to cylinder 40 hollow air and work to keep wool 56 to contact with mesh electrode 60.By this way, wool 60 or other similar gas permeability material remain on the mesh electrode 60, and at wool 56 pack or folding can not take place in the process that moves with respect to stick electrode 70.Baffle plate 42 promotes to remove wool 56 from mesh electrode 60, because air does not flow through near the section of the mesh electrode 60 the baffle plate 42.Do not have air to flow through this section mesh electrode 60 and discharge the wool 56 that contacts with mesh electrode 60.
Just can realize the Cement Composite Treated by Plasma of gratifying material by apply 10kV between mesh electrode 60 and stick electrode 70 to alternating voltage between the 20kV, the frequency of this voltage is an optional frequency, but the optimized frequency scope 1 in 5kHz.Though mesh electrode 60 is a ground connection, alternating voltage is applied on the stick electrode 70 from suitable bus bar through cable 82 by power supply 85.
As can be seen from Figure 2, air current A, B and C traverse the direction of motion of wool 56, the direction of motion of wool 56 such as arrow M indication.By this way, the gas interval between mesh electrode 60 and the stick electrode 70 of flowing through, and enter the hollow of cylinder 40 by wool 56.Pass the product that the air that flows through material in the process that does not have the plasma zone is used for dispersing or removing plasma, for example static ion and unwanted chemical substance with respect to material, thereby can stop the instable generation of mobile burn.In interchangeable embodiment, air-flow can be by the space between mesh electrode 60 and the stick electrode 70, and with the parallel or antiparallel direction of moving direction of the wool 56 indicated by arrow M on by wool 56.
By every with distance S, so that to the gas A of internal flow, as shown by arrow B, present turbulent flow on the plasma generation surface of stick electrode 70, stick electrode 70 is near mesh electrode 60 or relative between the stick electrode 70.If too big apart from S, slower to the flow rate of the gas A of internal flow so, and can be more directly between the contiguous stick electrode 70 that separates by mesh electrode 60, and stick electrode 70 lip-deep throughputs are lower.Yet if too little apart from S, the load of being born on the aspirator 50 will increase, and requires more powerful aspirator 50 reaching air velocity simultaneously, and this air velocity can remove that survival ion and randomization plasma are little releases electric body.The applicant has been found that stick electrode 70 just can guarantee acceptable disorderly air-flow and receivable airflow rate on stick electrode 70 surfaces at adjacent web electrode 60 at 0.5mm to the interval S between the 2mm.
Stick electrode 70 and mesh electrode 60 optimizations separate so that wool 56 can move therein, also are minimized in the little required power of electric body of releasing of the last generation plasma of this distance simultaneously.When wool strip 56 used in equipment 30, stick electrode 70 and mesh electrode 60 were at a distance of about 4mm.Yet this distance will change between the 10mm at scope 1mm along with the difference of gas permeability material in the equipment.
The air in space between mesh electrode 60 of flowing through and the stick electrode 70, disperse and/or remove previous remaining ion of plasma generation cycle, so that plasma afterwards is little to be released electric body and be created on the random site between stick electrode 70 and the mesh electrode 60, rather than repeatedly be created in the position of survival ion.Therefore, the dispersing and/or remove of the survival ion static with respect to electrode can make the little randomization of releasing electric body of plasma, thereby provides the plasma of general randomization for handling wool 56.And the high velocity air that flows through wool 56 can also disperse and/or remove the ion that is trapped in the wool 56 and other plasma products, thereby avoids wool 56 burns, and this is because little with respect to the heat-flash plasma of the localization of wool 56.Avoided the unstability of burn just can use higher energy density, thereby higher levels of processing can be provided, perhaps,, can use higher processing speed for given treated length and/or transfer rate.
The further benefit of gas motion comprises: thus (i) gas is disorderly mixes so that the obtainable gas of better utilization institute generates the short life active material of higher concentration, thus wool 56 is done the surface processing; (ii) carry ozone so that by the plasma generation active material, thereby can promote the quality of Cement Composite Treated by Plasma wool 56; (iii) remove the harmful side product of plasma, for example O3, NO2 and other flue gas.
By example, be 5 for the electrode spacing of 2mm, airflow rate desirable between the stick electrode 70 is greater than 1.8m/s.Usually, minimum airflow rate depends on various parameters, comprises the interaction of power, voltage, frequency and processed material.
As shown in Figure 4, each stick electrode 70 all comprises conductive core 72, its preferably for example by metallic conductor: copper forms.In the periphery of core 72, around dielectric cap, in this example, this dielectric cap is formed by the glass tube 76 of end sealing.Conducting medium 74 separates core 72 and glass tube 76.The material that is filled in space between electric conductor and the glass can conduct electricity, and also can be nonconducting, still, maximizes preferred conductive material for the thickness that makes dielectric barrier layer minimizes and make the uniformity of electrode.
In the embodiment of second aspect present invention, medium 74 is a kind of conduction liquid mediums 74.This liquid medium 74 can be made up of water and other suitable conducting liquid.
Conduction liquid medium 74 is water in this example, presents the inner surface configuration of glass tube 76, thereby can form consistent, contact closely on the total inner surface of glass tube.The uniformity of contact can guarantee that electric current distributes more equably, thereby electric charge is distributed in glass tube equably.Equally distributed like this electric current helps the little randomization of releasing electric body of plasma, thereby provides more Cement Composite Treated by Plasma uniformly for material.The tight contact of liquid 74 and dielectric substance 77 also can make the smoothness maximization that contacts between electric conductor and the dielectric substance, reduces the concentration of local of electric field, and the concentration of local of electric field may cause the electrical breakdown of dielectric material.Fluid conductors also can disperse heat more equably, reduces the stress that is caused by heat in glass or the ceramic electrode.Can provide the space in place, not shown, to adapt to expansion and the contraction that liquid causes along with variation of temperature.The use of fluid conductors also promotes may the more use of the dielectric coated electrode of complicated shape of shape than other.Dielectric material can be processed into complicated shape and structure by any method, for example: the glass tube of coiling, insert fluid conductors then easily.
Fluid conductors can be transparent, thereby can observe and/or optical measurement by the article on plasma body, and this is impossible at traditional electrode.
Liquid medium preferably has the electrical conductivity that can control variation according to composition.For example, comprise the additive control electrical conductivity of selecting for use in the liquid.Controlled electrical conductivity can be used for stoping the moment localization of electric energy density on electrode zone, and on time scale, this moment, localization energy produced wasting unstability.
Make conducting medium 74 remain on the inside of glass tube 76 with the stopper (not shown), stopper stretches out the exposed distal ends of core 72 from glass tube.The end of core 72 is connected with power supply by lead 82 thinks that stick electrode 70 provides alternating voltage.
A kind of specific arrangement of stick electrode shown in Fig. 4 70.Stick electrode 70 is arranged in the opening of wall 90, and opening outwards extends radially from cylinder 40.Sealing ring 80 makes exposed ends 75 electric insulations that are connected on core 72 on the power supply by lead 82, to avoid itself and mesh electrode 60 discharges that are positioned at wall 90 opposites.This layout is applied in same alternating voltage and is applied on the stick electrode 70, will keep mesh electrode 60 ground connection places simultaneously, and plasma is little releases electric body so that produce between stick electrode 70 and mesh electrode 60.
In the interchangeable layout shown in Fig. 5, stick electrode 70 is intersected, and when applying alternating voltage with box lunch, the amplitude of electromotive force is identical on the contiguous stick electrode 70, but polarity is opposite.Therefore strip 56 moves along near the of the stick electrode 70 that separates.In this way, plasma is little to be released between the stick electrode 70 that electric body is near at hand and produces, rather than produces between stick electrode 70 and mesh electrode 60.Therefore, compare with the layout type among Fig. 4, the alternating voltage that is applied can reduce by half, that is :+/-10kV, the electrical potential difference that still can between contiguous stick electrode 70, produce 20kV like this.
Electricity excites can be by making any one ground connection in electrode 60 or 70 to produce plasma, meanwhile applies the voltage that full-time territory changes respectively and use on another electrode 70 or 60.Replacedly, can apply the voltage of any frequency and voltage combination simultaneously on two electrodes, the power transformation potential difference produces desired plasma when enough so that have between electrode.
The security feature that can be used on the equipment 30 is near a pair of window of baffle plate that is installed in, and wool 56 can be by the space between its discrepancy stick electrode 70 and the mesh electrode 60.The size of window allows wool 56 to pass, and still, the size and dimension of selecting window extend into hand or finger in the space between stick electrode and the mesh electrode to prevent the user, thereby prevents that the user from getting an electric shock.
This equipment can further comprise the security feature that can lock a door, and its sheet with the cylinder 40 of baffle plate 42 vicinities is relative.Door preferably includes logic switch, and it only makes when on the door lock could operating equipment, so prevents that the user from entering cylinder 40 under the situation that equipment 30 moves.
Assist wools 56 when mesh electrode 60 discharges at baffle plate 40, once in a while can some wool 56 keep attachment states and continue to enter once more Cement Composite Treated by Plasma space between stick electrode 70 and the mesh electrode 60.In this case, wool 56 parts that adhered to will overlap with wool 56 parts of new importing.The thickness of their combinations may surpass stick electrode 70 and close spacing between the mesh electrode 60, and may cause the damage of stick electrode 70 even thoroughly destroy.In order to prevent described overlapping, can adorn an optical pickocff on the baffle plate opposite, when detecting the wool 56 of absorbed portion, with regard to closing device 30 with box lunch.Close continuously for fear of wool fibre or other dust granule that equipment is departed from, can be to the sensor programming with only trigger equipment shutdown when the optical interference of sensor surpasses 0.25 second.
Fig. 6 shows the replaceable equipment 100 with Cement Composite Treated by Plasma wool strip 56.Without swing roller, equipment 100 is carried on wool strip 56 on the terminal conveyer belt 104 of nothing of the grid 104 that forms electrode.Replacedly, grid can have electrically insulating material, and covers the structure that forms second electrode.What separate above grid conveyer belt 104 is stick electrode 102, and stick electrode 102 forms with the 70 identical originating party formulas of the stick electrode among the aforesaid embodiment.Set the spacing between electrode 102 and the grid 104, and identical with described in the embodiment of the influence of air-flow and front of the spacing between the adjacent electrode 102.The structure that supports grid can be shaped like this so that its steering current is preferentially around the dielectric that covers stick electrode, for example, with the similar mode layout of stick electrode, but directly below covering stick electrode dielectric layout have living space.Aspirator 106 flows the direction of gas flag F in the figure, so that air-flow passes strip 56 and crosses the moving direction of strip 56.By this way, thus the active material of the plasma generation between electrode 102 and the grid 104 is drawn through strip 56 handles strips 56.
Electrode 70 intersection assembling thoughts shown in Fig. 5 can be used in equipment 100 too, so that produce plasma between adjacent electrode 102.In addition, the crossflow F that produced of aspirator 106 orders about the strip 56 that plasma products moves by the vicinity at electrode 102.This layout can form in strip 56 handles gradient, promptly accepts bigger surface treatment at the top of the strip 56 fiber internal fiber darker than strip.Uniform fibers is handled if desired, and strip can be put upside down and again by equipment, use second equipment 106 after perhaps strip being put upside down.

Claims (34)

1. the gas permeability material is made the equipment of Cement Composite Treated by Plasma, described equipment comprises:
(a) electrode that separates wherein has at least on one to be coated with dielectric barrier layer, and has an electrode section that comprises a plurality of separation at least;
(b) be used for applying alternating voltage on the described electrode that separates between the described electrode that separates, to produce the little device of releasing electric body of plasma;
(c) make between the described electrode that separates or device that the gas permeability material of the contiguous described electrode that separates can pass through; With
(d) be used for the gas between the described electrode section fed and by space between the described electrode and the device by the gas permeability material, this gas flows through the plasma generation surface of each electrode section, and move with certain speed, thereby the air-flow between the electrode that separates is in disturbance state, therefore make that plasma is little releases electric body randomization, and disperse plasma products, otherwise these products will cause the unstability of burning in the gas permeability material;
Thus, randomizedly littlely release electric body and can provide on the whole Cement Composite Treated by Plasma uniformly for the gas permeability material.
2. the equipment described in claim 1, wherein first electrode that separates is breathed freely.
3. the equipment described in claim 2, wherein said first electrode is a mesh electrode.
4. the equipment described in claim 3, wherein said mesh electrode comprises coarse grids, it supports the fine grid blocks of stack on it.
5. as claim 2, equipment described in 3 or 4, wherein said first electrode is the curved surface of rotatable drum electrode, second electrode comprises described electrode section, these electrode sections are arranged with one heart around cylinder, thereby the gas permeability material shelf is on first electrode between first electrode and second electrode.
6. the equipment described in claim 5, wherein said cylinder is a rotatable cylinder of hollow.
7. as requiring described equipment in any right in front, the described plasma generation surface of wherein said electrode section is relative with the electrode that described another one separates, and is the elongated surface of transverse curvature.
8. as requiring described equipment in any right in front, wherein said electrode section is each stick electrode.
9. as requiring described equipment in any right in front, the adjacent electrode section of wherein said separate mesh electrode section is spaced about 0.5mm to 2mm.
10. as requiring described equipment in any right in front, wherein settle the described device that is used for applying alternating voltage, thereby apply the voltage of certain frequency to electrode, it makes it possible to disperse and/or remove the plasma byproducts in the flowing gas, and these accessory substances can cause the little localization of releasing electric body of plasma.
11. the equipment described in claim 10, wherein said frequency range are that 1kHz is to 20kHz.
12. the equipment described in claim 10, wherein said frequency range are that 1kHz is to 5kHz.
13. as requiring described equipment in any right in front, the spacing range between the wherein said electrode is that 2mm is to 10mm.
14. as requiring described equipment in any right in front, the wherein said electrode that separates is shaped like this, so that the gas that allows to flow through the gas permeability material moves on the direction of traversing the material passage direction between the described electrode that separates.
15. a method of making the gas permeability material of Cement Composite Treated by Plasma, it may further comprise the steps:
(a) produce that plasma is little releases electric body between with the electrode that is separating applying alternating voltage between the electrode that separates, have at least on the electrode in this electrode that separates to be coated with dielectric barrier layer, and have at least an electrode to comprise the electrode section of a plurality of separation;
(b) between the described electrode that separates or near by the gas permeability material; With
(c) between described electrode section, feed gas, and make it by the space between this electrode with by the gas permeability material, gas flows through the plasma generation surface of each electrode section, and it is mobile with certain speed, thereby the air-flow between the electrode that separates is in turbulent condition, and the randomization plasma is little releases electric body, and makes plasma products spread out, otherwise these products can cause the unstability of burning in the gas permeability material;
Randomized thus plasma is little releases electric body provides generally Cement Composite Treated by Plasma uniformly for the gas permeability material.
16. the method described in claim 15 comprises gas is moved through first electrode that separates that first electrode is wherein breathed freely.
17. the method described in claim 15 or 16, the plasma generation surface of wherein said electrode section and the another one of the described electrode that separates are relative, and are the elongated surfaces of transverse curvature.
18. the method described in claim 15,16 or 17, wherein said electrode section are respectively stick electrode.
19. as any described method in the claim 15 to 18, wherein said alternating voltage applies with certain frequency, can disperse and/or remove the plasma byproducts in the flowing gas under this frequency, these plasma byproducts can cause the little localization of releasing electric body of plasma.
20. the method described in claim 19, wherein said frequency range are that 1kHz is to 20kHz.
21. the method described in claim 19, wherein said frequency range are that 1kHz is to 5kHz.
22. the method described in the claim 15 to 21 any, wherein said gas moves through the gas permeability material, and its flow direction traverses material passage direction between the described electrode that separates.
23. the method described in any one of claim 15 to 22, wherein said gas is air.
24. the method described in claim 23, the air pressure of wherein said air is atmospheric pressure at it during by described interelectrode space and gas permeability material substantially.
25. as any described method in the claim 15 to 24, the voltage range that wherein is applied on the electrode that separates is that 10kV is to 25kV.
26. as any described method in the claim 15 to 25, wherein said gas permeability material is a fibrous material.
27. the method described in claim 26, wherein said fibrous material is a wool.
28. the method described in claim 27, wherein said fibrous material are the wool strips.
29. an electrode that is used for producing plasma, described electrode comprises:
(a) conducting element;
(b) dielectric cap around the conducting element; With
(c) liquid conducting medium, it connects conducting element and dielectric cap, thus the even contact of liquid medium formation and dielectric cap.
30. the electrode described in claim 29, wherein said liquid medium is between conducting element and dielectric cap.
31. the electrode described in claim 30, wherein said dielectric cap fully around or surround conducting element so that the latter forms the core of electrode.
32. the electrode described in claim 29,30 or 31, wherein said liquid medium is transparent.
33. the electrode described in any one of claim 29 to 32, wherein said liquid medium has the electrical conductivity of the variation controlled of depending on composition.
34. as any described electrode in the claim 29 to 33, wherein said electrode is elongated and roughly is columniform.
CNB2004800121424A 2003-05-05 2004-04-30 Plasma treatment apparatus and method Expired - Fee Related CN100359087C (en)

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US9131595B2 (en) 2006-12-28 2015-09-08 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Surface dielectric barrier discharge plasma unit and a method of generating a surface plasma
CN109072524A (en) * 2016-02-05 2018-12-21 伊利诺斯工具制品有限公司 corona treatment system
CN113880121A (en) * 2021-09-10 2022-01-04 南通京创桐元新材料有限公司 Production process of alumina hollow microspheres
US11438998B2 (en) 2017-06-23 2022-09-06 Lg Energy Solution, Ltd. Plasma generating apparatus for secondary battery and lamination system comprising the same

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US5456972A (en) * 1993-05-28 1995-10-10 The University Of Tennessee Research Corporation Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
US5437844A (en) * 1993-10-25 1995-08-01 Pillar Technologies, Inc. Corona treater electrode cooling system
WO1997013266A2 (en) * 1995-06-19 1997-04-10 The University Of Tennessee Research Corporation Discharge methods and electrodes for generating plasmas at one atmosphere of pressure, and materials treated therewith
RU2196394C1 (en) * 2001-05-18 2003-01-10 Александров Андрей Федорович Method and device for plasma treatment of material and plasma generation process

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Publication number Priority date Publication date Assignee Title
US9131595B2 (en) 2006-12-28 2015-09-08 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Surface dielectric barrier discharge plasma unit and a method of generating a surface plasma
CN102892248B (en) * 2006-12-28 2016-08-10 荷兰应用科学研究会(Tno) Surface dielectric barrier discharge plasma unit and the method producing surface plasma
CN109072524A (en) * 2016-02-05 2018-12-21 伊利诺斯工具制品有限公司 corona treatment system
US11438998B2 (en) 2017-06-23 2022-09-06 Lg Energy Solution, Ltd. Plasma generating apparatus for secondary battery and lamination system comprising the same
CN113880121A (en) * 2021-09-10 2022-01-04 南通京创桐元新材料有限公司 Production process of alumina hollow microspheres

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