CN1768416A - 集成于绝缘衬底上外延硅薄板上的多晶锗基波导检测器 - Google Patents
集成于绝缘衬底上外延硅薄板上的多晶锗基波导检测器 Download PDFInfo
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- CN1768416A CN1768416A CN 200480008858 CN200480008858A CN1768416A CN 1768416 A CN1768416 A CN 1768416A CN 200480008858 CN200480008858 CN 200480008858 CN 200480008858 A CN200480008858 A CN 200480008858A CN 1768416 A CN1768416 A CN 1768416A
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- waveguide
- polycrystalline germanium
- photodetector structure
- detector
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- 229910052732 germanium Inorganic materials 0.000 title claims abstract description 102
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 title claims abstract description 102
- 239000012212 insulator Substances 0.000 title abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 55
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 55
- 239000010703 silicon Substances 0.000 claims abstract description 55
- 230000001902 propagating effect Effects 0.000 claims abstract description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 22
- 229920005591 polysilicon Polymers 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000009413 insulation Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 abstract description 30
- 230000008878 coupling Effects 0.000 abstract description 5
- 238000010168 coupling process Methods 0.000 abstract description 5
- 238000005859 coupling reaction Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 12
- 230000004888 barrier function Effects 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 230000004043 responsiveness Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
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- 238000012937 correction Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
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- 238000000926 separation method Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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- 238000005224 laser annealing Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- XZWYZXLIPXDOLR-UHFFFAOYSA-N metformin Chemical compound CN(C)C(=N)NC(N)=N XZWYZXLIPXDOLR-UHFFFAOYSA-N 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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- Optical Integrated Circuits (AREA)
Abstract
Description
Claims (21)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US45934803P | 2003-03-31 | 2003-03-31 | |
US60/459,348 | 2003-03-31 | ||
US10/772,724 | 2004-02-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1768416A true CN1768416A (zh) | 2006-05-03 |
CN100407378C CN100407378C (zh) | 2008-07-30 |
Family
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CN2004800088587A Expired - Fee Related CN100407378C (zh) | 2003-03-31 | 2004-03-30 | 集成于绝缘衬底上外延硅薄板上的多晶锗基波导检测器 |
Country Status (1)
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CN (1) | CN100407378C (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100552984C (zh) * | 2007-09-19 | 2009-10-21 | 中国科学院半导体研究所 | 锗/硅混合集成的波导型光电转换器及其制造方法 |
CN107331724A (zh) * | 2017-05-17 | 2017-11-07 | 西安科锐盛创新科技有限公司 | 一种红外二极管及其制备方法 |
CN110890436A (zh) * | 2018-09-11 | 2020-03-17 | 上海新微技术研发中心有限公司 | 波导型GeSn光电晶体管及其制造方法 |
CN112505853A (zh) * | 2020-12-11 | 2021-03-16 | 江苏奥雷光电有限公司 | 一种DC~50Mbps兼容的低速信号传输光电模块设计方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107978648B (zh) * | 2017-11-27 | 2019-06-28 | 北京协同创新研究院 | 一种基于Slot波导的锗探测器及其制作方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2162712Y (zh) * | 1993-07-02 | 1994-04-20 | 中国科学院半导体研究所 | 一种硅的光探测器件 |
JPH11238902A (ja) * | 1998-02-19 | 1999-08-31 | Nec Corp | 半導体光検出装置及び半導体光検出装置の製造方法 |
US6090636A (en) * | 1998-02-26 | 2000-07-18 | Micron Technology, Inc. | Integrated circuits using optical waveguide interconnects formed through a semiconductor wafer and methods for forming same |
KR100277695B1 (ko) * | 1998-09-12 | 2001-02-01 | 정선종 | 에스 오 아이 광도파로를 이용한 하이브리드 광집적회로용 기판 제조방법 |
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2004
- 2004-03-30 CN CN2004800088587A patent/CN100407378C/zh not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100552984C (zh) * | 2007-09-19 | 2009-10-21 | 中国科学院半导体研究所 | 锗/硅混合集成的波导型光电转换器及其制造方法 |
CN107331724A (zh) * | 2017-05-17 | 2017-11-07 | 西安科锐盛创新科技有限公司 | 一种红外二极管及其制备方法 |
CN110890436A (zh) * | 2018-09-11 | 2020-03-17 | 上海新微技术研发中心有限公司 | 波导型GeSn光电晶体管及其制造方法 |
CN110890436B (zh) * | 2018-09-11 | 2021-07-23 | 上海新微技术研发中心有限公司 | 波导型GeSn光电晶体管及其制造方法 |
CN112505853A (zh) * | 2020-12-11 | 2021-03-16 | 江苏奥雷光电有限公司 | 一种DC~50Mbps兼容的低速信号传输光电模块设计方法 |
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Publication number | Publication date |
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CN100407378C (zh) | 2008-07-30 |
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