CN1764068A - Piezoelectric resonator element, piezoelectric device and gyro sensor - Google Patents
Piezoelectric resonator element, piezoelectric device and gyro sensor Download PDFInfo
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- CN1764068A CN1764068A CN 200510114238 CN200510114238A CN1764068A CN 1764068 A CN1764068 A CN 1764068A CN 200510114238 CN200510114238 CN 200510114238 CN 200510114238 A CN200510114238 A CN 200510114238A CN 1764068 A CN1764068 A CN 1764068A
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Abstract
The present invention provides a piezoelectric resonator patch and a piezoelectric resonator element for improving vibration balance and reducing CI. The piezoelectric resonator element, comprises: a base made of a piezoelectric material; at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base; a portion defining a long groove provided to each of the resonating arms along a longitudinal direction; and a driving electrode provided to the long groove. Each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction.
Description
Technical field
The present invention relates to be contained in the piezoelectric vibration piece that encapsulation is interior or shell is interior and be contained in the encapsulation this piezoelectric vibration piece or piezoelectric device and gyro sensor in the shell.
Background technology
Comprising small information equipment such as HDD (hard disk drive), portable computer or IC-card, comprise mobile communicating equipment such as mobile phone, automobile telephone or paging system, or in the measuring equipment such as gyro sensor, be extensive use of and piezoelectric vibration piece be housed in piezoelectric devices such as the piezoelectric vibrator of inside of encapsulation etc. and piezoelectric oscillator.
Figure 13 has carried out the well known structures example of employed piezoelectric vibration piece in such piezoelectric device (with reference to patent documentation 1) to simplify and the approximate vertical view that illustrates.
In the drawings, piezoelectric vibration piece 1 is formed by for example single crystal quartz, 2 shaker arms 3,4 that have the base portion 2 of wider width and extend in parallel from this base portion 2 along equidirectional.Figure 14 is the end view drawing along A-A line cut-out of Figure 13, on shaker arm 3,4, forms the elongated slot 5,6 that extends in the longitudinal direction on the surface and the back side respectively.In this elongated slot 5,6, form not shown exciting electrode as drive electrode.
Thus,, in shaker arm 3,4, produce electric field efficiently by applying driving voltage to exciting electrode from the outside, each shaker arm 3,4 carry out flexural vibrations make its leading section approaching mutually as shown in Figure 13/separate.And,, can use it in the reference signals such as clock signal of control usefulness by extracting vibration frequency based on this vibration.
Each shaker arm 3,4 of this piezoelectric vibration piece 1 and the elongated slot the 5, the 6th of these shaker arms 3,4, etching forms by the substrate that is formed by the wafer-like piezoelectric is carried out.That is, generally speaking, at first wafer substrate is carried out etching, form the profile of the such tuning fork-like of Figure 13, form elongated slot 5,6 illustrated in fig. 14 by etching partially (half etching) then.
[patent documentation 1] spy opens 2002-76806
Yet, in such piezoelectric vibration piece 1, in the wet etching in its contour etching operation, the speed of carrying out of etching difference occurs on Figure 12, electricity axle X, mechanical axis Y shown in Figure 13, optic axis Z, because the anisotropy of this etching makes to form flat bottom surface in elongated slot 5,6.
Consequently, if for example observe shaker arm 3, the thickness of then finding the two side portion that it clips elongated slot 5 is in the right and left difference, consequently, shaker arm 3 be positioned at imagining center line CE shown in Figure 14 about the rigidity difference of side wall portion.That is, the rigidity height of left side wall portion, the rigidity of right side wall portions is lower than the left side.
Therefore, carry out under the state of flexural vibrations, because the degree of deformation when crooked to the left and right in the horizontal direction has nothing in common with each other, so the crooked balance of side-to- side vibrations arm 3,4 is broken at each shaker arm 3,4 as shown in figure 12.Like this, to be delivered to stress F1, the F2 of base portion 2 also unbalanced because of the distortion of each vibration wall 3,4, thereby can not eliminate, and becomes the reason of displacement of Z direction or the displacement of Y direction, thinks the increase that can cause CI (crystal impedance) value.
Summary of the invention
The purpose of this invention is to provide and to improve vibration balancing, the CI value is suppressed lowlyer piezoelectric vibration piece and piezoelectric device and gyro sensor.
According to a first aspect of the present invention, above-mentioned purpose realizes that by following piezoelectric vibration piece this piezoelectric vibration piece has: the base portion that is formed by piezoelectric; At least one pair of shaker arm, itself and this base portion forms, and extends abreast from above-mentioned base portion; Elongated slot that is formed on above-mentioned each shaker arm and extends in the longitudinal direction and the driving electrode that in elongated slot, forms, on above-mentioned each shaker arm, have the adjustment structure, be used to adjust each shaker arm for the imagining center line that extends along its length direction be about the rigid balancing of structure.
Structure according to first aspect present invention, the shaker arm of piezoelectric vibration piece of the present invention has the adjustment structure, be used to adjust each shaker arm for the imagining center line that extends along its length direction be about the rigid balancing of structure, thereby eliminate or reduced displacement component to unwanted direction, so the vibration balancing when carrying out flexural vibrations becomes stable, can suppress the CI value lower.
A second aspect of the present invention is characterised in that, in the structure of a first aspect of the present invention, installation root at above-mentioned each shaker arm, the arm of above-mentioned shaker arm is wide bigger in above-mentioned base portion side, and form towards front and the shrinkage in width portion that width sharply shrinks, as above-mentioned adjustment structure, it is that the shrinkage in width portion on right side forms greatlyyer than the shrinkage in width portion in left side with respect to above-mentioned imagining center line.
Structure according to second portion of the present invention, when forming the elongated slot of shaker arm by wet etching, because etching anisotropy, be directed to the difference of the left and right thickness that the wall portion of this elongated slot produced, the most concentrated installation root of strain when shaker arm carries out flexural vibrations particularly, form greatlyyer by shrinkage in width portion, can improve bad because of the thin rigid balancing that causes of wall portion on the right side of elongated slot the right side.
A third aspect of the present invention is characterised in that, in the structure of a first aspect of the present invention, above-mentioned adjustment structure is formed at the installation root of above-mentioned each shaker arm, as above-mentioned adjustment structure, it is that the thickness of wall portion on right side is bigger than the thickness of the wall portion in left side with respect to above-mentioned imagining center line that above-mentioned elongated slot is formed it.
Structure according to a third aspect of the present invention, when forming the elongated slot of shaker arm by wet etching, because etching anisotropy, be directed to the difference of the left and right thickness that the wall portion of this elongated slot produced, the most concentrated installation root of strain when shaker arm carries out flexural vibrations particularly, the wall portion on the right side by making above-mentioned elongated slot wittingly is thicker than the wall portion in left side, in whole elongated slot, can improve bad because of the thin rigid balancing that causes of wall portion on right side.
A fourth aspect of the present invention is characterised in that, in the structure of first of the present invention, above-mentioned adjustment structure is formed at the leading section of above-mentioned each shaker arm, as above-mentioned adjustment structure, at the leading section of above-mentioned shaker arm, be that the part in left side forms greatlyyer than the part on right side with respect to above-mentioned imagining center line.
Structure according to a fourth aspect of the present invention, when forming the elongated slot of shaker arm by wet etching, because etching anisotropy, be directed to the difference of the left and right thickness that the wall portion of this elongated slot produced, leading section at above-mentioned shaker arm, is that the part in left side forms greatlyyer than the part on right side by making it with respect to above-mentioned imagining center line, in whole elongated slot, can improve bad because of the thin rigid balancing that causes of wall portion on right side.
In addition, in the 5th part of the present invention, above-mentioned purpose realizes that by following piezoelectric device this is the piezoelectric device that contains piezoelectric vibration piece in accepting container, and above-mentioned piezoelectric vibration piece has: the base portion that is formed by piezoelectric; At least one pair of shaker arm, itself and this base portion forms, and extends abreast from above-mentioned base portion; Elongated slot that is formed on above-mentioned each shaker arm and extends in the longitudinal direction and the driving electrode that in elongated slot, forms, on above-mentioned each shaker arm, have the adjustment structure, be used to adjust each shaker arm for the imagining center line that extends along its length direction be about the rigid balancing of structure.
According to the structure of a fifth aspect of the present invention, utilize the principle identical with a first aspect of the present invention, the vibration balancing in the time of can making the shaker arm of the piezoelectric vibration piece that is loaded carry out flexural vibrations becomes stable, suppresses the CI value of piezoelectric device lower.
In addition, in the 6th part of the present invention, above-mentioned purpose realizes that by following gyroscope this gyroscope has: the base portion that is formed by piezoelectric; The shaker arm that at least one pair of is above, itself and this base portion forms, and extends abreast from above-mentioned base portion, and above-mentioned gyroscope also has: the elongated slot that is formed on above-mentioned each shaker arm and extends in the longitudinal direction; And the driving electrode that in this elongated slot, forms, on above-mentioned each shaker arm, have the adjustment structure, be used to adjust each shaker arm for the imagining center line that extends along its length direction be about the rigid balancing of structure.
According to the structure of a sixth aspect of the present invention, utilize the principle identical with the principle that in first of the present invention, illustrated, can provide and can improve vibration balancing, the CI value is suppressed lowlyer gyro sensor.
Description of drawings
Fig. 1 is the approximate vertical view of the piezoelectric device of embodiments of the present invention.
Fig. 2 is the summary sectional view of the piezoelectric device of Fig. 1 along the B-B line.
Fig. 3 is the approximate vertical view of the piezoelectric vibration piece of employed the 1st execution mode in the piezoelectric device of Fig. 1.
Fig. 4 is the end view drawing that the piezoelectric vibration piece of Fig. 3 cuts off along the C-C line.
Fig. 5 is the major part enlarged drawing of the piezoelectric vibration piece of Fig. 3.
Fig. 6 is in the reference example of piezoelectric vibration piece not to be covered in the present invention, the polar plot of the simulation of the vibration displacement when shaker arm carries out flexural vibrations.
Fig. 7 is in the piezoelectric vibration piece of the 1st execution mode, the polar plot of the simulation of the vibration displacement when shaker arm carries out flexural vibrations.
Fig. 8 is the major part enlarged drawing of the piezoelectric vibration piece of the 2nd execution mode.
Fig. 9 is in the piezoelectric vibration piece of the 2nd execution mode, the polar plot of the simulation of the vibration displacement when shaker arm carries out flexural vibrations.
Figure 10 is the major part enlarged drawing of the piezoelectric vibration piece of the 3rd execution mode.
Figure 11 is in the piezoelectric vibration piece of the 3rd execution mode, the polar plot of the simulation of the vibration displacement when shaker arm carries out flexural vibrations.
Figure 12 is the approximate vertical view of the gyro sensor of the 4th execution mode.
Figure 13 is the approximate vertical view of existing piezoelectric vibration piece.
Figure 14 is the end view drawing along the cut-out of A-A line of Figure 13.
Wherein, 30: piezoelectric device; 36: encapsulation; 32: piezoelectric vibration piece; 34,35: shaker arm; 51: base portion; 54,55: exciting electrode; 56,57: elongated slot; 61: common shrinkage in width portion; 62: large-scale shrinkage in width portion; 80: gyro sensor.
Embodiment
Fig. 1 and Fig. 2 represent the 1st execution mode of piezoelectric device of the present invention, and Fig. 1 is its approximate vertical view, and Fig. 2 is the summary sectional view of Fig. 1 along the B-B line.
In the drawings, show the example that piezoelectric device 30 constitutes quartz vibrator, this piezoelectric device 30 contains piezoelectric vibration piece 32 in the encapsulation 36 as accepting container.A plurality of substrates that ceramic green sheet (crematic green sheet) as the aluminium oxide material of insulating material will be shaped and forms carry out stacked, carry out sintering afterwards and form encapsulation 36.Each a plurality of substrate forms the internal space S 2 of regulation by the hole of the regulation of side formation within it in the inboard under stacked situation.But this inside space S 2 is the receiving spaces that are used to accommodate piezoelectric vibration piece 32.
Mounted inside piezoelectric vibration piece 32 in this encapsulation 36 utilizes lid 39 hermetic to seal.Here, select materials such as pottery, metal, glass to form lid 39.
At lid 39 for example is under the situation of metal, generally has other the high advantage of material of strength ratio.The material approximate with the coefficient of thermal expansion of encapsulation 36 all is fit to, and for example, can use Kovar alloy etc.
In addition, in order to carry out the frequency adjustment after the lid sealing, lid 39 is for example formed by translucent materials such as glass.For example, can use sheet materials such as pyrex.
Near the left part among the figure in the internal space S 2 of encapsulation 36, in internal space S 2, expose, be provided with by for example nickel plating and the gold-plated electrode part that forms 31,31 on tungsten metallization with on the multilayer board that constitutes inside bottom.This electrode part 31,31 is connected with outside, is used to supply with driving voltage.Coating electrically conductive cohesive agent 43,43 on this each electrode part 31,31, the base portion 51 of arrangement piezoelectric vibration piece 32 on this conductive adhesive 43,43 solidifies conductive adhesive 43,43.And, as conductive adhesive 43,43, can use the material that contains the conductive particles such as particulate of silvery in the synthetic resin agent as the binding agent composition of bringing into play adhesion, can utilize silicone-based, epoxy system or polyimides is conductive adhesive etc.
Promptly, piezoelectric vibration piece 32 utilizes so-called tuning-fork-type piezoelectric vibration piece, this tuning-fork-type piezoelectric vibration piece integral body is the such shape of tuning fork, have base portion 51 and a pair of shaker arm 34,35, above-mentioned base portion 51 is fixed with encapsulation 36 sides, above-mentioned a pair of shaker arm 34,35 is a cardinal extremity with this base portion 51, is divided into 2 bursts of tops in the figure and extends abreast.
On each shaker arm 34,35 of piezoelectric vibration piece 32, as reference Fig. 3 and Fig. 4 understand, be respectively formed at the elongated slot that the end is arranged 56,57 of the length of extending on the length direction.This each elongated slot 56,57 as the end view drawing that cuts off along the C-C line of Fig. 3 as shown in Figure 4 is formed at the surface and the two sides, the back side of each shaker arm 34,35.
And, in Fig. 3, near the Width two ends of the end (being the bottom) of the base portion 51 of piezoelectric vibration piece 32, be formed with extraction electrode 52,53 in Fig. 3.The not shown back side at the base portion 51 of piezoelectric vibration piece 32 is formed with each extraction electrode 52,53 similarly.
These each extraction electrodes the 52, the 53rd, electrode part 31,31 by package-side shown in Figure 1 as mentioned above and conductive adhesive and connected part.And, each extraction electrode 52,53 as shown in Figure 3 and Figure 4, respectively with the elongated slot 56,57 that is arranged on each shaker arm 34,35 in exciting electrode 54,55 link into an integrated entity.In addition, each exciting electrode 54,55 also forms on the two sides of each shaker arm 34,35 as shown in Figure 4, for example, about shaker arm 34, makes the exciting electrode 54 in the elongated slot 56 and the exciting electrode 55 of its side surface part be mutually different electrode.In addition, about shaker arm 35, make the exciting electrode 55 in the elongated slot 57 and the exciting electrode 54 of its side surface part be mutually different electrode.
Between the base portion 51 and shaker arm 34,35 of piezoelectric vibration piece 32, the Width that can be arranged on base portion 51 shrinks and the notch part or the necking part (not shown) of setting.
Thus, can prevent that the vibration of piezoelectric vibration piece 32 from leaking into base portion 51 sides, to reduce CI (crystal impedance) value.
And piezoelectric vibration piece 32 integral body form very small-sizedly, in Fig. 3, are that for example total length is about 1300 μ m, the length of shaker arm is about 1040 μ m, arm is wide is extremely small-sized piezoelectric vibration piece about 40 μ m～55 μ m.
And, as the partial enlarged drawing of Fig. 5 illustrates in further detail, installation root at shaker arm 34,35, be near the front end 51a of base portion 51, the arm of each shaker arm 34,35 is wide bigger in base portion 51 sides, forms the shrinkage in width portion 61,62 of sharply shrinking towards the front width of each shaker arm 34,35.Shrinkage in width portion the 61, the 62nd, the fin-shaped part that enlarges at the installation root of shaker arm.Specifically, shrinkage in width portion 61 makes the front end of a slice at base portion 51, and another adjacent sheet is in the left side edge of the position of the installation root of shaker arm (base end part), and the leg-of-mutton fin-shaped of the approximate right angle portion that is that forms as one respectively.Shrinkage in width portion 62 makes the front end of a slice at base portion 51, and another adjacent sheet is in the right side edge of the position of the installation root of shaker arm (base end part), and shape is the fin-shaped portion that is the approximate right angle triangle of one respectively.
These structures are all identical for shaker arm 34,35, so only shaker arm 34 is described.
Here, as can be seen from Figure 4, the result who forms elongated slot 56 on shaker arm 34 is, the 34b of wall portion thickness D1, the D2 separately that clips the 34a of wall portion in left side of elongated slot 56 and right side is very inequality, and the 34a of wall portion on right side is thicker than the 34b of wall portion in left side.
Not being both when forming elongated slot 56 of such wall portion thickness, wet etching forms because of quartz material is carried out, this is because according to the etching anisotropy that manifests in this operation, etching carry out speed because of the different cause in the orientation of the crystal structure of quartz.
In the present embodiment, as adjust shaker arm 34 that such etching anisotropy causes about the structure of rigid balancing, be directed to shrinkage in width portion 61,62, clip elongated slot 56 in the shrinkage in width portion of a side of Width as large-scale shrinkage in width portion 62, clip elongated slot 56 in the shrinkage in width portion of the opposite side of Width as the shrinkage in width portion 61 of size usually.Promptly, as shown in Figure 3, base portion 51 is configured in the below of figure, each shaker arm 34,35 is configured to extend towards the top from this base portion, in this case, as shown in Figure 3 and Figure 4, with the shrinkage in width portion on right side as large-scale shrinkage in width portion 62, with shrinkage in width portion 61 of the shrinkage in width portion in left side as the common size littler than the shrinkage in width portion on right side.
Like this,, can when carrying out above-mentioned wet etching, realize in the left and right sides difference in left and right sides method inequality as the size that makes shrinkage in width portion by making the mask shape.
Thus, each shaker arm 34,35 is the installation root of maximum shaker arm in strain when carrying out flexural vibrations, forms large-scale shrinkage in width portion 62 by the right side at shaker arm 34,35, can improve the rigidity on right side of the shaker arm 34,35 at this position.
Here, different according to the left wall gauge D1 of portion shown in Figure 4 and the right wall gauge D2 of portion can determine the size of large-scale shrinkage in width portion 62 with respect to the shrinkage in width portion 61 of common size.
Fig. 6 is for the piezoelectric vibration piece 32 with the illustrated structure of Fig. 5, the polar plot of the simulation of the vibration displacement when each shaker arm carries out flexural vibrations.In the piezoelectric vibration piece 32 of present embodiment, from shown in the figure as can be known, by adjust each shaker arm about stress equilibrium make its equilibrium, with the bottom of base portion near, promptly the strain on the corresponding position is less near the extraction electrode 52,53 of Fig. 3.
In contrast, Fig. 7 is the polar plot of the simulation of the vibration displacement when shaker arm carries out flexural vibrations under following situation, promptly for the shrinkage in width portion that on the shaker arm of piezoelectric vibration piece, forms, make about it and to be the situation of identical size, promptly, for example when the shaker arm 34 with Fig. 5 be example when illustrating, make the large-scale shrinkage in width portion 62 on the shrinkage in width portion 61 in left side of common size and right side different with example among the figure, be the situation of identical size.Compare with the situation of Fig. 6, under the situation of Fig. 7, the situation of the deformation ratio Fig. 6 the bottom of base portion near is big.
Fig. 8 is the major part enlarged drawing of the 2nd execution mode of expression piezoelectric vibration piece, shows the position identical with Fig. 5.Illustrated the 1st execution mode of position beyond the illustrated position of this execution mode and Fig. 1～Fig. 5 is identical, and it is identical to have given the position structure of prosign, so omitted repeat specification, is that the center describes with the difference.
In addition, shaker arm 34 is identical with the structure of shaker arm 35, so only describe at shaker arm 34.
In this embodiment, the adjustment structure of the rigidity about being used to adjust approaches the installation root 51a of shaker arm 34 and forms.
Specifically, in the elongated slot 56 that extends along the length direction of shaker arm 34,, its thickness thickness increase portion 66a thicker than the wall portion 65 in left side is set at the part of the wall portion 66 on right side about the wall portion about it 65,66.
Like this, in whole elongated slot 56, can improve bad because of the rigid balancing about the thin shaker arm 34 that causes of the wall portion on right side.
Fig. 9 is the polar plot of the simulation of the vibration displacement when each shaker arm carries out flexural vibrations in the 2nd execution mode.Under the situation of Fig. 9, the situation of the strain ratio Fig. 7 the bottom of base portion near is little as can be known.
Figure 10 is the major part enlarged drawing of the 3rd execution mode of expression piezoelectric vibration piece, shows near the front end of each shaker arm 34,35 of piezoelectric vibration piece.Illustrated the 1st execution mode of position beyond the illustrated position of this execution mode and Fig. 1～Fig. 5 is identical, and it is identical to have given the position structure of prosign, so omitted repeat specification, is that the center describes with the difference.
In addition, shaker arm 34 is identical with the structure of shaker arm 35, so only describe at shaker arm 34.
In this embodiment, to when shaker arm carries out flexural vibrations, playing the leading section of each shaker arm of hammer, change the weight about it, thereby, provide the weight change of proofreading and correct usefulness for difference because of the different rigid balancings that cause of the thickness of the wall portion about elongated slot.
That is, as shown in figure 10, at the leading section of shaker arm 34, the part in left side forms greatlyyer than the part on right side.
Specifically, for example shown in Figure 10 (a), form the notch part 71 of inclination,, make the weight on right side of imagining center line C1 compare and alleviated with the left side by removing material in the side, right side of the leading section of shaker arm 34.
In addition, for example shown in Figure 10 (b), on the part in the left side of imagining center line C1 of the leading section of shaker arm 34, form protuberance 72,, make the weight on weight ratio right side in left side increase by increasing material.
In this embodiment, in whole elongated slot 56, can improve bad because of the rigid balancing about the thin shaker arm 34 that causes of the wall portion 66 on right side.
Figure 11 is the polar plot of the simulation of the vibration displacement when each shaker arm carries out flexural vibrations in the 3rd execution mode.Under the situation of Figure 11, the situation of the strain ratio Fig. 7 the bottom of base portion near is little as can be known.
Figure 12 is the vertical view of expression as the schematic configuration of the gyro sensor of the piezoelectric vibrator of the 4th execution mode of the present invention.
In Figure 12, directions X is represented quartzy electric axis, the mechanical axis of Y ' direction indication quartz, the optical axis (growth axis) of Z ' direction indication quartz.
In Figure 12, the sensor main body 81 of gyro sensor 80 is accommodated in the encapsulation 98, in this encapsulation 98 with the 1st execution mode in illustrated encapsulation 36 roughly the same, form the case shape of the form that can accommodate sensor main body 81, have the driver elements and (not shown) such as circuit that detect from the vibration of sensor main body 81 such as exciting circuit of stimulus sensor main body 81.
Quartz is carried out etching, form sensor main body 81 by the operation identical with the piezoelectric vibration piece of the 1st execution mode.That is,, can form profile described later and slot part by identical manufacturing process though sensor main body 81 its shapes are different with the piezoelectric vibration piece 32 of the 1st execution mode.
In Figure 12, base portion 82 long on the direction about sensor main body 81 is fixed with respect to encapsulation 98.
Excitation with shaker arm 84,84 being starting point near the end about base portion 82, with the direction of the bearing of trend quadrature of base portion 82 on, and extend abreast towards the top of Figure 12.In addition, detect with shaker arm 85,85 being starting point near the end about base portion 82, with the direction of the bearing of trend quadrature of base portion 82 on, and towards the parallel beneath ground extension of Figure 12.
And, in the face side of each excitation, the elongated slot portion 56,56 of arranging along its length is set respectively with shaker arm 84,84, in these each slot parts, similarly form exciting electrode (not shown) with the 1st execution mode.By identical with it structure, also form slot part respectively in each face side and rear side that detects with shaker arm 85,85, in each slot part, form the detection utmost point (not shown).
In Figure 12, the excitation of gyro sensor 80 is applied to drive by the not shown exciting circuit as driver element with shaker arm 84,84 uses voltage, thereby shown in arrow E, E, making is close or is separated between its leading section vibrates.At this moment, as shown in figure 12, when the angular velocity of rotation ω around Y ' axle works, excitation is subjected to Coriolis force (Coriolis force) the Fc effect of working on the direction of the vector product of the direction of vibration of X-direction and angular velocity of rotation ω with shaker arm 84,84, according to following formula, along Y ' axle (alternately) vibration (walking vibration) in positive Y ' direction and negative Y ' direction.This vibration is passed to detect by base portion 82 uses shaker arm 85,85.
Fc=2mV ω (m is the quality of excitation with the oscillating component of shaker arm 84,84, and V is the speed of excitation with shaker arm 84,84) ... (1) formula
Taken out as signal by the not shown detection utmost point based on the electric field that detects with the vibration of shaker arm 85, thereby can be rotated the detection of angular velocity omega.
And, in the present embodiment, as when forming elongated slot, adjust the shaker arm 84 that causes because of the etching anisotropy about the structure of rigid balancing, be directed to the shrinkage in width portion 61,62 of the installation root of shaker arm 84, the shrinkage in width portion of a side of the Width that clips elongated slot 56 as large-scale shrinkage in width portion 62, the shrinkage in width portion of the opposite side of the Width that clips elongated slot as the common shrinkage in width portion 61 of size.Promptly, as shown in figure 13, each shaker arm 84,84 is configured to from base portion 51 towards above under the situation of extending, shown in enlarged drawing, the shrinkage in width portion on right side as large-scale shrinkage in width portion 62, the shrinkage in width portion 61 of the shrinkage in width portion in left side as the common size littler than large-scale shrinkage in width portion 62.And, though omitted detailed explanation, in Figure 13, on the shaker arm 85,85 that extends abreast from base portion 82, also form elongated slot downwards, form and identical shrinkage in width portion of above-mentioned shrinkage in width portion.
Thus, when each shaker arm carries out flexural vibrations, in the installation root of the shaker arm of strain maximum, form large-scale shrinkage in width portion 62, can improve the rigidity on right side of the shaker arm at this position by right side at shaker arm.
And, on the shaker arm of gyro sensor 80, also can adopt the illustrated structure of Fig. 8 or Figure 10 to replace the adjustment structure of balance shown in Figure 13, perhaps except that this adjustment structure, adopt Fig. 8 or the illustrated structure of Figure 10 again.
The invention is not restricted to above-mentioned execution mode.Can make each structure appropriate combination of each execution mode, or omit some structure, or with other not shown textural association.
In addition, so long as in encapsulation, accommodate the device of piezoelectric vibration piece, just with titles such as quartz vibrator, quartz (controlled) oscillator, gyroscope, angular transducer irrespectively, equal piezoelectric devices that can apply the present invention to all piezoelectric vibration pieces and utilize above-mentioned piezoelectric vibration piece.
In addition, in the above-described embodiment, used the encapsulation of ceramic case shape for encapsulation utilization, yet be not limited to such mode, so long as in the equal accepting container of metal columned shell etc. and encapsulation, accommodate piezoelectric vibration piece, also can apply the present invention to device with any encapsulation or shell.
Claims (6)
1. a piezoelectric vibration piece is characterized in that,
Have:
The base portion that forms by piezoelectric;
At least one pair of shaker arm, itself and this base portion forms, and extends abreast from above-mentioned base portion; With
The elongated slot that is formed on above-mentioned each shaker arm and extends in the longitudinal direction, and the driving electrode that in elongated slot, forms,
On above-mentioned each shaker arm, have the adjustment structure, be used to adjust each shaker arm for the imagining center line that extends along its length direction be about the rigid balancing of structure.
2. piezoelectric vibration piece according to claim 1 is characterized in that,
Installation root at above-mentioned each shaker arm, the arm of above-mentioned shaker arm is wide bigger in above-mentioned base portion side, and form towards front and the shrinkage in width portion that width sharply shrinks, as above-mentioned adjustment structure, it is that the shrinkage in width portion on right side forms greatlyyer than the shrinkage in width portion in left side with respect to above-mentioned imagining center line.
3. piezoelectric vibration piece according to claim 1 is characterized in that,
Above-mentioned adjustment structure is formed at the installation root of above-mentioned each shaker arm, and as above-mentioned adjustment structure, it is that the thickness of wall portion on right side is bigger than the thickness of the wall portion in left side with respect to above-mentioned imagining center line that above-mentioned elongated slot is formed it.
4. piezoelectric vibration piece according to claim 1 is characterized in that,
Above-mentioned adjustment structure is formed at the leading section of above-mentioned each shaker arm, as above-mentioned adjustment structure, at the leading section of above-mentioned shaker arm, is that the part in left side forms greatlyyer than the part on right side with respect to above-mentioned imagining center line.
5. a piezoelectric device contains piezoelectric vibration piece in accepting container, it is characterized in that,
Above-mentioned piezoelectric vibration piece has:
The base portion that forms by piezoelectric;
At least one pair of shaker arm, itself and this base portion forms, and extends abreast from above-mentioned base portion; With
The elongated slot that is formed on above-mentioned each shaker arm and extends in the longitudinal direction, and the driving electrode that in elongated slot, forms,
On above-mentioned each shaker arm, have the adjustment structure, be used to adjust each shaker arm for the imagining center line that extends along its length direction be about the rigid balancing of structure.
6. gyro sensor, this gyro sensor has: the base portion that is formed by piezoelectric; The shaker arm that at least one pair of is above, itself and this base portion forms, and extends abreast from above-mentioned base portion, it is characterized in that,
Above-mentioned gyro sensor also has:
The elongated slot that is formed on above-mentioned each shaker arm and extends in the longitudinal direction; And
The driving electrode that in this elongated slot, forms,
On above-mentioned each shaker arm, have the adjustment structure, be used to adjust each shaker arm for the imagining center line that extends along its length direction be about the rigid balancing of structure.
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| JP2004306888 | 2004-10-21 | ||
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| JP2005118400 | 2005-04-15 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102055429A (en) * | 2010-12-31 | 2011-05-11 | 苏州市东元光电科技有限公司 | Tuning fork type crystal oscillator |
| CN102857190A (en) * | 2011-06-27 | 2013-01-02 | 精工爱普生株式会社 | Bending vibration piece, method for manufacturing the same and electronic device |
| CN103401525A (en) * | 2010-02-25 | 2013-11-20 | 精工爱普生株式会社 | Vibrating plate, vibrator, oscillator and electronic device |
| CN103684334A (en) * | 2012-09-18 | 2014-03-26 | 精工电子水晶科技股份有限公司 | Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic apparatus and radio timepiece |
-
2005
- 2005-10-21 CN CN200510114238A patent/CN100578929C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103401525A (en) * | 2010-02-25 | 2013-11-20 | 精工爱普生株式会社 | Vibrating plate, vibrator, oscillator and electronic device |
| CN102055429A (en) * | 2010-12-31 | 2011-05-11 | 苏州市东元光电科技有限公司 | Tuning fork type crystal oscillator |
| CN102857190A (en) * | 2011-06-27 | 2013-01-02 | 精工爱普生株式会社 | Bending vibration piece, method for manufacturing the same and electronic device |
| CN102857190B (en) * | 2011-06-27 | 2016-05-25 | 精工爱普生株式会社 | Flexural vibration element and manufacture method thereof and electronic equipment |
| CN103684334A (en) * | 2012-09-18 | 2014-03-26 | 精工电子水晶科技股份有限公司 | Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic apparatus and radio timepiece |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100578929C (en) | 2010-01-06 |
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