CN1760578A - Method for repairing valve for filling nitrogen in manufacturing equipment of magnetron - Google Patents
Method for repairing valve for filling nitrogen in manufacturing equipment of magnetron Download PDFInfo
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- CN1760578A CN1760578A CN 200410051835 CN200410051835A CN1760578A CN 1760578 A CN1760578 A CN 1760578A CN 200410051835 CN200410051835 CN 200410051835 CN 200410051835 A CN200410051835 A CN 200410051835A CN 1760578 A CN1760578 A CN 1760578A
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- valve
- corrugated plate
- magnetron
- nitrogen
- vacuum glue
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- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
A method for repairing nitrogen charging valve used on equipment for producing magnetron includes shearing damaged bellows in valve along vertical direction of its diameter , grinding two edges of corrugated sheet , applying high vacuum glue to bind two edges of said corrugated sheet and to let said glue fill full of seam of corrugated sheet , placing it in room temperature and drying it by air to let it be bound firmly , grinding it for ensuring evenness of vacuum glue to let it stretch out and draw back freely , setting repaired valve on leakage tester for checking whether repaired valve is on specification or not .
Description
1, technical field:
The present invention is a kind of method of repairing nitrogen fill valve door in the magnetron manufacturing mechanism, belongs to the innovative technology of repairing nitrogen fill valve door method.
2, background technique:
In the manufacturing mechanism of magnetron, the component of black ball exhaust station are in case damage then necessary the replacing.And all high vacuum component all rely on import, and the spare part expense is very expensive, and wherein four high vacuum valve spare part expenses are the highest, and the nitrogen fill valve door (V3) in these four high vacuum valves is the easiest damage, and the frequency of replacing is the highest.The main cause of changing is a V3 valve bellows bursts, causes that nitrogen (N2) leaks, and can prolong the pumpdown time so greatly and increase the nitrogen loss; Nitrogen use level is normal hundred times even hundred times.The quality of product also can't ensure simultaneously.
The structural representation of V3 valve is made up of bellows 1, sealing head 2, cylinder 3 as shown in Figure 1, is mainly used in to isolate high vacuum and rough vacuum, prevents that the gas of rough vacuum from scurrying into high vacuum.Bellows 1 is kept apart the cylinder guide rod 4 and the nitrogen pressure 5 that communicate with air in the bellows (being about to air pressure and nitrogen pressure 5 keeps apart); Sealing head is kept apart nitrogen pressure 5 and high vacuum 6.In case the bellows bursts of V3 valve, nitrogen spreads in air, the nitrogen that adds vacuum tank reduces, can not be full of whole vacuum system at the appointed time, will force airborne gas to enter vacuum system, the composition of air is because of the environment difference, widely different, be full of grease, sulphur and carbon dioxide in the air, become acidic materials the most at last, the plate washer of corrosion cryopump; Oil is big especially to the high vacuum influence, if the metal surface of vacuum system has oil substances to exist, oil substances will constantly outwards decompose, and degree of vacuum does not reach requirement all the time, has a strong impact on product quality.
3, summary of the invention:
The objective of the invention is to overcome above-mentioned shortcoming and provide a kind of easy to operate, the method for nitrogen fill valve door in the simple reparation magnetron manufacturing mechanism.After the nitrogen fill valve door is repaired with method of the present invention, can reduce the consumption of nitrogen widely, shorten the period of exhaust of high vacuum exhaustion platform, every machine has shortened 5-10 minute not to be waited; Alleviate the load of cryopump, improved the degree of vacuum of product, guarantee to produce, guarantee product quality, and save expensive spare part expense.
The present invention repairs the method for nitrogen fill valve door in the magnetron manufacturing mechanism, comprises the steps:
1) bellows that damages in the valve is cut off along the Vertical direction of caliber;
2) polished in the both sides of corrugated plate;
3) with high vacuum glue bond both sides corrugated plate, use anchor clamps to compress the both sides of corrugated plate, allow high vacuum glue fully fill up the corrugated plate slit;
4) placement is at room temperature dried, and makes it bonding firm;
5) polishing, the unnecessary vacuum glue of finishing guarantee that vacuum glue is smooth, and bellows is capable of expansion and contraction;
6) valve of repairing is contained on the leak tester hunts leak, make it to reach the technical requirements of valve.
Above-mentioned steps 4) placement was dried at room temperature 60～120 minutes, made it bonding firm.
Above-mentioned steps 6) technical requirements of hunting leak on leak tester is that the helium inspection can reach 1.0 * 10
-9
The present invention adopts the bellows that damages in the valve is cut off along the Vertical direction of caliber, both sides polishing with corrugated plate, use the restorative procedure of high vacuum glue bond both sides corrugated plate again, because what isolate high vacuum is sealing head, bellows is only isolated the pressure between nitrogen and the air, nitrogen pressure is that the pressure difference of 0.4Pa and air is very little, so can repair with vacuum glue; In addition, form by tens corrugated plates, glue together of the flexible not influence of one or two corrugated plate bellows because of bellows; After the nitrogen fill valve door is repaired with method of the present invention, can reduce the consumption of nitrogen widely, shorten the period of exhaust of high vacuum exhaustion platform, every machine has shortened 5-10 minute not to be waited; Alleviate the load of cryopump, improved the degree of vacuum of product, guarantee to produce, guarantee product quality, and save expensive spare part expense.The present invention is the method for nitrogen fill valve door in a kind of easy to operate, the simple reparation magnetron manufacturing mechanism.
4, description of drawings:
Fig. 1 is the structural representation of nitrogen fill valve door in the magnetron manufacturing mechanism.
5, embodiment:
Embodiment:
The present invention repairs the method for nitrogen fill valve door in the magnetron manufacturing mechanism, comprises the steps:
1) bellows that damages in the valve is cut off along the Vertical direction of caliber;
2) polished in the both sides of corrugated plate;
3) with high vacuum glue bond both sides corrugated plate, use anchor clamps to compress the both sides of corrugated plate, allow high vacuum glue fully fill up the corrugated plate slit;
4) placement is at room temperature dried, and makes it bonding firm;
5) polishing, the unnecessary vacuum glue of finishing guarantee that vacuum glue is smooth, and bellows is capable of expansion and contraction;
6) valve of repairing is contained on the leak tester hunts leak, make it to reach the technical requirements of valve.
Above-mentioned steps 4) placement was dried at room temperature 60～120 minutes, made it bonding firm.In the present embodiment, step 4) is placed to dry at room temperature 90 minutes and is got final product.
In the present embodiment, above-mentioned steps 6) technical requirements of hunting leak on leak tester is that the helium inspection can reach 1.0 * 10
-9
Claims (4)
1, a kind of method of repairing nitrogen fill valve door in the magnetron manufacturing mechanism is characterized in that comprising the steps:
1) bellows that damages in the valve is cut off along the Vertical direction of caliber;
2) polished in the both sides of corrugated plate;
3) with high vacuum glue bond both sides corrugated plate, use anchor clamps to compress the both sides of corrugated plate, allow high vacuum glue fully fill up the corrugated plate slit;
4) placement is at room temperature dried, and makes it bonding firm;
5) polishing, the unnecessary vacuum glue of finishing guarantee that vacuum glue is smooth, and bellows is capable of expansion and contraction;
6) valve of repairing is contained on the leak tester hunts leak, make it to reach the technical requirements of valve.
2, the method for nitrogen fill valve door in the reparation magnetron manufacturing mechanism according to claim 1 is characterized in that above-mentioned steps 4) place and dried at room temperature 60～120 minutes, make it bonding firm.
3, the method for nitrogen fill valve door in the reparation magnetron manufacturing mechanism according to claim 2 is characterized in that above-mentioned steps 4) place and dried at room temperature 90 minutes.
4, the method for nitrogen fill valve door in the reparation magnetron manufacturing mechanism according to claim 1 is characterized in that above-mentioned steps 6) technical requirements of hunting leak on leak tester is that the helium inspection can reach 1.0 * 10
-9
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100518356A CN100381746C (en) | 2004-10-14 | 2004-10-14 | Method for repairing valve for filling nitrogen in manufacturing equipment of magnetron |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100518356A CN100381746C (en) | 2004-10-14 | 2004-10-14 | Method for repairing valve for filling nitrogen in manufacturing equipment of magnetron |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1760578A true CN1760578A (en) | 2006-04-19 |
| CN100381746C CN100381746C (en) | 2008-04-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100518356A Active CN100381746C (en) | 2004-10-14 | 2004-10-14 | Method for repairing valve for filling nitrogen in manufacturing equipment of magnetron |
Country Status (1)
| Country | Link |
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| CN (1) | CN100381746C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105422940A (en) * | 2015-11-19 | 2016-03-23 | 中国科学院等离子体物理研究所 | Vacuum air intake regulating valve |
| CN107504252A (en) * | 2017-10-09 | 2017-12-22 | 四川拜伦科技有限公司 | A kind of pipeline type fluid fills control device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1038150A (en) * | 1988-05-26 | 1989-12-20 | 四川省凉山彝族自治州木材综合加工厂 | Industrial boiler convection tube annular is split and is changed quick repair method |
| JP3623674B2 (en) * | 1998-11-30 | 2005-02-23 | 三菱電機株式会社 | Bellows and bellows blocks for laser devices |
| CN2432561Y (en) * | 2000-07-26 | 2001-05-30 | 宝山钢铁股份有限公司 | Non-metal compensator for repairing gas sylphon bellows |
| CN1207506C (en) * | 2002-06-28 | 2005-06-22 | 侯贤忠 | Repairing method and repairing pipe structure for partially dug old pipeline with stainless lining |
-
2004
- 2004-10-14 CN CNB2004100518356A patent/CN100381746C/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105422940A (en) * | 2015-11-19 | 2016-03-23 | 中国科学院等离子体物理研究所 | Vacuum air intake regulating valve |
| CN105422940B (en) * | 2015-11-19 | 2020-11-06 | 中国科学院等离子体物理研究所 | Vacuum air inlet regulating valve |
| CN107504252A (en) * | 2017-10-09 | 2017-12-22 | 四川拜伦科技有限公司 | A kind of pipeline type fluid fills control device |
| CN107504252B (en) * | 2017-10-09 | 2019-08-16 | 四川拜伦科技有限公司 | A kind of pipeline type fluid filling control device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100381746C (en) | 2008-04-16 |
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Owner name: GUANGDONG WITOL VACUUM ELECTRONIC MANUFACTURING CO Free format text: FORMER OWNER: MEIDI DAILY ELECTRICAL APPLIANCES CO., LTD., FOSHAN CITY Effective date: 20101222 |
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Free format text: CORRECT: ADDRESS; FROM: 528311 PENGLAI ROAD, BEIJIAO TOWN, SHUNDE DISTRICT, FOSHAN CITY, GUANGDONG PROVINCE TO: 528311 INDUSTRIAL PARK, BEIJIAO TOWN, SHUNDE DISTRICT, FOSHAN CITY, GUANGDONG PROVINCE |
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Effective date of registration: 20101222 Address after: 528311 Industrial Park, Beijiao Town, Shunde District, Guangdong, China, Foshan Patentee after: Guangdong Weite Vacuum Electronic Manufacturing Co.,Ltd. Address before: 528311 Penglai Road, Beijiao Town, Foshan District, Guangdong, China, Patentee before: Meidi Daily electrical Appliances Co., Ltd., Foshan City |