CN1747102A - Field emitter and production thereof - Google Patents
Field emitter and production thereof Download PDFInfo
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- CN1747102A CN1747102A CN 200410054356 CN200410054356A CN1747102A CN 1747102 A CN1747102 A CN 1747102A CN 200410054356 CN200410054356 CN 200410054356 CN 200410054356 A CN200410054356 A CN 200410054356A CN 1747102 A CN1747102 A CN 1747102A
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Abstract
By forming the electrode and cathode on a same plane, the intersections of electrode and cathode above are partly selected to form insulating layer by using screen print. The electrode bus structure is formed on the insulating layer above to replace through hole, and to implement the mutual insulation between the intercrossing electrode wire and cathode wire.
Description
(1) technical field
The present invention relates to a kind of field emission apparatus and manufacture method thereof, refer in particular at electricity and cause emitting surface employing carbon nano-tube, by electrode and negative electrode being formed at simultaneously the co-planar configuration of same aspect, saved the process for preparing through hole by complicated technology, improved production efficiency, reduced a kind of field emission apparatus and the manufacture method (field emission device and fabricating methodthereof) thereof of production cost.
(2) background technology
Along with the develop rapidly of electronic technology and the requirement of diversification information timeliness, the demand of electronic console is increased day by day, different demands also is not quite similar to the kind demand of electronic console, and the outward appearance kind of electronic console is also various thereupon.As, in emphasizing ambulant environment, in the time of need being similar to portable information machine, electronic console that will cube is little, in light weight, power consumption is few; Need in the occasion of mass media information, then need the wide big view display in visual angle.In order to meet the different needs, require electronic console to showing that maximization, low price, high-performance, high definition, ultrathin type, lightweight direction develop.For catering to the development trend of present this electronic product, be necessary to work out and replace existing kinescope, satisfy light and the thin plane playing device that requires.At present, people will adopt emission to be applied to field of display, and the active development volume is little, power consumption is few and thin curtain display with high definition.
At present, above-mentioned the emission that is applied to overcome the information communication display of future generation of existing flat-panel screens (LCD, PDP, VFD) shortcoming in researching and developing or producing receives much attention.The electrode structure of Field Emission Display is simple; Under effect, can realize high-speed action equally with the same principle of existing kinescope; All advantages that also have flat-panel screens such as unlimited color how, gray scale, high gray scale, high video rate simultaneously.
Quantum mechanical tunneling is used in emission, promptly adds enough big electric field in a vacuum metal or conductive surface, and electronics breakthrough metal or conductor obstacle are discharged into beyond the vacuum.At this moment, according to the Fowler-Nordheim rule, demonstrate the characteristic of current-voltage.The electronics emission anodal portion luminous by colliding mutually with electronics that metal or conductive surface send, the passive escapement (spacer) of getting has reached maximum (ceiling) portion that keeps the effect of vacuum density and has formed between upper and lower plates.
Because carbon nano-tube has high mechanical strength, stability chemically is strong, even possess excellent field emission performance too in lower vacuum degree, so recently, people progressively recognize the importance of carbon nano-tube field emission.Because the diameter of carbon nano-tube is very little, 1.0-dozens of nm is only arranged, so the field emission strengthening effect than the cone emitter of spindt type is better, also can realize identical effect in the electromagnetic field of low electronics emission, therefore have power consumption little, produce the low advantage of unit price.Below in conjunction with the accompanying drawings with regard to the emission of present field and manufacture method thereof.
Fig. 1 is the existing sectional view that uses an embodiment of three electrode field emission apparatus of carbon nano-tube.As shown in the figure, silicon substrate 1 top is followed successively by impedance layer 2, insulating barrier 4 and electrode 5.The part of insulating barrier 4 and electrode 5 forms the hole after cooling off, again through pervaporation, form catalyst and shift metal level 3 on the impedance layer of bottom, hole.Whole silicon plate is heated to the 600-900 degree, and heat chemistry evaporation and plasma chemical evaporation by hydrocarbon gas only form carbon nano-tube 6 selectively on catalyst shifts metal level 3.
At this moment, owing to only form carbon nano-tube selectively on catalyst shifts metal level, so the area of catalyst transfer metal level is big more, the area of carbon nano-tube is also just big more.The area of carbon nano-tube increases, just can not concentrate by the electromagnetic field that electrode adds, so, the light beam of emitting electrons just scatters easily, the zone of electronics emission is also inhomogeneous, and simultaneously, only the possibility of launching at the peripheral situation generation electronics in the strongest hole of electromagnetic field is big, and, also be easy to generate electrode current and reveal because this asymmetric electromagnetic field distributes.
In order to address the above problem, the another kind of generation has the more carbon nano-tube three electrode field emitting structurals of mechanical type structure.
Fig. 2 is the sectional view that has the another one embodiment of the three electrode field emission apparatus that use carbon nano-tube now.As shown in the figure, on first substrate 10, by be formed with the negative electrode 11 of certain intervals entirely with the method for silk screen printing or film, afterwards carbon nanotube powder and adhesive and conductibility filler are mixed and made into pulpous state, adopt the mode of silk screen printing to spread upon on negative electrode 11 surfaces, to again the binder removal in the smear layer at last, just exposed carbon nano-tube 12 on negative electrode top like this.
On the object of above-mentioned negative electrode and formation carbon nano-tube, formed metal gate, be used as electrode with certain intervals.At this moment, the metal gate that is used as electrode should separate proper alignment with the zone that forms carbon nano-tube.
The positive pole 15 and the luminescent layer 16 that on second substrate 14 indium and tin oxide film are formed laminate, and separated by a distance; On the material of above-mentioned formation electrode 13, also leave certain intervals, and above-mentioned luminescent layer and above-mentioned carbon nano-tube 12 are arranged at regular intervals.
By explanation to the another one embodiment of the existing three electrode field emission apparatus that use carbon nano-tube, as can be seen in the another kind of mode of the existing three electrode field emission apparatus that use carbon nano-tube, to leave certain intervals as the difficulty relatively of the arrangement between the negative electrode 11 of the metal gate of electrode and medelling.That is to say that the electrode that is formed by metal gate should drive each pixel respectively, this just needs minimum metal object position and neighboring pixels that certain interval is arranged, and assemble very difficulty like this, and accuracy is not high yet.Because the electronics that discharges from carbon nano-tube has most all to reveal to fall from the electrode of metal gate, the efficient of emitting electrons will reduce greatly simultaneously.
In order to address the above problem, people propose some new structures imaginations, as with the position of sound production of electrode on the position with negative electrode, or on more low position, form carbon nano-tube etc.
Fig. 3 is the sectional view of the field emission apparatus of the existing electrode that uses carbon nano-tube (under gate) structure of being positioned at the negative electrode below.As shown in the figure, the examples of implementation among Fig. 3 are to realize by the mode that the electrode to the carbon nano-tube bottom applies electric field that can emitting electrons.On glass substrate 20, form electrode 21, on above-mentioned electrode, be followed successively by insulating barrier 22, negative electrode 23, on negative electrode 23, adopt the mode of silk screen printing to smear the mixed pulp of carbon nano-tube afterwards, again adhesive in the mixed pulp of the carbon nano-tube of smearing is removed, just formed carbon nano-tube 24.Use the production of this structure simple, compare with existing alternate manner, the area that is suitable for is bigger.
But kind electrode is positioned at the structure of negative electrode below requires the turning-on voltage height, after under the effect of positive pole of formation, abnormal luminous phenomenon appears easily.
Fig. 4 is the sectional view that has the field emission apparatus of coplane (coupler) structure that uses carbon nano-tube now.As shown in the figure, above glass substrate 30, electrode 33 and negative electrode 34 are positioned at same one deck.This structure makes the required turning-on voltage of from carbon nano-tube 35 emitting electrons low, has reduced driving voltage, and this is the advantage place of this structure.But its requirement will place on the same plane with negative electrode 34 through the electrode cable 31 of negative electrode 34 belows, the program that just needs cooling in addition, form through hole on insulating barrier 32, the part of electrode cable 31 is exposed, this part then needs metallics to fill.
Fig. 5 a to Fig. 5 b is a field emission apparatus sectional view of making co-planar configuration in the prior art.As shown in the figure, produce the program complexity of through hole.
Shown in Fig. 5 a, at first on glass substrate 30, form conductive layer, with the pattern formation electrode cable layer 31 of conductive layer.Above-mentioned electrode cable layer plays connection electrode.
Shown in Fig. 5 b, on above-mentioned cambial whole aspect, form insulating barrier 32 afterwards,, need on above-mentioned insulating barrier 32, form through hole by cooling for exposing a part of electrode cable 31.
Back again shown in Fig. 5 c, formation conductive layer on above-mentioned structure, and filling vias; After forming conductive layer once more, form electrode 33 and negative electrode 34 and the cathode wire that is connected with electrode cable 31 by through hole with this pattern.
Shown in Fig. 5 d, form carbon nano-tube 35 by screen printing mode at last on negative electrode 34 tops.
The as above explanation that pure sectional view is launched in the field of making co-planar configuration in the prior art, the preparation method of this carbon nano-tube field emission sub-prime need could realize the structure of electrode and negative electrode coplane by through hole with connection electrode lead and electrode.In the production process, the technology difficulty of preparation through hole is big, and the production effect of integral body is brought certain influence.
(3) summary of the invention
As mentioned above, in existing technology, the method for utilizing co-planar configuration to produce carbon nano-tube field emission sub-prime need could realize the structure of electrode and negative electrode coplane by through hole with connection electrode lead and electrode.In the production process, the technology difficulty of preparation through hole is big, and the integral production effect is brought certain influence.
The objective of the invention is for solving existing problem in the above-mentioned prior art, a kind of field emission apparatus and manufacture method thereof are provided, by electrode cable and negative electrode are positioned over in one deck, form insulating barrier in the zone that the cathode wire that forms in established electrode cable and back is reported to the leadship after accomplishing a task mutually, in the method for stating the cathode wire that formation is connected with above-mentioned negative electrode on the insulating barrier mutually, reached and simplified a purpose of emission manufacture process again.
For reaching purpose of the present invention, field emission apparatus of the present invention is by constituting with the lower part: form electrode bus bars wherein a kind of in electrode, negative electrode and electrode or the negative electrode on glass substrate; The insulating barrier that in above-mentioned electrode and part that negative electrode is reported to the leadship after accomplishing a task mutually, forms selectively; Through above-mentioned insulating barrier top, link to each other with an electrode or a negative electrode part, wherein a kind of conductive electrode bus that does not form electrode bus bars in electrode or the negative electrode; The carbon nano-tube that on above-mentioned negative electrode, forms.
Simultaneously, the manufacture method step of field emission apparatus of the present invention may further comprise the steps: form one deck conductive material film on glass substrate, electrode and negative electrode are formed at same one deck, and wherein a kind of electrode bus bars is formed at above-mentioned with the step on one deck in electrode or the negative electrode; The step of formation insulating barrier on the electrode bus bars of another kind that forms afterwards and part that the electrode bus bars that has formed is reported to the leadship after accomplishing a task mutually; Through above-mentioned insulating barrier top, link to each other with an electrode or a negative electrode part, wherein a kind of conductive electrode bus formation step that does not form electrode bus bars in electrode or the negative electrode; The step of the carbon nano-tube that on above-mentioned negative electrode, forms.
Effect of the present invention:
Aforesaid foundation field emission apparatus of the present invention and preparation method thereof is by electrode and negative electrode are formed on the same plane, the part of reporting to the leadship after accomplishing a task mutually at above-mentioned electrode and negative electrode forms insulating barrier selectively by screen printing mode, the structure that forms the conductive electrode bus again on above-mentioned insulating barrier replaces through hole, realize electrode cable and the cathode wire mutually insulated that to report to the leadship after accomplishing a task mutually, saved the complicated process that process for cooling forms through hole of passing through like this, simplified production procedure, produce the field emission of coplanar structure, the production cost that reduces has improved production efficiency.
For further specifying above-mentioned purpose of the present invention, design feature and effect, the present invention is described in detail below with reference to accompanying drawing.
(4) description of drawings
Fig. 1 is the sectional view that has an embodiment of the three electrode field emission apparatus that use carbon nano-tube now.
Fig. 2 is the sectional view that has the another one embodiment of the three electrode field emission apparatus that use carbon nano-tube now.
Fig. 3 is the sectional view of the field emission apparatus of the existing electrode that uses carbon nano-tube (unde rgate) structure of being positioned at the negative electrode below.
Fig. 4 is the sectional view that has the field emission apparatus of the co-planar configuration of using carbon nano-tube now.
Fig. 5 a to Fig. 5 b is a field emission apparatus sectional view of making co-planar configuration in the prior art.
Fig. 6 a to Fig. 6 b is according to embodiments of the invention, makes the sectional view of field emission apparatus method
Fig. 7 is the side view in a cross section of the embodiment of the invention.
The symbol description of major part in the accompanying drawing:
40: glass substrate 41: electrode
42: negative electrode 43: insulating barrier
44: cathode wire 45: carbon nano-tube
(5) embodiment
Below in conjunction with accompanying drawing, be elaborated with regard to an embodiment of field emission apparatus of the present invention and manufacture method thereof.
Fig. 6 a to Fig. 6 b is according to embodiments of the invention, makes the sectional view of field emission apparatus method.
As shown in the figure, the preparation process of field emission apparatus may further comprise the steps: the step that forms electrode 41, electrode cable and negative electrode 42 on glass substrate 40 simultaneously; Electrode cable crosses the position of above-mentioned formation negative electrode and exposes a part of negative electrode 42, forms the step of insulating barrier 43 in the part of reporting to the leadship after accomplishing a task mutually; Form the step make the cathode wire 44 that negative electrode 42 links to each other with other parts on insulating barrier 43 tops; Form the step of carbon nano-tube 45 on negative electrode top.
To being described in detail as follows of above-mentioned steps:
Shown in Fig. 6 a, at first with behind the metal evaporated film on the glass substrate 40, it is formalized by the technological process of cooling off, form electrode cable, electrode 41 and negative electrode 42 simultaneously.In the present embodiment, what form at grade has electrode 41, negative electrode 42 and an electrode cable, but it should be noted that also and can on the same plane that forms electrode and negative electrode, form cathode wire, that is, can there be wherein a kind of electrode bus bars of electrode or negative electrode on the same plane of electrode in the present invention and negative electrode.In the prior art, form electrode cable in the bottom that forms electrode and cathode layer in advance, link to each other by through hole again, and the present invention forms the electrode of reporting to the leadship after accomplishing a task in advance in the bottom that forms electrode and cathode layer, but just formed the wiring of reporting to the leadship after accomplishing a task afterwards.
Shown in Fig. 6 b, for forming the cathode wire of reporting to the leadship after accomplishing a task mutually,, lay electrode cable according to the position of formation negative electrode with the above-mentioned electrode cable that has formed, they are reported to the leadship after accomplishing a task mutually, the situation of reporting to the leadship after accomplishing a task according to the position forms insulating barrier 43 on the position that electrode cable passes through.The technology that forms insulating barrier by the mode that adopts silk screen printing is simple, and the part of the negative electrode 41 by insulating barrier is exposed in this case.Certainly, also can form insulating barrier by another kind of method, promptly the top of the electrode cable in the zone that the cathode wire 44 that forms in the back passes through stays in enough amplitude space and forms insulating barrier.The situation that forms electrode cable on the plane that forms electrode 41 and negative electrode 42 at the same time had been described in detail in detail in Fig. 6 a, if it is as the same to form the situation that forms cathode wire on the plane of electrode and negative electrode at the same time, be the formation electrode cable, can in the part of cathode wire that has formed, form insulating barrier by the zone.
Shown in Fig. 6 c, form the conductive electrode bus by screen printing mode on insulating barrier 43 tops of above-mentioned formation.By insulating barrier, above-mentioned electrode cable with its cathode wire of reporting to the leadship after accomplishing a task mutually 44 mutually insulateds, simultaneously cathode wire 44 plays the effect of the bus that is connected with the part of above-mentioned negative electrode 42.
Shown in Fig. 6 d, on above-mentioned negative electrode, form carbon nano-tube 45.
Fig. 7 is the side view in Fig. 6 d A-A ' cross section.Can be from finding out structural feature of the present invention here.On above-mentioned glass substrate 40, form electrode cable, electrode 41 and negative electrode 42 simultaneously.The bus-structured cathode wire 44 that links to each other with above-mentioned negative electrode 42 insulate with electrode 41 and electrode cable under the effect of the insulating barrier 43 that forms on the above-mentioned electrode cable.Above-mentioned insulating barrier 43 exposes the part of negative electrode, and above-mentioned cathode wire 44 links to each other with above-mentioned negative electrode 42.Perhaps only on electrode cable and zone that cathode wire is reported to the leadship after accomplishing a task mutually, form insulating barrier.
As mentioned above, do not need to produce in addition through hole, only need to adopt simple screen printing mode according to field emission apparatus of the present invention and manufacture method thereof, produce the field emission apparatus of coplanar structure, simplify preparation flow greatly, be suitable for volume production, improved performance and output.
Those of ordinary skill in the art will be appreciated that, above embodiment is used for illustrating the present invention, and be not to be used as limitation of the invention, as long as in connotation scope of the present invention, all will drop in the scope of claims of the present invention variation, the modification of the above embodiment.
Claims (5)
1, a kind of field emission apparatus is characterized in that comprising with the lower part:
On glass substrate, form electrode bus bars wherein a kind of in electrode, negative electrode and electrode or the negative electrode;
The insulating barrier that in described electrode and part that negative electrode is reported to the leadship after accomplishing a task mutually, forms selectively;
Through described insulating barrier top, link to each other with electrode or negative electrode, wherein a kind of conductive electrode bus that does not form electrode bus bars in electrode or the negative electrode;
The carbon nano-tube that on described negative electrode, forms.
2, field emission apparatus as claimed in claim 1 is characterized in that:
In described field emission apparatus, the electrode that is arranged in one deck is connected with one deck described with electrode cable, and described negative electrode is connected with the negative busbar on the top of passing through the insulating barrier that forms in the last subregion of described electrode bus bars.
3, a kind of manufacture method of field emission apparatus is characterized in that comprising following steps:
Behind the metal evaporated film on the glass substrate, by the technological process of cooling off it is formalized, form the step of electrode cable, electrode and negative electrode simultaneously;
In established wiring zone, the part that the wiring of another kind that forms in established wiring and back is reported to the leadship after accomplishing a task mutually forms the step of insulating barrier;
By described insulating barrier top, the step of the conductive electrode bus that the electrode with also not forming wiring of formation links to each other;
Form the step of carbon nano-tube on negative electrode top.
4, the manufacture method of field emission apparatus as claimed in claim 3 is characterized in that:
Described insulating barrier and described conductive electrode bus form by screen printing mode.
5, the manufacture method of field emission apparatus as claimed in claim 3 is characterized in that:
In the described step that on glass substrate, forms electrode and negative electrode simultaneously, comprise the electrode electrode bus bars that forms electrode, be connected at grade with electrode and for make the field luminous with the be separated by process of the negative electrode established of electrode;
The step of described formation insulating barrier comprises according to the position that produces negative electrode, can make the insulation of an electrode electrode bus bars part and expose on the zone of a part of negative electrode, with the process of megohmite insulant by the method formation insulating barrier of silk screen printing;
On the top of the insulating barrier of described formation, the cathode electrode that can be connected that forms with the method for silk screen printing with negative electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410054356 CN1747102A (en) | 2004-09-08 | 2004-09-08 | Field emitter and production thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410054356 CN1747102A (en) | 2004-09-08 | 2004-09-08 | Field emitter and production thereof |
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| CN1747102A true CN1747102A (en) | 2006-03-15 |
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| CN 200410054356 Pending CN1747102A (en) | 2004-09-08 | 2004-09-08 | Field emitter and production thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7990042B2 (en) | 2008-03-19 | 2011-08-02 | Tsinghua University | Field emission display |
| US8007336B2 (en) | 2008-01-11 | 2011-08-30 | Tsinghua University | Field emission display device |
| US8110975B2 (en) | 2007-12-19 | 2012-02-07 | Tsinghua University | Field emission display device |
-
2004
- 2004-09-08 CN CN 200410054356 patent/CN1747102A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8110975B2 (en) | 2007-12-19 | 2012-02-07 | Tsinghua University | Field emission display device |
| US8007336B2 (en) | 2008-01-11 | 2011-08-30 | Tsinghua University | Field emission display device |
| US7990042B2 (en) | 2008-03-19 | 2011-08-02 | Tsinghua University | Field emission display |
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